Electrostatic discharge radiation electric field measuring device and method based on pulsed electric field probe

Abstract

The invention relates to the technical field of electrostatic discharge radiation electric field measurement, and discloses an electrostatic discharge radiation electric field measurement device and method based on a pulsed electric field probe. The current target is embedded in the middle of the metal plate and is used for performing contact discharge with a discharge electrode of the electrostatic discharge generator to be tested; the pulsed electric field probe is used for collecting an electric signal of a space electric field at a preset position on the same side of the metal plate as the discharge electrode, converting the collected electric signal into an optical signal, and transmitting the optical signal to the receiving module through a signal optical fiber; the receiving module is used for converting the optical signal transmitted by the signal optical fiber into an electric signal and inputting the electric signal into an oscilloscope; according to the ESD radiation electric field measurement system and method, the accuracy of measurement of the ESD radiation electric field is improved, and the measurement problem of the ESD radiation electric field is solved.

Description

Technical Field

[0001] The invention relates to the technical field of electrostatic discharge radiation electric field measurement, and in particular to an electrostatic discharge radiation electric field measurement device and method based on a pulse electric field probe. Background Art

[0002] With the rapid development of microelectronics technology and device processes, the integration of various microelectronic devices has been greatly improved. However, the insulating dielectric layer in the circuit is getting thinner and thinner, and the width and spacing of the interconnecting wires are getting smaller and smaller, which increases the electromagnetic sensitivity of electronic equipment and reduces its overvoltage resistance. The circuit is also becoming more and more sensitive to various electromagnetic interference. Electrostatic discharge (ESD) is one of the most common natural interference sources. It is also the most basic test item in the EMC field, with the most application scenarios and the most complex influencing factors. It is potentially destructive to electronic equipment.

[0003] In order to seek the reliability and consistency of ESD test results, the relevant standards put forward unified requirements for the electrostatic discharge current parameters and voltage parameters of the ESD simulator, but do not standardize the ESD radiation field parameters. In fact, the ESD radiation field is a very important part of the electrostatic discharge process. The reason for the reproducibility problem is now considered to be the radiation electric field generated by the generator when the electrostatic discharge is applied to the device under test. During the discharge of the ESD generator, the rising current at the discharge point will cause the radiation electric field. At the same time, other events will generate undesirable radiation electric fields inside the generator. The increased high-frequency components of the radiation electric field exceed the high-frequency components of the radiation electric field generated by the equivalent human-to-metal discharge with the same current rise time and peak value at the discharge point. If the radiation point field of the ESD generator is not accurately and effectively measured, the performance of the ESD generator cannot be well unified. The result is that the failure events in the ESD test are highly dependent on the specific generator used, and the reliability and consistency of the test results are poor, which ultimately leads to frequent accidents. Therefore, it is very necessary to achieve accurate and reliable measurement of the ESD radiation electric field and standardize its limit values ​​as soon as possible.

[0004] At present, when performing performance tests on electrostatic discharge generators, only the parameters of discharge current and voltage are focused on. Most of the test research on electrostatic discharge radiation field is still at the simulation stage and only targets specific types of electrostatic discharge generators, and cannot accurately measure the radiation electric field of the electrostatic discharge generator. Summary of the invention

[0005] In view of this, the present invention provides an electrostatic discharge radiation electric field measurement device and method based on a pulse electric field probe to solve or partially solve the technical problem that the prior art cannot accurately measure the radiation electric field of an electrostatic discharge generator.

[0006] The technical solution proposed by the present invention is as follows:

[0007] The first aspect of the present invention provides an electrostatic discharge radiation electric field measurement device based on a pulse electric field probe, comprising: a metal plate; a current target, embedded in the middle of the metal plate, the target center of the current target serving as a discharge reference point, for contact discharge with a discharge electrode of an electrostatic discharge generator to be measured; a pulse electric field probe, for collecting an electric signal of a spatial electric field at a preset position on the same side of the metal plate as the discharge electrode, converting the collected electric signal into an optical signal, and transmitting the optical signal to a receiving module via a signal optical fiber; the receiving module, for converting the optical signal transmitted by the signal optical fiber into an electric signal and inputting the optical signal into an oscilloscope; the oscilloscope, for generating and outputting a waveform of the electrostatic discharge radiation electric field according to the electric signal input by the receiving module.

