Multi-cavity vacuum reflow soldering furnace

Abstract

The multi-cavity vacuum reflow soldering furnace comprises a machine shell provided with an operation door, a feeding port is formed in one side of the machine shell, a discharging port is formed in the side, opposite to the feeding port, of the machine shell, and a rack is installed in the machine shell; a material conveying system is installed on the machine frame, the material conveying system comprises a multi-section type horizontal conveying mechanism used for horizontally conveying materials and a material lifting mechanism arranged on one side of the multi-section type horizontal conveying mechanism, and the multi-section type horizontal conveying mechanism comprises a feeding conveying table, a connection conveying table and a discharging conveying table which are sequentially arranged; the rack is provided with at least one pair of furnace body cavities in the height direction, and the material lifting mechanism is used for lifting and conveying materials on the connection conveying table to the corresponding furnace body cavities or lowering the materials in the corresponding furnace body cavities to be placed on the connection conveying table. According to the multi-chamber vacuum reflow soldering furnace, batch production and welding can be carried out, each furnace body chamber can operate independently, and production of different processes / different products can be achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum reflow soldering furnaces, and in particular relates to a multi-chamber vacuum reflow soldering furnace. Background Art

[0002] With the rapid development of new energy, smart grid, electric vehicles and other industries, the market demand for IGBT (insulated gate bipolar transistor) and other power devices has surged, and its packaging technology has become one of the key links restricting the development of the industry. At present, the domestic market is highly dependent on imported equipment, especially high-end placement machines and vacuum reflow ovens, which not only increases manufacturing costs, but also limits the independent controllability of the industrial chain.

[0003] A vacuum reflow oven is a device that performs a soldering process on semiconductor chips in a vacuum environment. The device uses a vacuum environment and a reducing process gas to protect the product and solder from oxidation, thereby improving soldering quality, improving the heat transfer performance of soldered devices, and thus improving the reliability of electronic devices.

[0004] The material conveying system is an important part of the vacuum reflow oven. When conveying workpieces, the existing material conveying device is generally driven by a chain conveyor. The workpieces need to be moved horizontally in sequence and sent into the furnace chamber for processing. The current material conveying system does not have a mechanism that can transport materials in the height direction. On the other hand, the furnace chamber is generally responsible for processing the same process. Each furnace chamber is produced according to a certain processing sequence and is not independent of each other. Therefore, the production efficiency (UPH) of the vacuum reflow oven is low. Summary of the invention

[0005] In view of the above problems existing in the prior art, the present invention provides a multi-chamber vacuum reflow soldering furnace, the frame of the casing is equipped with a material conveying system, the material conveying system includes a multi-stage horizontal conveying mechanism for horizontally conveying materials, and a material lifting mechanism arranged on one side of the multi-stage horizontal conveying mechanism, the frame is provided with at least one pair of furnace chambers along the height direction, the material lifting mechanism is used to lift and convey the materials on the docking conveying platform to the corresponding furnace chamber, or to lower the materials in the corresponding furnace chamber and place them on the docking conveying platform. The multi-chamber vacuum reflow soldering furnace of the present invention is equipped with a material conveying system, which can significantly improve the production efficiency (UPH), and is a mass production tool for vacuum reflow soldering. As a fully automatic equipment, each furnace chamber can operate independently, and can realize the production of different processes / different products.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions: A multi-chamber vacuum reflow oven comprises a casing with an operating door, a feed port is provided on one side of the casing, a discharge port is provided on a side of the casing opposite to the feed port, and a frame is installed in the casing; The frame is equipped with a material conveying system, which includes a multi-stage horizontal conveying mechanism for horizontally conveying materials, and a material lifting mechanism arranged on one side of the multi-stage horizontal conveying mechanism, and the multi-stage horizontal conveying mechanism includes a feed conveying platform, a docking conveying platform and a discharge conveying platform arranged in sequence; Among them, the frame is provided with at least one pair of furnace chambers along the height direction, and the material lifting mechanism is used to lift and transport the material on the docking and conveying platform to the corresponding furnace chamber, or to lower the material in the corresponding furnace chamber and place it on the docking and conveying platform.

[0007] Further, the material lifting mechanism includes a lifting assembly, a moving beam, a grabbing assembly for grabbing materials, and a first guide assembly, the lifting assembly is transmission-connected to the moving beam, the moving beam can move along the height direction of the lifting assembly, the moving beam is fixedly connected to the grabbing assembly, and one end of the moving beam is respectively slidably connected to one of the first guide assemblies; The moving beam is arranged horizontally and the lifting component is connected to the middle part of the moving beam. There are two grabbing components, which are symmetrically arranged on both sides of the lifting component. The grabbing component includes two pairs of finger cylinders arranged opposite to each other, and a space for grabbing materials is reserved between the two pairs of finger cylinders.

[0008] Further, the lifting assembly includes a first linear module and a lifting basket fixed on the moving beam, a first driving motor is installed at one end of the first linear module, a top position sensor and a bottom position sensor are installed in the height direction of the first linear module, and the top position sensor is located above the bottom position sensor; The lifting basket is fixed on one side of the moving direction of the moving beam, and the lifting basket is arranged along the length direction of the moving beam. The finger cylinders are fixed on the lifting basket, and the finger cylinders are arranged parallel to each other. The finger cylinders are also equipped with cylinder stroke sensors.

[0009] Furthermore, the first guide assembly includes a first guide shaft, a shaft mounting plate, a bearing mounting seat and a first linear bearing. Both ends of the first guide shaft are fixed to the shaft mounting plate. The first guide shaft is installed with the first linear bearing. The first linear bearing is connected to the bearing mounting seat. The bearing mounting seat is installed at one end of the moving beam.

