Coating device, drying device, light irradiation device, and coating system

Abstract

The purpose of the present invention is to provide a coating device (10) which is capable of easily exchanging, cleaning, and the like of a stretching section, has excellent maintainability, and is capable of improving the stability of the stretching operation of the stretching section, and which applies a film-forming liquid to the circumferential edge of a substrate while moving the substrate and a coating unit (20) relative to each other. The coating unit (20) is provided with: a coating mechanism (21) provided with a coating section (22) for coating the film-forming liquid on at least the peripheral edge end surface of the substrate; the stretching mechanism (30) is provided with a stretching part (31) which stretches the film-forming liquid coated by the coating part (22) into a thin film shape on the end surface of the circumferential edge part of the substrate and the upper and lower surfaces of the circumferential edge part, and a force applying mechanism (34) which applies force to the stretching part (31) towards the end surface of the circumferential edge part of the substrate and the upper and lower surfaces of the circumferential edge part, and does not detach the force applying mechanism (34) from the stretching mechanism (30). And the extension part 31 can be detached.

Description

Technical Field

[0001] The present invention relates to a coating device, a drying device, a light irradiation device and a coating system, and more specifically, to a coating device capable of coating a liquid on the circumferential edge of a substrate, a drying device capable of drying and curing the liquid coated on the circumferential edge of the substrate, a light irradiation device and a coating system composed of these devices in combination. Background Art

[0002] As an example of a substrate for mounting electronic components, printed circuit boards using glass epoxy materials, synthetic materials, paper phenol materials, etc. are widely used. If these printed circuit boards are cut, fine dust composed of epoxy resin or glass fiber, etc. will be generated at the cut portion. This fine dust becomes a cause of poor contact and poor quality of the substrate circuit. Therefore, it is preferred to remove the dust generated when the substrate is cut in advance when manufacturing the printed circuit board. In addition, even if the dust is temporarily removed from the end face of the cut portion of the printed circuit board, since the end face portion of the printed circuit board is brittle, there is still a possibility that more dust will be generated due to the collapse of the end face portion in the subsequent substrate manufacturing process such as the etching process.

[0003] Therefore, the applicant of the present invention previously proposed a coating device and a coating method that can prevent the end face from being partially broken by coating a film-forming liquid on the end face of a substrate to form a film (hereinafter referred to as Patent Document 1).

[0004] The coating device described in Patent Document 1 moves a pair of coating rollers that are disposed opposite to each other with an end portion of a substrate sandwiched therebetween along the peripheral edge of the substrate, thereby coating the end surface of the substrate with a film-forming liquid.

[0005] Furthermore, in recent years, in order to cope with the thinning and miniaturization of various electronic devices, the demand for thin copper-clad laminated substrates (also called packaging substrates) with a thickness of about tens to hundreds of μm is increasing. For such thin substrates, it is difficult to apply the film-forming liquid only on the end surface of the substrate, and it is preferred to apply the film-forming liquid to the peripheral edge portion including the end surface of the substrate in a frame-like form.

[0006] Therefore, the applicant of the present invention previously proposed a coating device and a coating method, which form a film by applying a film-forming liquid in a frame-like manner on a circumferential edge portion including an end face of a substrate, thereby preventing collapse of the end face portion, etc. (hereinafter referred to as Patent Document 2).

[0007] The coating device described in Patent Document 2 is equipped with a liquid storage part for storing a film-forming liquid on the opposing surfaces of a pair of upper and lower coating heads, and a coating part for coating the film-forming liquid attached to the end of the substrate passing through the liquid storage part in a thin film. Then, in a state where the end of the substrate is inserted into a gap formed on the opposing surfaces of the pair of coating heads, the pair of coating heads are moved along the circumferential edge of the substrate, so that the film-forming liquid is coated on the circumferential edge including the end surface of the substrate in a frame-like manner.

[0008] Recently, the types of substrates to be coated have increased, and the manufacturing processes of these substrates have also become diversified. In addition, the coating methods of the film-forming liquid on the substrates have also become diversified according to the types of substrates and the differences in their manufacturing processes, and there have also been cases where the coating devices described in the above-mentioned patent documents 1 and 2 cannot cope well with them.

[0009] For example, in the coating device described in Patent Document 2, the substrate passes through the liquid storage section and the coating section of the pair of coating heads, and the film-forming liquid attached to the end surface of the substrate flows vertically to the lower end surface of the substrate and returns to the corner of the lower end surface, and sometimes a small amount of liquid is accumulated. Therefore, there are also problems such as the film thickness of the coating film at the corner of the lower end surface of the substrate after drying becomes partially thicker, and there are also problems such as the film thickness of the coating film formed on the three surfaces of the peripheral edge of the substrate is uneven.

[0010] Furthermore, in the coating device described in Patent Document 2, since the structure is such that the substrate is inserted into the gap between the pair of coating heads having the liquid storage portion, when the coating edge width of the circumferential edge portion of the substrate is extremely narrow, there is a problem that it is difficult to coat with a desired edge width.

[0011] Therefore, the applicant has proposed a coating device that can correctly control the upper and lower coating widths of the film-forming liquid applied on the peripheral edge portion of the substrate including the end face to be very narrow, and can reliably form a thin coating film with uniform thickness on the peripheral edge portion of the substrate (hereinafter referred to as Patent Document 3).

[0012] In the coating device described in Patent Document 3, the coating unit includes a coating section and a spreading section, wherein the coating section coats the film-forming liquid on at least the end surface of the peripheral edge of the substrate; and the spreading section spreads the film-forming liquid coated by the coating section into a thin film on the upper and lower surfaces of the peripheral edge of the substrate. The spreading section includes an end surface spreading component, a narrow upper surface spreading component, and a lower surface spreading component, so that the film thickness of the coating film formed on the three surfaces of the peripheral edge of the substrate can be uniform, and the edge width of the upper and lower surfaces of the peripheral edge can be extremely narrow.

[0013] Furthermore, the applicant has previously proposed a drying device for gathering and efficiently drying multiple substrates that have been coated with a liquid agent on the end faces or circumferential edges of the substrates by the above-mentioned coating device, a light irradiation device that can irradiate light on the end faces or circumferential edges of the substrates to solidify and dry the liquid agent, and a coating system including these devices (the following patent document 4).

[0014] Problems to be solved by the invention

[0015] However, the coating device described in Patent Document 3 has a problem that maintenance work is difficult because the extension portion is difficult to replace parts, clean, maintain, etc.

[0016] In addition, in the coating device described in Patent Document 3, the first urging mechanism constituting the extending portion includes a shaft member and a first spring member inserted into the shaft member, and the shaft member is inserted into a first mounting member on which the upper extending member is mounted and a second mounting member on which the lower extending member is mounted.

[0017] Therefore, there is a case where a part of the film-forming liquid removed from the substrate by the upper extension member and the lower extension member intrudes into the gap such as the shaft hole of the first mounting member in which the shaft member is inserted. In this case, the film-forming liquid intruding into the shaft hole gradually dries, so the friction resistance between the shaft member and the shaft hole of the first mounting member gradually increases, and it is difficult to properly perform the force application action of the first mounting member along the upper and lower sides of the shaft member. As a result, the force applied to the upper extension member toward the lower extension member side is weakened and unstable, and there is a possibility that the uniformity of the film thickness after extension is reduced.

[0018] In addition, in the drying device described in Patent Document 4, a plurality of shelves are fixed in the drying chamber, each of which is provided with a substrate pressing member, and a substrate carrying-in switch door and a substrate carrying-out switch door corresponding to each shelf are arranged on the side of the drying chamber. Therefore, there is a problem that the number of components constituting the drying chamber increases and the device structure is complicated.

[0019] In addition, in the drying device, when the substrate is carried in and carried out, the carrying-in fork of the carrying-in means and the carrying-out fork of the carrying-out means are controlled to be lifted and lowered to the height position of the carrying-in and carrying-out shelf parts respectively, so that they are moved in the horizontal direction. Therefore, since the lifting means of the carrying-in fork and the lifting means of the carrying-out fork are arranged on both sides of the drying chamber, the installation space of these lifting mechanisms is required, which makes it difficult to save space for the device.

[0020] In addition, in the light irradiation device described in Patent Document 4, the first light irradiation unit is arranged at an upper and lower position of the conveying means and in a direction intersecting the conveying direction of the substrate, and the second light irradiation unit is arranged at an upper and lower position of the conveying means and in a direction parallel to the conveying direction of the substrate. The circumferential edge portion of the substrate conveyed by the conveying means is irradiated with light when passing through the irradiation area of ​​the first light irradiation unit and the second light irradiation unit. Therefore, it takes a long time to complete the light irradiation of each side of the substrate. In addition, it is difficult to irradiate each side of the substrate evenly, so there is a possibility of uneven irradiation.

[0021] Patent Literature

[0022] Patent Document 1: International Publication No. 2010 / 137418

[0023] Patent Document 2: International Publication No. 2016 / 072250

[0024] Patent Document 3: Japanese Patent Application Publication No. 2022-99172

[0025] Patent Document 4: Japanese Patent Application Publication No. 2017-201219 Summary of the invention

[0026] The present invention has been made in view of the above problems, and an object thereof is to provide a coating device that can easily replace and clean the spreading portion, has excellent maintainability, and can improve the stability of the spreading action of the spreading portion.

[0027] In addition, another object of the present invention is to provide a drying device that can simplify the structure and achieve compactness.

[0028] Furthermore, another object of the present invention is to provide a light irradiation device capable of uniformly and efficiently irradiating light onto the end faces and peripheral edge portions of each side of a substrate.

[0029] In addition, another object of the present invention is to provide a coating system, which includes the coating device, the drying device and / or the light irradiation device, has excellent maintainability, can save space, and efficiently perform the process of coating, drying, and curing the film-forming liquid on the circumferential edge portion of the substrate including the end face.

[0030] In order to achieve the above-mentioned object, the coating device (1) according to the present invention is a coating device for coating a film-forming liquid on a peripheral edge portion of the substrate while relatively moving the substrate and the coating unit, characterized in that:

[0031] The coating unit comprises a coating mechanism and a stretching mechanism;

[0032] The coating mechanism includes a coating portion that coats the film-forming liquid on at least an end surface of a peripheral edge portion of the substrate;

[0033] The spreading mechanism comprises a spreading portion for spreading the film-forming liquid applied by the coating portion onto the peripheral edge end surface and the upper and lower surfaces of the peripheral edge portion of the substrate into a thin film shape, and a force applying mechanism for applying force to the spreading portion toward the peripheral edge end surface and the upper and lower surfaces of the peripheral edge portion of the substrate;

[0034] The extending mechanism is configured such that the extending portion can be removed without removing the urging mechanism from the extending mechanism.

[0035] According to the coating device (1), the spreading portion can be removed without removing the urging mechanism from the spreading mechanism, so that maintenance such as replacing or cleaning only the spreading portion can be easily performed, and the coating device is excellent in maintainability.

[0036] In addition, the coating device (2) according to the present invention is characterized in that, in the coating device (1), the extending portion is constructed in such a way that it can be replaced with another extending portion without removing the urging mechanism from the extending mechanism.

[0037] According to the coating device (2), since the spreading portion is configured to be replaceable with another spreading portion without removing the force applying mechanism from the spreading mechanism, the spreading portion can be replaced with another spreading portion in response to changes in the type of substrate to be coated, coating conditions, etc., thereby improving the convenience of use of the device. The other spreading portion is, for example, a spreading portion having a different spreading width from the film forming liquid spread on the upper and lower sides of the peripheral edge of the substrate.

[0038] Furthermore, the coating device (3) according to the present invention is characterized in that, in the above-mentioned coating device (1) or (2),

[0039] The extension portion includes an upper unit and a lower unit;

[0040] The force applying mechanism comprises:

[0041] a first supporting portion supporting the upper unit,

[0042] a second supporting portion supporting the lower unit,

[0043] The first support portion and the second support portion are respectively mounted in a first direct-acting mechanism so as to be movable in a vertical direction,

[0044] a second direct-acting mechanism mounted on the first direct-acting mechanism so as to be movable in a horizontal direction perpendicular to an end surface of the peripheral edge portion of the substrate;

[0045] a first force applying portion for applying force downward to the first supporting portion,

[0046] a second force applying portion for applying force upward to the second supporting portion,

[0047] A third biasing portion biases the first linear motion mechanism attached to the second linear motion mechanism toward the upper unit and the lower unit.

[0048] According to the coating device (3), the upper unit is supported by the first support portion, the first support portion is biased downward by the first force applying portion, and the lower unit is supported by the second support portion, the second support portion is biased upward by the second force applying portion. Furthermore, the first support portion and the second support portion are mounted on the first direct-acting mechanism, and the first direct-acting mechanism mounted on the second direct-acting mechanism is biased toward the upper unit and the lower unit by the third force applying portion.

[0049] Therefore, it is not necessary to remove any of the first force applying part, the second force applying part and the third force applying part from the extension mechanism, and the upper unit can be removed from the first support part and the lower unit can be removed from the second support part, respectively, so that the upper unit and the lower unit can be maintained separately.

[0050] Furthermore, the coating device (4) according to the present invention is characterized in that, in the coating device (3), the first support portion comprises:

[0051] A first direct-acting portion mounted on the first direct-acting mechanism,

[0052] A horizontal plate portion protruding from the lower portion of the first linear motion portion;

[0053] The second supporting portion comprises:

[0054] A second direct-acting portion mounted on the first direct-acting mechanism,

[0055] A vertical plate portion protruding from the side of the second linear motion portion,

[0056] A shaft portion protruding from the vertical plate portion in the horizontal direction;

[0057] The upper unit is mounted on the horizontal plate portion in a detachable manner.

[0058] The lower unit is detachably mounted on the vertical plate portion in a state where it is inserted into the shaft portion.

[0059] According to the coating device (4), the upper unit is detachably mounted on the horizontal plate portion, and the lower unit is detachably mounted on the vertical plate portion in a state of being inserted into the shaft portion.

[0060] Therefore, the upper unit can be removed from the horizontal plate portion without removing any of the first force applying part, the second force applying part, and the third force applying part from the extension mechanism, and the lower unit can be removed from the vertical plate portion along the axis direction. Therefore, the upper unit and the lower unit do not interfere with other device parts and can be easily removed.

[0061] In addition, the coating device (5) according to the present invention is characterized in that, in the coating device (4), the upper unit comprises:

[0062] an upper block disposed on the horizontal plate portion,

[0063] An upper extension block of approximately L shape covering the upper surface and one side of the upper block,

[0064] Mounting the upper block and the upper extension block on the first mounting component of the horizontal plate portion;

[0065] The lower unit comprises:

[0066] a lower block having an axial hole for the shaft portion to pass through,

[0067] A lower extension block of approximately L shape covering the bottom and one side of the lower block,

[0068] a second mounting member mounted on the front end of the shaft portion to which the lower block is inserted,

[0069] Mounting the lower extension block on a third mounting member of the lower block;

[0070] The upper stretching block and the lower stretching block have an opposing surface opposite to the one side surface, and are provided with:

[0071] an upper extending member in contact with the upper surface of the peripheral edge of the substrate,

[0072] an end surface extension component in contact with the end surface of the peripheral edge of the substrate,

[0073] and a lower extending member in contact with the lower surface of the peripheral edge portion of the substrate.

[0074] According to the coating device (5), the upper block and the upper extension block can be detachably mounted on the horizontal plate portion by the first mounting component. In addition, the lower extension block can be mounted on the lower block by the third mounting component. In addition, the lower block can be detachably mounted on the vertical plate portion by the second mounting component in a state where the lower block is inserted into the shaft portion.

[0075] Moreover, since the upper extension component, the end face extension component and the lower extension component are provided on the relative surfaces of the upper extension block and the lower extension block, the extension width of the film-forming liquid extended on the upper and lower sides of the circumferential edge portion of the substrate can be simply changed by replacing the upper extension block and the lower extension block in accordance with changes in the substrate type, coating conditions, etc.

[0076] Furthermore, the coating device (6) according to the present invention is characterized in that, in the above-mentioned coating device (5), the lower block has a short tube portion protruding from the opening of the shaft hole,

[0077] The short tube portion has a flange portion at the front end portion.

[0078] The shaft portion comprises:

[0079] The notch formed on the front end side,

[0080] A locking portion formed on the outer peripheral surface of the front end portion where the cutout portion is formed, and a tapered portion formed from the locking portion toward the front end side;

[0081] The locking portion is configured to be lockable to the opening of the flange portion.

[0082] The second mounting member includes a short tube mounting opening having a hollow portion therein capable of accommodating the flange portion and the tapered portion, inserted into the short tube portion, and capable of being locked in the flange portion;

[0083] The hollow portion is provided with an inclined pressing portion capable of pressing along the narrow portion.

