Grinding head driving collator

Abstract

The invention relates to a grinding head driving collator which comprises an elastic piece, a fixing shaft, a shaft seat, a grinding base disc and a base, one end of the fixing shaft is suitable for being connected with an output shaft of a grinding machine, the other end of the fixing shaft is connected with the center point position of the elastic piece, the elastic piece is made of plastic and clamped between the shaft seat and the grinding base disc, and the two sides of the elastic piece make contact with the shaft seat and the grinding base disc correspondingly. The shaft seat is detachably connected with the grinding base disc, the base is arranged outside the shaft seat and the grinding base disc in a covering mode, after the elastic pieces are made of plastic materials instead of metal materials, the elastic pieces are better in elasticity and larger in deformation quantity, and the stress uniformity of the fracture surface of the grinding head driving collator under the pressed condition can be improved; and the contact area of the grinding base disc and the grinding pad is increased, the efficiency of removing impurities on the grinding pad is improved, stress is more uniform, and the grinding head is prevented from driving the finisher to damage the grinding pad.

Description

Technical Field

[0001] The present application relates to the field of grinding technology, and in particular to a grinding head drive finisher. Background Art

[0002] CMP grinding and polishing machine refers to the grinding and polishing machine whose realization process is in the form of CMP, and CMP is a processing technology of chemical polishing + physical grinding. The principle of CMP polishing process is to use the chemical composition material to slightly corrode the workpiece to a certain extent, and then use the principle of physical relative friction to remove thickness to quickly reduce the product, thereby achieving the purpose of grinding and polishing.

[0003] During the CMP polishing process, the polishing pad needs to be regularly refurbished to remove debris on the surface of the polishing pad. The polishing head drives the finisher to remove impurities on the polishing pad by vibration. The existing polishing head drives the finisher with a metal spring structure. Due to the high rigidity of the metal spring, the end face of the polishing head drives the finisher to be unevenly stressed, which can easily damage the polishing pad. Summary of the invention

[0004] In view of this, the present application proposes a grinding head drive finisher, which improves the contact surface of the grinding head drive finisher and makes the force more uniform.

[0005] According to one aspect of the present application, there is provided a grinding head drive finisher, comprising: a spring piece, a fixed shaft, a shaft seat, a grinding base plate and a base;

[0006] One end of the fixed shaft is suitable for connecting to the output shaft of the grinder, and the other end is connected to the center point of the spring piece;

[0007] The spring sheet is made of plastic material and is sandwiched between the shaft seat and the grinding base, with two sides contacting the shaft seat and the grinding base respectively;

[0008] The shaft seat is detachably connected to the grinding base plate;

[0009] The base cover is arranged outside the shaft seat and the grinding base disc.

[0010] In a possible implementation, the side of the grinding base plate in contact with the spring sheet is the transfer side, and the side opposite to the transfer side is the grinding side;

[0011] A buffer groove is recessed at the center of the transmission side, and a vibration portion extends from the center of the buffer groove toward the spring sheet; and

[0012] The extension length of the vibration part is smaller than the recessed depth of the buffer groove;

[0013] The grinding side is flat.

[0014] In a possible implementation, the cross section of the vibration part is circular.

[0015] In one possible implementation, the cross-section of the buffer groove is circular.

[0016] In a possible implementation, the spring piece is made of polytetrafluoroethylene.

[0017] In a possible implementation, the spring piece is a plate-like structure with a circular cross section;

[0018] The spring piece has a symmetrical cross-section structure.

[0019] In a possible implementation, a first fixing hole is provided at an edge of the shaft seat;

[0020] A second fixing hole is provided at the edge of the spring sheet;

[0021] A third fixing hole is provided at the edge of the grinding base; and

[0022] The first fixing hole, the second fixing hole and the third fixing hole correspond to each other, and the shaft seat, the spring sheet and the grinding base are bolted together.