[0008] Optionally, the pulse electric field probe includes a receiving antenna and a fixing part, one end of the receiving antenna is connected to the signal optical fiber, and the other end passes through the fixing part and is fixed by the fixing part.

[0009] Optionally, the receiving antenna is a monopole antenna with an integration circuit at the rear end.

[0010] Optionally, the surface of the metal plate is provided with an absorbing material for reducing reflection of electromagnetic waves.

[0011] Optionally, the preset position is located in the same plane as the center of the current target, 10 cm away from the contact discharge center point, and the height of the preset position is the same as the contact discharge center point.

[0012] Optionally, the electrostatic discharge radiation electric field measuring device based on the pulse electric field probe further includes: a fixture for moving and fixing the pulse electric field probe.

[0013] Optionally, the electrostatic discharge radiation electric field measurement device based on the pulse electric field probe also includes: an attenuator, which is used to collect the electrical signal at the contact position between the current target and the discharge electrode, and output the electrical signal to the oscilloscope after attenuation, and the oscilloscope generates and outputs a reference waveform based on the attenuated electrical signal.

[0014] Optionally, the receiving module is a photoelectric converter.

[0015] The second aspect of the present invention provides an electrostatic discharge radiation electric field measurement method based on a pulse electric field probe, which is applied to an electrostatic discharge radiation electric field measurement device based on a pulse electric field probe as described in any one of the first aspect of the present invention, including: fixing the pulse electric field probe at a preset position, and the antenna polarization direction is consistent with the current direction; setting the electrostatic discharge generator to be tested to a contact discharge mode, and setting the electrostatic discharge generator to be tested to several levels of voltage respectively, and performing several contact discharges on the discharge electrode and current target of the electrostatic discharge generator to be tested at each voltage level; using the pulse electric field probe to collect electrical signals of the spatial electric field at a preset position at each voltage level, converting the collected electrical signals into optical signals, and transmitting the optical signals to a receiving module through a signal optical fiber, converting the optical signals transmitted by the signal optical fiber into electrical signals through the receiving module and then inputting them into an oscilloscope, and using the oscilloscope to generate and output a waveform of the electrostatic discharge radiation electric field according to the electrical signals input by the receiving module; using a time domain analysis algorithm to process the waveform of the electrostatic discharge radiation electric field to obtain waveform parameters of the radiation electric field.

[0016] Optionally, the waveform parameters include key parameters, characteristic points and statistics. Correspondingly, the waveform of the electrostatic discharge radiation electric field is processed using a time domain analysis algorithm to obtain the waveform parameters of the radiation electric field, including: using a time domain analysis algorithm to process the waveform of the electrostatic discharge radiation electric field, extracting key parameters of the waveform of the electrostatic discharge radiation electric field and identifying characteristic points; performing statistical analysis on the key parameters and the characteristic points based on multiple waveform measurement results to obtain corresponding statistics.

[0017] It can be seen from the above technical solutions that the present invention has the following advantages:

[0018] The present invention provides an electrostatic discharge radiation electric field measurement device and method based on a pulse electric field probe. By embedding a current target in the middle of the metal plate, the discharge electrode of the electrostatic discharge generator to be measured and the current target perform contact discharge, which can shield the influence of the space electric field on the receiving device. The pulse electric field probe converts the collected electrical signal into an optical signal, and transmits the optical signal to the receiving module through the signal optical fiber. The receiving module then converts the optical signal into an electrical signal and generates and outputs the waveform of the electrostatic discharge radiation electric field in the oscilloscope, avoiding the influence of external electromagnetic interference on the measurement result, effectively reducing the noise interference in the test circuit, thereby improving the accuracy of the electrostatic discharge radiation electric field measurement, and solving the measurement problem of the ESD radiation electric field. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly express the technical solutions of the embodiments of the present invention, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 Schematic diagram of the structure of an electrostatic discharge radiation electric field measuring device based on a pulse electric field probe in an embodiment of the present invention;

[0021] Figure 2 The present invention is a flowchart of a method for measuring an electrostatic discharge radiation electric field based on a pulse electric field probe in an embodiment of the present invention. DETAILED DESCRIPTION

[0022] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "up", "down", "left", "right", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can also be the internal connection of two components, it can be a wireless connection, or it can be a wired connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0026] Electrostatic Discharge (ESD) generator can simulate electrostatic discharge phenomena in the real world, including electrostatic discharge from human body to objects and between objects, so as to test the immunity and reliability of electronic equipment when subjected to external electrostatic discharge. In the embodiment of the present invention, the ESD generator is mainly used as a pulse electric field generating device to generate a pulse electric field signal.

