Exposure machine with multi-station switching mechanism

Abstract

The invention discloses an exposure machine with a multi-station switching mechanism, and belongs to the technical field of exposure machines. An exposure machine with a multi-station switching mechanism comprises a rack and an electric cabinet mounted on the rack, and further comprises an X-axis moving mechanism mounted at the top of the rack, a first moving seat is mounted at the moving end of the X-axis moving mechanism, and the X-axis moving mechanism is used for driving the first moving seat to move; a connecting plate is fixedly connected to the outer side wall of the first moving seat, the Z-axis moving mechanism is installed on the side, away from the first moving seat, of the connecting plate, and a second moving seat is installed at the moving end of the Z-axis moving mechanism; the Y-axis moving mechanism is mounted at the moving end of the Z-axis moving mechanism; the exposure area is defined by the multiple exposure pieces, the double-face exposure function of the multiple sets of exposure pieces is achieved, meanwhile, the occupied space of equipment is saved through the storage type mask mechanism, and the occupied area of the equipment is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure machines, and in particular to an exposure machine with a multi-station conversion mechanism. Background Art

[0002] An exposure machine is a device that turns on the light to emit UVA wavelength ultraviolet rays to transfer the image information on the film or other transparent objects to the surface coated with photosensitive material. In the current market competition, companies are increasingly inclined to choose low-energy consumption and high-production efficiency equipment in order to enhance their competitiveness.

[0003] After searching, in the prior art, the patent application No. 202410517745.9 discloses "exposure equipment and double-sided exposure machine. An exposure equipment proposed in this application loads the workpiece to be exposed by a first loading mechanism and a second loading mechanism. The first loading mechanism and the second loading mechanism are driven by the first moving mechanism to alternately operate between the first working area and the second working area. When the first loading mechanism or the second loading mechanism arrives at the first working area, the workpiece to be exposed is loaded and unloaded; when the first loading mechanism or the second loading mechanism arrives at the second working area, the workpiece to be exposed is exposed. By arranging the first loading mechanism and the second loading mechanism in upper and lower layers, the movement trajectories of the first loading mechanism and the second loading mechanism are prevented from interfering with each other. In this way, by the alternating operation of the first loading mechanism and the second loading mechanism, the loading and unloading and exposure of the workpiece to be exposed can be carried out synchronously, thereby improving the production efficiency of the exposure equipment", but there are still the following defects: (1) The flipping mechanism of each exposure piece is independently set, which increases the equipment cost.

[0004] (2) The fixed mask mechanism occupies equipment area. Summary of the invention

[0005] The purpose of the present invention is to solve the problems in the prior art that the flipping mechanism of each exposure piece is independently set, which increases the equipment cost and the fixed mask mechanism occupies the equipment area, and to propose an exposure machine with a multi-station conversion mechanism.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: An exposure machine with a multi-station conversion mechanism comprises a frame and an electric control box installed on the frame. Also includes, An X-axis moving mechanism, the X-axis moving mechanism is installed on the top of the frame, a first moving seat is installed on the moving end of the X-axis moving mechanism, and the X-axis moving mechanism is used to drive the first moving seat to move; A Z-axis moving mechanism, wherein the outer side wall of the first moving seat is fixedly connected with a connecting plate, the Z-axis moving mechanism is installed on a side of the connecting plate away from the first moving seat, and a second moving seat is installed at a moving end of the Z-axis moving mechanism; A Y-axis moving mechanism, wherein the Y-axis moving mechanism is installed at the moving end of the Z-axis moving mechanism, a third moving seat is installed at the moving end of the Y-axis moving mechanism, a lifting seat is further connected to the outer wall of the third moving seat, and a secondary rotator is arranged at the bottom of the lifting seat; An electric telescopic rod, wherein the electric telescopic rod is fixedly mounted on a rotating end of the secondary rotator; An exposure light source, the exposure light source being evenly mounted on the telescopic end of the electric telescopic rod; A flipping mechanism, wherein the flipping mechanism is installed on the top of the first movable seat, and the flipping angle of the flipping mechanism is 90°; A middle loading mechanism, the middle loading mechanism comprising a first hollow frame mounted on the flipping end of the flipping mechanism through a bracket, one side of the first hollow frame is provided with evenly distributed first adsorption holes, the first hollow frame is provided with a first negative pressure pump, and the negative pressure end of the first negative pressure pump is connected to the inner cavity of the first hollow frame through a connecting pipe; an end loading mechanism, the end loading mechanism being mounted on the outside of the first hollow frame; a main rotator mounted at the intersection of the first hollow frame and the end loading mechanism; in, During exposure, the middle loading mechanism and the end loading mechanism form a triangle structure.

