Protection circuit of ion source power supply system and ion source power supply system

Abstract

The embodiment of the invention provides a protection circuit of an ion source power supply system and the ion source power supply system. A bridging diode is bridged at the output end of each power supply in the ion source power supply system, the anode end of the bridging diode is connected with the cathode output end of the connected power supply, and the cathode end of the bridging diode is connected with the anode output end of the connected power supply. Moreover, the rated voltage of each bridging diode is greater than the maximum output voltage of the bridging power supply, and the rated current of each bridging diode is greater than the maximum output current of the bridging power supply. According to the protection circuit of the ion source power supply system provided by the embodiment of the invention, each power supply of the ion source power supply system is additionally provided with one diode of which the physical performance meets the requirements of the power supply for outputting rated voltage and rated current, so that the voltage peak value which is generated by the inductive load of each power supply and is harmful to the power supply can be reduced; therefore, the circuit of the ion source power supply system is protected, and the fault of the ion source power supply system caused by the dynamic change of the load is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of electronic circuits, and in particular to a protection circuit of an ion source power supply system and an ion source power supply system. Background Art

[0002] Ion implantation equipment is a common device in the semiconductor field and is used for semiconductor processing. The ion source power supply system (hereinafter referred to as the power supply system) is the core component of the ion implantation equipment. The power supply system generates the plasma required by the ion implantation equipment through the ion source. The ion implantation equipment uses the plasma to dope the semiconductor material to change the carrier concentration and conductivity type of the semiconductor material, thereby realizing semiconductor processing.

[0003] However, the types of power supplies involved in the existing ion source power supply system are relatively complex, and the parameters of the power supplies are also different. In addition, since the loads of the power supplies are different, especially the inductive loads with inductance parameters in the power supplies are different, the loads of the power supplies are prone to dynamic changes or even failures. Once there is a problem with the load of the power supply, the failure rate of the power supply system will also increase, further affecting the working efficiency of the ion implanter. Summary of the invention

[0004] In view of the above problems, an embodiment of the present application provides a protection circuit of an ion source power system and an ion source power system to protect the ion source power system and reduce the failure rate of the ion source power system.

[0005] In a first aspect, an embodiment of the present application provides a protection circuit for an ion source power supply system, the protection circuit comprising:

[0006] A plurality of jumper diodes, the number of which depends on the number of power supplies in the ion source power supply system;

[0007] Each of the jumper diodes is connected across the output end of each power supply in the ion source power supply system; the jumper means that the anode end of the jumper diode is connected to the negative output end of the power supply, and the cathode end of the jumper diode is connected to the positive output end of the power supply; wherein the rated voltage of each of the jumper diodes is greater than the maximum output voltage of the jumper power supply, and the rated current of each of the jumper diodes is greater than the maximum output current of the jumper power supply.

[0008] Optionally, the protection circuit further includes:

[0009] Inrush current suppression modules, the number of which depends on the number of power supplies in the ion source power supply system;

[0010] Each of the inrush current suppression modules is connected between the output end of each of the power supplies and a reference ground; the connection between the output end of each of the power supplies and the reference ground specifically means: the first end of each of the inrush current suppression modules is connected to the negative output end of each of the power supplies, and the second end of each of the inrush current suppression modules is connected to the reference ground; wherein the rated breakdown voltage of each of the inrush current suppression modules is greater than the maximum rated output voltage of the connected power supply.

[0011] Optionally, the rated voltage of each of the surge current suppression modules is 10% higher than the maximum rated output voltage of the connected power supply.

[0012] Optionally, each of the surge current suppression modules includes:

[0013] An inrush current suppressor and an inrush current suppressor capacitor, wherein the inrush current suppressor and the inrush current suppressor capacitor are connected in parallel.

[0014] Optionally, each of the power supplies includes: a filament power supply, a bias power supply, and an arc voltage power supply, wherein the positive output terminal of the filament power supply is connected to the negative output terminal of the bias power supply, and the positive output terminal of the bias power supply is connected to the negative output terminal of the arc voltage power supply.

[0015] Optionally, the protection circuit further includes: a series resistor;

[0016] The first end of the series resistor is connected to the positive output end of the bias power supply, and the second end of the series resistor is connected to the cathode of the ion source.

