Safety steel cylinder for ion injection gas storage

Abstract

The invention discloses a safety steel cylinder for ion injection gas storage, and relates to the technical field of safety steel cylinders, the safety steel cylinder comprises a shell fixedly installed outside an inner container, and further comprises a pressure reducing valve used for conducting pressure reducing treatment on ion injection gas discharged from the inner container, the pressure reducing valve is fixedly installed at the top of the inner container, and the pressure reducing valve is used for conducting pressure reducing treatment on the ion injection gas discharged from the inner container. An adjusting handle is rotationally mounted on the pressure reducing valve and is used for controlling a switch of the pressure reducing valve; the cavity is located between the shell and the inner container. The safety steel cylinder has the advantages that the safety steel cylinder is good in damping effect and high in stability, pressure relief treatment can be automatically carried out when internal pressure rises, the problem of explosion or gas leakage is avoided, meanwhile, pressure change in the cavity can be used for providing drive for alarm treatment and recording operation in the pressure relief process, automatic alarm and data recording are achieved, and the safety steel cylinder is suitable for popularization and application. And a worker can conveniently and timely check and process problems, so that the safety and the reliability are effectively ensured, and the possibility of safety accidents is greatly reduced.

Description

Technical Field

[0001] The invention relates to the technical field of safety steel cylinders, in particular to a safety steel cylinder for storing ion implantation gas. Background Art

[0002] Ion implantation is an important process that uses high-energy ion beams to introduce doped atoms or modified ions into the surface of materials, thereby changing the surface properties of the materials. It is widely used in the semiconductor field. During the ion implantation process, different gases can be used as ion sources according to the required application and modification effect. Currently, when injecting germanium ions and boron ions into semiconductors, germanium tetrafluoride and boron trifluoride gases are mostly used. Since germanium tetrafluoride and boron trifluoride gases are hazardous chemicals, they are generally stored in safety cylinders.

[0003] Currently, common safety cylinders use high-strength materials and are equipped with corresponding pressure reducing valves, safety valves and other supporting components to provide a relatively safe and reliable solution for the storage of hazardous chemicals. However, during the transportation and use of the cylinders, the internal pressure of the cylinders will change due to external shaking, accidental contact of the valve body or temperature changes, and there is a risk of explosion or gas leakage. Therefore, it is necessary to design a safety cylinder for ion implantation gas storage, which can be used to safely release pressure in time when the internal pressure changes to prevent explosion and leakage. Summary of the invention

[0004] In view of the deficiencies of the prior art, the present invention provides a safety cylinder for storing ion implantation gas, which solves the problems raised in the above-mentioned background technology.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions: A safety cylinder for storing ion implantation gas comprises a shell fixedly mounted on the outside of an inner tank, and further comprises: A pressure reducing valve, which is used to reduce the pressure of the ion-implanted gas discharged from the inner tank. The pressure reducing valve is fixedly mounted on the top of the inner tank, and an adjusting handle is rotatably mounted on the pressure reducing valve. The adjusting handle is used to control the switch of the pressure reducing valve; A cavity, wherein the cavity is located between the outer shell and the inner liner, and a protective airbag is fixedly installed at one end of the cavity close to the outer shell, the protective airbag is filled with protective gas, and the protective airbag is used to release the protective gas when the internal pressure of the inner liner increases so that the ion-injected gas in the inner liner enters the cavity, an exhaust pipe connected to the protective airbag is fixedly installed on the side wall of the outer shell, and an exhaust assembly is installed on the exhaust pipe, and a warning assembly matched with the exhaust assembly is installed on the outer shell, and the warning assembly is used to sound an alarm when the internal pressure of the inner liner increases and record the gas volume entering the cavity; An air outlet pipe is fixedly connected to the bottom of the pressure reducing valve, a sealing valve is slidably installed in the air outlet pipe, a pushing assembly is installed in the air outlet pipe, and two pressure relief assemblies matched with the pushing assembly are installed on the inner liner. The pressure relief assembly is used to allow ion injection gas to enter the cavity when the internal pressure of the inner liner increases.

