Clamping device of coating machine

Abstract

The invention discloses a film plating machine clamping device which comprises a supporting mechanism, a clamping mechanism, a fixing mechanism and a driving mechanism, the supporting mechanism comprises a supporting plate, and a sliding groove is formed in the supporting plate; the clamping mechanism comprises a plurality of supporting rods arranged on the supporting plate and a pressing plate, the supporting rods are connected into the sliding grooves in a sliding mode, the pressing plate is connected to the supporting rods in a sliding mode, and the sliding direction of the supporting rods is perpendicular to the sliding direction of the pressing plate. The fixing mechanism is arranged on the supporting plate and is used for fixing the supporting rod; the driving mechanism is arranged on the supporting rod and used for driving the pressing plate to slide along the supporting rod, and therefore the pressing plate abuts against the glass. The glass clamping device has the beneficial effects that the glass clamping device can adapt to glass of different sizes and shapes through the adjustable supporting rods and the pressing plates, firm clamping can be achieved by adjusting the clamping device no matter small glass sheets or large glass sheets, and the universality of the clamping device is improved.

Description

Technical Field

[0001] The present application relates to the field of coating machines, and in particular to a coating machine clamping device. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types. The main idea is to divide it into two types: evaporation and sputtering. When the substrate is coated, multiple substrates are placed on the substrate fixture in the vacuum chamber, and the target material is placed on the target material fixture in the vacuum chamber. The ions on the target material are scattered and ejected, and adsorbed on the substrate to form a film.

[0003] In the related art, a coating tool for a rotary coating machine is proposed, including a frame, an opening for placing glass, a clamp for positioning the glass arranged on the opening, a hook fixed on the coating machine, and a perforated plate arranged on the frame. The perforated plate is provided with a mounting hole adapted to the hook, and the mounting hole is composed of two parts, including an inclined wedge hole located at the lower part and a semicircular hole located at the upper part. The clamp for positioning the glass includes a lower positioning clamp arranged at the lower part of the opening for positioning the glass, and an upper clamp arranged at the upper part of the opening for limiting the glass. Two perforated plates are arranged on the upper part of the frame, and two perforated plates are also arranged on the lower part of the frame. A perforated bottom plate is arranged on the back of the perforated plate.

[0004] Regarding the above-mentioned related technologies, there are the following defects: there are many specifications of glass and different sizes, the upper positioning fixture and the lower positioning fixture are fixed in position and cannot adapt to glass of different specifications, the scope of application is limited, and the production cost is increased. Summary of the invention

[0005] The purpose of this application is to overcome the above-mentioned technical deficiencies and to propose a coating machine clamping device to solve the technical problem in the prior art that the clamps cannot adapt to glasses of different specifications.

[0006] In order to achieve the above technical purpose, the technical solution of the present application provides a coating machine clamping device, including a supporting mechanism, the supporting mechanism includes a supporting plate, and the supporting plate is provided with a slide groove; A clamping mechanism, the clamping mechanism comprising a plurality of support rods and a pressure plate arranged on the support plate, the support rods being slidably connected in the slide grooves, the pressure plate being slidably connected to the support rods, and the sliding direction of the support rods is perpendicular to the sliding direction of the pressure plate; A fixing mechanism, the fixing mechanism is arranged on the support plate, and the fixing mechanism is used to fix the support rod; and The driving mechanism is arranged on the support rod and is used to drive the pressing plate to slide along the support rod so that the pressing plate is pressed against the glass.

[0007] In some embodiments, the fixing mechanism includes a bolt threadedly connected to the support rod, and the end of the bolt is tightly pressed against the support plate.

[0008] In some embodiments, an anti-skid protrusion is provided at the end of the bolt, and an anti-skid groove for accommodating the anti-skid protrusion is provided on the support plate.

[0009] In some embodiments, a support block is slidably connected in the slide groove along the height direction of the slide groove, a limit strip is provided at the top of the slide groove, a first spring is provided between the bottom of the support block and the bottom of the slide groove, one end of the first spring is connected to the bottom of the support block, and the other end of the first spring is connected to the bottom of the slide groove, the first spring is in a compressed state, and the first spring makes the top of the support block abut against the limit strip, so that the top of the support block is flush with the top of the support plate.

[0010] In some embodiments, both ends of the support block are provided with inclined surfaces, and when the support rod abuts against the inclined surfaces, the support block tends to slide toward the first spring.

[0011] In some embodiments, the driving mechanism includes a nut threadedly connected to the support rod, and the nut is used to abut against the pressure plate so that the pressure plate abuts against the glass.

