Piezoelectric inertial displacement system

Abstract

The invention discloses a piezoelectric inertial displacement system, and relates to the technical field of motion platforms, the piezoelectric inertial displacement system comprises a base, a symmetrical pre-tightening structure, a transmission member and a transfer table; the symmetrical pre-tightening structure comprises a piezoelectric execution element, an elastic piece and at least one friction element, the piezoelectric execution element is connected with the base, the elastic piece is connected with the end, away from the base, of the piezoelectric execution element, and the friction element is connected with the elastic piece; the transmission part is connected to the base in a sliding mode and arranged adjacent to the end, back on to the elastic part, of the friction element. The transfer table is connected with the transmission piece; and the piezoelectric execution element is used for driving the elastic element to drive the friction element to be close to or far away from the transmission element so as to control the transfer table to perform inertial motion. According to the technical scheme provided by the invention, the structure of the piezoelectric inertial displacement system is simplified, and the processing difficulty is reduced, so that the production cost of the piezoelectric inertial displacement system is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of motion platforms, and in particular to a piezoelectric inertial displacement system. Background Art

[0002] In the field of automation and industrial control, piezoelectric translation stages can be used for precise component positioning, assembly and testing, improving production efficiency and quality control. The application of piezoelectric translation stages helps promote scientific research, technological innovation and industrial development, and the specific application scenarios of piezoelectric translation stages vary according to the needs and challenges of different fields.

[0003] However, most of the current piezoelectric inertial displacement systems have relatively complex designs and are difficult to machine, resulting in generally high production costs for piezoelectric inertial displacement systems. Summary of the invention

[0004] The main purpose of the present invention is to propose a piezoelectric inertial displacement system, aiming to simplify the structure of the piezoelectric inertial displacement system, reduce the processing difficulty, and thus reduce the production cost of the piezoelectric inertial displacement system.

[0005] In order to achieve the above object, the present invention proposes a piezoelectric inertial displacement system, which comprises: Base; A symmetrical pre-tightening structure, the symmetrical pre-tightening structure comprising a piezoelectric actuator, an elastic member and at least one friction member, the piezoelectric actuator is connected to the base, the elastic member is connected to an end of the piezoelectric actuator away from the base, and the friction member is connected to the elastic member; a transmission member, the transmission member being slidably connected to the base and disposed adjacent to an end of the friction element facing away from the elastic member; and A transfer platform connected to the transmission member; The piezoelectric actuator is used to drive the elastic member to drive the friction member to approach or move away from the transmission member, so as to control the transfer platform to perform inertial motion.

[0006] In one embodiment, the elastic member comprises: A displacement input portion, the displacement input portion being connected to an end of the piezoelectric actuator away from the base; at least one mounting portion, the mounting portion being connected to an end of the displacement input portion away from the piezoelectric actuator; the friction element being fixed to a side of the mounting portion facing the transmission member; and At least one deformable member, the deformable member is connected to an end of the mounting portion away from the displacement input portion; the deformable member is in contact with the base; The piezoelectric actuator is used to drive the displacement input part and the mounting part to move in a direction away from the piezoelectric actuator, so that the deformable member contacts and deforms with the base, and pushes the friction element located at the mounting part to elastically abut against the transmission member.

[0007] In one embodiment, the deformable member comprises: a deformable arm, one end of which is connected to an end of the mounting portion away from the displacement input portion; and the deformable arm is arranged obliquely relative to the mounting portion; and The spring piece is connected to an end of the deformable arm away from the mounting portion.

[0008] In one embodiment, the spring piece is a U-shaped spring piece.

[0009] In one embodiment, the elastic member further includes a preload applying portion, and the preload applying portion and an end of the deformable member away from the mounting portion are used to abut against the base.

[0010] In one embodiment, the symmetrical pre-tightening structure further comprises two friction elements; The elastic member includes two mounting parts, two deformable parts and two preload applying parts, the two mounting parts are respectively connected to the two ends of the displacement input part, each friction element is fixed to one mounting part and is arranged adjacent to the transmission member; each deformable part is connected to one end of the mounting part away from the displacement input part, each preload applying part is connected to one end of the deformable part away from the mounting part, two preload applying parts are connected to one end away from the deformable part, and the two mounting parts, the two deformable parts and the two preload applying parts are arranged symmetrically on the left and right.

[0011] In one embodiment, the two mounting portions and the two deformable members together form a first deformable cavity, and the two deformable members and the two preload force applying portions together form a second deformable cavity.

[0012] In one embodiment, the base has a mounting groove, the transmission member is slidably connected in the mounting groove, and the symmetrical pre-tightening structure is installed in the mounting groove and is arranged adjacent to the transmission member; The piezoelectric inertial displacement system further comprises a pre-tightening screw, one end of which is detachably connected to the slot wall of the mounting slot and elastically abuts against the elastic member.