[0017] Optionally, the protection circuit further includes: a heat dissipation device, wherein:

[0018] The heat dissipation device is used to perform heat dissipation processing on the series resistor, and the rated power of the series resistor is greater than a preset rated power threshold.

[0019] Optionally, the surge current suppressor is used to control the instantaneous peak voltage generated by the reference ground of the connected power supply within a preset safety voltage range; the surge current suppression capacitor is used to control the load current of the connected power supply within a preset safety current range.

[0020] Optionally, the first end of the surge current suppressor is connected to the negative output terminal of the connected power supply, and the second end is connected to the reference ground; the first end of the surge current suppression capacitor is connected to the negative output terminal of the connected power supply, and the second end is connected to the second end of the surge current suppressor and the reference ground.

[0021] In a second aspect, an embodiment of the present application provides an ion source power supply system, the ion source power supply system comprising:

[0022] A filament power supply, a bias power supply, an arc voltage power supply and the protection circuit described in the first aspect.

[0023] The embodiment of the present application provides a protection circuit of an ion source power supply system and an ion source power supply system, wherein the protection circuit includes: a plurality of jumper diodes, each jumper diode is connected across the output end of each power supply in the ion source power supply system. Specifically, a jumper diode is connected across the output end of each power supply in the ion source power supply system, the anode end of the jumper diode is connected to the negative output end of the connected power supply, and the cathode end of the jumper diode is connected to the positive output end of the connected power supply. In addition, the rated voltage of each jumper diode is greater than the maximum output voltage of the power supply connected, and the rated current is greater than the maximum output current of the power supply connected.

[0024] The protection circuit of the ion source power supply system provided in the embodiment of the present application is selected. By adding a diode whose physical properties meet the rated voltage and rated current of the power supply output to each power supply of the ion source power supply system, the voltage spike value generated by the inductive oscillation in the load can be reduced from entering the power supply by virtue of the forward conduction and reverse cutoff characteristics of the cross-connected diode, thereby reducing the adverse effects of the voltage spike value harmful to the power supply generated by the inductive load of each power supply. This protects the circuit of the ion source power supply system, reduces the faults of the ion source power supply system caused by the dynamic changes of the inductive load, and helps to ensure the normal working efficiency of the ion implantation equipment.

[0025] These and other aspects of the present application will become more clearly understood in the description of the following embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 A schematic diagram of a system architecture of an ion source power supply system commonly used in the prior art is shown;

[0028] Figure 2 A circuit connection schematic diagram of a protection circuit of an ion source power supply system provided in an embodiment of the present application is shown;

[0029] Figure 3 Another circuit connection schematic diagram of the protection circuit of the ion source power supply system provided in an embodiment of the present application is shown;

[0030] Figure 4Another circuit connection schematic diagram of the protection circuit of the ion source power supply system provided in an embodiment of the present application is shown;

[0031] Figure 5 Another circuit connection schematic diagram of the protection circuit of the ion source power supply system provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0032] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0033] In order to enable those skilled in the art to better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present application.

[0034] In the embodiments of the present application, it should be noted that, in this article, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0035] Moreover, the terms "comprises," "comprising," or any other variation thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0036] In the description of the embodiments of the present application, words such as "example" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "example" or "for example" in the embodiments of the present application is not to be interpreted as being more preferred or having more advantages than another embodiment or design. The use of words such as "example" or "for example" is intended to present relative concepts in a clear manner.

[0037] In addition, the "plurality" in the embodiments of the present application refers to two or more than two. In view of this, in the embodiments of the present application, "plurality" can also be understood as "at least two". "At least one" can be understood as one or more, for example, one, two or more. For example, including at least one means including one, two or more, and there is no limit on which ones are included. For example, including at least one of A, B and C, then A, B, C, A and B, A and C, B and C, or A, B and C can be included.

[0038] It should be noted that, in the embodiments of the present application, "and / or" describes the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B may represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / ", unless otherwise specified, generally indicates that the associated objects before and after are in an "or" relationship.

[0039] It should be noted that in the embodiments of the present application, "connection" can be understood as electrical connection, and the connection between two electrical components can be a direct or indirect connection between the two electrical components. For example, the connection between A and B can be either a direct connection between A and B or an indirect connection between A and B through one or more other electrical components.