[0027] At present, the radiation electric field of the ESD generator cannot be accurately measured. Based on this, the embodiments of the present invention provide an electrostatic discharge radiation electric field measurement device and method based on a pulse electric field probe, which fills the gap in this field, solves the measurement problem of the ESD radiation electric field, and can accurately measure the peak value and rise time of the ESD radiation electric field.

[0028] The embodiment of the present invention provides an electrostatic discharge radiation electric field measurement device based on a pulse electric field probe, such as Figure 1 As shown, the device comprises:

[0029] A metal plate; a current target, which is embedded in the middle of the metal plate, and the center of the current target is used as a discharge reference point for contact discharge with the discharge electrode of the electrostatic discharge generator to be tested; a pulse electric field probe, which is used to collect the electric signal of the spatial electric field at a preset position on the same side of the metal plate as the discharge electrode, convert the collected electric signal into an optical signal, and transmit the optical signal to a receiving module through a signal optical fiber; a receiving module, which is used to convert the optical signal transmitted by the signal optical fiber into an electric signal and then input it into an oscilloscope; an oscilloscope, which is used to generate and output the waveform of the electrostatic discharge radiation electric field according to the electric signal input by the receiving module.

[0030] Specifically, the metal plate is vertically arranged and has a large area to shield the influence of the space electric field, and is used to prevent the influence of the radiated electric field on the receiving device such as the oscilloscope and the transmission line. The function of the metal plate is mainly to prevent the oscilloscope from being interfered by the electric field radiation when receiving the signal. The metal plate is a rectangle of 1.5m×1.5m, the metal plate is a steel plate, and the center of the current target is brass.

[0031] The current target is installed in the center of the metal plate. The current target serves as a discharge reference point. It clearly identifies the location where the electrostatic discharge occurs, so that the test results have clear spatial directivity. This is essential for analyzing the radiated electric field of electrostatic discharge. By using a standardized discharge target as a reference point, consistency and comparability between different tests can be ensured. This helps to establish a unified test standard and evaluation system.

[0032] The discharge electrode of the electrostatic discharge generator is the output end of the ESD gun. When contact discharge is performed, the output end of the ESD gun contacts the current target. Preferably, the point of contact discharge is the center of the current target. The grounding wire of the electrostatic discharge generator is connected to the terminal at the bottom center of the current target plane 0.5m below the current target. The discharge electrode of the electrostatic discharge generator should be perpendicular to the current target plane.

[0033] The pulse electric field probe is connected to the receiving module through the signal optical fiber, and the pulse electric field probe can be freely moved on the metal plate plane by connecting the signal optical fiber. In addition, the pulse electric field probe can be fixed by a special fixture to ensure that the distance, angle and other parameters between the probe and the discharge point of the electrostatic discharge generator meet the test requirements.

[0034] The pulse electric field probe collects the electric signal of the spatial electric field at the preset position, converts the collected electric signal into an optical signal, and transmits the optical signal to the receiving module through the signal optical fiber. In one example, the preset position is located in the same plane as the center of the current target, 10 cm away from the center of the contact discharge, and the height of the preset position is the same as the center of the contact discharge.

[0035] Specifically, the receiving module is a photoelectric converter, which converts the optical signal transmitted by the signal optical fiber into an electrical signal and then inputs it into a 3GHz bandwidth oscilloscope. The oscilloscope extracts the waveform of the ESD radiation electric field based on the electrical signal input by the receiving module and displays it.

[0036] After obtaining the wavelength, the key parameters such as the electric field peak value and rise time can be obtained based on the generated waveform based on the time domain analysis algorithm. According to the electric field waveform collected by the oscilloscope, the peak voltage value is recorded, and the electric field peak value is obtained by multiplying the voltage value by the electric field probe transmission coefficient. The interval time from 10% to 90% of the peak value is recorded as the rise time.

[0037] In addition, time domain analysis can be used to identify characteristic points in the three-dimensional electric field waveform, such as the starting point and peak point of the waveform, for further analysis.

