Double-diaphragm optical microphone and preparation method thereof

Abstract

The invention discloses a preparation method of a double-diaphragm optical microphone, which adopts a single-mode optical fiber to irradiate polymer glue through ultraviolet light to form a polymer waveguide film, and overcomes the problems of complex process, high cost and difficulty in batch production of 3D printing and two-photon polymerization in the prior art. Meanwhile, a process of firstly preparing the polymer waveguide film and then combining the polymer waveguide film with the silicon diaphragm is adopted, so that environmental dust pollution in the preparation process is effectively avoided, and the effectiveness of the preparation process and the yield of products are improved. Meanwhile, the invention further provides the double-diaphragm optical microphone which is prepared by adopting the preparation method, the production efficiency and the product quality of the double-diaphragm microphone can be effectively improved, and the double-diaphragm optical microphone is suitable for large-scale batch production and is beneficial to reducing the production cost of the double-diaphragm microphone.

Description

Technical Field

[0001] The present invention relates to the technical field of optical microphones, and in particular to a double-diaphragm optical microphone and a preparation method thereof. Background Art

[0002] Partial discharge is the main problem that causes power equipment failure. At present, the commonly used methods for detecting partial discharge are mainly pulse current method, ultra-high frequency method, optical measurement method, and ultrasonic method. Among them, the ultrasonic method can realize partial discharge positioning and online monitoring, and has good application prospects. Due to its outstanding advantages such as small size, simple structure and high stability, the fiber optic extrinsic Fabry-Perot Interferometer (EFPI) acoustic wave sensor has attracted widespread attention and has become a research hotspot for partial discharge ultrasonic detection. With the rapid development of my country's electricity, the fault signals of power equipment are becoming weaker and more difficult to detect, and the requirements for the detection sensitivity and frequency response range of the fiber optic EFPI sensor are becoming higher and higher.

[0003] In order to improve the sound pressure sensitivity and frequency response range of the optical microphone, the inventors have proposed a dual-diaphragm composite optical microphone (a dual-diaphragm composite optical microphone, application number: 202211099061.9), which is specifically composed of a packaging sleeve, a reflective diaphragm, a polymer waveguide film and a single-mode optical fiber. However, due to the complexity of this type of structure, its preparation method is relatively difficult. Although 3D printing technology and two-photon polymerization technology are currently capable of preparing high-precision microstructured photonic devices, the effective integration of polymer waveguide films and reflective diaphragms is still a major challenge. In addition, these two methods are complex, costly, and difficult to achieve large-scale mass production. Therefore, there is an urgent need for a method for preparing a dual-diaphragm optical microphone that has a simple process and can effectively integrate various components. Summary of the invention

[0004] The purpose of the present invention is to provide a dual-diaphragm optical microphone and a preparation method thereof, so as to solve the problems existing in the above-mentioned prior art, reduce the difficulty of preparing the dual-diaphragm optical microphone, and improve the product yield.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a method for preparing a double-diaphragm optical microphone, comprising the following steps:

[0007] Step 1: Allow the single-mode optical fiber to pass through a first sleeve, which is a hollow cylindrical structure, and then sleeve a second sleeve on the outside of the first sleeve, which is a cylindrical structure, and allow the end surface of the second sleeve to be higher than the end surface of one end of the single-mode optical fiber extending from the first sleeve;

[0008] Step 2: pouring polymer glue into a pouring space surrounded by the end surface of the first sleeve and the inner side wall of the second sleeve, and the poured polymer glue wraps the portion of the single-mode optical fiber extending from the first sleeve;

[0009] Step 3, covering the top of the second sleeve with a silicon diaphragm, and solidifying the injected polymer glue;

[0010] Step 4: The single-mode optical fiber is passed through ultraviolet light, and the ultraviolet light irradiates the polymer glue in the injection space to form a polymer waveguide film after development;

[0011] Step 5: The first sleeve, the second sleeve, the polymer waveguide film and the silicon diaphragm are combined to form a dual-diaphragm optical microphone.

[0012] Preferably, in step one, the end of the single-mode optical fiber is cut flat with a cutting knife, and then the single-mode optical fiber is passed through the first sleeve, the cut end of the single-mode optical fiber is higher than the top surface of the first sleeve, and the single-mode optical fiber is bonded and fixed to the first sleeve, and the first sleeve is bonded and fixed to the second sleeve.