[0040] In the embodiment of the present application, Figure 1 As shown, the ion source power supply system may include: a filament power supply, a bias power supply and an arc voltage power supply. The filament power supply, the bias power supply and the arc voltage power supply generate plasma in the following manner:

[0041] The filament power supply heats the filament, and current flows through the filament. When the filament is heated, it releases free electrons. At this time, the bias power supply applies voltage between the filament and the cathode to form an electrostatic field, which can accelerate the electrons from the filament to the cathode. When the bias current flows through the cathode, the cathode is heated and emits free electrons to the ion source arc chamber. At this time, the arc voltage power supply can accelerate the electrons on the cathode to the speed required to ionize the atoms. At this time, the electrons can obtain energy from the electrostatic field formed by the arc voltage and collide with atoms, causing the atoms to lose electrons and become ions, thereby generating plasma in the ion source arc chamber.

[0042] The plasma generation process is relatively complex and is a dynamic process. It is also necessary to apply high voltage to the reference ground of the ion source to extract positive ions, which makes the working mode of the entire power supply system more complex and has poor anti-interference ability. In addition, since the ion source has a short life and requires regular maintenance, when there is a problem with the load in the power supply system, the entire power supply system will also be affected to a certain extent. It can be seen that the ion source power supply system is prone to a high failure rate due to the dynamic changes in the load. How to reduce the failure rate of the power supply system and improve the reliability of the power supply system has become a technical problem that needs to be solved urgently.

[0043] In view of this, the present application provides a protection circuit for an ion source power supply system and an ion source power supply system. The ion source power supply system includes the protection circuit for the ion source power supply system provided by the present application. The embodiment of the present application protects the filament power supply, bias power supply and arc voltage power supply in the power supply system respectively through the protection circuit of the ion source power supply system, thereby reducing the failure caused by the dynamic change of the load of the entire power supply system, thereby reducing the failure rate of the power supply system and improving the reliability of the power supply system.

[0044] In the first aspect, based on the various power supplies of the existing ion source power supply system, the present application adds a protection circuit for the ion source power supply system. The protection circuit is as follows: Figure 2 As shown, it includes: a plurality of jumper diodes. Figure 2 The ion source power supply system shown in the figure only includes three power supplies: filament power supply, bias power supply, and arc voltage power supply. In other embodiments, in addition to the above three power supplies, the ion source power supply system can also flexibly increase power supplies according to actual plasma beam requirements, but it is necessary to ensure that each power supply has a corresponding jumper diode. Therefore, in the embodiment of the present application, the number of jumper diodes depends on the number of power supplies in the ion source power supply system.

[0045] like Figure 2 As shown, the jumper diode is connected across the output terminals of each power supply in the ion source power supply system. In the embodiment of the present application, the jumper specifically means that the anode terminal of each jumper diode is connected to the negative output terminal of the connected power supply, and the cathode terminal of each jumper diode is connected to the positive output terminal of the connected power supply, which is visually like the jumper diode is connected across the positive and negative output terminals of the power supply.

[0046] In the embodiments of the present application, the type and physical characteristics of the power supply in the ion source power supply system are flexibly set according to its specific application requirements, and the present application does not strictly limit it. However, it is precisely because the physical characteristics of the power supplies in the ion source power supply system are different, so the types and physical characteristics of the jumper diodes corresponding to each power supply are also different. When selecting each jumper diode, it can be selected according to the physical characteristics of the connected power supply, but all must meet the following constraints:

[0047] The rated voltage of each jumper diode is greater than the maximum output voltage of the jumper power supply, and the rated current of each jumper diode is greater than the jumper maximum output current.

[0048] For example, in the embodiment of the present application, the maximum output voltage of the filament power supply is 6V, and the maximum output current is 200A. At this time, the rated voltage of the first cross-over diode D1 across the filament power supply should be greater than 6V, and the rated current should be greater than 200A. In the embodiment of the present application, the maximum output voltage of the bias power supply is 600V, and the maximum output current is 5.5A. At this time, the rated voltage of the second cross-over diode D2 across the bias power supply should be greater than 600V, and the rated current should be greater than 5.5A. Similarly, in the embodiment of the present application, the maximum output voltage of the arc voltage power supply is 150V, and the maximum output current is 22A. At this time, the rated voltage of the third cross-over diode D3 across the arc voltage power supply should be greater than 150V, and the rated current should be greater than 22A.

