Amorphous alloy material, elastomer structure and six-dimensional force sensor

Abstract

The invention provides an amorphous alloy material, an elastomer structure and a six-dimensional force sensor. Specifically, the amorphous alloy material comprises Zr, Ta, V, Nb and M, and M is Cr, Al, Ti or Hf. The invention further provides application of the amorphous alloy material in a six-dimensional force sensor. The amorphous alloy material has high yield strength, low Young modulus and high elastic limit. When the amorphous alloy material is used for preparing the six-dimensional force sensor, the six-dimensional force sensor has the advantages of high sensitivity, high precision, wide range, low crosstalk and the like.

Description

Technical Field

[0001] The present invention belongs to the field of sensors and specifically relates to an amorphous alloy material, an elastomer structure and a six-dimensional force sensor. Background Art

[0002] As a key technological pillar of modern engineering, robotic arm systems have played an indispensable role in diverse fields, including industrial automation, medical surgical assistance, humanoid robotics, and aerospace engineering. In particular, in aerospace precision manufacturing environments, the confined workspace and increasing task complexity place increasingly stringent performance demands on robotic arm systems. To meet these high-performance requirements, robotic arms must not only exhibit excellent collaboration, lightweight design, and high-precision manipulation capabilities, but also be equipped with advanced sensing technology to ensure adaptability and reliability in complex environments. High-performance six-axis force sensors are essential for achieving dynamic decoupling of the robotic arm's end effector and real-time monitoring and feedback of force and torque. These sensors must offer exceptional measurement accuracy, sufficient sensitivity, and robust overload protection, while also being miniaturized and cost-effective, thereby further enhancing their overall performance and application scope.

[0003] As one of the important components of the six-dimensional force sensor, the elastomer needs to consider the balance between the sensor range and sensitivity during the design process. At present, elastomer materials are mainly divided into two categories: high-strength stainless steel and low-modulus aluminum alloy. For use scenarios with limited space and a wide measurement range, in order to ensure the stiffness and fatigue life of the sensor, the elastomer material is usually high-strength stainless steel. However, due to the inherent characteristics of crystalline materials, the sensitivity of stainless steel force sensors is often low, which greatly reduces the dynamic response speed of the sensor. In contrast, although the use of low-modulus aluminum alloy can significantly improve the sensitivity of the sensor, the lower yield strength of this material will lead to insufficient accuracy and stiffness of the sensor. At present, a high-performance elastomer material has not yet been developed to comprehensively improve the overall performance of the sensor.

[0004] Based on these conditions, researchers are working to improve the performance of six-dimensional force sensors through structural optimization and algorithmic compensation. For example, CN107131986 discloses a dual-hole parallel beam elastomer structure that effectively improves the sensitivity and linearity of six-dimensional force sensors and reduces inter-dimensional coupling and hysteresis. However, the elastomer's complex structure and redundant size inevitably lead to disadvantages such as high manufacturing costs and limited application scenarios.

[0005] CN109100073 discloses a six-dimensional force sensor based on strain inversion and its measurement method. This prior art achieves a high degree of decoupling between force and torque using algorithmic compensation within a simple elastic structure. However, this prior art sensor suffers from poor measurement accuracy, low range, and low sensitivity, and does not disclose the specific composition of the isotropic material.

[0006] Currently, there is limited research on elastomeric materials for high-performance six-dimensional force sensors. For example, CN115060405A discloses that amorphous alloys can be used to prepare six-dimensional force sensors. However, this prior art uses a non-radial three-beam structure and an aluminum alloy base, which greatly reduces the sensor's stiffness and usable range, leads to overall volume redundancy, and complicates the manufacturing process. Furthermore, the outer and inner hubs of the elastomer, as well as the inclined beams, are located in the same plane, which can easily lead to high sensor crosstalk and large bending moments, thereby reducing sensor accuracy.

[0007] Therefore, although the existing technology can improve some of the performance of the six-dimensional force sensor, there are still problems such as increased cost, complex manufacturing process and performance improvement bottlenecks. Summary of the Invention

[0008] The object of the present invention is to provide an amorphous alloy material having high yield strength, low Young's modulus and high elastic limit.

[0009] Another object of the present invention is to provide an elastomer structure, which, when used in a six-dimensional force sensor, enables the six-dimensional force sensor to have the advantages of high sensitivity, high precision, wide range and low crosstalk.

[0010] Another object of the present invention is to provide a six-dimensional force sensor comprising the elastic body structure of the present invention.

[0011] The above-mentioned object of the present invention is achieved through the following technical solutions.

[0012] In a first aspect, the present invention provides an amorphous alloy material comprising Zr, Ta, V, Nb and M, wherein:

[0013] The M is Cr, Al, Ti or Hf.

[0014] The inventors of the present application unexpectedly discovered that the amorphous alloy material having the composition of the present invention exhibits remarkably superior comprehensive properties, and can have high yield strength, low Young's modulus and high elastic limit.

[0015] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material contains Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is:

[0016] Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (0~7 and not equal to 0), that is, Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (greater than 0 and less than or equal to 7).