[0006] Furthermore, the pressure relief assembly is composed of an alignment hole, a mounting groove, a rotating plate, a fixing ring, a pressure relief hole, a rotating rod and a fixed gear. The alignment hole is opened on the outer wall of the inner liner, the mounting groove is opened on the inner wall of the inner liner, and the mounting groove and the alignment hole are interconnected. The rotating plate is rotatably installed in the mounting groove through a fixing ring seal. The pressure relief hole is opened on the rotating plate, and the pressure relief hole cooperates with the alignment hole. The fixed gear is fixedly installed on the side wall of the rotating plate at one end away from the outer shell through a rotating rod.

[0007] Furthermore, the pushing assembly is composed of a movable plate, a spring 1, a fixed rod, a support rod and two fixed racks. The movable plate is sealingly and slidably installed in the air outlet pipe. The spring 1 is installed between the bottom of the movable plate and the air outlet pipe. The fixed rod is fixedly installed at the bottom of the movable plate, and the fixed rod is sealingly and slidably connected to the air outlet pipe. The two fixed racks are fixedly installed at the bottom of the fixed rod through the support rod, and the two fixed racks are respectively meshed with two fixed gears.

[0008] Furthermore, two air outlet holes are provided on the air outlet pipe, and both of the air outlet holes are located above the movable plate. The sealing valve corresponds to the positions of the two air outlet holes, and a connecting rod is installed between the sealing valve and the adjusting handle.

[0009] Furthermore, the exhaust assembly consists of a sliding valve, an exhaust hole, a mounting rod, a fan, a rotating shaft, a knocking rod and a fixed gear ring. The sliding valve is sealingly and slidingly installed in the exhaust pipe, the exhaust hole is T-shaped and opened on the sliding valve, the mounting rod is fixedly installed on one end of the exhaust pipe away from the sliding valve, the rotating shaft is rotatably installed on the mounting rod, the fan is fixedly installed on the rotating shaft, the knocking rod is fixedly installed on the side wall of one end of the rotating shaft located outside the exhaust pipe, and the fixed gear ring is fixedly installed on one end of the rotating shaft away from the mounting rod.

[0010] Furthermore, two sliding blocks are fixedly mounted on the side wall of the sliding valve, two sliding grooves slidably matched with the two sliding blocks are opened on the inner wall of the exhaust pipe, and springs are installed between the two sliding grooves and the two sliding blocks.

[0011] Furthermore, the warning component is composed of a fixed plate, an alarm bell, a transmission gear, a screw rod, an indicator needle and scale lines. The fixed plate is fixedly mounted on the side wall of the shell, the alarm bell is fixedly mounted on the fixed plate, and the alarm bell corresponds to the position of the knocking rod, the screw rod is rotatably mounted on the fixed plate, the transmission gear is fixedly mounted on the screw rod, and the transmission gear is meshed with the fixed gear ring, the indicator needle is threadedly mounted on the screw rod, the scale lines are fixedly mounted on the fixed plate, and the scale lines match the indicator needle.

[0012] Furthermore, a recessed groove is provided at the bottom of the outer shell, and a protective sleeve is threadedly installed on the inner shell.

[0013] Furthermore, a mounting seat is fixedly installed on the upper surface of the inner tank through a plurality of long rods, and a servo motor is fixedly installed on the mounting seat. The output end of the servo motor is fixedly connected to a telescopic rod, and a sleeve matching the adjustment handle is fixedly installed at the bottom of the telescopic rod.

[0014] Furthermore, a trigger rod is fixedly mounted on the rotating shaft, a trigger switch corresponding to the position of the trigger rod is fixedly mounted on the fixing plate, and the trigger switch is electrically connected to the servo motor.

[0015] Compared with the prior art, the present invention has the following advantages: 1: The safety cylinder has the advantage of automatically releasing pressure safely when the internal pressure increases, which can effectively avoid explosion or gas leakage. Specifically, through the cooperation of the cavity, the pushing component and the pressure relief component, the gas in the liner can be partially input into the cavity when the pressure increases to reduce the internal pressure, avoiding explosion or gas leakage due to excessive pressure.

