Ultra-precision machine tool EtherCAT bus type control method based on Power PMAC series controller

Abstract

The invention discloses an ultra-precision machine tool EtherCAT bus type control method based on a Power PMAC series controller, and belongs to the field of ultra-precision equipment manufacturing. The method comprises the following steps of: connecting a group of Triamec drivers with a motion shaft of the ultra-precision machine tool; wherein a power line of each motion shaft motor is connected with a power interface of the corresponding Triamec driver, and a feedback line of the corresponding motor grating is connected with a feedback interface of the corresponding Triamec driver; the Power PMAC series controller, the Triamec driver and the Beta IO module are connected in sequence through network cables; the Power PMAC series controller comprises a CK3M, a CK5M, a CK3E and a Power UMAC, and one of the CK3M, the CK5M, the CK3E and the Power UMAC is selected during use; the Power PMAC series controller, the Triamec driver and the Beta IO module are respectively and electrically connected with a power supply; a Triamec driver and a motion shaft are debugged; the independent operation mode of the Triamec driver is modified into a bus mode, and the controller is adjusted through Power PMAC IDE; a controller, a driver and a Baifu IO module are configured by debugging a guide or writing a script file through Power PMAC IDE so as to realize high-precision single-axis motion or multi-axis linkage of the ultra-precision machine tool.

Description

Technical Field

[0001] The present invention belongs to the field of ultra-precision equipment manufacturing, relates to ultra-precision CNC machine tool control technology, and specifically relates to an EtherCAT bus type control method for ultra-precision machine tools based on a Power PMAC series controller. Background Art

[0002] Ultra-precision machining machine tools are a new type of mechanical processing equipment that adapts to the development of high-tech. It integrates the research results in the mechanical field during the development of science and technology, as well as new achievements in other fields including modern electronic technology, measurement technology, computer technology, advanced control technology, etc. The manufacturing level of ultra-precision equipment determines the technical level of ultra-precision machining. With the gradual development of ultra-precision equipment technology, the current limit accuracy of ultra-precision machining is developing towards nanometer and sub-nanometer accuracy. However, compared with advanced foreign ultra-precision equipment, there is still some gap in the processing performance of domestic ultra-precision machine tools, which limits the further improvement of processing accuracy. Therefore, the manufacturing technology of domestic ultra-precision equipment still needs to be continuously improved on the basis of existing technology.

[0003] Mechanical structure and control system are the two most basic parts of the entire ultra-precision machine tool. The mechanical structure as the execution part itself needs to have extremely high motion accuracy, while the control system as the "brain" and driving part of the machine tool determines whether the mechanical structure can play its high-precision motion characteristics according to the processing instructions during the processing. Therefore, designing a reasonable control system solution for ultra-precision machine tools is extremely important for improving the processing performance of machine tools. At present, the control systems of domestic ultra-precision equipment basically adopt the "Power PMAC series controller + linear amplifier" method, and most foreign ultra-precision machine tool manufacturers also adopt this solution. In the above method, the Power PMAC series controller is the main control unit. It connects the linear amplifier, grating feedback signal line and other analog and digital signal lines through the local axis card, and expands the interface by physically connecting the local axis card behind the controller CPU axis card. The current loop, speed loop, and position loop closed-loop control of the "Power PMAC series controller + linear amplifier" control method are implemented in the Power PMAC series controller. The linear amplifier is responsible for linearly amplifying the low-voltage control signal output by the controller. The amplified signal can be used to drive the motor of the ultra-precision machine tool motion axis. In addition to the above methods, the ultra-precision machine tools of Innolite in Germany use the EtherCAT bus control method of "Beckhoff controller + Beckhoff drive / Triamec drive". In this method, the Beckhoff controller is responsible for the calculation of the upper trajectory level, and then sends the calculation results to the drive through the EtherCAT bus protocol, and implements the current loop, speed loop, and position loop closed-loop control of the machine tool motion axis control command input and feedback in the drive, thereby achieving high-precision control of the motion axis. However, the Beckhoff controller has technical limitations for domestic ultra-precision machine tools, and the machine tool position display accuracy it supports does not meet the requirements of ultra-precision machine tools. Therefore, domestic ultra-precision machine tools rarely use the EtherCAT bus control method of "Beckhoff controller + Beckhoff drive / Triamec drive". Summary of the invention

