Novel triboelectric high-applicability oil purification device

Through the new triboelectric high-applicability oil purification device, the triboelectric power generation device and half-wave double-voltage rectifier circuit are used to solve the problem of removing solid particles in high moisture content oil, and achieve efficient and applicable oil purification Separate from oil and water.

CN119406576APending Publication Date: 2025-02-11DALIAN MARITIME UNIVERSITY
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Patent Information

Application Number
CN202411583319.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-07
Publication Date
2025-02-11

AI Technical Summary

Technical Problem

The existing electrostatic oil purification technology is difficult to effectively remove solid particles in oils with high moisture content, and it is easy to cause short circuits to cause equipment damage.

Method used

A new type of triboelectric high-applicability oil purification device is adopted, which includes an oil purification device, a half-wave double voltage rectifier circuit and a triboelectric power generation device. The electric energy is obtained through the triboelectric power generation device and the half-wave double voltage is passed through the half-wave double voltage. The rectifier circuit rectifies and boosts the step-up to establish a high-voltage non-uniform electric field to remove solid particles in the oil.

Benefits of technology

The device can effectively remove solid particles in high moisture content oil, broaden its applicability, and achieve oil-water separation while retaining high efficiency and high quality purification, improving the applicability of oil-liquid purification.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a novel triboelectric high-applicability oil purification device which comprises an oil purification device body, a half-wave double-voltage rectifying circuit and a triboelectric power generation device. The oil purification device comprises a central cylindrical electrode, a barrel body structure and a mounting end cover mounted at the top end of the barrel body structure, and a surrounding electrode is arranged on the inner wall of the barrel body structure; one end of the central cylindrical electrode penetrates through the mounting end cover and is connected to the central position of the bottom end of the barrel body structure; a dust collection structure is arranged on the outer wall of the central cylindrical electrode; the half-wave double-voltage rectifying circuit is provided with two input ends and two output ends, the two output ends are connected to the surrounding electrode and the central cylindrical electrode respectively, and the two input ends are connected with the triboelectric power generation device; the friction electricity type power generation device comprises a friction nanometer power generator and a driving mechanism, and the friction nanometer power generator is provided with a friction electrode part connected with the half-wave double voltage rectifying circuit. According to the oil liquid purification device, effective solid particle or impurity purification can be conducted on oil liquid with the high water content through the oil liquid purification device, preposed water content reduction operation is not needed, the characteristics of high purification efficiency and high purification quality of electrostatic oil purification are reserved, meanwhile, the water content limitation of the oil liquid is greatly widened, the applicability of the oil liquid purification device is improved, and the oil liquid purification device is suitable for popularization and application. Oil-water separation can be carried out while solid particles or impurities are purified, and the high applicability of oil liquid purification is greatly improved.
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Description

Technical Field

[0001] The invention relates to the technical field of oil purification technology, and in particular to a novel triboelectric oil purification device with high applicability. Background Art

[0002] Lubricating oil is widely used in various mechanical equipment in chemical plants, power plants, pharmaceutical plants, etc. to reduce friction in transmission parts, protect machined parts, and play a role in cooling, sealing, rust prevention, and buffering. During the use of lubricating oil, it will produce impurities such as asphalt, carbon residue, and sludge due to oxidation. It will also carry moisture, dust, mechanical impurities, etc. during use. Major factories have a large demand for lubricating oil. If it is not purified, it will cause great waste and environmental pollution. Replacing new oil will also increase the economic burden on enterprises.

[0003] For solid particle purification, the existing electrostatic oil purification technology has the advantages of high purification efficiency and high purification quality, but it usually requires the water content of the oil sample to be processed to be below 1000ppm. This is because the purification voltage is usually as high as hundreds of thousands of volts. If the water content in the oil is too high, not only will the solid particles in the oil not be effectively removed, but it will also easily cause serious short circuits, causing equipment damage and even casualties. Summary of the invention

[0004] The present invention provides a novel triboelectric oil purification device with high applicability to overcome the above technical problems.

