Stackable mask

Abstract

The present disclosure relates to a stackable mask comprising: a mask body having a rectangular shape; and a stack guide disposed at a central portion of each of four side edges of the mask body. A method of loading a plurality of stackable masks for depositing organic light emitting diodes (OLEDs) includes loading an upper stackable mask onto a stacking guide of a lower stackable mask, wherein each of the stackable masks includes: a mask body having a rectangular shape; and a stack guide disposed at a central portion of each of four side edges of the mask body.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0100894 filed in the Korean Intellectual Property Office (KIPO) on August 2, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to masks, and more particularly, to stackable masks that can be loaded without a separate mask cassette. Background Art

[0004] Generally, when masks are supplied to an apparatus for depositing an organic light emitting diode (OLED), a group of masks are loaded onto a mask box, and specifically, about five masks are loaded onto the mask box.

[0005] Korean Patent No. 10-1802863 discloses a mask box.

[0006] The mask box disclosed in Korean Patent No. 10-1802863 includes: a slot into which a mask is loaded; an upper frame covering an upper side of the slot; a lower frame disposed on a lower side of the slot; a side frame extending in a vertical direction, connected between the upper frame and the lower frame, and supporting the slot; and a pad coupled to an upper surface of the slot to contact the mask and made of a material having greater strength than the slot.

[0007] In addition, Korean Patent Application Publication No. 10-2017-0132068 discloses a deposition mask.

[0008] The deposition mask disclosed in Korean Patent Application Publication No. 10-2017-0132068 is a type of deposition mask in which a mask body is supported by a frame body to achieve a large size while suppressing an increase in manufacturing cost and maintaining its flatness, thereby ensuring reproducibility and good accuracy of deposition.

[0009] However, in order to move such a mask to a deposition apparatus, a mask cassette is required. Therefore, separate components such as apparatuses for storing the mask cassette and the mask, respectively, are conventionally required.

[0010] Conventionally, since two types of articles such as a mask and a mask box are conveyed, it is necessary to separately set up equipment for conveying the mask and the mask box, resulting in disadvantages of high logistics investment cost and high logistics load.

[0011] As a prior art, Korean Patent No. 10-1641087 discloses a pallet for transporting a large-sized display panel for an electronic device. Korean Patent No. 10-1641087 relates to a pallet for transporting a large-sized display panel for an electronic device, which can stably support the upper surface and side surfaces of the large-sized panel for an electronic device, the pallet ensures stable mobility by pressing the upper surface of the panel when the transport pallet is stacked, and absorbs the impact generated between the transport pallets when stacked. The pallet includes: a lower frame, which is formed by arranging a plurality of first supporting frames and a plurality of second supporting frames on the upper side and the lower side respectively and integrally forming a plurality of reinforcing rods between the first supporting frames and the second supporting frames; an upper frame, which is formed by arranging a plurality of supporting rods on the upper surface of the lower frame and connecting horizontal rods and vertical rods to each other on the plurality of supporting rods; a shock-absorbing pad for absorbing and buffering impacts generated according to the load of panels stacked on the upper surface of the upper frame and the shaking during transportation; inter-pallet stacking protrusions and locking grooves, which are formed at the corresponding upper ends and the corresponding lower ends of the respective edges of the lower frame so that the pallets can be effectively interlocked with each other when the pallets are stacked in the vertical direction; side support units, which are arranged on the four outer sides of the lower frame to prevent the panels placed on the shock-absorbing pads and stacked in multiple layers from detaching in the lateral direction; and a horizontal support unit, which is arranged in a portion corresponding to the surface of the uppermost one of the panels placed on the front and rear sides of the upper surface of the lower frame and stacked in multiple layers on the upper surface of the lower frame, so as to fundamentally limit the shaking of the panels stacked in multiple layers.

[0012] Although Korean Patent No. 10-1641087 discloses a configuration in which stacking protrusions and locking grooves are formed on a plurality of trays to vertically stack the trays, there is a problem in that a jig is not allowed to enter between the trays.