[0017] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is:

[0018] Zr: Ta: V: Nb: Cr=(40~55): (20~28): (10~20): (9~11): (3~6).

[0019] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material contains Zr, Ta, V, Nb and Al, and the atomic ratio of Zr, Ta, V, Nb and Al is:

[0020] Zr: Ta: V: Nb: Al=(35~68): (15~31): (8~11): (8~11): (0~7 and not equal to 0), that is, Zr: Ta: V: Nb: Al=(35~68): (15~31): (8~11): (8~11): (greater than 0 and less than or equal to 7).

[0021] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Al, and the atomic ratio of Zr, Ta, V, Nb and Al is:

[0022] Zr: Ta: V: Nb: Al=(50~65): (15~25): (8~10): (8~11): (3~6).

[0023] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material contains Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is:

[0024] Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (0~5 and not equal to 0), that is, Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (greater than 0 and less than or equal to 5).

[0025] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is:

[0026] Zr: Ta: V: Nb: Ti=(42~55): (18~23): (11~16): (11~17): (2~5).

[0027] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material contains Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is:

[0028] Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (0~3 and not equal to 0), that is, Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (greater than 0 and less than or equal to 3).

[0029] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is:

[0030] Zr: Ta: V: Nb: Hf=(47~50): (20~25): (11~13): (11~13): (2~3).

[0031] In the present invention, the proportion of each element has a significant impact on the properties of the amorphous alloy. If the Cr or Ti content is too high, it will not only make the material brittle, reduce its toughness and ductility, and increase the difficulty of subsequent processing of the amorphous alloy, but also affect the solidification behavior of the alloy, thereby causing casting defects.

[0032] If the Al content is too high, it will not only cause the melt to be too viscous, thus affecting the quality consistency of the alloy, but may also introduce impurities or cause composition segregation during the rapid cooling process.

[0033] Excessive Hf content can cause machining brittleness, leading to cracks in the alloy during subsequent machining and accelerated tool wear, which in turn increases machining costs. Furthermore, Hf's high melting point and thermal conductivity can alter the alloy's cooling behavior. During rapid cooling, Hf can lead to uneven cooling rates, resulting in large temperature gradients that can cause thermal stress concentration and cracks.

[0034] The present invention does not impose any particular limitation on the method for preparing the amorphous alloy material of the present invention, and the amorphous alloy material can be prepared by conventional methods in the art, such as die-casting.

[0035] In a second aspect, the present invention provides use of the amorphous alloy material of the present invention in a six-dimensional force sensor.

[0036] In a third aspect, the present invention provides an elastomer structure made of the amorphous alloy material of the present invention.

[0037] Preferably, the elastomer structure of the present invention includes an annular fixed mounting platform 3, a loading platform 1 located in the annular internal space of the fixed mounting platform, and three or more radial strain beams 2 arranged at intervals around the loading platform; wherein, one end of the radial strain beam 2 is connected to the loading platform 1, and the other end of the radial strain beam 2 is connected to the fixed mounting platform 3.

[0038] Preferably, in the elastic body structure of the present invention, the top surface of the loading platform 1 is 2 to 10 mm higher than the top surface of the fixed mounting platform 3. This height difference effectively reduces the inter-dimensional crosstalk when the elastic body is loaded with forces in different directions.

[0039] Preferably, in the elastomeric structure described in the present invention, three or more fine grooves 5 are provided on the fixed mounting platform 3. Each fine groove 5 is located near the connection between the radial strain beam and the fixed mounting platform 3 and extends perpendicular to the radial direction of the radial strain beam 3. More preferably, the width of the fine groove 5 is 0.5 to 1 mm. Further preferably, the width of the fine groove 5 is 0.5 to 0.8 mm. The fine groove is used to isolate the stress generated by the threads on the fixed mounting platform. Through CNC milling or water jet cutting, the material property changes caused by high temperature during the wire cutting process are effectively avoided.

[0040] Preferably, in the elastomer structure described in the present invention, evenly distributed threaded holes 6 are provided on the fixed mounting platform 3 and the loading platform 1 for installing and loading the sensor; more preferably, the threaded holes 6 and the fine grooves 5 located on the fixed mounting platform 3 are arranged at intervals around the circumference of the annular fixed mounting platform 3.

[0041] Preferably, in the elastic body structure of the present invention, the radial strain beams may be a rectangular parallelepiped structure. The three radial strain beams may be evenly distributed around the center of the elastic body at an angle of 120°, with their radial extension lines intersecting at the center of the elastic body.

[0042] Preferably, in the elastic body structure of the present invention, the short side length of each rectangular surface of the radial strain beam is at least 4 mm to facilitate the installation of the resistance strain gauge.

[0043] In some embodiments of the present invention, the top surfaces of the fixed mounting platform 3 and the loading platform 1 of the elastomer structure of the present invention are not on the same horizontal plane (the loading platform is higher than the fixed mounting platform), and the two are connected by three radial strain beams 2; a stepped groove 7 is provided at the junction of the bottom surface of the radial strain beam 2 and the bottom surface of the fixed mounting platform 3; a fine groove 5 is provided on the fixed mounting platform, and the position of the fine groove 5 is close to the connection between the radial strain beam and the fixed mounting platform 3, and its extension direction is perpendicular to the radial direction of the strain beam 2; threaded holes are evenly distributed on the fixed mounting platform 3 and the loading platform 1, which are used for sensor installation and loading, respectively, wherein the threaded holes of the fixed mounting platform 3 and the fine grooves 5 are staggered around the circumference of the annular fixed mounting platform 3.

