Temperature control method and device and electronic equipment

Abstract

The invention provides a temperature control method and device and electronic equipment. The system comprises a refrigerating device and a circulating device. The refrigerating device comprises a compressor, a heat accumulator, an evaporator and cooling equipment; the method comprises the steps that the first circulation temperature of the inlet end of a second heat exchange channel in the evaporator is collected; according to the first circulating temperature, the first opening degree of a first channel and the second opening degree of a second channel in the three-way valve are adjusted, so that circulating liquid flowing out of the outlet end of the circulating device flows through the first channel and a second heat exchange channel in the heat accumulator according to a first proportion, and after being mixed with circulating liquid flowing through the second channel according to the second proportion, the circulating liquid flows into a second heat exchange channel in the evaporator, so that heating energy is accumulated for the heat accumulator through the circulating liquid of the first proportion, and the heating energy is used for heating the circulating liquid according to the temperature rising instruction. Therefore, the heating and cooling waiting time can be shortened, the production efficiency is improved, energy is saved, consumption is reduced, the equipment production cost is reduced, and equipment miniaturization is facilitated.

Description

Technical Field

[0001] The present application relates to the field of control technology, and in particular to a temperature control method, device and electronic equipment. Background Art

[0002] As an important equipment in the manufacturing process of semiconductor integrated circuits, semiconductor temperature control devices are required to provide the required temperature output in the etching process of integrated circuit manufacturing to control the temperature of the etching equipment process chamber. In actual use, semiconductor temperature control devices accurately control the temperature through cooling and heating links. The etching equipment process chamber requires different temperatures throughout the entire process to meet the production process. Generally, the temperature is switched periodically between -20°C and 90°C. This requires the semiconductor temperature control device to switch different temperatures according to process needs. When the process chamber temperature reaches the target value, the corresponding process production can be carried out. Waiting time will occur during the temperature rise and fall process. The traditional temperature control device has a long waiting time when switching from high temperature to low temperature, or from low temperature to high temperature, which affects the production efficiency. Summary of the invention

[0003] In view of this, the purpose of the present application is to provide a temperature control method, device and electronic equipment to solve the problem that the existing temperature control equipment has a long waiting time for temperature increase and decrease, which affects production efficiency.

[0004] The embodiment of the present application provides a temperature control method, which is applied to a temperature control system; the system includes a refrigeration device and a circulation device; the refrigeration device includes a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and a three-way valve is installed at the outlet end of the circulation device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected to the inlet end of the second heat exchange channel in the evaporator; the method includes:

[0005] collecting a first circulation temperature at an inlet end of a second heat exchange channel in the evaporator;

[0006] According to the first circulation temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve are adjusted, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator according to the first ratio, and is mixed with the circulating liquid flowing through the second channel according to the second ratio and then flows into the second heat exchange channel in the evaporator, so as to accumulate heating energy for the heat accumulator through the circulating liquid of the first ratio; wherein the heating energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load equipment is controlled by the circulating liquid.

[0007] Further, adjusting a first opening of the first channel and a second opening of the second channel in the three-way valve according to the first circulation temperature includes:

[0008] When the first circulation temperature is greater than a preset temperature threshold, the first opening degree of the first passage is increased and / or the second opening degree of the second passage is decreased.

[0009] Furthermore, the method further comprises:

[0010] When it is determined that the heat accumulator can no longer accumulate heating energy through the circulating fluid, the first channel is closed and the second channel is opened.

[0011] Further, it is determined that the heat accumulator can no longer accumulate heating energy through the circulating fluid by the following method:

[0012] Collecting a second circulation temperature at the outlet of the circulation device and a third circulation temperature at the outlet of the second heat exchange channel in the heat accumulator;

[0013] determining a temperature difference between the second cycle temperature and the third cycle temperature;

[0014] When the temperature difference is less than a preset threshold, it is determined that the heat accumulator can no longer accumulate heating energy through the circulating fluid.

[0015] Further, the cooling device includes a condenser and a subcooling liquid reservoir; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator through a first valve; the second path is connected to the inlet end of the second heat exchange channel in the condenser through a second valve and the outlet end of the first heat exchange channel in the heat accumulator, and is connected to the inlet end of the first heat exchange channel in the evaporator through a third valve and the outlet end of the first heat exchange channel in the heat accumulator; the outlet end of the second heat exchange channel in the condenser is respectively connected to the inlet end of the subcooling liquid reservoir, connected to the inlet end of the external cooling pipeline of the subcooling liquid reservoir through a fifth valve, and connected to the inlet end of the first heat exchange channel in the evaporator through a sixth valve; the outlet end of the subcooling liquid reservoir is connected to the inlet end of the first heat exchange channel in the evaporator through a fourth valve; the outlet end of the external cooling pipeline is connected to the inlet end of the compressor; the method also includes:

[0016] According to the received temperature increase instruction, closing the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve, and opening the second valve, the third valve and the first channel of the three-way valve;

[0017] When it is determined that the temperature of the circulating fluid rises to meet a preset condition, the first channel of the three-way valve is closed and the second channel of the three-way valve is opened; wherein the preset condition refers to that the temperature difference between the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator and the second circulation temperature at the outlet end of the circulation device is less than a preset threshold.