[0023] In a possible implementation, the end of the fixed shaft connected to the spring sheet is the fixed end; the cross section of the fixed end is a boss with a "convex" structure; the larger end of the fixed end is in contact with the spring sheet, and the fixed end is provided with a fourth fixing hole along the length direction of the fixed shaft, which is connected to the spring sheet bolt;

[0024] A fixing groove is recessed at the center of the shaft seat, and a first mounting hole is provided at the center of the fixing groove; and

[0025] The depth of the depression of the fixing groove is equal to the height of the larger end of the cross section of the fixing belt;

[0026] The aperture of the first mounting hole matches the cross-sectional diameter of the smaller end of the fixing end cross-sectional area.

[0027] In a possible implementation, it also includes a shaft seat washer and a grinding washer, and both the shaft seat washer and the grinding washer are made of rubber; and

[0028] A first washer groove is formed on the inner top side of the base, the shaft seat washer matches the second washer groove, the shaft seat washer is embedded in the first washer groove, and the opening depth of the first washer groove is smaller than the cross-sectional diameter of the shaft seat washer; the first washer groove is located above the shaft seat and contacts the shaft seat;

[0029] A second gasket groove is axially opened on the inner side wall of the base, the second gasket groove matches the grinding gasket, the grinding gasket is embedded in the second gasket groove, and the opening depth of the second gasket groove is smaller than the cross-sectional diameter of the grinding gasket; the second gasket groove and the circumferential side wall of the grinding base are located in the same horizontal plane.

[0030] In a possible implementation, a mounting groove is provided at the center of the side of the spring sheet in contact with the fixed shaft;

[0031] A mounting portion is provided at the center of the side where the fixed shaft contacts the spring sheet and extends along the axial direction of the fixed shaft; and

[0032] The mounting portion matches the mounting groove.

[0033] The beneficial effects of the grinding head drive finisher of the embodiment of the present application are as follows: the metal spring pieces with stronger rigidity are replaced with plastic spring pieces with stronger elasticity, and in cooperation with the shaft seat and the grinding base, the force uniformity of the entire grinding head drive finisher is improved, the cleaning effect is better, and damage to the grinding pad can be avoided. Specifically, when the material of the spring piece is plastic, it has better elasticity and larger deformation, which can improve the force uniformity of the cross section of the grinding head drive finisher under pressure, and increase the contact area between the grinding base and the grinding pad, improve the efficiency of removing impurities on the grinding pad, and the force is more uniform, avoiding the grinding head drive finisher from damaging the grinding pad.

[0034] Other features and aspects of the present application will become apparent from the following detailed description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the present application and, together with the description, serve to explain the principles of the present application.

[0036] Figure 1 An exploded schematic diagram showing the main structure of the grinding head drive finisher according to an embodiment of the present application;

[0037] Figure 2 A side cross-sectional schematic diagram showing the main structure of the grinding head drive finisher according to an embodiment of the present application;

[0038] Figure 3 A schematic top view of the main structure of the grinding head drive finisher according to an embodiment of the present application is shown;

[0039] Figure 4 A schematic diagram of the main structure of the grinding head drive finisher according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0040] Various exemplary embodiments, features and aspects of the present application will be described in detail below with reference to the accompanying drawings. The same reference numerals in the accompanying drawings represent elements with the same or similar functions. Although various aspects of the embodiments are shown in the accompanying drawings, the drawings are not necessarily drawn to scale unless otherwise specified.

[0041] Among them, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention or simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0042] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0043] The word “exemplary” is used exclusively herein to mean “serving as an example, example, or illustration.” Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments.

[0044] In addition, in order to better illustrate the present application, numerous specific details are given in the following specific embodiments. It should be understood by those skilled in the art that the present application can also be implemented without certain specific details. In some examples, methods, means, components and circuits well known to those skilled in the art are not described in detail in order to highlight the subject matter of the present application.