[0038] Statistical analysis is performed on multiple measurement results to calculate statistical quantities such as the mean value, standard deviation, three-dimensional electric field components, and the modulus of the synthetic total electric field to evaluate the stability and reliability of the measurement results.

[0039] An electrostatic discharge radiation electric field measuring device based on a pulse electric field probe in an embodiment of the present invention, by embedding a current target in the middle of a metal plate, the discharge electrode of an electrostatic discharge generator to be tested and the current target perform contact discharge, thereby shielding the influence of the space electric field on the receiving device. The pulse electric field probe converts the collected electrical signal into an optical signal, and transmits the optical signal to the receiving module through a signal optical fiber. The receiving module then converts the optical signal into an electrical signal and generates and outputs a waveform of the electrostatic discharge radiation electric field in an oscilloscope, thereby avoiding the influence of external electromagnetic interference on the measurement result, effectively reducing noise interference in the test circuit, thereby improving the accuracy of the electrostatic discharge radiation electric field measurement, and solving the measurement problem of the ESD radiation electric field.

[0040] In some embodiments, the pulse electric field probe includes a receiving antenna and a fixing portion, one end of the receiving antenna is connected to the signal optical fiber, and the other end passes through the fixing portion and is fixed by the fixing portion.

[0041] The receiving antenna and the fixing part can be integrally formed or detachably arranged. The fixing part is a rectangular block made of plastic material, and a through hole is provided in the middle for the receiving antenna to pass through. The receiving antenna adopts a monopole antenna, and its rear end is a monopole antenna with an integrating circuit. A high-performance monopole antenna is used as an electric field receiving element. The antenna has the characteristics of wide bandwidth, high sensitivity, and large dynamic range, and can accurately capture the transient changes of the ESD radiation electric field. In one example, its length is designed to be 2.85mm and its diameter is 1.20mm. The rear end uses absorbing materials to reduce electromagnetic wave reflection interference. Set a suitable sampling rate and resolution for the pulse electric field probe to capture the transient changes of the x, y, and z axes of the ESD radiation electric field. During the acquisition process, the test environment needs to be kept stable to avoid the influence of external electromagnetic interference on the measurement results.

[0042] Furthermore, the electrostatic discharge radiation electric field measuring device based on the pulse electric field probe also includes: a fixture for moving and fixing the pulse electric field probe.

[0043] The fixture can not only firmly fix the pulsed electric field probe to ensure the accuracy and stability during the measurement process, but also has the function of preventing electric field reflection, thereby greatly improving the quality and reliability of experimental data. At the same time, it provides the function of flexible adjustment of the probe position to meet the needs of different experimental scenarios. The following is a detailed description of the role of the pulsed electric field probe fixture:

[0044] 1. Fix the probe

[0045] The primary task of the fixture is to ensure that the pulsed electric field probe can remain stable in the measurement environment. Since pulsed electric fields are often accompanied by instantaneous high voltage and high current changes, the probe is prone to offset or shaking when subjected to these force fields, which in turn affects the accuracy of the measurement results. The fixture uses precise mechanical structure design, such as fasteners, fixture arms, and locking mechanisms, to achieve precise positioning and firm locking of the probe, and can maintain the probe's stability even in a strong electric field environment, thereby ensuring the accuracy and consistency of the measurement data.

[0046] 2. Prevent electric field reflection

[0047] In pulse electric field measurement, electric field reflection is a problem that needs to be avoided. When the electric field wave encounters a dielectric interface (such as the interface between air and probe material), reflection occurs, which may cause the measured electric field strength to deviate from the actual value and introduce errors. When designing the pulse electric field probe fixture, the electromagnetic compatibility of the material and the optimization of the structure are considered to reduce or eliminate the reflection of the electric field on the fixture surface, thereby protecting the authenticity of the measurement signal.

[0048] 3.Flexibly adjust the probe position

[0049] In order to meet the different requirements of probe position in different experimental scenarios, the pulse electric field probe fixture is also equipped with flexible position adjustment mechanisms. These mechanisms include sliding tracks, rotating joints, fine-tuning screws, etc., which can freely adjust the position, angle and height of the probe within a certain range to better align the measured electric field area or optimize the measurement layout. This flexibility not only improves the efficiency of the experiment, but also enhances the adaptability and flexibility of the measurement.

[0050] Fixing the pulse electric field probe with a clamp, preventing electric field reflection and combining flexible position adjustment functions provide an efficient, accurate and reliable solution for pulse electric field measurement.