[0013] As a related art, Korean Patent No. 10-2445717 discloses a mask, a mask loading module on which the mask is loaded, and a substrate processing system including the mask loading module.

[0014] Korean Patent No. 10-2445717 discloses a mask loading module including a mask frame, the mask frame having a plurality of grooves formed in a bottom surface thereof to load a mask for processing a substrate, the mask loading module including: a plurality of pins, respectively installed at positions corresponding to the plurality of grooves and inserted into the respective grooves to support the lower surface of the mask frame; and a pin mounting portion, the plurality of pins being installed in the pin mounting portion so that the mask frame is placed on and supported by the plurality of pins, wherein the plurality of pins include at least two alignment pins corresponding to at least two alignment grooves of the plurality of grooves and inserted into the at least two alignment grooves due to the weight of the mask, and each of the at least two alignment grooves has an inclined portion inside to align the horizontal position of the mask frame.

[0015] Although Korean Patent No. 10-2445717 discloses a configuration of a pin mounting portion formed in a mask loading module to load a mask, Korean Patent No. 10-2445717 does not disclose a configuration in which a placement guide for omitting a cassette is formed on the mask to improve the flow of logistics and reduce the weight of the equipment. Summary of the invention

[0016] The present disclosure provides stackable masks that can be stacked without a mask box.

[0017] Embodiments of the present disclosure provide a stackable mask, comprising:

[0018] a mask body having a rectangular shape; and

[0019] A stack guide is provided at a central portion of each of four side edges of the mask main body.

[0020] The stacking guide may have a loading surface disposed at a height higher than the mask main body to load another stackable mask on the stacking guide.

[0021] The stacking guide may have a guide surface that guides another stackable mask to be loaded onto the stacking guide.

[0022] The guide surface may have an inclination in a range of about 30 degrees to about 60 degrees with respect to the loading surface.

[0023] In the case where a stackable mask is stacked on another stackable mask, the stackable mask may be loaded on a stacking guide of the other stackable mask.

[0024] The transfer and loading entrance may be provided on the side of the stacking guide to allow the jig to enter between the stacked stackable masks, and the transfer and loading entrance may be an empty space.

[0025] In a case where a stackable mask is stacked on another stackable mask, a stacking guide of the stackable mask and a stacking guide of the other stackable mask may be vertically aligned to apply a load to the stacking guide of the other stackable mask.

[0026] A side surface of the stacking guide of another stackable mask may fix the stackable mask loaded on the stacking guide of another stackable mask.

[0027] A height difference may be formed between the loading surface and the lower end of the guide surface as much as the height of the side surface.

[0028] The guide surface may include a material capable of suppressing the generation of static electricity.

[0029] The inclined surface of the guide surface may have a length in the range of about 10 mm to about 20 mm.

[0030] The length, width, and height of the mask body may be approximately 1701 mm, approximately 1067 mm, and approximately 35 mm, respectively.

[0031] Another embodiment of the present disclosure provides a method of loading a plurality of stackable masks for depositing an organic light emitting diode (OLED), the method comprising loading an upper stackable mask on a stacking guide of a lower stackable mask,

[0032] Wherein each of the stackable masks comprises:

[0033] a mask body having a rectangular shape; and

[0034] A stack guide is provided at a central portion of each of four side edges of the mask main body.

[0035] The transfer and loading entrance may be provided on the side of the stacking guide to allow the jig to enter between the stacked stackable masks, and the transfer and loading entrance is an empty space.

[0036] In the case where a plurality of stackable masks are stacked, the stacking guides of the stacked stackable masks may be vertically aligned with an upper stacking guide or a lower stacking guide to apply a load to the stacking guide.

[0037] The stacking guide may have a loading surface disposed at a height higher than the mask main body to load another stackable mask on the stacking guide.

