Target changing tool for magnetron sputtering coating equipment

Abstract

The invention relates to the field of coating, and provides a magnetron sputtering coating equipment target changing tool which comprises a first mounting assembly, a lifting translation assembly, a second mounting assembly and a first adjusting assembly, and the lifting translation assembly is connected with the first mounting assembly; the second mounting assembly at least comprises a base, a rotating plate and a clamping assembly, the clamping assembly is used for clamping a target material, the clamping assembly is arranged on the rotating plate in a sliding mode, one end of the rotating plate is hinged to the base, and the base is connected with the first mounting assembly; the first adjusting assembly is connected with the rotating plate and used for driving the rotating plate to rotate. The problems that the target replacing efficiency is low and potential safety hazards exist are solved, the rotating plates are driven to rotate through the first adjusting assembly, when the base inclines, the rotating plates can still be arranged in the set direction, and it is ensured that the target can be accurately conveyed to the preset installation position.

Description

Technical Field

[0001] The present application relates to the field of film coating, and in particular to a target changing tool for magnetron sputtering film coating equipment. Background Art

[0002] The magnetron sputtering winding coating equipment requires a large amount of metal targets when working, and the metal targets are installed in the vacuum chamber. The metal targets need to be replaced regularly, and currently they are usually moved to the installation position in the vacuum chamber by manual or hoisting equipment.

[0003] However, the current vacuum coating industry, especially the composite current collector industry, is mostly equipped with dual coating drums or more coating drums. Such equipment often requires 20 or more cylindrical coating targets. Moreover, the current equipment has a coating width of more than 1400mm, the width of the target can often reach more than 2 meters, and the weight of the target exceeds 100kg. In this way, it is very difficult to manually lift the target into the vacuum chamber and change the target. A dual-drum coating equipment requires the replacement of more than 20 targets, which often takes 2-3 working days to complete. During the target replacement process, the target may fall and injure people or damage the equipment. It is not only inefficient, but also dangerous. Even if hoisting equipment is used for hoisting, manual participation is generally required to perform some work such as straightening the target and preventing shaking, and there is still a risk of personal injury. Moreover, many vacuum chambers currently have openings on the side, and the hoisting method is not convenient for the target to enter the vacuum chamber. Summary of the invention

[0004] In order to solve the problems of low target changing efficiency and potential safety hazards, the present application provides a target changing tool for magnetron sputtering coating equipment.

[0005] The target changing tool of a magnetron sputtering coating equipment provided in the present application adopts the following technical solution: A target changing tool for magnetron sputtering coating equipment, comprising: First install the components.

[0006] The lifting and translation assembly is connected to the first mounting assembly.

[0007] The second mounting assembly at least comprises a base, a rotating plate and a clamping assembly, wherein the clamping assembly is used to clamp the target material, the clamping assembly is slidably arranged on the rotating plate, one end of the rotating plate is hinged to the base, and the base is connected to the first mounting assembly.

[0008] The first adjusting component is connected to the rotating plate and is used to drive the rotating plate to rotate.

[0009] By adopting the above solution, the target material can be transported quickly, the target changing efficiency can be improved, and the safety hazard can be reduced. In addition, the first adjustment component can also drive the rotating plate to rotate, so that even if the base is bent, the rotating plate can still be arranged along the preset direction to ensure that the transport of the target material is not affected.

[0010] Optionally, a limiting groove is provided on one side of the rotating plate close to the base, and a limiting portion is provided at the notch of the limiting groove.

[0011] The first adjustment component includes a first adjustment member and a limiting block.

[0012] The first adjusting member is movably connected to the base.

[0013] The limiting block is arranged in the limiting groove and connected to the first adjusting member, and the limiting portion is used for limiting the limiting block.

[0014] By adopting the above solution, the rotating plate can be driven to rotate relative to the base only by moving the first adjusting member relative to the base, and the driving method is simple and reliable.

[0015] Optionally, a receiving groove is provided on the base; when the rotating plate is parallel to the bottom wall of the receiving groove, the rotating plate abuts against the bottom wall of the receiving groove.

[0016] By adopting the above solution, when the rotating plate is parallel to the bottom wall of the accommodating groove, the base can provide good support for the rotating plate.