[0004] The purpose of the present invention is to solve the above-mentioned problems existing in the prior art and provide an EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controllers, that is, an ultra-precision machine tool control method of Power PMAC series controllers + Triamec drivers. This method replaces the Beckhoff controller that has technical limitations on domestic ultra-precision machine tools with the Power PMAC series controllers, and at the same time enhances the compatibility of the Power PMAC series controllers with other devices through the EtherCAT bus, providing a new control solution for domestic ultra-precision machine tools, which has practical significance for the technical improvement of domestic ultra-precision equipment manufacturing.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] An EtherCAT bus control method for ultra-precision machine tools based on a Power PMAC series controller, the method comprising the following steps:

[0007] S1: Connect a group of Triamec drivers to the motion axes of the ultra-precision machine tool respectively; wherein: the power line of each motion axis motor is connected to the power interface of the corresponding Triamec driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the corresponding Triamec driver;

[0008] S2: Connect the Power PMAC series controller, Triamec drive and Beckhoff IO module in sequence through network cables to realize control information interaction among the three; the Power PMAC series controller includes CK3M, CK5M, CK3E and PowerUMAC, and one of the controllers is selected when using;

[0009] S3: Install the Power PMAC series controller, Triamec drive and Beckhoff IO module into the electrical control cabinet and electrically connect them to the power supply respectively;

[0010] S4: Debug the Triamec drive and motion axis separately to optimize the motion state of the motion axis;

[0011] S5: Change the standalone operation mode of all Triamec drives to bus mode and adjust the controller via Power PMACIDE;

[0012] S6: Configure the controller, drive, and Beckhoff IO modules through the Power PMAC IDE debugging wizard or write script files to achieve high-precision single-axis motion or multi-axis linkage for ultra-precision machine tools.

[0013] Furthermore, in S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a three-axis ultra-precision machine tool, which has an X-axis, a Z-axis and a C-axis, and the C-axis motor power line of the three-axis ultra-precision machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the three-axis ultra-precision machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD80 driver; the low-speed moving X-axis and Z-axis are driven by the TSD80 driver, and the high-speed moving C-axis is driven by the TSD300 driver.

[0014] Furthermore, in S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a four-axis ultra-precision horizontal machine tool, which has two linear axes, namely, X-axis and Z-axis, and two rotary axes, namely, C-axis and B-axis; the C-axis and B-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD300 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD80 driver; the X-axis and Z-axis are driven by the TSD80 driver, and the C-axis and B-axis are driven by the TSD300 driver.

[0015] Further, in S1, the number of the group of Triamec drivers is three, namely, two TSD80 drivers and one TSD300 driver, the two TSD80 drivers are respectively the first TSD80 driver and the second TSD80 driver; the ultra-precision machine tool is a five-axis ultra-precision horizontal machine tool, the five-axis ultra-precision horizontal machine tool has three linear axes, namely, the X-axis, the Y-axis and the Z-axis, and two rotary axes, namely, the C-axis and the B-axis, the X-axis and the Z-axis motor power lines of the five-axis ultra-precision horizontal machine tool are both connected to the first TSD80 driver The power interface of the actuator is connected, and the feedback line of the corresponding motor grating is connected to the feedback interface of the first TSD80 driver; the power lines of the Y-axis and B-axis motors of the five-axis ultra-precision horizontal machine tool are connected to the power interface of the second TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the second TSD80 driver; the power line of the C-axis motor of the five-axis ultra-precision horizontal machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver.

[0016] Furthermore, in S2, for the three-axis ultra-precision machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0017] Furthermore, in S2, for the four-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0018] Furthermore, in S2, for a five-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the first TSD80 driver with a network cable, and then the EtherCAT output network port of the first TSD80 driver needs to be connected to the EtherCAT input network port of the second TSD80 driver with a network cable, and then the EtherCAT output network port of the second TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0019] Further, in S4, the Triamec driver and the motion axis are debugged respectively, and the specific process is:

[0020] S41: Debug the X-axis. For three-axis ultra-precision machine tools, first connect the TSD80 driver with the help of Triamec debugging software, adjust the TSD80 driver to independent operation mode, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the X-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis driver. When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the X-axis of the TSD80 driver is completed;

[0021] S42: Debug the Z axis; first connect the TSD80 driver with the help of Triamec debugging software, adjust the TSD80 driver to independent operation mode, enter the Z axis motor parameters and grating system feedback parameters in the Z axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the Z axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the Z axis by debugging the driving Z axis. When the Z axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the Z axis of the TSD80 driver is completed;

[0022] S43: Debug the C-axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the C-axis by debugging the drive C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the C-axis by the TSD300 driver is completed.