[0005] In order to achieve the above object, the technical solution of the present invention is:

[0006] A novel triboelectric high-applicability oil purification device comprises an oil purification device, a half-wave double voltage rectification circuit and a triboelectric power generation device;

[0007] The oil purification device comprises a central cylindrical electrode, a barrel structure and a mounting end cover mounted on the top of the barrel structure, and the inner wall of the barrel structure is provided with a surrounding electrode;

[0008] One end of the central cylindrical electrode passes through the mounting end cover and is connected to the central position of the bottom end of the barrel structure, and a dust collecting structure is provided on the outer wall of the central cylindrical electrode;

[0009] The half-wave double voltage rectifier circuit is provided with two input ends and two output ends, and the two output ends are respectively connected to the surrounding electrode and the central cylindrical electrode, and the two input ends are connected to the friction electric power generation device;

[0010] The friction electric power generation device comprises a friction nanogenerator and a driving mechanism connected to the friction nanogenerator for generating friction power, and the friction nanogenerator is provided with a friction electrode part, and two input ends of a half-wave double voltage rectifier circuit are connected to the friction electrode part.

[0011] Furthermore, the center line of the central cylindrical electrode coincides with the center line of the barrel structure;

[0012] The friction nanogenerator is coaxially arranged with the driving mechanism.

[0013] Furthermore, the half-wave double voltage rectifier circuit includes a first diode, a second diode, a first capacitor and a second capacitor;

[0014] One end of the first capacitor is used as an input end of a half-wave double voltage rectifier circuit, and the other end of the first capacitor, one end of the first diode and one end of the second diode are connected; the other end of the first diode is connected to one end of the second capacitor, and the connection end thereof is used as an output end of the half-wave double voltage rectifier circuit;

[0015] The other end of the second diode is connected to the other end of the second capacitor, and the other end of the second diode is used as another input end of the half-wave double voltage rectifier circuit, and the other end of the second capacitor is used as another output end of the half-wave double voltage rectifier circuit.

[0016] Furthermore, the friction nanogenerator includes a rotating shaft and a stator substrate and a rotor structure that sequentially penetrate the rotating shaft from bottom to top;

[0017] A friction electrode portion is provided at the top of the stator substrate, a dielectric layer is installed at the top of the friction electrode portion, and the friction electrode portion is closely attached to the dielectric layer;

[0018] The friction electrode portion includes a first grid electrode and a second grid electrode arranged circumferentially around the rotation axis; and the first grid electrode and the second grid electrode respectively include a plurality of first electrode components and a second electrode component, and the first electrode components and the second electrode components are arranged at equal intervals;

[0019] The rotor structure includes a friction portion and a turntable structure;

[0020] The rotating disc structure is provided with a plurality of slot structures for inserting the friction part;

[0021] The friction part includes a plurality of friction components arranged around the rotating shaft, and one end of the friction component is engaged with the slot structure, and the other end is in contact with the top of the dielectric layer;

[0022] The contact area between the friction member and the dielectric layer is determined by the set distance between the stator substrate and the rotor structure;

[0023] The first grid electrode and the second grid electrode are respectively connected to two input ends of a half-wave double voltage rectifier circuit.

[0024] Furthermore, the dielectric layer is made of polyamide material; the friction part is made of plastic polyvinyl chloride material;

[0025] The central cylindrical electrode is a bare metal electrode; the dust collecting structure is a flexible material with a microporous structure;

[0026] The outer wall of the barrel structure, the mounting end cover and the stator base plate are all made of insulating materials.

[0027] Furthermore, the dielectric layer is a circular structure, and the diameter of the dielectric layer is larger than the diameter of the circle where the outer edge of the first grid electrode is located;

[0028] The diameter of the circle where the outer edge of the friction part is located is the same as the diameter of the circle where the outer edge of the second grid electrode is located.