[0013] Preferably, UV glue is poured into the gap between the single-mode optical fiber and the first sleeve, and between the first sleeve and the second sleeve using a syringe, and the UV glue is cured using ultraviolet light to achieve bonding and fixing of the single-mode optical fiber and the first sleeve, and of the first sleeve and the second sleeve.

[0014] Preferably, in step 2, when the polymer glue is poured into the pouring space, the polymer glue is poured until it is flush with the top end surface of the second sleeve.

[0015] Preferably, in step three, the silicon diaphragm is aligned so that when the silicon diaphragm covers the top of the second sleeve, the outer edge of the silicon diaphragm is flush with the outer edge of the end face of the second sleeve, and the silicon diaphragm is bonded to the end face of the second sleeve so that the polymer glue in the perfusion space is in airtight contact with the silicon diaphragm.

[0016] Preferably, the sample obtained after bonding the silicon diaphragm is placed in a vacuum environment to remove trace gases in the polymer glue, and the polymer glue is cured by heating.

[0017] Preferably, in step 4, micro pores are processed on the side wall of the second sleeve, and the micro pores are connected to the injection space;

[0018] The sample obtained after ultraviolet light irradiation of the polymer glue is placed in a developer, and the polymer glue not irradiated is removed after development to obtain the polymer glue irradiated by ultraviolet light, thereby forming the columnar polymer waveguide film.

[0019] Preferably, laser etching is used to process micropores on the side wall of the second sleeve;

[0020] There are multiple micro pores, and all of the micro pores are circumferentially arranged around the axis of the second sleeve.

[0021] Preferably, in step five, the first sleeve, the second sleeve, the polymer waveguide film and the silicon diaphragm are bonded to form a dual-diaphragm optical microphone.

[0022] The present invention also provides a dual-diaphragm microphone, which is prepared by the above-mentioned preparation method of the dual-diaphragm optical microphone. The dual-diaphragm optical microphone includes a first sleeve, a second sleeve, a single-mode optical fiber, a silicon diaphragm and a polymer waveguide film. The first sleeve is a hollow cylindrical structure, the second sleeve is a tubular structure, the second sleeve is sleeved on the outside of the first sleeve and protrudes from the first sleeve, the silicon diaphragm is arranged on the top surface of the second sleeve, the single-mode optical fiber passes through the first sleeve and extends into the perfusion space surrounded by the side walls of the first sleeve, the second sleeve and the silicon diaphragm, and the polymer waveguide film connects the silicon membrane and one end of the single-mode optical fiber extending into the perfusion space.

[0023] Compared with the prior art, the present invention has achieved the following technical effects: the preparation method of the dual-diaphragm optical microphone of the present invention adopts a single-mode optical fiber to irradiate polymer glue with ultraviolet light to form a polymer waveguide film, which overcomes the difficulties of the prior art that the 3D printing and two-photon polymerization processes are complex, costly, and difficult to mass produce; at the same time, the present invention adopts a process of first preparing the polymer waveguide film and then combining the polymer waveguide film with the silicon diaphragm, which effectively avoids the pollution of environmental dust in the preparation process and improves the effectiveness of the preparation process and the yield of the product.

[0024] At the same time, the present invention also provides a double-diaphragm optical microphone, which is prepared by the above-mentioned preparation method. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram of the structure of a dual-diaphragm optical microphone disclosed in an embodiment of the present invention;

[0027] Figure 2 It is a schematic diagram of a method for preparing a dual-diaphragm optical microphone disclosed in an embodiment of the present invention.

[0028] In the figure: 1, single-mode optical fiber; 2, first sleeve; 3, second sleeve; 4, polymer waveguide film; 401, polymer glue; 5, silicon diaphragm; 6, micropores; 7, laser; 8, ultraviolet light. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] The purpose of the present invention is to provide a dual-diaphragm optical microphone and a preparation method thereof, so as to solve the problems existing in the above-mentioned prior art, reduce the difficulty of preparing the dual-diaphragm optical microphone, and improve the product yield.