[0038] The stacking guide may have a guide surface that guides another stackable mask to be loaded onto the stacking guide.

[0039] The guide surface may have an inclination in a range of about 30 degrees to about 60 degrees with respect to the loading surface.

[0040] The side surface of the stack guide may fix the upper stackable mask loaded on the stack guide.

[0041] A height difference may be formed between the loading surface and the lower end of the guide surface as much as the height of the side surface.

[0042] According to an embodiment, the number of types of conveyed items can be reduced by improving a mask loading method, and through a single configuration of a storage device, investment costs can be reduced and a mask supply process performed by an apparatus for a deposition process can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 is a schematic diagram illustrating a stackable mask according to an embodiment.

[0044] Figure 2 is a schematic side view showing a stackable mask according to an embodiment.

[0045] Figure 3 is a schematic diagram illustrating a stacking guide of a stackable mask according to an embodiment.

[0046] Figure 4 is a schematic diagram showing a state of a stackable mask stack according to an embodiment.

[0047] Figure 5 is a schematic side view showing a state of a stackable mask stack according to an embodiment.

[0048] Figure 6 is a schematic side view showing a transfer and loading entrance in a state where a stackable mask is stacked according to an embodiment. DETAILED DESCRIPTION

[0049] Hereinafter, some embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement them. The present disclosure can be implemented in many different forms and is not limited to the embodiments described herein.

[0050] In order to clearly describe the present disclosure, parts that are irrelevant to the description or that overlap may be omitted, and the same or similar components will be denoted by the same reference numerals throughout the specification.

[0051] For ease of description, the size and thickness of each component shown in the drawings may be arbitrary, and the present disclosure is not necessarily limited to the contents shown. In the drawings, for the sake of clarity, the thickness of some layers and regions is exaggerated. In addition, in the drawings, for the sake of ease of explanation, the thickness of some layers and regions may be exaggerated.

[0052] When a part such as a layer, film, region, panel, or component is referred to as being "on" another part, it may be "directly on" the other part or there may be an intervening part therebetween. Conversely, when a part is referred to as being "directly on" another part, there are no intervening parts therebetween. Furthermore, when a part is referred to as being "on" a reference part, it is located above the reference part or below the reference part, and does not necessarily mean that it is located "on" the reference part in the opposite direction of gravity.

[0053] Throughout the specification, when a part is referred to as “including,” “comprising,” or “having” a certain component, this implies the existence of other components, but does not exclude the existence of other components unless explicitly specified to the contrary.

[0054] Throughout the specification, the phrase "in a plan view" means when a target portion is viewed from above, and the phrase "in a cross-sectional view" means when a cross section of a target portion cut vertically is viewed laterally.

[0055] When an element is referred to as being "connected to" or "coupled to" another element, it may be directly connected to or coupled to the other element or there may be intervening elements or layers. However, when an element is referred to as being "directly connected to" or "directly coupled to" another element, there are no intervening elements or layers. For this purpose, the term "connected" may refer to a physical connection, an electrical connection, and / or a fluid connection with or without intervening elements.

[0056] Throughout the specification, when a part such as a wiring, layer, film, region, board or component is referred to as "extending in a first direction or in a second direction", this not only means a straight line shape of the part extending straight in the first direction or the second direction, but also means a structure in which the part generally extends in the first direction or in the second direction, including a partially bent structure, a serrated structure or a curved structure.

[0057] An electronic device (e.g., a mobile phone, TV, monitor, or laptop) including a display device, a display panel, etc. as described in the specification and an electronic device including a display device, a display panel, etc. manufactured according to the manufacturing method described in the specification are not excluded from the scope of the specification.

[0058] In view of the measurements in question and the errors associated with the measurement of a particular quantity (i.e., the limitations of the measurement system), the terms "about" or "approximately" as used herein are inclusive of the stated value and mean within an acceptable range of deviation for the particular value as determined by one of ordinary skill in the art. For example, "about" can mean within one or more standard deviations, or within ±30%, ±20%, ±10%, ±5% of the stated value.