[0018] Furthermore, the method further comprises:

[0019] According to the received cooling instruction, the second valve, the third valve, the first channel of the three-way valve and the sixth valve are closed, and the first valve, the second channel of the three-way valve and the fourth valve are opened.

[0020] Furthermore, the method further comprises:

[0021] After the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator stores heating energy and the supercooling liquid storage device performs supercooling treatment on the refrigerant and stores it;

[0022] Among them, in the temperature control preparation stage, the second valve, the third valve, the first channel of the three-way valve and the fourth valve are closed, and the first valve and the second channel of the three-way valve are opened; and the opening of the sixth valve is adjusted according to the fourth circulation temperature at the inlet end of the circulation device.

[0023] Furthermore, the method further comprises:

[0024] Collecting a first refrigeration temperature at an inlet end of the compressor and a first refrigeration pressure at an outlet end of a first heat exchange channel in the evaporator;

[0025] determining a superheat difference between an actual superheat value and a preset superheat value according to the first refrigeration temperature and the first refrigeration pressure;

[0026] The opening of the fifth valve is adjusted according to the superheat difference.

[0027] The embodiment of the present application also provides a temperature control device, which is applied to a temperature control system; the system includes a refrigeration device and a circulation device; the refrigeration device includes a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and a three-way valve is installed at the outlet end of the circulation device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected to the inlet end of the second heat exchange channel in the evaporator; the device includes:

[0028] A collection module, used for collecting a first circulation temperature at an inlet end of a second heat exchange channel in the evaporator;

[0029] The regulating module is used to regulate the first opening of the first channel and the second opening of the second channel in the three-way valve according to the first circulation temperature, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator according to the first ratio, and then flows into the second heat exchange channel in the evaporator after mixing with the circulating liquid flowing through the second channel according to the second ratio, so as to accumulate heating energy for the heat accumulator through the circulating liquid of the first ratio; wherein the heat storage energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load equipment is controlled by the circulating liquid.

[0030] An embodiment of the present application also provides an electronic device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the steps of the temperature control method as described above are performed.

[0031] An embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the temperature control method as described above are executed.

[0032] The embodiment of the present application provides a temperature control method, device and electronic device. On the one hand, the heat accumulator stores heating energy, and the circulating fluid can be heated according to the temperature increase instruction to increase the heating speed; the cooling device can cool the refrigerant to increase the cooling speed, thereby reducing the waiting time for heating and cooling without increasing the power of the compressor, condenser and evaporator, improving production efficiency, saving energy and reducing consumption, reducing equipment production costs, and facilitating equipment miniaturization. On the other hand, by adjusting the opening of the three-way valve, the circulating fluid flowing out of the outlet of the circulation device flows through the second heat exchange channel to accumulate heating energy for the heat accumulator, thereby realizing energy recovery and further saving energy and reducing consumption.

[0033] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0035] Figure 1 A flow chart of a temperature control method provided in an embodiment of the present application is shown;

[0036] Figure 2 A schematic diagram of the structure of a temperature control system provided in an embodiment of the present application is shown;

[0037] Figure 3 A schematic diagram of the structure of a temperature control device provided in an embodiment of the present application is shown;

[0038] Figure 4 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0039] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, each other embodiment obtained by those skilled in the art without making creative work belongs to the scope of protection of the present application.

[0040] Research has found that semiconductor temperature control devices, as important equipment in the manufacturing process of semiconductor integrated circuits, are required to provide the required temperature output in the etching process of integrated circuit manufacturing to control the temperature of the etching equipment process chamber. In actual use, semiconductor temperature control devices accurately control the temperature through cooling and heating links. The etching equipment process chamber requires different temperatures throughout the entire process to meet the production process. Generally, the temperature is switched periodically between -20°C and 90°C. This requires the semiconductor temperature control device to switch different temperatures according to process needs. Only when the process chamber temperature reaches the target value can the corresponding process production be carried out. Waiting time will occur during the temperature rise and fall process. The traditional temperature control device has a long waiting time when switching from high temperature to low temperature, or from low temperature to high temperature, which affects production efficiency.

[0041] Based on this, an embodiment of the present application provides a temperature control method to solve the problem that the waiting time for heating and cooling is long in the existing temperature control equipment, which affects the production efficiency.