[0029] Beneficial effects: The present invention provides a novel triboelectric oil purification device with high applicability, which obtains electric energy through a triboelectric power generation device to provide power for the oil purification device, and rectifies and boosts the electric energy output by the triboelectric power generation device through a half-wave double voltage rectifier circuit to obtain a required voltage that meets the electrostatic purification of solid particles or impurities in the oil, and removes solid particles or impurities in the oil through the oil purification device. The oil purification device can effectively purify solid particles or impurities in oil with a high water content without the need for prior operation to reduce the water content. While retaining the characteristics of high electrostatic oil purification efficiency and high purification quality, the water content limit is greatly broadened, and its applicability is increased. It can achieve oil-water separation while purifying solid particles or impurities, greatly improving the high applicability of oil purification. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 It is a structural schematic diagram of a novel triboelectric oil purification device with high applicability according to the present invention;

[0032] Figure 2 is a cross-sectional schematic diagram of the triboelectric power generation device in this embodiment;

[0033] Figure 3 Schematic diagram of the structure of the oil purification device in this embodiment;

[0034] Figure 4 Schematic diagram and circuit principle diagram of a half-wave double voltage rectifier circuit in this embodiment;

[0035] Figure 5 An exploded view of the triboelectric power generation device in this embodiment;

[0036] Figure 6 Schematic diagram of the principle of the novel triboelectric highly applicable oil purification in this embodiment.

[0037] In the figure: 1. oil purification device; 11. central cylindrical electrode; 12. barrel structure; 121. surrounding electrode; 13. mounting end cover; 14. dust collection structure; 2. half-wave double voltage rectifier circuit; 21. first diode; 22. second diode; 23. first capacitor; 24. second capacitor; 3. friction electric power generation device; 31. friction nanogenerator; 311. stator substrate; 312. rotor structure; 3121. friction part; 31210. friction component; 3122. turntable structure; 313. dielectric layer; 314. first grid electrode; 3141. first electrode component; 315. second grid electrode; 3151. second electrode component; 32. driving mechanism. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] This embodiment provides a novel triboelectric oil purification device with high applicability, such as Figure 1 to Figure 2 As shown, it includes an oil purification device 1, a half-wave double voltage rectifier circuit 2 and a friction electric power generation device 3; preferably, as Figure 4 As shown, the half-wave double voltage rectifier circuit 2 includes a first diode 21, a second diode 22, a first capacitor 23 and a second capacitor 24; one end of the first capacitor 23 is used as an input end of the half-wave double voltage rectifier circuit 2, and the other end of the first capacitor 23, one end of the first diode 21 and one end of the second diode 22 are connected; the other end of the first diode 21 is connected to one end of the second capacitor 24, and the connection end thereof is used as an output end of the half-wave double voltage rectifier circuit 2; the other end of the second diode 22 is connected to the other end of the second capacitor 24, and the other end of the second diode 22 is used as another input end of the half-wave double voltage rectifier circuit 2, and the other end of the second capacitor 24 is used as another output end of the half-wave double voltage rectifier circuit 2;

[0040] In this embodiment, the alternating current output by the friction electric power generation device 3 is rectified by a half-wave double voltage rectifier circuit and converted into a higher voltage direct current, and finally a high voltage non-uniform electric field is established in the oil purification device 1; the first diode 21 and the second diode 22 are high voltage diodes, and the first capacitor 23 and the second capacitor 24 are high voltage capacitors. The high voltage diode mainly considers the withstand voltage performance and is selected according to the circuit working voltage requirement. The high voltage capacitor should consider the withstand voltage performance and capacitance. If the capacity is too small, the boosting ability is reduced, and if the capacity is too large, the boosting is slow;

[0041] like Figure 3 As shown, the oil purification device 1 includes a central cylindrical electrode 11, a barrel structure 12 and a mounting end cover 13 mounted on the top of the barrel structure 12, and the inner wall of the barrel structure 12 is provided with a surrounding electrode 121; the surrounding electrode 121 is a metal bare electrode or a conductive fabric electrode; the outer wall of the barrel structure 12 and the mounting end cover 13 are both made of hard insulating materials, such as acrylic, ABS, PP plastic, etc.;

[0042] Preferably, the center line of the central cylindrical electrode 11 coincides with the center line of the barrel structure 12; the friction nanogenerator 31 and the driving mechanism 32 are coaxially arranged;