[0010] Furthermore, the lower parts of the feed conveyor platform, the docking conveyor platform and the discharging conveyor platform are all equipped with supporting devices, and the supporting devices are used to adjust the width direction position or height of the corresponding feed conveyor platform, the docking conveyor platform or the discharging conveyor platform, and the supporting devices include a height adjustment component, a connecting beam, a slide bar, an adjustment block and a horizontal adjustment screw. The connecting beam is provided with a slide groove along its length direction, and the slide bar is slidably arranged in the slide groove, and the adjustment blocks are arranged on both sides of the slide bar, and the adjustment blocks are fixed on the connecting beam, and each adjustment block is threadedly connected to the horizontal adjustment screw, and one end of the horizontal adjustment screw is respectively abutted against one side of the slide bar; The height adjustment assembly includes a height adjustment screw and a pad. The height adjustment screw is threadedly connected to the slide bar. The height adjustment screw is arranged perpendicular to the slide bar. The pad abuts against the height adjustment screw. The pad is fixedly arranged at the bottom of the feed conveying platform, the docking conveying platform or the discharge conveying platform.

[0011] Furthermore, the feed conveyor platform, the docking conveyor platform and the discharging conveyor platform respectively include a conveyor belt motor, a conveyor belt structure and an intermediate plate, the conveyor belt structure is symmetrically arranged at both ends of the intermediate plate and is respectively fixed to both ends of the intermediate plate, the conveyor belt motor is installed on one side of one of the conveyor belt structures, the conveyor belt motor cooperates with the two conveyor belt structures in transmission, the intermediate plate is arranged corresponding to the supporting device, and the supporting device is arranged and installed at the lower part of the intermediate plate.

[0012] Furthermore, the feed conveyor platform is installed with two photoelectric sensors along the material conveying direction, the docking conveyor platform is installed with four photoelectric sensors along the material conveying direction, and the discharge conveyor platform is installed with two photoelectric sensors along the material conveying direction.

[0013] Furthermore, the furnace chamber comprises: A cavity is configured as a hollow structure, and one side of the cavity is configured to be open; A door panel located on one side of the cavity opening, wherein the size of the door panel matches the opening; A second guide assembly fixed to the side of the cavity, the other end of the second guide assembly is fixedly connected to the door panel, the guide assembly includes a second guide shaft, one end of the second guide shaft is fixed to the door panel, and the other end of the second guide shaft extends to one side of the cavity and passes through two second linear bearings fixed on the cavity; and A driving module is installed at the bottom of the cavity, and the driving module is also coordinated with the door panel transmission, wherein the driving module can drive the door panel to cover the cavity opening or move away from the opening along the second guide assembly, and the driving module is arranged on one side of the cavity, and the driving module includes a second linear module and a second driving motor installed at one end of the second linear module, and the end of the second linear module away from the motor is fixed to the door panel, and the second linear module is fixed to the bottom of the cavity through a connecting plate.

[0014] Furthermore, the second linear module is also equipped with a stroke sensor, there are two stroke sensors and they are arranged along the length direction of the second linear module, the stroke sensor is used to detect the position of the second linear module, and a door closing sensor is installed on one side of the cavity, and the door closing sensor is used to detect the status of the door panel.

[0015] Furthermore, two hanging plates are fixed on one side of the door panel close to the cavity, and the two hanging plates are arranged parallel to each other. The space between the two hanging plates is used to place a chip fixture. An upper cover is hingedly arranged on the upper part of the cavity, and a plurality of threaded holes are provided in the circumference of the upper cover. Threaded holes corresponding to the threaded holes of the upper cover are provided on the side of the cavity facing the upper cover.

[0016] Compared with the prior art, the beneficial effects of this solution are: 1. A material conveying system is installed in the multi-chamber vacuum reflow oven of the present invention. At least one pair of furnace chambers is installed in the multi-chamber vacuum reflow oven. Each furnace chamber can operate independently and can perform batch production welding, significantly improving production efficiency (UPH), and realizing the production of different processes / different products. The material lifting mechanism of the material conveying system includes a lifting assembly, a moving beam, a grabbing assembly, and a first guide assembly. By installing the first guide assembly at both ends of the grabbing assembly, the moving beam moves up and down in a straight line under the guidance of the first guide assembly, and a high degree of stability can be maintained when conveying (material) chip fixtures. The lifting assembly is used to lift and lower the height of the moving beam. The degree of automation of the material lifting mechanism is improved by setting the lifting assembly. The lifting assembly is installed along the height direction, and multiple pairs of furnace chambers can be set along the height direction of the lifting assembly, thereby improving the overall space utilization of the multi-chamber vacuum reflow oven equipment; 2. The material conveying system also includes a multi-stage horizontal conveying mechanism, which includes a feed conveyor, a docking conveyor, and a discharging conveyor arranged in sequence. The material can pass through the feed conveyor, the docking conveyor, and the discharging conveyor smoothly, so that the material processing accuracy is higher and the generation of waste is reduced. In the feeding stage, the material is sent into a furnace chamber in cooperation with the material lifting mechanism. In the docking stage, it is used to receive the material from the material lifting mechanism. In the discharging stage, the processed material is output to the outside of the multi-chamber vacuum reflow oven. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of a multi-chamber vacuum reflow oven; Figure 2 It is a structural diagram of the material conveying system; Figure 3 It is the side view of the material conveying system; Figure 4 It is a structural diagram of the material lifting mechanism; Figure 5 It is a schematic diagram of the structure of the local part of the grabbing component; Figure 6 It is a schematic diagram of the structure of a multi-stage linear transmission mechanism; Figure 7 It is a side view of a multi-section linear transmission mechanism; Figure 8 It is a schematic diagram of the supporting device structure; Fig. 9 Schematic diagram of the furnace chamber structure.

[0018] Fig.10 This is a front view of the furnace chamber.

