Electrostatic chuck cleaning device

Abstract

The invention relates to the technical field of cleaning of electrostatic chucks of semiconductor equipment, in particular to an electrostatic chuck cleaning device which comprises an operation box, a moving groove is formed in the bottom in the operation box, a moving block is arranged in the moving groove in a sliding fit mode, the top of the moving block extends to the outer side of the moving groove, and a workbench is fixedly connected to the top of the extending end of the moving block. A clamping groove is formed in the working top, a clamping assembly for clamping and fixing an electrostatic chuck is arranged in the clamping groove, a first mounting hole, a second mounting hole and a third mounting hole are sequentially formed in the top in the working box from left to right at equal intervals, a spraying assembly is arranged in the first mounting hole, and a high-pressure blowing assembly is arranged in the second mounting hole. And a drying assembly is arranged in the third mounting hole.

Description

Technical Field

[0001] The invention relates to the field of cleaning of electrostatic chucks of semiconductor equipment, and in particular to an electrostatic chuck cleaning device. Background Art

[0002] At present, in the field of semiconductor integrated circuit manufacturing, the process chamber used online is a vacuum-sealed space. When contamination occurs in the chamber, the contaminants adhere to the upper surface of the electrostatic chuck. The contaminants usually include products generated during processes such as etching, chemical vapor deposition, and physical deposition. In particular, the etching products generated during the etching process are very easy to adhere to the upper surface of the electrostatic chuck. Therefore, the electrostatic chuck needs to be cleaned regularly, but the existing cleaning methods are mostly manual cleaning. Such cleaning methods not only reduce the cleaning efficiency, but may also cause unclean cleaning and affect the adsorption operation. Summary of the invention

[0003] In view of the above situation, in order to overcome the defects of the prior art, the purpose of the present invention is to provide an electrostatic chuck cleaning device, which has the advantages of solving the problems raised in the above background technology.

[0004] The above technical objectives of the present invention are achieved through the following technical solutions: An electrostatic suction cup cleaning device comprises a work box, a movable groove is provided at the bottom of the work box, a movable block is slidably fitted in the movable groove, the top of the movable block extends to the outside of the movable groove, a work table is fixedly connected to the top of the extended end of the movable block, a clamping groove is provided at the top of the work, a clamping assembly for clamping and fixing the electrostatic suction cup is provided in the clamping groove, a first mounting hole, a second mounting hole, and a third mounting hole are provided at equal intervals from left to right in the top of the work box, a first lifting cylinder is fixedly connected in the first mounting hole, an output end of the first lifting cylinder is vertically downwardly arranged, and a bottom of the first lifting cylinder is provided with a clamping assembly for clamping and fixing the electrostatic suction cup. A first lifting plate is fixedly connected to the top, a first bracket is fixedly connected to the bottom of the first lifting plate, a spray assembly is provided at the bottom of the first bracket, a second lifting cylinder is fixedly connected to the second mounting hole, a second lifting plate is fixedly connected to the bottom of the second lifting cylinder, a second bracket is fixedly connected to the bottom of the second lifting plate, a high-pressure blowing assembly is provided at the bottom of the second bracket, a third lifting cylinder is fixedly connected to the third mounting hole, a third lifting plate is fixedly connected to the bottom of the output end of the third lifting cylinder, a third bracket is fixedly connected to the bottom of the third lifting plate, and a drying assembly is provided at the bottom of the third bracket.