[0012] In some embodiments, the pressure plate is slidably and rotatably connected to the support rod, and a second spring is sleeved on the support rod. The second spring is located between the nut and the pressure plate.

[0013] In some embodiments, a buffer layer is provided at the bottom of the pressing plate.

[0014] In some embodiments, the nut is provided with an anti-loosening gear, the support rod is provided with a slot, and an anti-loosening tooth block meshing with the anti-loosening gear is clamped in the slot.

[0015] In some embodiments, a handle is provided on the nut.

[0016] Compared with the prior art, the beneficial effects of the present application include: through adjustable support rods and pressure plates, it can adapt to glass of different sizes and shapes. Whether it is a small glass sheet or a large glass plate, it can be firmly clamped by adjusting the clamping device, thereby improving the versatility of the clamping device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the coating machine clamping device provided by the present application; Figure 2 This application provides Figure 1 The enlarged view of point A in the middle; Figure 3 It is a cross-sectional view of the overall structure of the coating machine clamping device provided by the present application; Figure 4 This application provides Figure 3 Enlarged view of point A in the middle.

[0018] Description of reference numerals: 1. Support mechanism; 11. Support plate; 2. Clamping mechanism; 21. Support rod; 22. Pressure plate; 23. Slide groove; 24. Buffer layer; 3. Fixing mechanism; 31. Bolt; 32. Anti-slip groove; 4. Driving mechanism; 41. Nut; 42. Second spring; 43. Anti-loosening gear; 44. Slot; 45. Anti-loosening tooth block; 46. Handle; 5. Support block; 51. Limiting strip; 52. First spring; 53. Inclined surface. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0020] The present application provides a coating machine clamping device, the structure of which is as follows: Figure 1 - Figure 4 As shown, it includes a support mechanism 1, the support mechanism 1 includes a support plate 11, and a slide groove 23 is provided on the support plate 11; The clamping mechanism 2 includes a plurality of support rods 21 and a pressing plate 22 provided on the support plate 11, wherein the support rods 21 are slidably connected to the slide grooves 23, and the pressing plate 22 is slidably connected to the support rods 21, and the sliding direction of the support rods 21 is perpendicular to the sliding direction of the pressing plate 22; A fixing mechanism 3, the fixing mechanism 3 is arranged on the support plate 11, and the fixing mechanism 3 is used to fix the support rod 21; and, The driving mechanism 4 is disposed on the support rod 21 and is used to drive the pressing plate 22 to slide along the support rod 21 so that the pressing plate 22 is pressed against the glass.

[0021] When in use, the support plate 11 serves as the basic support structure of the entire clamping device, providing a platform for installation and fixing of other components. Multiple support rods 21 can slide in the slide grooves 23 on the support plate 11, so that the positions of the support rods 21 can be adjusted according to the size and shape of the glass to adapt to glass of different specifications. When the support rods 21 are adjusted to a suitable position, the fixing mechanism 3 takes effect to fix the support rods 21 on the support plate 11 to prevent the support rods 21 from moving during the coating process. The pressing plate 22 can slide on the support rods 21. When it is necessary to clamp the glass, after adjusting the position of the support rods 21, the driving mechanism 4 is used to make the pressing plate 22 slide downward on the support rods 21 and gradually approach the glass. When the pressing plate 22 contacts the glass and continues to move downward, the pressing plate 22 will exert pressure on the glass, clamping the glass between the pressing plate 22 and the support plate 11.

[0022] In the present application, the adjustable support rod 21 and the pressure plate 22 can adapt to glasses of different sizes and shapes. Whether it is a small glass sheet or a large glass plate, a firm clamping can be achieved by adjusting the clamping device, which improves the versatility of the clamping device. The driving mechanism 4 can provide sufficient pressure to make the pressure plate 22 tightly pressed against the glass, ensuring that the glass will not loosen or shift during the coating process. At the same time, the fixing mechanism 3 firmly fixes the support rod 21 on the support plate 11, further enhancing the stability of the clamping. The sliding adjustment of the support rod 21 in the slide groove 23 and the driving operation of the pressure plate 22 are relatively simple, and the clamping and disassembly of the glass can be completed quickly. This improves production efficiency and reduces the labor intensity of operators.

[0023] In order to fix the support plate 11, please refer to Figure 2 In a preferred embodiment, the fixing mechanism 3 includes a bolt 31 threadedly connected to the support rod 21 , and an end of the bolt 31 is tightly pressed against the support plate 11 .