[0044] Preferably, in the elastic body structure described in the present invention, the depth of the stepped groove is at least 0.3 mm, which is used for arranging signal lines.

[0045] In a fourth aspect, the present invention provides a six-dimensional force sensor comprising the elastic body structure of the present invention, a resistance strain gauge and a built-in circuit; wherein,

[0046] The resistance strain gauge 9 is provided on at least one surface of each radial strain beam 2 of the elastic structure, and the resistance strain gauges 9 are connected through the built-in circuit 8 to form a Wheatstone bridge circuit.

[0047] The operating principle of the six-dimensional force sensor of the present invention is as follows:

[0048] The resistance strain gauges are mounted on the specific surface of the radial strain beam of the amorphous alloy elastomer. The resistance strain gauges are connected by a built-in circuit to form a Wheatstone bridge circuit. The fixed mounting platform of the elastomer and the test fixture are connected by bolts to fix the six-dimensional force sensor. The excitation voltage is applied, and the loading platform of the elastomer and the loading motor are connected by bolts. The sensor is loaded with forces or torques X in different directions through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V). Refer to the calibration specification GB / T 43199-2023 and calculate the X-axis force sensor in different directions according to the corresponding formula. ij -Y ij The data can be used to obtain the technical indicators of the amorphous alloy six-dimensional force sensor, such as range, sensitivity, linear deviation, repeatability deviation, hysteresis, zero drift, crosstalk, and calibration coefficient.

[0049] In some embodiments of the present invention, the installation position of the resistance strain gauge is confirmed by finite element simulation, and is preferably installed in an area with uniform strain and concentrated stress.

[0050] In some embodiments of the present invention, two resistance strain gauges are installed on each surface of the radial strain beam, and a total of 24 resistance strain gauges are installed on 12 planes of the three strain beams.

[0051] In some embodiments of the present invention, the resistance strain gauge is preferably a single straight strain gauge, a strain rosette, a shear strain gauge or a full-bridge gauge, and its installation direction and type are longitudinal, transverse, positive 45°, and negative 45° according to different situations, respectively, for measuring longitudinal, transverse, positive 45° shear strain and negative 45° shear strain, respectively.

[0052] In some embodiments of the present invention, the excitation voltage is 5V to 12V.

[0053] In the present invention, the six-dimensional force sensor has different ranges. Preferably, Fx is 50-1200 N, Fy is 50-1200 N, Fz is 50-2000 N, Mx is 0-12 N∙m, My is 0-8 N∙m, and Mz is 0-60 N∙m.

[0054] In the present invention, the sensitivity of the six-axis force sensor has a desired range. The sensitivity in different directions is defined as the full-scale output analog value in that direction. Preferably, the sensitivity of the six-axis force sensor of the present invention is 2.0-3.0 mV / V.

[0055] In the present invention, the repeatability of the six-axis force sensor has a desired range. Preferably, the repeatability of the six-axis force sensor of the present invention is less than 0.2% FS.

[0056] In the present invention, the linear error of the six-axis force sensor has a desired range. Preferably, the linear error of the six-axis force sensor of the present invention is less than 0.25% FS.

[0057] In the present invention, the hysteresis of the six-axis force sensor has a desired range. Preferably, the hysteresis of the six-axis force sensor of the present invention is less than 0.3% FS.

[0058] In the present invention, the zero drift of the six-axis force sensor has a desired range. Preferably, the zero drift of the six-axis force sensor of the present invention is less than 0.02% FS.

[0059] In the present invention, the crosstalk of the six-axis force sensor has a desired range. Preferably, the crosstalk of the six-axis force sensor of the present invention is less than 1% FS.

[0060] The present invention has the following beneficial effects:

[0061] (1) The amorphous alloy material of the present invention exhibits excellent elastic behavior and thermal stability, and can simultaneously possess high yield strength, low Young's modulus, and high elastic limit. This invention successfully solves the problem of traditional sensors that are difficult to reconcile between stiffness and sensitivity, ensuring effective control of sensor signal drift during temperature changes and long-term use, and further improving sensor accuracy.

[0062] The six-dimensional force sensor manufactured using the amorphous alloy material of the present invention can increase the measuring range by at least 2 times and the sensitivity by more than 3 times without relying on algorithm compensation or other subsequent processing.

[0063] (2) The elastomer structure of the present invention adopts a stepped boss-shaped elastomer structure, which can achieve structural self-decoupling. The amorphous alloy elastomer structure of the present invention is compact. The present invention uses a 0.5-1 mm wide slot to divide the bolt stress, which can achieve CNC integrated processing, ensuring processing efficiency and processing quality.

[0064] The elastic body structure of the present invention ensures that the six-dimensional force sensor has the characteristics of high sensitivity, wide range and low crosstalk, as well as high precision and stability.