[0019] The reference numerals are as follows: lifting assembly 1, lifting basket 11, support 111, first linear module 12, first drive motor 13, top position sensor 14, bottom position sensor 15, moving beam 2, grabbing assembly 3, finger cylinder 31, air claw 311, cylinder stroke sensor 32, clamp seat 33, first guide assembly 4, first guide shaft 41, shaft mounting plate 42, bearing mounting seat 43, first linear bearing 44, feed conveyor platform 5, docking conveyor platform 6, unloading conveyor platform 7, conveyor belt motor 71, conveyor belt structure 72, middle plate 73, photoelectric sensor 74, smooth strip 75, blocker 76, support device 8, connecting beam 81, slide bar 82, adjustment Block 83, horizontal adjustment screw 84, abutment 851, height adjustment screw 86, cushion block 87, frame 9, furnace chamber 91, casing 92, operating door 921, feed port 922, discharge port 923, ventilation fan 924, cavity 911, door closing sensor 9111, second linear bearing 9112, upper cover 9113, hinge 9114, door panel 912, hanging plate 9121, second guide assembly 913, second guide shaft 9131, shaft connecting block 9132, drive module 914, second linear module 9141, second drive motor 9142, moving seat 9143, connecting plate 9144, stroke sensor 9145, chip fixture 915. DETAILED DESCRIPTION

[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] Multi-chamber vacuum reflow oven, such as Figure 1 , Figure 2 and Figure 3 As shown, it includes a housing 92 with an operating door 921, a feed port 922 is provided on one side of the housing 92, and a discharge port 923 is provided on the side of the housing 92 opposite to the feed port 922 (the discharge port 923 is not visible in the figure), and a frame 9 is installed in the housing 92; The frame 9 is equipped with a material conveying system, such as Figure 4 As shown, the material conveying system includes a multi-stage horizontal conveying mechanism for horizontally conveying materials, and a material lifting mechanism arranged on one side of the multi-stage horizontal conveying mechanism, and the multi-stage horizontal conveying mechanism includes a feed conveying platform 5, a docking conveying platform 6 and a discharge conveying platform 7 which are arranged in sequence; Among them, the frame 9 is provided with at least one pair of furnace body chambers 91 along the height direction, and the material lifting mechanism is used to lift and transport the material of the docking and conveying platform 6 to the corresponding furnace body chamber 91, or to lower the material in the corresponding furnace body chamber 91 and place it on the docking and conveying platform 6.

[0022] In a specific embodiment of the present invention, the multi-chamber vacuum reflow oven of the present invention has an operating door 921 installed in the housing 92. The operating door 921 is a two-door structure, both of which are provided with observation glass, so that the operating status of each component inside the housing 92 can be observed without opening the operating door 921. The internal functional components of the housing 92 include an electrical control system, and a plurality of ventilation fans 924 are provided on the upper part of the housing 92 to cool the entire device.

[0023] In this embodiment, the feed conveyor 5 is correspondingly arranged at the feed port 922 of the housing 92, the discharge conveyor 7 is correspondingly arranged at the discharge port 923 of the housing 92, a material lifting mechanism is arranged on one side of the multi-stage horizontal conveyor mechanism, each pair of furnace chambers 91 is respectively arranged corresponding to the grabbing assembly 3 of the material lifting mechanism, each pair of furnace chambers 91 includes two furnace chambers 91, which are arranged along the height direction of the frame 9, and each pair of furnace chambers 91 works independently to process the chips respectively. A multi-stage horizontal conveyor mechanism is arranged directly below the grabbing assembly 3, and the multi-stage horizontal conveyor mechanism is horizontally fixed inside the frame 9. The materials involved in the present invention are mainly chips to be processed, and these chips are placed on the chip fixture 915. The lifting assembly 1 is located on the middle side of the docking conveyor 6. The chip fixture 915 passes through the feed conveyor 5 and the docking conveyor 6 arranged in sequence until it reaches the bottom of the corresponding furnace chamber 91. The lifting assembly 1 drives the grabbing assembly 3 to move up and down, and the grabbing assembly 3 grabs the chip fixture 915. The material discharging conveyor 7 outputs the processed materials to the outside of the multi-chamber vacuum reflow oven, thereby forming an automatic material delivery system.

[0024] Further, the material lifting mechanism includes a lifting component 1, a moving beam 2, a grabbing component 3 for grabbing materials, and a first guide component 4, the lifting component 1 is transmission-connected to the moving beam 2, the moving beam 2 can move along the height direction of the lifting component 1, the moving beam 2 is fixedly connected to the grabbing component 3, and one end of the moving beam 2 is respectively slidably connected to one of the first guide components 4; The moving beam 2 is horizontally arranged and the lifting component 1 is connected to the middle part of the moving beam 2. There are two grabbing components 3, and the two grabbing components 3 are symmetrically arranged on both sides of the lifting component 1. The grabbing component 3 includes two pairs of finger cylinders 31 arranged opposite to each other, and a space for grabbing materials is reserved between the two pairs of finger cylinders 31.

[0025] According to a specific embodiment provided by the present invention, the lifting component 1 of the present invention is used to lift and lower the height of the moving beam 2. The lifting component 1 is installed along the overall height direction of the equipment. The lifting component 1 is located in the middle of the moving beam 2 and is fixed to the side of the moving beam 2. The lower part of the moving beam 2 is fixedly connected to the grabbing component 3. The number of the grabbing components 3 can be set to at least one, and can be specifically set according to the actual number of furnace chambers 91. The grabbing component 3 adopts the structure of the finger cylinder 31, and the material is automatically grabbed between two pairs of relatively arranged finger cylinders 31, so the degree of automation is higher.

[0026] In view of the light weight of the chip itself, the material welding process requires extremely high precision. In order to prevent displacement during the conveying process, the stability of the conveying process must be ensured. Therefore, the smooth movement of the moving beam 2 is very important. In this embodiment, the two ends of the moving beam 2 are respectively slidably connected to the first guide assembly 4 to ensure that under the guidance of the first guide assembly 4, the moving beam 2 can accurately perform a linear lifting motion.

[0027] Furthermore, the lifting assembly 1 includes a first linear module 12 and a lifting basket 11 fixed on the moving beam 2, a first driving motor 13 is installed at one end of the first linear module 12, a top position sensor 14 and a bottom position sensor 15 are installed in the height direction of the first linear module 12, and the top position sensor 14 is located above the bottom position sensor 15; The lifting basket 11 is fixed to one side of the moving direction of the moving beam 2, and the lifting basket 11 is arranged along the length direction of the moving beam 2. The finger cylinders 31 are fixed to the lifting basket 11, and the finger cylinders 31 are arranged parallel to each other. The finger cylinders 31 are also equipped with cylinder stroke sensors 32.