[0045] Figure 1 An exploded schematic diagram showing the main structure of the grinding head drive finisher according to an embodiment of the present application is shown. Figure 2 A side cross-sectional schematic diagram showing the main structure of the grinding head drive finisher according to an embodiment of the present application is shown. Figure 3 A schematic top view of the main structure of the grinding head drive finisher according to an embodiment of the present application is shown. Figure 4 The main structure diagram of the grinding head drive finisher of the embodiment of the present application is shown. Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the grinding head drive organizer of the embodiment of the present application includes: a spring piece 4, a fixed shaft 7, a shaft seat 5, a grinding base plate 6 and a base 1. One end of the fixed shaft 7 is used to connect to the output shaft of the grinder, and the other end is connected to the center point of the spring piece 4. The spring piece 4 is made of plastic material and is sandwiched between the shaft seat 5 and the grinding base plate 6. The two sides are in contact with the shaft seat 5 and the grinding base plate 6 respectively. The shaft seat 5 and the grinding base plate 6 are detachably connected. The base 1 is covered on the outside of the shaft seat 5 and the grinding base plate 6.

[0046] In this specific embodiment, a masonry organizer can be used to remove impurities on the grinding pad. Specifically, the grinding head drive organizer is composed of a spring piece 4, a fixed shaft 7, a shaft seat 5, a grinding base 6 and a base 1. The fixed shaft 7 is used to transmit the power of the grinder, and the grinding base 6 is used to remove impurities on the grinding pad. The spring piece 4 is made of plastic and is used to vibrate the grinding base 6 on the required grinding pad. The shaft seat 5 and the grinding base 6 cooperate to fix the spring piece 4, and the base 1 is used to protect the fixed shaft 7, the shaft seat 5 and the grinding base 6. In this way, when the material of the spring piece 4 is plastic, the elasticity is better and the deformation is larger, which can improve the force uniformity of the cross section of the grinding head drive organizer under pressure, and increase the contact area between the grinding base 6 and the grinding pad, thereby improving the efficiency of removing impurities on the grinding pad and avoiding damage to the grinding pad.

[0047] In a specific embodiment, the power of the grinder is transmitted to the grinding base 6 through the fixed shaft 7 and the spring 4, so that the grinding substrate vibrates for grinding. Specifically, the side of the grinding base 6 that contacts the spring 4 is the transmission side, and the side opposite to the transmission side is the grinding side. The spring 4 transmits the vibration to the grinding base 6, and the grinding side of the grinding base 6 transmits the vibration to the surface of the grinding pad, thereby removing impurities on the surface of the grinding pad.

[0048] Furthermore, in this specific embodiment, a buffer groove is recessed at the center of the transmission side of the grinding base 6, and the cross section of the buffer groove is circular. In this way, the circular top opening of the buffer groove abuts against the spring 4, and the spring 4 can evenly transmit the power of the grinder, thereby improving the uniformity of the force of the whole finisher.

[0049] The spring piece 4 can completely cover the top of the buffer groove and is always in contact with the transfer side of the grinding base plate 6 .

[0050] In a specific embodiment, a vibration part is extended in the center of the buffer groove in a direction away from the grinding base 6. The vibration part receives the power transmission of the spring 4, thereby vibrating the grinding base 6 and removing impurities on the grinding pad.

[0051] Furthermore, in this specific embodiment, the extension height of the vibration part is less than the recessed depth of the buffer groove. Therefore, when the grinding head driving finisher is not in the grinding state, the vibration part does not contact the spring 4. When the dummy film head is in the grinding state, the spring 4 receives the power transmitted by the fixed shaft 7 of the grinder, causing a slight deformation in the middle of the plastic spring 4, and point-contact transmission with the vibration part of the grinding base 6, thereby improving the force effect of the grinding base 6. Specifically, the extension height of the vibration part is 4 / 5 of the recessed depth of the buffer groove.

[0052] The vibration part is a regular symmetrical structure, which can evenly receive the force transmitted by the slightly deformed spring piece 4.

[0053] Furthermore, in this specific embodiment, the horizontal cross-section of the vibration part is circular, and the extension height of the vibration part gradually increases from the edge position to the center position of the vibration part. The spring piece 4 is made of plastic material and can produce a certain amount of deformation. The center position of the deformation touches the vibration part. Since the height center position of the vibration part gradually decreases toward the edge position, the deformed spring piece 4 will first contact the center position of the vibration part, and then gradually contact the edge position of the vibration part. In this way, the vibration part can evenly receive the power of the deformed spring piece 4 and evenly transmit it from the center position of the spring piece 4 to the edge position.