[0005] By adopting the above technical scheme, during operation, the operator places the electrostatic suction cup on the workbench, further clamps and fixes the electrostatic suction cup through the clamping assembly on the workbench, and then the operator cooperates with the sliding moving block to the bottom of the first bracket. At this time, the operator turns on the first lifting cylinder according to the operation requirements, and cooperates with the output end to drive the first lifting plate and the first bracket at the bottom of the first lifting plate to rise and fall to a suitable operating height, and through the cooperation of the spray assembly, the atomization flushing of the surface of the electrostatic suction cup and the inside of the channel is completed. After the flushing is completed, the sliding moving block is moved to the bottom of the second bracket, and then the second lifting cylinder is turned on, and the second lifting plate and the second bracket at the bottom of the second lifting plate are lifted up and down to a suitable operating height in cooperation with the output end. The surface of the electrostatic suction cup and the inside of the channel are cleaned by high-pressure blowing through the high-pressure blowing assembly. Finally, the operator slides the moving block to the bottom of the third bracket, turns on the third lifting cylinder and cooperates with the output end to drive the third lifting plate and the third bracket at the bottom of the third lifting plate to rise and fall to a suitable height, and cooperates with the drying assembly to dry the surface of the electrostatic suction cup, which is not only simple to operate, but also improves the efficiency of the cleaning operation.

[0006] Further configuration: a pushing assembly for driving the moving block to move left and right is provided in the moving groove, the pushing assembly includes fixed seats arranged on both sides of the moving groove, a screw rod is rotatably connected between the fixed seats, the moving block is matched and connected to the outside of the screw rod, one end of the screw rod extends to the outside of the moving groove, and the extended end of the screw rod is connected to a servo motor through a coupling.

[0007] By adopting the above technical solution, during operation, the operator turns on the servo motor according to the operation requirements to drive the screw to rotate. At this time, the moving block on the screw and other components on the moving block cooperate with the moving groove to move left and right to the working area to complete the cleaning operation.

[0008] Further configuration: the clamping assembly includes a bidirectional cylinder arranged at the center position of the clamping groove, the output ends on both sides of the bidirectional cylinder are fixedly connected with connecting blocks, the connecting blocks are slidably matched with the clamping grooves, the tops of the connecting blocks extend to the outside of the clamping grooves, and a limiting groove is opened on one side adjacent to the extended end of the connecting block.

[0009] By adopting the above technical solution, during the cleaning operation, the operator places the electrostatic suction cup on the workbench. According to the diameter size of the electrostatic suction cup, the operator turns on the two-way cylinder and cooperates with the output ends on both sides to drive the connecting blocks to move toward each other until the limit grooves on the adjacent side of the connecting block clamp and limit the two sides of the electrostatic suction cup.

[0010] Further configuration: the spray assembly includes a water pipe arranged at the bottom of the first bracket, a plurality of nozzles are opened at the bottom of the water pipe, the nozzles are all connected to atomizing nozzles, one end of the water pipe is connected to an extension pipe, the other end of the extension pipe extends to the outside of the top of the working box, the extended end of the extension pipe is connected to a water tank, the water tank is fixedly connected to the top of the working box, a water pump is placed in the water tank, and the extension pipe is connected to the water outlet end of the water pump.

[0011] By adopting the above technical solution, during the cleaning operation, the operator turns on the water pump to pump the pure water in the water tank into the extension pipe, and pumps the cleaning liquid into the water pipe through the extension pipe. Through the coordinated work of multiple atomizing nozzles at the bottom of the water pipe, high-pressure atomization spray cleaning is performed on the surface of the electrostatic suction cup and the inside of the channel.

[0012] Further configuration: the high-pressure blowing assembly includes a high-pressure air pipe arranged at the bottom of the second bracket, a plurality of air ports are opened at the bottom of the high-pressure air pipe, and a plurality of air ports are connected to air nozzles. One end of the high-pressure air pipe is connected to a connecting pipe, and the other end of the connecting pipe extends to the outside of the working box. The extending end of the connecting pipe is connected to a high-pressure air pump, and the high-pressure air pump is fixedly connected to the top of the working box.

[0013] By adopting the above technical solution, after the atomization spray cleaning process is completed, the operator moves the electrostatic suction cup to the bottom of the second bracket. At this time, the operator turns on the high-pressure vacuum pump to compress the external air and pump it into the connecting pipe. Through the cooperation of the high-pressure air pipe and the air nozzle, the surface of the electrostatic suction cup is blown and cleaned, which not only cleans the dust on the surface of the electrostatic suction cup, but also blows away the pure water droplets remaining on the surface of the electrostatic suction cup, thereby ensuring the cleanliness of the surface of the electrostatic suction cup.