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] The present invention provides a method for preparing a double-diaphragm optical microphone, comprising the following steps:

[0033] Step 1: Make the single-mode optical fiber 1 pass through the first sleeve 2, which is a hollow cylindrical structure, and then put the second sleeve 3 outside the first sleeve 2, which is a cylindrical structure, and make the end face of the second sleeve 3 higher than the end face of the single-mode optical fiber 1 extending from the first sleeve 2;

[0034] Step 2: pouring the polymer glue 401 into the pouring space surrounded by the end surface of the first sleeve 2 and the inner wall of the second sleeve 3, and the poured polymer glue 401 wraps the portion of the single-mode optical fiber 1 extending from the first sleeve 2;

[0035] Step 3: Cover the silicon diaphragm 5 on the top of the second sleeve 3, and solidify the injected polymer glue 401;

[0036] Step 4: The single-mode optical fiber 1 is passed through ultraviolet light 8, and the ultraviolet light 8 irradiates the polymer glue 401 in the injection space, and forms a polymer waveguide film 4 after development;

[0037] Step 5: The first sleeve 2, the second sleeve 3, the polymer waveguide film 4 and the silicon diaphragm 5 are combined to form a double-diaphragm optical microphone.

[0038] The preparation method of the dual-diaphragm optical microphone of the present invention adopts a single-mode optical fiber 1 to pass ultraviolet light 8 to irradiate polymer glue 401 to form a polymer waveguide film 4, which overcomes the problems of the prior art that the 3D printing and two-photon polymerization processes are complicated, costly, and difficult to mass produce; at the same time, the present invention adopts a process of first preparing the polymer waveguide film 4 and then combining the polymer waveguide film 4 with the silicon diaphragm 5, which effectively avoids the pollution of environmental dust in the preparation process and improves the effectiveness of the preparation process and the yield rate of the product.

[0039] In step one, a cutting knife can be used to cut the end of the single-mode optical fiber 1 flat to ensure smooth transmission of the ultraviolet light 8, and then the single-mode optical fiber 1 is passed through the first sleeve 2. The cut end of the single-mode optical fiber 1 is higher than the top surface of the first sleeve 2, and the single-mode optical fiber 1 and the first sleeve 2, and the first sleeve 2 and the second sleeve 3 are bonded and fixed.

[0040] When bonding and fixing the single-mode optical fiber 1 to the first sleeve 2, and the first sleeve 2 to the second sleeve 3, a syringe can be used to inject UV glue into the gaps between the single-mode optical fiber 1 and the first sleeve 2, and between the first sleeve 2 and the second sleeve 3, and the UV glue is cured by irradiation with ultraviolet light to achieve bonding and fixing of the single-mode optical fiber 1 to the first sleeve 2, and the first sleeve 2 to the second sleeve 3, so as to ensure the bonding firmness of the single-mode optical fiber 1 to the first sleeve 2, and the first sleeve 2 to the second sleeve 3.

[0041] It should also be noted that in step 2, when the polymer glue 401 is poured into the pouring space, the polymer glue 401 is poured until it is flush with the top end surface of the second sleeve 3, providing a guarantee for the combination of the prepared polymer waveguide film 4 and the silicon diaphragm 5.

[0042] At the same time, in step three, the silicon diaphragm 5 is aligned so that when the silicon diaphragm 5 covers the top of the second sleeve 3, the outer edge of the silicon diaphragm 5 is flush with the outer edge of the end face of the second sleeve 3, and the silicon diaphragm 5 is bonded to the end face of the second sleeve 3, so that the polymer glue 401 in the injection space is in airtight contact with the silicon diaphragm 5, avoiding external environmental pollution, which is beneficial to improving product quality.

[0043] In practical applications, the sample obtained after bonding the silicon diaphragm 5 can be placed in a vacuum environment, such as a vacuum box, to remove trace gases in the polymer glue 401 , and the polymer glue 401 can be cured by heating to ensure the preparation quality of the polymer waveguide film 4 .

[0044] It should also be emphasized that in step 4, micropores 6 are processed on the side wall of the second sleeve 3, and the micropores 6 are connected to the injection space to balance the pressure difference between the injection space and the external environment, providing convenience for the subsequent developer to enter.

[0045] The sample obtained after the polymer glue 401 is irradiated with ultraviolet light 8 is placed in a developer, and the polymer glue 401 not irradiated is removed after development to obtain the polymer glue 401 irradiated with ultraviolet light 8, thereby forming a columnar polymer waveguide film 4.

[0046] When processing the micro pores 6 , laser 7 etching may be used for micro processing to process the micro pores 6 on the side wall of the second sleeve 3 .

[0047] In order to allow the developer to penetrate quickly, a plurality of micropores 6 may be processed, and all of the micropores 6 are circumferentially arranged around the axis of the second sleeve 3 .

[0048] In addition, in step five, the first sleeve 2, the second sleeve 3, the polymer waveguide film 4 and the silicon diaphragm 5 may be bonded to form a double-diaphragm optical microphone.