[0016] 2: The safety cylinder has the advantage of timely sounding the alarm and recording the capacity of the pressure relief gas during the pressure relief process, which is convenient for the staff to promptly investigate and deal with the problem. Specifically, through the cooperation of the exhaust component and the pressure relief component, the squeezing effect of the protective airbag can be used to drive the alarm processing and recording operation during the pressure relief process, thereby realizing automatic alarm and data recording.

[0017] 3: The safety cylinder has the advantages of stability, strong shock absorption and good effect, which can greatly reduce the impact of external shaking on the internal stored gas. Specifically, through the cooperation of the cavity and the protective airbag, it can provide sufficient buffering between the outer shell and the inner liner when the safety cylinder is used normally, thereby reducing the impact of the outer shell on the inner liner when it is hit or shaken.

[0018] To sum up, the safety cylinder of the present invention has good shock absorption effect and strong stability. It can automatically perform pressure relief when the internal pressure increases to avoid explosion or gas leakage. At the same time, during the pressure relief process, the pressure change in the cavity can be used to provide drive for alarm processing and recording operations, thereby realizing automatic alarm and data recording, which is convenient for staff to investigate and deal with problems in time, effectively ensuring safety and reliability, and greatly reducing the possibility of safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the structure of a safety cylinder for ion implantation gas storage proposed by the present invention; Figure 2 for Figure 1 Schematic diagram of structural decomposition; Figure 3 for Figure 2 A schematic diagram of the structure from another perspective; Figure 4 for Figure 1 A top view of Figure 5 for Figure 4 Schematic diagram of the three-dimensional structure of the AA surface in the middle; Figure 6 for Figure 5 A schematic diagram of the structure of part a in the middle is enlarged; Figure 7 for Figure 5 The enlarged schematic diagram of the structure of part b; Figure 8 for Figure 3 An enlarged schematic diagram of the structure at the middle connecting rod; Fig. 9 for Figure 8 An exploded and enlarged schematic diagram of the structure at one of the rotating plates; Fig.10 for Figure 1 An enlarged schematic diagram of the structure at the middle fixed plate; Fig.11 for Fig.10 An enlarged schematic diagram of the structure at the transfer rod from another perspective; Fig.12 It is a structural schematic diagram of embodiment 1; Fig.13 for Fig.12 An enlarged schematic diagram of the structure at the middle mounting seat.

[0020] In the figure: 1. Shell; 2. Inner liner; 3. Pressure reducing valve; 4. Adjusting handle; 5. Cavity; 6. Protective airbag; 7. Exhaust pipe; 8. Exhaust pipe; 9. Exhaust hole; 10. Connecting rod; 11. Sealing valve; 12. Moving plate; 13. Spring 1; 14. Fixed rod; 15. Rotating plate; 16. Fixed ring; 17. Pressure relief hole; 18. Rotating rod; 19. Fixed gear; 20. Support rod; 21. Fixed rack; 22. Protective cover ; 23. Sliding valve; 24. Exhaust hole; 25. Sliding block; 26. Slide groove; 27. Spring 2; 28. Fan; 29. ​​Mounting rod; 30. Rotating shaft; 31. Knocking rod; 32. Fixed plate; 33. Fixed gear ring; 34. Transmission gear; 35. Screw; 36. Indicator needle; 37. Scale line; 38. Recessed groove; 39. Long rod; 40. Mounting seat; 41. Servo motor; 42. Telescopic rod; 43. Sleeve. DETAILED DESCRIPTION