[0049] Specifically, since the loads connected to each power supply contain inductors and other devices, such inductors or devices with similar inductor functions are collectively referred to as inductive loads. Since inductive loads generate self-induced electromotive force when the current changes, this self-induced electromotive force will try to prevent the current from changing, thereby generating voltage spikes when the ion source power supply system switches. When the inductive load is suddenly disconnected or closed, the inductor will try to maintain the original current state, thereby generating reverse electromotive force, resulting in voltage spikes.

[0050] That is to say, there is a process of energy storage and release in the inductive load. When the current changes suddenly, the inductive load will also produce a sudden voltage. At this time, the inductive load is prone to produce voltage spikes that are harmful to the power supply. By selecting the embodiment of the present application, a diode whose physical properties meet the rated voltage and rated current of the power supply output is added to each power supply of the ion source power supply system. With the forward conduction and reverse cutoff characteristics of the cross-connected diode, the voltage spike generated by the inductive oscillation in the load can be reduced from entering the power supply, thereby reducing the adverse effects of the voltage spikes that are harmful to the power supply generated by the inductive loads of each power supply. This can protect the circuit of the ion source power supply system, reduce the failure of the ion source power supply system caused by the dynamic changes of the inductive load, and help ensure the normal working efficiency of the ion implantation equipment.

[0051] Based on the above-mentioned addition of a jumper diode to reduce the influence of the inductive load, in some embodiments, it is possible to Figure 3 As shown, the protection circuit of the ion source power supply system provided by the present application also includes: an inrush current suppression module. The number of inrush current suppression modules is the same as the number of cross-connected diodes, and also depends on the number of power supplies in the ion source power supply system. It is necessary to ensure that each power supply is equipped with an inrush current suppression module.

[0052] Among them, Figure 3As shown, each surge current suppression module is specifically connected between the output end of each current and the reference ground. Wherein, being connected between the output end of each power supply and the reference ground specifically means that the first end of each surge current suppression module is connected to the negative output end of the connected power supply, and the second end of each surge current suppression module is connected to the reference ground.

[0053] The physical properties of the surge current suppression module are similar to those of the crossover diode, and both depend on the output of the connected power supply. In order to ensure the normal operation of the surge current suppression module, in the embodiment of the present application, the rated breakdown voltage of each surge current suppression module should be greater than the maximum rated output voltage of the connected power supply.

[0054] As a preferred embodiment, the rated voltage of each surge current suppression module should be 10% higher than the maximum rated output voltage of the connected power supply. As an example, taking the example of the maximum output voltage of the aforementioned filament power supply being 6V and the maximum output current being 200A, the rated breakdown voltage of the first surge current suppression module connected to the filament power supply should be greater than 6V, and should also be greater than 6V by 10%, that is to say, the rated breakdown voltage of the first surge current suppression module should not be less than 6.6V. Similarly, the rated breakdown voltage of the second surge current suppression module connected to the bias power supply should not be less than 660V. The rated breakdown voltage of the third surge current suppression module connected to the arc voltage power supply should not be less than 165V.

[0055] By selecting an embodiment of the present application and setting the rated breakdown voltage of each surge current suppression module to be 10% higher than the maximum rated output voltage of the connected power supply, sudden voltage surges that may be generated in the circuit can be effectively suppressed, thereby preventing the surge generated by the connected power supply from damaging the connected ion source circuit, thereby protecting the ion source reaction system from surge interference.

[0056] In some embodiments, Figure 4 As shown, each inrush current suppression module may include:

[0057] Inrush current suppressor (corresponding to VR in the figure) and inrush current suppressor capacitor (corresponding to C in the figure). The inrush current suppressor and the inrush current suppressor capacitor are connected in parallel.

[0058] Among them, the surge current suppressors and surge current suppression capacitors in the surge current suppression modules connected to different power supplies are differentiated according to different needs, such as Figure 4In the figure, the surge current suppressor connected to the filament power supply is VR1, the surge current suppression capacitor connected to the filament power supply is C1, the surge current suppressor connected to the bias power supply is VR2, the surge current suppression capacitor connected to the bias power supply is C2, the surge current suppressor connected to the arc voltage power supply is VR3, and the surge current suppression capacitor connected to the arc voltage power supply is C3.