[0017] Optionally, the target changing tool of the magnetron sputtering coating equipment further includes a second adjustment component.

[0018] The second adjustment assembly includes a second adjustment member and an abutment block.

[0019] The second adjusting member is movably connected to the base.

[0020] The abutment block abuts against a side of the rotating plate close to the base, and the abutment block is connected to the second adjusting member.

[0021] By adopting the above solution, the abutment block can support the rotating plate when the rotating plate is out of contact with the bottom wall of the accommodating groove, thereby preventing the rotating plate from bending.

[0022] Optionally, the clamping assembly includes a clamping seat, a clamping member and a locking member.

[0023] The clamping seat is slidably connected to the rotating plate, and a clamping groove for accommodating the target material is provided on the clamping seat.

[0024] The clamping member is hinged to the clamping seat, and the clamping member is used to limit the position of the target material located in the clamping groove.

[0025] The locking member is used to lock the clamping seat and the clamping member.

[0026] By adopting the above solution, the clamping member and the clamping seat can clamp the target material, and the clamping method is simple and convenient; the locking member prevents the target material from escaping from the containing groove by locking the clamping seat and the clamping member.

[0027] Optionally, the target changing tool of the magnetron sputtering coating equipment further comprises an anti-slip part, and the anti-slip part is arranged on a side of the clamping part close to the clamping groove, and the position of the anti-slip part relative to the clamping part is adjustable.

[0028] By adopting the above solution, the anti-slip member can prevent the target material from sliding relative to the clamping assembly by contacting the target material; the anti-slip member can adapt to targets of different specifications by adjusting the distance between the anti-slip member and the clamping member.

[0029] Optionally, the first mounting assembly includes a base, a cylinder and a piston, one end of the cylinder is connected to the base, and one end of the piston is inserted into the cylinder and slidably connected to the cylinder.

[0030] The lifting and translation assembly includes a translation drive unit and a lifting and translation drive unit.

[0031] The translation driving unit is connected to the base.

[0032] The lifting drive unit is connected to the piston and is used to drive the piston to slide relative to the cylinder. The second mounting assembly is arranged on the piston.

[0033] By adopting the above solution, the horizontal position and height of the target material can be quickly changed.

[0034] Optionally, the target changing tool of the magnetron sputtering coating equipment further includes a first rotation driving component; The first rotation driving assembly is connected to the piston and is used to drive the piston to rotate relative to the cylinder, thereby changing the direction of the target material.

[0035] By adopting the above solution, the first rotation drive assembly can quickly adjust the direction of the target material to a preset installation direction.

[0036] Optionally, the target changing tool of the magnetron sputtering coating equipment also includes a second rotation driving component.

[0037] The second rotation driving assembly is connected to the base and is used to drive the base to rotate, thereby changing the relative position of the base and the target material.

[0038] By adopting the above solution, the second rotary drive assembly can adjust the relative position of the base and the target material to avoid the base interfering with the installation process of the target material.

[0039] The present application clamps and fixes the target material through a clamping assembly; adjusts the position, direction and relative orientation of the target material to the base through a lifting and translation assembly, a first rotation drive assembly and a second rotation drive assembly; finally, drives the clamping assembly to slide relative to the base to transport the target material to a preset installation position in the vacuum chamber, thereby solving the problems of low target changing efficiency and potential safety hazards. Furthermore, by driving the rotating plate to rotate through the first adjustment assembly, the rotating plate can still be arranged along the set direction when the base is tilted, thereby ensuring that the target material can be accurately transported to the preset installation position. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic diagram of the target changing tool of the magnetron sputtering coating equipment provided by the present application when it is working.

[0041] Figure 2 It is a three-dimensional structural schematic diagram of the target changing tool of the magnetron sputtering coating equipment provided in the present application.

[0042] Figure 3 This application provides Figure 2 A magnified schematic diagram of center A.

[0043] Figure 4 It is a front view of the target changing tool for the magnetron sputtering coating equipment provided in this application.

[0044] Figure 5 This application provides Figure 4 A magnified schematic diagram of point B in the middle.

[0045] Figure 6 It is a structural schematic diagram of an embodiment of a clamping assembly of a target changing tool of a magnetron sputtering coating equipment provided in the present application.