[0051] In some embodiments, the surface of the metal plate is provided with an absorbing material for reducing reflection of electromagnetic waves.

[0052] The absorbing material can be a metal alloy absorbing material, a graphene absorbing material, etc. The absorbing material is used to make an absorbing component and it is installed on a metal plate to reduce the influence of electromagnetic wave reflection on the measurement of the electrostatic discharge radiation electric field and improve the measurement accuracy.

[0053] In some embodiments, the electrostatic discharge radiation electric field measurement device based on the pulse electric field probe also includes: an attenuator, which is used to collect the electrical signal at the contact position between the current target and the discharge electrode, and output the electrical signal to the oscilloscope after attenuation, and the oscilloscope generates and outputs a reference waveform according to the attenuated electrical signal.

[0054] Specifically, an electrical signal is collected from the center point of the current target on the side facing away from the discharge electrode through a cable, and the attenuator attenuates the electrical signal and then outputs it to an oscilloscope as a reference waveform.

[0055] The contact position between the current target and the discharge electrode is the center point of the current target. In the ESD test, it was found that metals of different materials have different distributed resistance and capacitance, resulting in different discharge currents, different electric field waveforms, and large differences in results. For consistency and subsequent comparison with the standard current waveform, the center of the current target is selected as the reference point of the discharge reference waveform. By comparing the reference waveform with the waveform of the electrostatic discharge radiation electric field at the preset position, the spatial variation of the electrostatic discharge radiation electric field can be understood.

[0056] The embodiment of the present invention further provides an electrostatic discharge radiation electric field measurement method based on a pulse electric field probe, which is applied to an electrostatic discharge radiation electric field measurement device based on a pulse electric field probe as in any of the above embodiments, such as Figure 2 As shown, the method comprises the following steps:

[0057] Step S201, fix the pulse electric field probe at a preset position, and the polarization direction of the antenna is consistent with the direction of the current;

[0058] Step S202, setting the electrostatic discharge generator to be tested to a contact discharge mode, and setting the electrostatic discharge generator to be tested to several voltage levels respectively, and performing contact discharge several times between the discharge electrode and the current target of the electrostatic discharge generator to be tested at each voltage level;

[0059] Step S203, collecting electric signals of the spatial electric field at a preset position at each voltage level by means of a pulse electric field probe, converting the collected electric signals into optical signals, and transmitting the optical signals to a receiving module through a signal optical fiber, converting the optical signals transmitted by the signal optical fiber into electric signals by means of the receiving module, and inputting the electric signals into an oscilloscope, and generating and outputting a waveform of the electrostatic discharge radiation electric field by means of the oscilloscope according to the electric signals input by the receiving module;

[0060] Step S204, using a time domain analysis algorithm to process the waveform of the electrostatic discharge radiation electric field to obtain waveform parameters of the radiation electric field.

[0061] Specifically, the test is carried out under the IEC platform. Since most ESD tests are generated by contact mode, considering the reproducibility, the discharge mode is selected as contact discharge, and the waveform of the radiated electric field is measured while measuring the current waveform at the contact point.

[0062] According to known parameters, the bandwidth required to test the ESD radiation electric field is 1GHz. Within this bandwidth, almost all energy signals are included. Since the distribution of the ESD radiation electric field is unknown, a monopole electric field probe with a test bandwidth of 1GHz is selected as the main measurement device. The approximate range of the peak value of the ESD radiation electric field intensity is determined through preliminary experiments. The measurement range of the probe is adjusted by adjusting the length of the signal light, thereby taking into account the dynamic range and measurement accuracy of the measurement. At the same time, optical fiber transmission technology is used to modulate the spatial electric field signal sensed by the receiving antenna at the front end of the pulse electric field probe, and the electrical signal is transmitted to the receiving module. The pulse electric field probe converts the electrical signal received from the antenna into an optical signal, which is then transmitted to the receiving module through the signal optical fiber. The receiving module then converts the optical signal into an electrical signal and outputs it to the oscilloscope for data recording. This method can effectively reduce noise interference in the test line.

[0063] When measuring the ESD electric field waveform, the main reasons for the difference in reproducibility test are the following two points:

[0064] 1) Discharge point reference point. In the early ESD test, it was found that different metal materials have different distributed resistance and capacitance, resulting in different discharge currents, different electric field waveforms, and large differences in results. For consistency and subsequent comparison with the standard current waveform, a fixed discharge reference point is selected. Specifically, the center of the current target is selected as the discharge reference point.