[0028] According to a specific embodiment provided by the present invention, the first linear module 12 is arranged parallel to the first guide shaft 41 of the first guide assembly 4, and the first drive motor 13 is installed at the lower end of the first linear module 12. The first drive motor 13 can be a servo motor. The servo motor has the advantage of high position control accuracy and can be precisely controlled when loading. The first linear module 12 is installed with a top position sensor 14 and a bottom position sensor 15 in the height direction. The top position sensor 14 and the bottom position sensor 15 are used to sense the position of the grabbing assembly 3. The top position sensor 14 and the bottom position sensor 15 can be photoelectric sensors currently available on the market. When the lifting basket 11 reaches the position (safe position) of the top position sensor 14 and the bottom position sensor 15, the first drive motor 13 stops working and the lifting basket 11 stops moving.

[0029] In this embodiment, the lifting assembly 1 also includes a lifting basket 11 fixed on the moving beam 2. Specifically, the lifting basket 11 is fixed to the lower part of the moving beam 2. A plurality of supports 111 are fixed at the edge position of the upper part of the lifting basket 11, which is fixed to the side of the moving beam 2 through the supports 111. The lifting basket 11 is arranged along the length direction of the moving beam 2, and the finger cylinder 31 is fixed on the lifting basket 11. This embodiment does not limit the width of the lifting basket 11, that is, the width of the lifting basket 11 can be set according to the volume of the multi-chamber vacuum reflow furnace during actual installation, and the volume of the furnace chamber 91 for processing materials. The finger cylinders 31 are arranged parallel to each other, and the finger cylinders 31 are arranged in the height direction.

[0030] The finger cylinder 31 of the lifting assembly 1 can adopt the existing structure. The upper end of the finger cylinder 31 is fixed with a clamp seat 33 (the clamp seat 33 is not visible in the figure), and the clamp seat 33 adopts a "C" type clamp structure, such as Figure 5 As shown, the clamp seat 33 is fixed on the lower panel of the lifting basket 11. By adjusting the position of the finger cylinder 31 fixed on the clamp seat 33, the height of the finger cylinder 31 can be adjusted to adapt to the clamping and fixing of chip fixtures 915 of different heights, which can improve the versatility of the present invention.

[0031] In this embodiment, the lifting component 1 is used to lift and lower the height of the moving beam 2. The lifting component 1 includes a first linear module 12. The first linear module 12 is located in the height direction. The purpose of this arrangement is to set multiple pairs of furnace body chambers 91 along the height direction of the first linear module 12, and use the grabbing component 3 to move the multiple pairs of furnace body chambers 91 up and down to transport materials, thereby improving the overall space utilization of the multi-chamber vacuum reflow oven equipment, that is, improving the production efficiency.

[0032] The first drive motor 13 of the lifting assembly 1 can specifically use an absolute servo motor as a power source. The absolute servo motor can control the speed and position accuracy very accurately, and can convert the voltage signal into torque and speed to drive the control object. The rotor speed of the servo motor is controlled by the input signal and can respond quickly. In the automatic control system, it is used as an actuator and has the characteristics of small electromechanical time constant, high linearity, starting voltage, etc. It can convert the received electrical signal into angular displacement or angular velocity output on the motor shaft.

[0033] The finger cylinder 31 has a compact shape, small size, and light weight, and can grasp objects with high repetitive accuracy. The end of the finger cylinder 31 body is hinged with the air claw 311, and the air claw 311 can be in a horizontal state or a vertical state when the finger cylinder 31 body is working, so that the chip fixture 915 can be lifted or lowered through the first linear module 12. The finger cylinder 31 can realize automatic control by loading a magnetic switch, which improves the degree of automation and reduces manual labor.

[0034] Furthermore, the first guide assembly 4 includes a first guide shaft 41, a shaft mounting plate 42, a bearing mounting seat 43 and a first linear bearing 44. The two ends of the first guide shaft 41 are fixed to the shaft mounting plate 42. The first guide shaft 41 is installed with the first linear bearing 44. The first linear bearing 44 is connected to the bearing mounting seat 43. The bearing mounting seat 43 is installed at one end of the moving beam 2.

[0035] According to a specific embodiment provided by the present invention, this embodiment provides a specific structure of a first guide assembly 4, wherein a first guide shaft 41 of the first guide assembly 4 is arranged in the height direction, and both ends of the first guide shaft 41 are fixed to the inner wall of the multi-chamber vacuum reflow oven housing 92 through a shaft mounting plate 42. A first linear bearing 44 is mounted on the first guide shaft 41, and the first linear bearing 44 is fixed to one end of the moving beam 2 through a bearing mounting seat 43.

[0036] Furthermore, the feeding conveying platform 5, the connecting conveying platform 6 and the discharging conveying platform 7 are all equipped with a supporting device 8 at the bottom. Figure 6 , Figure 7 and Figure 8As shown, the support device 8 is used to adjust the width direction position or height of the corresponding feed conveyor platform 5, docking conveyor platform 6 or discharge conveyor platform 7. The support device 8 includes a height adjustment component, a connecting beam 81, a slide bar 82, an adjustment block 83 and a horizontal adjustment screw 84. The connecting beam 81 is provided with a slide groove along its length direction, and the slide bar 82 is slidably arranged in the slide groove. The adjustment blocks 83 are arranged on both sides of the slide bar 82. The adjustment blocks 83 are fixed on the connecting beam 81, and each adjustment block 83 is threadedly connected to the horizontal adjustment screw 84. One end of the horizontal adjustment screw 84 is respectively abutted against one side of the slide bar 82; The height adjustment assembly includes a height adjustment screw 86 and a pad 87. The height adjustment screw 86 is threadedly connected to the slide bar 82. The height adjustment screw 86 is arranged perpendicular to the slide bar 82. The pad 87 abuts against the height adjustment screw 86. The pad 87 is fixedly arranged at the lower part of the feed conveying platform 5, the docking conveying platform 6 or the discharge conveying platform 7.