[0021] Reference Figure 1 A safety cylinder for storing ion implantation gas comprises a shell 1 fixedly mounted on the outside of an inner liner 2, wherein the inner liner 2 is used to store the ion implantation gas, and the ion implantation gas is dangerous goods such as germanium tetrafluoride and boron trifluoride commonly used in ion implantation in the semiconductor field. In order to reduce the mass of the inner liner 2 and improve the safety, it can be divided into an inner and outer layer, wherein the inner layer is made of carbon fiber material, and at the same time, silicone resin and other non-conductive materials are added during the manufacturing process of the carbon fiber material to enhance its mechanical properties and make it non-conductive. At the same time, in order to improve the safety of the cylinder when storing ion implantation gas, the outer layer of the inner liner 2 is made of insulation material, and a certain amount of adsorption material such as carbon can be placed inside the inner liner 2. Granular carbon blocks, etc., the outer shell 1 can also be divided into two layers, the inner layer of which is made of thermal insulation material, and the outer layer is made of high-strength metal material to improve the strength of the cylinder and reduce the heat exchange between the inner liner 2 and the outside world. Since the storage temperature of germanium tetrafluoride and boron trifluoride is relatively low, reducing the heat exchange with the outside world can better maintain the problem of the inner liner 2 temperature rising during transportation and storage of the cylinder, causing germanium tetrafluoride and boron trifluoride to vaporize and increase the pressure of the inner liner 2 to cause explosion. An indented groove 38 is provided at the bottom of the outer shell 1. The design of the indented groove 38 can improve the stability of the placement of the outer shell 1. A protective sleeve 22 is threadedly installed on the inner liner 2. The design of the protective sleeve 22 can avoid the problem of the adjustment handle 4 being accidentally touched when the cylinder is transported or stored.

[0022] Reference Figure 1 - Fig.11A safety cylinder for storing ion-implanted gas also includes a pressure reducing valve 3, which is used to reduce the pressure of the ion-implanted gas discharged from the inner tank 2. The pressure reducing valve 3 is fixedly installed on the top of the inner tank 2, and an adjusting handle 4 is rotatably installed on the pressure reducing valve 3. The adjusting handle 4 is used to control the switch of the pressure reducing valve 3. When the ion-implanted gas needs to be discharged, the external connecting pipe is first installed on the gas outlet of the pressure reducing valve 3, and then the adjusting handle 4 is rotated to adjust the outlet pressure to perform exhaust treatment.

[0023] Cavity 5, cavity 5 is located between the outer shell 1 and the liner 2, and a protective airbag 6 is fixedly installed at one end of the cavity 5 close to the outer shell 1, and the protective airbag 6 is filled with protective gas. The design of cavity 5 allows a buffer space to exist between the liner 2 and the outer shell 1. At the same time, the design of the protective airbag 6 further buffers the outer shell 1 and the liner 2, making the cylinder more stable during transportation and avoiding explosion or leakage caused by changes in the internal pressure of the liner 2 due to impact or shaking.

[0024] The air outlet pipe 8 is fixedly connected to the bottom of the pressure reducing valve 3, and a sealing valve 11 is slidably installed in the air outlet pipe 8. The air outlet pipe 8 is used to discharge the internal gas of the liner 2 through the pressure reducing valve 3. Two air outlet holes 9 are provided on the air outlet pipe 8, and the sealing valve 11 corresponds to the position of the two air outlet holes 9. A connecting rod 10 is installed between the sealing valve 11 and the adjusting handle 4. The air outlet hole 9 can adopt a membrane isolation technology or a capillary or microporous filter technology to allow only the gas phase to pass through during exhaust and prevent the liquid phase from entering. By rotating the adjusting handle 4, the connecting rod 10 drives the sealing valve 11 to slide up and down in the air outlet pipe 8. When the sealing valve 11 is at the bottom, it blocks the two air outlet holes 9. At this time, the ion-injected gas cannot enter the air outlet pipe 8. The inner diameter of the middle part of the air outlet pipe 8 is larger than the diameter of the sealing valve 11, and the height of the middle part of the air outlet pipe 8 is larger than the height of the sealing valve 11 (such as Figure 6 As shown in the figure), when the sealing valve 11 enters the middle of the outlet pipe 8, the ion-implanted gas can enter the outlet pipe 8 through the outlet hole 9 and be discharged through the pressure reducing valve 3.