[0007] Preferably, it also includes a loading and unloading auxiliary mechanism installed on the outer wall of the frame, the loading and unloading auxiliary mechanism includes a mounting plate fixedly installed on the outer wall of the frame, the top of the mounting plate is fixedly connected to a rotating seat, the rotating end of the rotating seat is installed with a robotic arm, and the output end of the robotic arm is connected to an electric suction cup.

[0008] Preferably, the flipping mechanism includes a U-shaped frame fixedly connected to the top of the first moving seat, the vertical section of the U-shaped frame is provided with an inclined sliding groove, a sliding block is slidably connected in the sliding groove, the horizontal section of the U-shaped frame is slidably connected to an L-shaped slider, the vertical section of the L-shaped slider is rotatably connected to a transmission block of a square structure, the transmission block is fixedly connected to the sliding block, the top of the transmission block is fixedly connected to a flip plate, and a limiting plate is also fixedly connected between the vertical sections of the U-shaped frame, the horizontal section of the U-shaped frame is also fixedly connected to symmetrically distributed hydraulic telescopic cylinders, the telescopic ends of the hydraulic telescopic cylinders are fixedly connected to the horizontal section of the L-shaped slider, and the first hollow frame is fixedly connected to the outer wall of the flip plate through a bracket.

[0009] Preferably, the horizontal section of the U-shaped frame is fixedly connected with symmetrically distributed limit blocks, and the L-shaped sliding block is slidably matched with the limit blocks.

[0010] Preferably, when the flip plate is in a horizontal state, the limit plate abuts against the flip plate, the sliding block is located at a high point in the slide slot, and the transmission block is in a horizontal state; When the flip plate is in a vertical state, the flip plate abuts against the side wall of the U-shaped frame, and the sliding block is located at a low point in the sliding groove.

[0011] Preferably, the end loading mechanism includes two second hollow frames rotatably connected to the two ends of the first hollow frame, the surface of the second hollow frame is provided with evenly distributed second adsorption holes, the second hollow frame is provided with a second negative pressure pump, the negative pressure end of the second negative pressure pump is connected to the inner cavity of the second hollow frame through a connecting pipe, the main rotator is fixedly installed on the first hollow frame, and the rotating end of the main rotator is fixedly connected to the second hollow frame.

[0012] Preferably, the top of the frame is also fixedly connected with symmetrically distributed horizontal positioning blocks, and when the middle loading mechanism and the end loading mechanism are in a horizontal state, the first hollow frame and the second hollow frame abut against the horizontal positioning blocks.

[0013] Preferably, it also includes a masking mechanism arranged at the junction of the secondary rotator and the electric telescopic rod, the masking mechanism includes a shell installed at the junction of the secondary rotator and the electric telescopic rod through a bracket, the bottom of the shell is open, a driving retractable roller is installed between the inner side walls of the shell, and the outer wall of the driving retractable roller is wrapped with a masking cloth.

[0014] Preferably, one end of the mask cloth away from the driving retractable roller is connected to a stabilizing block.