[0013] In one embodiment, the preload screw is a ball-end screw.

[0014] In one embodiment, a side of the friction element facing the transmission member is an arc-shaped surface.

[0015] The piezoelectric inertial displacement system of the technical solution of the present invention includes a base, a symmetrical pre-tightening structure, a transmission member and a transfer platform; the symmetrical pre-tightening structure includes a piezoelectric actuator, an elastic member and at least one friction element, the piezoelectric actuator is connected to the base, the elastic member is connected to the end of the piezoelectric actuator away from the base, and the friction element is connected to the elastic member; the transmission member is slidably connected to the base and is arranged adjacent to the end of the friction element facing away from the elastic member; the transfer platform is connected to the transmission member; the piezoelectric actuator is used to drive the elastic member to drive the friction element to approach or away from the transmission member to control the transfer platform to perform inertial motion. The piezoelectric inertial displacement system adopts a symmetrical pre-tightening structure, a modular design of the piezoelectric actuator, the elastic member and the friction element of the symmetrical pre-tightening structure, which not only simplifies the structure of the piezoelectric inertial displacement system, but also reduces the processing difficulty of a single component and the complexity of the assembly process, thereby reducing the reliance on high-cost materials and complex processes. These design improvements work together to achieve low-cost production of the piezoelectric inertial displacement system while maintaining the technical effects of high precision and high stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 A schematic structural diagram of an embodiment of a piezoelectric inertial displacement system provided by the present invention; Figure 2 A schematic structural diagram of a base of a piezoelectric inertial displacement system provided by the present invention; Figure 3 A schematic diagram of the structure of the piezoelectric inertial displacement system provided by the present invention after the transfer platform is disassembled; Figure 4 A schematic structural diagram of a symmetrical pre-tightening structure of a piezoelectric inertial displacement system provided by the present invention; Figure 5 A schematic diagram of the change in signal amplitude when a positive signal is applied to the piezoelectric inertial displacement system provided by the present invention; Figure 6 A schematic diagram of the change in signal amplitude when a reverse signal is applied to the piezoelectric inertial displacement system provided by the present invention.

[0018] Description of Figure Numbers: 10. Base; 20. Symmetrical pre-tightening structure; 21. Piezoelectric actuator; 22. Elastic member; 221. Displacement input unit; 222. Mounting unit; 223. Deformable member; 223a. Deformable arm; 223b. Shrapnel; 224. Pre-tightening force applying unit; 22a. First deformation cavity; 22b. Second deformation cavity; 23. Friction element; 30. Transmission member; 40. Transfer platform; 50. Pre-tightening screw.

[0019] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0022] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0023] The invention provides a piezoelectric inertial displacement system.

[0024] See also Figures 1 to 4In one embodiment of the present invention, the piezoelectric inertial displacement system includes a base 10, a symmetrical pre-tightening structure 20, a transmission member 30 and a transfer platform 40; the symmetrical pre-tightening structure 20 includes a piezoelectric actuator 21, an elastic member 22 and at least one friction element 23, the piezoelectric actuator 21 is connected to the base 10, the elastic member 22 is connected to the end of the piezoelectric actuator 21 away from the base 10, and the friction element 23 is connected to the elastic member 22; the transmission member 30 is slidably connected to the base 10, and is arranged adjacent to the end of the friction element 23 facing away from the elastic member 22; the transfer platform 40 is connected to the transmission member 30; the piezoelectric actuator 21 is used to drive the elastic member 22 to drive the friction element 23 to approach or move away from the transmission member 30, so as to control the transfer platform 40 to perform inertial motion.

[0025] The base 10 is the basic structure of the entire piezoelectric inertial displacement system, used to support and fix other components. It is usually made of strong materials to ensure the stability and accuracy of the system. The design of the base 10 needs to consider the overall size and load capacity of the system to adapt to different application scenarios.

[0026] The symmetrical preload structure 20 is the core part of the present invention, and its design aims to achieve precise displacement control through the coordinated work of the piezoelectric actuator 21, the elastic member 22 and the friction element 23. The structure is simple in design, has low mechanical processing difficulty and low cost. The piezoelectric actuator 21 is the main driving force source of the system. It is usually composed of a piezoelectric ceramic stack and can convert electrical energy into mechanical energy. One end of the piezoelectric actuator 21 is connected to the base 10, and the other end is connected to the elastic member 22. When voltage is applied, the piezoelectric actuator 21 will stretch or contract, thereby driving the movement of the elastic member 22 and the friction element 23. The elastic member 22 is connected to the end of the piezoelectric actuator 21 away from the base 10, and its function is to transfer the driving force of the piezoelectric actuator 21 to the friction element 23. The design of the elastic member 22 needs to take into account its elasticity and rigidity to ensure that sufficient displacement and force can be generated under the drive of the piezoelectric actuator 21. The friction element 23 is connected to the elastic member 22, and its function is to achieve displacement transmission through contact with the transmission member 30. The design of the friction element 23 needs to consider the friction coefficient and wear resistance of the material to ensure the accuracy and stability of the system. The friction element 23 is processed using silicon nitride or silicon carbide material to ensure that it can be closely contacted and extruded with the transmission member 30 under various preload deformation conditions.