[0042] See also Figure 1 and Figure 2 , Figure 1 A flow chart of a temperature control method provided in an embodiment of the present application; Figure 2 This is a schematic diagram of a temperature control system provided in an embodiment of the present application. Figure 1 and Figure 2 As shown in, the temperature control method provided in the embodiment of the present application is applied to a temperature control system, which can be a controller ( Figure 2 The temperature control system further includes a refrigeration device 100 and a circulation device 200; the refrigeration device 100 includes a compressor 112, a heat storage device 111, an evaporator 115 and a cooling device 117. The controller can obtain the current operating parameters of each component by communicating with each component in the temperature control system, and send control instructions to each component to adjust the operating parameters of each component.

[0043] The refrigeration device 100 contains a refrigerant (coolant), and the temperature of the refrigerant can be controlled by controlling the refrigerant to flow through various components in the refrigeration device 100 to increase or decrease the temperature; the circulation device 200 contains a circulating liquid, and the circulating liquid continuously circulates in the circulation device 200 to increase or decrease the temperature of the load device 300; by controlling the refrigerant in the refrigeration device 100 to perform heat exchange with the circulating liquid in the circulation device 200, the temperature of the circulating liquid can be adjusted, and then the temperature of the load device 300 can be controlled.

[0044] Specifically, the outlet of the first heat exchange channel in the evaporator 115 is connected to the inlet of the compressor 112; the outlet of the compressor 112 includes two paths, the first path is connected to the inlet of the first heat exchange channel in the heat accumulator 111, and the second path and the outlet of the first heat exchange channel in the heat accumulator 111 are connected to the inlet of the cooling device 117 and the inlet of the first heat exchange channel in the evaporator 115; the outlet of the cooling device 117 is connected to the inlet of the first heat exchange channel in the evaporator 115. The compressor 112 sucks the low-temperature and low-pressure gaseous refrigerant in the evaporator 115 through mechanical energy, and then compresses it into a high-temperature and high-pressure gaseous refrigerant. This process increases the pressure and temperature of the refrigerant, allowing it to effectively release heat.

[0045] The outlet end of the second heat exchange channel in the evaporator 115 is connected to the inlet end of the circulation device 200, and a three-way valve 201 is installed at the outlet end of the circulation device 200. The first channel (i.e., channel 1-2) of the three-way valve 201 is connected to the inlet end of the second heat exchange channel in the heat accumulator 111, and the second channel (i.e., channel 1-3) and the outlet end of the second heat exchange channel in the heat accumulator 111 are jointly connected to the inlet end of the second heat exchange channel in the evaporator 115.

[0046] The temperature control method provided in the embodiment of the present application specifically includes:

[0047] S101 , collecting a first circulation temperature at an inlet end of a second heat exchange channel in the evaporator 115 .

[0048] In this step, the first circulation temperature T202 of the circulating liquid, that is, the temperature of the circulating liquid entering the second heat exchange channel of the evaporator 115 , can be collected through the temperature sensor 202 installed at the inlet end of the second heat exchange channel in the evaporator 115 .

[0049] S102. According to the first circulation temperature, adjust the first opening of the first channel and the second opening of the second channel in the three-way valve 201, so that the circulating liquid flowing out of the outlet end of the circulation device 200 flows through the first channel and the second heat exchange channel in the heat accumulator 111 according to the first ratio, and mixes with the circulating liquid flowing through the second channel according to the second ratio and then flows into the second heat exchange channel in the evaporator 115, so as to accumulate heating energy for the heat accumulator 111 through the circulating liquid of the first ratio; wherein the heating energy stored in the heat accumulator 111 is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load device 300 is controlled by the circulating liquid.

[0050] It should be noted that when the process chamber is running at high temperature, a heat load may be generated, causing the liquid outlet of the load device 300 (i.e., the outlet end of the circulation device 200) to flow out high-temperature circulating liquid. Therefore, in this step, the opening of the three-way valve 201 can be adjusted according to the temperature setting value and the temperature real-time value T202, so that a part of the circulating liquid enters the heat accumulator 111 through the 1-2 channel for heat exchange and cooling, and then mixes with the circulating liquid through the 1-3 channel and flows into the second heat exchange channel in the evaporator 115. Among them, the first opening and the second opening can be determined according to the temperature setting value and the temperature real-time value T202 using existing PID and other control algorithms; accordingly, the first ratio and the second ratio correspond to the first opening and the second opening of the three-way valve 201.

[0051] Specifically, when the first circulation temperature is greater than a preset temperature threshold, the first opening of the first channel is increased and / or the second opening of the second channel is decreased.

[0052] The opening of the valve refers to the degree of opening of the valve in the pipeline system, which is usually expressed as a percentage, that is, the degree of opening of the valve from fully closed to fully open, which is usually expressed as 0% (fully closed) to 100% (fully open). By increasing the first opening of the first channel and / or reducing the second opening of the second channel, more circulating fluid can enter the second heat exchange channel in the heat accumulator 111 from the 1-2 channel, thereby more effectively accumulating heating energy for the heat accumulator 111.