[0065] (3) The sensor of the present invention does not require a base or other overloaded structural components, but instead utilizes the material's inherent mechanical properties to enhance sensor performance. The technical solution of the present invention not only enhances the rigidity of the sensor body, broadens the usable range, and optimizes the sensor's volume, but also has a simple manufacturing process and can be combined with other sensor optimization technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0066] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, in which:

[0067] Figure 1 The X-ray diffraction patterns of the amorphous alloy materials prepared in Examples 1 to 8 of the present invention are shown;

[0068] Figure 2 Showing the X-ray diffraction patterns of the materials prepared in Comparative Examples 1 to 5 of the present invention;

[0069] Figure 3 A schematic front view showing an elastomeric structure according to one embodiment of the present invention;

[0070] Figure 4 A bottom schematic diagram showing an elastomeric structure according to one embodiment of the present invention;

[0071] Figure 5 A schematic structural diagram of a six-dimensional force sensor according to a specific embodiment of the present invention is shown;

[0072] Figure 6A schematic diagram of installing a resistance strain gauge according to a specific embodiment of the present invention is shown;

[0073] Figure 7 A schematic diagram showing a bridge circuit connection principle of a resistance strain gauge according to a specific embodiment of the present invention is shown;

[0074] Description of reference numerals:

[0075] 1-Loading platform; 2-Radial strain beam; 3-Fixed mounting platform; 4-Wire outlet hole; 5-Thin slot; 6-Threaded hole; 7-Step groove; 8-Built-in circuit board; 9-Resistor strain gauge; 10-Signal line. DETAILED DESCRIPTION

[0076] The present invention will be further described in detail below in conjunction with specific embodiments. The examples given are only for illustrating the present invention, not for limiting the scope of the present invention.

[0077] This section provides a general description of the materials and experimental methods used in the experiments of the present invention. Although many of the materials and procedures used to achieve the purposes of the present invention are well known in the art, the present invention is described herein in as much detail as possible. It will be understood by those skilled in the art that, unless otherwise specified, the raw materials and procedures used in the present invention are well known in the art.

[0078] Figure 1 The X-ray diffraction patterns of the amorphous alloy materials prepared in Examples 1 to 8 of the present invention are shown. As shown in the figure, X-ray diffraction was performed on the cross section of the amorphous alloy plate using a Rigaku X-ray diffractometer equipped with a Cu-Kα radiation source, and its diffuse diffraction peak confirmed the amorphous structure of the material.

[0079] Figure 2 The X-ray diffraction patterns of the materials prepared in Comparative Examples 1 to 5 of the present invention are shown. As shown in the figure, X-ray diffraction of the cross section of the alloy plate was performed using a Rigaku X-ray diffractometer equipped with a Cu-Kα radiation source. The sharp Bragg diffraction peaks indicate that the material has crystallized.

[0080] Figures 3-4A schematic diagram of the elastomer structure of the present invention is shown, in which the amorphous alloy elastomer is a stepped, boss-like structure. Featured components are installed on the amorphous alloy elastomer: a loading platform 1, radial strain beams 2, and a fixed mounting platform 3. The top surfaces of the fixed mounting platform 3 and the loading platform 1 are not on the same horizontal plane; the loading platform 1 is 2 mm higher than the fixed mounting platform 3. This height difference effectively reduces interdimensional crosstalk when the elastomer is loaded with forces in different directions. The fixed mounting platform 3 and the loading platform 1 are connected by three radial strain beams 2, which are evenly distributed around the center of the elastomer at an angle of 120°, with their radial extensions intersecting at the center. The radial strain beams are rectangular parallelepipeds, each with a width (i.e., the length of the short side) of 4 mm, facilitating the installation of resistance strain gauges. The loading platform 1 is located on the surface of the upper end of the elastomer, with its positive normal being +Fx. The remaining directions are determined according to the right-hand rule. A stepped groove 7, at least 0.3 mm deep, is provided at the junction of the radial strain beams 2 and the bottom surface of the fixed mounting platform 3 for signal line routing. A fine groove 5 perpendicular to the radial direction of the radial strain beam 2 is provided on the fixed mounting platform 3. The position of the fine groove 5 is close to the connection between the radial strain beam and the fixed mounting platform 3, and its extension direction is perpendicular to the radial direction of the strain beam 2. The width of the fine groove ranges from 0.5 to 1 mm, which is used to isolate the stress generated by the thread on the fixed mounting platform. The fine groove can be processed by CNC milling or water jet cutting, which effectively avoids the change of material properties caused by high temperature during wire cutting. Threaded holes 6 are evenly distributed on the fixed mounting platform 3 and the loading platform 1, which are used for the installation and loading of sensors respectively, wherein the threaded holes 6 of the fixed mounting platform 3 and the fine groove 5 are staggered around the circumference. A wire outlet hole 4 is provided at the bottom end of the fixed mounting platform 3 for transmitting the built-in signal of the sensor to an external device.