[0015] Preferably, the electric control box is electrically connected to the X-axis moving mechanism, the Z-axis moving mechanism, the Y-axis moving mechanism, the secondary rotator, the electric telescopic rod, the main rotator, the first negative pressure pump and the second negative pressure pump, and horizontal adjustment feet are provided at the four corners of the bottom of the frame.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The exposure machine with a multi-station conversion mechanism, through the middle loading mechanism, end loading mechanism and main rotator, encloses the exposure to be exposed into a relatively closed exposure area. A single structure can realize the synchronous flipping of multiple groups of exposure parts, and can realize the exposure problem of multiple groups of exposure parts at the same time, which greatly improves the exposure efficiency and solves the problem of independent setting of the flipping mechanism of each exposure part in the prior art, which increases the equipment cost.

[0017] 2. The exposure machine with a multi-station conversion mechanism optimizes the structure and reduces its occupied space by setting up a retractable mask mechanism, thus solving the problem of the fixed mask mechanism occupying equipment area in the prior art.

[0018] 3. The exposure machine with a multi-station conversion mechanism realizes auxiliary loading and unloading of exposure parts by setting up an auxiliary loading and unloading mechanism.

[0019] 4. The exposure machine with a multi-station conversion mechanism realizes the switching between the horizontal and vertical states of the middle loading mechanism and the end loading mechanism through the 90-degree flip mechanism, thereby ensuring its exposure effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is one of the structural schematic diagrams of the present invention; Figure 2 This is the second structural schematic diagram of the present invention; Figure 3 is a side view of the present invention; Figure 4 This is one of the schematic diagrams of the connection structure between the turnover mechanism and the middle loading mechanism of the present invention; Figure 5 This is the second schematic diagram of the connection structure between the turnover mechanism and the middle loading mechanism of the present invention; Figure 6 It is one of the structural schematic diagrams of the middle loading mechanism and the end loading mechanism of the present invention; Figure 7 This is the second structural schematic diagram of the middle loading mechanism and the end loading mechanism of the present invention; Figure 8 It is a structural schematic diagram of the turning mechanism of the present invention; Fig. 9 It is a cross-sectional view of the mask mechanism of the present invention.

[0021] In the figure: 10, frame; 110, electric control box; 120, X-axis moving mechanism; 121, first moving seat; 122, connecting plate; 130, Z-axis moving mechanism; 131, second moving seat; 140, Y-axis moving mechanism; 141, third moving seat; 142, lifting seat; 143, secondary rotator; 150, electric telescopic rod; 160, horizontal positioning block; 20, exposure light source; 30, flip mechanism; 310, U-shaped frame; 311, slide; 320, sliding block; 330, L-shaped slider; 340, transmission block; 350, flip plate; 360, limit Plate; 370, hydraulic telescopic cylinder; 380, limit block; 40, middle loading mechanism; 410, first hollow frame; 420, first adsorption hole; 430, first negative pressure pump; 50, end loading mechanism; 510, second hollow frame; 520, second adsorption hole; 530, second negative pressure pump; 60, main rotator; 70, loading and unloading auxiliary mechanism; 710, mounting plate; 720, rotating seat; 730, mechanical arm; 740, electric suction cup; 80, mask mechanism; 810, shell; 820, drive reel; 830, mask cloth; 840, stabilizing block. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making creative work are within the scope of protection of the present invention.

[0023] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless defined as herein.