[0027] The transmission member 30 is slidably connected to the base 10 and is disposed adjacent to the end of the friction element 23 facing away from the elastic member 22. The function of the transmission member 30 is to receive the displacement from the friction element 23 and transmit it to the transfer platform 40. The design of the transmission member 30 needs to consider its sliding performance and load capacity to adapt to different application requirements.

[0028] The transfer platform 40 is connected to the transmission member 30, and its function is to realize the final displacement output. The design of the piezoelectric inertial displacement system needs to consider its size and load capacity to meet different application requirements. The piezoelectric inertial displacement system can achieve different travel ranges. Generally, a micro guide rail with a length of 20mm~100mm and a travel of 12mm~80mm is selected. The three-dimensional dimensions of the piezoelectric inertial displacement system are 20*20*10mm to 100*100*20mm. According to actual use requirements, the piezoelectric inertial displacement system can be overlapped and assembled to realize displacement in the XY directions. 304 stainless steel can be used for independent processing on the transfer platform 40, the base 10, and the symmetrical preload structure 20, and then subsequent assembly and debugging are carried out.

[0029] The operation process of the system starts with the driving of the piezoelectric actuator 21. When the piezoelectric actuator 21 receives a control signal, it will stretch or contract, thereby driving the movement of the elastic member 22 and the friction member 23. The deformation of the elastic member 22 causes the friction member 23 to move closer to or away from the transmission member 30, thereby controlling the inertial movement of the transfer platform 40.

[0030] Reference Figure 5 and Figure 6 In the forward signal, the piezoelectric actuator 21 slowly extends, driving the symmetrical preload structure 20 to produce a "slow sticking" movement displacement. Subsequently, the piezoelectric actuator 21 contracts rapidly, driving the symmetrical preload structure 20 to produce a "fast sliding" movement displacement. The displacements produced by these two processes are in opposite directions, and the "slow sticking" displacement is greater than the "fast sliding" displacement, thereby achieving a single forward stepping motion. When continuous motion is required, it is only necessary to repeatedly output the forward signal at a certain frequency. The movement process of the reverse signal is opposite to the forward motion, first "fast sliding" and then "slow sticking", producing a reverse displacement.

[0031] The piezoelectric inertial displacement system of the present invention adopts a symmetrical preload structure 20, and a modular design of the piezoelectric actuator 21, the elastic member 22, and the friction element 23 of the symmetrical preload structure 20, which not only simplifies the structure of the piezoelectric inertial displacement system, but also reduces the difficulty of processing a single component and the complexity of the assembly process, thereby reducing the reliance on high-cost materials and complex processes. These design improvements work together to achieve low-cost production of the piezoelectric inertial displacement system while maintaining the technical effects of high precision and high stability.

[0032] In one embodiment, see Figures 1 to 4The elastic member 22 includes a displacement input portion 221, at least one mounting portion 222 and at least one deformable member 223. The displacement input portion 221 is connected to one end of the piezoelectric actuator 21 away from the base 10; the mounting portion 222 is connected to one end of the displacement input portion 221 away from the piezoelectric actuator 21; the friction element 23 is fixed to the side of the mounting portion 222 facing the transmission member 30; the deformable member 223 is connected to one end of the mounting portion 222 away from the displacement input portion 221; the deformable member 223 abuts against the base 10; the piezoelectric actuator 21 is used to drive the displacement input portion 221 and the mounting portion 222 to move in a direction away from the piezoelectric actuator 21, so that the deformable member 223 contacts and deforms with the base 10, and pushes the friction element 23 located at the mounting portion 222 to elastically abut against the transmission member 30.

[0033] The displacement input part 221 is a key part connecting the elastic member 22 and the piezoelectric actuator 21. It directly receives the expansion and contraction movement of the piezoelectric actuator 21 and converts this movement into displacement input. The design of the displacement input part 221 needs to ensure that it can withstand the force generated by the piezoelectric actuator 21 and can accurately transmit this force.

[0034] The mounting portion 222 is connected to an end of the displacement input portion 221 away from the piezoelectric actuator 21, and its function is to fix the friction element 23 and ensure the correct alignment of the friction element 23 and the transmission member 30. The design of the mounting portion 222 needs to consider its structural strength and stability to ensure that no displacement or deformation occurs during the operation of the system.