[0059] The term "and / or" includes all combinations of one or more that the associated configurations can define. For example, "A and / or B" can be understood to mean "A, B, or A and B".

[0060] For the purpose of the present disclosure, the phrase "at least one of A and B" may be interpreted as only A, only B, or A and B. In addition, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z.

[0061] Unless otherwise defined or implied herein, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art to which the present disclosure belongs. It will also be understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and the present disclosure, and should not be interpreted in an idealized or overly formal sense unless explicitly so defined herein.

[0062] In the following, reference will be made to Figures 1 to 3 Stackable masks according to embodiments are described.

[0063] Figure 1 is a schematic diagram illustrating a stackable mask according to an embodiment. Figure 2 is a schematic side view showing a stackable mask according to an embodiment. Figure 3 is a schematic diagram illustrating a stacking guide of a stackable mask according to an embodiment.

[0064] refer to Figures 1 to 3 , a stackable mask according to an embodiment may include a mask main body 110 and stacking guides 120a, 120b, 120c, and 120d.

[0065] The mask main body 110 may be formed in a rectangular shape, and may be cut in the inside in a rectangular shape to form a large hole.

[0066] The mask main body 110 may have a length within a range of about 1701 mm, a width within a range of about 1067 mm, and a height within a range of about 35 mm, which are similar to those in a mask according to the related art.

[0067] refer to Figure 1 or Figure 2 , the stacking guides 120a, 120b, 120c, and 120d may be formed at respective central portions of the four side edges of the mask body 110. If necessary, the stacking guides 120a, 120b, 120c, and 120d may be formed in regions different from the central portions of the four side edges of the mask body 110, or may be formed in central portions of the four side edges of the mask body 110 in terms of weight distribution.

[0068] The number of the stacking guides 120a, 120b, 120c, and 120d may be modified as needed. For example, if the length of the mask main body 110 increases, stacking guides may be added on the sides (eg, both sides) of the mask main body 110 or at other locations.

[0069] However, even if the number of the stacking guides 120a, 120b, 120c, and 120d or the sizes of the stacking guides 120a, 120b, 120c, and 120d are modified, it may be necessary for the jig of the transfer and loading device to be able to enter between the stackable masks in the stacked state. For example, it may be necessary to form the transfer and loading entrance 130 (see FIG. 1 ) as an empty space on the sides (e.g., both sides) of the stacking guides 120a, 120b, 120c, and 120d. Figure 6 ).

[0070] Therefore, the number of stacking guides 120a, 120b, 120c and 120d, the sizes of stacking guides 120a, 120b, 120c and 120d, or the positions of stacking guides 120a, 120b, 120c and 120d can be modified within the range that the clamps of the transfer and loading equipment can enter between the stackable masks.

[0071] refer to Figure 3 Each of the stacking guides 120a, 120b, 120c, and 120d may have a loading surface 121 formed to be higher than the mask body 110 by a height (e.g., a predetermined or selectable height) to load another stackable mask thereon. For example, a step (or height difference) in the range of about 30 mm to about 50 mm may be formed between the loading surface 121 and the mask body 110.

[0072] The transfer and loading entrance 130 as an empty space may be formed by such a step, and thus, the height difference may also be modified within a range in which the jig of the transfer and loading apparatus can enter between the stackable masks.

[0073] The height of the transfer and loading entrance 130 as an empty space may increase as the height difference increases, and the length of the transfer and loading entrance 130 may decrease as the length of each of the stack guides 120a, 120b, 120c, and 120d increases.

[0074] For example, the height difference may be equal to the height of the transfer and loading entrance 130 as an empty space, and the length of the mask main body 110 may be equivalent to the sum of the length of each of the stacking guides 120a, 120b, 120c, and 120d and twice the length of the transfer and loading entrance 130.