[0059] Specifically, as an implementation mode, the first end of the surge current suppressor VR is connected to the negative output end of the connected power supply, and the second end of the surge current suppressor VR is connected to the reference ground. The first end of the surge current suppression capacitor C is connected to the negative output end of the connected power supply, and the second end of the surge current suppression capacitor C is connected to the second end of the surge current suppressor VR and the reference ground.

[0060] In the embodiment of the present application, the reference ground refers to: a common point reference point, and the reference ground provides a common reference zero voltage position for the various power supply parts of the entire power supply system. Since each power supply is connected to the ion source arc chamber, that is, there is a circuit connection with the reference ground, and since there are various inductance elements and switch elements in the actual ion source power supply system, whether it is a change in the inductance element or the switch element, it will cause the current in the circuit to switch rapidly, and it is easy to cause a sudden change in instantaneous voltage during the rapid switching of the current, thereby generating a spike voltage or a voltage drop on the reference ground line. At this time, the spike voltage or the voltage drop is easy to generate common mode interference, and the common mode interference is easy to damage the circuit inside the power supply system.

[0061] Based on this, as an implementation method, the surge current suppressor is used to control the instantaneous peak voltage generated by the reference ground of the connected power supply within a preset safe voltage range. The surge current suppression capacitor is used to control the load current of the connected power supply within a preset safe current range.

[0062] Specifically, a surge current suppressor is connected between the output end of each power supply in the ion source power supply system and the reference ground to protect the power supply from the impact of spike voltage or voltage drop. At the same time, a surge current suppression capacitor is connected in parallel with the surge current suppressor to form an additional filter loop. This filter loop buffers and suppresses the sudden voltage and current, thereby limiting the high-frequency load current.

[0063] In the embodiment of the present application, the instantaneous peak voltage of the power supply reference ground is controlled within a preset safety voltage range, wherein the preset safety voltage range can be flexibly set according to the type and model of the power supply. The load current of the power supply is controlled within a preset safety current range, wherein the specific value range of the preset safety current range can also be flexibly adjusted according to the type and model of the power supply.

[0064] In some embodiments, Figures 2 to 5As shown, the power supplies included in the ion source power supply system include: a filament power supply, a bias power supply, and an arc voltage power supply, wherein there is also a connection relationship between the power supplies, and the connection relationship between the power supplies can be flexibly designed according to the circuit of the actual ion source reaction system, and this application does not strictly limit it. As a preferred embodiment, the positive output terminal of the filament power supply is connected to the negative output terminal of the bias power supply, and the positive output terminal of the bias power supply is connected to the negative output terminal of the arc voltage power supply.

[0065] As an implementation method, the protection circuit of the ion source power supply system provided in the present application can be as follows: Figure 5 As shown, it also includes: a series resistor (R1), wherein the first end of the series resistor is connected to the positive output end of the bias power supply, and the second end of the series resistor is connected to the cathode of the ion source. In the embodiment of the present application, the cathode of the ion source refers to: an electrode responsible for extracting ions in the ion source. Among them, in the ion source, the cathode is usually used to emit electrons, and the emitted electrons will bombard atoms under the action of the magnetic field, so that the atoms are ionized to form a discharge plasma.

[0066] As described above, the maximum output voltage of the bias power supply can be as high as 600V, and the current can be as high as 5.5A. At this time, the series resistor is prone to overheating. Therefore, when selecting this series resistor, the rated power of the series resistor should be greater than the preset rated power threshold. The value of the preset power threshold can be determined according to the output power of the bias power supply. As an example, taking the application scenario where the maximum output voltage of the bias power supply is 600V and the current is 5.5A, the preset power threshold should be no less than 3300W.

[0067] As a preferred implementation, a heat sink may be added to the series resistor, and the heat sink is used to dissipate heat from the series resistor. Alternatively, a resistor with a heat dissipation function may be selected to prevent the series resistor from overheating and causing a fire in the circuit.