[0043] One end of the central cylindrical electrode 11 passes through the mounting end cap 13 and is connected to the center position of the bottom end of the barrel structure 12, and a dust collecting structure 14 is provided on the outer wall of the central cylindrical electrode 11; the central cylindrical electrode 11 is a metal bare electrode, such as stainless steel, copper, etc.; the dust collecting structure 14 is a flexible material with a microporous structure, such as non-woven fabric, etc., in a stacked multi-layer structure;

[0044] The half-wave double voltage rectifier circuit 2 is provided with two input ends and two output ends, and the two output ends are respectively connected to the surrounding electrode 121 and the central cylindrical electrode 11, and the two input ends are connected to the friction electric power generation device 3;

[0045] The friction electric power generation device 3 includes a friction nanogenerator 31 and a driving mechanism 32 connected to the friction nanogenerator 31 for generating rotational power, and the friction nanogenerator 31 is provided with a friction electrode part, and the two input ends of the half-wave double voltage rectifier circuit 2 are connected to the friction electrode part.

[0046] In this embodiment, electric energy is obtained by a friction electric power generation device to provide power for the oil purification device, and the electric energy output by the friction electric power generation device is rectified and boosted by a half-wave double voltage rectifier circuit to obtain a required voltage that meets the electrostatic purification of solid particles or impurities in the oil. The solid particles or impurities in the oil are removed by the oil purification device. The oil purification device can effectively purify solid particles or impurities in oil with a high water content without the need for prior operations to reduce the water content. While retaining the characteristics of high electrostatic oil purification efficiency and high purification quality, the water content limit is greatly broadened, and its applicability is increased. It can achieve oil-water separation while purifying solid particles or impurities, greatly improving the high applicability of oil purification.

[0047] In a specific embodiment, Figure 5 As shown, the friction nanogenerator 31 includes a rotating shaft and a stator substrate 311 and a rotor structure 312 that sequentially penetrate the rotating shaft from bottom to top; the stator substrate 311 is made of hard insulating material, such as acrylic, ABS, PP plastic, etc.;

[0048] The stator substrate 311 has a friction electrode portion at the top, a dielectric layer 313 is installed at the top of the friction electrode portion, and the friction electrode portion and the dielectric layer 313 are closely attached; the dielectric layer 313 is made of polyamide material; the friction portion 3121 is made of plastic polyvinyl chloride material;

[0049] The friction electrode part includes a first grid electrode 314 and a second grid electrode 315 arranged around the rotating shaft; the first grid electrode 314 and the second grid electrode 315 respectively include a plurality of first electrode components 3141 and second electrode components 3151, and the first electrode components 3141 and the second electrode components 3151 are arranged at equal intervals; preferably, the number of the first electrode components 3141 and the second electrode components 3151 is 6, and the material thereof is preferably a conductive material such as copper or aluminum;

[0050] The rotor structure 312 includes a friction part 3121 and a turntable structure 3122; and the turntable structure 3122 is provided with a plurality of slot structures for inserting the friction part 3121, and the number of slots of the turntable structure is preferably 6; the friction part 3121 includes a plurality of friction members 31210 arranged circumferentially around the rotating shaft, and one end of the friction member 31210 is engaged with the slot structure, and the other end is in contact with the top of the dielectric layer 313; and the contact area between the friction member 31210 and the dielectric layer 313 is determined by the set distance between the stator substrate 311 and the rotor structure 312; wherein, in this embodiment, when the rotor rotates, the friction part 3121 is driven to rotate relative to the dielectric layer 313, thereby completing the power generation process of the independent layer mode. The materials of the dielectric layer 313 and the friction part 3121 are selected with reference to the preset triboelectric sequence, and two materials that are far apart in the triboelectric sequence are selected, such as the dielectric layer 313 is made of polyamide material, and the friction part 3121 is made of polyvinyl chloride material. In addition, the material of the friction part 3121 should have a certain plasticity so that it will not bend during the rotation process, which will affect its adhesion with the dielectric layer 313. The output performance of the power generation unit can be changed by adjusting the distance between the stator and the rotor and the speed of the rotor. The grid electrode is connected to the output wire and then connected to the input end of the half-wave double voltage rectifier circuit.