[0075] refer to Figure 3 , each of the stacking guides 120 a , 120 b , 120 c , and 120 d may have a guide surface 122 formed to guide another stackable mask to be loaded onto the loading surface 121 .

[0076] The side surface 123 of the loading surface 121 may be used to fix the upper stackable mask loaded on the loading surface 121 so that the upper stackable mask does not move. Therefore, the lower surface of the mask body 110 loaded on the loading surface 121 may contact the loading surface 121, and the four side surfaces of the mask body 110 may contact the side surfaces 123 of the stacking guides 120a, 120b, 120c, and 120d, respectively, thereby properly fixing the mask body 110.

[0077] refer to Figure 3 , a step (or a height difference) as high as the height of the side surface 123 may be formed between the loading surface 121 and the lower ends of the guide surface 122 .

[0078] The inclined surface of the guide surface 122 may have a length in the range of about 10 mm to about 20 mm. The length of the inclined surface of the guide surface 122 may be modified as needed (eg, according to an angle of inclination).

[0079] Each of the stacking guides 120a, 120b, 120c, and 120d may have a height in the range of about 60 mm to about 80 mm, a width in the range of about 80 mm to about 120 mm, and a length in the range of about 100 mm to about 160 mm. These values ​​may correspond to the mask body 110, and may be an example in the case where the length, width, and height of the mask body 110 are about 1701 mm, about 1067 mm, and about 35 mm, respectively. Therefore, if the length, width, and height of the mask body 110 are modified, the length of the inclined surface may be modified.

[0080] A height difference between the mask main body 110 and the loading surface 121 may be in the range of about 30 mm to about 50 mm or may be about 40 mm.

[0081] The height of the side surface 123 may be in the range of about 3 mm to about 7 mm or may be about 5 mm.

[0082] The width of the upper extension surface of the guide surface 122 may be in the range of about 3 mm to about 7 mm or may be about 5 mm.

[0083] The guide surface 122 may have an inclination in a range of about 30 degrees to about 60 degrees with respect to the loading surface 121 .

[0084] The values ​​of the height difference between the mask body 110 and the loading surface 121, the values ​​of the height of the side surface 123, and the values ​​of the width of the upper extension surface of the guide surface 122 may correspond to the mask body 110, and may be an example in which the length, width, and height of the mask body 110 are about 1701 mm, about 1067 mm, and about 35 mm, respectively. Therefore, if the length, width, and height of the mask body 110 are modified, the length of the inclined surface may be modified.

[0085] These numerical limits for the stacking guides 120a, 120b, 120c, and 120d are merely examples and may be modified as desired.

[0086] The length, width, and height of the mask main body 110 may be approximately 1701 mm, approximately 1067 mm, and approximately 35 mm, respectively, and these values ​​may also be modified.

[0087] The stack guides 120a, 120b, 120c, and 120d may be manufactured of a light but strong single material or composite material such as metal, resin, or plastic, and the material of the stack guides 120a, 120b, 120c, and 120d may be modified in various ways as needed.

[0088] In the case of loading another stackable mask from above the guide surface 122, the guide surface 122 can correctly guide the mask body 110 of the other stackable mask onto the loading surface 121. The guide surface 122 is a portion to be in contact with the mask body 110, and can be understood as a member that guides the mask body 110 by introducing a guide inclined surface of a certain angle (for example, in a range of about 30 degrees to about 60 degrees) in the portion to be in contact with the mask body 110, so that the mask body 110 is placed on the loading surface 121 after sliding along the guide inclined surface.

[0089] The guide surface 122 and the side surface 123 may be understood as members serving as a protection support bar that may prevent the mask main body 110 from being separated from the loading surface 121 .

[0090] If desired, the guide surface 122 may include, for example, A material capable of suppressing the generation of static electricity is used to suppress the adhesion or adsorption of impurities or foreign substances caused by static electricity when the mask main body 110 is in contact with the guide surface 122 .