[0065] 2) Test location. Considering that the test distance in the reference event of human body metal electrostatic discharge radiation electric field given in Appendix D of IEC 61000-4-2 is 10cm, for the convenience of comparison, we determined that the test distance of the electric field is 10cm away from the center of the current target, and the height is consistent with the center of the target. At the same time, the top of the receiving antenna and the center of the current target are in the same reference plane. After a large number of experimental verifications, the accuracy and repeatability of the test results at this position can be guaranteed.

[0066] The polarization direction of the receiving antenna is parallel to the direction of the discharge current channel, and the electric field waveform triggered by the current target is used as the reference waveform.

[0067] The current target is installed in the center of the metal plane. The ground wire of the ESD generator should be connected to the terminal at the bottom center of the target plane 0.5m below the target. When performing contact discharge, the discharge electrode of the ESD generator should be perpendicular to the current target plane.

[0068] After determining the discharge point reference point and test position, use a fixture to fix the pulse electric field probe position, and connect the output end to the CH2 channel of the oscilloscope after connecting the signal optical fiber, receiving module and cable.

[0069] The ESD generator working mode is set to contact discharge mode, and the voltage is set to ±2kV, ±4kV, ±5kV, ±6kV, ±8kV respectively. The oscilloscope is set to the appropriate range and trigger mode to observe the complete waveform of the ESD radiation electric field. At each voltage level, 10 contact discharges are performed on the current target, and the average value is taken as the measurement result. At the same time, the radiation electric field waveform is recorded with an oscilloscope. The collected data is recorded in real time and stored in a computer or other storage device for subsequent data processing and analysis.

[0070] After obtaining the wavelength, the key parameters such as the electric field peak value and rise time can be obtained based on the generated waveform based on the time domain analysis algorithm. According to the electric field waveform collected by the oscilloscope, the peak voltage value is recorded, and the electric field peak value is obtained by multiplying the voltage value by the electric field probe transmission coefficient. The interval time from 10% to 90% of the peak value is recorded as the rise time. Thus, the waveform parameters such as the electric field peak value and rise time are obtained.

[0071] In some embodiments, the waveform parameters include key parameters, characteristic points and statistics. Correspondingly, in step S204, the waveform of the electrostatic discharge radiation electric field is processed using a time domain analysis algorithm to obtain the waveform parameters of the radiation electric field, including:

[0072] Step S2041, using a time domain analysis algorithm to process the waveform of the electrostatic discharge radiation electric field, extract key parameters of the waveform of the electrostatic discharge radiation electric field and identify feature points.

[0073] Step S2042: Perform statistical analysis on key parameters and characteristic points based on multiple waveform measurement results to obtain corresponding statistics.

[0074] Specifically, the waveform of the ESD radiation electric field is extracted from the collected signal data, and key parameters such as peak voltage and rise time are extracted based on the waveform.

[0075] Through time domain analysis, characteristic points in the three-dimensional electric field waveform, such as the starting point and peak point of the waveform, are identified for further analysis.

[0076] Statistical analysis is performed on multiple measurement results to calculate the mean value, standard deviation and three-dimensional electric field components of key parameters or characteristic points, and the modulus of the total electric field and other statistics to evaluate the stability and reliability of the measurement results.

[0077] An electrostatic discharge radiation electric field measurement method based on a pulse electric field probe in an embodiment of the present invention utilizes the electrostatic discharge radiation electric field measurement device based on a pulse electric field probe in the above embodiment to measure the radiation electric field of an electrostatic discharge generator. The discharge electrode and the current target of the electrostatic discharge generator to be tested are in contact discharge. The metal plate can shield the influence of the spatial electric field on the receiving device, thereby realizing strict test environment control.

[0078] The pulse electric field probe converts the collected electrical signals into optical signals, and transmits the optical signals to the receiving module through the signal optical fiber. The receiving module then converts the optical signals into electrical signals and generates and outputs the waveform of the electrostatic discharge radiation electric field in the oscilloscope, avoiding the influence of external electromagnetic interference on the measurement results. The optical fiber transmission technology is used to effectively reduce the noise interference in the test circuit, thereby improving the accuracy of the electrostatic discharge radiation electric field measurement and solving the measurement problem of ESD radiation electric field.