[0024] When in use, when the fixing operation is not performed, the bolt 31 is not tightened, and the support rod 21 can slide freely in the slide groove 23 to adjust the position to adapt to glasses of different sizes. According to the size and shape of the glass, slide the support rod 21 in the slide groove 23 to a suitable position. When the support rod 21 is adjusted to a suitable position, rotate the bolt 31. Since the bolt 31 is threadedly connected to the support rod 21, as the bolt 31 rotates, the bolt 31 will move along the axial direction of the support rod 21. The end of the bolt 31 gradually approaches the support plate 11. Continue to rotate the bolt 31 so that the end of the bolt 31 is tightly against the support plate 11. At this time, friction is generated between the bolt 31 and the support plate 11, and this friction prevents the support rod 21 from continuing to slide in the slide groove 23. The support rod 21 is firmly fixed at a specific position on the support plate 11 by the tightening force of the bolt 31. This fixing mechanism 3 realizes the rapid adjustment and firm fixation of the position of the support rod 21 through the threaded connection between the bolt 31 and the support rod 21 and the tightening effect between the end of the bolt 31 and the support plate 11, providing a guarantee for the stable operation of the coating machine clamping device.

[0025] To reduce the possibility of bolt 31 slipping, refer to Figure 2 In a preferred embodiment, an anti-skid protrusion is provided at the end of the bolt 31, and an anti-skid groove 32 for accommodating the anti-skid protrusion is provided on the support plate 11.

[0026] During use, when the position of the support rod 21 needs to be fixed, the bolt 31 is rotated to move axially along the support rod 21 and gradually approach the support plate 11. As the bolt 31 is tightened, the anti-skid protrusion at the end of the bolt 31 gradually approaches the support plate 11. As the bolt 31 continues to be tightened, the anti-skid protrusion at the end of the bolt 31 enters the anti-skid groove 32 on the support plate 11. The shape and size of the anti-skid protrusion and the anti-skid groove 32 match each other, so that the anti-skid protrusion can be tightly embedded in the anti-skid groove 32. The cooperation between the anti-skid protrusion and the anti-skid groove 32 greatly increases the contact area and friction between the end of the bolt 31 and the support plate 11. This friction can effectively prevent the bolt 31 from loosening or rotating when subjected to external force, thereby ensuring that the support rod 21 can be firmly fixed on the support plate 11.

[0027] To improve the stability of the glass support, please refer to Figure 3 In a preferred embodiment, a support block 5 is slidably connected in the slide groove 23 along the height direction of the slide groove 23, a limiting strip 51 is provided at the top of the slide groove 23, a first spring 52 is provided between the bottom of the support block 5 and the bottom of the slide groove 23, one end of the first spring 52 is connected to the bottom of the support block 5, and the other end of the first spring 52 is connected to the bottom of the slide groove 23, the first spring 52 is in a compressed state, and the first spring 52 makes the top of the support block 5 abut against the limiting strip 51, so that the top of the support block 5 is flush with the top of the support plate 11.

[0028] During use, when the support rod 21 and the support block 5 are misaligned, under the action of the restoring force of the first spring 52, the support block 5 rebounds to the top of the slide groove 23, and under the limiting action of the limiting strip 51, the top of the support block 5 is flush with the support plate 11, thereby supporting the glass and improving the stability of the glass. When the support rod 21 overlaps with the support block 5, the support rod 21 abuts against the top of the support block 5, and the first spring 52 is further compressed.

[0029] In order to make the support block 5 automatically rebound to the bottom of the slide groove 23, please refer to Figure 3 In a preferred embodiment, both ends of the support block 5 are provided with inclined surfaces, and when the support rod 21 abuts against the inclined surfaces, the support block 5 tends to slide toward the first spring 52 .

[0030] When in use, when the support rod 21 is placed in the slide groove 23 and slides toward the support block 5, the bottom of the support rod 21 first contacts the inclined surfaces at both ends of the support block 5. 53 Due to the existence of the inclined surface, the direction of the force exerted by the support rod 21 on the support block 5 is not perpendicular to the inclined surface. The force exerted by the support rod 21 on the inclined surface can be decomposed into a pressure component perpendicular to the inclined surface and a force component parallel to the inclined surface. This force component parallel to the inclined surface causes the support block 5 to have a tendency to slide in the direction of the first spring 52. Under the action of this parallel force component, the support block 5 overcomes part of the elastic force of the first spring 52 and begins to slide in the direction of the first spring 52. As the support rod 21 continues to approach the support block 5, the sliding distance of the support block 5 gradually increases. The sliding of the support block 5 causes the first spring 52 to be further compressed, storing more elastic potential energy. At this time, the support rod 21 can slide smoothly in the slide groove 23 until it is adjusted to a suitable position.