[0014] Further configuration: the drying component includes a heat insulation plate arranged at the bottom of the third bracket, a heating plate is provided below the heat insulation plate, the heating plate is electrically connected to a power supply, and the power supply is arranged on the outer wall of the work box.

[0015] By adopting the above technical solution, after the purging operation is completed, the electrostatic suction cup is moved to the bottom of the third bracket. At this time, the operator connects the external power supply to the electrical connection with the heating plate, causing the heating plate to heat up, thereby increasing the surrounding temperature, thereby drying the surface of the electrostatic suction cup to ensure that the surface of the electrostatic suction cup and the channel are dry.

[0016] In summary, the present invention has the following beneficial effects: The present invention is equipped with a spray assembly. During cleaning operations, the operator turns on the water pump to pump pure water in the water tank into the extension pipe, and pumps the cleaning liquid into the water pipe through the extension pipe. Through the coordinated work of multiple atomizing nozzles at the bottom of the water pipe, high-pressure atomization spray cleaning treatment is performed on the surface of the electrostatic suction cup and the inside of the channel.

[0017] The present invention has a high-pressure blowing component. After the atomization spray cleaning process is completed, the operator moves the electrostatic suction cup to the bottom of the second bracket. At this time, the operator turns on the high-pressure vacuum pump to compress the external air and pump it into the connecting pipe. Through the cooperation of the high-pressure air pipe and the air nozzle, the surface of the electrostatic suction cup is blown and cleaned, which not only cleans the dust on the surface of the electrostatic suction cup, but also blows away the pure water droplets remaining on the surface of the electrostatic suction cup, thereby ensuring the cleanliness of the surface of the electrostatic suction cup.

[0018] The present invention has a drying component. After the purging operation is completed, the electrostatic suction cup is moved to the bottom of the third bracket. At this time, the operator connects an external power supply to the heating plate through electrical connection, causing the heating plate to heat up, thereby increasing the surrounding temperature, thereby drying the surface of the electrostatic suction cup to ensure that the surface and the channel of the electrostatic suction cup are dry.

[0019] The present invention is equipped with a clamping assembly. During the cleaning operation, the operator places the electrostatic suction cup on the workbench. According to the diameter size of the electrostatic suction cup, the operator turns on the two-way cylinder and cooperates with the output ends on both sides to drive the connecting blocks to move toward each other until the limiting grooves on the adjacent side of the connecting block clamp and limit the two sides of the electrostatic suction cup. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present application, but do not constitute an improper limitation of the present invention. In the drawings: Figure 1 It is a front view of the present invention; Figure 2 It is a main structural schematic diagram of the present invention.

[0021] In the figure, 1, work box; 2, moving slot; 3, moving block; 4, work table; 5, clamping slot; 6, clamping assembly; 7, first mounting hole; 8, second mounting hole; 9, third mounting hole; 10, first lifting cylinder; 11, first lifting plate; 12, first bracket; 13, spray assembly; 14, second lifting cylinder; 15, second lifting plate; 16, second bracket; 17, high-pressure blowing assembly; 18, third lifting cylinder; 19, third lifting plate; 20, The third bracket; 21. Drying component; 22. Pushing component; 23. Fixed seat; 24. Screw rod; 25. Servo motor; 26. Two-way cylinder; 27. Connecting block; 28. Limiting groove; 29. ​​Water pipe; 30. Nozzle; 31. Atomizing nozzle; 32. Extension pipe; 33. Water tank; 34. Water pump; 35. High-pressure air pipe; 36. Air port; 37. Air nozzle; 38. Connecting pipe; 39. High-pressure vacuum pump; 40. Heat insulation board; 41. Heating board; 42. Power supply. DETAILED DESCRIPTION

[0022] The above and other technical contents, features and effects of the present invention are described in detail below with reference to the attached Figure 1 To Attachment Figure 2 The detailed description of the embodiments will clearly show that the structural contents mentioned in the following embodiments are all based on the drawings in the specification.

