Optical element vacuum environment transfer device and method

Abstract

The invention provides an optical element vacuum environment transmission device and method.The optical element vacuum environment transmission device comprises an optical element protection box, a front end module, a load locking module, a controlled environment module and a process cavity module, the optical element protection box comprises an outer box and an inner box, the outer box comprises an outer box cover and an outer box bottom plate, and the inner box comprises an inner box cover and an outer box bottom plate; the inner box comprises an inner box cover and an inner box bottom plate; the front end module is used for separating or buckling the outer box cover and the outer box bottom plate; the load locking module is used for separating or buckling the inner box cover and the inner box bottom plate; the front-end module and the load locking module are in butt joint communication with the controlled environment module, and the controlled environment module is used for achieving transmission of the inner box between the front-end module and the load locking module through the controlled environment manipulator; and the process cavity module is in butt joint communication with the load locking module and is used for realizing transmission of the inner box bottom plate between the process cavity module and the load locking module through the process cavity manipulator. According to the invention, full-flow protection can be provided for the transmission process of the optical element.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit and semiconductor equipment manufacturing, and in particular to a vacuum environment transfer device and method for optical elements. Background Art

[0002] With the development of semiconductor manufacturing technology, the manufacturing accuracy of semiconductor equipment such as optical component detection and chip manufacturing needs to reach the nanometer level, and the working environment inside the equipment also needs to reach an ultra-clean vacuum space. Optical components to be inspected or to enter etching, exposure and other processes are at risk of particle deposition during transmission, especially when passing through the load lock chamber in the vacuum equipment. They are easily contaminated by particles carried by airflow during turbulence or rapid changes in air pressure, affecting the detection accuracy, processing accuracy and product yield.

[0003] The existing designs of optical element protection boxes and transfer devices do not provide adequate protection for optical elements, and are still prone to particle contamination during transmission or when the air pressure changes. For example, U.S. Patent No. US20150323862A1 proposes using plasma to remove particles in an optical element box, but it does not provide good protection when the air pressure changes. Chinese Patent No. CN201480078013.9 proposes providing a particle trap in the load lock chamber, but there is still a high probability that particles will escape to the sample during trapping. Summary of the invention

[0004] The first object of the present invention is to provide an optical element vacuum environment transfer device, which can provide full-process protection for the optical element transfer process.

[0005] The second object of the present invention is to provide a method for transferring an optical element to a vacuum environment.

[0006] The present invention provides an optical element vacuum environment transfer device, comprising:

[0007] An optical element protection box, comprising an outer box and an inner box arranged inside the outer box, wherein the outer box comprises a detachably mounted outer box cover and an outer box bottom plate, and the inner box comprises a detachably mounted inner box cover and an inner box bottom plate, wherein the inner box cover is a box cover structure that is breathable and can shield particles, and the optical element is loaded on the inner box bottom plate;

[0008] A front end module, used for separating or fastening the outer box cover and the outer box bottom plate;

[0009] A load locking module, used for separating or fastening the inner box cover and the inner box bottom plate;

[0010] A controlled environment module, wherein the front-end module and the load lock module are respectively connected to the controlled environment module, and the controlled environment module is used to realize the transfer of the inner box between the front-end module and the load lock module through a controlled environment manipulator;

[0011] The process chamber module is connected to the load lock module and is used for transferring the inner box bottom plate between the process chamber module and the load lock module through a process chamber robot.

[0012] According to an optical element vacuum environment transfer device provided by the present invention, the front-end module includes a front-end module chamber, and an outer box cover limiting port is provided on the top of the front-end module chamber. The size of the outer box cover limiting port is larger than the size of the outer box bottom plate and smaller than the size of the outer box cover, and the outer box bottom plate can enter the front-end module chamber through the outer box cover limiting port.

[0013] According to an optical element vacuum environment transfer device provided by the present invention, an inner box inlet and outlet are provided on the side wall of the front-end module chamber, and the front-end module chamber is connected to the controlled environment module through the inner box inlet and outlet.

[0014] According to an optical element vacuum environment transfer device provided by the present invention, the front-end module also includes a lifting rod, which can drive the outer box bottom plate to transfer up and down between the outer box cover limit port and the inner box inlet and outlet positions.