[0035] The deformation member 223 is connected to one end of the mounting portion 222 away from the displacement input portion 221, and abuts against the base 10. The main function of the deformation member 223 is to generate deformation through contact with the base 10 when the piezoelectric actuator 21 drives the displacement input portion 221 and the mounting portion 222 to move. This deformation can not only provide the necessary elastic force, but also push the friction element 23 located at the mounting portion 222 to elastically abut against the transmission member 30, thereby achieving precise displacement control.

[0036] The friction element 23 is fixed to the side of the mounting portion 222 facing the transmission member 30, and its function is to achieve displacement transmission through contact with the transmission member 30. The design of the friction element 23 needs to consider the friction coefficient and wear resistance of the material to ensure the accuracy and stability of the system.

[0037] The operation process of the system starts with the driving of the piezoelectric actuator 21. When the piezoelectric actuator 21 receives a control signal, it will stretch or contract, thereby driving the movement of the displacement input part 221 and the mounting part 222. The movement of the displacement input part 221 drives the mounting part 222 and the friction element 23 to move away from the piezoelectric actuator 21. At this time, the deformable member 223 contacts the base 10 and deforms. The deformation of the deformable member 223 generates an elastic force, which pushes the friction element 23 located at the mounting part 222 to elastically abut against the transmission member 30. The elastic abutment between the friction element 23 and the transmission member 30 ensures the precise transmission of the displacement, so that the transfer platform 40 can achieve precise inertial motion.

[0038] Reference Figure 5 and Figure 6 In the forward signal, the piezoelectric actuator 21 slowly extends, driving the elastic member 22 and the friction member 23 to produce a "slow stick" motion displacement. Subsequently, the piezoelectric actuator 21 contracts rapidly, driving the elastic member 22 and the friction member 23 to produce a "fast sliding" motion displacement. The displacements produced by these two processes are in opposite directions, and the "slow stick" displacement is greater than the "fast sliding" displacement, thereby achieving a single forward stepping motion. When continuous motion is required, it is only necessary to repeatedly output the forward signal at a certain frequency.

[0039] The elastic member 22 of the present invention is designed to include a displacement input portion 221, at least one mounting portion 222 and at least one deformable member 223. The displacement input portion 221 is directly connected to the piezoelectric actuator 21, thereby ensuring efficient transmission of driving force and improving the response speed and accuracy of the system. The design of the mounting portion 222 not only provides a stable support for the friction element 23, but also ensures the correct alignment between the friction element 23 and the transmission member 30, thereby enhancing the stability and reliability of the system. The introduction of the deformable member 223 enables the system to generate the necessary elastic deformation under the drive of the piezoelectric actuator 21. This deformation not only provides a reverse thrust to ensure the elastic abutment between the friction element 23 and the transmission member 30, but also enhances the load capacity and adaptability of the system. Overall, this design significantly improves the performance of the piezoelectric inertial displacement system, making it more competitive in high-precision and high-stability applications.

[0040] In one embodiment, see Figures 1 to 4 The deformable member 223 includes a deformable arm 223a and a spring piece 223b, one end of the deformable arm 223a is connected to an end of the mounting portion 222 away from the displacement input portion 221; and the deformable arm 223a is inclined relative to the mounting portion 222; the spring piece 223b is connected to an end of the deformable arm 223a away from the mounting portion 222.

[0041] The deformation arm 223a is a key component of the deformation member 223, and one end of the deformation arm 223a is connected to the end of the mounting portion 222 away from the displacement input portion 221. The deformation arm 223a is designed to be inclined relative to the mounting portion 222. This inclined design helps the deformation arm 223a to effectively transmit force and generate deformation when the piezoelectric actuator 21 is driven. The material and geometric shape of the deformation arm 223a need to be carefully selected and designed to ensure that it can generate the expected elastic deformation when subjected to force while maintaining sufficient strength and durability.

[0042] The spring piece 223b is connected to the end of the deformable arm 223a away from the mounting portion 222, and its function is to provide the necessary elastic force when the deformable arm 223a is deformed. The design of the spring piece 223b needs to consider its elasticity and rigidity to ensure that sufficient reverse thrust can be generated under the drive of the deformable arm 223a, so that the friction element 23 and the transmission member 30 can achieve elastic contact. The material selection and thickness design of the spring piece 223b are crucial to its performance, and usually need to be optimized through experiments and simulation analysis.

[0043] The operation process of the system starts with the driving of the piezoelectric actuator 21. When the piezoelectric actuator 21 receives a control signal, it will stretch or contract, thereby driving the movement of the displacement input part 221 and the mounting part 222. The movement of the displacement input part 221 drives the mounting part 222 and the friction element 23 to move away from the piezoelectric actuator 21. At this time, the deformable arm 223a contacts the base 10 and deforms. The inclined design of the deformable arm 223a enables it to effectively transmit force and deform when subjected to force. This deformation can not only provide the necessary elastic force, but also push the friction element 23 located at the mounting part 222 to elastically abut against the transmission member 30. The spring 223b provides the necessary elastic force when the deformable arm 223a is deformed, ensuring the elastic abutment between the friction element 23 and the transmission member 30, thereby achieving precise displacement control.