[0046] Figure 7 It is a structural schematic diagram of another embodiment of the clamping assembly of the target changing tool of the magnetron sputtering coating equipment provided in the present application.

[0047] Description of reference numerals: 1. First mounting assembly; 11. Base; 12. Cylinder; 13. Piston; 2. Second mounting assembly; 21. Connector; 22. Base; 23. Rotating plate; 231. Limiting groove; 232. Limiting portion; 24. Clamping assembly; 241. Clamping seat; 242. Clamping member; 243. Locking member; 244. Anti-slip member; 25. Slide rail; 3. Lifting and translation assembly; 31. Translation drive unit; 311. Guide rail; 312. First motor; 313. First lead screw; 32. Lifting and translation drive unit; 321. Second motor; 322. Second lead screw; 323. First mounting plate; 324. Second mounting plate; 4. first rotary drive assembly; 41. third motor; 42. first gear; 43. arc-shaped rack; 5. Second rotary drive assembly; 51. Fourth motor; 52. Second gear; 53. Third gear; 6. First adjustment component; 61. First adjustment member; 62. Limit block; 7. Second adjustment assembly; 71. Second adjustment member; 72. Abutment block; 200. Target material; 300. Vacuum chamber. DETAILED DESCRIPTION

[0048] The following is combined with Figure 1-7 This application is described in further detail.

[0049] like Figure 1 , Figure 2 and Figure 4 As shown, an embodiment of the present application discloses a target changing tool for a magnetron sputtering coating equipment, comprising: a first mounting component 1, a second mounting component 2, a lifting and translation component 3, a first rotation drive component 4, a second rotation drive component 5 and a first adjustment component 6.

[0050] like Figure 2 As shown, specifically, the first mounting assembly 1 includes a base 11, a cylinder 12 and a piston 13. The base 11 can be a horizontally arranged plate, and the material can be stainless steel. One end of the cylinder 12 is connected to the base 11, and the cylinder 12 is vertically arranged on the top of the base 11. The piston 13 is coaxially arranged with the cylinder 12, and one end of the piston 13 is inserted into the cylinder 12, and the piston 13 is slidably connected with the cylinder 12.

[0051] like Figure 3 and Figure 4 As shown, the second installation assembly 2 includes a connecting head 21 , a base 22 , a rotating plate 23 and a clamping assembly 24 .

[0052] The connector 21 is connected to the piston 13. The base 22 may be in the shape of an elongated strip, one end of the long side direction of the base 22 is rotatably connected to the connector 21, and the long side direction of the base 22 is perpendicular to the axial direction of the piston 13. The base 22 is provided with a receiving groove, the rotating plate 23 is arranged in the receiving groove, and one end of the rotating plate 23 is hinged to the groove wall of the receiving groove, so that the rotating plate 23 can rotate relative to the base 22, thereby changing the angle between the rotating plate 23 and the base 22.

[0053] The rotating plate 23 is provided with a slide rail 25, and the clamping assembly 24 is slidably connected to the rotating plate 23 through the slide rail 25. The clamping assembly 24 is used to clamp the target material 200. By driving the clamping assembly 24 to slide along the slide rail 25, the target material 200 can be driven to move.

[0054] like Figure 2 and Figure 3 As shown, the lifting and translation assembly 3 includes a translation drive unit 31 and a lifting and translation drive unit 32 .

[0055] The translation drive unit 31 includes a guide rail 311, a first motor 312 and a first lead screw 313. The base 11 is slidably disposed on the guide rail 311. The first lead screw 313 is rotatably connected to the guide rail 311, a nut of the first lead screw 313 is connected to the base 11, and the first motor 312 is connected to the first lead screw 313. The first lead screw 313 is driven to rotate by the first motor 312, so that the first mounting assembly 1 moves along the extension direction of the guide rail 311. Since the second mounting assembly 2 is connected to the piston 13, the target material 200 is clamped by the clamping assembly 24 of the second mounting assembly 2. Therefore, when the first mounting assembly 1 moves, the target material 200 also moves synchronously.