[0037] According to a specific embodiment provided by the present invention, in the multi-stage linear conveying mechanism of the present invention, the material first enters the feed conveying table 5, is transported to the docking conveying table 6 through the feed conveying table 5, and is conveyed to the furnace body chamber 91 for processing the material on the docking conveying table 6. The finger cylinder 31 of the grabbing assembly 3 puts the product down to the docking conveying table 6, and conveys the product to the discharge conveying table 7. The material enters the discharge conveying table 7 and is finally transported to the next process.

[0038] The support device 8 is installed at the bottom of the multi-stage linear transmission mechanism, and the connecting beam 81 is used to fix and install the support device 8. The slide bar 82 is located in the slide groove opened at the upper part of the connecting beam 81. The length of the slide groove is greater than the length of the slide bar 82, so that the slide bar 82 can slide in the slide groove of the connecting beam 81. The slide bar 82 passes through the slide bar 82 and the connecting beam 81 through a screw to slide and fit and fix (the slide bar 82 and the connecting beam 81 are fixed after the screw is tightened). Specifically, a strip slide hole is opened at the bottom of the slide groove, and the screw (not visible in the screw figure) passes through the strip slide hole and is threadedly engaged with the slide bar 82, and the screw can slide in the strip slide hole. The upper surface of the two ends of the connecting beam 81 is vertically fixed with an adjustment block 83, and the horizontal adjustment screw 84 is horizontal along the length direction of the connecting beam 81. The horizontal adjustment screw 84 is threadedly engaged with its respective adjustment block 83. The protrusions at both ends of the slide bar 82 are greater than the connecting beam 81, so that one end of the horizontal adjustment screw 84 respectively abuts against the abutment portion 851 raised by the slide bar 82. After rotating the horizontal adjustment screw 84, the slide bar 82 can slide in the slide groove of the connecting beam 81, thereby driving the multi-section linear conveying mechanism above the slide bar 82 to move in the width direction, and the conveyor belt structure 72 can be moved in the horizontal left and right directions, so as to better connect the materials.

[0039] In this embodiment, during the operation of the material lifting mechanism, in the feeding stage: the electrical control system component first confirms that the door panels 912 of all furnace chambers 91 are in a closed state. When it is determined that a furnace chamber 91 is in a waiting state and there is material on the docking and conveying table 6 at the bottom of the chamber 911, the three groups of grabbing components located above the interior of the multi-chamber vacuum reflow oven will be driven downward by the first linear module 12. After the bottom position sensor 15 at the bottom position of the first linear module 12 confirms the position, the air claw 311 of the finger cylinder 31 of the grabbing component 3 corresponding to the furnace chamber 91 will hook the chip fixture 915 on the docking and conveying table 6 from the back and lift it. Subsequently, the first drive motor 13 drives the first linear module 12 to move the chip fixture 915 to the interior of the multi-chamber vacuum reflow oven. At this time, the door panel 912 of the furnace chamber 91 in the waiting state will be opened, and the chip fixture 915 will move downward with the grab assembly 3 to the inside of the door panel 912 of the furnace chamber 91. The displacement stroke of the grab assembly 3 is to accurately set the top position sensor 14 to the absolute position of the furnace chamber 91 in the waiting state through the absolute value servo system, and then the air claw 311 of the finger cylinder 31 of the grab assembly 3 is released to place the chip fixture 915 in the furnace chamber 91 in the waiting state. Subsequently, the grab assembly 3 returns to the air above the multi-chamber vacuum reflow oven, and finally the door panel 912 of the furnace chamber 91 is automatically closed.

[0040] In the discharge stage: the electrical control system component first ensures that the door panels 912 of all furnace chambers 91 are in a closed state. Once a furnace chamber 91 is determined to be in a completed state, the electrical control system will open the door panel 912 of the furnace chamber 91. The grabbing assembly 3 then moves downward along the linear module 12 to the inside of the door panel 912 of the furnace chamber 91. The displacement stroke of the grabbing assembly 3 is to accurately set the top position sensor 14 to the absolute position of the furnace chamber 91 in the waiting state through the absolute value servo system, and then the air claw 311 of the finger cylinder 31 of the grabbing assembly 3 hooks the chip fixture 915 from the back. Then, the grabbing assembly 3 moves upward together with the chip fixture 915 to the air space inside the multi-chamber vacuum reflow oven, and the door panel 912 of the furnace chamber 91 is closed. After the system confirms again that the door panels 912 of all furnace chambers 91 are in the closed state, the chip fixture 915 moves downward along the first linear module 12 together with the grabbing assembly 3. When the bottom position sensor 15 of the first linear module 12 confirms the position, the air claw 311 of the finger cylinder 31 of the grabbing assembly 3 is released to place the chip fixture 915 on the docking conveyor table 6 so as to continue to be conveyed to the unloading conveyor table 7 .

[0041] In this embodiment, the height adjustment screw 86 is arranged vertically (along the height direction), and the pad 87 is fixed to the middle plate 73. In order to make the movement of the middle plate 73 more stable during adjustment, the slide bar 82 is connected to two height adjustment components, and the height adjustment screw 86 passes through the strip hole opened in the connecting beam 81 and the slide bar 82 at the same time.

[0042] Furthermore, the feed conveyor platform 5, the docking conveyor platform 6 and the discharge conveyor platform 7 respectively include a conveyor belt motor 71, a conveyor belt structure 72 and an intermediate plate 73. The conveyor belt structure 72 is symmetrically arranged at both ends of the intermediate plate 73 and fixed to both ends of the intermediate plate 73. The conveyor belt motor 71 is installed on one side of one of the conveyor belt structures 72. The conveyor belt motor 71 cooperates with the two conveyor belt structures 72 in transmission. The conveyor belt structure 72 can adopt the existing structure. The two sides of the conveyor belt structure 72 are connected by a smooth strip 75. The smooth strip 75 adopts a strip plate structure. The smooth strip 75 can also guide the movement of logistics. The inner side of the conveyor belt structure 72 is connected to the intermediate plate 73. The conveyor belt motor 71 is installed on one side of the conveyor belt structure 72. The output end of the conveyor belt motor 71 is connected to the pulley and the belt roller, and the conveyor belt is driven to move through the belt roller. The intermediate plate 73 is arranged corresponding to the support device 8, and the support device 8 is arranged and installed at the lower part of the intermediate plate 73. This embodiment provides a specific installation method of the support device 8, where the support device 8 is installed on the middle plate 73, specifically, the support device 8 is arranged and installed at the lower part of the middle plate 73. The number of the middle plates 73 can be set according to the length of the conveyor belt, and the number of the middle plates 73 is generally more than two to ensure the stability of the conveyor belt structure 72, which is not specifically limited here.