[0015] According to an optical element vacuum environment transfer device provided by the present invention, the load locking module includes a load locking chamber, and a support seat and a grabbing mechanism are respectively provided in the load locking chamber, the support seat is used to support the inner box bottom plate, and the grabbing mechanism is used to grab the inner box cover to separate or buckle the inner box cover and the inner box bottom plate.

[0016] According to an optical element vacuum environment transfer device provided by the present invention, the controlled environment module includes a controlled environment chamber and a controlled environment manipulator arranged inside the controlled environment chamber, and the controlled environment manipulator can transfer the inner box between the front-end module chamber, the controlled environment chamber and the load lock chamber.

[0017] According to an optical element vacuum environment transfer device provided by the present invention, the controlled environment module is also provided with a first positive pressure device, which is used to fill the controlled environment chamber with clean gas to keep the airflow in the controlled environment chamber flowing toward the front-end module chamber.

[0018] According to an optical element vacuum environment transfer device provided by the present invention, the load locking module is also provided with a negative pressure device. When the inner box bottom plate carries the optical element and remains in a buckled state with the inner box cover to stay in the load locking chamber before entering the process chamber module, the negative pressure device is used to evacuate and exhaust the interior of the load locking chamber.

[0019] According to an optical element vacuum environment transfer device provided by the present invention, the load lock module is also provided with a second positive pressure device. When the inner box bottom plate carrying the optical element is transferred from the process chamber module to the load lock chamber and is buckled with the inner box cover, the second positive pressure device is used to fill the load lock chamber with clean gas.

[0020] The present invention also provides a method for transferring a vacuum environment of an optical element, using the above-mentioned vacuum environment transfer device of an optical element, and specifically comprising the following steps:

[0021] The front module separates the outer box cover and the outer box bottom plate;

[0022] The controlled environment robot separates the inner box from the outer box base;

[0023] The controlled environment manipulator transfers the inner box from the front end module into the controlled environment module, and then from the controlled environment module into the load lock module;

[0024] Evacuate the load lock module;

[0025] The gripping mechanism of the load lock module grips the inner box cover and separates the inner box cover from the inner box bottom plate;

[0026] The process chamber robot transfers the inner box bottom plate from the load lock module into the process chamber module;

[0027] The process chamber module separates the inner box bottom plate from the optical element, and then processes the optical element;

[0028] The optical components after processing are then placed back on the bottom plate of the inner box;

[0029] The process chamber robot transfers the inner box bottom plate from the process chamber module into the load lock module;

[0030] The gripping mechanism of the load lock module refastens the inner box cover with the inner box bottom plate;

[0031] Filling the load lock module with clean gas;

[0032] The controlled environment manipulator transfers the inner box from the load lock module into the controlled environment module, and then from the controlled environment module into the front end module;

[0033] The controlled environment robot puts the inner box back onto the outer box base;

[0034] The front end module buckles the outer box cover and the outer box bottom plate.

[0035] The optical element vacuum environment transfer device provided by the present invention can provide effective protection for the entire process of transferring the optical element into and out of the vacuum environment through the mutual cooperation among the optical element protection box, the front-end module, the load locking module, the controlled environment module and the process chamber module; wherein the optical element protection box comprises an outer box and an inner box, the outer box comprises a detachably mounted outer box cover and an outer box bottom plate, the inner box comprises a detachably mounted inner box cover and an inner box bottom plate, the inner box cover adopts a breathable and particle-shielding box cover structure, the optical element is loaded on the inner box bottom plate, and by setting an optical element protection box with an inner and outer double box structure, the optical element can be protected during the transfer process. Effective protection, and the inner box can shield particles throughout the entire process, and allow gas molecules to pass through, so that the inner box can achieve vacuum or return to ambient pressure; wherein the outer box cover and the outer box bottom plate can be separated or buckled through the front-end module, and the inner box cover and the inner box bottom plate can be separated or buckled through the load locking module, and the front-end module and the load locking module are respectively connected to the controlled environment module, so that the inner box can be transferred between the front-end module and the load locking module through the controlled environment manipulator; by connecting the process chamber module with the load locking module, the inner box bottom plate can be transferred between the process chamber module and the load locking module through the process chamber manipulator. Therefore, the present invention can greatly reduce the risk of particle contamination of the optical element in the process of entering and exiting the outer box, entering and exiting the load locking module, entering and exiting the process chamber module, entering and exiting the inner box, and receiving and transferring by the manipulator during the transfer between the front-end module, the controlled environment module, the load locking module, and the process chamber module through the use of the optical element and the optical element protection box, which is beneficial to improve the life of the optical element, reduce the number of cleaning times, improve the detection and processing accuracy, and improve the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 It is a schematic structural diagram of the vacuum environment transfer device for optical elements of the present invention;