[0053] In this way, the circulating fluid entering the second heat exchange channel in the heat accumulator 111 through the 1-2 channel can heat the heat storage medium in the heat accumulator 111, thereby accumulating heating energy for the heat accumulator 111. In this way, the high-temperature circulating fluid caused by the heat load of the load device 300 is recovered to further achieve energy saving and consumption reduction.

[0054] The heating energy stored in the heat accumulator 111 can be used to heat the circulating fluid according to the subsequent heating instruction when a subsequent heating instruction is received. It is worth noting that the existing temperature control equipment can only heat up through the hot air discharged from the compressor and the heater device, and the heating speed is slow. If the heating speed is increased, the installed power of each component can only be increased, which brings about problems such as high energy consumption, high cost and is not conducive to the miniaturization of the equipment. In the embodiment of the present application, by adding a heat accumulator 111, the heat storage medium therein can first heat up the circulating fluid, and the circulating fluid that has been heated once by the heat accumulator 111 enters the evaporator 115 for a second heating, so that the circulating fluid can increase its temperature by continuously circulating and absorbing heat, thereby increasing the heating speed of the circulating fluid.

[0055] Furthermore, the temperature control method further includes: when it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating fluid, closing the first channel and opening the second channel.

[0056] Here, when it is determined that the circulating fluid flowing through the heat accumulator 111 can no longer accumulate heating energy for the heat accumulator 111, the first channel is closed and the second channel is opened, so that the circulating fluid directly enters the evaporator 115, and the circulating fluid is prevented from being reversely heated by the heat accumulator 111 again, resulting in unnecessary energy consumption. The determination method may include setting a preset accumulation time and a comparison temperature, etc.

[0057] In a possible implementation, it can be determined that the heat accumulator 111 can no longer store heating energy through the circulating fluid in the following manner:

[0058] Step 1: Collect the second circulation temperature at the outlet of the circulation device 200 and the third circulation temperature at the outlet of the second heat exchange channel in the heat accumulator 111.

[0059] Step 2: Determine the temperature difference between the second cycle temperature and the third cycle temperature.

[0060] Step 3: When the temperature difference is less than a preset threshold, it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating fluid.

[0061] Here, the second circulation temperature T204 of the circulating liquid can be collected through the temperature sensor 204 installed at the outlet end of the circulation device 200, and the third circulation temperature T203 of the circulating liquid can be collected through the temperature sensor 203 installed at the outlet end of the second heat exchange channel in the heat accumulator 111; compare the temperature difference TC=T204-T203 with the preset threshold TD; when TC≥TD, it is determined that the heat storage medium in the heat accumulator 111 can recover the heat of the circulating liquid, and when TC<TD, it is determined that the heat accumulator 111 can no longer accumulate heating energy through the circulating liquid. Here, TD represents the preset threshold value, which is an empirical value, such as 10℃-20℃, which can be set according to different temperature control systems, and this application does not impose any restrictions here.

[0062] For further information, refer back to Figure 2 , the cooling device 117 includes a condenser 113 and a supercooling liquid storage device 114. If the existing temperature control device wants to increase the cooling speed, it is necessary to increase the power of the compressor 112. At this time, the condenser 113 and the evaporator 115 also need to be increased accordingly. At this time, the energy consumption of the equipment increases, the size increases, and the equipment cost increases. In the embodiment of the present application, by adding a supercooling liquid storage device 114, the refrigerant after the temperature is reduced by the condenser 113 can be supercooled. The recooling can increase the supercooling degree of the refrigerant, improve the refrigeration capacity and the cooling speed, and avoid energy waste.

[0063] The outlet end of the first heat exchange channel in the evaporator 115 is connected to the inlet end of the compressor 112; the outlet end of the compressor 112 includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator 111 through the first valve 101; the second path is connected to the inlet end of the second heat exchange channel in the condenser 113 through the second valve 102 and the outlet end of the first heat exchange channel in the heat accumulator 111, and is connected to the outlet end of the first heat exchange channel in the evaporator 115 through the third valve 103. The inlet end of a heat exchange channel; the outlet end of the second heat exchange channel in the condenser 113 is respectively connected to the inlet end of the supercooling liquid reservoir 114, connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir 114 through the fifth valve 105, and connected to the inlet end of the first heat exchange channel in the evaporator 115 through the sixth valve 106; the outlet end of the supercooling liquid reservoir 114 is connected to the inlet end of the first heat exchange channel in the evaporator 115 through the fourth valve 104; the outlet end of the external cooling pipeline is connected to the inlet end of the compressor 112.

[0064] The external cooling pipeline is arranged outside the liquid storage space in the supercooling liquid storage device 114, and is used to cool the coolant stored in the liquid storage space. In this way, by cooling the liquid storage space in the supercooling liquid storage device 114 through the external cooling pipeline, the temperature of the refrigerant in the liquid storage space can be further reduced and the cooling speed can be increased, and indirectly, the purpose of increasing the cooling speed of the circulating liquid can be achieved.