[0051] The first grid electrode 314 and the second grid electrode 315 are respectively connected to two input ends of the half-wave double voltage rectifier circuit 2. The dielectric layer 313 is a circular structure, and the diameter of the dielectric layer 313 is larger than the diameter of the circle where the outer edge of the first grid electrode 314 is located; the diameter of the circle where the outer edge of the friction part 3121 is located is the same as the diameter of the circle where the outer edge of the second grid electrode 315 is located.

[0052] The power generation principle of the friction electric power generation device 3 in this embodiment is as follows: Figure 6As shown, the power generation unit of the oil purification device 1 driven by the triboelectric power generation device 3 uses friction electrification and electrostatic induction of two materials with different electronegativity to generate current. Taking polyamide and polyvinyl chloride as examples, they are respectively used as the dielectric layer and the friction part, and the displacement between the two materials in contact with each other generates friction electrification, and the corresponding charges are induced on the two grid electrodes at the bottom (the first grid electrode 314 and the second grid electrode 315). Under the action of external excitation, the driving mechanism 32 (such as the wind wheel) drives the rotor structure 312 to rotate, and the rotor structure 312 drives the friction part to rotate relative to the dielectric layer, so that they contact each other and carry heterogeneous charges. The dielectric layer carries positive charges and the friction part carries negative charges. If the friction part is located above the inner grid electrode (the first grid electrode 314) at this time, the opposite positive charge is induced on the inner grid electrode, and the outer grid electrode (the second grid electrode 315) is induced by the dielectric layer. The inner and outer grid electrodes generate a potential difference due to the opposite charges and generate charge movement in the external circuit to form a current. When the friction part rotates to the top of the outer grid electrode, a current with the opposite direction is generated. Since the grid electrode is divided into 6 parts, the current direction changes 6 times every time the rotor rotates one circle. Under external excitation, the rotor structure 312 of the power generation device rotates continuously to generate alternating current.

[0053] The purification process of solid particles or impurities in the oil in this embodiment is as follows: solid particles in the oil are usually positively or negatively charged due to the preferential adsorption of ions in the liquid and the dissociation of dissociated groups on the surface of the particles. Charged solid pollutants move in a directional manner under the action of the electric field and are captured by the dust collecting structure between the central cylindrical electrode and the surrounding electrode, thereby achieving the purpose of separating solid pollutants in the oil. The small droplets (water) in the oil are subjected to the dielectric force generated by the uneven distribution of the dielectric constant applied by the electric field, and the water droplets move in a directional manner under the action of the dielectric force. Due to the different sizes of water droplets and the different positions in the non-uniform electric field, the dielectric forces and resistances they receive are also different, resulting in different speeds of directional movement. During the movement of the water droplets, they collide and merge with the other water droplets to form large water droplets, which eventually settle at the bottom of the purifier, achieving the purpose of separating water from the oil.

[0054] The triboelectric power generation device used in this embodiment has the output characteristics of high voltage and low current, and can control the short-circuit current at the microampere level while outputting a voltage of tens of thousands of volts. Based on this, a new triboelectric high-applicability oil purification device is proposed, which can effectively purify oil with a high water content without the need for prior operations to reduce the water content. While retaining the characteristics of high electrostatic oil purification efficiency and high purification quality, its water content limit is greatly broadened, increasing its applicability. It can also separate oil and water while purifying solid particles. In addition, the present invention can collect external mechanical excitation (such as wind energy, etc.) to work, which meets the requirements of energy conservation, emission reduction and sustainability.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A novel triboelectric oil purification device with high applicability, characterized in that: It comprises an oil purification device (1), a half-wave double voltage rectification circuit (2) and a friction electric power generation device (3); The oil purification device (1) comprises a central cylindrical electrode (11), a barrel structure (12) and a mounting end cover (13) mounted on the top of the barrel structure (12), and the inner wall of the barrel structure (12) is provided with a surrounding electrode (121); One end of the central cylindrical electrode (11) passes through the mounting end cover (13) and is connected to the central position of the bottom end of the barrel structure (12), and the outer wall of the central cylindrical electrode (11) is provided with a dust collecting structure (14); The half-wave double voltage rectifier circuit (2) is provided with two input ends and two output ends, and the two output ends are respectively connected to the surrounding electrode (121) and the central cylindrical electrode (11), and the two input ends are connected to the friction electric power generation device (3); The friction electric power generation device (3) comprises a friction nanogenerator (31) and a driving mechanism (32) connected to the friction nanogenerator (31) for generating friction power, and the friction nanogenerator (31) is provided with a friction electrode portion, and two input ends of a half-wave double voltage rectifier circuit (2) are connected to the friction electrode portion.