[0024] Example 1: Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9 An exposure machine with a multi-station conversion mechanism includes a frame 10 and an electric control box 110 installed on the frame 10. Also includes, An X-axis moving mechanism 120 is installed on the top of the frame 10. A first moving seat 121 is installed at the moving end of the X-axis moving mechanism 120. The X-axis moving mechanism 120 is used to drive the first moving seat 121 to move; The Z-axis moving mechanism 130, the outer side wall of the first moving seat 121 is fixedly connected with a connecting plate 122, the Z-axis moving mechanism 130 is installed on a side of the connecting plate 122 away from the first moving seat 121, and the moving end of the Z-axis moving mechanism 130 is installed with a second moving seat 131; A Y-axis moving mechanism 140, which is installed at the moving end of the Z-axis moving mechanism 130, and a third moving seat 141 is installed at the moving end of the Y-axis moving mechanism 140, and a lifting seat 142 is further connected to the outer wall of the third moving seat 141, and a secondary rotator 143 is arranged at the bottom of the lifting seat 142; An electric telescopic rod 150, which is fixedly mounted on the rotating end of the secondary rotator 143; An exposure light source 20, the exposure light source 20 is evenly mounted on the telescopic end of the electric telescopic rod 150; A turning mechanism 30, which is mounted on the top of the first movable seat 121, and has a turning angle of 90°; The middle loading mechanism 40 includes a first hollow frame 410 installed at the flip end of the flip mechanism 30 through a bracket, and one side of the first hollow frame 410 is provided with uniformly distributed first adsorption holes 420. The first hollow frame 410 is provided with a first negative pressure pump 430, and the negative pressure end of the first negative pressure pump 430 is connected to the inner cavity of the first hollow frame 410 through a connecting pipe; An end loading mechanism 50, which is installed outside the first hollow frame 410; A main rotator 60 , which is installed at the intersection of the first hollow frame 410 and the end loading mechanism 50 ; in, During exposure, the middle loading mechanism 40 and the end loading mechanism 50 form a triangle structure; In the embodiment, the X-axis moving mechanism 120 , the Z-axis moving mechanism 130 , and the Y-axis moving mechanism 140 are all driven by linear motor modules; The main rotator 60 is turned on, and the main rotator 60 drives the second hollow frame 510 to rotate until the ends of the two groups of second hollow frames 510 are abutted and stop. At this time, the first hollow frame 410 and the second hollow frame 510 form a triangle, and then the second moving seat 131 on the Z-axis moving mechanism 130 is controlled to move in the vertical direction, thereby driving the Y-axis moving mechanism 140 to move in the vertical direction, and at the same time, the third moving seat 141 on the Y-axis moving mechanism 140 is started to drive the lifting seat 142 to move to the top of the triangle surrounded by the first hollow frame 410 and the second hollow frame 510, and then the angle of the exposure light source 20 is adjusted by the secondary rotator 143. The exposure light source 20 is provided with 3 groups, which correspond to the exposure parts loaded by the middle loading mechanism 40 and the end loading mechanism 50 respectively, so that each group of exposure light sources 20 is directly facing the exposure parts, and then the height of the exposure light source 20 is further adjusted by the lifting seat 142 and the electric telescopic rod 150, so that it is placed in the area surrounded by the first hollow frame 410 and the second hollow frame 510; The main rotator 60 is controlled by the electric control box 110 to rotate in the opposite direction until the first hollow frame 410 and the back of the second hollow frame 510 form a triangle, thereby realizing the flipping function of the exposure piece, and then the exposure light source 20 is moved to above the triangle formed by the back of the first hollow frame 410 and the second hollow frame 510 through the third moving seat 141 on the Y-axis moving mechanism 140, and the angle of the exposure light source 20 is adjusted by the rotator, and the height of the exposure light source 20 is adjusted by the electric telescopic rod 150 and the lifting seat 142, so that it is in the area enclosed by the back of the first hollow frame 410 and the second hollow frame 510, so as to realize the back exposure function.