[0065] Furthermore, the circulation device 200 includes a water tank 206 , a water pump 207 and a heater 208 .

[0066] The inlet end of the water tank 206 serves as the inlet end of the circulation device 200, the outlet end of the water tank 206 is connected to the inlet end of the water pump 207, the outlet end of the water pump 207 is connected to the inlet end of the heater 208, the outlet end of the heater 208 is connected to the liquid inlet corresponding to the load device, and the liquid outlet corresponding to the load device serves as the outlet end of the circulation device 200.

[0067] Under the power of the water pump 207, the circulating fluid is drawn out from the water tank 206 and sucked into the water pump 207, and then discharged from the water pump 207 to the heater 208. The circulating fluid at the outlet of the heater 208 enters the corresponding position of the load device and exchanges heat with the load device. Afterwards, the circulating fluid returns to the water tank 206 or returns to the water tank 206 through the second heat exchange channel of the heat accumulator 111.

[0068] Here, the temperature T205 of the circulating fluid at the inlet of the water tank 206 can be collected by the temperature sensor 205, and the temperature T209 of the circulating fluid at the liquid inlet corresponding to the load device can be collected by the temperature sensor 209. By comparing T205 and T209, the heater 208 is controlled to heat the circulating fluid.

[0069] Furthermore, the temperature control method further comprises:

[0070] Step a1: according to the received temperature increase instruction, close the first valve 101, the fourth valve 104, the second channel of the three-way valve 201 and the sixth valve 106, and open the second valve 102, the third valve 103 and the first channel of the three-way valve 201.

[0071] When the load device requires high temperature, the temperature control system needs to increase the temperature. At this time, a temperature increase instruction will be generated. The temperature increase target value can be set in the temperature increase instruction (it can be the temperature target value of the circulating fluid at the liquid inlet corresponding to the load device, that is, Figure 1 The temperature T209 collected by the temperature sensor 209).

[0072] At this time, the temperature control device is in heating operation, valves 101, 104, 106 are closed, 102, 103 are opened, and channels 1-2 of the three-way valve 201 are fully open, and channels 1-3 are closed. The circulating fluid returned from the outlet of the circulation device 200 enters the second heat exchange channel in the heat accumulator 111 through valve 201, and the circulating fluid exchanges heat with the heat storage medium in the heat accumulator 111, and the heat storage medium heats the circulating fluid once.

[0073] The circulating fluid heated once in the heat accumulator 111 enters the second heat exchange channel of the evaporator 115, and the hot air (high-temperature gaseous refrigerant) discharged from the compressor 112 enters the first heat exchange channel of the evaporator 115 through the valve 103. The circulating fluid and the hot air exchange heat in the evaporator 115, and the hot air flowing through one side of the evaporator 115 heats the circulating fluid for a second time. In this way, the circulating fluid absorbs heat through continuous circulation, and the temperature is continuously increased.

[0074] Step a2: when it is determined that the temperature of the circulating fluid rises to meet a preset condition, the first channel of the three-way valve 201 is closed and the second channel of the three-way valve 201 is opened.

[0075] Here, the preset condition means that as the heating energy pre-stored in the heat accumulator 111 is released, the temperature of the circulating fluid increases until the heat accumulator 111 can no longer effectively heat the circulating fluid.

[0076] More specifically, the preset condition is that the temperature difference between the third circulation temperature at the outlet of the second heat exchange channel in the heat accumulator 111 and the second circulation temperature at the outlet of the circulation device 200 is less than the preset threshold. The temperature difference TA = T203-T204. Obviously, TA will gradually decrease as the heat of the heat storage medium is released; when TA≤TB, it is considered that the heat of the heat storage medium in the heat accumulator 111 is basically released. Here, TB represents the preset threshold, which is an empirical value, such as 2°C-5°C, which can be set according to different temperature control systems, and this application does not impose any restrictions here.

[0077] At this time, channel 1-3 is fully open and channel 1-2 is closed, so that the circulating fluid directly enters the evaporator 115 to exchange heat with the high-temperature hot air discharged from the compressor 112 to increase the temperature, that is, the heat accumulator 111 is cut off from the first heating process of the circulating fluid.

[0078] It should be noted that when the temperature rises to the target value set by the temperature increase instruction, the temperature increase process ends. Accordingly, the temperature control system enters the working mode, at which time the system only needs a small amount of energy to maintain the current temperature. For example, the system can adjust the valve opening and the power of each component through existing control algorithms such as PID according to the target value and the actual detected temperature value, so that the system operates in a stable state.