[0025] A push assembly is installed in the air outlet pipe 8, and two pressure relief assemblies matched with the push assembly are installed on the inner liner 2. The pressure relief assembly is used to allow the ion injection gas to enter the cavity 5 when the internal pressure of the inner liner 2 increases. The pressure relief assembly consists of an alignment hole, a mounting groove, a rotating plate 15, a fixing ring 16, a pressure relief hole 17, a rotating rod 18 and a fixed gear 19. The alignment hole is opened on the outer wall of the inner liner 2, the mounting groove is opened on the inner wall of the inner liner 2, and the mounting groove and the alignment hole are interconnected. The rotating plate 15 is sealed and rotatably installed in the mounting groove through the fixing ring 16. The pressure relief hole 17 is opened on the rotating plate 15, and the pressure relief hole 17 matches the alignment hole. The fixed gear 19 is fixedly mounted on the side wall of the rotating plate 15 at one end away from the outer shell 1 through the rotating rod 18. The initial position of the rotating plate 15 in the inner liner 2 is that the pressure relief hole 17 and the alignment hole are staggered. At this time, the existence of the rotating plate 15 blocks the alignment hole, and the inner liner 2 and the cavity 5 are in a sealed state. When the rotating rod 18 rotates to drive the rotating plate 15 to rotate so that the pressure relief hole 17 and the alignment hole are relative to each other, the internal gas of the inner liner 2 can enter the cavity 5 through the pressure relief hole 17, which is used to perform a certain pressure relief treatment when the internal pressure of the inner liner 2 increases, thereby reducing the possibility of explosion and gas leakage of the cylinder and improving safety.

[0026] The pushing assembly is composed of a moving plate 12, a spring 13, a fixed rod 14, a support rod 20 and two fixed racks 21. The moving plate 12 is sealed and slidably installed in the air outlet pipe 8. The spring 13 is installed between the bottom of the moving plate 12 and the air outlet pipe 8. The fixed rod 14 is fixedly installed at the bottom of the moving plate 12, and the fixed rod 14 is sealed and slidably connected to the air outlet pipe 8. The two fixed racks 21 are fixedly installed at the bottom of the fixed rod 14 through the support rod 20, and the two fixed racks 21 are respectively meshed with the two fixed gears 19. The two air outlet holes 9 are Located above the movable plate 12, when the gas cylinder is used to discharge gas, if the regulating handle 4 is not closed or the regulating handle 4 is loose, an independent valve is generally provided on the external pipeline during exhaust treatment. After the exhaust is completed, the valve on the external pipeline is often closed but the pressure reducing valve 3 is not closed or the regulating handle 4 is not tightened. At this time, the sealing valve 11 will be partially located above the air outlet 9, and part of the gas in the liner 2 enters the air outlet pipe 8 through the air outlet 9 and is located below the sealing valve 11. At this time, the pressure at the bottom of the air outlet pipe 8 increases. The movable plate 12 overcomes the elastic force of the spring 13 and moves downward, and drives the two fixed gears 19 to rotate through the two fixed racks 21, so that the pressure relief holes 17 on the two rotating plates 15 are opposite to the corresponding alignment holes. At this time, the gas in the liner 2 can enter the cavity 5 through the alignment holes, and the continuous pressure relief leads to excessive pressure in the cavity 5. The length of the fixed rack 21 is set to be equal to the circumference of the fixed gear 19, and the moving distance of the movable plate 12 is equal to the length of the fixed rack 21. Then, the movement of the movable plate 12 drives the rotating plate 15 to rotate one circle, so that the pressure relief hole 17 finally returns to the initial position to keep the alignment hole closed, thereby avoiding the problem of excessive pressure inside the cavity 5 caused by continuous pressure relief. At the same time, in order to avoid the problem that the alignment hole is opened again during the resetting process of the movable plate 12 after the pressure relief is completed, a one-way bearing can be set between the rotating rod 18 and the fixed gear 19, so that the fixed gear 19 can only drive the rotating plate 15 to rotate when the fixed rack 21 moves downward, so that the problem of ion injection gas entering the cavity 5 again during the resetting process of the movable plate 12 can be avoided.