[0031] To make the pressing plate 22 contact the glass, please refer to Figure 4 In a preferred embodiment, the driving mechanism 4 includes a nut 41 threadedly connected to the support rod 21, and the nut 41 is used to abut against the pressure plate 22 so that the pressure plate 22 abuts against the glass.

[0032] When in use, the nut 41 is rotated to move downward along the axis on the support rod 21. Since the nut 41 is threadedly connected to the support rod 21, when the nut 41 is rotated, the nut 41 gradually approaches the pressure plate 22 along the support rod 21. When the nut 41 continues to descend, it eventually contacts the pressure plate 22. Under the pressure of the nut 41, the pressure plate 22 slides downward on the support rod 21 and gradually approaches the glass. After the pressure plate 22 contacts the glass, the nut 41 is continuously rotated so that the pressure plate 22 applies sufficient pressure to the glass, and the glass is tightly pressed between the pressure plate 22 and the support plate 11.

[0033] To improve the efficiency of glass installation and removal, please refer to Figure 4In a preferred embodiment, the pressure plate 22 is slidably and rotatably connected to the support rod 21 , and a second spring 42 is sleeved on the support rod 21 , and the second spring 42 is located between the nut 41 and the pressure plate 22 .

[0034] When in use, the glass to be coated is placed on the support plate 11, in the area surrounded by the support rod 21. The nut 41 is rotated to move downward along the axial direction on the support rod 21. As the nut 41 descends, the nut 41 gradually approaches the pressing plate 22. When the nut 41 contacts the second spring 42, the nut 41 is continuously rotated, and the nut 41 applies pressure to the second spring 42, so that the second spring 42 begins to compress. During the compression of the second spring 42, the second spring 42 generates a downward elastic force on the pressing plate 22. This elastic force causes the pressing plate 22 to slide downward on the support rod 21 and gradually approach the glass. When the pressing plate 22 contacts the glass, the nut 41 is continuously rotated, and the second spring 42 is further compressed, and the pressing plate 22 applies sufficient pressure to the glass, so that the glass is tightly pressed between the pressing plate 22 and the support plate 11. Since the pressing plate 22 is connected to the support rod 21 by sliding and rotation, when the glass surface is not completely flat, the pressing plate 22 can automatically adjust the angle to a certain extent to better fit the glass surface, thereby ensuring the uniformity and stability of the clamping. During the clamping process, if the angle of the pressure plate 22 needs to be adjusted, the pressure plate 22 can be manually rotated to a suitable position on the support rod 21 to better adapt to glass of different shapes or special clamping requirements. During the coating process, the nut 41 maintains pressure on the second spring 42, and the second spring 42 continues to apply elastic force to the pressure plate 22 to ensure that the glass is always firmly clamped in the clamping device. When the coating is completed, the nut 41 is rotated in the opposite direction to move it upward on the support rod 21, gradually reducing the pressure on the second spring 42. As the nut 41 rises, the second spring 42 gradually returns to its original state, and the elastic force on the pressure plate 22 decreases. When the nut 41 completely leaves the second spring 42, the glass can be removed from the clamping device.

[0035] To reduce the possibility of glass damage, please refer to Figure 4 In a preferred embodiment, a buffer layer 24 is provided at the bottom of the pressing plate 22 .

[0036] When in use, during the clamping and coating process, the buffer layer 24 can prevent the pressing plate 22 from directly contacting the glass, thereby reducing the risk of scratching the glass. Even if there is a slight movement or vibration during operation, the buffer layer 24 can play a buffering role and protect the smoothness of the glass surface. When the pressing plate 22 applies pressure to the glass, the buffer layer 24 can evenly distribute the pressure to prevent the glass from being broken due to excessive local force. Especially for thin glass or fragile glass, the presence of the buffer layer 24 can greatly improve the safety of clamping.

[0037] To reduce the possibility of nut 41 loosening, refer to Figure 4 In a preferred embodiment, the nut 41 is provided with an anti-loosening gear 43 , and the support rod 21 is provided with a slot 44 , in which an anti-loosening tooth block 45 meshing with the anti-loosening gear 43 is clamped.

[0038] When in use, the nut 41 is rotated to move downward along the axis on the support rod 21, gradually approaching the pressure plate 22 and applying pressure to the pressure plate 22, so that the pressure plate 22 presses the glass. In this process, the anti-loosening gear 43 on the nut 41 rotates together with the nut 41. When the nut 41 is tightened to the desired position, the anti-loosening tooth block 45 is inserted into the slot 44 on the support rod 21. At this time, the position of the anti-loosening tooth block 45 corresponds to the anti-loosening gear 43, so that the anti-loosening tooth block 45 can mesh with the anti-loosening gear 43. After the anti-loosening tooth block 45 meshes with the anti-loosening gear 43, a mechanical locking structure is formed. If the nut 41 tends to loosen, the anti-loosening gear 43 cannot rotate due to the obstruction of the anti-loosening tooth block 45, thereby preventing the nut 41 from rotating in the opposite direction and loosening.