[0056] The lifting drive unit 32 includes a second motor 321, a second lead screw 322, a first mounting plate 323 and a second mounting plate 324. The first mounting plate 323 is disposed at one end of the piston 13 away from the cylinder 12, and the second mounting plate 324 is disposed on the cylinder 12. The second motor 321 is connected to the second lead screw 322, the second lead screw 322 is rotatably connected to the first mounting plate 323, and the nut of the second lead screw 322 is connected to the second mounting plate 324. The second motor 321 drives the second lead screw 322 to rotate, so that the piston 13 slides relative to the cylinder 12, thereby lifting and lowering the target 200.

[0057] Furthermore, the second mounting plate 324 is sleeved on the cylinder 12 and is rotatably connected to the cylinder 12. The first rotary drive assembly 4 includes a third motor 41, a first rotating shaft, a first gear 42 and an arc-shaped rack 43.

[0058] The first gear 42 is sleeved on the first rotating shaft, and the third motor 41 is connected to the first rotating shaft. The arc-shaped rack 43 is arranged on the second mounting plate 324, and the arc-shaped rack 43 is meshed with the first gear 42. The third motor 41 drives the first gear 42 to rotate, thereby rotating the second mounting plate 324, and finally driving the first mounting plate 323 to rotate together with the piston 13. By rotating the piston 13, the direction of the target 200 can be changed, so that the target 200 can be adjusted to a set installation direction.

[0059] The second rotation drive assembly 5 includes a fourth motor 51, a second rotating shaft, a second gear 52 and a third gear 53. The second gear 52 is sleeved on the second rotating shaft, the third gear 53 is sleeved on the base 22, the second gear 52 is meshed with the third gear 53, and the fourth motor 51 is connected to the second rotating shaft. The second rotating shaft is driven to rotate by the fourth motor 51, which can drive the base 22 to rotate, thereby changing the relative position of the base 22 and the target 200. One of the specific uses is that when the base 22 and the clamping assembly 24 and other components drive the target 200 to move to the inside of the vacuum chamber 300, due to the limited internal space of the vacuum chamber 300, the base 22 and the clamping assembly 24 and other components may interfere with the replacement and installation of the target 200. The second rotating drive assembly 5 drives the base 22, the clamping assembly 24 and the target material 200 to rotate, thereby changing the relative positions of the base 22, the clamping assembly 24 and other components and the target material 200, thereby preventing the base 22, the clamping assembly 24 and other components from interfering with the replacement and installation process of the target material 200.

[0060] For example, when the target material 200 is installed at the bottom of the vacuum chamber 300, the base 22, the clamping assembly 24 and the target material 200 can be driven to rotate and the base 22, the clamping assembly 24 and the target material 200 can be moved above the target material 200 to avoid interference with the installation of the target material 200.

[0061] The following is a brief description of the installation process of the target material 200: First, the target material 200 is placed in the clamping position of the clamping assembly 24 so that the target material 200 is clamped; then, the first rotary drive assembly 4 rotates by driving the piston 13, thereby adjusting the direction of the target material 200 to be parallel to the preset installation direction; thereafter, the lifting and translation assembly 3 drives the target material 200 to lift and translate, and the second rotary drive assembly 5 adjusts the relative orientation of the base 22 and the target material 200, thereby further adjusting the position of the target material 200; finally, the clamping assembly 24 is driven to slide relative to the slide rail 25 to transport the target material 200 to the installation position for installation.

[0062] Furthermore, due to the heavy weight of the target 200, the base 22 may be bent under pressure at the connection with the connector 21 during long-term use. Once the base 22 is bent and tilted, the target 200 may be biased in a preset direction, affecting the installation of the target 200.

[0063] like Figure 4 and Figure 5As shown, an embodiment of the present application provides a first adjustment component 6 connected to the rotating plate 23, and the first adjustment component 6 can drive the rotating plate 23 to rotate relative to the base 22, so that when the base 22 is bent and tilted, the rotating plate 23 can change the direction of the slide rail 25 by rotating, thereby ensuring that the target material 200 is set along a preset direction.

[0064] For example, when the base 22 is not bent, it is horizontally set, and the rotating plate 23 is also horizontally set in the receiving groove and parallel to the bottom wall of the receiving groove. When the rotating plate 23 is parallel to the bottom wall of the receiving groove, the rotating plate 23 can abut against the bottom wall of the receiving groove, so that the base 22 can provide good support for the rotating plate 23.