[0049] In the preparation method of the dual-diaphragm optical microphone of the present invention, the silicon diaphragm 5, the first sleeve 2 and the second sleeve 3, and the polymer glue 401 are first glued, and then the polymer waveguide film 4 is prepared, and finally bonding is performed. This is different from the existing method of "preparing the polymer waveguide film first and then bonding the silicon diaphragm", and can effectively avoid the pollution of environmental dust in the preparation process, thereby improving the effectiveness of the preparation process and the yield rate of the product.

[0050] At the same time, the present invention also provides a dual-diaphragm microphone, which is prepared by the above-mentioned preparation method of the dual-diaphragm optical microphone. The dual-diaphragm optical microphone includes a first sleeve 2, a second sleeve 3, a single-mode optical fiber 1, a silicon diaphragm 5 and a polymer waveguide film 4. The first sleeve 2 is a hollow cylindrical structure, the second sleeve 3 is a tubular structure, the second sleeve 3 is sleeved on the outside of the first sleeve 2 and protrudes from the first sleeve 2, the silicon diaphragm 5 is arranged on the top surface of the second sleeve 3, the single-mode optical fiber 1 passes through the first sleeve 2, and extends into the injection space surrounded by the side walls of the first sleeve 2, the second sleeve 3 and the silicon diaphragm 5, and the polymer waveguide film 4 connects the silicon diaphragm 5 and one end of the single-mode optical fiber 1 extending into the injection space.

[0051] The dual-diaphragm microphone of the present invention is prepared by the above-mentioned preparation method of the dual-diaphragm optical microphone, which can effectively improve the production efficiency and product quality of the dual-diaphragm microphone, is suitable for large-scale batch production, and is conducive to reducing the production cost of the dual-diaphragm microphone.

[0052] The preparation method of the diaphragm optical microphone of the present invention is further explained below through specific embodiments.

[0053] Embodiment 1

[0054] Reference Figure 1As shown, a schematic diagram of the structure of a double-diaphragm optical microphone disclosed in the present embodiment, wherein the structural entity is mainly composed of a single-mode optical fiber 1, a first sleeve 2, a second sleeve 3 and a double diaphragm, wherein the double diaphragm includes a polymer waveguide film 4 and a silicon diaphragm 5; the first sleeve 2, the second sleeve 3 and the silicon diaphragm 5 are combined to form a Fabry-Perot cavity; one end of the polymer waveguide film 4 is solidified and connected to the output end of the single-mode optical fiber 1, and the other end of the polymer waveguide film 4 is bonded to the center of the silicon diaphragm 5, and the polymer waveguide film 4 is encapsulated in the space surrounded by the first sleeve 2 and the second sleeve 3; the injection space is a circular groove area, and a plurality of micropores 6 are opened on the side of the second sleeve 3 to balance the internal and external pressure difference.

[0055] The main process of the preparation method of a double-diaphragm optical microphone disclosed in this embodiment is as follows: 1) inserting a flattened single-mode optical fiber 1 into a first sleeve 2, and then inserting the first sleeve 2 into a second sleeve 3, and pouring UV glue into the gaps between the single-mode optical fiber 1-first sleeve 2 and the first sleeve 2-second sleeve 3, and using ultraviolet curing to bond the single-mode optical fiber 1 to the sleeves; 2) pouring polymer glue 401 (a material that can bond with the silicon diaphragm 5) into the second sleeve 3, and the polymer glue 401 and the second sleeve 3 are bonded to each other. The end faces of the two sleeves 3 are flush; 3) the silicon diaphragm 5 is used to cover the second sleeve 3, and the polymer glue 401 is solidified in a high-temperature vacuum box; 4) a laser 7 is used to etch a number of micropores 6 on the side of the second sleeve 3, so as to facilitate the developer to penetrate into the second sleeve 3 and balance the pressure difference between the inside and the outside; 5) the single-mode optical fiber 1 is passed with ultraviolet light 8, and the ultraviolet light 8 irradiates the polymer glue 401, and a polymer waveguide film 4 is formed after development; 6) the sleeve-silicon diaphragm 5 and the polymer waveguide film 4-silicon diaphragm 5 are bonded.

[0056] After the above process flow, a double-diaphragm optical microphone is formed.

[0057] Embodiment 2

[0058] Reference Figure 2 As shown, the operation steps of this embodiment are basically the same as those of the first embodiment, except that this embodiment specifically provides a more detailed process description of a method for preparing a double-diaphragm optical microphone based on a polymer waveguide film.