[0054] The surface of the vibration part is smooth and has a curvature. Specifically, the center position and the edge position of the vibration part are smoothly connected, and the top has an arc, so that the force transmission is more stable and uniform.

[0055] In a specific embodiment, the spring piece 4 is a plate-like structure with a circular cross-section. Compared with a structure with corners, the position from the edge of the circle to the center point is equal, so the force transmitted from the center position of the spring piece 4 to the edge position is equal, making the force transmission more uniform.

[0056] In a specific embodiment, the material of the spring piece 4 is polytetrafluoroethylene, which has good heat resistance and cold resistance and can be used for a long time at -180 to 260°C, so that the spring piece 4 made of polytetrafluoroethylene will not be damaged by high-speed vibration during the grinding process. In addition, polytetrafluoroethylene has the characteristics of high temperature resistance and its friction coefficient is extremely low and can be used as a lubricant. When the spring piece 4 touches the vibration part of the grinding base 6, the friction resistance between the smooth vibration part and the spring piece 4 is small, and the force transmitted from the spring piece 4 to the grinding base 6 will not be consumed.

[0057] In a specific embodiment, one end of the fixed shaft 7 is connected to the output end of the grinder, and the other end is a fixed end, which is detachably connected to the spring piece 4 and is used to fix the vibrating spring piece 4.

[0058] Furthermore, in this specific embodiment, the cross section of the fixed end of the fixed shaft 7 is a boss of a "convex" structure, which cooperates with the recessed fixing groove of the shaft seat 5 to improve the stability of the connection position between the spring piece 4 and the fixed shaft 7. Specifically, the shaft seat 5 has a recessed fixing groove at the center, and a first mounting hole is opened at the center of the fixing groove. The shaft seat 5 passes through the first mounting hole, and the cross section of the fixed end of the shaft seat 5 is larger than the first mounting hole, so that the fixed end of the shaft seat 5 is stuck in the recessed fixing groove of the shaft seat 5.

[0059] The recessed depth of the fixing groove matches the length of the fixing end of the fixing shaft 7 stuck in the fixing groove.

[0060] Furthermore, in this specific embodiment, the fixed end section of the fixed shaft 7 is a "convex" structure, with a larger cross-sectional diameter at one end and a smaller cross-sectional diameter at the other end. The larger cross-sectional diameter end of the fixed end cooperates with the fixed groove for mounting the fixed shaft 7, and the smaller cross-sectional diameter end is thickened to prevent wear of the fixed shaft 7 and the shaft seat 5 from being adjacent to each other.

[0061] The depth of the fixing groove is equal to the height of the larger end of the fixing belt cross section. The diameter of the first mounting hole matches the cross-sectional diameter of the smaller end of the fixing end cross section.

[0062] Further, in this specific embodiment, the spring piece 4 is connected to the grinder through the fixed shaft 7, and a mounting portion is extended at one end of the fixed shaft 7 connected to the spring piece 4, and the extending direction of the mounting portion is the same as the axial direction of the fixed shaft 7. A mounting groove is recessed at one side of the spring piece 4 connected to the fixed shaft 7, and the mounting groove is adapted to the mounting portion and is used to fix the spring piece 4 and the fixed shaft 7. Specifically, the mounting portion is a columnar structure, and the cross-sectional diameter of the mounting portion is smaller than the cross-sectional diameter of the fixed shaft 7. The cross-sectional shape of the mounting groove is circular, and it cooperates with the mounting portion of the columnar structure, so that the fixed shaft 7 is inserted into the mounting groove, and the spring piece 4 and the fixed shaft 7 are fixed by bolts.