[0081] Figures 5-6A schematic diagram of the characteristic structure of the six-axis force sensor of the present invention is shown. The characteristic components of this six-axis force sensor are composed of an amorphous alloy elastomer, a resistance strain gauge 9, and an internal circuit (internal circuit board 8, signal lines 10). The resistance strain gauge 9 is mounted on a specific surface of the radial strain beam 2. This specific surface was confirmed through finite element simulation. Specifically, this specific surface is an area with uniform strain and concentrated stress. Two resistance strain gauges 9 are mounted on each surface of the radial strain beam 2, for a total of 24 resistance strain gauges 9. The resistance strain gauges 9 can be single straight strain gauges, rosette strain gauges, shear strain gauges, or full bridge strain gauges. Depending on the application, their installation orientation and type are longitudinal, transverse, positive 45°, and negative 45°, respectively, for measuring longitudinal, transverse, positive 45° shear strain, and negative 45° shear strain. Every four specific resistance strain gauges 9 are connected by a signal line 10 to form a Wheatstone bridge circuit. Each circuit is equipped with an internal circuit board 8 for signal amplification, conditioning, and other processing. The internal circuit boards 8 are mounted to the inner wall of the fixed mounting platform 3. Connect the fixed mounting platform 3 of the elastic body and the test fixture by bolts to fix the six-dimensional force sensor. Apply an excitation voltage of 5V to 12V, connect the loading platform 1 of the elastic body and the loading motor by bolts, and apply forces or torques X in different directions to the sensor through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V). Refer to the calibration specification GB / T 43199-2023 and calculate the X-axis force sensor in different directions according to the corresponding formula. ij -Y ij The data can be used to obtain the technical indicators of the amorphous alloy six-dimensional force sensor, such as range, sensitivity, linear deviation, repeatability deviation, hysteresis, zero drift, crosstalk, and calibration coefficient.

[0082] Figure 7 The figure shows a schematic diagram of the bridge connection principle of an embodiment of the present invention. The six-dimensional force sensor of the present invention can output six-dimensional signal measurements, where each signal channel is composed of four resistance strain gauges and an excitation voltage V0 to form a bridge. When the sensor is working, the resistance strain gauge undergoes elastic deformation, and the metal grid inside it undergoes a strain resistance effect, which causes the bridge to become unbalanced, and ultimately outputs an analog signal V e Taking the direction 1 channel composed of R11, R12, R13, and R14 as an example, when the elastic body is strained, the resistance of R11 and R13 remains unchanged, and the resistance of R12 and R13 changes to ΔR11 and ΔR13, and the output signal is V e1 Similarly, the output signals of the other five channels of the six-axis force sensor are V e2 、V e3 、V e4 、V e5 and V e6Through the matrix operation [F]=[C][V], where [V] is the output signal of the six channels and [C] is the calibration coefficient matrix of the sensor, the actual force value of the amorphous alloy six-dimensional force sensor in the six dimensions can be obtained.

[0083] Example 1

[0084] In this embodiment, a Zr2O3 amorphous alloy plate Zr2O3 is prepared by die casting. 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 , and further prepared it into an elastomeric structure.

[0085] Amorphous alloy plate Zr 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 The preparation method comprises the following steps:

[0086] According to the mass ratio of the alloying elements, the raw materials of the alloying elements are polished to remove the surface oxide layer, ultrasonically cleaned with ethanol, and then accurately weighed and placed in the crucible of the vacuum arc furnace. Furthermore, the vacuum arc furnace cavity is evacuated to a vacuum of not less than 3×10 -3 Pa vacuum is maintained to ensure an oxygen-free environment within the equipment. High-purity inert gas (99.99% argon) is then introduced to ignite the arc. Finally, the alloy is fully melted by the arc generated by the electrode rods. During this process, the ingot is flipped over five times to ensure uniform alloy composition. Two alloy ingots, each weighing 150 g, are obtained. The ingot is then transferred to a copper mold with a fixed diameter (30 mm). After the ingot is melted by the arc, the molten metal is drawn into the mold by a mechanical pump due to the pressure differential between the cavity and the mold. After the metal rod cools, it can be removed. The preparation of the alloy rod ensures uniform heating during the subsequent die-casting process. Next, the die-casting mold is thoroughly inspected and cleaned, and its surface is cleaned with metal polishing paste and alcohol. The alloy rod is placed in a quartz tube, and the tube and mold are assembled. Cooling circulating water is then introduced into the high-vacuum die-casting machine. The die-casting cavity is evacuated to a vacuum of 6 × 10 -3 Pa, melt the alloy by induction heating and continuously monitor the temperature of the molten metal using an infrared thermometer. When the temperature of the molten metal reaches at least 2187℃, the molten metal is immediately injected into the prepared mold. Under the action of water cooling and pressure difference (>10 6 K / s), the alloy liquid rapidly cools, forming a dense amorphous alloy plate. Finally, the vacuum system is turned off and the metallic glass plate is allowed to cool naturally for about 5 minutes. Then, the device is opened and the plate is removed.

[0087] like Figure 1 As shown in Table 1, the amorphous state of the plate is confirmed by X-ray diffraction, that is, there is no obvious diffraction peak. 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 Mechanical properties and sensitivity properties of elastomeric materials prepared from amorphous alloys.