[0091] In the case of stacking stackable masks, an upper stackable mask may be loaded on the stacking guides 120 a , 120 b , 120 c , and 120 d of a lower stackable mask.

[0092] A transfer and loading entrance 130 as an empty space may be formed on sides (eg, both sides) of the stack guides 120a, 120b, 120c, and 120d to allow a jig to enter between the stacked stackable masks.

[0093] In the following, reference will be made to Figures 4 to 6 A method of loading a stackable mask according to an embodiment is described.

[0094] Figure 4 is a schematic diagram showing a state of a stackable mask stack according to an embodiment. Figure 5 is a schematic side view showing a state of a stackable mask stack according to an embodiment. Figure 6 is a schematic side view showing a transfer and loading entrance in a state where a stackable mask is stacked according to an embodiment.

[0095] refer to Figure 4 and Figure 5 as well as Figure 3 In a method of loading a stackable mask for depositing an organic light emitting diode (OLED), first, a stackable mask may be loaded on another stackable mask.

[0096] Then, the mask body 110 of the upper stackable mask may be guided along the inclined guide surfaces 122 of the stacking guides 120a, 120b, 120c, and 120d of the lower stackable mask, and the mask body 110 of the upper stackable mask may be placed on the loading surface 121. In an embodiment, the guide surface 122 may be inclined from the outside to the inside, and the mask body 110 may be guided inwardly along the inclined guide surfaces 122 of the stacking guides 120a, 120b, 120c, and 120d of the lower stackable mask and placed on the loading surface 121. For example, even if some of the four corners of the mask body 110 of the upper stackable mask are initially placed on the inclined guide surface 122 in a slightly deviated state instead of in the correct position, the mask body 110 can be placed on the loading surface 121 after being guided along the inclined guide surfaces 122 of the stacking guides 120a, 120b, 120c and 120d of the lower stackable mask.

[0097] Here, the guide surface 122 may include A material capable of suppressing the generation of static electricity is used to suppress the adhesion or adsorption of impurities or foreign substances caused by static electricity when the mask main body 110 is in contact with the guide surface 122 .

[0098] In a state where the upper stackable mask is seated on the lower stackable mask, the side surfaces 123 of the stacking guides 120 a , 120 b , 120 c , and 120 d of the lower stackable mask may serve to prevent the mask body 110 from being detached from the loading surface 121 and to fix the mask body 110 .

[0099] Next, another stackable mask can be loaded onto the two stackable masks.

[0100] Then, the mask body 110 of another upper stackable mask may be guided along the guide surfaces 122 of the stacking guides 120a, 120b, 120c, and 120d of the lower stackable mask and placed on the loading surface 121. In this case, the guide surface 122 may include a The material capable of suppressing the generation of static electricity is used to suppress the adhesion or adsorption of impurities or foreign matter caused by static electricity when the mask body 110 contacts the guide surface 122. For example, the guide surface 122 may be inclined from the outside to the inside, and the mask body 110 may be guided inward along the inclined guide surface 122 of the stacking guides 120a, 120b, 120c, and 120d of the lower stackable mask, and the mask body 110 may be placed on the loading surface 121.

[0101] In a state where another upper stackable mask is placed on the lower stackable mask, the side surfaces 123 of the stacking guides 120a, 120b, 120c and 120d of the lower stackable mask may serve to prevent the mask body 110 from being detached from the loading surface 121 and to fix the mask body 110.

[0102] Then, other stackable masks may be loaded sequentially in the same manner, and in an embodiment, a total of five stackable masks may be loaded.

[0103] This structure is a structure in which when the stackable masks are arranged and piled in a stacked manner, there is no change in the loading form between the stackable masks. In particular, in the case where the stackable masks are stacked, the stacking guides 120a, 120b, 120c, and 120d of the stacked stackable masks can be vertically aligned with the upper or lower stacking guides 120a, 120b, 120c, and 120d to apply a load thereto.