[0084] According to the coating device (6), when the lower block is installed on the vertical plate portion, the lower block is pressed into the vertical plate portion, and the shaft portion is inserted into the shaft hole of the lower block until the locking portion of the shaft portion is locked in the opening portion of the flange portion.

[0085] Furthermore, when removing the lower block from the vertical plate portion, the second mounting member is first pressed into the shaft portion side. Thus, the pressing portion of the second mounting member is pressed against the tapered portion of the shaft portion, the gap of the cutout portion gradually narrows, the locking portion is separated from the opening of the flange portion, and the locking portion is pressed into the short tube portion.

[0086] Furthermore, from this state, by pulling out the second mounting member in the direction of pulling out the second mounting member from the shaft portion, the short pipe mounting port is locked on the flange portion, and the lower block can be pulled out from the shaft portion and removed while maintaining this state.

[0087] Therefore, the lower block can be easily mounted on the vertical plate portion by pushing in the lower block, and the lower block can be easily removed from the vertical plate portion by simply pushing in and pulling out the second mounting member.

[0088] Furthermore, the coating device (7) according to the present invention is characterized in that, in any one of the coating devices (1) to (6) above,

[0089] The coating unit comprises:

[0090] A rotating shaft having a threaded portion at the lower end,

[0091] The coating roller has an annular groove formed on the outer peripheral surface and a shaft hole formed in the center portion for the rotation shaft to be inserted therethrough.

[0092] a liquid supply unit disposed adjacent to the outer peripheral surface of the coating roller and supplying the film-forming liquid to the annular groove;

[0093] a recovery unit for recovering the film-forming liquid dripping from the coating roller;

[0094] The recycling department has:

[0095] A screw hole capable of being screwed with the screw portion, a screwing portion for fixing the coating roller to the rotating shaft,

[0096] A liquid receiving portion disposed below the threaded portion,

[0097] a connecting portion for connecting the threaded portion and the liquid receiving portion so that their central axes are aligned;

[0098] The coating roller and the collecting unit are configured to be attachable to and detachable from the rotating shaft.

[0099] According to the coating device (7), since the coating roller is inserted into the rotating shaft, the screw-engaging portion of the recovery portion is screw-engaged with the threaded portion at the lower end of the rotating shaft, and the coating roller and the recovery portion are configured to be detachable from the rotating shaft, it is possible to easily perform maintenance such as replacement and cleaning of the coating roller. In addition, it is also possible to simply replace other coating rollers having different annular groove structures (e.g., height, depth, etc.) in accordance with changes in the type of substrate to be coated, coating conditions, etc.

[0100] Furthermore, the coating device (8) according to the present invention is characterized in that, in any one of the coating devices (1) to (7) above, it comprises:

[0101] a supporting portion for supporting the substrate,

[0102] A plurality of the coating units are arranged around the support portion, and a moving means is provided to move each of the coating units along the side of the substrate supported by the support portion.

[0103] A coating control unit that controls the movements of the moving means and the coating units;

[0104] The coating control unit controls

[0105] while causing the coating section of each coating unit to coat the film-forming liquid on at least the peripheral edge end surface of the substrate,

[0106] The film-forming liquid applied is spread into a thin film on the peripheral edge end surface and the upper and lower surfaces of the peripheral edge of the substrate by the spreading portion,

[0107] At the same time, the coating units are moved along the sides of the substrate by the moving means.

[0108] According to the coating device (8), the plurality of coating units coat the peripheral edge portions of each side of the substrate in parallel, which can significantly shorten the time required to coat the entire circumference of the substrate and improve coating efficiency. In addition, since the extension portions of the plurality of coating units can be easily replaced, cleaned, and maintained, the efficiency of the maintenance can be improved.

[0109] Furthermore, the drying device (1) according to the present invention comprises a drying furnace for drying a substrate coated with a film-forming liquid by a coating device, and is characterized in that the drying device comprises:

[0110] a storage shelf disposed in the drying furnace and including a multi-layer shelf on which the substrate is placed,

[0111] A carrying-in opening and closing unit provided on the substrate carrying-in side of the drying furnace for opening and closing the carrying-in opening for carrying in and out the substrate carrying means,

[0112] A carry-out opening and closing unit provided on the substrate carry-out side of the drying furnace for opening and closing the carry-out opening for carrying in and out the substrate carry-out means,

[0113] a switch control unit for controlling the switching operation of the carrying-in switch unit and the carrying-out switch unit,

[0114] a lifting mechanism for lifting the storage shelf,

[0115] A lifting control unit controls the lifting and lowering action of the storage shelf by the lifting mechanism.

[0116] According to the above-mentioned drying device (1), when the substrate is moved in or out, the storage shelf is raised or lowered in the drying furnace, so there is no need to raise or lower the substrate moving-in means or the substrate moving-out means, which can simplify the device structure and realize space saving and compactness of the device.

[0117] In addition, the drying device (2) according to the present invention is characterized in that, in the above-mentioned drying device (1), the lifting control unit,

[0118] When the substrate is carried in, after the shelf for carrying the substrate in the multi-layer shelf is located at the height of the carrying-in port, the lifting action of the storage shelf is controlled so that the substrate carried in by the substrate carrying means is placed on the shelf.

[0119] When the substrate is carried out, after the shelf for carrying out the substrate among the multi-layer shelves is located at the height of the carrying-out port, the lifting action of the storage shelf is controlled to move the substrate placed on the shelf to the substrate carrying-out means.

[0120] According to the above-mentioned drying device (2), the lifting and lowering action of the storage shelf is controlled by the lifting control unit, so that the substrate brought in from the loading port by the substrate loading means can be correctly placed on the shelf, and the substrate placed on the shelf can be correctly transferred to the substrate unloading means, so that the substrate loading and unloading actions can be performed efficiently.

[0121] Furthermore, the drying device (3) according to the present invention is characterized in that, in the above-mentioned drying device (1) or (2),

[0122] The lifting mechanism comprises:

[0123] a supporting portion supporting the storage shelf,

[0124] a lifting drive unit for lifting the support unit,

[0125] A shelf position detection unit detects that the shelf is located at a height position of the carry-in port or the carry-out port.

[0126] According to the above-mentioned drying device (3), since the shelf position detection unit detects which shelf among the multi-layer shelves is located at the height position of the carrying-in port or the carrying-out port, it is possible to correctly detect the shelf carrying the substrate carried in by the substrate carrying-in means or the shelf carrying the substrate transferred to the substrate carrying-out means, thereby improving the accuracy of the substrate carrying-in and carrying-out movements.

[0127] In addition, the light irradiation device (1) of the present invention is a light irradiation device for irradiating light to the peripheral edge portion of a substrate coated with a film-forming liquid by a coating device to cure the film-forming liquid, and is characterized in that the light irradiation device (1) comprises:

[0128] a lifting table capable of being raised and lowered while the substrate is placed thereon,

[0129] a light irradiation unit disposed around the lifting space of the lifting platform and irradiating light to the peripheral edge of the substrate;

[0130] A rotating mechanism rotates the light irradiation unit so that a light irradiation surface of the light irradiation unit is brought into close proximity with and opposed to at least a peripheral edge upper surface and a peripheral edge lower surface of the substrate.

[0131] According to the above-mentioned light irradiation device (1), the light irradiation unit is arranged around the lifting space of the lifting platform, and the light irradiation unit is rotated by the rotating mechanism so that the light irradiation surface of the light irradiation unit is adjacent to and opposite to at least the upper side of the circumferential edge portion and the lower side of the circumferential edge portion of the substrate placed on the lifting platform. Therefore, it is not necessary to move the substrate in the horizontal direction during light irradiation, and the upper and lower sides of the circumferential edge portion and the end faces of the circumferential edge portion of each side of the substrate can be evenly and efficiently irradiated with light, so that the film-forming liquid can be evenly and efficiently solidified.

[0132] Furthermore, the light irradiation device (2) according to the present invention is characterized in that, in the above-mentioned light irradiation device (1),

[0133] The light irradiation unit includes a first light irradiation unit pair and a second light irradiation unit pair which are arranged relative to each other at different heights around the lifting space.

[0134] The first light irradiation unit pair is arranged in a direction parallel to the substrate conveying direction.

[0135] The second light irradiation unit pair is arranged in a direction orthogonal to the substrate conveying direction;

[0136] The rotating mechanism comprises:

[0137] a first rotating mechanism pair for rotating the first light irradiation unit pair;

[0138] A second rotating mechanism pair is provided to rotate the second light irradiation unit pair.

[0139] According to the above-mentioned light irradiation device (2), the lifting platform carrying the substrate is moved at the height position of the first light irradiation unit pair, and the first light irradiation unit pair is rotated by the first rotating mechanism pair, so that light irradiation can be uniformly and efficiently performed on the upper side of the circumferential edge portion, the end surface of the circumferential edge portion, and the lower side of the circumferential edge portion of two sides of the substrate located in parallel with the conveying direction of the substrate. In addition, at the height position of the second light irradiation unit pair different from that of the first light irradiation unit pair, the lifting platform carrying the substrate is moved, and the second light irradiation unit pair is rotated by the second rotating mechanism pair, so that light irradiation can be uniformly and efficiently performed on the upper side of the circumferential edge portion, the end surface of the circumferential edge portion, and the lower side of the circumferential edge portion of two sides of the substrate orthogonal to the conveying direction of the substrate.

[0140] Furthermore, the light irradiation device (3) according to the present invention is characterized in that, in the above-mentioned light irradiation device (2), a moving mechanism is provided for moving at least one of the second rotating mechanism pair forward and backward in the substrate conveying direction.

[0141] According to the above light irradiation device (3), at least one of the second rotating mechanism pair is moved forward and backward in the substrate conveying direction by the moving mechanism, so that the arrangement interval of the second rotating mechanism pair can be adjusted according to the size of the substrate, etc.

[0142] Furthermore, the light irradiation device (4) according to the present invention is characterized in that, in any one of the light irradiation devices (1) to (3) above,

[0143] A transporting means for transporting the substrate is provided below the lifting platform.

[0144] The conveying means comprises a plurality of narrow rollers arranged in the conveying direction of the substrate.

[0145] The lifting platform includes an opening for allowing the narrow rollers to face an upper surface of the lifting platform at a position facing the plurality of narrow rollers of the conveying means.

[0146] According to the light irradiation device (4), by lowering the lifting platform, the narrow roller of the conveying means can face the opening of the lifting platform. Therefore, only by lowering the lifting platform, the substrate on the lifting platform can be quickly and efficiently transferred to the conveying means.

[0147] Furthermore, the light irradiation device (5) according to the present invention is characterized in that, in any one of the light irradiation devices (1) to (4) above, it comprises:

[0148] A positioning means for positioning the substrate before the substrate is moved onto the lifting platform,

[0149] A moving means is provided for moving the substrate which has been positioned in a predetermined manner by the positioning means onto the lifting table.

[0150] According to the above-mentioned light irradiation device (5), the position of the substrate is adjusted by the positioning means before the substrate is moved to the lifting platform, and the adjusted substrate is moved to the lifting platform by the moving means. Therefore, the substrate can be placed on the lifting platform in an accurately positioned state, and the light irradiation unit can correctly irradiate the upper surface, the end surface and the lower surface of the peripheral edge of the substrate.

[0151] Furthermore, the light irradiation device (6) according to the present invention is characterized in that, in the above-mentioned light irradiation device (5),

[0152] The positioning means comprises:

[0153] an upper stage unit capable of rotating while placing the substrate thereon,

[0154] a lower stage unit disposed below the upper stage unit and enabling the upper stage unit to move linearly in a predetermined direction;

[0155] a corner detection means for detecting the direction and position of the corner of the substrate placed on the upper stage unit,

[0156] A positioning control unit drives the upper stage unit and / or the lower stage unit so that the direction and position of the corner of the substrate detected by the corner detection means become predetermined directions and positions.

[0157] According to the above-mentioned light irradiation device (6), the upper stage unit and / or the lower stage unit are controlled so that the angular orientation and position of the substrate detected by the corner detection means are at a predetermined orientation and position, thereby being able to adjust the orientation and / or position of the substrate.

[0158] Furthermore, the light irradiation device (7) according to the present invention is characterized in that, in the above-mentioned light irradiation device (6),

[0159] The upper stage unit comprises:

[0160] a mounting table for mounting the substrate,

[0161] A rotating shaft portion is provided below a corner of the mounting platform,

[0162] A roller portion provided below another corner of the mounting platform,

[0163] a rotation driving unit for rotating the mounting table around the rotation shaft;

[0164] The lower stage unit comprises:

[0165] a supporting platform for supporting the mounting platform,

[0166] a direct-acting mechanism capable of adjusting the position of the support table in a direction perpendicular to the substrate moving direction;

[0167] The rotating shaft portion and the rotating driving portion are mounted on the supporting platform.

[0168] According to the above-mentioned light irradiation device (7), the upper stage unit is configured to be able to finely adjust the orientation (i.e., angle) of the substrate by rotating the mounting stage around the rotating shaft portion through the rotating drive portion. In addition, the lower stage unit is configured to be able to finely adjust the position of the supporting stage supporting the mounting stage in a direction orthogonal to the moving direction of the substrate. Therefore, the orientation and positioning accuracy of the substrate can be improved.

[0169] Furthermore, the light irradiation device (8) according to the present invention is characterized in that, in the above-mentioned light irradiation device (6) or (7), the corner detection means comprises:

[0170] An illumination unit for irradiating illumination toward the corner of the substrate from below,

[0171] An imaging unit disposed at a position opposite to the lighting unit and configured to capture images of the corner of the substrate from above;

[0172] The positioning control unit drives the upper stage unit and / or the lower stage unit so that the orientation and position of the corner of the substrate captured by the imaging unit become predetermined orientation and position.

[0173] According to the above-mentioned light irradiation device (8), since the imaging unit is configured to capture an image of the substrate corner illuminated by the illumination unit, the direction and position of the substrate corner can be accurately detected from the captured image.

[0174] Furthermore, in order to make the orientation and position of the corner of the substrate photographed by the camera unit to be the specified orientation and position, the upper stage unit and / or the lower stage unit are driven by the positioning control unit to adjust the orientation and / or position of the substrate, thereby being able to adjust the orientation and / or position of the substrate with higher precision.

[0175] In addition, the coating system (1) according to the present invention is characterized in that the coating system (1) includes any one of the coating devices (1) to (8) and any one of the drying devices (1) to (3).

[0176] According to the above-mentioned coating system (1), it is possible to construct a coating system that has the effect of any coating device among the above-mentioned (1) to (8) and the effect of any drying device among the above-mentioned (1) to (3), has better maintainability than the previous coating system, and is more compact.

[0177] In addition, the coating system (2) according to the present invention is characterized in that the coating system includes any one of the coating devices (1) to (8) and any one of the light irradiation devices (1) to (8).

[0178] According to the above-mentioned coating system (2), it is possible to construct a coating system that has the effect of any one of the coating devices mentioned above (1) to (8) and the effect of any one of the light irradiation devices mentioned above (1) to (8), has better maintainability than previous coating systems, can save space, and can efficiently perform curing treatment by light irradiation.

[0179] In addition, the coating system (3) involved in the present invention is characterized in that the coating system (3) includes any one of the coating devices (1) to (8), any one of the drying devices (1) to (3), and any one of the light irradiation devices (1) to (8).

[0180] According to the above-mentioned coating system (3), it is possible to construct a coating system that has the effect of any one of the coating devices mentioned above (1) to (8), the effect of any one of the drying devices mentioned above (1) to (3), and the effect of any one of the light irradiation devices mentioned above (1) to (8), and that is easier to maintain than previous coating systems, can save space, and can efficiently perform drying treatments and curing treatments by light irradiation. BRIEF DESCRIPTION OF THE DRAWINGS

[0181] Figure 1 It is a block diagram showing the main part structure of the coating system according to the embodiment of the present invention.

[0182] Figure 2 It is a plan view schematically showing the main structure of the coating device according to the embodiment.

[0183] Figure 3 It is a perspective view showing the structure of the main part of the coating unit.

[0184] Figure 4 yes Figure 3 A stereoscopic view of a partial cross section along line IV-IV.

[0185] Figure 5 yes Figure 3 Side view of the partial section along line VV.

[0186] Figure 6 yes Figure 5 Cross-sectional view along line VI-VI.

[0187] Figure 7 yes Figure 5 Cross-sectional view along line VI I-VII.

[0188] Figure 8 It is a perspective view showing a state where the extension part is removed from the extension mechanism.