[0027] In order to further improve the safety of the cylinder, a T-shaped airway is provided on the sealing valve 11, and a pressure relief valve is provided at the bottom of the airway near the movable plate 12. Therefore, when external interference factors cause the pressure in the inner liner 2 to increase, the ion-injected gas can enter between the sealing valve 11 and the movable plate 12 through the airway, and then the movable plate 12 is moved downward by the air pressure for pressure relief.

[0028] An exhaust pipe 7 connected to the protective airbag 6 is fixedly mounted on the side wall of the housing 1, and an exhaust assembly is mounted on the exhaust pipe 7. The exhaust assembly consists of a sliding valve 23, an exhaust hole 24, a mounting rod 29, a fan 28, a rotating shaft 30, a knocking rod 31 and a fixed gear ring 33. The sliding valve 23 is sealed and slidably mounted in the exhaust pipe 7. Two sliders 25 are fixedly mounted on the side wall of the sliding valve 23. Two slide grooves 26 that slidably cooperate with the two sliders 25 are opened on the inner wall of the exhaust pipe 7, and springs 27 are installed between the two slide grooves 26 and the two sliders 25. The exhaust hole 24 is T-shaped and opened on the sliding valve 23. The mounting rod 29 is fixedly mounted on the end of the exhaust pipe 7 away from the sliding valve 23. The rotating shaft 30 is rotatably mounted on the mounting rod 29. The fan 28 is fixedly mounted on the rotating shaft 30. The knocking rod 31 is fixedly mounted on the side wall of the rotating shaft 30 at one end outside the exhaust pipe 7. The fixed gear ring 33 is fixedly mounted on the end of the rotating shaft 30 away from the mounting rod 29. The rotating shaft 30 is composed of two parts. The diameter of the part close to the mounting rod 29 is smaller than the inner diameter of the exhaust hole 24. The part away from the mounting rod 29 is rotatably and slidingly sealed with the sliding valve 23. When the ion injection gas enters the cavity 5, the protective airbag 6 is squeezed, and the protective gas therein pushes the sliding valve 23 to move it to the outside of the exhaust pipe 7. After the exhaust pipe 7 moves a certain distance, the exhaust hole 24 is located outside the exhaust pipe 7. At this time, the protective gas is discharged from the exhaust pipe 7. The airflow causes the fan 28 to drive the rotating shaft 30 to rotate, so that the fixed gear ring 33 rotates at the same time.

[0029] The outer shell 1 is provided with a warning component matched with the exhaust component. The warning component is used to sound an alarm when the internal pressure of the inner tank 2 increases and record the gas volume entering the cavity 5. The warning component is composed of a fixed plate 32, an alarm bell, a transmission gear 34, a screw 35, an indicator needle 36 and a scale line 37. The fixed plate 32 is fixedly mounted on the side wall of the outer shell 1, and the alarm bell is fixedly mounted on the fixed plate 32, and the position of the alarm bell corresponds to the knocking rod 31. When the rotating shaft 30 rotates, the alarm bell is knocked by the knocking rod 31, and an alarm signal can be issued in real time to remind the staff that the internal air pressure of the cylinder is unstable, so that the staff can timely investigate and deal with the problem and reduce the possibility of safety accidents. The lead screw 35 is rotatably mounted on the fixed plate 32, the transmission gear 34 is fixedly mounted on the lead screw 35, and the transmission gear 34 is meshed with the fixed gear ring 33, the indicator needle 36 is threadedly mounted on the lead screw 35, the scale line 37 is fixedly mounted on the fixed plate 32, and the scale line 37 cooperates with the indicator needle 36. When the rotating shaft 30 rotates, the fixed gear ring 33 drives the transmission gear 34 to rotate at the same time. At this time, the lead screw 35 causes the indicator needle 36 to move synchronously on the fixed plate 32, so that the staff can subsequently know the content of the ion injection gas entering the cavity 5 according to the position of the indicator needle 36 relative to the scale line 37.