[0059] 1)Reference Figure 2 As shown in (a), the single-mode optical fiber 1 is cut flat with a cutting knife, and the single-mode optical fiber 1 is inserted into the first sleeve 2. The end face of the single-mode optical fiber 1 should exceed the end face of the first sleeve 2. Then, a syringe is used to slowly pour UV glue into the gap between the single-mode optical fiber 1 and the first sleeve 2. Finally, an ultraviolet lamp is used to irradiate to cure the UV glue. Finally, the single-mode optical fiber 1 and the first sleeve 2 are cured and bonded.

[0060] 2)Reference Figure 2As shown in (b), the first sleeve 2 after curing the single-mode optical fiber 1 is inserted into the second sleeve 3, so that a cylindrical groove-shaped injection space is formed between the first sleeve 2 and the second sleeve 3;

[0061] 3)Reference Figure 2 As shown in (c), the polymer glue 401 (the polymer glue 401 has material properties capable of bonding with the silicon diaphragm 5 and UV lithography) is poured into the pouring space, and the polymer glue 401 is flush with the end surface of the second sleeve 3;

[0062] 4)Reference Figure 2 As shown in (d), the silicon diaphragm 5 is flush with the second sleeve 3, the end surface of the second sleeve 3 is bonded to the silicon diaphragm 5 by using a heat-curing adhesive, the polymer adhesive 401 in the second sleeve 3 is in close contact with the silicon diaphragm 5, and finally the whole sample is placed in a vacuum box to remove trace gas in the adhesive, and the polymer adhesive 401 is cured by heating;

[0063] 5)Reference Figure 2 As shown in (e), firstly, ultraviolet light 8 is input into the single-mode optical fiber 1, and the ultraviolet light 8 irradiates the polymer glue 401; then, the laser 7 is used to micro-process the side surface of the second sleeve 3 to etch a plurality of micro-pores 6 to balance the internal and external pressure difference; finally, the sample is placed in a developer, and after development, the polymer glue 401 that has not been irradiated is removed, leaving the polymer glue 401 irradiated by the ultraviolet light 8, that is, a columnar polymer waveguide film 4 is formed;

[0064] 6)Reference Figure 2 As shown in (f), further measures are taken to bond the second sleeve 3-silicon diaphragm 5 and the polymer waveguide film 4-silicon diaphragm 5, and finally form a double-diaphragm optical microphone based on the polymer waveguide film of this embodiment.

[0065] Embodiment 3

[0066] The operation process of the third embodiment is basically the same as that of the second embodiment, except that the present embodiment provides structural parameters of a double-diaphragm microphone sample that is actually prepared.

[0067] The present embodiment provides a double-diaphragm optical microphone based on a polymer waveguide film, and the parameters of each component are as follows: the cladding diameter of the single-mode optical fiber 1 is 125μm, and the core diameter is 9μm; the first sleeve 2 is made of quartz glass, and its inner diameter is 130μm and its outer diameter is 2000μm; the second sleeve 3 is made of quartz glass, and its inner diameter is 2050μm, the outer diameter is 3050μm, and the wall thickness is 500μm; the polymer glue 401 is PDMS (polydimethylsiloxane), the diameter of the polymer waveguide film 4 is 9μm, and the length is 50μm; the diameter of the silicon diaphragm 5 is 3050μm, and the thickness is 40μm; the diameter of the cylindrical cavity formed between the silicon diaphragm 5, the first sleeve 2 and the second sleeve 3 is 2050μm, and the length is 1040μm; the diameter of the micropore 6 etched in the second sleeve 3 is 200μm, and the number of micropores 6 is 4.

[0068] The preparation method of the dual-diaphragm optical microphone of the present invention utilizes a single-mode optical fiber 1 to output ultraviolet light 8 to locally irradiate a polymer ultraviolet glue (similar to ultraviolet photolithography) to form a polymer waveguide film 4, and adopts a bonding process to fix the second sleeve 3-silicon diaphragm 5 and the polymer waveguide film 4-silicon diaphragm 5 for connection. This preparation process overcomes the difficulties of complex 3D printing and two-photon polymerization processes, high costs, and difficulty in mass production. At the same time, the present invention adopts a preparation process of "silicon diaphragm 5-sleeve-polymer glue 401 is first bonded, then the polymer waveguide film 4 is prepared, and finally bonding is performed", which is different from other methods in the prior art of "first preparing the polymer waveguide film 4, then bonding the silicon diaphragm 5". The present invention can effectively avoid the pollution of environmental dust in the preparation process, thereby improving the effectiveness of the preparation process and the yield rate of the product.