[0189] Fig. 9 It is a partially enlarged cross-sectional view for explaining another example of the mounting structure of the second mounting component, (a) shows the state where the lower block is mounted on the mounting shaft portion, and (b) and (c) show the state where the lower block is being removed from the mounting shaft portion.

[0190] Fig.10 It is a partial cross-sectional front view showing the structure of the main part of the drying device involved in the embodiment.

[0191] Fig.11 It is a partial cross-sectional side view showing the structure of the main part of the drying device.

[0192] Fig.12 yes Fig.10 Cross-sectional view along line XII-XII.

[0193] Fig.13 yes Fig.11 Cross-sectional view along line XIII-XIII.

[0194] Fig.14 It is a plan view of the main parts showing a state in which the carrying-in fork is inserted into the drying furnace.

[0195] Fig.15 It is a perspective view showing the main part structure of the light irradiation unit of the ultraviolet irradiation device according to the embodiment.

[0196] Fig.16 It is a plan view showing the main structure of the positioning unit of the ultraviolet irradiation device.

[0197] Fig.17 It is a side view showing the structure of the main parts of the positioning unit.

[0198] Fig.18 It is a diagram for explaining the light irradiation operation by the first light irradiation unit.

[0199] Fig.19It is a diagram for explaining the light irradiation operation by the second light irradiation unit. DETAILED DESCRIPTION

[0200] Hereinafter, embodiments of the coating device, drying device, light irradiation device and coating system of the present invention will be described based on the accompanying drawings. In addition, the embodiments described below represent preferred specific examples of the present invention, and various technically preferred limitations are given, but the scope of the present invention is not limited to these modes, unless the meaning of limiting the present invention is specifically recorded in the following description.

[0201] Figure 1 It is a block diagram showing the main part structure of the coating system according to the embodiment.

[0202] The coating system 1 is configured to include a coating device 10, a drying device 60, and an ultraviolet irradiation device 90. The ultraviolet irradiation device 90 is an example of a light irradiation device.

[0203] The coating device 10 is a device for coating a film-forming liquid on a peripheral edge portion (also referred to as an outer peripheral edge portion) of a substrate while moving a coating unit 20 relative to the substrate.

[0204] The substrate to be coated is a so-called electronic circuit substrate such as a printed circuit substrate, a module substrate, etc. The constituent material of the substrate is not particularly limited. For example, a substrate composed of various materials such as a copper-clad laminate substrate, an aluminum substrate, a glass substrate, or a ceramic substrate can be the object to be coated. In addition, the size of the substrate is not particularly limited. For example, a rectangular shape of about 400 to 800 mm in length and width and a thickness of about tens of μm to several mm can be the object to be coated.

[0205] In addition, the film-forming liquid is a liquid agent used to form a thin coating film (the film thickness after curing is, for example, about 10 μm to 200 μm) on the peripheral edge of the substrate. The film-forming liquid is used to prevent dust from being generated due to the collapse of the end surface of the substrate, or to strengthen the peripheral edge of the substrate through the coating film, thereby improving the operability of the substrate in the subsequent process or reducing the defective product rate of the substrate.

[0206] As the film-forming liquid, it is preferred to have the characteristics of not peeling off in the substrate processing process (etching process or plating process, etc.) (acid resistance and / or alkali resistance), excellent adhesion to the substrate surface, and a liquid mixed with multiple resin components. For example, for the aqueous medium solvent, various liquids prepared according to the intended use, such as coating agents containing aqueous polyurethane resins, aqueous styrene resins, and aqueous tackifiers, can be used. In addition, the viscosity of the film-forming liquid can be appropriately adjusted according to conditions such as the film thickness or edge width of the coating.

[0207] The coating apparatus 10 includes a transport unit 11 for transporting a substrate into the apparatus, a positioning unit 12 for positioning the carried-in substrate, a coating stage 13 for supporting the substrate, and a substrate transfer unit 14 for transferring the substrate.

[0208] The coating device 10 further includes a coating unit 20 disposed around the coating stage 13, a moving unit 15 for moving the coating unit 20 along the side of the substrate, a coating control unit 16 for controlling the operation of these components, and an operating unit 17. The coating unit 20 has a function of coating the film-forming liquid on the peripheral edge of the substrate placed on the coating stage 13. The operating unit 17 has an operation panel, a setting input for performing operation conditions of each component of the coating system 1, and an operation input for operating each component.

[0209] The transport unit 11 is constituted by, for example, a roller-type conveying device.

[0210] The positioning unit 12 is composed of, for example, a device having substrate clamping units (not shown) on both sides of the conveying unit 11 in the width direction, and a mechanism for gently clamping both sides of the substrate on the conveying unit 11 with the substrate clamping units and positioning the substrate at a predetermined position.

[0211] The substrate transfer unit 14 has the function of transferring the substrate positioned by the positioning unit 12 to the coating station 13, and the function of transferring the substrate coated by the coating unit 20 on the coating station 13 to the loading unit 62 of the drying device 60. The substrate transfer unit 14 includes, for example, a substrate holding unit having a plurality of adsorption units for adsorbing and holding the substrate, a horizontal movement mechanism for reciprocating the substrate holding unit in the substrate conveying direction, and a vertical movement mechanism for reciprocating the substrate holding unit in the vertical direction (neither mechanism is shown). The specific structure of the coating unit 20 and the like will be described later.

[0212] The drying device 60 is a device for drying the substrate on which the film-forming liquid is applied at the peripheral edge portion by the coating device 10 .

[0213] The drying device 60 includes a drying furnace 61 for drying substrates, a loading section 62 for loading substrates from a loading port 61a provided on the substrate loading side of the drying furnace 61, and a unloading section 63 for unloading substrates from a unloading port 61b provided on the substrate unloading side of the drying furnace 61.

[0214] The drying device 60 further includes an air supply unit 64 for supplying air (hot air) to the drying furnace 61, a suction unit 65 for sucking air in the drying furnace 61, and an exhaust unit 66 for exhausting part of the air in the drying furnace 61. A dust collecting screen 64d is provided between the air supply unit 64 and the drying furnace 61.

[0215] A storage shelf 71 having multiple shelves for placing substrates is disposed in the drying furnace 61 . The drying device 60 includes a lifting mechanism 80 for lifting the storage shelf 71 and a lifting control unit 81 for controlling the lifting operation of the storage shelf 71 by the lifting mechanism 80 .

[0216] An inlet switch unit 67 for opening and closing an inlet 61a is provided on the substrate inlet side of the drying furnace 61, and an outlet switch unit 68 for opening and closing an outlet 61b is provided on the substrate outlet side of the drying furnace 61. The drying device 60 includes a switch control unit 69 for controlling the opening and closing operations of the inlet switch unit 67 and the outlet switch unit 68. The specific structure of the drying furnace 61 and the like will be described later.

[0217] The ultraviolet irradiation device 90 is a device for irradiating ultraviolet rays to the peripheral edge of the substrate dried by the drying device 60 after the film-forming liquid is applied by the coating device 10, thereby curing the film-forming liquid.

[0218] The ultraviolet irradiation device 90 includes a positioning unit 92 for positioning the substrate conveyed from the drying device 60 , and a UV irradiation stage 91 which can be raised and lowered while placing the substrate conveyed from the positioning unit 92 .

[0219] The ultraviolet irradiation device 90 further includes a substrate transfer unit 93 and a conveying unit 94. The substrate transfer unit 93 has the function of transferring the substrate unloaded by the unloading unit 63 of the drying device 60 to the positioning unit 92 and the function of transferring the substrate positioned by the positioning unit 92 to the UV irradiation table 91. The conveying unit 94 is arranged below the UV irradiation table 91 and has the function of unloading the substrate on the UV irradiation table 91.

[0220] Furthermore, the ultraviolet irradiation device 90 includes a light irradiation unit 95, a rotation mechanism 96, and an irradiation control unit 98 that controls the operation of these components. The light irradiation unit 95 is arranged around the lifting space of the UV irradiation table 91, and has the function of irradiating ultraviolet light to the peripheral edge of the substrate. The rotation mechanism 96 has the function of rotating the light irradiation unit 95 so that the light irradiation surface of the light irradiation unit 95 is adjacent to and opposite to at least the upper surface of the peripheral edge of the substrate and the lower surface of the peripheral edge. The specific structure of the positioning unit 92, the light irradiation unit 95, etc. will be described in detail later.

[0221] In the coating system 1, first, the coating device 10 coats the film-forming liquid on at least the peripheral edge end surface of the substrate, so that the coated film-forming liquid spreads into a thin film on the peripheral edge end surface and the peripheral edge upper and lower surfaces of the substrate.

[0222] Next, the drying device 60 carries the substrate coated with the film forming liquid and stretched by the coating device 10 into the drying furnace 61 to dry the film forming liquid stretched in a thin film on the peripheral edge of the substrate.

[0223] Then, a step is performed in which the ultraviolet irradiation device 90 irradiates ultraviolet rays to the peripheral edge portion of the substrate dried by the drying device 60 to solidify the film-forming liquid stretched into a thin film.

[0224] Next, a coating device constituting the coating system according to the embodiment will be described.

[0225] Figure 2 It is a plan view schematically showing the structure of main parts of the coating device according to the embodiment.

[0226] The coating device 10 includes a coating stage 13 , four coating units 20 disposed around the coating stage 13 , four moving units 15 for moving the coating units 20 along respective sides of the substrate 2 , a coating control unit 16 , and an operation unit 17 .

[0227] The coating device 10 is configured such that four coating units 20 simultaneously and in parallel coat the circumferential edge portions of the four sides of the substrate 2. In another configuration example, a structure in which one coating unit 20 sequentially coats the four sides of the substrate 2 may be adopted, and the coating device 10 may be equipped with at least one coating unit 20.

[0228] Each coating unit 20 includes a coating mechanism 21 and a spreading mechanism 30 .

[0229] The coating mechanism 21 includes a coating unit 22 that coats the film-forming liquid on at least the peripheral edge end surface of the substrate 2 .

[0230] The spreading mechanism 30 includes a spreading portion 31 and a force applying mechanism 34. The spreading portion 31 has a structure for spreading the film-forming liquid applied by the coating portion 22 to at least the peripheral edge end surface of the substrate 2 into a thin film on the peripheral edge end surface and the peripheral edge upper and lower surfaces of the substrate 2. The force applying mechanism 34 has a structure for applying force to the spreading portion 31 on the peripheral edge end surface facing the substrate 2 and the peripheral edge upper and lower surfaces.

[0231] One of the characteristics of the coating device 10 according to the embodiment is that the coating unit 20 is configured so that the spreading portion 31 can be removed without removing the urging mechanism 34 from the spreading mechanism 30. The specific structures of the coating mechanism 21 and the spreading mechanism 30 will be described later.

[0232] The coating control unit 16 controls the operation of each component of each coating unit 20 and controls each moving unit 15 to move each coating unit 20 along the side of the substrate 2 (in the direction of arrow A).

[0233] In addition, the coating control unit 16 may have a function of controlling the operation of each device unit, such as controlling the operation of the coating table 13 (e.g., lifting control), in addition to controlling the operation of each coating unit 20 and each moving unit 15. The coating control unit 16 includes, for example, a microcomputer, a drive circuit, a storage unit, and a power supply unit (all not shown).

[0234] The coating table 13 is supported from below by a lifting mechanism (not shown) so as to be able to be lifted and lowered. In addition, a suction mechanism (not shown) may be provided on the coating table 13, in which case the substrate 2 can be sucked onto the coating table 13. As the suction mechanism, for example, a structure in which a plurality of air suction holes provided on the coating table 13 are connected to a vacuum pump via an air pipe may be adopted. In addition, the substrate 2 is placed from the conveying unit 11 to a predetermined position on the coating table 13 by the substrate transfer unit 14.

[0235] Each moving unit 15 is disposed so as to surround the coating station 13 and is constituted by, for example, an orthogonal robot, and includes an X-axis linear motion mechanism 15 a and a Y-axis linear motion mechanism 15 b attached to the X-axis linear motion mechanism 15 a .

[0236] The X-axis direct-acting mechanism 15a is a device for moving the coating unit 20 along the side (X-axis direction) of the substrate 2, and is composed of, for example, an X-axis cylinder arranged parallel to each side of the coating table 13 and an X-axis slider sliding on the X-axis cylinder.

[0237] The Y-axis direct-acting mechanism 15b is a device for moving the coating unit 20 in a direction (Y-axis direction) perpendicular to the side of the substrate 2. The Y-axis direct-acting mechanism 15b includes a Y-axis cylinder mounted on the X-axis slider of the X-axis direct-acting mechanism 15a and a Y-axis slider that slides the Y-axis cylinder.

[0238] In addition, the operation unit 17 can receive various inputs such as setting of operating conditions of each component of the device, operation instructions of each component, switching of operating modes, etc. The operation signal and setting signal input through the operation unit 17 are output to the coating control unit 16. For example, the operation unit 17 can set the operating conditions of each component such as the initial position of the coating unit 20, the moving speed of the moving unit 15, and the film forming liquid supply speed of the coating unit 20.

[0239] In the coating device 10 configured as described above, the coating control unit 16 controls each coating unit 20 to move along each side of the substrate 2 and controls each coating unit 22 to coat the film-forming liquid on at least the peripheral edge end surface of the substrate 2 (coating step).

[0240] In addition, simultaneously with the above-mentioned coating process, the coating control unit 16 controls each coating unit 20 to move along each side of the substrate 2 while applying force to the extending portion 31 toward the end surface of the circumferential edge portion and the upper and lower surfaces of the circumferential edge portion through the force applying mechanism 34, that is, while pressing the extending portion 31 against the end surface of the circumferential edge portion and the upper and lower surfaces of the circumferential edge portion of the substrate, and controls the film-forming liquid applied in the above-mentioned coating process to be stretched into a thin film on the end surface of the circumferential edge portion and the upper and lower surfaces of the circumferential edge portion of the substrate through the stretching mechanism 30 (stretching process).

[0241] Figure 3 It is a perspective view showing the structure of main parts of the coating unit 20 . Figure 4 yes Figure 3 The partial cross-sectional perspective view taken along line IV-IV in FIG. 1 is a diagram showing the structure of the main components of the coating mechanism 21. In order to simplify the drawing, hatching of the cross section of the coating portion is omitted.

[0242] The coating unit 20 includes a coating mechanism 21 including a coating portion 22 and an expansion mechanism 30 including an expansion portion 31 and a biasing mechanism 34 , and is configured such that the expansion portion 31 can be detached without detaching the biasing mechanism 34 from the expansion mechanism 30 .

[0243] The coating unit 20 further includes a liquid storage portion 50 that stores the film-forming liquid, and a transfer pump 54 that transfers the film-forming liquid from the liquid storage portion 50 to the coating portion 22 via a tube (not shown).

[0244] The coating mechanism 21, the spreading mechanism 30, the liquid storage unit 50, and the transfer pump 54 are assembled and integrated on a mounting member 55, and the mounting member 55 is mounted on the Y-axis linear motion mechanism 15b (see Figure 2 ).

[0245] The liquid storage unit 50 is disposed below the coating mechanism 21 and the stretching mechanism 30, and includes a cover 51, a lower box 52, and a box support 53 on which the lower box 52 is placed. The box support 53 is installed in a slightly inclined state so that the film-forming liquid in the lower box 52 flows from the coating mechanism 21 to the stretching mechanism 30. The cover 51 is provided with a tube mounting portion 51a, and a tube (not shown) connected to a transfer pump 54 is mounted on the tube mounting portion 51a. In addition, the film-forming liquid recovered by the coating mechanism 21 and the stretching mechanism 30 is stored in the liquid storage unit 50, and the film-forming liquid circulates in the coating unit 20 and is reused.

[0246] Next, the structure of the coating mechanism 21 will be described.

[0247] like Figure 3 , 4As shown, the coating unit 22 installed in the coating mechanism 21 includes a rotating shaft 23 that rotates by a driving force from a driving motor (not shown), a coating roller 24, a liquid supply unit 25, and a recovery unit 26. The rotating shaft 23 has a threaded portion 23a at its lower end.

[0248] The coating roller 24 has a substantially disc-like shape, with an annular groove 24a formed on the outer circumference and an axial hole 24b formed in the center for the rotation shaft 23 to pass through. The cross section of the annular groove 24a is generally U-shaped, but is not limited to this shape. In addition, the groove width and depth of the annular groove 24a can be appropriately set according to the conditions such as the type and thickness of the substrate 2 to be coated, and the extension width to the upper and lower sides of the circumferential edge of the substrate 2.