[0104] In the case of stacking of stackable masks, the stacking guides 120a, 120b, 120c and 120d of the stacked stackable masks may not be vertically aligned with the upper or lower stacking guides 120a, 120b, 120c and 120d, but this may be disadvantageous in supporting the load.

[0105] The stacking guides 120a, 120b, 120c, and 120d of the stacked stackable masks may not be vertically aligned with the upper or lower stacking guides 120a, 120b, 120c, and 120d if there is no problem in supporting the weight of the mask main body 110. For example, in the case where the number of the stacking guides 120a, 120b, 120c, and 120d or the sizes of the stacking guides 120a, 120b, 120c, and 120d are increased, the stacking guides 120a, 120b, 120c, and 120d of the stacked stackable masks may not be vertically aligned with the upper or lower stacking guides 120a, 120b, 120c, and 120d. Therefore, in the case of stacking of stackable masks, it may be advantageous to vertically align the stacking guides 120a, 120b, 120c, and 120d of the stacked stackable masks with the upper or lower stacking guides 120a, 120b, 120c, and 120d to apply a load.

[0106] The guide surface 122 of each of the stacking guides 120a, 120b, 120c and 120d can have an inclination in the range of about 30 degrees to about 60 degrees relative to the loading surface 121, and when the mask body 110 of another stackable mask is loaded on the stacking guides 120a, 120b, 120c and 120d, another stackable mask can be guided to be loaded onto the loading surface 121.

[0107] This is a structure that can help the mask main body 110 of another upper stackable mask to be positioned through the guide surface 122 in the case of mask stacking, and is a structure that can further supplement the transfer and loading accuracy.

[0108] The angle and shape of the guide surface 122 may be modified as desired.

[0109] like Figure 6 As shown in FIG. 1 , a transfer and loading entrance 130 as an empty space may be formed on sides (eg, both sides) of the stack guides 120 a , 120 b , 120 c , and 120 d to allow a jig to enter between the stacked stackable masks.

[0110] Therefore, the structure of transferring and loading the stackable mask using the transfer and loading entrance 130 allows the fixture to enter between the side surfaces of the stacked stackable mask so that the transfer and loading device can transfer and load the mask. Here, the position of the transfer and loading structure using the transfer and loading entrance 130 (i.e., the gap between the side surfaces of the stacked stackable mask) can be modified. Here, the transfer and loading device and the fixture can be devices and apparatuses known in the prior art, and therefore, a detailed description thereof will be omitted.

[0111] The stacking structure can be modified into an assembly structure as needed.

[0112] For example, stacked type guides may be assembled to each other, and in this case, it may be necessary to form transfer and loading entrances to allow the jig to enter between the masks.

[0113] As an assembling method, a known assembling method may be applied, or an assembling method modified to be suitable for the mask may be applied.

[0114] The stacked structure can be modified into a modular structure as needed.

[0115] For example, stacked type guides may be combined with each other in a modular manner, and in this case, it may be necessary to form transfer and loading entrances so as to allow the jig to enter between the masks.

[0116] As the modular method, a known modular method may be applied, or a modular method modified to be suitable for a mask may be applied.

[0117] The mask main body and the stack guide may be combined with each other in an assembly type or modular manner as needed.

[0118] Therefore, a groove or a protrusion may be formed on the mask main body, and a protrusion or a groove may also be formed on the stack guide.

[0119] In the conventional loading method, two types of conveying items, namely, masks and mask boxes, are used, and respective logistics equipment is separately configured for the mask boxes and masks. Therefore, the maintenance cost is high. In contrast, according to the present disclosure, only one type of conveying item, namely, masks, needs to be maintained and managed. Therefore, maintenance and management are facilitated and costs can be reduced.