[0065] When the connection portion between the base 22 and the connector 21 is bent, the base 22 is tilted. At this time, the rotating plate 23 can be driven to rotate by the first adjustment component 6, so as to adjust the rotating plate 23 to a horizontal state, ensuring that the target material 200 can be arranged along a preset direction.

[0066] Specifically, a limiting groove 231 is provided on one side of the rotating plate 23 close to the base 22. The first adjustment assembly 6 includes a first adjustment member 61 and a limiting block 62. The first adjustment member 61 can be a bolt, and the first adjustment member 61 is threadedly connected to the base 22. The limiting block 62 is arranged in the limiting groove 231 and connected to the first adjustment member 61. By screwing the first adjustment member 61 and changing the position of the limiting block 62, the rotating plate 23 can be driven to rotate. A limiting portion 232 is provided at the notch of the limiting groove 231. The limiting portion 232 is used to limit the limiting block 62, thereby preventing the limiting block 62 from being separated from the limiting groove 231.

[0067] like Figure 4 and Figure 5 As shown, in some embodiments, the target changing tool of the magnetron sputtering coating equipment further includes a second adjusting component 7 , and the second adjusting component 7 includes a second adjusting member 71 and an abutment block 72 .

[0068] The second adjusting member 71 may also be a bolt threadedly connected to the base 22 . The abutment block 72 is connected to the second adjusting member 71 .

[0069] When the rotating plate 23 rotates to disengage from the bottom wall of the accommodating groove, the second adjusting member 71 can be screwed to move the abutment block 72 to abut against the side of the rotating plate 23 close to the base 22 to prevent the rotating plate 23 from bending when there is no support from the base 22.

[0070] Furthermore, when the abutting block 72 abuts against the rotating plate 23 , the limiting block 62 and the limiting portion 232 also abut against each other, thereby preventing the rotating plate 23 from slightly moving relative to the first rotary drive assembly 4 and thus affecting the transportation of the target material 200 .

[0071] In addition, even if the rotating plate 23 is bent, the direction of the target 200 can be prevented from being deviated by replacing the rotating plate 23 with a new one.

[0072] like Figure 2 and Figure 6 As shown, in some embodiments, the clamping assembly 24 includes a clamping seat 241 , a clamping member 242 and a locking member 243 .

[0073] The clamping seat 241 is slidably connected to the rotating plate 23 , and a clamping groove for accommodating the target material 200 is provided on the clamping seat 241 .

[0074] The clamping member 242 is hinged to the clamping seat 241 , and the clamping member 242 can be rotated to the notch of the clamping groove to limit the target material 200 located in the clamping groove.

[0075] The locking member 243 is used to lock the clamping seat 241 and the clamping member 242. The locking method is not strictly limited. For example, the locking member 243 can be a locking bolt, and the clamping seat 241 and the clamping member 242 are both provided with threaded holes corresponding to the locking member 243. The clamping seat 241 and the clamping member 242 are connected by the locking member 243, so that the target material 200 is confined in the clamping groove.

[0076] like Figure 2 and Figure 7 As shown, further, the target changing tool of the magnetron sputtering coating equipment may also include an anti-slip part 244, which is arranged on the side of the clamping part 242 close to the clamping groove. The anti-slip part 244 close to the clamping groove increases the friction force by providing an anti-slip pad or the like. The anti-slip part 244 is used to abut against the target material 200 to prevent the target material 200 from sliding relative to the clamping assembly 24.

[0077] When the clamping assembly 24 is used to clamp only one specification of the target material 200, the anti-skid member 244 can abut against the clamping member 242 to enhance the pressure resistance. When the clamping assembly 24 needs to be able to clamp targets 200 of different specifications, the position of the anti-skid member 244 relative to the clamping member 242 can be adjusted to ensure that the anti-skid member 244 can abut against the target material 200. For example, an adjusting bolt threadedly connected to the clamping member 242 can be provided, and the adjusting bolt is rotatably connected to the anti-skid member 244. By turning the adjusting bolt, the anti-skid member 244 is driven to move, so that the anti-skid member 244 can abut against targets 200 of different specifications.