[0249] The coating device 10 may also be equipped with a coating roller 24 having annular grooves 24a for the extension widths of, for example, 1 mm, 3 mm, 5 mm, and 7 mm. With this configuration, the coating roller 24 can be replaced appropriately according to the conditions such as the extension width.

[0250] The coating roller 24 is configured to be rotationally driven by the driving motor at a predetermined speed. The predetermined speed can be adjusted to a rotation speed that matches the relative moving speed of the substrate 2, for example.

[0251] The liquid supply unit 25 is disposed adjacent to the outer peripheral surface of the coating roller 24 and is a member for supplying the film-forming liquid to the annular groove 24a. The liquid supply unit 25 includes a tube mounting portion 25a, a liquid discharge portion 25b, and a contact piece (not shown).

[0252] The tube mounting portion 25a is composed of an L-shaped tube to which a tube (not shown) from the transfer pump 54 is mounted. A discharge hole 25ba is formed in the liquid discharge portion 25b. The discharge hole 25ba is a liquid flow path formed from the tube mounting portion 25a toward the opposite surface facing the annular groove 24a of the coating roller 24. The contact piece is arranged adjacent to the liquid discharge portion 25b, and is installed in a state where its front end portion contacts the outer peripheral surface of the coating roller 24.

[0253] The recovery part 26 is a part for recovering the film-forming liquid dripping from the coating roller 24. The recovery part 26 includes a screw-fitting part 26a for fixing the coating roller 24 to the rotating shaft 23, a liquid receiving part 26b disposed below the screw-fitting part 26a, and a connecting part 26c for connecting the screw-fitting part 26a and the liquid receiving part 26b with the same central axis.

[0254] The screw-engaging portion 26 a includes a screw hole 26 aa that can be screwed into the screw portion 23 a of the rotating shaft 23 .

[0255] The liquid receiving portion 26 b is formed in a disk shape having a larger diameter than the coating roller 24 , and a tube portion 26 d is provided extending downward from a central hole.

[0256] The lower end portion of the tube portion 26 d is inserted into the liquid storage portion 50 , and the film-forming liquid dripping from the coating roller 24 to the liquid receiving portion 26 b is recovered in the liquid storage portion 50 through the tube portion 26 d .

[0257] The threaded portion 23a is formed of a reverse thread to prevent the threaded portion 26a from loosening as the rotary shaft 23 rotates, and the threaded hole 26aa is formed of a reverse thread.

[0258] Next, the structure of the extension mechanism will be described.

[0259] Figure 5 yes Figure 3 The partial cross-sectional side view taken along the line VV in FIG. 1 is a diagram showing the structure of the main parts of the extension mechanism 30 . Figure 6 yes Figure 5 The cross-sectional view taken along the line VI-VI in FIG. 1 is a cross-sectional view showing the structure of the main components of the upper extension block 32 b and the lower extension block 33 b. Figure 7 yes Figure 5 The cross-sectional view taken along the line VII-VII in the figure is a cross-sectional view showing the structure of main components of the lower unit 33 , the second support portion 36 , and the first linear motion mechanism 37 . Figure 8 It is a perspective view showing main components in a state where the expanding portion 31 is removed from the expanding mechanism 30 .

[0260] like Figure 3 , 5 As shown in FIG. 8 , the stretching mechanism 30 includes a stretching section 31 and a force applying mechanism 34. The stretching section 31 has a structure that allows the film-forming liquid applied by the coating section 22 to at least the end surface of the peripheral edge of the substrate to be stretched into a thin film on the end surface of the peripheral edge of the substrate and the upper and lower surfaces of the peripheral edge. In this embodiment, the stretching section 31 includes an upper unit 32 and a lower unit 33.

[0261] The force-applying mechanism 34 has a structure for applying force to the extension portion 31 toward the end surface of the peripheral edge portion of the substrate 2 and the upper and lower surfaces of the peripheral edge portion. In the present embodiment, the force-applying mechanism 34 includes a first support portion 35 for supporting the upper unit 32 and a second support portion 36 for supporting the lower unit 33, and further includes a first direct-acting mechanism 37 and a second direct-acting mechanism 38. The first support portion 35 and the second support portion 36 are respectively mounted on the first direct-acting mechanism 37 in a manner that allows them to move in the vertical direction. The first direct-acting mechanism 37 is mounted on the second direct-acting mechanism 38 in a manner that allows them to move in the horizontal direction orthogonal to the end surface of the peripheral edge portion of the substrate 2.

[0262] The force applying mechanism 34 also includes a first force applying portion 39 that applies force to the first support portion 35 downward (towards the second support portion 36 ), a second force applying portion 40 that applies force to the second support portion 36 upward (towards the first support portion 35 ), and a third force applying portion 41 that applies force to the first direct-acting mechanism 37 toward the upper unit 32 and the lower unit 33 .

[0263] The first direct-acting mechanism 37 includes a direct-acting guide 37b having a direct-acting guide rail 37a disposed in a vertical direction, and an upper slide block 37c and a lower slide block 37d slidably mounted on the direct-acting guide rail 37a. The direct-acting guide 37b has a substantially L-shaped shape when viewed from the side.

[0264] The second direct-acting mechanism 38 includes a direct-acting guide portion 38b having a direct-acting guide rail 38a in a horizontal direction perpendicular to the end surface of the peripheral edge portion of the substrate 2, a slide block 38c slidably mounted on the direct-acting guide rail 38a, and a stopper portion 38d for limiting the movement of the slide block 38c. The direct-acting guide portion 37b is mounted on the slide block 38c.

[0265] The first support portion 35 includes a first linear motion portion 35a mounted on an upper slide block 37c of the first linear motion mechanism 37 and a horizontal plate portion 35b horizontally protruding from a lower portion (lower edge portion) of the first linear motion portion 35a.

[0266] The second support portion 36 includes a second direct-acting portion 36a mounted on the lower slide block 37d of the first direct-acting mechanism 37, a vertical plate portion 36b vertically protruding from the side portion (side edge portion) of the second direct-acting portion 36a, and a mounting shaft portion 36c and a supporting shaft portion 36d protruding in the horizontal direction from the vertical plate portion 36b. The mounting shaft portion 36c and the supporting shaft portion 36d are arranged in parallel in the horizontal direction. In addition, a stopper portion 36e for limiting the upward movement of the lower slide block 37d is provided on the second direct-acting portion 36a.

[0267] The first urging portion 39 includes a tension coil spring 39 a disposed in the longitudinal direction. The tension coil spring 39 a has an upper end attached to the first linear motion portion 35 a and a lower end attached to the second linear motion portion 36 a .

[0268] The second urging portion 40 includes a tension coil spring 40 a disposed in the longitudinal direction. The tension coil spring 40 a has an upper end attached to the linear motion guide portion 37 b and a lower end attached to the second linear motion portion 36 a .

[0269] The third biasing portion 41 includes a tension coil spring 41 a disposed in the lateral direction. The tension coil spring 41 a has one end mounted on the stopper portion 38 d and the other end mounted on the slide block 38 c .

[0270] The upper unit 32 constituting the extension portion 31 is composed of an upper block 32a, an upper extension block 32b, and a first mounting member 32c. The upper block 32a has a substantially rectangular parallelepiped shape and is disposed on the horizontal plate portion 35b of the first support portion 35. The upper extension block 32b has a substantially L-shaped shape covering the upper surface and one side surface of the upper block 32a. The first mounting member 32c is a member for mounting the upper block 32a and the upper extension block 32b on the horizontal plate portion 35b.

[0271] The first mounting member 32c is formed of a stepped external thread having a stepped head 32ca and a threaded shaft 32cb. The threaded shaft 32cb is formed to pass through the upper extension block 32b and the upper block 32a, and the front threaded portion of the threaded shaft 32cb is screwed into a threaded hole 35ba formed on the horizontal plate portion 35b.

[0272] In addition, in order to prevent the upper extension block 32b and the upper block 32a from falling off from the first mounting member 32c, a locking portion (peripheral convex portion) is formed on the threaded shaft portion 32cb to prevent falling off. A step portion is formed in the insertion hole so that the locking portion is locked in the insertion hole of the upper block 32a. In addition, the upper block 32a and the upper extension block 32b are fixed by a fixing member 32d such as a fixing pin.

[0273] The lower unit 33 includes a lower block 33a, a lower extension block 33b, a second mounting member 33c, and a third mounting member 33d. The lower block 33a has an axial hole 33aa through which the mounting shaft portion 36c of the second support portion 36 passes, and an axial hole 33ab through which the support shaft portion 36d passes. The lower extension block 33b has a substantially L-shaped shape covering the lower surface and one side surface of the lower block 33a.

[0274] The second mounting member 33c is mounted on the front end of the mounting shaft 36c to which the lower block 33a is inserted, and is a member for mounting the lower block 33a on the mounting shaft 36c. The third mounting member 33d is a member for mounting the lower extension block 33b on the lower block 33a.

[0275] The second mounting member 33c is formed of an internal thread having a head portion 33ca and an internal thread portion 33cb, and is threadedly engaged with the front end thread portion of the mounting shaft portion 36c.

[0276] The third mounting member 33d is formed of a stepped external thread having a stepped head 33da and a shaft 33db. The shaft 33db is inserted through the recovery portion 33e and the lower extension block 33b, and the front threaded portion of the shaft 33db is screwed into a threaded hole formed on the bottom of the lower block 33a.

[0277] like Figure 5 , 6As shown in FIG. 7 , the upper extension block 32b and the lower extension block 33b have an opposing surface opposite to the one side surface. The opposing surface is provided with an upper extension component 32ba in contact with the upper surface of the peripheral edge of the substrate 2, an end surface extension component 32bb in contact with the end surface of the peripheral edge of the substrate 2, and a lower extension component 33ba in contact with the lower surface of the peripheral edge of the substrate 2.

[0278] The stretching part 31 is constructed so as to move along the periphery of the substrate while the end surface of the peripheral edge portion and the upper and lower surfaces (three surfaces) of the peripheral edge portion of the substrate are clamped by the upper stretching part 32ba, the end surface stretching part 32bb and the lower stretching part 33ba to stretch the film-forming liquid into a thin film.

[0279] In this embodiment, an upper extension component 32ba and an end extension component 32bb are provided at the lower end of the one side surface of the upper extension block 32b, and a lower extension component 33ba is provided at the upper end of the one side surface of the lower extension block 33b. In another configuration example, the upper extension component 32ba may be provided on the upper extension block 32b, and the lower extension component 33ba and the end extension component 32bb may be provided on the lower extension block 33b.

[0280] The end surface extension member 32bb is arranged to face the space between the upper extension member 32ba and the lower extension member 33ba. In other words, the end surface extension member 32bb is arranged to press the peripheral edge end surface of the substrate 2 sandwiched between the upper extension member 32ba and the lower extension member 33ba.

[0281] In addition, it is preferred that a plurality of microgrooves are formed on the surfaces of the upper extension member 32ba, the end surface extension member 32bb, and the lower extension member 33ba that are opposite to the substrate 2, along the moving direction of the coating unit 20. The plurality of microgrooves are composed of, for example, grooves with a wave-shaped cross section or grooves with a V-shaped cross section, and the spacing or depth of these microgrooves can be appropriately set according to the characteristics such as the viscosity of the film-forming liquid used or the thickness of the film to be formed. For example, when forming a coating film of about 10 μm to 50 μm, it is preferred to set the groove center spacing to about 0.2 mm to 0.3 mm and the groove depth to about 0.05 mm to 0.1 mm.

[0282] The upper extension member 32ba and the lower extension member 33ba are fixed to the upper extension block 32b and the lower extension block 33b. The upper extension member 32ba and the lower extension member 33ba are, for example, made of a circular plate or semicircular member obtained by slicing a round rod-shaped rod with a diameter of about 5 mm to 15 mm into a width of several millimeters (for example, 1 mm to 8 mm) by a coating machine, and also a thin plate-shaped member with a curved surface.

[0283] Alternatively, the upper extension member 32ba may also be processed into a circular plate, semicircular shape or curved surface with a width of several millimeters (for example, about 1 mm to 8 mm) by processing the lower edge of the side surface of the upper extension block 32b (the portion opposite to the lower extension block 33b).

[0284] Similarly, the lower extension member 33ba can also be processed into a circular plate, semicircular shape or curved surface with a width of several millimeters (for example, about 1mm to 8mm) by processing the upper edge of one side of the lower extension block 33b (the portion opposite to the upper extension block 32b).

[0285] In addition, the coating device 10 may be configured to include several (multiple) upper units 32 and lower units 33 with different extension widths, which can be replaced according to coating conditions. For example, the coating device 10 may be equipped with four types of upper units 32 each having an upper extension component 32ba for extension widths of 1 mm, 3 mm, 5 mm, and 7 mm, and four types of lower units 33 each having a lower extension component 33ba for extension widths of 1 mm, 3 mm, 5 mm, and 7 mm.

[0286] According to this configuration, the upper unit 32 and the lower unit 33 constituting the spreading section 31 can be replaced as appropriate based on the coating conditions such as the spreading width. In this case, it is preferable to replace the coating roller 24 of the coating section 22 at the same time based on the conditions such as the spreading width.

[0287] The lower stretching block 33b has a recovery path 33bb, which is a flow path for recovering the film forming liquid removed from the substrate 2 by the stretching action. The inner wall surface of the recovery path 33bb is provided with a lower stretching member 33ba, and the recovery path 33bb is assembled in a state where a part of the end surface stretching member 32bb is in contact with the lower stretching member 33ba.

[0288] Furthermore, a recovery portion 33e for recovering the film-forming liquid dripping from the recovery path 33bb is provided at the lower portion of one side surface of the lower extension block 33b.

[0289] The recovery section 33e includes a liquid receiving section 33ea for receiving the film forming liquid dripping from the recovery path 33bb and a tube section 33eb extending downward from the liquid receiving section 33ea. The lower portion of the tube section 33eb is inserted into the liquid receiving section 50, and the film forming liquid dripping from the lower extension block 33b flows into the liquid receiving section 50 through the liquid receiving section 33ea and the tube section 33eb.

[0290] As described above, in the coating device 10 according to the embodiment, the upper unit 32 of the extension portion 31 is detachably mounted on the horizontal plate portion 35b of the first support portion 35. In addition, the lower unit 33 is detachably mounted on the vertical plate portion 36b in a state of being inserted into the mounting shaft portion 36c and the supporting shaft portion 36d of the second support portion 36.

[0291] Next, the operation of attaching and detaching the spreading section 31 (the upper unit 32 and the lower unit 33 ) from the spreading mechanism 30 of the coating unit 20 will be described.

[0292] like Figure 8 As shown in the figure, when removing the upper unit 32 from the extension mechanism 30, the stepped head 32ca of the first mounting member 32c is rotated in the threaded outer direction (left turn). In this way, the front end of the threaded shaft 32cb of the first mounting member 32c is disengaged from the threaded hole 35ba of the horizontal plate portion 35b, and the upper unit 32 can be removed from the horizontal plate portion 35b. At this time, the upper block 32a and the upper extension block 32b remain locked to the threaded shaft 32cb of the first mounting member 32c.

[0293] In this way, the upper unit 32 can be removed separately from the lower unit 33. When the upper unit 32 is removed from the extension mechanism 30, the components constituting the urging mechanism 34 are not removed from the extension mechanism 30.

[0294] Next, when removing the lower unit 33 from the extension mechanism 30, the head 33ca of the second mounting member 33c is rotated in the threaded outer (left) direction. In this way, the internal thread portion 33cb of the second mounting member 33c is disengaged from the threaded portion at the front end of the mounting shaft portion 36c, so that the lower block 33a can be pulled out from the mounting shaft portion 36c and the supporting shaft portion 36d, and the lower unit 33 can be removed from the vertical plate portion 36b. At this time, the lower extension block 33b and the recovery portion 33e remain mounted on the lower block 33a by the third mounting member 33d.

[0295] In this way, the lower unit 33 can be removed separately from the upper unit 32. When the lower unit 33 is removed from the extension mechanism 30, the components constituting the urging mechanism 34 are not removed from the extension mechanism 30.

[0296] According to the coating device 10 according to the above embodiment, the expander 31 can be removed without removing the urging mechanism 34 from the expander mechanism 30. Therefore, maintenance such as replacing or cleaning the expander 31 can be easily performed, and the coating device is excellent in maintainability.

[0297] In addition, according to the coating device 10, the spreading part 31 is configured to be replaceable with another spreading part without removing the force applying mechanism 34 from the spreading mechanism 30. Therefore, in response to changes in the type of substrate to be coated and the coating conditions, the spreading part 31 can be replaced with another spreading part, for example, with a spreading part having a different spreading width of the film forming liquid spread on the upper and lower sides of the peripheral edge of the substrate, thereby improving the convenience of use of the device.