[0043] Furthermore, the feed conveyor 5 is equipped with two photoelectric sensors 74 along the material conveying direction, the docking conveyor 6 is equipped with four photoelectric sensors 74 along the material conveying direction, and the discharge conveyor 7 is equipped with two photoelectric sensors 74 along the material conveying direction. The photoelectric sensor 74 can be installed in the middle of the middle plate 73. The photoelectric sensor 74 is used to monitor the position of the material. After the material passes through the photoelectric sensor 74, the photoelectric sensor 74 converts the position signal into an electrical signal and transmits it to the electrical control system, thereby controlling the conveyor motor 71.

[0044] In the multi-stage linear conveying mechanism of this embodiment, the first photoelectric sensor 74 (located on the side of the feeding direction) of the feed conveyor 5 is responsible for detecting the entry of the material (chip fixture 915). At this time, the conveyor belt motor 71 of the feed conveyor 5 will start working. The second photoelectric sensor 74 on the feed conveyor 5 is used to confirm that the material has completely entered the feed conveyor 5. Once the material has completely entered, the conveyor belt motor 71 will stop working and determine whether the furnace chamber 91 needs to be loaded. According to the judgment result of the electronic control system, during the material forward process, if it is detected that the material has completely left the feed conveyor 5, the conveyor belt motor 71 will stop working.

[0045] The first photoelectric sensor, the second photoelectric sensor 74 and the first pair of blocking cylinders (located on one side of the feeding direction) on the docking conveyor 6 together constitute the first station, while the third and fourth photoelectric sensors 74 and the second pair of blocking cylinders constitute the second station. When the system determines that the furnace chamber 91 above the first station needs to be fed, the first pair of blocking cylinders will be started immediately, and the first photoelectric sensor 74 on the docking conveyor 6 will be started to detect whether the material has entered the first station. At this time, the conveyor motor 71 of the docking conveyor 6 will start working until the material reaches the second photoelectric sensor 74. The second photoelectric sensor 74 is responsible for confirming that the material has completely entered the first station. At this time, the first pair of blocking cylinders prevents the material from continuing to move forward, ensuring that the material stops accurately at the designated furnace chamber 91 position, and then the conveyor motor 71 will stop working. If the system determines that the furnace chamber 91 above the second station needs to be fed, the second pair of blocking cylinders will be started immediately, and the first photoelectric sensor 74 will be started to detect whether the material has entered the first station. At this time, the conveyor belt motor 71 connected to the conveyor table 6 will start working, and the material will continue to move to the third photoelectric sensor 74, which will detect whether the material has entered the second station. When the fourth photoelectric sensor 74 senses that the material has completely entered the second station, the second pair of blocking cylinders will stop the material from moving forward, ensuring that the material stops accurately at the designated furnace chamber 91 position, and then the conveyor belt motor 71 will stop working.

[0046] In the discharge stage, when the first and second photoelectric sensors 74 of the docking conveyor 6 detect that there is material in the first station or the third and fourth photoelectric sensors 74 detect that there is material in the second station, it means that the process material has been successfully placed on the docking conveyor 6 by the grabbing component 3. At this time, the electrical control system component needs to confirm that the grabbing component 3 has returned to the upper safety position (i.e., the top position sensor position). Subsequently, the conveyor motor 71 of the docking conveyor 6 will start working. After the material passes through the docking conveyor 6, the first photoelectric sensor 74 of the discharge conveyor 7 detects that the material has entered, and the conveyor motor 71 continues to work until the second photoelectric sensor 74 detects that the material has completely entered the discharge conveyor 7, at which time the conveyor motor 71 will stop working.

[0047] Furthermore, if Fig. 9 and Fig.10 As shown, the furnace chamber 91 includes: A cavity 911 having a hollow structure, one side of which is open; A door panel 912 located at one side of the opening of the cavity 911, wherein the size of the door panel 912 matches the opening; A second guide assembly 913 fixed to the side of the cavity 911, the number of which can be two, the other end of which is fixedly connected to the door panel 912, the guide assembly comprising a second guide shaft 9131, one end of which is fixed to the door panel 912, and the other end of which extends to one side of the cavity 911 and passes through two second linear bearings 9112 fixed on the cavity 911; and A driving module 914 is installed at the bottom of the cavity 911, and the driving module 914 is simultaneously cooperated with the door panel 912 in transmission, wherein the driving module 914 can drive the door panel 912 to cover the opening of the cavity 911 or move away from the opening along the second guide assembly 913, and the driving module 914 is arranged on one side of the cavity 911, and the driving module 914 includes a second linear module 9141 and a second driving motor 9142 installed at one end of the second linear module 9141, and the end of the second linear module 9141 away from the motor is fixed to the door panel 912, and the second linear module 9141 is fixed to the bottom of the cavity 911 through a connecting plate 9144.

[0048] According to a specific embodiment provided by the present invention, the cavity 911 can specifically adopt a hexahedral cavity structure, an opening is provided on one side of the cavity 911, and a door panel 912 is provided on the open side. The door panel 912 can be covered on the open side of the cavity 911. When the cavity 911 is vacuum, the door panel 912 and the sealing ring provided at the door panel 912 or the edge of the opening are pressed against the sealing ring by negative pressure to form a sealed space. The door panel 912 is fixed to the second guide assembly 913 on both sides of the cavity 911. Under the action of the second guide assembly 913, the door panel 912 can cover or be removed from the open side of the cavity 911.