[0088] Example 2

[0089] In this embodiment, Zr is prepared by die casting. 41.059 Ta 26.904 V 19.117 Nb 9.378 Cr 3.542 An amorphous alloy plate was further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 41.059%, Ta 26.904%, V 19.117%, Nb 9.378%, and Cr 3.542%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2258°C.

[0090] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 41.059 Ta 26.90 4V 19.117 Nb 9.378 Cr 3.542 The mechanical properties and sensitivity properties of the elastomeric materials prepared from the alloy are shown in Table 1.

[0091] Example 3

[0092] In this embodiment, Zr is prepared by die casting. 52.4 Ta 24.2 V 8.7 Nb 8.7 An Al6 amorphous alloy plate was prepared and further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 52.4%, Ta 24.2%, V 8.7%, Nb 8.7%, and Al 6%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2145°C.

[0093] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 52.4 Ta 24.2 V 8.7 Nb 8.7The mechanical properties and sensitivity properties of the elastomer material prepared from Al6 alloy are shown in Table 1.

[0094] Example 4

[0095] In this embodiment, Zr is prepared by die casting. 60.95 Ta 15.265 V 9.72 Nb 10.344 Al 3.721 An amorphous alloy plate was further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 60.95%, Ta 15.265%, V 9.72%, Nb 10.344%, and Al 3.721%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2078°C.

[0096] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 60.95 Ta 15.26 5V 9.72 Nb 10.344 Al 3.721 The mechanical properties and sensitivity properties of the elastomeric materials prepared from the alloy are shown in Table 1.

[0097] Example 5

[0098] In this embodiment, Zr is prepared by die casting. 42.083 Ta 22.976 V 15.344 Nb 16.732 Ti 2.865 An amorphous alloy plate was further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 42.083%, Ta 22.976%, V 15.344%, Nb 16.732%, and Ti 2.865%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2250°C.

[0099] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 42.083 Ta 22.97 6V 15.344 Nb 16.732 Ti 2.865 The mechanical properties and sensitivity properties of the elastomeric materials prepared from the alloy are shown in Table 1.

[0100] Example 6

[0101] In this embodiment, Zr is prepared by die casting.53 Ta 20 V 11 Nb 11 A Ti5 amorphous alloy plate was prepared and further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 53%, Ta 20%, V 11%, Nb 11%, and Ti 5%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2173°C.

[0102] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 53 Ta 20 V 11 Nb 11 The mechanical properties and sensitivity properties of the elastomer material prepared from Ti5 alloy are shown in Table 1.

[0103] Example 7

[0104] In this embodiment, Zr is prepared by die casting. 47.628 Ta 24.711 V 12.385 Nb 12.732 Hf 2.544 An amorphous alloy plate was further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 47.628%, Ta 24.711%, V 12.385%, Nb 12.732%, and Hf 2.544%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2257°C.

[0105] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 47.628 Ta 24.71 1V 12.385 Nb 12.732 Hf 2.544 The mechanical properties and sensitivity properties of the elastomeric materials prepared from the alloy are shown in Table 1.

[0106] Example 8

[0107] In this embodiment, Zr is prepared by die casting. 49.34 Ta 24.84 V 11.37 Nb 11.45An Hf3 amorphous alloy plate was prepared and further fabricated into an elastomeric structure. The alloy material consisted of the following elements in atomic percentages: Zr 49.34%, Ta 24.84%, V 11.37%, Nb 11.45%, and Hf 3%. The preparation and characterization procedures for the alloy plate in this example were similar to those in Example 1, except that the molten metal was injected into the mold after the induction temperature reached 2252°C.

[0108] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 49.34 Ta 24.84 V 11.37 Nb 11.45 The mechanical properties and sensitivity properties of the elastomer material prepared from Hf3 alloy are shown in Table 1.

[0109] Example 9

[0110] In this embodiment, a zirconium-tantalum-vanadium-niobium-chromium amorphous alloy is used as the elastic body to prepare the six-dimensional force sensor of this embodiment.

[0111] Figures 5-6 The structure diagram of the amorphous alloy six-dimensional force sensor of this embodiment is shown, wherein the amorphous alloy elastomer is made of the amorphous alloy material of embodiment 1. 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 The amorphous alloy plate has a thickness of 10 mm, a length of 32 mm, a width of 32 mm, a yield strength of 2300 MPa, and a Young's modulus of 99.8 GPa.