[0044] The design of the deformable member 223 in this case includes a deformable arm 223a and a spring 223b. The tilted design of the deformable arm 223a and the introduction of the spring 223b enable the system to generate necessary elastic deformation under the drive of the piezoelectric actuator 21. This deformation not only provides a reverse thrust to ensure the elastic contact between the friction element 23 and the transmission member 30, but also enhances the load capacity and adaptability of the system. Secondly, the design of the deformable member 223 improves the response speed and accuracy of the system, making it more competitive in high-precision and high-stability applications.

[0045] In one embodiment, see Figures 1 to 4 , the spring piece 223b is a U-shaped spring piece 223b.

[0046] The U-shaped spring clip 223b is the core component of the deformable member 223. One end of the unique U-shaped spring clip 223b is connected to the end of the deformable arm 223a away from the mounting portion 222. Its main function is to provide the necessary elastic force when the deformable arm 223a is deformed, ensuring the elastic contact between the friction element 23 and the transmission member 30, thereby achieving precise displacement control. The U-shaped design enables the spring clip 223b to evenly distribute stress when subjected to force, reduce material fatigue, and extend service life. The material selection and geometric parameters (such as thickness, width, and curvature) of the U-shaped spring clip 223b are crucial to its performance. Typically, the U-shaped spring clip 223b is made of a material with a high elastic modulus to ensure that it can provide stable elastic support during system operation. In addition, the design of the U-shaped spring clip 223b needs to be optimized through experiments and simulation analysis to achieve optimal elasticity and stability.

[0047] The symmetrical pre-tightening structure 20 has several key dimensions that need to be designed, including the thickness t of the U-shaped spring piece 223b, the width d of the U-shaped spring piece 223b, the length l of the U-shaped spring piece 223b, and the pre-tightening deformation transfer angle α. The thickness t of the U-shaped spring piece 223b affects the degree of pre-tightening elastic deformation: a t value that is too large will result in excessive rigidity of the overall structure, making it difficult to deform and unable to effectively form pre-tightening; a t value that is too small will easily produce plastic deformation, leading to pre-tightening failure, and a too small t will increase the difficulty of processing. The width d of the U-shaped spring piece 223b and the length l of the U-shaped spring piece 223b mainly affect the degree of elastic deformation and the magnitude of the elastic force generated under the same pre-tightening force. The size of the pre-tightening deformation transfer angle α mainly affects the degree of extrusion between the friction element 23 installed on the mounting portion 222 and the slider of the transmission member 30 during the elastic force transmission process, that is, the final pre-tightening degree. In the actual design process, it is necessary to select parameters based on the finite element simulation results and the actual machining feasibility. Generally, t is selected in the range of 0.1~0.3mm, d is selected in the range of 0.6~1.0mm, l is selected in the range of 2~3mm, and α is selected in the range of 45°~70°.

[0048] In one embodiment, see Figures 1 to 4 The elastic member 22 further includes a preload applying portion 224 , and the preload applying portion 224 and an end of the deformable member 223 away from the mounting portion 222 are used to abut against the base 10 .

[0049] The preload force applying portion 224 is connected to one end of the deformable member 223 away from the mounting portion 222, and is used to abut against the base 10. The main function of the preload force applying portion 224 is to provide an initial preload force before the system is operated to ensure sufficient contact force between the friction element 23 and the transmission member 30. This preload force helps to improve the stability and response speed of the system.

[0050] The operation process of the system starts with the driving of the piezoelectric actuator 21. When the piezoelectric actuator 21 receives a control signal, it will stretch or contract, thereby driving the movement of the displacement input part 221 and the mounting part 222. The movement of the displacement input part 221 drives the mounting part 222 and the friction element 23 to move away from the piezoelectric actuator 21. At this time, the deformable member 223 contacts the base 10 and deforms. The deformation of the deformable member 223 generates an elastic force, which pushes the friction element 23 located at the mounting part 222 to elastically abut against the transmission member 30. The elastic abutment between the friction element 23 and the transmission member 30 ensures the precise transmission of the displacement, so that the transfer platform 40 can achieve precise inertial motion.

[0051] The design of the displacement input part 221 and the mounting part 222 of this case ensures that the driving force of the piezoelectric actuator 21 can be efficiently transmitted, improving the response speed and accuracy of the system. The design of the preload force application part 224 improves the stability and response speed of the system, making it more competitive in high-precision and high-stability applications.