[0038] Figure 2 An exploded view of an optical element protection box in the optical element vacuum environment transfer device of the present invention;

[0039] Figure 3 It is a cross-sectional view of an optical element protection box in the optical element vacuum environment transfer device of the present invention;

[0040] Figure 4 It is a schematic diagram of the lifting rod of the front-end module in the vacuum environment transfer device for optical elements of the present invention in the raised state;

[0041] Figure 5 It is a schematic diagram of the falling state of the lifting rod of the front-end module in the vacuum environment transfer device for optical elements of the present invention;

[0042] Figure 6 It is a schematic diagram of the matching state of the front-end module and the optical element protection box in the optical element vacuum environment transfer device of the present invention;

[0043] Figure 7 It is a schematic diagram of the state in which the front-end module in the vacuum environment transfer device for optical elements of the present invention separates the outer box cover and the outer box bottom plate;

[0044] Figure 8 It is a structural schematic diagram of a load locking module in the vacuum environment transfer device for optical elements of the present invention;

[0045] Fig. 9 It is a partial cross-sectional view of a load lock module in the vacuum environment transfer device for optical elements of the present invention;

[0046] Fig.10 It is a schematic diagram of the state in which the inner box cover and the inner box bottom plate are separated by the grabbing mechanism of the load locking module in the vacuum environment transfer device for optical elements of the present invention;

[0047] Fig.11 It is a schematic diagram of the docking state of the front-end module, the load lock module and the controlled environment module in the optical element vacuum environment transfer device of the present invention;

[0048] Fig.12 The figure is a flow chart of the vacuum environment transfer method of the optical element of the present invention.

[0049] Description of reference numerals:

[0050] 100, optical element protection box; 101, outer box cover; 102, inner box cover; 103, optical element; 104, inner box bottom plate; 105, outer box bottom plate; 106, inner box sealing gasket; 107, outer box sealing gasket;

[0051] 200, front end module; 201, front end module chamber; 202, lifting rod;

[0052] 300, load lock module; 301, load lock chamber; 302, grabbing mechanism; 303, support seat;

[0053] 400, controlled environment module; 401, controlled environment chamber; 402, controlled environment manipulator;

[0054] 500, process chamber module; 501, process chamber; 502, process chamber robot. DETAILED DESCRIPTION

[0055] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0057] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. In addition, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0058] Combine the following Figures 1 to 12 The specific embodiments of the optical element vacuum environment transfer device and method of the present invention are described.

[0059] like Figures 1 to 11 As shown, the optical element vacuum environment transfer device according to the embodiment of the present invention includes an optical element protection box 100 , a front-end module 200 , a load lock module 300 , a controlled environment module 400 and a process chamber module 500 .

[0060] The optical element protection box 100 includes an outer box and an inner box arranged inside the outer box, the outer box includes a detachably mounted outer box cover 101 and an outer box bottom plate 105, the inner box includes a detachably mounted inner box cover 102 and an inner box bottom plate 104, the inner box is used to load the optical element 103, and the optical element 103 is loaded on the inner box bottom plate 104. By setting up an optical element protection box with an inner and outer double box structure, the optical element 103 can be effectively protected during the transfer process. The inner box cover 102 has the performance of being breathable and shielding particles, so that the inner box can shield particles throughout the entire process and allow gas molecules to pass through, so that the inner box can achieve vacuum or return to ambient pressure.

[0061] Among them, the front-end module 200 is used to realize the separation or buckling between the outer box cover 101 and the outer box bottom plate 105. The load lock module 300 is used to realize the separation or buckling between the inner box cover 102 and the inner box bottom plate 104. The front-end module 200 and the load lock module 300 are respectively connected to the controlled environment module 400, and the controlled environment module 400 is used to realize the transfer of the inner box between the front-end module 200 and the load lock module 300 through the controlled environment manipulator 402. That is, the controlled environment manipulator 402 can realize the sequential transfer of the inner box from the front-end module 200 to the controlled environment module 400 to the load lock module 300, and can also realize the sequential transfer of the inner box from the load lock module 300 to the controlled environment module 400 to the front-end module 200.