[0025] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 8The flip mechanism 30 includes a U-shaped frame 310 fixedly connected to the top of the first moving seat 121, the vertical section of the U-shaped frame 310 is provided with an inclined slide groove 311, a sliding block 320 is slidably connected in the slide groove 311, the horizontal section of the U-shaped frame 310 is slidably connected to an L-shaped slider 330, the vertical section of the L-shaped slider 330 is rotatably connected to a transmission block 340 of a square structure, the transmission block 340 is fixedly connected to the sliding block 320, the top of the transmission block 340 is fixedly connected to a flip plate 350, the vertical sections of the U-shaped frame 310 are also fixedly connected to a limit plate 360, and the horizontal section of the U-shaped frame 310 is also fixedly connected to a symmetrically distributed hydraulic telescopic cylinder 37 0, the telescopic end of the hydraulic telescopic cylinder 370 is fixedly connected to the horizontal section of the L-shaped slider 330, the horizontal section of the U-shaped frame 310 is fixedly connected with symmetrically distributed limit blocks 380, the L-shaped slider 330 and the limit blocks 380 are slidably matched, the first hollow frame 410 is fixedly connected to the outer wall of the flip plate 350 through a bracket, when the flip plate 350 is in a horizontal state, the limit plate 360 ​​abuts against the flip plate 350, the sliding block 320 is located at the high point in the slide groove 311, and the transmission block 340 is in a horizontal state; when the flip plate 350 is in a vertical state, the flip plate 350 abuts against the side wall of the U-shaped frame 310, and the sliding block 320 is located at the low point in the slide groove 311; The hydraulic telescopic cylinder 370 is controlled to extend through the electric control box 110. When the hydraulic telescopic cylinder 370 extends, it drives the L-shaped slider 330 to slide along the U-shaped frame 310, and then the sliding block 320 is pushed to slide along the slide groove 311 through the transmission block 340 until the sliding block 320 slides to the low point of the slide groove 311 and stops. At this time, the transmission block 340 and the flip plate 350 are in a vertical state, so that the first hollow frame 410 and the second hollow frame 510 are in contact with the horizontal positioning block 160, and the first hollow frame 410 and the second hollow frame 510 are in a horizontal state; The hydraulic telescopic cylinder 370 is controlled to retract. When the hydraulic telescopic cylinder 370 retracts, it drives the L-shaped slider 330 to slide along the U-shaped frame 310, and then pulls the sliding block 320 to slide along the slide groove 311 through the transmission block 340. In the process of the sliding block 320 sliding from a low point to a high point along the slide groove 311, the sliding block 320 is in a rolling state, thereby causing the transmission block 340 to flip from a vertical state to a horizontal state. When the transmission block 340 flips, it drives the sliding block 320 to rotate until the sliding block 320 slides to the high point of the slide groove 311 and stops. At this time, the transmission block 340 and the flip plate 350 are in a horizontal state, so that the first hollow frame 410 and the second hollow frame 510 are in a vertical state.

[0026] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 The end loading mechanism 50 includes two second hollow frames 510 rotatably connected to the two ends of the first hollow frame 410, and the surface of the second hollow frame 510 is provided with uniformly distributed second adsorption holes 520. The second hollow frame 510 is provided with a second negative pressure pump 530, and the negative pressure end of the second negative pressure pump 530 is connected to the inner cavity of the second hollow frame 510 through a connecting pipe. The main rotator 60 is fixedly installed on the first hollow frame 410, and the rotating end of the main rotator 60 is fixedly connected to the second hollow frame 510. The top of the frame 10 is also fixedly connected with symmetrically distributed horizontal positioning blocks 160. When the middle loading mechanism 40 and the end loading mechanism 50 are in a horizontal state, the first hollow frame 410 and the second hollow frame 510 are in contact with the horizontal positioning block 160.

[0027] Reference Figure 1 , Figure 2 , Figure 3 and Fig. 9 , and also includes a mask mechanism 80 arranged at the intersection of the secondary rotator 143 and the electric telescopic rod 150. The mask mechanism 80 includes a shell 810 installed at the intersection of the secondary rotator 143 and the electric telescopic rod 150 through a bracket. The bottom of the shell 810 is open, and a driving retractable roller 820 is installed between the inner walls of the shell 810. The outer wall of the driving retractable roller 820 is wound with a mask cloth 830. The end of the mask cloth 830 away from the driving retractable roller 820 is connected to a stabilizing block 840. The driving retractable roller 820 is turned on to unwind it, and the mask cloth 830 wrapped on its surface falls under the action of gravity of the stabilizing block 840. The unwound mask cloth 830 blocks the exposure part, and then the exposure light source 20 is turned on to expose the part to be exposed.