[0063] Further, in this specific embodiment, a first mounting hole is provided at the center of the fixing groove for passing the fixed shaft 7 connecting the spring piece 4 and the grinder. Specifically, a plurality of fifth fixing holes are provided along the circumference of the first mounting hole. A plurality of fifth fixing holes are provided at equal intervals along the circumferential direction of the first mounting hole, and the cross section of the fifth fixing hole is fan-shaped, and the smaller end of the opening is connected to the first mounting hole. In addition, the smaller end diameter of the opening of the fifth fixing hole is smaller than the diameter of the smaller end of the fixed end cross section. In this way, the eight fifth fixing holes provided along the circumference of the first mounting hole are arranged at equal intervals, and the space of the first mounting hole matches the smaller end of the fixed end cross section, and the eight fifth fixing holes surrounding the fixed end of the fixed shaft 7, through the opening connected to the first mounting hole, limit the shaking of the fixed shaft 7 when the grinding head drives the finisher to grind, so that the force of the grinder can be transmitted to the spring piece 4 through the fixed shaft 7 as much as possible.

[0064] The cross section of the fifth fixing hole is fan-shaped, and the side with a smaller opening of the fifth fixing hole is the fixing side, and the fixing side of the fifth fixing hole is connected to the first mounting hole. The fixing side of the fifth fixing hole cooperates with the first mounting hole to tighten the fixing shaft 7 and prevent the fixing shaft 7 from shaking violently during the grinding process.

[0065] Furthermore, in this specific embodiment, a transmission hole is provided at one end of the fixed shaft 7 away from the spring sheet 4, and the transmission hole matches the transmission shaft of the grinder, and is used to install the grinding head drive finisher on the grinder.

[0066] In a specific embodiment, a first gasket groove is provided at the inner top of the base 1 around the circumference of the base 1, and a matching shaft seat 5 gasket is installed inside the first gasket groove for buffering the base 1 and the shaft seat 5. Inside the grinding head drive finisher, the side of the shaft seat 5 away from the spring 4 abuts against the inner top side of the base 1, and the shaft seat 5 gasket is embedded inside the first gasket groove, and the cross-sectional diameter of the shaft seat 5 gasket is greater than the opening depth of the first gasket groove. The side of the shaft seat 5 away from the spring 4 will contact the shaft seat 5 gasket, but will not directly contact the base 1, thereby reducing the buffer between the shaft seat 5 and the base 1. In this way, if the shaft seat 5 and the base 1, both made of steel, vibrate and rub for a long time during the grinding process, the stability of the connection between the base 1 and the shaft seat 5 will be reduced, and the uniformity of the spring 4 during vibration will be affected.

[0067] In a specific embodiment, a second gasket groove is provided on the inner side wall of the base 1 around the circumference of the base 1, and a matching gasket is installed inside the second gasket groove to buffer the base 1 and the grinding base 6. Specifically, the second gasket groove is provided at a position on the base 1 such that when the grinding base 6 and the base 1 are installed, the second gasket groove surrounds the outer side of the circumferential side wall of the grinding base 6. In this way, a matching grinding gasket is embedded inside the second gasket groove, and the cross-sectional diameter of the grinding gasket is greater than the opening depth of the second gasket groove, so that the grinding gasket beyond the second gasket groove contacts the circumferential side wall of the grinding base 6, buffering the circumferential side wall of the grinding base 6 and the inner side wall of the base 1. Moreover, after the grinding head driving finisher is installed and fixed, the circumferential side wall of the grinding base 6 contacts the grinding base 6 embedded on the base 1, avoiding direct contact between the grinding base 6 and the base 1. At this time, the grinding base 6 only contacts with the spring piece 4, receiving the force transmitted by the spring piece 4 and will not be affected by the base 1, so that the grinding base 6 is subjected to more uniform force and the effect of uniform vibration is better.

[0068] Among them, the shaft seat 5 gasket and the grinding gasket are both rubber rings, which play the role of shock absorption and reduce the influence of the base 1 on the grinding base plate 6 and the shaft seat 5.

[0069] In a specific embodiment, the base 1 is a cover structure with a circular cross section, which is arranged outside the spring piece 4, the shaft seat 5 and the grinding base 6 to protect the spring piece 4, the shaft seat 5 and the grinding base 6. Specifically, the top side of the cover is open to avoid the fixed shaft 7, and the bottom side of the cover is open for installing the spring piece 4, the shaft seat 5 and the grinding base 6.