[0079] The time domain analysis algorithm can accurately analyze the acquired signals, which helps to evaluate the stability and reliability of the measurement results.

[0080] The discharge mode is selected as contact discharge. The waveform of the radiation electric field is measured while the waveform of the contact point current is measured. The measurement results can be reproduced.

[0081] Although example embodiments and their advantages have been described in detail, those skilled in the art may make various changes, substitutions and modifications to these embodiments without departing from the spirit and defined scope of the present invention, and such modifications and variations are all within the defined scope.

Claims

1. An electrostatic discharge radiation electric field measuring device based on a pulse electric field probe, characterized in that: include: Metal sheets; A current target is embedded in the middle of the metal plate, and the center of the current target is used as a discharge reference point for contact discharge with the discharge electrode of the electrostatic discharge generator to be tested; A pulse electric field probe, used to collect an electric signal of a spatial electric field at a preset position on the same side of the metal plate as the discharge electrode, convert the collected electric signal into an optical signal, and transmit the optical signal to a receiving module through a signal optical fiber; The receiving module is used to convert the optical signal transmitted by the signal optical fiber into an electrical signal and then input it into the oscilloscope; The oscilloscope is used to generate and output the waveform of the electrostatic discharge radiation electric field according to the electrical signal input by the receiving module.

2. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1 is characterized in that: The pulse electric field probe comprises a receiving antenna and a fixing part. One end of the receiving antenna is connected to the signal optical fiber, and the other end passes through the fixing part and is fixed by the fixing part.

3. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 2 is characterized in that: The receiving antenna is a monopole antenna with an integrating circuit at the rear end.

4. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1 is characterized in that: The surface of the metal plate is provided with a wave absorbing material for reducing the reflection of electromagnetic waves.

5. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1 is characterized in that: The preset position is located in the same plane as the center of the current target, 10 cm away from the contact discharge center point, and the height of the preset position is the same as the contact discharge center point.

6. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1, characterized in that: Also includes: A fixture is used to move and fix the pulse electric field probe.

7. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1 is characterized in that: Also includes: The attenuator is used to collect the electrical signal at the contact position between the current target and the discharge electrode, and output the electrical signal to the oscilloscope after attenuation, and the oscilloscope generates and outputs a reference waveform according to the attenuated electrical signal.

8. The electrostatic discharge radiation electric field measuring device based on a pulse electric field probe according to claim 1 is characterized in that: The receiving module is a photoelectric converter.

9. A method for measuring the electrostatic discharge radiation electric field based on a pulse electric field probe, applied to the electrostatic discharge radiation electric field measuring device based on a pulse electric field probe as claimed in any one of claims 1 to 8, characterized in that: include: Fix the pulse electric field probe at a preset position, and keep the polarization direction of the antenna consistent with the current direction; The electrostatic discharge generator to be tested is set to a contact discharge mode, and the electrostatic discharge generator to be tested is set to several voltage levels respectively, and the discharge electrode and the current target of the electrostatic discharge generator to be tested are contact-discharged several times at each voltage level; The pulse electric field probe is used to collect electric signals of the spatial electric field at a preset position at each voltage level, convert the collected electric signals into optical signals, and transmit the optical signals to a receiving module through a signal optical fiber. The optical signals transmitted by the signal optical fiber are converted into electric signals through the receiving module and then input into an oscilloscope. The oscilloscope generates and outputs a waveform of the electrostatic discharge radiation electric field according to the electric signals input from the receiving module; The waveform of the electrostatic discharge radiation electric field is processed by time domain analysis algorithm to obtain the waveform parameters of the radiation electric field.

10. The electrostatic discharge radiation electric field measurement method based on a pulse electric field probe according to claim 9, characterized in that: The waveform parameters include key parameters, characteristic points and statistics. Correspondingly, the waveform of the electrostatic discharge radiation electric field is processed by a time domain analysis algorithm to obtain the waveform parameters of the radiation electric field, including: The waveform of the electrostatic discharge radiation electric field is processed by using a time domain analysis algorithm, key parameters of the waveform of the electrostatic discharge radiation electric field are extracted, and characteristic points are identified; Based on multiple waveform measurement results, statistical analysis is performed on the key parameters and the characteristic points to obtain corresponding statistics.

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