[0049] The cavity 911 is also provided with a driving module 914, which can be specifically installed at the bottom of both sides of the cavity 911. The driving module 914 is also in transmission cooperation with the door panel 912, and the second guide assembly 913 can limit the movement path of the door panel 912. The driving module 914 can drive the door panel 912 along the second guide assembly 913 to cover the opening of the cavity 911 or move away from the opening.

[0050] The existing vacuum reflow ovens basically use the method of lifting the cover or pushing and pulling horizontally to load and unload the furnace body, and most of them use the method of manually opening the cover, which is not suitable for use scenarios that require a higher degree of automation. The furnace chamber 91 of the present invention uses the power of the driving module 914 and the guidance of the second guide component 913 to make the door panel 912 of the cavity 911 pull and pull, and cooperate with the corresponding grabbing component 3 to achieve automatic opening and closing. At the same time, one end of the hanging plate 9121 is fixed on the door panel 912, and the operation of the driving module 914 can drive the hanging plate 9121 and the chip fixture 915 placed inside the cavity 911 to automatically enter and exit the cavity 911.

[0051] In this embodiment, there is only one driving module 914, which is fixed at the bottom of one side of the cavity 911. The driving module 914 specifically includes a second linear module 9141 and a second driving motor 9142 installed at one end of the second linear module 9141. The second linear module 9141 is horizontally arranged. The upper part of the second linear module 9141 also includes a moving seat 9143, and the moving seat 9143 is fixed to the lower part of the cavity 911 through a connecting plate 9144.

[0052] In this embodiment, the second drive motor 9142 can be a servo motor, and the second linear module 9141 is a screw structure. When the second drive motor 9142 is working, the moving seat 9143 moves, and the end of the second linear module 9141 is fixed to the door panel 912, thereby driving the door panel 912 to move. The purpose of such installation is to improve space utilization and avoid the end of the second linear module 9141 extending too much out of the door panel 912.

[0053] Furthermore, the second guide assembly 913 is arranged above the driving module 914, and the second guide assembly 913 includes a second guide shaft 9131, and the second guide shaft 9131 is arranged in parallel with the second linear module 9141. One end of the second guide shaft 9131 is fixed to the shaft connection block 9132, and the shaft connection block 9132 is an "L"-shaped structure. The shaft connection block 9132 is fixed at the corner of the door panel 912, and the other end of the second guide shaft 9131 extends to one side of the cavity 911 and passes through two second linear bearings 9112 fixed on the cavity 911. Two second linear bearings 9112 are arranged, so that the second guide shaft 9131 is subjected to uniform force during movement. The end of the second guide shaft 9131 away from the shaft connection block 9132 is the large end, and a limit buffer block made of rubber material is arranged at the large end, and the limit buffer block can contact the second linear bearing 9112 to form a buffer.

[0054] Furthermore, the second linear module 9141 is also equipped with a stroke sensor 9145. There are two stroke sensors 9145 and they are arranged along the length direction of the second linear module 9141. The stroke sensor 9145 is used to detect the position of the second linear module 9141. A door closing sensor 9111 is installed on one side of the cavity 911. The door closing sensor 9111 is used to detect the status of the door panel 912.

[0055] Furthermore, the second linear module 9141 is also equipped with a travel sensor 9145. There are two travel sensors 9145 and they are arranged along the length direction of the second linear module 9141. The travel sensor 9145 is used to detect the position of the second linear module 9141. When the travel sensor 9145 moves to the bottom of the connecting plate 9144, the position can be detected, and the position can be converted into an electrical signal and transmitted to the control system, thereby controlling the second drive motor 9142. When installed, the cavity 911 is fixed to the vacuum reflow oven frame 9. When the second linear module 9141 is working, it can move relative to the cavity 911, thereby driving the door panel 912 at the end to move. The door closing sensor 9111 is used to detect the state of the door panel 912, that is, when the door panel 912 is driven by the second linear module 9141 to move to the door closing sensor 9111, the door closing sensor 9111 can detect whether the door panel 912 is closed. The door closing sensor 9111 and the travel sensor 9145 are both photoelectric sensors, and the photoelectric sensor can be a finished product available on the market.

[0056] Furthermore, two hanging plates 9121 are fixed on one side of the door plate 912 close to the cavity 911, and the two hanging plates 9121 are arranged parallel to each other. The chip fixture 915 is placed between the two hanging plates 9121. An upper cover 9113 is hingedly arranged on the upper part of the cavity 911. The upper cover 9113 is provided with a plurality of threaded holes in the circumference. The side of the cavity 911 facing the upper cover 9113 is provided with threaded holes corresponding to the threaded holes of the upper cover 9113. The hanging plates 9121 adopt a strip plate structure, and a clamping portion is extended from the opposite side of the two hanging plates 9121 to carry the chip fixture 915.

[0057] In this embodiment, hinges 9114 are fixed on both sides of the cavity 911. Fig. 9 As shown, the hinge 9114 can be fixed to one end of the cavity 911 where the connecting plate 9144 is installed, so that the upper cover 9113 can be opened and closed conveniently without colliding with other structures of the equipment. The upper cover 9113 is hinged to the upper cover 9113 through the hinge 9114, and the upper cover 9113 is also connected to the cavity 911 through bolts. A sealing ring is provided on the upper part of the cavity 911 or on the side of the upper cover 9113 close to the cavity 911, so as to improve the sealing performance. The freely removable upper cover 9113 of the furnace chamber 91 retains the characteristics of easy installation, maintenance and cleaning of the upper cover type cavity 911.

[0058] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0059] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0060] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-chamber vacuum reflow oven, comprising a housing with an operating door, characterized in that: A feed inlet is provided on one side of the casing, a discharge outlet is provided on a side of the casing opposite to the feed inlet, and a frame is installed in the casing; The frame is equipped with a material conveying system, which includes a multi-stage horizontal conveying mechanism for horizontally conveying materials, and a material lifting mechanism arranged on one side of the multi-stage horizontal conveying mechanism, and the multi-stage horizontal conveying mechanism includes a feed conveying platform, a docking conveying platform and a discharge conveying platform arranged in sequence; Among them, the frame is provided with at least one pair of furnace chambers along the height direction, and the material lifting mechanism is used to lift and transport the material on the docking and conveying platform to the corresponding furnace chamber, or to lower the material in the corresponding furnace chamber and place it on the docking and conveying platform.