[0068] In the embodiment of the present application, a series resistor is arranged between the bias power supply and the cathode. Since the bias power supply acts between the filament and the cathode to accelerate the electrons, the load of the circuit will frequently change state during the process, and the voltage is relatively high, and short circuits are prone to occur frequently. At this time, the short circuit is likely to cause damage to the power supply system. The embodiment of the present application is selected to absorb the instantaneous short-circuit current generated by a short-circuit fault in the load with the help of a series resistor between the bias power supply and the cathode, thereby reducing the damage to the power supply system caused by the short-circuit current, so as to protect the circuit safety of the entire power supply system.

[0069] Based on the protection circuit of the ion source power supply system described in the first aspect, in the second aspect, the present application provides an ion source power supply system, which specifically includes a filament power supply, a bias power supply, an arc voltage power supply and the protection circuit of the ion source power supply system described in the first aspect, wherein the way in which the protection circuit of the ion source power supply system is connected to the filament power supply, the bias power supply and the arc voltage power supply can be referred to as Figures 2 to 5 The circuit connection method shown will not be described in detail here.

[0070] The above are only preferred embodiments of the present application, and are not intended to limit the present application in any form. Although the present application has been disclosed as above with preferred embodiments, it is not intended to limit the present application. Any technical personnel in the field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present application. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application are still within the scope of the technical solution of the present application.

Claims

1. A protection circuit for an ion source power supply system, characterized in that: The circuit comprises: A plurality of jumper diodes, the number of which depends on the number of power supplies in the ion source power supply system; Each of the jumper diodes is connected across the output end of each power supply in the ion source power supply system; the jumper means that the anode end of the jumper diode is connected to the negative output end of the power supply, and the cathode end of the jumper diode is connected to the positive output end of the power supply; wherein the rated voltage of each of the jumper diodes is greater than the maximum output voltage of the jumper power supply, and the rated current of each of the jumper diodes is greater than the maximum output current of the jumper power supply.

2. The protection circuit according to claim 1, characterized in that: The circuit further comprises: Inrush current suppression modules, the number of which depends on the number of power supplies in the ion source power supply system; Each of the inrush current suppression modules is connected between the output end of each of the power supplies and a reference ground; the connection between the output end of each of the power supplies and the reference ground specifically means: the first end of each of the inrush current suppression modules is connected to the negative output end of each of the power supplies, and the second end of each of the inrush current suppression modules is connected to the reference ground; wherein the rated breakdown voltage of each of the inrush current suppression modules is greater than the maximum rated output voltage of the connected power supply.

3. The protection circuit according to claim 2, characterized in that: The rated voltage of each of the surge current suppression modules is 10% higher than the maximum rated output voltage of the connected power supply.

4. The protection circuit according to claim 2, characterized in that: Each of the surge current suppression modules comprises: An inrush current suppressor and an inrush current suppressor capacitor, wherein the inrush current suppressor and the inrush current suppressor capacitor are connected in parallel.

5. The protection circuit according to claim 1, characterized in that: Each of the power supplies includes: a filament power supply, a bias power supply, and an arc voltage power supply, wherein the positive output end of the filament power supply is connected to the negative output end of the bias power supply, and the positive output end of the bias power supply is connected to the negative output end of the arc voltage power supply.

6. The protection circuit according to claim 5, characterized in that: The circuit further comprises: a series resistor; The first end of the series resistor is connected to the positive output end of the bias power supply, and the second end of the series resistor is connected to the cathode of the ion source.

7. The protection circuit according to claim 6, characterized in that: The circuit further comprises: a heat dissipation device, wherein: The heat dissipation device is used to perform heat dissipation processing on the series resistor, and the rated power of the series resistor is greater than a preset rated power threshold.

8. The protection circuit according to claim 4, characterized in that: The surge current suppressor is used to control the instantaneous peak voltage generated by the reference ground of the connected power supply within a preset safe voltage range; the surge current suppression capacitor is used to control the load current of the connected power supply within a preset safe current range.

9. The protection circuit according to claim 4, characterized in that: The first end of the surge current suppressor is connected to the negative output terminal of the connected power supply, and the second end is connected to the reference ground; the first end of the surge current suppression capacitor is connected to the negative output terminal of the connected power supply, and the second end is connected to the second end of the surge current suppressor and the reference ground.

10. An ion source power supply system, characterized in that: The ion source power supply system comprises: A filament power supply, a bias power supply, an arc voltage power supply, and a protection circuit as described in any one of claims 1-9.

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