[0120] In the conventional loading method, after sequentially loading the masks from the upper end to the lower end of the mask box, the masks are moved to the equipment for the deposition process in a state where the masks are loaded on the mask box. In this case, the mask box weighs about 600 kg in a state where five masks are fully loaded on the mask box, and weighs about 210 kg in a state where the mask box is empty.

[0121] In contrast, according to the present disclosure, since a mask box is not required and each mask weighs about 90 kg, the total weight of the masks when five layers of masks are loaded can be about 450 kg, which is about 150 kg lighter than the total weight in the conventional technology.

[0122] In the conventional technology, a mask box is taken out from a mask box storage device, the mask box is placed in a fixed port using a transfer and loading device, and then the mask box is discharged by a mask box transport device. In contrast, according to the present disclosure, since a mask box is not required, steps related to a mask box storage device are not required. Therefore, the workflow is greatly shortened, and the time for transfer and loading work is shortened.

[0123] Conventionally, a mask storage device is required to place a mask box in a fixed port by a mask box transport device. In contrast, according to the present disclosure, since a mask box is not required, such a step is not necessary. Therefore, the working time and working cost associated with the mask storage device can be reduced.

[0124] Subsequent work performed by the apparatus for deposition process according to the present disclosure may be similar to subsequent work performed by conventional apparatus for deposition process.For example, the stackable mask may be placed in a transfer and loading apparatus and placed into the apparatus for deposition process.

[0125] As described above, according to the present disclosure, the number of types of conveyed items can be reduced by improving the loading method, and through a single configuration of a storage device, the investment cost can be reduced and the mask supply process performed by the device for a deposition process can be improved. In particular, according to the present disclosure, a mask box for loading masks can be omitted, and working time and cost can be reduced.

[0126] The above description is an example of the technical features of the present disclosure, and a person skilled in the art will be able to make various modifications and changes.Therefore, the embodiments of the present disclosure described above can be implemented individually or in combination with each other.

[0127] The embodiments disclosed in this disclosure are not intended to limit the technical spirit of the disclosure, but are intended to describe the technical spirit of the disclosure, and the scope of the technical spirit of the disclosure is not limited to these embodiments. The protection scope of the disclosure should be interpreted by the attached claims, and should be interpreted as all technical spirits within the equivalent scope are included in the scope of the disclosure.

Claims

1. A stackable mask comprising: a mask body having a rectangular shape; as well as A stack guide is provided at a central portion of each of four side edges of the mask main body.

2. The stackable mask according to claim 1, wherein: The stack guide has a loading surface disposed at a height higher than the mask main body to load another stackable mask on the stack guide.

3. The stackable mask according to claim 2, wherein: The stacking guide has a guide surface that guides the other stackable mask to be loaded onto the stacking guide.

4. The stackable mask according to claim 3, wherein: The guide surface has an inclination in a range of 30 to 60 degrees with respect to the loading surface.

5. The stackable mask according to claim 4, wherein: In a state where the stackable mask is stacked on the other stackable mask, the stackable mask is loaded on a stacking guide of the other stackable mask.

6. The stackable mask according to claim 5, wherein: A transfer and loading access is provided on the side of the stacking guide to allow a jig to enter between the stacked stackable masks, and The transfer and loading entrance is an empty space.

7. The stackable mask according to claim 6, wherein: With the stackable mask stacked on the other stackable mask, the stacking guide of the stackable mask is vertically aligned with the stacking guide of the other stackable mask to apply a load to the stacking guide of the other stackable mask.

8. The stackable mask according to claim 7, wherein: A side surface of the stack guide of the other stackable mask fixes the stackable mask loaded on the stack guide of the other stackable mask.

9. The stackable mask of claim 8, wherein: A height difference as high as that of the side surface is formed between the loading surface and a lower end of the guide surface.

10. The stackable mask of claim 9, wherein: The inclined surface of the guide surface has a length in the range of 10 mm to 20 mm, and the length, width, and height of the mask main body are 1701 mm, 1067 mm, and 35 mm, respectively.

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