[0039] To facilitate turning the nut 41, refer to Figure 4 In a preferred embodiment, a handle 46 is provided on the nut 41 .

[0040] When in use, the handle 46 provided on the nut 41 provides a convenient operating tool for the operator, making the rotation operation of the nut 41 easier, thereby improving the convenience of use and work efficiency of the clamping device.

[0041] In order to better understand this application, the following Figure 1 - Figure 4 The working principle of a coating machine clamping device of the technical solution of the present application is described in detail: the support plate 11 serves as the basic supporting structure of the entire clamping device, providing a platform for the installation and fixing of other components, and multiple support rods 21 can slide in the slide grooves 23 on the support plate 11, so that the position of the support rods 21 can be adjusted according to the size and shape of the glass to adapt to glass of different specifications. When the support rods 21 are adjusted to a suitable position, the fixing mechanism 3 works to fix the support rods 21 on the support plate 11 to prevent the support rods 21 from moving during the coating process. The pressing plate 22 can slide on the support rods 21. When it is necessary to clamp the glass, after adjusting the position of the support rods 21, the driving mechanism 4 is used to make the pressing plate 22 slide downward on the support rods 21 and gradually approach the glass. When the pressing plate 22 contacts the glass and continues to move downward, the pressing plate 22 will exert pressure on the glass and clamp the glass between the pressing plate 22 and the support plate 11.

[0042] The specific implementation methods of the present application described above do not constitute a limitation on the protection scope of the present application. Any other corresponding changes and modifications made according to the technical concept of the present application should be included in the protection scope of the claims of the present application.

Claims

1. A coating machine clamping device, characterized in that: include: A supporting mechanism, the supporting mechanism comprising a supporting plate, and a sliding groove is provided on the supporting plate; A clamping mechanism, the clamping mechanism comprising a plurality of support rods and a pressure plate arranged on the support plate, the support rods being slidably connected in the slide grooves, the pressure plate being slidably connected to the support rods, and the sliding direction of the support rods being perpendicular to the sliding direction of the pressure plate; A fixing mechanism, the fixing mechanism is arranged on the support plate, and the fixing mechanism is used to fix the support rod; and The driving mechanism is arranged on the support rod and is used to drive the pressing plate to slide along the support rod so that the pressing plate is pressed against the glass.

2. A coating machine clamping device according to claim 1, characterized in that: The fixing mechanism comprises a bolt which is threadedly connected to the support rod, and the end of the bolt is tightly pressed against the support plate.

3. A coating machine clamping device according to claim 2, characterized in that: The end of the bolt is provided with an anti-skid protrusion, and the support plate is provided with an anti-skid groove for accommodating the anti-skid protrusion.

4. A coating machine clamping device according to claim 1, characterized in that: A support block is slidably connected in the slide groove along the height direction of the slide groove, a limit strip is provided at the top of the slide groove, a first spring is provided between the bottom of the support block and the bottom of the slide groove, one end of the first spring is connected to the bottom of the support block, and the other end of the first spring is connected to the bottom of the slide groove, the first spring is in a compressed state, and the first spring makes the top of the support block abut against the limit strip, so that the top of the support block is flush with the top of the support plate.

5. A coating machine clamping device according to claim 4, characterized in that: Both ends of the support block are provided with inclined surfaces, and when the support rod abuts against the inclined surfaces, the support block has a tendency to slide toward the direction of the first spring.

6. A coating machine clamping device according to claim 1, characterized in that: The driving mechanism comprises a nut threadedly connected to the support rod, and the nut is used to abut against the pressing plate so that the pressing plate abuts against the glass.

7. A coating machine clamping device according to claim 6, characterized in that: The pressing plate is slidably and rotatably connected to the support rod, a second spring is sleeved on the support rod, and the second spring is located between the nut and the pressing plate.

8. A coating machine clamping device according to claim 1, characterized in that: A buffer layer is provided at the bottom of the pressing plate.

9. A coating machine clamping device according to claim 6, characterized in that: The nut is provided with an anti-loosening gear, the support rod is provided with a clamping groove, and the clamping groove is clamped with an anti-loosening tooth block meshing with the anti-loosening gear.

10. A coating machine clamping device according to claim 6, characterized in that: A handle is provided on the nut.

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