[0070] Furthermore, in this specific embodiment, the base 1 also has the functions of tightening and damping. Specifically, the spring piece 4, the shaft seat 5 and the grinding base plate 6 are damped and tightened in the vertical and circumferential directions through the embedded shaft seat 5 gasket and grinding gasket.

[0071] In a specific embodiment, a pressure relief groove is provided at the edge of the spring sheet 4, one side of the pressure relief groove is connected to the contact surface between the spring sheet 4 and the shaft seat 5, and the other side of the pressure relief groove is connected to the circumferential side wall of the spring sheet 4. Specifically, when the grinder uses the grinding head to drive the finisher for grinding, if the spring sheet 4 fits too closely with the shaft seat 5 and the base 1, the pressure between the spring sheet 4 and the shaft seat 5 and the base 1 will increase, destroying the connection between the spring sheet 4 and the shaft seat 5 and the base 1. In this way, a pressure relief groove for pressure relief is provided at the circumferential edge of the spring sheet 4, and the number of the pressure relief grooves is 3, which are evenly spaced along the circumference of the spring sheet 4, so as to further relieve the pressure in the contact space between the spring sheet 4 and the shaft seat 5 and the base 1.

[0072] Installation of grinding head drive finisher:

[0073] 1. Three sixth mounting holes are provided at the center of the spring piece 4 around the circumference of the mounting groove, and a seventh mounting hole matching the sixth mounting hole is provided on the side with a larger cross-sectional area of ​​the fixed end of the fixed shaft 7. The number and position of the seventh mounting holes correspond to the number and position of the sixth mounting holes on the spring piece 4. Three bolts can be used to fix the fixed end of the fixed shaft 7 to the spring piece 4.

[0074] 2. The shaft seat 5, the spring piece 4 and the grinding base 6 are all disc structures, and fixing holes are provided at the edge positions of the plate surfaces of the shaft seat 5, the spring piece 4 and the grinding base 6 for fixing the shaft seat 5, the spring piece 4 and the grinding base 6. A first fixing hole is provided at the edge position of the shaft seat 5, and the number of the first fixing holes is 6, which are evenly spaced along the circumferential direction of the shaft seat 5; a second fixing hole is provided at the edge position of the spring piece 4, and the number of the second fixing holes is 6, which are evenly spaced along the circumferential direction of the spring piece 4; a third fixing hole is provided at the edge position of the grinding base 6, and the number of the third fixing holes is 6, which are evenly spaced along the circumferential direction of the grinding base 6. In addition, the opening positions of the first fixing hole, the second fixing hole and the third fixing hole correspond to each other. When installing the shaft seat 5, the spring piece 4 and the grinding base 6, 6 bolts can be used to pass through the first fixing hole, the second fixing hole and the third fixing hole in sequence to fasten the shaft seat 5, the spring piece 4 and the grinding base 6.

[0075] The spring piece 4 is made of plastic, specifically polytetrafluoroethylene, while the grinding base 6 and the shaft seat 5 are made of hard materials with good deformation performance. The polytetrafluoroethylene spring piece 4 can produce a small deformation and transmit the generated vibration to the grinding base 6 for grinding, so that the grinding base 6 and the spring piece 4 can fit more closely, improve the grinding effect of the grinding head driving the finisher and the contact between the grinding base 6 and the object to be ground. If a rigid spring piece 4 is used, the service life of the spring piece 4, the grinding base 6 and the shaft seat 5 will be reduced during long-term use.

[0076] 3. The washer of the shaft seat 5 is embedded in the first washer groove of the base 1, and the grinding washer is embedded in the second washer groove of the base 1. The part of the washer of the shaft seat 5 that exceeds the first washer groove contacts the shaft seat 5 to avoid resonance caused by the contact between the shaft seat 5 and the base 1, and the part of the grinding washer that exceeds the second washer groove contacts the grinding base 6 to avoid resonance caused by direct contact between the grinding base 6 and the base 1.