[0062] The process chamber module 500 is connected to the load lock module 300 , and the process chamber module 500 is used to transfer the inner box bottom plate 104 between the process chamber module 500 and the load lock module 300 through the process chamber robot 502 .

[0063] That is, before the optical element 103 enters the process chamber module 500, it is always protected by the inner box cover 102 and the inner box bottom plate 104 until the inner box cover 102 is separated from the inner box bottom plate 104 in the load lock module 300, and the optical element 103 is exposed to the environment in the load lock module 300. Then, the process chamber robot 502 delivers the optical element 103 together with the inner box bottom plate 104 into the process chamber module 500.

[0064] After the optical element 103 completes the process treatment in the process chamber module 500, the process chamber robot 502 sends the optical element 103 and the inner box bottom plate 104 to the load locking module 300, and then re-fastens the inner box cover 102 and the inner box bottom plate 104 in the load locking module 300 to complete the loading of the optical element in the inner box and the closing of the inner box.

[0065] In the above transfer process, the controlled environment robot 402 and the process chamber robot 502 are both supported on the inner box bottom plate 104 when transferring the optical element 103. Neither the controlled environment robot 402 nor the process chamber robot 502 has direct contact with the optical element 103, which greatly reduces the chance of particle generation and release caused by direct contact.

[0066] Therefore, the optical element vacuum environment transfer device of the embodiment of the present invention, through the coordinated use of the optical element 103 and the optical element protection box 100, can greatly reduce the risk of particle contamination of the optical element 103 in the process of entering and exiting the outer box, entering and exiting the load locking module 300, entering and exiting the process chamber module 500, entering and exiting the inner box, and being received and transferred by the robot during the transfer process between the front-end module 200, the controlled environment module 400, the load locking module 300, the process chamber module 500, and the inner box, and the robot arm, which is beneficial to increase the life of the optical element, reduce the number of cleaning times, improve the detection and processing accuracy, and improve the product yield.

[0067] Specifically, a circle of inner box sealing gasket 106 is provided on the inner box bottom plate 104 to seal with the inner box cover 102. When the inner box cover 102 is buckled with the inner box bottom plate 104, the inner box can be closed and sealed. A circle of outer box sealing gasket 107 is provided on the outer box bottom plate 105 to seal with the outer box cover 101. When the outer box cover 101 is buckled with the outer box bottom plate 105, the outer box can be closed and sealed.

[0068] The cross-sectional dimension of the outer ring of the outer box cover 101 is larger than the cross-sectional dimension of the outer ring of the outer box bottom plate 105, so that the outer box cover 101 and the outer box bottom plate 105 can be directly buckled or separated from each other. The cross-sectional dimension of the outer ring of the inner box cover 102 is larger than the cross-sectional dimension of the outer ring of the inner box bottom plate 104, so that the inner box cover 102 and the inner box bottom plate 104 can be directly buckled or separated from each other from each other.

[0069] Specifically, the process chamber module 500 includes a process chamber 501 and a process chamber robot 502 disposed in the process chamber 501. A target chuck (not shown) is also disposed in the process chamber module 500, wherein the process chamber robot 502 and the target chuck are both existing structural forms inside the process chamber module 500. The process chamber robot 502 delivers the optical element together with the inner box bottom plate 104 into the process chamber module 500. After reaching the vicinity of the target chuck, the tool on the target chuck separates the optical element 103 from the inner box bottom plate 104 and loads and positions the optical element 103 on the target chuck. Then, the process chamber robot 502 delivers the inner box bottom plate 104 to the load lock module 300, waiting for the optical element to complete the process processing such as detection and exposure.

[0070] When the optical element 103 completes the process, the tool on the target chuck separates the optical element 103 from the chuck, and at the same time, the process chamber robot 502 carries the inner box bottom plate 104 to the vicinity of the chuck. After the tool on the chuck loads the optical element 103 onto the inner box bottom plate 104, the process chamber robot 502 sends the optical element 103 and the inner box bottom plate 104 to the load locking module 300 together.

[0071] That is, in the above-mentioned transfer process, only the tool on the target chuck makes direct contact with the optical element 103 twice when loading and unloading the optical element 103, and the process chamber robot 502 is supported on the inner box bottom plate 104 when transferring the optical element 103, and the process chamber robot 502 does not make direct contact with the optical element 103, which greatly reduces the chance of particle generation and release caused by direct contact.