2. The multi-chamber vacuum reflow oven according to claim 1, characterized in that: The material lifting mechanism comprises a lifting assembly, a moving beam, a grabbing assembly for grabbing materials and a first guide assembly, the lifting assembly is in transmission connection with the moving beam, the moving beam can move along the height direction of the lifting assembly, the moving beam is fixedly connected with the grabbing assembly, and one end of the moving beam is respectively slidably connected with one of the first guide assemblies; The moving beam is arranged horizontally and the lifting component is connected to the middle part of the moving beam. There are two grabbing components, which are symmetrically arranged on both sides of the lifting component. The grabbing component includes two pairs of finger cylinders arranged opposite to each other, and a space for grabbing materials is reserved between the two pairs of finger cylinders.

3. The multi-chamber vacuum reflow oven according to claim 2, characterized in that: The lifting assembly includes a first linear module and a lifting basket fixed on the moving beam, a first driving motor is installed at one end of the first linear module, a top position sensor and a bottom position sensor are installed in the height direction of the first linear module, and the top position sensor is located above the bottom position sensor; The lifting basket is fixed on one side of the moving direction of the moving beam, and the lifting basket is arranged along the length direction of the moving beam. The finger cylinders are fixed on the lifting basket, and the finger cylinders are arranged parallel to each other. The finger cylinders are also equipped with cylinder stroke sensors.

4. The multi-chamber vacuum reflow oven according to claim 3, characterized in that: The first guide assembly includes a first guide shaft, a shaft mounting plate, a bearing mounting seat and a first linear bearing. Both ends of the first guide shaft are fixed to the shaft mounting plate. The first guide shaft is installed with the first linear bearing. The first linear bearing is connected to the bearing mounting seat. The bearing mounting seat is installed at one end of the moving beam.

5. The multi-chamber vacuum reflow oven according to any one of claims 1 to 4, characterized in that: The lower parts of the feed conveyor platform, the docking conveyor platform and the discharging conveyor platform are all equipped with supporting devices, and the supporting devices are used to adjust the width direction position or height of the corresponding feed conveyor platform, the docking conveyor platform or the discharging conveyor platform, and the supporting devices include a height adjustment component, a connecting beam, a slide bar, an adjustment block and a horizontal adjustment screw. The connecting beam is provided with a slide groove along its length direction, and the slide bar is slidably arranged in the slide groove, and the adjustment blocks are arranged on both sides of the slide bar, and the adjustment blocks are fixed on the connecting beam, and each adjustment block is threadedly connected to the horizontal adjustment screw, and one end of the horizontal adjustment screw is respectively abutted against one side of the slide bar; The height adjustment assembly includes a height adjustment screw and a pad. The height adjustment screw is threadedly connected to the slide bar. The height adjustment screw is arranged perpendicular to the slide bar. The pad abuts against the height adjustment screw. The pad is fixedly arranged at the bottom of the feed conveying platform, the docking conveying platform or the discharge conveying platform.

6. The multi-chamber vacuum reflow oven according to claim 5, characterized in that: The feed conveyor platform, docking conveyor platform and discharging conveyor platform respectively include a conveyor belt motor, a conveyor belt structure and an intermediate plate. The conveyor belt structure is symmetrically arranged at both ends of the intermediate plate and is respectively fixed to both ends of the intermediate plate. The conveyor belt motor is installed on one side of one of the conveyor belt structures. The conveyor belt motor cooperates with the two conveyor belt structures in transmission. The intermediate plate is arranged corresponding to the supporting device, and the supporting device is arranged and installed at the lower part of the intermediate plate.

7. The multi-chamber vacuum reflow oven according to claim 6, characterized in that: The feed conveyor platform is equipped with two photoelectric sensors along the material conveying direction, the docking conveyor platform is equipped with four photoelectric sensors along the material conveying direction, and the discharge conveyor platform is equipped with two photoelectric sensors along the material conveying direction.

8. The multi-chamber vacuum reflow oven according to claim 1 or 7, characterized in that: The furnace chamber comprises: A cavity is configured as a hollow structure, and one side of the cavity is configured to be open; A door panel located on one side of the cavity opening, wherein the size of the door panel matches the opening; A second guide assembly fixed to two sides of the cavity, the other end of the second guide assembly is fixedly connected to the door panel, the guide assembly includes a second guide shaft, one end of the second guide shaft is fixed to the door panel, and the other end of the second guide shaft extends to one side of the cavity and passes through two second linear bearings fixed on the cavity; and A driving module is installed at the bottom of the cavity, and the driving module is also coordinated with the door panel transmission, wherein the driving module can drive the door panel to cover the cavity opening or move away from the opening along the second guide assembly, and the driving module is arranged on one side of the cavity, and the driving module includes a second linear module and a second driving motor installed at one end of the second linear module, and the end of the second linear module away from the motor is fixed to the door panel, and the second linear module is fixed to the bottom of the cavity through a connecting plate.

9. The multi-chamber vacuum reflow oven according to claim 8, characterized in that: The second linear module is also equipped with a stroke sensor. There are two stroke sensors arranged along the length direction of the second linear module. The stroke sensor is used to detect the position of the second linear module. A door closing sensor is installed on one side of the cavity. The door closing sensor is used to detect the status of the door panel.

10. The multi-chamber vacuum reflow oven according to claim 9, characterized in that: Two hanging plates are fixed on one side of the door panel close to the cavity, and the two hanging plates are arranged parallel to each other. The space between the two hanging plates is used to place a chip fixture. An upper cover is hingedly arranged on the upper part of the cavity, and a plurality of threaded holes are provided in the circumference of the upper cover. A threaded hole corresponding to the threaded hole of the upper cover is provided on the side of the cavity facing the upper cover.

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