[0023] Exemplary embodiments of the present invention will be described below with reference to the accompanying drawings.

[0024] Embodiment 1: An electrostatic chuck cleaning device, such as Figure 1 , 2 As shown, it includes a work box 1, a moving groove 2 is opened at the bottom of the work box 1, a moving block 3 is slidably matched in the moving groove 2, a pushing assembly 22 for driving the moving block 3 to move left and right is arranged in the moving groove 2, and the pushing assembly 22 includes fixed seats 23 arranged on both sides of the moving groove 2, and a screw rod 24 is rotatably connected between the fixed seats 23, and the moving block 3 is matched and connected to the outside of the screw rod 24, one end of the screw rod 24 extends to the outside of the moving groove 2, and the extended end of the screw rod 24 is connected to a servo motor 25 through a coupling, and the top of the moving block 3 It extends to the outside of the movable groove 2, and the top of the extended end of the movable block 3 is fixedly connected to a workbench 4. A clamping groove 5 is opened on the top of the workbench, and a clamping assembly 6 for clamping and fixing the electrostatic suction cup is arranged in the clamping groove 5. The clamping assembly 6 includes a two-way cylinder 26 arranged at the center position of the clamping groove 5, and the output ends on both sides of the two-way cylinder 26 are fixedly connected to connecting blocks 27, and the connecting blocks 27 are slidably matched with the clamping groove 5. The top of the connecting block 27 extends to the outside of the clamping groove 5, and a limiting groove 28 is opened on one side adjacent to the extended end of the connecting block 27.

[0025] like Figure 2 As shown, the top of the work box 1 is provided with a first mounting hole 7, a second mounting hole 8, and a third mounting hole 9 with equal spacing from left to right, a first lifting cylinder 10 is fixedly connected in the first mounting hole 7, an output end of the first lifting cylinder 10 is arranged vertically downward, a first lifting plate 11 is fixedly connected at the bottom of the first lifting cylinder 10, a first bracket 12 is fixedly connected at the bottom of the first lifting plate 11, a spray assembly 13 is arranged at the bottom of the first bracket 12, the spray assembly 13 includes a water pipe 29 arranged at the bottom of the first bracket 12, a plurality of nozzles 30 are arranged at the bottom of the water pipe 29, and atomizing nozzles 31 are connected at the nozzles 30, one end of the water pipe 29 is connected with an extension pipe 32, the other end of the extension pipe 32 extends to the outside of the top of the work box 1, an extension end of the extension pipe 32 is connected with a water tank 33, the water tank 33 is fixedly connected to the top of the work box 1, a water pump 34 is placed in the water tank 33, and the extension pipe 32 is connected to the water outlet end of the water pump 34; A second lifting cylinder 14 is fixedly connected in the second mounting hole 8, a second lifting plate 15 is fixedly connected at the bottom of the second lifting cylinder 14, a second bracket 16 is fixedly connected at the bottom of the second lifting plate 15, a high-pressure blowing assembly 17 is provided at the bottom of the second bracket 16, the high-pressure blowing assembly 17 comprises a high-pressure air pipe 35 arranged at the bottom of the second bracket 16, a plurality of air ports 36 are provided at the bottom of the high-pressure air pipe 35, and air nozzles 37 are connected to the plurality of air ports 36, one end of the high-pressure air pipe 35 is connected to a connecting pipe 38, the other end of the connecting pipe 38 extends to the outside of the working box 1, a high-pressure air pump 39 is connected to the extending end of the connecting pipe 38, and the high-pressure air pump 39 is fixedly connected to the top of the working box 1; A third lifting cylinder 18 is fixedly connected in the third mounting hole 9, a third lifting plate 19 is fixedly connected to the bottom of the output end of the third lifting cylinder 18, a third bracket 20 is fixedly connected to the bottom of the third lifting plate 19, a drying component 21 is provided at the bottom of the third bracket 20, the drying component 21 includes a heat insulation plate 40 arranged at the bottom of the third bracket 20, a heating plate 41 is provided under the heat insulation plate 40, the heating plate 41 is electrically connected to a power supply 42, and the power supply 42 is provided on the outer wall of the work box 1.