[0072] Specifically, the front-end module 200 includes a front-end module chamber 201, and an outer box cover limit port is provided on the top of the front-end module chamber 201, wherein the size of the outer box cover limit port is larger than the size of the outer box bottom plate 105 and smaller than the size of the outer box cover 101, that is, the outer box bottom plate 105 can enter the front-end module chamber 201 through the outer box cover limit port, and the outer box cover 101 will be stuck at the upper end of the outer box cover limit port, thereby facilitating the separation between the outer box cover 101 and the outer box bottom plate 105.

[0073] The side wall of the front module chamber 201 is provided with an inner box inlet and outlet, and the front module chamber 201 is connected to the controlled environment module 400 through the inner box inlet and outlet. That is, when the outer box bottom plate 105 descends to the position of the inner box inlet and outlet, the controlled environment manipulator 402 can pass through the inner box inlet and outlet to clamp and separate the inner box from the outer box bottom plate 105 and take it out.

[0074] The front-end module 200 further includes a lifting rod 202, which can extend into the front-end module chamber 201 through the bottom port of the front-end module chamber 201, and drive the outer box bottom plate 105 to transfer up and down between the outer box cover limit port and the position of the inner box inlet and outlet along the front-end module chamber 201. That is, when the upper end surface of the lifting rod 202 rises to a position flush with the outer box cover limit port, the optical element protection box 100 is placed on the outer box cover limit port, and the outer box bottom plate 105 falls on the upper end surface of the lifting rod 202 in the outer box cover limit port, and then the lifting rod 202 is controlled to fall, then the outer box bottom plate 105 and the inner box placed on the outer box bottom plate 105 will fall synchronously with the lifting rod 202 under the action of their own gravity, and the outer box cover 101 will be stuck on the outer box cover limit port to achieve the separation between the outer box bottom plate 105 and the outer box cover 101.

[0075] According to actual use requirements, the lifting rod 202 can select existing structural forms such as electric lifting rods, pneumatic lifting rods, etc., as long as reliable lifting and driving operations can be achieved.

[0076] Of course, in order to prevent the outer box bottom plate 105 and the outer box cover 101 from sticking and being difficult to separate, a vacuum suction cup can be optionally provided on the end surface of the lifting rod 202 to adsorb the outer box bottom plate 105 .

[0077] When the lifting rod 202 drives the outer box bottom plate 105 to fall to the position of the inner box inlet and outlet, the lifting rod 202 stops moving and waits for the controlled environment manipulator 402 to clamp and separate the inner box from the outer box bottom plate 105 and take it out. At this time, the lifting rod 202 supports the outer box bottom plate 105 to remain motionless.

[0078] Similarly, when the optical element 103 completes the process and is reloaded into the inner box for transfer, the controlled environment robot 402 puts the inner box back onto the outer box bottom plate 105, and then controls the lifting rod 202 to rise until the lifting rod 202 pushes the outer box bottom plate 105 out of the outer box cover limit port. During the process of the outer box bottom plate 105 being pushed out, the outer box bottom plate 105 can be re-fastened with the outer box cover 101.

[0079] Specifically, the load locking module 300 includes a load locking chamber 301, in which a grabbing mechanism 302 and a support seat 303 are respectively provided. The grabbing mechanism 302 is arranged above the support seat 303, and the support seat 303 is used to support the inner box bottom plate 104. The grabbing mechanism 302 is used to grab the inner box cover 102 and separate or buckle the inner box cover 102 and the inner box bottom plate 104.

[0080] When the inner box cover 102 and the inner box bottom plate 104 need to be separated, the grabbing mechanism 302 is controlled to move downward from the initial position to a predetermined position to grab the inner box cover 102, and then the grabbing mechanism 302 is controlled to drive the inner box cover 102 to move upward together.

[0081] When it is necessary to re-fasten the inner box cover 102 and the inner box bottom plate 104, the gripping mechanism 302 is controlled to move the inner box cover 102 downward to a predetermined position so that the inner box cover 102 and the inner box bottom plate 104 are in close contact and then released to re-fasten the inner box cover 102 and the inner box bottom plate 104, and then the gripping mechanism 302 moves upward to the initial position.