Claims

1. A target changing tool for magnetron sputtering coating equipment, characterized in that: include: A first mounting assembly (1); A lifting and translation assembly (3) connected to the first mounting assembly (1); A second mounting assembly (2), comprising at least a base (22), a rotating plate (23) and a clamping assembly (24), wherein the clamping assembly (24) is used to clamp the target material (200), the clamping assembly (24) is slidably disposed on the rotating plate (23), one end of the rotating plate (23) is hinged to the base (22), and the base (22) is connected to the first mounting assembly (1); The first adjustment component (6) is connected to the rotating plate (23) and is used to drive the rotating plate (23) to rotate.

2. The target changing tool for magnetron sputtering coating equipment according to claim 1, characterized in that: A limiting groove (231) is provided on one side of the rotating plate (23) close to the base (22), and a limiting portion (232) is provided at the notch of the limiting groove (231); The first adjustment component (6) comprises a first adjustment member (61) and a limit block (62); The first adjusting member (61) is movably connected to the base (22); The limiting block (62) is arranged in the limiting groove (231) and is connected to the first adjusting member (61); the limiting portion (232) is used to limit the limiting block (62).

3. The target changing tool for magnetron sputtering coating equipment according to claim 1, characterized in that: The base (22) is provided with a receiving groove; When the rotating plate (23) is parallel to the bottom wall of the containing groove, the rotating plate (23) abuts against the bottom wall of the containing groove.

4. The target changing tool for magnetron sputtering coating equipment according to claim 1, characterized in that: The target changing tool of the magnetron sputtering coating equipment further comprises a second adjustment component (7); The second adjustment assembly (7) comprises a second adjustment member (71) and an abutment block (72); The second adjusting member (71) is movably connected to the base (22); The abutment block (72) abuts against a side of the rotating plate (23) close to the base (22), and the abutment block (72) is connected to the second adjusting member (71).

5. The target changing tool for magnetron sputtering coating equipment according to claim 1, characterized in that: The clamping assembly (24) comprises a clamping seat (241), a clamping member (242) and a locking member (243); The clamping seat (241) is slidably connected to the rotating plate (23), and a clamping groove for accommodating the target material (200) is provided on the clamping seat (241); The clamping member (242) is hinged to the clamping seat (241), and the clamping member (242) is used to limit the position of the target material (200) located in the clamping groove; The locking member (243) is used to lock the clamping seat (241) and the clamping member (242).

6. The target changing tool for magnetron sputtering coating equipment according to claim 5, characterized in that: The target changing tool of the magnetron sputtering coating equipment further comprises an anti-slip part (244), wherein the anti-slip part (244) is arranged on a side of the clamping part (242) close to the clamping groove, and the position of the anti-slip part (244) relative to the clamping part (242) is adjustable.

7. The target changing tool for magnetron sputtering coating equipment according to claim 1, characterized in that: The first mounting assembly (1) comprises a base (11), a cylinder (12) and a piston (13); one end of the cylinder (12) is connected to the base (11); one end of the piston (13) is inserted into the cylinder (12) and is slidably connected to the cylinder (12); The lifting and translation assembly (3) comprises a translation drive unit (31) and a lifting and translation drive unit (32); The translation drive unit (31) is connected to the base (11); The lifting drive unit (32) is connected to the piston (13) and is used to drive the piston (13) to slide relative to the cylinder (12); the second mounting assembly (2) is arranged on the piston (13).

8. The target changing tool for magnetron sputtering coating equipment according to claim 7, characterized in that: The target changing tool of the magnetron sputtering coating equipment further comprises a first rotating driving component (4); The first rotation drive assembly (4) is connected to the piston (13) and is used to drive the piston (13) to rotate relative to the cylinder (12), thereby changing the direction of the target material (200).

9. The target changing tool for magnetron sputtering coating equipment according to claim 7, characterized in that: The target changing tool of the magnetron sputtering coating equipment further comprises a second rotation driving component (5); The second rotation drive assembly (5) is connected to the base (22) and is used to drive the base (22) to rotate, thereby changing the relative position of the base (22) and the target material (200).

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