[0052] Furthermore, the preload force applying portion 224 of this embodiment adopts a conical design with a taper angle of 5°, so as to generate a larger contact area when abutting against the base 10, thereby improving the stability of the preload force. The conical design of the preload force applying portion 224 enables it to generate a larger contact area when abutting against the base 10, thereby improving the stability of the preload force. In addition, the conical design is also conducive to reducing the friction between the preload force applying portion 224 and the base 10, thereby reducing the system resistance.

[0053] In one embodiment, see Figures 1 to 4 The symmetrical pre-tightening structure 20 also includes two friction elements 23; the elastic member 22 includes two mounting portions 222, two deformable members 223 and two pre-tightening force applying portions 224, the two mounting portions 222 are respectively connected to the two ends of the displacement input portion 221, each friction element 23 is fixed to a mounting portion 222, and is arranged adjacent to the transmission member 30; each deformable member 223 is connected to one end of a mounting portion 222 away from the displacement input portion 221, each pre-tightening force applying portion 224 is connected to one end of a deformable member 223 away from the mounting portion 222, the two pre-tightening force applying portions 224 are connected to one end of the deformable member 223 away from the mounting portion 222, and the two mounting portions 222, the two deformable members 223 and the two pre-tightening force applying portions 224 are arranged symmetrically on the left and right.

[0054] The design of the elastic member 22 includes two mounting parts 222, two deformable parts 223 and two preload force applying parts 224. The two mounting parts 222 are respectively connected to the two ends of the displacement input part 221, and their function is to fix the friction element 23 and ensure the correct alignment of the friction element 23 and the transmission member 30. Each deformable part 223 is connected to one end of a mounting part 222 away from the displacement input part 221, and its function is to generate deformation through contact with the base 10 when the piezoelectric actuator 21 drives the displacement input part 221 and the mounting part 222 to move.

[0055] First, the two mounting parts 222 are symmetrically connected to the two ends of the displacement input part 221, ensuring the uniform distribution of the driving force. This symmetrical connection method makes each mounting part 222 bear equal force, thereby achieving force balance. Secondly, a friction element 23 is fixed on each mounting part 222, and these friction elements 23 are arranged adjacent to the transmission member 30, ensuring the symmetrical application of friction force. Due to the symmetrical arrangement of the friction elements 23, the friction force exerted on the transmission member 30 during movement is uniform, which not only improves the stability of the system, but also prevents displacement deviation caused by excessive friction on one side.

[0056] Next, two deformation members 223 are respectively connected to one end of the two mounting parts 222 away from the displacement input part 221. The design of the deformation member 223 allows it to produce elastic deformation when subjected to force, and this deformation provides the necessary flexibility and adaptability for the system. Due to the symmetrical arrangement of the deformation member 223, the system can maintain the consistency of deformation during operation, further enhancing the force balance.

[0057] Finally, the two preload force applying parts 224 are respectively connected to the ends of the two deformation members 223 away from the mounting part 222, and the ends of the two preload force applying parts 224 away from the deformation member 223 are connected to each other. This design ensures the symmetrical application of the preload force, so that the system is in a preload state before starting. The symmetrical application of the preload force not only improves the initial contact force of the system, but also ensures the double-sided friction between the friction element 23 and the transmission member 30, thereby significantly enhancing the load capacity of the displacement system.

[0058] In one embodiment, see Figures 1 to 4 The two mounting portions 222 and the two deformable members 223 enclose a first deformable cavity 22a, and the two deformable members 223 and the two preload force applying portions 224 enclose a second deformable cavity 22b.

[0059] The two mounting parts 222 and the two deformable members 223 enclose a first deformable cavity 22a. The design of this cavity allows the deformable member 223 to produce elastic deformation when subjected to force, and this deformation provides the system with necessary flexibility and adaptability. Due to the symmetrical arrangement of the deformable member 223, the system can maintain the consistency of deformation during operation, further enhancing the force balance.

[0060] The two deformable members 223 and the two preload force applying parts 224 enclose a second deformable cavity 22b, and the design of this cavity ensures the symmetrical application of the preload force. The symmetrical application of the preload force not only improves the initial contact force of the system, but also ensures the double-sided friction between the friction element 23 and the transmission member 30, thereby significantly enhancing the load capacity of the displacement system.

[0061] The design of this case ensures uniform distribution of force on the system through the first deformation cavity 22a formed by the two mounting parts 222 and the two deformation members 223, and the second deformation cavity 22b formed by the two deformation members 223 and the two preload force applying parts 224, thereby improving the overall stability and accuracy. The symmetrically arranged deformation members 223 and the preload force applying parts 224 ensure that the system can generate uniform elastic deformation and preload force under the drive of the piezoelectric actuator 21, further improving the precise control ability and adaptability of the system.