[0026] In the embodiment of the present invention, during operation, the operator places the electrostatic suction cup on the workbench 4. According to the diameter size of the electrostatic suction cup, the operator starts the two-way cylinder 26 at this time, and cooperates with the output ends on both sides to drive the connecting block 27 to move toward each other, until the limit groove 28 on the adjacent side of the connecting block 27 clamps and limits the two sides of the electrostatic suction cup. Then, the operator starts the servo motor 25 according to the operation requirements to drive the screw rod 24 to rotate. At this time, the moving block 3 on the screw rod 24 and other components on the moving block 3 cooperate with the moving groove 2 to move from left to right in turn to the bottom of the first bracket 12, the bottom of the second bracket 12, and the bottom of the second bracket 12. Under the second bracket 16 and under the third bracket 20, when the moving block 3 moves to the bottom of the first bracket 12, the operator starts the first lifting cylinder 10 according to the operation requirements, and cooperates with the output end to drive the first lifting plate 11 and the first bracket 12 to move up and down to a suitable operation height. At this time, the operator starts the water pump 34 to pump the pure water in the water tank 33 into the extension pipe 32, and pumps the cleaning liquid into the water pipe 29 through the extension pipe 32. Through the cooperation of multiple atomizing nozzles 31 at the bottom of the water pipe 29, the surface of the electrostatic chuck and the inside of the channel are subjected to high-pressure atomization spray cleaning treatment; After the atomization spray cleaning operation is completed, the moving block 3 moves to the bottom of the second bracket 16, and the operator turns on the second lifting cylinder 14 according to the operation requirements, and cooperates with the output end to lift the second lifting plate 15 and the second bracket 16 up and down to a suitable operation height. At this time, the operator turns on the high-pressure vacuum pump 39 to compress the external air and pump it into the connecting pipe 38. Through the cooperation of the high-pressure air pipe 35 and the air nozzle 37, the surface of the electrostatic chuck is blown and cleaned, which not only blows away the dust on the surface of the electrostatic chuck, but also blows away the pure water droplets remaining on the surface of the electrostatic chuck, so as to ensure the cleanliness of the surface of the electrostatic chuck; After completing the high-pressure air blowing cleaning operation, the moving block 3 cooperates to move to the bottom of the third bracket 20, and the operator turns on the third lifting cylinder 18 according to the operation requirements, and cooperates with the output end to lift the third lifting plate 19 and the third bracket 20 up and down to a suitable working height. At this time, the operator connects the external power supply 42 to the electrical connection with the heating plate 41, so that the heating plate 41 is heated, thereby increasing the surrounding temperature, thereby drying the surface of the electrostatic suction cup to ensure that the surface of the electrostatic suction cup and the channel are dry.

[0027] The above is a further detailed description of the present invention in combination with a specific implementation method, and it cannot be determined that the specific implementation of the present invention is limited to this; for technical personnel in the technical field to which the present invention belongs and related technical fields, based on the technical solution of the present invention, the expansion and replacement of operating methods and data should all fall within the protection scope of the present invention.