[0112] This stepped-platform elastomer structure was modeled, and finite element simulation was performed based on the performance parameters of the amorphous alloy to determine the specific dimensions and positions of the amorphous alloy elastomer's loading platform 1, radial strain beam 2, fixed mounting platform 3, cable outlet 4, slot 5, threaded hole 6, and stepped groove 7. The structure was then completed using CNC milling. The top surfaces of the fixed mounting platform 3 and the loading platform 1 are not on the same horizontal plane; the loading platform 1 is 2 mm higher than the fixed mounting platform 3. This height difference effectively reduces interdimensional crosstalk when the elastomer is loaded with forces in different directions. The fixed mounting platform 3 and the loading platform 1 are connected by three radial strain beams 2, which are evenly distributed around the center of the elastomer at an angle of 120°, with their radial extensions intersecting at the center. The radial strain beams are rectangular parallelepipeds, each with a width (i.e., short side length) of 4.3 mm to facilitate the installation of the resistance strain gauge 9. The resistance strain gauge 9 is mounted on a specific surface of the radial strain beam 2, which was confirmed by finite element simulation. Specifically, this specific surface is an area with uniform strain and concentrated stress. Two resistance strain gauges 9 are installed on each surface of the radial strain beam 2, for a total of 24 resistance strain gauges 9. The resistance strain gauges 9 are single straight strain gauges, and their installation directions are longitudinal, transverse, positive 45°, and negative 45°, respectively, depending on the situation. They are used to measure longitudinal, transverse, positive 45° shear strain, and negative 45° shear strain, respectively. Every four specific resistance strain gauges 9 are connected by signal lines 10 to form a Wheatstone bridge circuit. Each circuit is equipped with a built-in circuit board 8 for signal amplification and regulation. The built-in circuit board 8 is mounted on the inner wall of the fixed mounting platform 3. The surface on which the loading platform 1 is located is the upper end of the elastomer, and its positive normal is +Fx. The remaining directions are determined according to the right-hand rule. A stepped groove 7 with a depth of 0.3 mm is provided at the junction of the radial strain beam 2 and the bottom section of the fixed mounting platform 3 for arranging the signal line 10. The fixed mounting platform 3 is provided with a slot 5 perpendicular to the radial strain beam 2. The slot has a width of 0.5 mm and is used to isolate the stress generated by the threads on the fixed mounting platform. This slot can be processed by CNC milling, which effectively avoids changes in material properties caused by high temperatures during wire cutting. Threaded holes 6 are evenly distributed on the fixed mounting platform 3 and the loading platform 1, respectively, for sensor installation and loading. The threaded holes 6 of the fixed mounting platform 3 are staggered around the circumference with the slots 5. The bottom end of the fixed mounting platform 3 is provided with a wire outlet 4 for transmitting the sensor's internal signal to an external device.

[0113] Figure 7 The figure shows the bridge connection principle diagram of this embodiment. The six-dimensional force sensor of this embodiment can output six-dimensional signal measurements, where each signal channel is composed of four resistance strain gauges and an excitation voltage V0 to form a bridge. When the sensor is working, the resistance strain gauge undergoes elastic deformation, and the metal grid inside it undergoes strain resistance effect, which causes the bridge to become unbalanced and ultimately outputs an analog signal Ve Taking the direction 1 channel composed of R11, R12, R13, and R14 as an example, when the elastic body is strained, the resistance of R11 and R13 remains unchanged, and the resistance of R12 and R13 changes to ΔR11 and ΔR13, and the output signal is V e1 Similarly, the output signals of the other five channels of the six-axis force sensor are V e2 、V e3 、V e4 、V e5 and V e6 Through the matrix operation [F]=[C][V], where [V] is the output signal of the six channels and [C] is the calibration coefficient matrix of the sensor, the actual force value of the amorphous alloy six-dimensional force sensor in the six dimensions can be obtained.

[0114] The six-dimensional force sensor is fixed by bolting the fixed mounting platform 3 of the elastic body to the test fixture. The excitation voltage 12V is applied, and the loading platform 1 of the elastic body and the loading motor are connected by bolts. The sensor is loaded with forces or torques X in different directions through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V), as shown in Table 2. Refer to the calibration specification GB / T 43199-2023 and calculate the X and V of the six-axis force sensor in the six directions according to the corresponding formula. ij -Y ij The data can be used to obtain the technical indicators of the amorphous alloy six-dimensional force sensor, such as range, sensitivity, linear deviation, repeatability, hysteresis, zero drift, crosstalk, and calibration coefficient [C], as shown in Table 3.

[0115] Comparative Example 1

[0116] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic proportions: Zr 42%, Ta 28%, V 8%, Nb 10%, and Cr 12%.

[0117] The preparation and characterization steps of the alloy plate in this comparative example refer to those in Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2273°C.

[0118] Zr in this comparative example 42 Ta 28 V8Nb 10 Cr 12 The alloy has a yield strength of 1050 MPa and a Young's modulus of 195 GPa. Figure 2As shown, X-ray diffraction confirms significant crystallization of the sheet, limiting its formability. This indicates the presence of numerous defects, such as crystal planes and phase transitions. Calibration testing provides the sensitivity of this elastomer, as shown in Table 1.

[0119] Comparative Example 2

[0120] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 40%, Ta 23%, V 11%, Nb 8%, and Al 18%.

[0121] The preparation and characterization steps of the alloy plate in this comparative example refer to those in Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 1983°C.

[0122] Zr in this comparative example 40 Ta 23 V 11 Nb8Al 18 The alloy has a yield strength of 985 MPa and a Young's modulus of 211 GPa. Figure 2 As shown, X-ray diffraction confirms significant crystallization of the sheet, limiting its formability. This indicates the presence of numerous defects, such as crystal planes and phase transitions. Calibration testing provides the sensitivity of this elastomer, as shown in Table 1.