[0082] Of course, in order to prevent the inner box cover 102 and the inner box bottom plate 104 from sticking together and being difficult to separate, a vacuum suction cup may be optionally provided on the support seat 303 to absorb the inner box bottom plate 104 .

[0083] According to actual use requirements, the gripping mechanism 302 can select existing structural forms such as mechanical claw gripping mechanism, suction cup gripping mechanism, etc., as long as it can effectively grasp the inner box cover 102. The up and down movement of the gripping mechanism 302 can be achieved by an existing electric lifting mechanism or a pneumatic lifting mechanism.

[0084] Specifically, the controlled environment module 400 includes a controlled environment chamber 401 and a controlled environment robot 402 disposed inside the controlled environment chamber 401 . The controlled environment robot 402 can transfer the inner box between the front-end module chamber 201 , the controlled environment chamber 401 and the load lock chamber 301 in sequence.

[0085] According to actual use requirements, the controlled environment manipulator 402 can select a multi-degree-of-freedom manipulator with an existing structure, which is flexible in operation.

[0086] The controlled environment module 400 is also provided with a first positive pressure device (not shown in the figure), which is used to fill the controlled environment chamber 401 with clean gas, so that the internal air pressure of the controlled environment chamber 401 is slightly higher than the internal air pressure of the front-end module chamber 201, so as to keep the airflow in the controlled environment chamber 401 flowing to the front-end module chamber 201, so as to prevent possible particles from flowing into the front-end module chamber 201 and entering the controlled environment chamber 401 with the inner box. Corresponding air outlets can be provided on the side wall of the front-end module chamber 201.

[0087] Among them, sealed doors that can be opened and closed are provided at the interface between the load lock module 300 and the controlled environment module 400, and at the interface between the load lock module 300 and the process chamber module 500, so as to ensure the internal air pressure state of the load lock chamber 301.

[0088] Among them, the load locking module 300 is also provided with a negative pressure device (not shown in the figure). When the inner box bottom plate 104 carries the optical element 103 and remains in a snap-fit ​​state with the inner box cover 102 and stays in the load locking chamber 301 before entering the process chamber 501, the negative pressure device is controlled to evacuate the inside of the load locking chamber 301 to make the internal pressure of the load locking chamber 301 transition to the same as that of the process chamber 501.

[0089] Among them, the load lock module 300 is also provided with a second positive pressure device (not shown in the figure). When the inner box bottom plate 104 carrying the optical element 103 is transferred from the process chamber 501 to the load lock chamber 301 and is buckled with the inner box cover 102, the second positive pressure device is controlled to fill the load lock chamber 301 with clean gas, so that the internal pressure of the load lock chamber 301 is transitioned to the same as that of the controlled environment chamber 401.

[0090] like Fig.12As shown, an embodiment of the present invention further provides a method for transferring a vacuum environment of an optical element, using the vacuum environment transfer device of the optical element of the above embodiment, specifically comprising the following steps:

[0091] The front module separates the outer box cover and the outer box bottom plate;

[0092] The controlled environment robot separates the inner box from the outer box base;

[0093] The controlled environment manipulator transfers the inner box from the front end module into the controlled environment module, and then from the controlled environment module into the load lock module;

[0094] Evacuate the load lock module;

[0095] The gripping mechanism of the load lock module grips the inner box cover and separates the inner box cover from the inner box bottom plate;

[0096] The process chamber robot transfers the inner box bottom plate carrying the optical components from the load lock module into the process chamber module;

[0097] The process chamber module separates the inner box bottom plate from the optical element, and then processes the optical element;

[0098] The optical components after processing are then placed back on the bottom plate of the inner box;

[0099] The process chamber robot transfers the inner box bottom plate carrying the optical components from the process chamber module into the load lock module;

[0100] The gripping mechanism of the load lock module refastens the inner box cover with the inner box bottom plate;

[0101] Filling the load lock module with clean gas;

[0102] The controlled environment manipulator transfers the inner box from the load lock module into the controlled environment module, and then from the controlled environment module into the front end module;

[0103] The controlled environment robot puts the inner box back onto the outer box base;