[0028] Reference Figure 1 , Figure 2 and Figure 3 The electric control box 110 is electrically connected to the X-axis moving mechanism 120, the Z-axis moving mechanism 130, the Y-axis moving mechanism 140, the secondary rotator 143, the electric telescopic rod 150, the main rotator 60, the first negative pressure pump 430 and the second negative pressure pump 530, and horizontal adjustment feet are provided at the four corners of the bottom of the frame 10.

[0029] During exposure, the hydraulic telescopic cylinder 370 is first controlled to extend through the electric control box 110. When the hydraulic telescopic cylinder 370 extends, it drives the L-shaped slider 330 to slide along the U-shaped frame 310, and then the transmission block 340 pushes the sliding block 320 to slide along the slide groove 311 until the sliding block 320 slides to the low point of the slide groove 311 and stops. At this time, the transmission block 340 and the flip plate 350 are in a vertical state, so that the first hollow frame 410 and the second hollow frame 510 are in contact with the horizontal positioning block 160, and the first hollow frame 410 and the second hollow frame 510 are in a horizontal state; Turn on the first negative pressure pump 430 and the second negative pressure pump 530 to respectively adsorb and position the exposure piece to be processed on the first hollow frame 410 and the second hollow frame 510 through the first adsorption hole 420 and the second adsorption hole 520; Then, the hydraulic telescopic cylinder 370 is controlled to retract. When the hydraulic telescopic cylinder 370 retracts, the L-shaped slider 330 is driven to slide along the U-shaped frame 310, and then the sliding block 320 is pulled to slide along the slide groove 311 by the transmission block 340 until the sliding block 320 slides to the high point of the slide groove 311 and stops. At this time, the transmission block 340 and the flip plate 350 are in a horizontal state, so that the first hollow frame 410 and the second hollow frame 510 are in a vertical state. Then, the main rotator 60 is turned on, and the main rotator 60 drives the second hollow frame 510 to rotate until the ends of the two groups of second hollow frames 510 are abutted and stop. At this time, the first hollow frame 410 and the second hollow frame 510 form a triangle, and then the second moving seat 131 on the Z-axis moving mechanism 130 is controlled to move in the vertical direction, thereby driving the Y-axis moving mechanism 140 to move in the vertical direction, and at the same time, the third moving seat 141 on the Y-axis moving mechanism 140 is started to drive the lifting seat 142 to move to the top of the triangle formed by the first hollow frame 410 and the second hollow frame 510, and then the exposure is adjusted by the secondary rotator 143. The angle of the light source 20 is that 3 groups of exposure light sources 20 are arranged, corresponding to the exposure parts loaded by the middle loading mechanism 40 and the end loading mechanism 50 respectively, so that each group of exposure light sources 20 is directly facing the exposure parts, and then the height of the exposure light source 20 is further adjusted by the lifting seat 142 and the electric telescopic rod 150, so that it is placed in the area surrounded by the first hollow frame 410 and the second hollow frame 510, and the driving reel 820 is turned on to unwind it, and the mask cloth 830 wrapped on its surface falls under the action of gravity of the stabilizing block 840, and the unwound mask cloth 830 shields the exposure parts, and then the exposure light source 20 is turned on to expose the exposure parts; After the front exposure is completed, the mask cloth 830 is rolled up, the exposure light source 20 is lifted, and then the main rotator 60 is controlled by the electric control box 110 to rotate in the opposite direction until the first hollow frame 410 and the back of the second hollow frame 510 form a triangle, thereby realizing the flipping function of the exposure piece, and then the exposure light source 20 is moved to the top of the triangle formed by the back of the first hollow frame 410 and the second hollow frame 510 through the third moving seat 141 on the Y-axis moving mechanism 140, and the angle of the exposure light source 20 is adjusted by the rotator, and the height of the exposure light source 20 is adjusted by the electric telescopic rod 150 and the lifting seat 142, so that it is in the area surrounded by the back of the first hollow frame 410 and the second hollow frame 510, and then the mask cloth 830 is unrolled again, the exposure light source 20 is turned on, and the back of the exposure piece is synchronously exposed.