[0298] In addition, according to the coating device 10, the upper unit 32 of the extending portion 31 is supported by the first supporting portion 35 of the force applying mechanism 34, and the first supporting portion 35 is forced downward (toward the upper side of the peripheral edge portion of the substrate) by the first force applying portion 39. In addition, the lower unit 33 of the extending portion 31 is supported by the second supporting portion 36 of the force applying mechanism 34, and the second supporting portion 36 is forced upward (toward the lower side of the peripheral edge portion of the substrate) by the second force applying portion 40. Furthermore, the first supporting portion 35 and the second supporting portion 36 are mounted on the first direct-acting mechanism 37, and the first direct-acting mechanism 37 mounted on the second direct-acting mechanism 38 is forced toward the upper unit 32 and the lower unit 33 side (toward the end surface of the substrate) by the third force applying portion 41.

[0299] Therefore, it is not necessary to remove any of the first force applying part 39, the second force applying part 40 and the third force applying part 41 from the extension mechanism 30, and the upper unit 32 can be removed from the first support part 35 and the lower unit 33 can be removed from the second support part 36, respectively, so that maintenance of the upper unit 32 and the lower unit 33 can be carried out separately.

[0300] In addition, according to the coating device 10, the upper unit 32 is detachably mounted on the horizontal plate portion 35b of the first support portion 35, and the lower unit 33 is detachably mounted on the vertical plate portion 36b in a state of being inserted into the mounting shaft portion 36c of the second support portion 36.

[0301] Therefore, the upper unit 32 can be easily removed from the horizontal plate portion 35b without removing any of the first force applying portion 39, the second force applying portion 40, and the third force applying portion 41 from the extension mechanism 30. In addition, the lower unit 33 can be easily removed from the vertical plate portion 36b along the axial direction of the mounting shaft portion 36c. Therefore, the upper unit 32 and the lower unit 33 can be easily removed without interfering with other device components.

[0302] In addition, according to the coating device 10, the upper block 32a and the upper extension block 32b can be detachably mounted on the horizontal plate portion 35b by the first mounting member 32c of the upper unit 32. In addition, the lower block 33a can be detachably mounted on the vertical plate portion 36b by the second mounting member 33c in a state where the lower block 33a is inserted into the mounting shaft portion 36c. In addition, the lower extension block 33b can be mounted on the lower block 33a by the third mounting member 33d of the lower unit 33.

[0303] Furthermore, an upper surface stretching member 32ba, an end surface stretching member 32bb, and a lower surface stretching member 33ba are provided on the surfaces opposite to the upper stretching block 32b and the lower stretching block 33b. Therefore, by replacing the upper stretching block 32b and the lower stretching block 33b in accordance with changes in the type of substrate and coating conditions, the stretching width of the film-forming liquid stretched on the upper and lower surfaces of the peripheral edge of the substrate can be easily changed.

[0304] In addition, according to the coating device 10, the coating roller 24 is inserted into the rotating shaft 23 of the coating part 22, and the screw-engaging part 26a of the recovery part 26 is screwed into the threaded part 23a at the lower end of the rotating shaft 23, and the coating roller 24 and the recovery part 26 are configured to be detachable from the rotating shaft 23. Therefore, it is easy to perform maintenance such as replacement and cleaning of the coating roller 24. In addition, it is also possible to simply replace the coating roller 24 with another coating roller having a different structure (such as height, depth, etc.) of the annular groove 24a of the coating roller 24 in accordance with changes in the type of substrate to be coated and coating conditions.

[0305] In addition, according to the coating device 10, the circumferential edge portions of each side of the substrate are coated by four coating units 20 in parallel at the same time, which can greatly shorten the time for coating the entire circumference of the substrate and improve the coating efficiency. In addition, since the extension portion 31 of each coating unit 20 can be easily replaced, cleaned, etc., the maintenance efficiency of the entire device can be improved.

[0306] In the coating device 10 according to the above embodiment, the second mounting member 33c is formed of an internal thread, and the mounting shaft portion 36c has a distal thread portion, and these components are threadedly engaged, but the mounting structure of the second mounting member 33c is not limited thereto.

[0307] Fig. 9 It is a partially enlarged cross-sectional view used to illustrate an example of the installation structure of the second installation component 33f involved in another mode, (a) shows the state where the lower block 33a is installed on the installation shaft portion 36c, and (b) and (c) show the state where the lower block 33a is being removed from the installation shaft portion 36c.

[0308] In another mounting configuration example, the structure of the second mounting member 33f is different from the structure of the lower block 33a and the mounting shaft portion 36c, and the structure in which the second mounting member 33f is mounted on the mounting shaft portion 36c is different.

[0309] The lower block 33a according to another example of the mounting structure includes a short tube portion 33ac protruding from the opening of the shaft hole 33aa, and an annular flange portion 33ad is formed at the front end of the short tube portion 33ac.

[0310] The mounting shaft portion 36c includes a notch portion 36ca formed in a bifurcated shape on the front end side, a locking portion 36cb provided in a protruding shape on the outer peripheral surface of the front end portion formed with the notch portion 36ca, and a tapered portion 36cc formed in a manner that the shaft diameter becomes thinner from the locking portion 36cb toward the front end portion. The locking portion 36cb is configured to be locked to the edge of the opening portion of the flange portion 33ad.

[0311] Furthermore, the second mounting member 33f has a button-shaped outer shape and includes a hollow portion 33fa inside which can accommodate the flange portion 33ad and the tapered portion 36cc.

[0312] The second mounting member 33f includes a short tube mounting port 33fb that fits with the short tube portion 33ac and is configured to be engageable with the flange portion 33ad, and includes an inclined pressing portion 33fc that can be pressed along the tapered portion 36cc on the hollow portion 33fa.

[0313] like Fig. 9 As shown in (a), the lower block 33a is inserted into the mounting shaft portion 36c, and the lower block 33a is pushed against the vertical plate portion 36b (refer to Figure 8 ) Then, the locking portion 36cb of the mounting shaft portion 36c is locked to the flange portion 33ad of the lower block 33a, so that the lower block 33a is mounted so as not to fall off from the mounting shaft portion 36c.

[0314] Therefore, during installation, the lower block 33a inserted into the installation shaft portion 36c is simply pressed toward the vertical plate portion 36b until the locking portion 36cb is locked on the flange portion 33ad, thereby enabling easy installation.

[0315] Next, when the lower block 33a is removed from the mounting shaft portion 36c, Fig. 9 As shown in (b), the second mounting member 33f is pressed into the lower block 33a side. Then, the pressing portion 33fc of the hollow portion 33fa contacts the tapered portion 36cc of the mounting shaft portion 36c. When further pressed in, the tapered portion 36cc is bent inward by the pressing portion 33fc, the gap of the cutout portion 36ca is narrowed, and the locking portion 36cb locked in the flange portion 33ad is separated from the flange portion 33ad, and the tapered portion 36cc is pressed into the short tube portion 33ac.

[0316] When the second mounting member 33f is pulled out from the mounting shaft portion 36c from this state, as shown in FIG. Fig. 9 As shown in (c), the short pipe mounting port 33fb of the second mounting member 33f is locked in the flange portion 33ad. The second mounting member 33f and the lower block 33a are pulled out from the mounting shaft portion 36c while maintaining this locked state, and the lower block 33a can be removed from the mounting shaft portion 36c.

[0317] According to the above-mentioned other mounting configuration example, the lower block 33a can be easily mounted on the vertical plate portion 36b (that is, the lower unit 33 can be mounted on the second support portion 36) by only a one-touch action of pressing the lower block 33a inserted into the mounting shaft portion 36c on the vertical plate portion 36b. Fig. 9 The second mounting member 33f shown is pushed into the lower block 33a side and then pulled out, thereby making it possible to easily remove the lower block 33a inserted into the mounting shaft portion 36c from the vertical plate portion 36b.

[0318] Next, the drying device 60 constituting the coating system 1 according to the embodiment will be described.

[0319] Fig.10 It is a partial cross-sectional front view showing the structure of the main parts of the drying device according to the embodiment, and shows the internal structure of the drying furnace on the side of the opening and closing door. Fig.11 This is a partial cross-sectional side view showing the structure of the main parts of the drying device, showing the internal structure of the substrate unloading side of the drying furnace.

[0320] Fig.12 yes Fig.10 The cross-sectional view along the line XII-XII in FIG. 1 is a cross-sectional view showing the internal structure of the drying furnace when the door is open. Fig.13 yes Fig.11 The cross-sectional view along the line XIII-XIII is a longitudinal cross-sectional view showing the inner side of the drying furnace opening and closing door.

[0321] Fig.14 It is a partial top view showing a state where the carrying-in section is inserted into the storage shelf of the drying furnace.

[0322] In addition, Figure 10 to Figure 13 In order to simplify the drawings, the hatching lines representing the cross section of the drying furnace are omitted.

[0323] The drying oven 61 has a substantially rectangular box shape, and a storage shelf 71 having a multi-layer shelf 70 for placing substrates is arranged inside the drying oven 61. A substrate carrying inlet 61a is provided at a position on the side wall of the drying oven 61 on which substrates are carried in, and a substrate carrying outlet 61b is provided at a position on the side wall of the drying oven 61 on which substrates are carried out.

[0324] The carrying-in port 61a has a size that allows the carrying-in fork 62a constituting the carrying-in portion 62 to be inserted and removed, and the carrying-out port 61b has a size that allows the carrying-out fork 63a constituting the carrying-out portion 63 to be inserted and removed.

[0325] The storage shelf 71 is composed of a frame body including a longitudinal frame member 71a and a transverse frame member 71b with a rectangular parallelepiped ridge as a skeleton. In addition, a lower frame member 71c corresponding to the number of shelves 70 is arranged between a pair of longitudinal frame members 71a on the side of the import port 61a, and a lower frame member 71c corresponding to the number of shelves 70 is arranged between a pair of longitudinal frame members 71a on the side of the export port 61b.

[0326] Each shelf 70 is composed of a short angular rod-shaped support member 70a and an angular rod-shaped horizontal bar member 70b. The support member 70a is installed at three locations, at both ends and in the center of each lower frame member 71c on the side of the inlet 61a and the side of the outlet 61b, in a state of extending in a direction perpendicular to the lower frame member 71c. The horizontal bar member 70b is installed between the support members 70a on the side of the inlet 61a and the side of the outlet 61b. Then, the substrate is placed on the three horizontal bar members 70b constituting the shelf 70.

[0327] The positions of the three horizontal bar members 70 b are set in consideration of the size of the substrate and the position of an empty space on the substrate where no circuit is formed.

[0328] The carrying-in section 62 includes a carrying-in fork 62a on which a substrate is placed, and a linear motion mechanism (not shown) that reciprocates the carrying-in fork 62a in a direction in which the substrate is carried in.

[0329] The carry-out section 63 includes a carry-out fork 63 a on which a substrate is placed, and a linear motion mechanism (not shown) that reciprocates the carry-out fork 63 a in a direction in which the substrate is carried out.

[0330] like Fig.14 As shown, the carry-in fork 62a has a shape including four teeth, and the four teeth positions and intervals are set so that the four teeth do not overlap with the three horizontal strip members 70b of the shelf 70. The carry-out fork 63a has the same structure.

[0331] The drying furnace 61 is provided with a lifting mechanism 80 for lifting the storage shelf 71 , and the lifting operation of the storage shelf 71 by the lifting mechanism 80 is controlled by a lifting control unit 81 .

[0332] The lifting mechanism 80 includes a support portion 80a that supports the storage shelf 71 in a suspended state, a lifting drive portion 80b that lifts the support portion 80a, and a shelf position detection portion 80c that detects a shelf at a height position of the carrying-in port 61a or the carrying-out port 61b.

[0333] The support portion 80a includes a lifting shaft 80aa and a lifting plate 80ab.

[0334] The lifting shaft 80aa is arranged to penetrate the top wall of the drying furnace 61, with the lower end mounted on the upper portion of the storage shelf 71 and the upper end mounted on the lifting plate 80ab arranged above the drying furnace 61. An axial hole 61c through which the lifting shaft 80aa is inserted is formed on the top wall of the drying furnace 61, and a linear sleeve 80ac through which the lifting shaft 80aa is inserted is mounted on the axial hole 61c.

[0335] The shelf position detection unit 80c is installed on the upper part of the linear sleeve 80ac. The shelf position detection unit 80c is composed of a photoelectric sensor such as an optical fiber sensor. A plurality of detection holes 80ad formed corresponding to the number and interval of the multi-layer shelves 70 are provided on the lifting shaft 80aa. Moreover, by detecting that the light emitted from the photoelectric sensor passes through the detection hole 80ad, it is possible to detect the state where there is a shelf 70 at the height position of the carrying-in entrance 61a or the carrying-out exit 61b, and it is possible to detect which shelf among the multi-layer shelves 70 is located at the height position of the carrying-in entrance 61a or the carrying-out exit 61b.

[0336] The lifting drive unit 80b is composed of, for example, a winch, which has a function of installing a hanging device such as a chain wound around a drum rotated by a servo motor or the like on the lifting plate 80ab to lift the support unit 80a in a state of hanging the storage shelf 71. The lifting plate 80ab is provided with a mounting member 80ae on which the hanging device is mounted.

[0337] The lifting control unit 81 controls the multi-layer shelf 70 so that the shelf 70 for carrying in substrates moves to the height position of the carrying-in entrance 61a and the shelf 70 for carrying out substrates moves to the height position of the carrying-out entrance 61b based on the detection signal from the shelf position detection unit 80c, the detection signal of the hanging height of the support unit 80a from the lifting drive unit 80b, etc.

[0338] That is, the lifting control unit 81 controls the lifting drive unit 80b when the substrate is carried in, so that the shelf 70 where the substrate is carried in among the multi-layer shelves 70 is located at the height of the carrying-in port 61a. Thereafter, the lifting control unit 81 controls the lifting and lowering action of the storage shelf 71, so that the substrate carried in from the carrying-in port 61a in a state of being placed on the carrying-in unit 62 is placed on the shelf 70.

[0339] In addition, the lifting control unit 81 controls the lifting drive unit 80b when the substrate is unloaded, so that the shelf 70 from which the substrate is unloaded among the multi-layer shelves 70 is located at the height of the unloading port 61b. Thereafter, the lifting control unit 81 controls the lifting action of the storage shelf 71, so that the substrate placed on the shelf 70 is transferred to the unloading unit 63 inserted from the unloading port 61b.

[0340] The inlet switch unit 67 is provided on the outer wall surface of the substrate inlet side of the drying furnace 61, and the outlet switch unit 68 is provided on the outer wall surface of the substrate outlet side of the drying furnace 61. The inlet switch unit 67 includes a cover 67a for blocking the inlet 61a and a moving mechanism 67b for moving the cover 67a in the opening and closing direction. The outlet switch unit 68 includes a cover 68a for blocking the outlet 61b and a moving mechanism 68b for moving the cover 68a in the opening and closing direction.

[0341] The opening and closing operation of the cover portion 67 a by the moving mechanism 67 b and the opening and closing operation of the cover portion 68 a by the moving mechanism 68 b are controlled by the opening and closing control portion 69 .

[0342] In addition, the lifting control unit 81 and the switch control unit 69 may be configured to exchange control signals with each other. For example, when the shelf 70 for carrying in substrates is located at the height of the carrying-in port 61a, the lifting control unit 81 sends an opening command to the switch control unit 69 to open and close the cover 68a of the carrying-in port 61a. In addition, when the shelf 70 for carrying out substrates is located at the height of the carrying-out port 61b, the lifting control unit 81 sends an opening command to the switch control unit 69 to open and close the cover 68a of the carrying-out port 61b.

[0343] In addition, the air supply unit 64 for supplying gas (hot air) into the drying furnace 61 and the suction unit 65 for sucking the gas in the drying furnace 61 are arranged on the two side walls intersecting the side wall of the substrate carrying side of the drying furnace 61, that is, the wall of the single-opening switch door 61d and its opposite wall.

[0344] The air supply port 64a of the air supply unit 64 and the suction port 65a of the suction unit 65 are arranged on both sides of the floor of the drying furnace 61. The air supply port 64a is connected to the air blower 64c via the air duct 64b, and the suction port 65a is connected to the suction machine 65c via the air duct 65b. A dust collecting screen 64d is arranged between the air supply port 64a and the air blower 64c.

[0345] The suction machine 65c and the blower 64c are connected via an air duct 65g, and the gas sucked by the suction machine 65c is sent to the blower 64c, so that the gas (hot air) in the drying furnace 61 can circulate.