[0023] Further, in S4, the Triamec driver and the motion axis are debugged respectively, and the specific process is:

[0024] S41: Debug the X-axis and Z-axis. For the four-axis ultra-precision horizontal machine tool, first connect the TSD80 driver with the help of Triamec debugging software, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the X-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis. When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD80 driver debugging of the X-axis is completed.

[0025] After that, input the Z-axis motor parameters and grating system feedback parameters in the Z-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the Z-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD80 driver position loop, and check the motion accuracy of the Z-axis by debugging the driving Z-axis. When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters, and the TSD80 driver debugging of the Z-axis is completed;

[0026] S42: Debug the C-axis and B-axis; connect the TSD300 driver through the Triamec debugging software, input the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD300 driver, and check the motion accuracy of the C-axis by debugging the C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the C-axis is completed;

[0027] Afterwards, enter the B-axis motor parameters and grating system feedback parameters in the B-axis module of the TSD300 driver debugging software, then use the TSD300 driver to sweep the B-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the B-axis by debugging the drive B-axis. When the B-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the B-axis is completed.

[0028] Further, in S4, the Triamec driver and the motion axis are debugged respectively, and the specific process is:

[0029] S41: Debug the X-axis and Z-axis; for the five-axis ultra-precision horizontal machine tool, first connect the first TSD80 driver with the help of Triamec debugging software, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the first TSD80 driver debugging software, and then use the first TSD80 driver to sweep the X-axis and adjust the current loop of the first TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the first TSD80 driver, check the motion accuracy of the X-axis by debugging the driving X-axis, save the debugging parameters when the X-axis motion accuracy reaches the expected accuracy, and then the first TSD80 driver completes the debugging of the X-axis;

[0030] After that, input the Z-axis motor parameters and the grating system feedback parameters into the Z-axis module of the first TSD80 driver software, and then use the first TSD80 driver to sweep the Z-axis and adjust the current loop of the first TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the first TSD80 driver, and check the motion accuracy of the Z-axis by debugging the driving Z-axis. When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the first TSD80 driver completes the debugging of the Z-axis;

[0031] S42: Debug the Y-axis and B-axis; connect the second TSD80 driver through the Triamec debugging software, input the Y-axis motor parameters and the grating system feedback parameters in the Y-axis module of the second TSD80 driver software, and then use the second TSD80 driver to sweep the Y-axis and adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the second TSD80 driver, check the motion accuracy of the Y-axis by debugging the driving Y-axis, save the debugging parameters when the Y-axis motion accuracy reaches the expected accuracy, and the second TSD80 driver debugging of the Y-axis is completed;

[0032] After that, input the B-axis motor parameters and grating system feedback parameters into the B-axis module of the second TSD80 driver software, and then use the second TSD80 driver to sweep the B-axis and adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the second TSD80 driver, and check the motion accuracy of the B-axis by debugging the B-axis. When the B-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the second TSD80 driver completes the debugging of the B-axis;

[0033] S43: Debug the C-axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the C-axis by debugging the drive C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the C-axis by the TSD300 driver is completed.

[0034] Compared with the "Power PMAC series controller + linear amplifier" method commonly used in domestic ultra-precision machine tools, the present invention has the following advantages:

[0035] 1. The distributed control method simplifies the wiring problem and saves space in the ultra-precision machine tool control cabinet. The traditional ultra-precision machine tool control method is a centralized control method. The linear amplifier of the drive motor, the motion axis grating feedback system, the handwheel device, and the signal lines of other auxiliary devices need to be connected to the controller. When the number of axes of the ultra-precision machine tool is large, while increasing the number of drivers, more axis cards need to be added to the controller, which not only increases the complexity of the line connection in the machine tool electric control cabinet, but also takes up more space. The control method proposed in the present invention is a distributed control method. The motor control line and the grating system signal line of each axis are connected to the corresponding EtherCAT bus-type driver to form an independent small control unit. The signal lines of the handwheel and other auxiliary devices can be connected to the EtherCAT bus-type IO module. The driver and IO module only need to be connected to the controller in turn through the network cable, and the control information interaction between the devices can be realized through the EtherCAT bus. In the bus-type control method, the Power PMAC series controller only needs a CPU with an EtherCAT module, and no other axis cards need to be configured, which not only simplifies the wiring, but also saves the control cabinet space.