Claims

1. An electrostatic chuck cleaning device, comprising a work box (1), characterized in that: The bottom of the work box (1) is provided with a moving groove (2), a moving block (3) is slidably fitted in the moving groove (2), the top of the moving block (3) extends to the outside of the moving groove (2), the top of the extending end of the moving block (3) is fixedly connected to a work table (4), the top of the work table is provided with a clamping groove (5), a clamping assembly (6) for clamping and fixing the electrostatic suction cup is provided in the clamping groove (5), the top of the work box (1) is provided with a first mounting hole (7), a second mounting hole (8), and a third mounting hole (9) at equal intervals from left to right, the first mounting hole (7) is fixedly connected to a first lifting cylinder (10), the output end of the first lifting cylinder (10) is arranged vertically downward, the bottom of the first lifting cylinder (10) is fixedly connected to a first lifting plate (11), the first The bottom of the lifting plate (11) is fixedly connected to a first bracket (12), the bottom of the first bracket (12) is provided with a spray assembly (13), the second mounting hole (8) is fixedly connected to a second lifting cylinder (14), the bottom of the second lifting cylinder (14) is fixedly connected to a second lifting plate (15), the bottom of the second lifting plate (15) is fixedly connected to a second bracket (16), the bottom of the second bracket (16) is provided with a high-pressure blowing assembly (17), the third mounting hole (9) is fixedly connected to a third lifting cylinder (18), the bottom of the output end of the third lifting cylinder (18) is fixedly connected to a third lifting plate (19), the bottom of the third lifting plate (19) is fixedly connected to a third bracket (20), and the bottom of the third bracket (20) is provided with a drying assembly (21).

2. An electrostatic chuck cleaning device according to claim 1, characterized in that: A push assembly (22) for driving the moving block (3) to move left and right is provided in the moving groove (2). The push assembly (22) comprises fixed seats (23) arranged on both sides of the moving groove (2). A screw rod (24) is rotatably connected between the fixed seats (23). The moving block (3) is matched and connected to the outside of the screw rod (24). One end of the screw rod (24) extends to the outside of the moving groove (2). The extended end of the screw rod (24) is connected to a servo motor (25) via a coupling.

3. The electrostatic chuck cleaning device according to claim 1, characterized in that: The clamping assembly (6) comprises a bidirectional cylinder (26) arranged at the center of the clamping groove (5), and the output ends on both sides of the bidirectional cylinder (26) are fixedly connected to connecting blocks (27), and the connecting blocks (27) are slidably matched with the clamping groove (5). The top of the connecting block (27) extends to the outside of the clamping groove (5), and a limiting groove (28) is provided on one side adjacent to the extended end of the connecting block (27).

4. The electrostatic chuck cleaning device according to claim 1, characterized in that: The spray assembly (13) comprises a water pipe (29) arranged at the bottom of the first bracket (12); a plurality of nozzles (30) are provided at the bottom of the water pipe (29); each of the nozzles (30) is connected to an atomizing nozzle (31); one end of the water pipe (29) is connected to an extension pipe (32); the other end of the extension pipe (32) extends to the outside of the top of the working box (1); the extension end of the extension pipe (32) is connected to a water tank (33); the water tank (33) is fixedly connected to the top of the working box (1); a water pump (34) is placed in the water tank (33); and the extension pipe (32) is connected to a water outlet end of the water pump (34).

5. The electrostatic chuck cleaning device according to claim 1, characterized in that: The high-pressure air blowing assembly (17) comprises a high-pressure air pipe (35) arranged at the bottom of the second bracket (16); a plurality of air ports (36) are provided at the bottom of the high-pressure air pipe (35); each of the plurality of air ports (36) is connected to an air nozzle (37); one end of the high-pressure air pipe (35) is connected to a connecting pipe (38); the other end of the connecting pipe (38) extends to the outside of the working box (1); the extending end of the connecting pipe (38) is connected to a high-pressure air pump (39); and the high-pressure air pump (39) is fixedly connected to the top of the working box (1).

6. The electrostatic chuck cleaning device according to claim 1, characterized in that: The drying assembly (21) comprises a heat insulation plate (40) arranged at the bottom of the third bracket (20), a heating plate (41) is arranged below the heat insulation plate (40), the heating plate (41) is electrically connected to a power source (42), and the power source (42) is arranged on the outer wall of the working box (1).

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