[0346] like Fig.12 , 13 As shown, the air supply unit 64 includes vertical (substantially the same height as the height inside the drying furnace 61) air supply cylindrical portions 64e disposed near the four corners of the drying furnace 61, and vertically long blowout ports 64f provided in a shape protruding from the side of the air supply cylindrical portion 64e toward the furnace (similar to an opening shape). The lower portion of the air supply cylindrical portion 64e is connected to the air supply port 64a.

[0347] The blowout port 64f is formed in a narrow slit shape, and forms a gas circulation flow in the drying furnace 61 in a direction along the side of the substrate placed on the shelf 70. The slit width (about 1 mm or more) of the blowout port 64f is adjustable.

[0348] like Fig.12 , 13 As shown, the suction section 65 includes a vertical (at approximately the same height as the height inside the drying furnace 61) suction cylinder 65d arranged next to the air supply section 64, and a longitudinal suction slit 65e arranged on the side of the suction cylinder 65d, and the lower part of the suction cylinder 65d is connected to the suction port 65a.

[0349] The suction slit 65e can adjust the slit width (about 1 mm or more) by shifting the position of the slit width adjustment plate 65f. In addition, the slit width adjustment plate 65f can be staggered and fixed obliquely, thereby adjusting the slit shape, for example, making the upper slit width wider than the lower slit.

[0350] The exhaust unit 66 is provided on the ceiling wall of the drying furnace 61 and is connected to an exhaust duct (not shown) so as to exhaust a part of the gas in the drying furnace 61 to the outside.

[0351] The suction machine 65 c is provided with an outside air intake valve having a function of taking in outside air, and is configured to be able to take in outside air appropriately, so that the humidity and other conditions in the drying furnace 61 can be adjusted.

[0352] The operation of the drying device 60 according to the embodiment will be described.

[0353] First, the operation of carrying the substrate into the drying furnace 61 will be described.

[0354] After the coating device 10 has finished coating the peripheral edge of the substrate including the end surface with the film forming liquid, the substrate is moved by the substrate transfer unit 14 (see Figure 1 ), the substrate is transferred to the carry-in fork 62a of the carry-in section 62 and is placed on the carry-in fork 62a.

[0355] When the substrate is placed on the carry-in fork 62 a , the operation of carrying the substrate into the drying furnace 61 begins.

[0356] The lifting control unit 81 determines the position of the shelf 70 for loading the substrate based on the loading and unloading state (history) of the substrate into the drying furnace 61, and makes the position of the shelf 70 the height position of the loading port 61a, and moves the storage shelf 71 up and down by the lifting mechanism 80. At the same time, the switch control unit 69 drives the moving mechanism 67b of the loading port switch unit 67, so that the loading port 61a is in the open state and the cover 67a is moved downward.

[0357] Afterwards, the carrying-in section 62 moves the carrying-in fork 62a carrying the substrate horizontally toward the carrying-in entrance 61a, and inserts the carrying-in fork 62a to a predetermined position from the carrying-in entrance 61a. In this state, the substrate carried on the carrying-in fork 62a is not carried on the shelf 70, and there is a gap between the substrate bottom and the shelf 70.

[0358] In order to achieve a state where the substrate is placed on the shelf 70 from this state, the lifting control unit 81 drives the lifting mechanism 80 to slightly raise the storage shelf 71, thereby placing the substrate on the shelf 70. After the substrate is placed on the shelf 70, the carry-in fork 62a is horizontally moved in a direction opposite to the carry-in direction, and the carry-in fork 62a is pulled out from the carry-in entrance 61a, so that the carry-in fork 62a is retracted to a predetermined position.

[0359] After that, the switch control unit 69 drives the moving mechanism 67b of the carrying port switch unit 67 to close the carrying port 61a and move the cover 67a upward, thereby completing the substrate carrying operation. Then, the above operation is repeated according to the timing when the substrate is carried from the coating device 10.

[0360] Next, the operation of drying the substrate in the drying furnace 61 will be described.

[0361] The hot air (e.g., air at about 80°C to 200°C) from the blower 64c having a heater function is respectively sent to the air supply cylindrical portion 64e connected to the air supply ports 64a arranged at the four corners of the drying furnace 61 through the dust collecting screen 64d and the air duct 64b. The hot air sent to the air supply cylindrical portion 64e is blown out into the drying furnace 61 from the vertically long slit-shaped blowing port 64f.

[0362] Since the air supply units 64 are arranged at the four corners of the drying furnace 61 and the air outlets 64f face predetermined directions along the sides of the substrate, airflows are generated that flow in predetermined directions along the four sides of the substrate (in other words, circulate in predetermined directions within the drying furnace 61).

[0363] While sending air into the drying furnace 61, a portion of the hot air in the drying furnace 61 is sucked by the suction slit 65e of the suction section 65, and is sent to the suction machine 65c through the suction cylindrical section 65d, the suction port 65a, and the air duct 65b. The hot air sucked by the suction machine 65c is sent to the air blower 64c. In addition, the air in the drying furnace 61 is appropriately exhausted from the exhaust section 66 provided in the drying furnace 61, and the external air is appropriately introduced from the air intake valve (not shown) provided in the suction machine 65c, so that the humidity, temperature and other conditions in the drying furnace 61 can be adjusted.

[0364] Next, the operation of carrying out the substrate from the drying furnace 61 will be described.

[0365] After the substrate is moved into the drying furnace 61, after a predetermined drying time, the substrate unloading operation starts. The lifting control unit 81 determines the shelf 70 on which the unloaded substrate is placed based on the substrate loading state (history) into the drying furnace 61, and drives the lifting mechanism 80 to lift and move the storage shelf 71 so that the shelf 70 reaches the height position of the unloading port 61b. At the same time, the opening and closing control unit 69 drives the moving mechanism 68b of the unloading port opening and closing unit 68 to move the cover 68a downward to open the unloading port 61b.

[0366] Then, the unloading section 63 moves the unloading fork 63a horizontally toward the unloading outlet 61b and inserts the unloading fork 63a to a predetermined position from the unloading outlet 61b. In this state, the unloading fork 63a is located below the shelf 70 on which the unloaded substrate is placed, and there is a gap between the bottom of the substrate on the shelf 70 and the unloading fork 63a.

[0367] In order to achieve the state where the substrate on the shelf 70 is placed on the carry-out fork 63a from this state, the lifting control unit 81 drives the lifting mechanism 80 to slightly lower the storage shelf 71 so that the substrate is placed on the carry-out fork 63a. After the substrate is placed on the carry-out fork 63a, the carry-out fork 63a is horizontally moved in the carry-out direction, and the carry-out fork 63a carrying the substrate is pulled out of the drying furnace 61 from the carry-out port 61b and retreated to a predetermined position.

[0368] After that, the switch control unit 69 drives the moving mechanism 68b of the outlet switch unit 68 to move the cover 68a upward to close the outlet 61b, thereby completing the substrate unloading operation. The above operation is repeated when the predetermined drying time has passed.

[0369] According to the drying device 60 of the embodiment, the storage shelf 71 having a plurality of shelves 70 is raised and lowered in the drying furnace 61. Therefore, it is not necessary to raise and lower the fork 62a for carrying in the carrying-in portion 62 or the fork 63a for carrying out the carrying-out portion 63, so that the device structure can be simplified, and the space saving and compactness of the device can be achieved.

[0370] In addition, according to the drying device 60, the lifting and lowering operation of the storage shelf 71 is controlled by the lifting control unit 81, so that the substrate placed on the carry-in fork 62a and carried in from the carry-in port 61a can be accurately placed on the shelf 70 located at the height of the carry-in port 61a. In addition, the substrate placed on the shelf 70 located at the height of the carry-out port 61b can be accurately transferred to the carry-out fork 63a inserted from the carry-out port 61b, so that the carry-in and carry-out operations of the substrate can be performed accurately and efficiently.

[0371] In addition, according to the drying device 60, the shelf position detection unit 80c detects which shelf among the multi-layered shelves 70 is located at the height position of the carrying-in entrance 61a or the carrying-out entrance 61b. Therefore, the shelf 70 carrying the substrate carried in by the carrying-in fork 62a and the shelf 70 carrying the substrate transferred to the carrying-out fork 63a can be accurately detected, and the carrying-in and carrying-out operation accuracy of the substrate can be improved.

[0372] Next, the ultraviolet irradiation device 90 constituting the coating system 1 according to the embodiment will be described.

[0373] like Figure 1 As shown, the ultraviolet irradiation device 90 is a device for irradiating ultraviolet rays to the peripheral edge of the substrate dried by the drying device 60 after the film-forming liquid is applied by the coating device 10, so as to cure the film-forming liquid. The ultraviolet irradiation device 90 includes a UV irradiation table 91, a positioning unit 92, a substrate transfer unit 93, a conveying unit 94, a light irradiation unit 95, a rotating mechanism 96, and an irradiation control unit 98.

[0374] First, the structure of the light irradiation unit 95 which is a main component of the ultraviolet irradiation device 90 will be described.

[0375] Fig.15 It is a perspective view showing the structure of main parts of the light irradiation unit 95 of the ultraviolet irradiation device 90 .

[0376] The light irradiation unit 95 includes a first light irradiation unit pair 95 a and 95 b and a second light irradiation unit pair 95 c and 95 d which are arranged to face each other while changing their height positions around the lifting space of the UV irradiation stage 91 .

[0377] The first light irradiation unit pair 95a, 95b has irradiation parts 95aa, 95ba, which are arranged in a direction parallel to the conveying direction B of the substrate 2, and multiple ultraviolet irradiation lamps (such as LED lamps) are arranged in parallel. The irradiation control part 98 controls the switching of the irradiation state (ON, OFF), etc.

[0378] The second light irradiation unit pair 95c, 95d is arranged in a direction perpendicular to the conveying direction B of the substrate 2, and includes irradiation sections 95ca, 95da in which a plurality of ultraviolet irradiation lamps are arranged in parallel, and the switching of the irradiation state (ON, OFF) is controlled by the irradiation control section 98. The ultraviolet irradiation lamps are ultraviolet LEDs that irradiate a wavelength region effective for curing the film-forming liquid, for example, a long-wavelength region of 320 to 400 nm.

[0379] The rotation mechanism 96 includes a first rotation mechanism pair 96a and 96b for rotating the first light irradiation unit pair 95a and 95b, and a second rotation mechanism pair 96c and 96d for rotating the second light irradiation unit pair 95c and 95d.

[0380] The first rotating mechanism pair 96 a and 96 b is configured to rotate the first light irradiation unit pair 95 a and 95 b around an axis C in a direction parallel to the conveyance direction B of the substrate 2 .

[0381] The first pair of rotating mechanisms 96a, 96b includes rotating motors 96aa, 96ba, rotating members 96ab, 96bb rotating together with the rotating shafts of the rotating motors 96aa, 96ba, and fixed frames 96ac, 96bc to which the rotating motors 96aa, 96ba and the rotating members 96ab, 96bb are mounted. The first pair of light irradiation units 95a, 95b is mounted on the rotating members 96ab, 96bb.

[0382] The second rotating mechanism pair 96 c and 96 d is configured to rotate the second light irradiation unit pair 95 c and 95 d around an axis D in a direction perpendicular to the conveyance direction B of the substrate 2 .

[0383] The second pair of rotating mechanisms 96c, 96d includes rotating motors 96ca, 96da, rotating members 96cb, 96db rotating together with the rotating shafts of the rotating motors 96ca, 96da, and fixed frames 96cc to 96dc to which the rotating motors 96ca, 96da and the rotating members 96cb, 96db are mounted. The second pair of light irradiation units 95c, 95d is mounted on the rotating members 96cb, 96db.

[0384] The ultraviolet irradiation device 90 further includes a moving mechanism 97 that moves at least one of the second rotating mechanism pair 96c and 96d (the second rotating mechanism pair 96d in the present embodiment) forward and backward in the conveyance direction B of the substrate.

[0385] The moving mechanism 97 includes a direct-acting mechanism that can move the second rotating mechanism 96d forward and backward in the conveying direction B of the substrate 2. The direct-acting mechanism includes a guide portion 97a that can move the second rotating mechanism 96d forward and backward in the conveying direction B of the substrate 2 and a slide portion 97b that moves the second rotating mechanism 96d along the guide portion 97a.

[0386] The transport unit 94 for transporting the substrate 2 is arranged below the UV irradiation table 91. The transport unit 94 is composed of a transport means driven by a magnet, for example, and includes a plurality of rollers 94a arranged at predetermined intervals in the transport direction B of the substrate 2, and a plurality of narrow rollers 94b inserted in each of the rollers 94a. According to the transport unit 94, the rollers 94a can be driven in a non-contact manner by the magnetic force of the magnet, the drive unit is less worn, and the generation of dust can be suppressed.

[0387] The UV irradiation stage 91 has an opening 91a at a position facing the plurality of narrow rollers 94b of the conveying unit 94. By lowering the UV irradiation stage 91 and making the narrow rollers 94b face the top of the opening 91a, the substrate 2 on the UV irradiation stage 91 can be placed on the narrow rollers 94b.

[0388] Next, the structure of the positioning unit 92 disposed in front of the light irradiation unit 95 will be described.

[0389] Fig.16 is a top view showing the structure of the main components of the positioning unit of the ultraviolet irradiation device, Fig.17 It is a side view showing the structure of the main parts of the positioning unit of the ultraviolet irradiation device.

[0390] The positioning unit 92 includes a mechanism for positioning and arranging the substrate at a predetermined position before the substrate carried out from the drying device 60 is moved to the UV irradiation stage 91 .

[0391] A substrate transfer unit 93 is provided above the positioning unit 92 (see Figure 1 ), the substrate transfer unit 93 moves the substrate positioned by the positioning unit 92 to the UV irradiation table 91. The substrate transfer unit 93 includes, for example, a substrate holding unit for holding the substrate, a horizontal moving mechanism for reciprocating the substrate holding unit in the substrate conveying direction, and a vertical moving mechanism for reciprocating the substrate holding unit in the vertical direction (all not shown). The substrate holding unit is provided with an adsorption holder for adsorbing and holding the substrate.

[0392] The positioning unit 92 includes an upper stage unit 92a rotatable while placing a substrate thereon and a lower stage unit 92b disposed below the upper stage unit 92a. The lower stage unit 92b includes a mechanism for moving the upper stage unit 92a in a predetermined direction (horizontal direction orthogonal to the substrate conveying direction B).

[0393] In addition, the positioning unit 92 includes a corner detection unit 92c and a positioning control unit 92d. The corner detection unit 92c has a function of detecting the orientation and position of two corners of one side of the substrate placed on the upper stage unit 92a. The positioning control unit 92d has a function of driving the upper stage unit 92a and / or the lower stage unit 92b so that the orientation and position of the two corners of the substrate detected by the corner detection unit 92c become a predetermined orientation and position.

[0394] The upper stage unit 92a includes a stage 92aa on which a substrate is placed, a rotation shaft portion 92ad serving as a rotation axis of the stage 92aa, a roller portion 92ae which rotates while supporting the stage 92aa, and a rotation drive portion 92af which rotates the stage 92aa.

[0395] The rotation shaft 92ad is provided on the lower surface of one of the four corners of the mounting table 92aa. The rollers 92ae are provided on the lower surfaces of the other three corners of the mounting table 92aa. The rotation drive unit 92af has a function of rotating the mounting table 92aa around the rotation shaft 92ad.

[0396] The mounting table 92aa includes a substantially rectangular flat plate portion 92ab and three rectangular rod-shaped substrate mounting portions 92ac mounted on the flat plate portion 92ab. The substrate mounting portions 92ac are mounted to face the substrate conveying direction B.

[0397] The rotation driving unit 92af is composed of a rod-type robot cylinder (radial cylinder) 92ag and a bearing unit (rod end bearing) 92ah, and one end side (rod tip end portion) of the robot cylinder 92ag is attached to the bearing unit 92ah.

[0398] The robot cylinder 92ag is installed on the lower side of the mounting table 92aa opposite to the side where the rotation shaft 92ad is provided. The bearing 92ah is installed at the corner of the mounting table 92aa where the rotation shaft 92ad is provided and at the corner adjacent to the substrate transfer direction B.

[0399] By controlling the stroke length of the rod of the robot cylinder 92ag, the mounting table 92aa is rotated around the rotation shaft portion 92ad, and the substrate orientation (angle) can be adjusted together with the table angle.

[0400] The lower stage unit 92 b includes a support stage 92 ba that supports the mounting stage 92 aa , and a linear motion mechanism 92 bb that can adjust the position of the support stage 92 ba in a direction orthogonal to the substrate conveyance direction B.

[0401] The lower end of the rotating shaft portion 92ad is mounted on the support stand 92ba, and the other end side of the robot cylinder 92ag is also mounted.