[0062] In one embodiment, see Figures 1 to 4 The base 10 has a mounting groove, the transmission member 30 is slidably connected in the mounting groove, the symmetrical pre-tightening structure 20 is installed in the mounting groove and is arranged adjacent to the transmission member 30; the piezoelectric inertial displacement system also includes a pre-tightening screw 50, one end of which is detachably connected to the groove wall of the mounting groove and elastically abuts against the elastic member 22.

[0063] The base 10 is the supporting structure of the whole system and has a mounting groove for accommodating and fixing other components. The design of the base 10 needs to consider its structural strength and stability to ensure the overall performance of the system. The design of the mounting groove allows the transmission member 30 to be slidably connected therein, while providing a mounting position for the symmetrical preload structure 20.

[0064] The transmission member 30 is slidably connected to the mounting groove of the base 10, and its function is to receive the displacement from the friction element 23 and transmit it to the transmission platform 40. The design of the transmission member 30 needs to consider its sliding performance and load capacity to adapt to different application requirements. The transmission member 30 is arranged adjacent to the symmetrical preload structure 20 to ensure the accuracy and stability of displacement transmission.

[0065] One end of the pre-tightening screw 50 is detachably connected to the groove wall of the mounting groove and elastically abuts against the elastic member 22. The main function of the pre-tightening screw 50 is to provide an adjustable pre-tightening force, which ensures that there is sufficient contact force between the friction element 23 and the transmission member 30, thereby improving the load capacity and stability of the system. The design of the pre-tightening screw 50 allows it to be adjusted as needed to adapt to different load conditions.

[0066] The design of this case includes the installation groove of the base 10, the sliding connection of the transmission part 30, the installation of the symmetrical pre-tightening structure 20 and the elastic abutment of the pre-tightening screw 50. The coordinated work of the symmetrical pre-tightening structure 20 and the pre-tightening screw 50 ensures that the system can generate uniform elastic deformation and pre-tightening force under the drive of the piezoelectric actuator 21, further improving the system's precise control capability and adaptability.

[0067] In one embodiment, see Figures 1 to 4 , the pre-tightening screw 50 is a ball-end screw.

[0068] The preload screw 50 is a ball-end screw, one end of which is detachably connected to the wall of the mounting slot and elastically abuts against the elastic member 22. The design of the ball-end screw allows it to provide uniform contact pressure when a preload force is applied, reducing stress concentration, thereby improving the stability and life of the system. The main function of the ball-end screw is to provide an adjustable preload force to ensure that there is sufficient contact force between the friction element 23 and the transmission member 30. This preload force helps to improve the stability and response speed of the system. The design of the preload screw 50 allows it to be adjusted as needed to adapt to different load conditions.

[0069] The design of the ball-end screw allows it to bear greater loads without the slippage or loosening that may occur with ordinary screws. This enhances the load capacity and reliability of the system. The spherical end of the ball-end screw provides better contact performance, especially on uneven or gapped contact surfaces, ensuring better contact and force transmission. Because the ball-end screw can provide more even pressure distribution, it can reduce wear during long-term use and extend the service life of the system.

[0070] In one embodiment, see Figures 1 to 4 The side of the friction element 23 facing the transmission member 30 is an arc-shaped surface.

[0071] In this case, the side of the friction element 23 facing the transmission member 30 is set as an arc surface. The arc surface design helps to achieve uniform contact between the friction element 23 and the transmission member 30. No matter how the position of the transmission member 30 changes during the sliding process, the arc surface can ensure that a stable contact area is maintained between the two, thereby providing consistent friction.

[0072] Secondly, this design reduces the friction fluctuation caused by the change of contact area, improves the stability and accuracy of the system. In addition, the curved surface helps to disperse the pressure of the contact point, reduce local wear, and extend the service life of the friction element 23 and the transmission member 30.

[0073] Finally, the arc surface design can also adapt to the small displacement and vibration of the transmission member 30, ensuring the reliability and performance consistency of the system under dynamic conditions. In summary, the arc surface design of the friction element 23 significantly improves the overall performance and durability of the piezoelectric inertial displacement system.

[0074] Specific assembly process: ① Use epoxy resin glue to glue the friction element 23 to the left and right sides of the symmetrical pre-tightening structure 20; ② Use epoxy resin glue to glue the piezoelectric actuator 21 to the lower surface of the symmetrical pre-tightening structure 20; ③ Glue the piezoelectric actuator 21 together with the symmetrical pre-tightening structure 20 to the piezoelectric mounting surface of the base 10; ④ Install the guide rail part of the transmission part 30 on both sides with reference to the mounting surface and hole position of the base 10, and tighten with screws; ⑤ Screw in the ball-end screws to pre-tighten the symmetrical pre-tightening structure 20, so that the friction element 23 squeezes the side of the micro-slide rail of the transmission part 30, adjust the screw-in length, and adjust to the appropriate pre-tightening degree; ⑦ Install the top surface of the transfer platform 40 to the slider of the transmission part 30 with screws.