[0030] Example 2: Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 , which is basically the same as the first embodiment, and further includes a loading and unloading auxiliary mechanism 70 installed on the outer wall of the frame 10, the loading and unloading auxiliary mechanism 70 includes a mounting plate 710 fixedly installed on the outer wall of the frame 10, a rotating seat 720 is fixedly connected to the top of the mounting plate 710, a mechanical arm 730 is installed at the rotating end of the rotating seat 720, and an electric suction cup 740 is connected to the output end of the mechanical arm 730; After the exposure is completed, the second hollow frame 510 is rotated to the same plane as the first hollow frame 410 by the main rotator 60, and then the flip mechanism 30 is turned on to flip the flip plate 350 to a vertical state. At this time, the first negative pressure pump 430 and the second negative pressure pump 530 are turned off, and then the exposed piece is unloaded by the electric suction cup 740 at the moving end of the robot arm 730; The exposure piece loading function can also be realized by the electric suction cup 740.

[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An exposure machine with a multi-station conversion mechanism, comprising a frame (10) and an electric control box (110) mounted on the frame (10), characterized in that: Also includes, An X-axis moving mechanism (120), the X-axis moving mechanism (120) being mounted on the top of the frame (10), a first moving seat (121) being mounted on the moving end of the X-axis moving mechanism (120), the X-axis moving mechanism (120) being used to drive the first moving seat (121) to move; A Z-axis moving mechanism (130), wherein the outer side wall of the first moving seat (121) is fixedly connected to a connecting plate (122), the Z-axis moving mechanism (130) is installed on a side of the connecting plate (122) away from the first moving seat (121), and the moving end of the Z-axis moving mechanism (130) is installed with a second moving seat (131); A Y-axis moving mechanism (140), the Y-axis moving mechanism (140) being mounted on the moving end of the Z-axis moving mechanism (130), the moving end of the Y-axis moving mechanism (140) being mounted with a third moving seat (141), the outer wall of the third moving seat (141) being further connected with a lifting seat (142), the bottom of the lifting seat (142) being provided with a secondary rotator (143); An electric telescopic rod (150), wherein the electric telescopic rod (150) is fixedly mounted on the rotating end of the secondary rotator (143); An exposure light source (20), the exposure light source (20) being evenly mounted on the telescopic end of the electric telescopic rod (150); A turning mechanism (30), the turning mechanism (30) being installed on the top of the first movable seat (121), and the turning angle of the turning mechanism (30) being 90°; A middle loading mechanism (40), the middle loading mechanism (40) comprising a first hollow frame (410) mounted on the flipping end of the flipping mechanism (30) via a bracket, one side of the first hollow frame (410) being provided with evenly distributed first adsorption holes (420), the first hollow frame (410) being provided with a first negative pressure pump (430), the negative pressure end of the first negative pressure pump (430) being connected to the inner cavity of the first hollow frame (410) via a connecting pipe; An end loading mechanism (50), wherein the end loading mechanism (50) is installed outside the first hollow frame (410); A main rotator (60), the main rotator (60) being installed at the intersection of the first hollow frame (410) and the end loading mechanism (50); During exposure, the middle loading mechanism (40) and the end loading mechanism (50) form a triangular structure.

2. The exposure machine with a multi-station conversion mechanism according to claim 1, characterized in that: The invention also comprises a loading and unloading auxiliary mechanism (70) mounted on the outer wall of the frame (10), wherein the loading and unloading auxiliary mechanism (70) comprises a mounting plate (710) fixedly mounted on the outer wall of the frame (10), a rotating seat (720) being fixedly connected to the top of the mounting plate (710), a mechanical arm (730) being mounted on the rotating end of the rotating seat (720), and an electric suction cup (740) being connected to the output end of the mechanical arm (730).