2. A novel triboelectric oil purification device with high applicability according to claim 1, characterized in that: The center line of the central cylindrical electrode (11) coincides with the center line of the barrel structure (12); The friction nanogenerator (31) and the driving mechanism (32) are coaxially arranged.

3. A novel triboelectric oil purification device with high applicability according to claim 2, characterized in that: The half-wave double voltage rectifier circuit (2) comprises a first diode (21), a second diode (22), a first capacitor (23) and a second capacitor (24); One end of the first capacitor (23) serves as an input end of a half-wave double voltage rectifier circuit (2); the other end of the first capacitor (23), one end of a first diode (21), and one end of a second diode (22) are connected; the other end of the first diode (21) is connected to one end of the second capacitor (24), and the connected end serves as an output end of the half-wave double voltage rectifier circuit (2); The other end of the second diode (22) is connected to the other end of the second capacitor (24), and the other end of the second diode (22) is used as another input end of the half-wave double voltage rectifier circuit (2), and the other end of the second capacitor (24) is used as another output end of the half-wave double voltage rectifier circuit (2).

4. A novel triboelectric high-applicability oil purification device according to claim 3, characterized in that: The friction nanogenerator (31) comprises a rotating shaft, and a stator substrate (311) and a rotor structure (312) that sequentially penetrate the rotating shaft from bottom to top; A friction electrode portion is provided at the top of the stator substrate (311), a dielectric layer (313) is installed at the top of the friction electrode portion, and the friction electrode portion and the dielectric layer (313) are closely attached; The friction electrode portion comprises a first grid electrode (314) and a second grid electrode (315) which are arranged circumferentially around the rotation axis; and the first grid electrode (314) and the second grid electrode (315) respectively comprise a plurality of first electrode components (3141) and second electrode components (3151), and the first electrode components (3141) and the second electrode components (3151) are arranged at equal intervals; The rotor structure (312) comprises a friction portion (3121) and a rotating disk structure (3122); The rotating disc structure (3122) is provided with a plurality of slot structures for inserting the friction part (3121); The friction part (3121) comprises a plurality of friction components (31210) arranged circumferentially around the rotating shaft, and one end of the friction component (31210) is engaged with the slot structure, and the other end is in contact with the top of the dielectric layer (313); The contact area between the friction member (31210) and the dielectric layer (313) is determined by the set distance between the stator substrate (311) and the rotor structure (312); The first grid electrode (314) and the second grid electrode (315) are respectively connected to two input ends of a half-wave double voltage rectifier circuit (2).

5. A novel triboelectric oil purification device with high applicability according to claim 4, characterized in that: The dielectric layer (313) is made of polyamide material; the friction part (3121) is made of plastic polyvinyl chloride material; The central cylindrical electrode (11) is a bare metal electrode; the dust collecting structure (14) is a flexible material with a microporous structure; The outer wall of the barrel structure (12), the mounting end cover (13) and the stator base plate (311) are all made of insulating materials.

6. A novel triboelectric high-applicability oil purification device according to claim 5, characterized in that: The dielectric layer (313) is a circular structure, and the diameter of the dielectric layer (313) is greater than the diameter of the circle where the outer edge of the first grid electrode (314) is located; The diameter of the circle where the outer edge of the friction part (3121) is located is the same as the diameter of the circle where the outer edge of the second grid electrode (315) is located.