[0079] Furthermore, the temperature control method further comprises:

[0080] Step b: according to the received cooling instruction, close the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the sixth valve 106, and open the first valve 101, the second channel of the three-way valve 201 and the fourth valve 104.

[0081] When the load device 300 requires a low temperature, the temperature control system needs to cool down. At this time, a cooling instruction is generated. The cooling instruction can set a target value for cooling (which can be the target temperature value of the circulating liquid at the liquid inlet corresponding to the load device 300, i.e. Figure 1 The temperature T209 collected by the temperature sensor 209).

[0082] At this time, valves 102, 103, and 106 are closed, 101 and 104 are open, and channels 1-3 of the three-way valve 201 are fully open, and 1-2 is closed. The refrigerant stored in the subcooler and subjected to supercooling treatment enters the first heat exchange channel in the evaporator 115 through valve 104. At this time, the high-temperature circulating fluid of the circulation system passes through channel 1-3 of the three-way valve 201 and flows through the second heat exchange channel in the evaporator 115. The supercooled refrigerant vaporizes in the evaporator 115 and absorbs heat to rapidly cool the circulating fluid.

[0083] While cooling, the hot air discharged from the compressor 112 enters the first heat exchange channel of the heat accumulator 111 through the valve 101 to exchange heat with the heat storage medium, storing heat for the next heating. At this time, while the temperature of the heat storage medium rises, the hot air of the refrigerant is also cooled down. It is cooled down again through the condenser 113, and then enters the supercooling liquid storage tank 114 for supercooling treatment. Here, through heat exchange with the heat storage medium in the heat accumulator 111, the supercooling degree of the refrigerant can also be indirectly improved, which improves the refrigeration capacity while avoiding energy waste, thereby achieving energy saving.

[0084] It should be noted that when the temperature drops to the target value set by the cooling instruction, the cooling process ends. Accordingly, the temperature control system enters the working mode, at which time the system only needs very little energy consumption to maintain the current temperature. For example, the system can adjust the valve opening and the power of each component through existing control algorithms such as PID according to the target value and the actual detected temperature value, so that the system operates in a stable state.

[0085] Furthermore, the temperature control method further comprises:

[0086] Step c: after the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator 111 stores heating energy, and the supercooling liquid storage device 114 performs supercooling treatment on the refrigerant and stores it.

[0087] In this way, after the predetermined operation time, the heat accumulator 111 and the supercooling liquid storage 114 store sufficient heating energy and cooling energy, and can enter the heating and cooling mode of the load equipment. Among them, the predetermined time can be set based on the energy storage capacity of the heat accumulator 111 and the supercooling liquid storage 114, and this application does not impose any restrictions on this.

[0088] Among them, in the temperature control preparation stage, the second valve 102, the third valve 103, the first channel of the three-way valve 201 and the fourth valve 104 are closed, and the first valve 101 and the second channel of the three-way valve 201 are opened; the opening of the sixth valve 106 is adjusted according to the fourth circulation temperature at the inlet end of the circulation device 200.

[0089] In the temperature control preparation stage, the temperature control system has been started, and the compressor 112 and the water pump 207 are running. At this time, the system is generally in a no-load state. The default temperature T209 can be set to an initial value of 20°C, valves 102 and 104 are in a closed state, and channels 1-3 of the three-way valve 201 are fully open, and 1-2 is closed.

[0090] At this time, the hot air discharged from the compressor 112 enters the heat accumulator 111 through the valve 101 to heat the heat storage medium. The temperature of the heat storage medium in the initial state is equivalent to the ambient temperature, and the temperature of the hot air discharged from the compressor 112 is generally 80-90°C. The high-temperature hot air exchanges heat through the heat accumulator 111, and while the temperature of the heat storage medium rises, the hot air is cooled once. After the first cooling, the hot air passes through the condenser 113 for a second cooling; the refrigerant after the second cooling through the condenser 113 is liquefied after the supercooling treatment in the supercooling liquid storage 114, and is stored in the supercooling liquid storage 114 in large quantities.

[0091] Here, the fourth circulation temperature T205 of the circulating liquid, that is, the actual temperature value at the inlet of the water tank 206, can be collected by the temperature sensor 205 installed at the inlet end of the circulation device 200; and then, according to the temperature difference between T205 and the set target value T209, the opening of the sixth valve 106 is adjusted to maintain the stability of the system.

[0092] Furthermore, the temperature control method further comprises:

[0093] Collect a first refrigeration temperature at the inlet end of the compressor and a first refrigeration pressure at the outlet end of the first heat exchange channel in the evaporator; determine a superheat difference between an actual superheat value and a preset superheat value based on the first refrigeration temperature and the first refrigeration pressure; and adjust the opening of the fifth valve based on the superheat difference.

[0094] In a specific implementation, the first refrigeration temperature T109 at the inlet end of the compressor 112 may be collected by the temperature sensor 109 , and the first refrigeration pressure P110 at the outlet end of the first heat exchange channel in the evaporator 115 may be collected by the pressure sensor 110 .