3. The exposure machine with a multi-station conversion mechanism according to claim 1, characterized in that: The turning mechanism (30) comprises a U-shaped frame (310) fixedly connected to the top of the first moving seat (121); a vertical section of the U-shaped frame (310) is provided with an inclined sliding groove (311); a sliding block (320) is slidably connected in the sliding groove (311); a horizontal section of the U-shaped frame (310) is slidably connected to an L-shaped sliding block (330); a vertical section of the L-shaped sliding block (330) is rotatably connected to a transmission block (340) of a square structure; the transmission block (340) and the sliding block (320) are rotatably connected to each other. The transmission block (340) is fixedly connected to the top of the transmission block (340), a flip plate (350) is fixedly connected to the top, a limit plate (360) is fixedly connected between the vertical sections of the U-shaped frame (310), the horizontal section of the U-shaped frame (310) is also fixedly connected to symmetrically distributed hydraulic telescopic cylinders (370), the telescopic ends of the hydraulic telescopic cylinders (370) are fixedly connected to the horizontal section of the L-shaped slider (330), and the first hollow frame (410) is fixedly connected to the outer wall of the flip plate (350) via a bracket.

4. The exposure machine with a multi-station conversion mechanism according to claim 3, characterized in that: The horizontal section of the U-shaped frame (310) is fixedly connected with symmetrically distributed limiting blocks (380), and the L-shaped sliding block (330) is slidably matched with the limiting blocks (380).

5. The exposure machine with a multi-station conversion mechanism according to claim 4, characterized in that: When the flip plate (350) is in a horizontal state, the limit plate (360) abuts against the flip plate (350), the sliding block (320) is located at a high point in the slide groove (311), and the transmission block (340) is in a horizontal state; When the flip plate (350) is in a vertical state, the flip plate (350) abuts against the side wall of the U-shaped frame (310), and the sliding block (320) is located at a low point in the sliding groove (311).

6. The exposure machine with a multi-station conversion mechanism according to claim 1, characterized in that: The end loading mechanism (50) comprises two second hollow frames (510) rotatably connected to the two ends of the first hollow frame (410); the surfaces of the second hollow frames (510) are provided with evenly distributed second adsorption holes (520); the second hollow frames (510) are provided with a second negative pressure pump (530); the negative pressure end of the second negative pressure pump (530) is connected to the inner cavity of the second hollow frame (510) through a connecting pipe; the main rotator (60) is fixedly mounted on the first hollow frame (410), and the rotating end of the main rotator (60) is fixedly connected to the second hollow frame (510).

7. The exposure machine with a multi-station conversion mechanism according to claim 6, characterized in that: The top of the frame (10) is also fixedly connected with symmetrically distributed horizontal positioning blocks (160); when the middle loading mechanism (40) and the end loading mechanism (50) are in a horizontal state, the first hollow frame (410) and the second hollow frame (510) abut against the horizontal positioning blocks (160).

8. The exposure machine with a multi-station conversion mechanism according to claim 1, characterized in that: The invention also comprises a masking mechanism (80) arranged at the junction of the secondary rotator (143) and the electric telescopic rod (150), the masking mechanism (80) comprising a shell (810) installed at the junction of the secondary rotator (143) and the electric telescopic rod (150) via a bracket, the bottom of the shell (810) being open, a driving retractable roller (820) being installed between the inner side walls of the shell (810), and a masking cloth (830) being wound around the outer wall of the driving retractable roller (820).

9. The exposure machine with a multi-station conversion mechanism according to claim 8, characterized in that: One end of the mask cloth (830) away from the driving retractable roller (820) is connected to a stabilizing block (840).

10. The exposure machine with a multi-station conversion mechanism according to claim 6, characterized in that: The electric control box (110) is electrically connected to the X-axis moving mechanism (120), the Z-axis moving mechanism (130), the Y-axis moving mechanism (140), the secondary rotator (143), the electric telescopic rod (150), the main rotator (60), the first negative pressure pump (430) and the second negative pressure pump (530), and leveling feet are provided at the four corners of the bottom of the frame (10).

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