[0077] 4. Set the base 1 outside the spring piece 4, the shaft seat 5 and the grinding base 6 to protect the spring piece 4, the shaft seat 5 and the grinding base 6. A relative eighth mounting hole is opened on the base 1, the spring piece 4, the shaft seat 5 and the grinding base 6, and bolts are used to install and fix them.

[0078] The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A grinding head drive finisher, suitable for connecting to the output shaft of a grinding machine, characterized in that: include: Shrapnel, fixed shaft, shaft seat, grinding base plate and base; One end of the fixed shaft is suitable for connecting to the output shaft of the grinder, and the other end is connected to the center point of the spring piece; The spring sheet is made of plastic material and is sandwiched between the shaft seat and the grinding base, with two sides contacting the shaft seat and the grinding base respectively; The shaft seat is detachably connected to the grinding base plate; The base cover is arranged outside the shaft seat and the grinding base disc.

2. The grinding head drive finisher according to claim 1, characterized in that: The side of the grinding base plate in contact with the spring sheet is the transfer side, and the side opposite to the transfer side is the grinding side; A buffer groove is recessed at the center of the transmission side, and a vibration portion extends from the center of the buffer groove toward the spring sheet; and The extension length of the vibration part is smaller than the recessed depth of the buffer groove; The grinding side is flat.

3. The grinding head drive finisher according to claim 2, characterized in that: The cross section of the vibration part is circular.

4. The grinding head drive finisher according to claim 2, characterized in that: The cross section of the buffer groove is circular, and the top of the buffer groove fits the spring sheet.

5. The grinding head drive finisher according to claim 1, characterized in that: The material of the shrapnel is polytetrafluoroethylene.

6. The grinding head drive finisher according to claim 5, characterized in that: The spring sheet has a symmetrical cross-section structure; and A pressure relief groove is provided at the edge of the spring sheet, the pressure relief groove communicates with the side wall and the top of the spring sheet, and there are more than two pressure relief grooves which are arranged at equal intervals along the circumferential direction of the spring sheet.

7. The grinding head drive finisher according to any one of claims 1 to 6, characterized in that: A first fixing hole is provided at the edge of the shaft seat; A second fixing hole is provided at the edge of the spring sheet; A third fixing hole is provided at the edge of the grinding base; and The first fixing hole, the second fixing hole and the third fixing hole correspond to each other, and the shaft seat, the spring sheet and the grinding base are bolted together.

8. The grinding head drive finisher according to claim 2, characterized in that: The end of the fixed shaft connected to the spring sheet is the fixed end; the cross section of the fixed end is a boss with a "convex" structure; the larger end of the fixed end is in contact with the spring sheet, and the fixed end is provided with a fourth fixing hole along the length direction of the fixed shaft, which is connected to the spring sheet bolt; A fixing groove is recessed at the center of the shaft seat, and a first mounting hole is provided at the center of the fixing groove; and The depth of the depression of the fixing groove is equal to the height of the larger end of the cross section of the fixing belt; The aperture of the first mounting hole matches the cross-sectional diameter of the smaller end of the fixing end cross-sectional area.

9. The grinding head drive finisher according to claim 8, characterized in that: Also includes axle seat Washers and Grinding Washer, the shaft seat washer and the grinding washer are both made of rubber; and A first washer groove is formed on the inner top side of the base, the shaft seat washer matches the second washer groove, the shaft seat washer is embedded in the first washer groove, and the opening depth of the first washer groove is smaller than the cross-sectional diameter of the shaft seat washer; the first washer groove is located above the shaft seat and contacts the shaft seat; A second gasket groove is axially opened on the inner side wall of the base, the second gasket groove matches the grinding gasket, the grinding gasket is embedded in the second gasket groove, and the opening depth of the second gasket groove is smaller than the cross-sectional diameter of the grinding gasket; the second gasket groove and the circumferential side wall of the grinding base are located in the same horizontal plane.

10. The grinding head drive finisher according to claim 8, characterized in that: A mounting groove is provided at the center of the side where the spring sheet contacts the fixed shaft; A mounting portion is provided at the center of the side where the fixed shaft contacts the spring sheet and extends along the axial direction of the fixed shaft; and The mounting portion matches the mounting groove.

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