[0030] Embodiment 1, refer to Fig.12 - Fig.13 A mounting seat 40 is fixedly mounted on the upper surface of the inner tank 2 through a plurality of long rods 39, and a servo motor 41 is fixedly mounted on the mounting seat 40, a telescopic rod 42 is fixedly connected to the output end of the servo motor 41, and a sleeve 43 matching the adjusting handle 4 is fixedly mounted on the bottom of the telescopic rod 42. The switch of the pressure reducing valve 3 is controlled by the operation of the servo motor 41, and no manual control is required, which can avoid the problem that the pressure reducing valve 3 is not closed in time or is not closed in place due to manual operation errors.

[0031] A trigger rod is fixedly installed on the rotating shaft 30, and a trigger switch corresponding to the position of the trigger rod is fixedly installed on the fixed plate 32, and the trigger switch is electrically connected to the servo motor 41. Through the cooperation of the trigger switch and the trigger rod, when the pressure of the inner tank 2 increases and the pressure is released and exhausted, the rotation of the rotating shaft 30 can be used to make the servo motor 41 run, and the adjusting handle 4 can be tightened to avoid leakage or explosion caused by the pressure reducing valve 3 not being closed properly.

[0032] The servo motor 41 and the touch switch are both existing products, and their working principles and specific structures are not described here.

[0033] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A safety cylinder for storing ion implantation gas, comprising a shell (1) fixedly mounted on the outside of an inner liner (2), characterized in that: Also includes: A pressure reducing valve (3), the pressure reducing valve (3) being used to reduce the pressure of the ion implantation gas discharged from the inner tank (2), the pressure reducing valve (3) being fixedly mounted on the top of the inner tank (2), and an adjusting handle (4) being rotatably mounted on the pressure reducing valve (3), the adjusting handle (4) being used to control the switch of the pressure reducing valve (3); A cavity (5), the cavity (5) being located between the outer shell (1) and the inner liner (2), and a protective airbag (6) being fixedly mounted at one end of the cavity (5) close to the outer shell (1), the protective airbag (6) being filled with protective gas, the protective airbag (6) being used to release the protective gas when the internal pressure of the inner liner (2) increases so that the ion-injected gas in the inner liner (2) enters the cavity (5), an exhaust pipe (7) being fixedly mounted on the side wall of the outer shell (1) and being connected to the protective airbag (6), and an exhaust assembly being mounted on the exhaust pipe (7), and a warning assembly cooperating with the exhaust assembly being mounted on the outer shell (1), the warning assembly being used to sound an alarm when the internal pressure of the inner liner (2) increases and to record the volume of gas entering the cavity (5); An air outlet pipe (8) is fixedly connected to the bottom of the pressure reducing valve (3), a sealing valve (11) is slidably mounted in the air outlet pipe (8), a pushing assembly is mounted in the air outlet pipe (8), and two pressure relief assemblies cooperating with the pushing assembly are mounted on the inner liner (2), the pressure relief assemblies are used to allow the ion injection gas to enter the cavity (5) when the internal pressure of the inner liner (2) increases.

2. A safety cylinder for ion implantation gas storage according to claim 1, characterized in that: The pressure relief assembly comprises an alignment hole, a mounting groove, a rotating plate (15), a fixing ring (16), a pressure relief hole (17), a rotating rod (18) and a fixed gear (19); the alignment hole is formed on the outer wall of the inner liner (2); the mounting groove is formed on the inner wall of the inner liner (2); the mounting groove and the alignment hole are interconnected; the rotating plate (15) is sealed and rotatably mounted in the mounting groove via the fixing ring (16); the pressure relief hole (17) is formed on the rotating plate (15); the pressure relief hole (17) matches the alignment hole; and the fixed gear (19) is fixedly mounted on the side wall of the rotating plate (15) at one end away from the outer shell (1) via the rotating rod (18).