[0075] Reference Figure 5 and Figure 6 , using a single-step drive signal to drive the piezoelectric actuator 21 can achieve a single stepping motion of the piezoelectric inertial displacement stage. In the forward signal, t1>>t2, during the t1 process, the piezoelectric actuator 21 slowly extends, and the symmetrical pre-tightening structure 20 drives the micro-slide rail of the transmission member 30 to produce a "slow sticking" motion displacement S1, and during the t2 process, the piezoelectric actuator 21 quickly contracts, and the symmetrical pre-tightening structure 20 drives the micro-slide rail of the transmission member 30 to produce a "fast sliding" motion displacement S2, S1 and S2 displacement directions are opposite and S1>S2, this process produces a total displacement S=S1-S2, a single forward stepping process is completed, when continuous motion is required, it is only necessary to repeatedly output the forward signal at a certain frequency. The movement process of the reverse signal is opposite to the forward movement, first "fast sliding" and then "slow sticking", producing a reverse displacement.

[0076] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A piezoelectric inertial displacement system, characterized in that: The piezoelectric inertial displacement system comprises: Base; A symmetrical pre-tightening structure, the symmetrical pre-tightening structure comprising a piezoelectric actuator, an elastic member and at least one friction member, the piezoelectric actuator is connected to the base, the elastic member is connected to an end of the piezoelectric actuator away from the base, and the friction member is connected to the elastic member; a transmission member, the transmission member being slidably connected to the base and disposed adjacent to an end of the friction element facing away from the elastic member; and A transfer platform connected to the transmission member; The piezoelectric actuator is used to drive the elastic member to drive the friction member to approach or move away from the transmission member, so as to control the transfer platform to perform inertial motion.

2. The piezoelectric inertial displacement system according to claim 1, characterized in that: The elastic member comprises: A displacement input portion, the displacement input portion being connected to an end of the piezoelectric actuator away from the base; at least one mounting portion, the mounting portion being connected to an end of the displacement input portion away from the piezoelectric actuator; the friction element being fixed to a side of the mounting portion facing the transmission member; and At least one deformable member, the deformable member is connected to an end of the mounting portion away from the displacement input portion; the deformable member is in contact with the base; The piezoelectric actuator is used to drive the displacement input part and the mounting part to move in a direction away from the piezoelectric actuator, so that the deformable member contacts and deforms with the base, and pushes the friction element located at the mounting part to elastically abut against the transmission member.

3. The piezoelectric inertial displacement system according to claim 2, characterized in that: The deformable member comprises: a deformable arm, one end of which is connected to an end of the mounting portion away from the displacement input portion; and the deformable arm is arranged obliquely relative to the mounting portion; and The spring piece is connected to an end of the deformable arm away from the mounting portion.

4. The piezoelectric inertial displacement system according to claim 3, characterized in that: The spring piece is a U-shaped spring piece.

5. The piezoelectric inertial displacement system according to claim 2, characterized in that: The elastic member further comprises a preload applying portion, and the preload applying portion and an end of the deformable member away from the mounting portion are used to abut against the base.

6. The piezoelectric inertial displacement system according to claim 5, characterized in that: The symmetrical pre-tightening structure further comprises two friction elements; The elastic member includes two mounting parts, two deformable parts and two preload applying parts, the two mounting parts are respectively connected to the two ends of the displacement input part, each friction element is fixed to one mounting part and is arranged adjacent to the transmission member; each deformable part is connected to one end of the mounting part away from the displacement input part, each preload applying part is connected to one end of the deformable part away from the mounting part, two preload applying parts are connected to one end away from the deformable part, and the two mounting parts, the two deformable parts and the two preload applying parts are arranged symmetrically on the left and right.

7. The piezoelectric inertial displacement system according to claim 6, characterized in that: The two mounting portions and the two deformable members together form a first deformable cavity, and the two deformable members and the two preload force applying portions together form a second deformable cavity.

8. The piezoelectric inertial displacement system according to claim 1, characterized in that: The base has a mounting groove, the transmission member is slidably connected in the mounting groove, and the symmetrical pre-tightening structure is installed in the mounting groove and is arranged adjacent to the transmission member; The piezoelectric inertial displacement system further comprises a pre-tightening screw, one end of which is detachably connected to the slot wall of the mounting slot and elastically abuts against the elastic member.

9. The piezoelectric inertial displacement system according to claim 8, characterized in that: The pre-tightening screw is a ball-end screw.

10. The piezoelectric inertial displacement system according to claim 1, characterized in that: The side of the friction element facing the transmission member is an arc-shaped surface.

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