[0104] The front end module buckles the outer box cover and the outer box bottom plate.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical element vacuum environment transfer device, characterized in that: include: An optical element protection box, comprising an outer box and an inner box arranged inside the outer box, wherein the outer box comprises a detachably mounted outer box cover and an outer box bottom plate, and the inner box comprises a detachably mounted inner box cover and an inner box bottom plate, wherein the inner box cover is a box cover structure that is breathable and can shield particles, and the optical element is loaded on the inner box bottom plate; A front end module, used for separating or fastening the outer box cover and the outer box bottom plate; A load locking module, used for separating or fastening the inner box cover and the inner box bottom plate; A controlled environment module, wherein the front-end module and the load lock module are respectively connected to the controlled environment module, and the controlled environment module is used to realize the transfer of the inner box between the front-end module and the load lock module through a controlled environment manipulator; The process chamber module is connected to the load lock module and is used for transferring the inner box bottom plate between the process chamber module and the load lock module through a process chamber robot.

2. The optical element vacuum environment transfer device according to claim 1, characterized in that: The front-end module includes a front-end module chamber, and an outer box cover limit port is provided on the top of the front-end module chamber. The size of the outer box cover limit port is larger than the size of the outer box bottom plate and smaller than the size of the outer box cover. The outer box bottom plate can enter the front-end module chamber through the outer box cover limit port.

3. The optical element vacuum environment transfer device according to claim 2, characterized in that: An inner box inlet and outlet are provided on the side wall of the front-end module chamber, and the front-end module chamber is connected to the controlled environment module through the inner box inlet and outlet.

4. The optical element vacuum environment transfer device according to claim 3, characterized in that: The front-end module further comprises a lifting rod, and the lifting rod can drive the outer box bottom plate to transfer up and down between the outer box cover limit port and the inner box inlet and outlet position.

5. The optical element vacuum environment transfer device according to claim 2, characterized in that: The load locking module comprises a load locking chamber, in which a support seat and a grabbing mechanism are respectively arranged, the support seat is used to support the inner box bottom plate, and the grabbing mechanism is used to grab the inner box cover so as to separate or buckle the inner box cover and the inner box bottom plate.

6. The optical element vacuum environment transfer device according to claim 5, characterized in that: The controlled environment module includes a controlled environment chamber and a controlled environment robot disposed inside the controlled environment chamber, wherein the controlled environment robot is capable of transferring the inner box between the front end module chamber, the controlled environment chamber and the load lock chamber.

7. The optical element vacuum environment transfer device according to claim 6, characterized in that: The controlled environment module is also provided with a first positive pressure device, which is used to fill the controlled environment chamber with clean gas to keep the airflow in the controlled environment chamber flowing toward the front-end module chamber.

8. The optical element vacuum environment transfer device according to claim 6, characterized in that: The load lock module is also provided with a negative pressure device, and when the inner box bottom plate carrying the optical element enters the process chamber module and remains in a buckled state with the inner box cover in the load lock chamber, the negative pressure device is used to evacuate the interior of the load lock chamber.

9. The optical element vacuum environment transfer device according to claim 6, characterized in that: The load lock module is also provided with a second positive pressure device, which is used to fill the load lock chamber with clean gas after the inner box bottom plate carrying the optical element is transferred from the process chamber module to the load lock chamber and is buckled with the inner box cover.

10. A method for transferring an optical element to a vacuum environment, characterized in that: The optical element vacuum environment transfer device according to any one of claims 1 to 9 is used, and specifically comprises the following steps: The front module separates the outer box cover and the outer box bottom plate; The controlled environment robot separates the inner box from the outer box base; The controlled environment manipulator transfers the inner box from the front end module into the controlled environment module, and then from the controlled environment module into the load lock module; Evacuate the load lock module; The gripping mechanism of the load lock module grips the inner box cover and separates the inner box cover from the inner box bottom plate; The process chamber robot transfers the inner box bottom plate from the load lock module into the process chamber module; The process chamber module separates the inner box bottom plate from the optical element, and then processes the optical element; The optical components after processing are then placed back on the bottom plate of the inner box; The process chamber robot transfers the inner box bottom plate from the process chamber module into the load lock module; The gripping mechanism of the load lock module refastens the inner box cover with the inner box bottom plate; Filling the load lock module with clean gas; The controlled environment manipulator transfers the inner box from the load lock module into the controlled environment module, and then from the controlled environment module into the front end module; The controlled environment robot puts the inner box back onto the outer box base; The front end module buckles the outer box cover and the outer box bottom plate.

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