[0402] The lower stage unit 92b further includes a lifting mechanism 92bc disposed below the linear motion mechanism 92bb. The lifting mechanism 92bc can lift the positioning unit 92 in the vertical direction.

[0403] The corner detection unit 92c includes two lighting units 92ca for irradiating two corners of one side of the substrate from below, and two imaging units 92cb provided at positions facing the lighting units 92ca for respectively imaging the two corners of the substrate from above.

[0404] The positioning control unit 92d controls and drives the upper stage unit 92a and / or the lower stage unit 92b so that the orientation and position of the two corners of the substrate captured by the two imaging units 92cb become predetermined orientation and position.

[0405] Next, the light irradiation operation performed by the ultraviolet irradiation device 90 according to the embodiment will be described.

[0406] Fig.18 This is a diagram (side cross-sectional view) for explaining the light irradiation operation of the first light irradiation unit pair 95a and 95b of the ultraviolet irradiation device. Fig.19 It is a diagram (front cross-sectional view) for explaining the light irradiation operation of the second light irradiation unit pair 95c and 95d of the light irradiation device.

[0407] When the substrate 2 is carried out from the carrying-out port 61b of the drying device 60 by the carrying-out fork 63a, the substrate 2 is transferred from the carrying-out fork 63a to the top of the positioning unit 92 by the substrate transfer unit 93, and the substrate 2 is placed on the placing table 92aa. At this time, the placing table 92aa is moved to a predetermined height position (for example, between the corner detecting unit 92c, the lighting unit 92ca and the camera unit 92cb) by the lifting mechanism 92bc.

[0408] Next, the corner detection unit 92c operates the lighting unit 92ca and the imaging unit 92cb, and the imaging unit 92cb captures two corners of one side of the substrate 2 placed on the mounting table 92aa.

[0409] The positioning control unit 92d performs positioning control of the substrate by operating the upper stage unit 92a and / or the lower stage unit 92b so that the orientation and position of two corners of one side of the imaged substrate 2 are set to predetermined orientations and positions.

[0410] When the positioning unit 92 finishes positioning the substrate 2 , the substrate transfer unit 93 transfers the substrate 2 from the positioning unit 92 to above the UV irradiation stage 91 , and the substrate 2 is placed on the UV irradiation stage 91 .

[0411] When the substrate 2 is placed on the UV irradiation station 91, Fig.18 As shown, the irradiation control unit 98 controls the UV irradiation stage 91 to rise to the height position of the first light irradiation unit pair 95a and 95b.

[0412] Then, the irradiation control unit 98 controls and drives the rotation motors 96aa and 96ba of the first rotation mechanism pair 96a and 96b. Then, the first light irradiation unit pair 95a and 95b are rotated until the irradiation parts 95aa and 95ba of the first light irradiation unit pair 95a and 95b are in a substantially vertical downward state ( Fig.18 (a) shows the state). At this time, the light irradiation surfaces of the irradiation parts 95aa and 95ba and the upper surfaces of the peripheral edge portions of the two sides of the substrate 2 parallel to the conveying direction B of the substrate 2 are in a state of being adjacent to each other.

[0413] From this state, the irradiation control unit 98 starts to control the irradiation of ultraviolet rays from the irradiation units 95aa and 95ba of the first light irradiation unit 95a and 95b, and irradiates ultraviolet rays toward the upper surfaces of the two peripheral edge portions of the substrate 2. When the substrate 2 is a thin plate-shaped substrate, the upper surfaces of the peripheral edge portions of the substrate 2 and the end surfaces of the peripheral edge portions are irradiated with ultraviolet rays.

[0414] When the ultraviolet rays are irradiated to the peripheral edge of the substrate 2, the irradiation control unit 98 controls and drives the rotation motors 96aa and 96ba of the first rotation mechanism pair 96a and 96b. Then, the first light irradiation unit pair 95a and 95b rotate about 180 degrees until the irradiation parts 95aa and 95ba of the first light irradiation unit pair 95a and 95b are in a state of being approximately vertically upward ( Fig.18 (b) shows the state). At this time, the light irradiation surfaces of the irradiation parts 95aa and 95ba and the lower surfaces of the two peripheral edge portions of the substrate 2 parallel to the conveying direction B of the substrate 2 are in a state of being adjacent to each other.

[0415] From this state, the irradiation control unit 98 starts to control the irradiation of ultraviolet rays from the irradiation parts 95aa and 95ba of the first light irradiation unit 95a and 95b, and irradiates ultraviolet rays toward the lower sides of the two peripheral edge portions of the substrate 2. When the substrate 2 is a thin plate-shaped substrate, the ultraviolet rays are irradiated to the lower sides of the peripheral edge portions and the end faces of the peripheral edge portions of the substrate 2.

[0416] When the ultraviolet irradiation of the lower sides of the two peripheral edge portions of the substrate 2 parallel to the substrate conveying direction B is completed, the irradiation control unit 98 controls to lower the UV irradiation stage 91 to the height position of the second light irradiation unit pair 95c and 95d.

[0417] Furthermore, the irradiation control unit 98 controls and drives the rotation motors 96ca and 96da of the second rotation mechanism pair 96c and 96d. Then, the second light irradiation unit pair 95c and 95d rotates until the irradiation parts 95ca and 95da of the second light irradiation unit pair 95c and 95d are in a state of being approximately vertically downward ( Fig.19 A (a) shows the state). At this time, the light irradiation surfaces of the irradiation parts 95ca and 95da and the upper surfaces of the two peripheral edge portions of the substrate 2 in the direction orthogonal to the conveying direction B of the substrate 2 are in a state of being adjacent to each other.

[0418] From this state, the irradiation control unit 98 starts to control the irradiation of ultraviolet rays from the irradiation parts 95ca and 95da of the second light irradiation unit 95c and 95d, and irradiates ultraviolet rays toward the upper surfaces of the other two peripheral edge portions of the substrate 2. When the substrate 2 is a thin plate-shaped substrate, the ultraviolet rays are irradiated to both the upper surfaces of the peripheral edge portions and the end surfaces of the peripheral edge portions of the substrate 2.

[0419] When the ultraviolet irradiation on the peripheral edge of the substrate 2 is completed, the irradiation control unit 98 controls and drives the rotation motors 96ca and 96da of the second rotation mechanism pair 96c and 96d. Then, the second light irradiation unit pair 95c and 95d rotates about 180 degrees until the irradiation parts 95ca and 95da of the second light irradiation unit pair 95c and 95d are in a state of being approximately vertically upward ( Fig.19 (b) shows the state). At this time, the light irradiation surfaces of the irradiation parts 95ca and 95da are in a state of being adjacent to and facing the lower surfaces of the other two peripheral edge parts of the substrate 2.

[0420] From this state, the irradiation control unit 98 starts to control the irradiation of ultraviolet rays from the irradiation parts 95ca and 95da of the second light irradiation unit 95c and 95d, and irradiates ultraviolet rays toward the lower side of the other two sides of the peripheral edge portion of the substrate 2. When the substrate 2 is a thin plate-shaped substrate, the ultraviolet rays are irradiated to the lower side of the peripheral edge portion and the end surface of the peripheral edge portion of the substrate 2.

[0421] When the ultraviolet irradiation of the lower side of the peripheral edge of the substrate 2 is finished, the irradiation control unit 98 lowers the UV irradiation table 91 to the height position of the conveying unit 94, so that the substrate 2 on the UV irradiation table 91 is placed on the narrow roller 94b of the conveying unit 94. Thereafter, the conveying unit 94 is driven to unload the substrate 2 from the light irradiation unit 95, and the light irradiation process is finished.

[0422] In addition, when irradiating ultraviolet rays, the direction of the light irradiation unit 95 (the first light irradiation unit pair 95a, 95b and the second light irradiation unit pair 95c, 95d) relative to the peripheral edge of the substrate 2 is not limited to the above-mentioned form (approximately vertically upward, approximately vertically downward). The direction (angle) of the first light irradiation unit pair 95a, 95b and the second light irradiation unit pair 95c, 95d relative to the peripheral edge of the substrate 2 can be appropriately set according to conditions such as the thickness of the substrate 2 to be coated, the coating width relative to the upper and lower sides of the peripheral edge.

[0423] For example, when the thickness of the substrate 2 is greater than a predetermined thickness, Fig.18 In the state shown in (a), when the ultraviolet irradiation on the two circumferential edge portions of the substrate 2 is completed, the irradiation control unit 98 controls and drives the rotation motors 96aa, 96ba of the first rotating mechanism pair 96a, 96b to rotate the first light irradiation unit pair 95a, 95b by about 90 degrees until the irradiation portions 95aa, 95ba of the first light irradiation unit pair 95a, 95b are opposite to each other in the horizontal direction.

[0424] Then, starting from the state where the light irradiation surfaces of the irradiation parts 95aa and 95ba are adjacent to and opposite to the end faces of the circumferential edge of the substrate 2, the irradiation control part 98 starts to control the irradiation of ultraviolet rays from the first light irradiation unit to the irradiation parts 95aa and 95ba of 95a and 95b, and implements ultraviolet irradiation toward the end faces of the circumferential edge of two sides of the substrate 2 parallel to the conveying direction of the substrate 2.

[0425] Similarly, in the above Fig.19 In the state shown in (a), when the ultraviolet irradiation on the circumferential edge portions of the other two sides of the substrate 2 is completed, the irradiation control unit 98 controls and drives the rotation motors 96ca, 96da of the second rotating mechanism pair 96c, 96d to rotate the second light irradiation unit pair 95c, 95d by about 90 degrees until the irradiation portions 95ca, 95da of the second light irradiation unit pair 95c, 95d are opposite to each other in the horizontal direction.

[0426] Then, starting from the state where the light irradiation surfaces of the irradiation parts 95ca and 95da are adjacent to and opposite to the end faces of the circumferential edge of the substrate 2, the irradiation control part 98 starts to control the irradiation of ultraviolet rays from the second light irradiation unit to the irradiation parts 95ca and 95da of 95c and 95d, and implements ultraviolet irradiation toward the end faces of the circumferential edges of the other two sides of the substrate 2.

[0427] Furthermore, in another embodiment, the irradiation control unit 98 can be controlled so that the direction (angle) of each irradiation part of the light irradiation unit 95 is less than 90 degrees relative to the upper and lower surfaces of the substrate 2, and ultraviolet rays are irradiated from an inclined direction toward the upper surface and end surface of the circumferential edge portion of the substrate 2 and toward the lower surface and end surface of the circumferential edge portion of the substrate.

[0428] According to the ultraviolet irradiation device 90 involved in the above-mentioned embodiment, the light irradiation unit 95 is arranged around the lifting space of the UV irradiation table 91, and the light irradiation unit 95 is rotated by the rotating mechanism 96 so that the light irradiation surface of the light irradiation unit 95 is adjacent to and opposite to at least the upper side of the circumferential edge portion and the lower side of the circumferential edge portion of the substrate placed on the UV irradiation table 91. Therefore, it is not necessary to move the substrate in the horizontal direction during light irradiation, and the light irradiation can be uniformly and efficiently performed on the end faces of the circumferential edge portion of each side of the substrate and the upper and lower sides of the circumferential edge portion, so that the film-forming liquid can be uniformly and efficiently solidified.

[0429] In addition, according to the ultraviolet irradiation device 90, by moving the UV irradiation table 91 carrying the substrate to the height position of the first light irradiation unit pair 95a, 95b, the first rotating mechanism pair 96a, 96b rotates the first light irradiation unit pair 95a, 95b, thereby enabling the upper surface of the circumferential edge portion, the end surface of the circumferential edge portion and the lower surface of the circumferential edge portion of two sides of the substrate that are parallel to the substrate conveying direction B to be evenly and efficiently irradiated with light.

[0430] In addition, the UV irradiation table 91 on which the substrate is mounted is moved at a height position of the second light irradiation unit pair 95c, 95d which is different from the height position of the first light irradiation unit pair 95a, 95b, and the second light irradiation unit pair 95c, 95d is rotated by the second rotation mechanism pair 96c, 96d, so that the upper surface, the end surface of the peripheral edge portion, and the lower surface of the peripheral edge portion of the substrate 2 sides perpendicular to the substrate conveying direction B can be uniformly and efficiently irradiated with light. Therefore, the space saving of the ultraviolet irradiation device 90 can be achieved, and a compact device structure can be formed.

[0431] In addition, according to the ultraviolet irradiation device 90, at least one of the second rotating mechanism pair 96c, 96d is moved forward and backward along the substrate conveying direction through the moving mechanism 97, so that the configuration interval of the second rotating mechanism pair 96c, 96d can be adjusted according to the size of the substrate, etc., and it can also be applicable to substrates of different sizes.

[0432] In addition, according to the ultraviolet irradiation device 90, by lowering the UV irradiation stage 91, the narrow roller 94b of the conveying unit 94 can be faced from the opening 91a of the UV irradiation stage 91. Therefore, only by lowering the UV irradiation stage 91, the substrate on the UV irradiation stage 91 can be transferred to the conveying unit 94, which can improve the efficiency of transferring the substrate to the conveying unit 94 and unloading it.

[0433] In addition, according to the ultraviolet irradiation device 90, since it is equipped with a positioning unit 92, the upper stage unit 92a and / or the lower stage unit 92b are controlled so that the direction and position of the substrate corner detected by the corner detection unit 92c are the specified direction and position, thereby being able to adjust the direction and / or position of the substrate.

[0434] Furthermore, since the imaging unit 92cb is configured to capture an image of the corner of the substrate illuminated by the illumination unit 92ca, the corner detection unit 92c can more accurately detect the direction and position of the corner of the substrate based on the captured image.

[0435] Furthermore, in order to make the orientation and position of the corner of the substrate photographed by the camera unit 92cb the specified orientation and position, the upper stage unit 92a and / or the lower stage unit 92b are driven by the positioning control unit 92d to adjust the orientation and / or position of the substrate, thereby enabling the orientation and / or position of the substrate to be adjusted with greater precision.

[0436] In addition, the upper stage unit 92a rotates the mounting table 92aa around the rotation shaft portion 92ad through the rotation drive portion 92af, thereby enabling fine adjustment of the substrate orientation (angle). In addition, the lower stage unit 92b is configured to enable fine adjustment of the position of the support table 92ba supporting the mounting table 92aa in a direction orthogonal to the substrate moving direction. Therefore, the accuracy of substrate orientation and positioning can be improved.

[0437] The orientation and / or position of the substrate is adjusted by the positioning unit 92 before the substrate is moved to the UV irradiation stage 91 , and the substrate transfer unit 93 can move the adjusted substrate to the UV irradiation stage 91 .

[0438] Therefore, the substrate can be placed on the UV irradiation stage 91 in an accurately positioned state, and the light irradiation unit 95 can accurately irradiate the peripheral edge upper surface, peripheral edge end surface and peripheral edge lower surface of the substrate with light.

[0439] In addition, since the coating system 1 according to the embodiment includes the coating device 10, the drying device 60, and the ultraviolet irradiation device 90, it is a system that achieves the above-mentioned effects of the coating device 10, the above-mentioned effects of the drying device 60, and the above-mentioned effects of the ultraviolet irradiation device 90. Therefore, compared with the conventional system, the system has excellent maintainability, can save space, and can efficiently perform drying treatment and curing treatment by light irradiation, and can construct a coating system suitable for assembly into the substrate manufacturing process.

[0440] In addition, the coating system of the present invention does not need to include all coating devices, drying devices, and ultraviolet irradiation devices. Other coating systems may be composed of coating devices and drying devices, and other embodiments may also be composed of coating devices and ultraviolet irradiation devices.

[0441] The present invention can be widely used in the electronic circuit substrate industry or the electronic equipment industry for processing various substrates such as printed circuit substrates, metal substrates, packaging substrates, glass substrates, etc.