[0069] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A method for preparing a double-diaphragm optical microphone, characterized in that: The steps include: Step 1: Allow the single-mode optical fiber to pass through a first sleeve, which is a hollow cylindrical structure, and then sleeve a second sleeve on the outside of the first sleeve, which is a cylindrical structure, and allow the end surface of the second sleeve to be higher than the end surface of one end of the single-mode optical fiber extending from the first sleeve; Step 2: pouring polymer glue into a pouring space surrounded by the end surface of the first sleeve and the inner side wall of the second sleeve, and the poured polymer glue wraps the portion of the single-mode optical fiber extending from the first sleeve; Step 3, covering the top of the second sleeve with a silicon diaphragm, and solidifying the injected polymer glue; Step 4: The single-mode optical fiber is passed through ultraviolet light, and the ultraviolet light irradiates the polymer glue in the injection space to form a polymer waveguide film after development; Step 5: The first sleeve, the second sleeve, the polymer waveguide film and the silicon diaphragm are combined to form a dual-diaphragm optical microphone.

2. The method for preparing a dual-diaphragm optical microphone according to claim 1, characterized in that: In step one, the end of the single-mode optical fiber is cut flat with a cutting knife, and then the single-mode optical fiber is passed through the first sleeve. The cut end of the single-mode optical fiber is higher than the top surface of the first sleeve, and the single-mode optical fiber is bonded to the first sleeve, and the first sleeve is bonded to the second sleeve.

3. The method for preparing a dual-diaphragm optical microphone according to claim 2, characterized in that: UV glue is poured into the gap between the single-mode optical fiber and the first sleeve, and between the first sleeve and the second sleeve using a syringe, and the UV glue is cured using ultraviolet light to achieve bonding and fixing of the single-mode optical fiber and the first sleeve, and of the first sleeve and the second sleeve.

4. The method for preparing a dual-diaphragm optical microphone according to claim 1, characterized in that: In step 2, when the polymer glue is poured into the pouring space, the polymer glue is poured until it is flush with the top end surface of the second sleeve.

5. The method for preparing a dual-diaphragm optical microphone according to claim 1, characterized in that: In step three, the silicon diaphragm is aligned so that when the silicon diaphragm covers the top of the second sleeve, the outer edge of the silicon diaphragm is flush with the outer edge of the end face of the second sleeve, and the silicon diaphragm is bonded to the end face of the second sleeve so that the polymer glue in the injection space is in airtight contact with the silicon diaphragm.

6. The method for preparing a dual-diaphragm optical microphone according to claim 5, characterized in that: The sample obtained after bonding the silicon diaphragm is placed in a vacuum environment to remove trace gases in the polymer glue, and the polymer glue is cured by heating.

7. The method for preparing a dual-diaphragm optical microphone according to claim 1, characterized in that: In step 4, micro pores are processed on the side wall of the second sleeve, wherein the micro pores are connected to the injection space; The sample obtained after ultraviolet light irradiation of the polymer glue is placed in a developer, and the polymer glue not irradiated is removed after development to obtain the polymer glue irradiated by ultraviolet light, thereby forming the columnar polymer waveguide film.

8. The method for preparing a dual-diaphragm optical microphone according to claim 7, characterized in that: Processing micropores on the side wall of the second sleeve by laser etching; There are multiple micro pores, and all of the micro pores are circumferentially arranged around the axis of the second sleeve.

9. The method for preparing a dual-diaphragm optical microphone according to any one of claims 1 to 8, characterized in that: In step five, the first sleeve, the second sleeve, the polymer waveguide film and the silicon diaphragm are bonded to form a dual-diaphragm optical microphone.

10. A dual-diaphragm optical microphone, characterized in that: The double-diaphragm optical microphone is prepared by the preparation method of any one of claims 1 to 9, and the double-diaphragm optical microphone comprises a first sleeve, a second sleeve, a single-mode optical fiber, a silicon diaphragm and a polymer waveguide film, the first sleeve is a hollow cylindrical structure, the second sleeve is a tubular structure, the second sleeve is sleeved on the outside of the first sleeve and protrudes from the first sleeve, the silicon diaphragm is arranged on the top surface of the second sleeve, the single-mode optical fiber passes through the first sleeve and extends into the perfusion space surrounded by the side walls of the first sleeve, the second sleeve and the silicon diaphragm, and the polymer waveguide film connects the silicon membrane and one end of the single-mode optical fiber extending into the perfusion space.

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