[0123] Comparative Example 3

[0124] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic proportions: Zr 46%, Ta 27%, V 10%, Nb 8%, and Ti 9%.

[0125] The preparation and characterization steps of the alloy plate in this comparative example refer to those in Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2227°C.

[0126] Zr in this comparative example 46 Ta 27 V 10 The yield strength of Nb8Ti9 alloy is 1000 MPa and Young's modulus is 240 GPa. Figure 2 As shown, X-ray diffraction confirms significant crystallization of the sheet, limiting its formability. This indicates the presence of numerous defects, such as crystal planes and phase transitions. Calibration testing provides the sensitivity of this elastomer, as shown in Table 1.

[0127] Comparative Example 4

[0128] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 52%, Ta 20%, V 11%, Nb 11%, and Hf 6%.

[0129] The preparation and characterization steps of the alloy plate in this comparative example refer to those in Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2204°C.

[0130] Zr in this comparative example 52 Ta 20 V 11 Nb 11 The yield strength of Hf6 alloy is 930 MPa and Young's modulus is 205 GPa. Figure 2 As shown, X-ray diffraction confirms significant crystallization of the sheet, limiting its formability. This indicates the presence of numerous defects, such as crystal planes and phase transitions. Calibration testing provides the sensitivity of this elastomer, as shown in Table 1.

[0131] Comparative Example 5

[0132] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 55%, Ta 20%, V 15%, and Nb 10%.

[0133] The preparation and characterization steps of the alloy plate in this comparative example refer to those in Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2177°C.

[0134] Zr in this comparative example 55 Ta 20 V 15 Nb 10 The alloy has a yield strength of 1050 MPa and a Young's modulus of 228 GPa. Figure 2 As shown, X-ray diffraction confirms significant crystallization of the sheet, limiting its formability. This indicates the presence of numerous defects, such as crystal planes and phase transitions. Calibration testing provides the sensitivity of this elastomer, as shown in Table 1.

[0135] Comparative Example 6

[0136] This comparative example uses a commercially available elastomeric material (17-4PH stainless steel) to prepare a six-dimensional force sensor elastomer. The performance of this six-dimensional force sensor elastomer is compared with that of the amorphous alloy six-dimensional force sensor of the present invention. 17-4PH stainless steel has a yield strength of approximately 1200 MPa and a Young's modulus of approximately 220 GPa.

[0137] The performance test was performed by referring to the same steps as Example 9. The commercial six-dimensional force sensor of this comparative example had a sensitivity of less than 1.02 mV / V, a linear deviation of 1.5% FS, a repeatability deviation of 2.0% FS, a hysteresis of 1.5% FS, a zero drift of 0.25% FS, a crosstalk of 4.0% FS, and an overall accuracy of 2.0% FS, which was far inferior to the amorphous alloy six-dimensional force sensor of the present invention.

[0138] Table 1 shows the mechanical properties and sensitivity properties of the elastomeric materials of the examples of the present invention and the comparative examples.

[0139] Table 1

[0140]

[0141] Table 2 shows the calibration test data of the amorphous alloy six-dimensional force sensor according to Example 9 of the present invention.

[0142] Table 2

[0143]

[0144]

[0145] Table 3 shows the performance indicators of the amorphous alloy six-dimensional force sensor of Example 9 of the present invention.

[0146] Table 3

[0147]

Claims

1. An amorphous alloy material comprising Zr, Ta, V, Nb and M, wherein: The M is Cr, Al, Ti or Hf.

2. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material comprises Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is: Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (0~7 and not equal to 0).

3. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material comprises Zr, Ta, V, Nb and Al, and the atomic ratio of Zr, Ta, V, Nb and Al is: Zr: Ta: V: Nb: Al=(35~68): (15~31): (8~11): (8~11): (0~7 and not equal to 0).

4. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material comprises Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is: Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (0~5 and not equal to 0).

5. The amorphous alloy material according to claim 1, wherein: The amorphous alloy material comprises Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is: Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (0~3 and not equal to 0).

6. Use of the amorphous alloy material according to any one of claims 1 to 5 in a six-dimensional force sensor.

7. An elastomer structure, made of the amorphous alloy material according to any one of claims 1 to 5.

8. The elastic body structure according to claim 7, comprising an annular fixed mounting platform, a loading platform located in the annular inner space of the fixed mounting platform, and three or more radial strain beams arranged at intervals around the loading platform; wherein, One end of the radial strain beam is connected to the loading platform, and the other end of the radial strain beam is connected to the fixed mounting platform.

9. The elastomeric structure according to claim 8, wherein: The fixed mounting platform is provided with three or more thin grooves, each of which is located close to the connection between the radial strain beam and the fixed mounting platform, and its extending direction is perpendicular to the radial direction of the radial strain beam, and the width of the thin groove is 0.5-1 mm.

10. A six-dimensional force sensor, comprising the elastic body structure, a resistance strain gauge and a built-in circuit according to any one of claims 7 to 9; wherein: The resistance strain gauge is arranged on at least one surface of each radial strain beam of the elastic body structure, and the resistance strain gauges are connected through the built-in circuit to form a Wheatstone bridge circuit.

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