[0442]

Explanation of symbols

[0443] 1Coating system

[0444] 10Coating device

[0445] 60 Drying device

[0446] 90 Ultraviolet irradiation device

[0447] 2 substrates

[0448] 10Coating device

[0449] 11Transportation Department

[0450] 12 Positioning unit

[0451] 13 coating station (support part)

[0452] 14 substrate transfer unit

[0453] 15 mobile units (mobile means)

[0454] 15a X-axis direct-acting mechanism

[0455] 15b Y-axis direct-acting mechanism

[0456] 16Coating control unit

[0457] 17 Operation Department

[0458] 20 coating units

[0459] 21Coating mechanism

[0460] 22 Coating Department

[0461] 23 Rotation axis

[0462] 23a Threaded part

[0463] 24 coating rollers

[0464] 24a annular groove

[0465] 24b shaft hole

[0466] 25Liquid supply unit

[0467] 25a pipe installation part

[0468] 25b Liquid discharge part

[0469] 25ba discharge hole

[0470] 26 Recycling Department

[0471] 26a screw-on part

[0472] 26aa threaded hole

[0473] 26b Liquid receiving part

[0474] 26c Connection part

[0475] 26d pipe

[0476] 30 Extension mechanism

[0477] 31 Extension

[0478] 32 Upper Unit

[0479] 32a Upper Block

[0480] 32b Upper stretch block

[0481] 32ba upper extension part

[0482] 32bb end extension parts

[0483] 32c 1st mounting part

[0484] 32ca with stepped head

[0485] 32cb threaded shaft

[0486] 32d fixed parts

[0487] 33 Lower unit

[0488] 33a Lower block

[0489] 33aa shaft hole

[0490] 33ab shaft hole

[0491] 33ac short pipe

[0492] 33ad flange

[0493] 33b Lower extension block

[0494] 33ba lower extension part

[0495] 33bb recycling road

[0496] 33c Second mounting part

[0497] 33ca head

[0498] 3cb internal thread

[0499] 33d 3rd mounting part

[0500] 33da with stepped head

[0501] 33db shaft

[0502] 33f Second mounting part

[0503] 33fa Hollow part

[0504] 33fb short pipe installation port

[0505] 33fc Pressing part

[0506] 33e Recycling Department

[0507] 33ea Liquid receiving part

[0508] 33eb pipe department

[0509] 34 Force applying mechanism

[0510] 35 1st support part

[0511] 35a 1st direct-acting part

[0512] 35b horizontal plate part

[0513] 35ba threaded hole

[0514] 36 Second support part

[0515] 36a Second direct-acting part

[0516] 36b vertical plate part

[0517] 36c installation shaft

[0518] 36ca incision

[0519] 36cb locking part

[0520] 36cc tip

[0521] 36d Support shaft

[0522] 36e stopper

[0523] 371st direct-acting mechanism

[0524] 37a linear guide

[0525] 37b linear guide

[0526] 37c upper slide block

[0527] 37d lower slide block

[0528] 38 Second direct-acting mechanism

[0529] 38a linear guide

[0530] 38b linear guide

[0531] 38c Slider

[0532] 38d stopper

[0533] 39 1st force application part

[0534] 39a extension coil spring

[0535] 40 Second force application part

[0536] 40a extension coil spring

[0537] 41 Third force application part

[0538] 41a Extension coil spring

[0539] 50 Liquid storage area

[0540] 51 Cover

[0541] 51a pipe installation part

[0542] 52 Next box

[0543] 53 box support table

[0544] 54 Transfer Pump

[0545] 55 Installation parts

[0546] 60 Drying device

[0547] 61 Drying furnace

[0548] 61a Moving in

[0549] 61b Move out

[0550] 61c shaft hole

[0551] 61d switch door

[0552] 62 Loading Department (Substrate Loading Means)

[0553] 62a Fork for carrying in

[0554] 63 Unloading part (board unloading means)

[0555] 63a Fork for carrying out

[0556] 64 Air supply unit

[0557] 64a air outlet

[0558] 64b air duct

[0559] 64c blower

[0560] 64d dust collector

[0561] 64e Air supply cylindrical part

[0562] 64f blow outlet

[0563] 65 Attraction Department

[0564] 65a Suction port

[0565] 65b air duct

[0566] 65c suction machine

[0567] 65d suction tubular part

[0568] 65e Attraction Slit

[0569] 65f slit width adjustment plate

[0570] 65g air duct

[0571] 66 Exhaust

[0572] 67 entrance switch

[0573] 67a Cover

[0574] 67b mobile mechanism

[0575] 68 Move the exit switch

[0576] 68a Cover

[0577] 68b mobile mechanism

[0578] 69 switch control unit

[0579] 70 Shelves

[0580] 70a Supporting member

[0581] 70b horizontal bar parts

[0582] 71 Storage Shelves

[0583] 71a Vertical frame parts

[0584] 71b Cross frame parts

[0585] 71c lower frame parts

[0586] 80 lifting mechanism

[0587] 80a Supporting part

[0588] 80aa lifting shaft

[0589] 80ab lifting plate

[0590] 80ac linear sleeve

[0591] 80ad detection hole

[0592] 80ae mounting parts

[0593] 80b lifting drive unit

[0594] 80c Shelf position detection unit

[0595] 81 Lifting control unit

[0596] 90 Ultraviolet irradiation device (light irradiation device)

[0597] 91UV irradiation table (lifting table)

[0598] 91a Opening

[0599] 92 positioning unit (positioning means)

[0600] 92a Upper stage unit

[0601] 92aa loading platform

[0602] 92ab flat plate

[0603] 92ac substrate mounting part

[0604] 92ad Rotating shaft

[0605] 92ae Roller

[0606] 92af Rotation drive unit

[0607] 92ag Robot Cylinder

[0608] 92ah bearing part

[0609] 92b Lower table unit

[0610] 92ba support platform

[0611] 92bb direct-acting mechanism (direct-acting mechanism part)

[0612] 92bc lifting mechanism

[0613] 92c Corner detection unit (corner detection means)

[0614] 92ca Lighting Department

[0615] 92cb Camera Department

[0616] 92d positioning control unit

[0617] 93 substrate transfer unit

[0618] 94 Transportation Department (Transportation Means)

[0619] 94a Roller

[0620] 94b narrow roller

[0621] 95 light irradiation units

[0622] 95a, 95b first light irradiation unit pair

[0623] 95aa, 95ba irradiation part

[0624] 95c, 95d second light irradiation unit pair

[0625] 95ca, 95da irradiation part

[0626] 96 Rotation Mechanism

[0627] 96a, 96b The first rotating mechanism pair

[0628] 96aa, 96ba rotating motor

[0629] 96ab, 96bb rotating parts

[0630] 96ac, 96bc fixed frame

[0631] 96c, 96d second rotating mechanism pair

[0632] 96ca, 96da rotating motor

[0633] 96cb, 96db rotating parts

[0634] 96cc, 96dc fixed frame

[0635] 97 mobile mechanism

[0636] 97a Guide

[0637] 97b Sliding part

[0638] 98 Irradiation Control Unit

[0639] A Coating unit moving direction

[0640] B Substrate conveying direction

[0641] C, D axis (rotation center axis)

Claims

1. A coating device for coating a film-forming liquid on a peripheral edge of a substrate while relatively moving a substrate and a coating unit, characterized in that: The coating unit comprises a coating mechanism and a stretching mechanism. The coating mechanism includes a coating portion for coating the film-forming liquid on at least the peripheral edge end surface of the substrate. The spreading mechanism comprises a spreading portion for spreading the film-forming liquid applied by the coating portion into a thin film on the peripheral edge end surface and the peripheral edge upper and lower surfaces of the substrate, and a urging mechanism for urging the spreading portion toward the peripheral edge end surface and the peripheral edge upper and lower surfaces of the substrate; The extending mechanism is configured such that the extending portion can be removed without removing the urging mechanism from the extending mechanism.

2. The coating device according to claim 1, characterized in that: The expansion portion is configured to be replaceable with another expansion portion without removing the urging mechanism from the expansion mechanism.

3. The coating device according to claim 1, characterized in that The extension part includes an upper unit and a lower unit, The force applying mechanism comprises: a first supporting portion supporting the upper unit, a second supporting portion supporting the lower unit, The first support portion and the second support portion are respectively mounted in a first direct-acting mechanism so as to be movable in a vertical direction, The first direct-acting mechanism is a second direct-acting mechanism mounted so as to be movable in a horizontal direction perpendicular to the end surface of the peripheral edge portion of the substrate, a first force applying portion for applying force downward to the first supporting portion, a second force applying portion for applying force upward to the second supporting portion, A third biasing portion biases the first direct-acting mechanism mounted on the second direct-acting mechanism toward the upper unit and the lower unit.

4. The coating device according to claim 3, characterized in that: The first supporting portion comprises: A first direct-acting portion mounted on the first direct-acting mechanism, A horizontal plate portion protruding from the lower portion of the first linear motion portion; The second supporting portion comprises: A second direct-acting portion mounted on the first direct-acting mechanism, A vertical plate portion protruding from the side of the second linear motion portion, A shaft portion protruding from the vertical plate portion in the horizontal direction; The upper unit is detachably mounted on the horizontal plate portion. The lower unit is detachably mounted on the vertical plate portion in a state where it is inserted into the shaft portion.

5. The coating device according to claim 4, characterized in that The upper unit comprises: an upper block disposed on the horizontal plate portion, An upper extension block of approximately L shape covering the upper surface and one side of the upper block, Mounting the upper block and the upper extension block on the first mounting component of the horizontal plate portion; The lower unit comprises: a lower block having an axial hole for the shaft portion to pass through, A lower extension block of approximately L shape covering the bottom and one side of the lower block, a second mounting member mounted on the front end portion of the shaft portion to which the lower block is inserted, Mounting the lower extension block on a third mounting member of the lower block; The upper stretching block and the lower stretching block have an opposing surface opposite to the one side surface, and the opposing surface is provided with: an upper extending member in contact with the upper surface of the peripheral edge of the substrate, an end surface extension component in contact with the end surface of the peripheral edge portion of the substrate, and a lower extending member in contact with the lower surface of the peripheral edge portion of the substrate.

6. The coating device according to claim 5, characterized in that The lower block includes a short tube portion protruding from an opening of the shaft hole. The short tube portion has a flange portion at the front end portion. The shaft portion comprises: The notch formed on the front end side, A locking portion formed on the outer peripheral surface of the front end portion where the cutout portion is formed, and a tapered portion formed from the locking portion toward the front end side; The locking portion is configured to be locked in the opening of the flange portion. The second mounting component comprises: A hollow portion is provided inside which can accommodate the flange portion and the tapered portion. A short tube installation opening inserted on the short tube portion and capable of being fixed on the flange portion; The hollow portion is provided with an inclined pressing portion capable of pressing along the narrow portion.

7. The coating device according to claim 1, characterized in that The coating unit comprises: A rotating shaft having a threaded portion at the lower end, The coating roller has an annular groove formed on the outer peripheral surface and a shaft hole formed in the center portion for the rotation shaft to be inserted therethrough. a liquid supply portion disposed adjacent to the outer peripheral surface of the coating roller and supplying the film-forming liquid to the annular groove; a recovery unit for recovering the film-forming liquid dripping from the coating roller; The recycling department has: The coating roller is fixed to the screw-engaged portion of the rotating shaft by a screw hole that can be screwed with the screw portion. A liquid receiving portion disposed below the threaded portion, a connecting portion for connecting the threaded portion and the liquid receiving portion so that their central axes are aligned; The coating roller and the collecting unit are configured to be attachable to and detachable from the rotating shaft.

8. The coating device according to claim 1, characterized in that The coating device comprises: a supporting portion for supporting the substrate, A plurality of the coating units are arranged around the support portion, and a moving means is provided to move each of the coating units along the side of the substrate supported by the support portion. A coating control unit that controls the movements of the moving means and the coating units; The coating control unit controls while causing the coating section of each coating unit to coat the film-forming liquid on at least the peripheral edge end surface of the substrate, The film-forming liquid applied is spread into a thin film on the peripheral edge end surface and the upper and lower surfaces of the peripheral edge of the substrate by the spreading portion, At the same time, the coating units are moved along the edge of the substrate by the moving means.

9. A drying device comprising a drying furnace for drying a substrate coated with a film-forming liquid by a coating device, characterized in that: The drying device comprises: a storage shelf disposed in the drying furnace and including a multi-layer shelf on which the substrate is placed; A carrying-in opening and closing section provided on the substrate carrying-in side of the drying furnace for opening and closing the carrying-in opening for carrying in and out the substrate carrying means, A carry-out opening and closing unit is provided on the substrate carry-out side of the drying furnace and is used to open and close the carry-out opening for carrying in and out the substrate carry-out means; a switch control unit for controlling the switching operation of the carrying-in switch unit and the carrying-out switch unit, a lifting mechanism for lifting the storage shelf, A lifting control unit controls the lifting and lowering movement of the storage shelf by the lifting mechanism.

10. The drying device according to claim 9, characterized in that: The lifting control unit, When the substrate is carried in, after the shelf for carrying the substrate in the multi-layer shelf is located at the height of the carrying-in port, the lifting action of the storage shelf is controlled so that the substrate carried in by the substrate carrying means is placed on the shelf. When the substrate is carried out, after the shelf for carrying out the substrate among the multi-layer shelves is located at the height of the carrying-out port, the lifting action of the storage shelf is controlled to move the substrate placed on the shelf to the substrate carrying-out means.

11. The drying device according to claim 9, characterized in that: The lifting mechanism comprises: a supporting portion for supporting the storage shelf, a lifting drive unit for lifting the support unit, A shelf position detection unit detects that the shelf is located at a height position of the carry-in port or the carry-out port.

12. A light irradiation device for irradiating light to a peripheral edge portion of a substrate coated with a film-forming liquid by a coating device to cure the film-forming liquid, characterized in that: The light irradiation device comprises: a lifting table capable of being raised and lowered while the substrate is placed thereon, a light irradiation unit disposed around the lifting space of the lifting platform and irradiating light to the peripheral edge of the substrate; A rotating mechanism rotates the light irradiation unit so that a light irradiation surface of the light irradiation unit is brought into close proximity with and opposed to at least a peripheral edge upper surface and a peripheral edge lower surface of the substrate.

13. The light irradiation device according to claim 12, characterized in that: The light irradiation unit includes a first light irradiation unit pair and a second light irradiation unit pair which are arranged to face each other with their height positions changed around the lifting space. The first light irradiation unit pair is arranged in a direction parallel to the conveying direction of the substrate. The second light irradiation unit pair is arranged in a direction orthogonal to the conveying direction of the substrate; The rotation mechanism includes a first rotation mechanism pair that rotates the first light irradiation unit pair and a second rotation mechanism pair that rotates the second light irradiation unit pair.

14. The light irradiation device according to claim 13, characterized in that The light irradiation device includes a moving mechanism that moves at least one of the second rotating mechanism pair forward and backward in the substrate conveying direction.

15. The light irradiation device according to claim 12, characterized in that A transporting means for transporting the substrate is provided below the lifting platform. The conveying means comprises a plurality of narrow rollers arranged in the conveying direction of the substrate. The lifting platform includes an opening for allowing the narrow rollers to face the upper surface of the lifting platform at a position facing the plurality of narrow rollers of the conveying means.

16. The light irradiation device according to claim 12, characterized in that The light irradiation device comprises: a positioning means for positioning the substrate before moving the substrate onto the lifting table; A moving means is provided for moving the substrate which has been positioned in a predetermined manner by the positioning means onto the lifting table.

17. The light irradiation device according to claim 16, characterized in that The positioning means comprises: an upper stage unit capable of rotating in a state where the substrate is placed thereon, A lower stage unit is disposed below the upper stage unit so that the upper stage unit can move linearly in a predetermined direction. a corner detection means for detecting the direction and position of the corner of the substrate placed on the upper stage unit, A positioning control unit drives the upper stage unit and / or the lower stage unit so that the direction and position of the corner of the substrate detected by the corner detection means become predetermined directions and positions.

18. The light irradiation device according to claim 17, characterized in that The upper stage unit comprises: a mounting table for mounting the substrate, A rotating shaft portion is provided below a corner of the mounting platform, A roller portion is provided below another corner of the mounting platform, a rotation driving unit for rotating the mounting table around the rotation shaft; The lower stage unit comprises: a supporting platform for supporting the mounting platform, a direct-acting mechanism capable of adjusting the position of the support table in a direction perpendicular to the substrate moving direction; The rotating shaft portion and the rotating driving portion are mounted on the supporting platform.

19. The light irradiation device according to claim 17, characterized in that The corner detection means comprises: An illumination unit for irradiating illumination toward the corner of the substrate from below, An imaging unit disposed at a position opposite to the lighting unit and configured to capture images of the corner of the substrate from above; The positioning control unit drives the upper stage unit and / or the lower stage unit so that the orientation and position of the corner of the substrate captured by the imaging unit become predetermined orientation and position.

20. A coating system, characterized in that: The coating system includes the coating device according to any one of claims 1 to 8 and the drying device according to any one of claims 9 to 11.

21. A coating system, characterized in that: The coating system includes the coating device according to any one of claims 1 to 8 and the light irradiation device according to any one of claims 12 to 19.

22. A coating system, characterized in that: The coating system includes the coating device according to any one of claims 1 to 8, the drying device according to any one of claims 9 to 11, and the light irradiation device according to any one of claims 12 to 19.

Images