[0095] According to the first refrigeration pressure P110 at the outlet of the evaporator 115, the saturation temperature of the refrigerant (i.e., the temperature at which the refrigerant completely evaporates under this pressure) is found, and then the actual value of superheat is obtained from the saturation temperature of the refrigerant and the second refrigeration temperature. In the embodiment of the present application, the actual value of superheat = the first refrigeration temperature (T109) at the inlet of the compressor 112 - the saturation temperature of the refrigerant. Finally, the deviation between the actual value of superheat and the preset superheat value is determined for input to the control algorithm.

[0096] The control algorithm determines the opening of the fifth valve 105 according to the superheat difference. For example, when the superheat difference is too large (the actual value of the supercooling is too high), the opening of the fifth valve 105 can be increased to take away the heat of the refrigerant in the supercooling liquid storage tank 114 to reduce the superheat and ensure the stability of the system operation.

[0097] The embodiment of the present application provides a temperature control method. On the one hand, the heat accumulator stores heating energy, and the circulating fluid can be heated according to the temperature increase instruction to increase the heating speed; the cooling device can cool the refrigerant to increase the cooling speed, thereby reducing the waiting time for heating and cooling without increasing the power of the compressor, condenser and evaporator, improving production efficiency, saving energy and reducing consumption, reducing equipment production costs, and facilitating equipment miniaturization. On the other hand, by adjusting the opening of the three-way valve, the circulating fluid flowing out of the outlet of the circulation device flows through the second heat exchange channel to accumulate heating energy for the heat accumulator, thereby realizing energy recovery and further saving energy and reducing consumption.

[0098] See also Figure 3 , Figure 3 This is a schematic diagram of the structure of a temperature control device provided in an embodiment of the present application. Figure 3As shown in , the temperature control device provided in the embodiment of the present application is applied to a temperature control system, and specifically can be a controller in a temperature control system. The refrigeration device includes a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and the outlet end of the circulation device is installed with a three-way valve, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected to the inlet end of the second heat exchange channel in the evaporator; the device 300 includes:

[0099] A collection module 310 is used to collect the first circulation temperature at the inlet end of the second heat exchange channel in the evaporator;

[0100] The regulating module 320 is used to regulate the first opening of the first channel and the second opening of the second channel in the three-way valve according to the first circulation temperature, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator according to the first ratio, and then mixes with the circulating liquid flowing through the second channel according to the second ratio and flows into the second heat exchange channel in the evaporator, so as to accumulate heating energy for the heat accumulator through the circulating liquid of the first ratio; wherein the heat storage energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load equipment is controlled by the circulating liquid.

[0101] See also Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 4 As shown in , the electronic device 400 includes a processor 410 , a memory 420 and a bus 430 .

[0102] The memory 420 stores machine-readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 via the bus 430. When the machine-readable instructions are executed by the processor 410, the above-mentioned Figure 1 The steps of the temperature control method in the method embodiment shown and the specific implementation methods can be found in the method embodiment, which will not be repeated here.

[0103] The present application also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the computer program can execute the above-mentioned Figure 1 The steps of the temperature control method in the method embodiment shown and the specific implementation methods can be found in the method embodiment, which will not be repeated here.

[0104] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0105] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0106] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0107] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0108] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or in other words, the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0109] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-mentioned embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A temperature control method, characterized in that: The method is applied to a temperature control system; the system includes a refrigeration device and a circulation device; the refrigeration device includes a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and a three-way valve is installed at the outlet end of the circulation device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected to the inlet end of the second heat exchange channel in the evaporator; the method includes: collecting a first circulation temperature at an inlet end of a second heat exchange channel in the evaporator; According to the first circulation temperature, the first opening of the first channel and the second opening of the second channel in the three-way valve are adjusted, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator according to the first ratio, and is mixed with the circulating liquid flowing through the second channel according to the second ratio and then flows into the second heat exchange channel in the evaporator, so as to accumulate heating energy for the heat accumulator through the circulating liquid of the first ratio; wherein the heating energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load equipment is controlled by the circulating liquid.

2. The method according to claim 1, characterized in that According to the first circulation temperature, adjusting a first opening of the first channel and a second opening of the second channel in the three-way valve comprises: When the first circulation temperature is greater than a preset temperature threshold, the first opening degree of the first passage is increased and / or the second opening degree of the second passage is decreased.

3. The method according to claim 1 or 2, characterized in that: The method further comprises: When it is determined that the heat accumulator can no longer accumulate heating energy through the circulating fluid, the first channel is closed and the second channel is opened.