3. A safety cylinder for ion implantation gas storage according to claim 2, characterized in that: The pushing assembly is composed of a moving plate (12), a spring one (13), a fixed rod (14), a support rod (20) and two fixed racks (21); the moving plate (12) is sealingly slidably mounted in the air outlet pipe (8); the spring one (13) is mounted between the bottom of the moving plate (12) and the air outlet pipe (8); the fixed rod (14) is fixedly mounted on the bottom of the moving plate (12), and the fixed rod (14) is sealingly slidably connected to the air outlet pipe (8); the two fixed racks (21) are fixedly mounted on the bottom of the fixed rod (14) via the support rod (20), and the two fixed racks (21) are respectively meshed with two fixed gears (19).

4. A safety cylinder for ion implantation gas storage according to claim 3, characterized in that: The air outlet pipe (8) is provided with two air outlet holes (9), and the two air outlet holes (9) are both located above the movable plate (12). The sealing valve (11) corresponds to the positions of the two air outlet holes (9), and a connecting rod (10) is installed between the sealing valve (11) and the regulating handle (4).

5. The safety cylinder for ion implantation gas storage according to claim 1, characterized in that: The exhaust assembly comprises a sliding valve (23), an exhaust hole (24), a mounting rod (29), a fan (28), a rotating shaft (30), a knocking rod (31) and a fixed gear ring (33); the sliding valve (23) is sealingly and slidably mounted in the exhaust pipe (7); the exhaust hole (24) is T-shaped and opened on the sliding valve (23); the mounting rod (29) is fixedly mounted on an end of the exhaust pipe (7) away from the sliding valve (23); the rotating shaft (30) is rotatably mounted on the mounting rod (29); the fan (28) is fixedly mounted on the rotating shaft (30); the knocking rod (31) is fixedly mounted on a side wall of an end of the rotating shaft (30) located outside the exhaust pipe (7); and the fixed gear ring (33) is fixedly mounted on an end of the rotating shaft (30) away from the mounting rod (29).

6. A safety cylinder for storing ion implantation gas according to claim 5, characterized in that: Two sliding blocks (25) are fixedly mounted on the side wall of the sliding valve (23), two sliding grooves (26) slidably matched with the two sliding blocks (25) are formed on the inner wall of the exhaust pipe (7), and springs (27) are mounted between the two sliding grooves (26) and the two sliding blocks (25).

7. The safety cylinder for ion implantation gas storage according to claim 5, characterized in that: The warning assembly comprises a fixed plate (32), an alarm bell, a transmission gear (34), a screw rod (35), an indicator needle (36) and a scale line (37); the fixed plate (32) is fixedly mounted on the side wall of the housing (1); the alarm bell is fixedly mounted on the fixed plate (32), and the alarm bell corresponds to the position of the knocking rod (31); the screw rod (35) is rotatably mounted on the fixed plate (32); the transmission gear (34) is fixedly mounted on the screw rod (35), and the transmission gear (34) is meshed with the fixed gear ring (33); the indicator needle (36) is threadedly mounted on the screw rod (35); the scale line (37) is fixedly mounted on the fixed plate (32), and the scale line (37) matches the indicator needle (36).

8. A safety cylinder for storing ion implantation gas according to claim 7, characterized in that: The bottom of the outer shell (1) is provided with an inwardly recessed groove (38), and a protective sleeve (22) is threadedly mounted on the inner liner (2).

9. The safety cylinder for storing ion implantation gas according to claim 7, characterized in that: A mounting seat (40) is fixedly mounted on the upper surface of the inner container (2) via a plurality of long rods (39), and a servo motor (41) is fixedly mounted on the mounting seat (40); an output end of the servo motor (41) is fixedly connected to a telescopic rod (42), and a sleeve (43) matching the adjustment handle (4) is fixedly mounted on the bottom of the telescopic rod (42).

10. A safety cylinder for storing ion implantation gas according to claim 9, characterized in that: A trigger rod is fixedly mounted on the rotating shaft (30), a trigger switch corresponding to the position of the trigger rod is fixedly mounted on the fixing plate (32), and the trigger switch is electrically connected to the servo motor (41).

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