4. The method according to claim 1 or 2, characterized in that: Determine that the heat accumulator can no longer store heating energy via the circulating fluid by: Collecting a second circulation temperature at the outlet of the circulation device and a third circulation temperature at the outlet of the second heat exchange channel in the heat accumulator; determining a temperature difference between the second cycle temperature and the third cycle temperature; When the temperature difference is less than a preset threshold, it is determined that the heat accumulator can no longer accumulate heating energy through the circulating fluid.

5. The method according to claim 1, characterized in that The cooling device includes a condenser and a supercooling liquid reservoir; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator through a first valve; the second path is connected to the inlet end of the second heat exchange channel in the condenser through a second valve and the outlet end of the first heat exchange channel in the heat accumulator, and is connected to the inlet end of the first heat exchange channel in the evaporator through a third valve and the outlet end of the first heat exchange channel in the heat accumulator; the outlet end of the second heat exchange channel in the condenser is respectively connected to the inlet end of the supercooling liquid reservoir, connected to the inlet end of the external cooling pipeline of the supercooling liquid reservoir through a fifth valve, and connected to the inlet end of the first heat exchange channel in the evaporator through a sixth valve; the outlet end of the supercooling liquid reservoir is connected to the inlet end of the first heat exchange channel in the evaporator through a fourth valve; the outlet end of the external cooling pipeline is connected to the inlet end of the compressor; the method also includes: According to the received temperature increase instruction, closing the first valve, the fourth valve, the second channel of the three-way valve and the sixth valve, and opening the second valve, the third valve and the first channel of the three-way valve; When it is determined that the temperature of the circulating fluid rises to meet a preset condition, the first channel of the three-way valve is closed and the second channel of the three-way valve is opened; wherein the preset condition refers to that the temperature difference between the third circulation temperature at the outlet end of the second heat exchange channel in the heat accumulator and the second circulation temperature at the outlet end of the circulation device is less than a preset threshold.

6. The method according to claim 5, characterized in that The method further comprises: According to the received cooling instruction, the second valve, the third valve, the first channel of the three-way valve and the sixth valve are closed, and the first valve, the second channel of the three-way valve and the fourth valve are opened.

7. The method according to claim 5, characterized in that The method further comprises: After the temperature control system is started, it enters a temperature control preparation phase and lasts for a predetermined period of time, so that the heat accumulator stores heating energy and the supercooling liquid storage device performs supercooling treatment on the refrigerant and stores it; Among them, in the temperature control preparation stage, the second valve, the third valve, the first channel of the three-way valve and the fourth valve are closed, and the first valve and the second channel of the three-way valve are opened; and the opening of the sixth valve is adjusted according to the fourth circulation temperature at the inlet end of the circulation device.

8. The method according to claim 5, characterized in that The method further comprises: Collecting a first refrigeration temperature at an inlet end of the compressor and a first refrigeration pressure at an outlet end of a first heat exchange channel in the evaporator; determining a superheat difference between an actual superheat value and a preset superheat value according to the first refrigeration temperature and the first refrigeration pressure; The opening of the fifth valve is adjusted according to the superheat difference.

9. A temperature control device, characterized in that: Applicable to a temperature control system; the system includes a refrigeration device and a circulation device; the refrigeration device includes a compressor, a heat accumulator, an evaporator and a cooling device; the outlet end of the first heat exchange channel in the evaporator is connected to the inlet end of the compressor; the outlet end of the compressor includes two paths, the first path is connected to the inlet end of the first heat exchange channel in the heat accumulator, and the second path and the outlet end of the first heat exchange channel in the heat accumulator are jointly connected to the inlet end of the cooling device and the inlet end of the first heat exchange channel in the evaporator; the outlet end of the cooling device is connected to the inlet end of the first heat exchange channel in the evaporator; the outlet end of the second heat exchange channel in the evaporator is connected to the inlet end of the circulation device, and a three-way valve is installed at the outlet end of the circulation device, the first channel of the three-way valve is connected to the inlet end of the second heat exchange channel in the heat accumulator, and the second channel and the outlet end of the second heat exchange channel in the heat accumulator are jointly connected to the inlet end of the second heat exchange channel in the evaporator; the device includes: A collection module, used for collecting a first circulation temperature at an inlet end of a second heat exchange channel in the evaporator; The regulating module is used to regulate the first opening of the first channel and the second opening of the second channel in the three-way valve according to the first circulation temperature, so that the circulating liquid flowing out of the outlet end of the circulation device flows through the first channel and the second heat exchange channel in the heat accumulator according to the first ratio, and then flows into the second heat exchange channel in the evaporator after mixing with the circulating liquid flowing through the second channel according to the second ratio, so as to accumulate heating energy for the heat accumulator through the circulating liquid of the first ratio; wherein the heat storage energy stored in the heat accumulator is used to heat the circulating liquid according to the temperature increase instruction; and the temperature of the load equipment is controlled by the circulating liquid.

10. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and the machine-readable instructions are executed by the processor to execute the steps of the temperature control method as described in any one of claims 1 to 8.

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