[0036] 2. It improves the expansion capability of the ultra-precision machine tool control system and provides more optional drive solutions for the motion axis system. Compared with the traditional control method, the EtherCAT bus control method greatly improves the expansion capability of the machine tool control system. As long as the expanded device supports the EtherCAT protocol, the Power PMAC series controller can be connected through a network cable to control it, which also makes the drive device of the ultra-precision machine tool more selective. When the traditional method is adopted, the local axis of the Power PMAC controller cooperates with the linear amplifier to realize closed-loop control of the motion axis. Due to the differences in manufacturing principles and manufacturing accuracy of different ultra-precision machine tool motion axes, the same control scheme may also have different control performances for different motion axes. This is because the traditional method Power PMAC controller has limited adjustment capabilities, and it is difficult to control various motion axes to exert the best motion level under different working conditions. The EtherCAT bus control method proposed by the present invention supports the selection of different models of EtherCAT bus drivers suitable for different motion axes. The Power PMAC controller only needs to process the processing instructions into position signals and send them to the driver, so that the driver can realize the drive adjustment of the motion axis.

[0037] 3. It can effectively save the cost of ultra-precision machine tool control systems. In traditional control methods, in order to ensure the servo performance of machine tool control systems, Power UMAC controllers in the Power PMAC series controllers are generally used. In addition to using Power UMAC, the control method proposed in the present invention can also achieve good control effects with lower-cost Power PMAC series controllers such as CK3E, CK3M and CK5M. At the same time, the method proposed in the present invention only needs to use the CPU card of the Power PMAC series controller, and no longer needs the more expensive local axis card used in traditional methods, which will greatly reduce the cost of ultra-precision machine tool control systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 1 is a schematic diagram of a case in which the control method of the present invention is applied to a three-axis ultra-precision machine tool;

[0039] Figure 2 1 is a schematic diagram of a case in which the control method of the present invention is applied to a four-axis ultra-precision machine tool;

[0040] Figure 3 It is a schematic diagram of a case in which the control method of the present invention is applied to a five-axis ultra-precision machine tool.

[0041] In the above three pictures, the red box represents the EtherCAT input network port, the green box represents the EtherCAT output network port, the gray box represents other electrical components of the electric control cabinet, the brown lines represent the power signal lines of each axis, and the green lines represent the grating feedback signal lines of each axis. DETAILED DESCRIPTION

[0042] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings and embodiments. Obviously, the described embodiments are only part of the embodiments of the invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0043] Specific implementation method 1: Figure 1-Figure 3 As shown, this embodiment discloses an EtherCAT bus control method for ultra-precision machine tools based on a Power PMAC series controller, the method comprising the following steps:

[0044] S1: Connect a group of Triamec drivers to the motion axes of the ultra-precision machine tool respectively; wherein: the power line of each motion axis motor is connected to the power interface of the corresponding Triamec driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the corresponding Triamec driver;

[0045] S2: Connect the Power PMAC series controller, Triamec drive and Beckhoff IO module in sequence through a network cable to realize control information interaction among the three; the Power PMAC series controller includes CK3M, CK5M, CK3E and PowerUMAC, and one of the controllers is selected when using (because there are multiple models of PowerPMAC series controllers to choose from in the method proposed by the present invention, the specification takes CK3M-121 (121 is the CPU model of CK3M) as an example, and the computing power of CK5M and PowerUMAC is stronger than that of CK3E and CK3M, and it is recommended to select these two types for ultra-precision machine tools with a large number of axes);

[0046] S3: Install the Power PMAC series controller, Triamec drive and Beckhoff IO module into the electrical control cabinet and electrically connect them to the power supply (to power these components).

[0047] For example, it provides 24V DC logic power for the controller, driver, and Beckhoff IO module, and 80V and 300V DC power for the TSD80 driver and TSD300 driver respectively. The signal lines of the pulse handwheel and other auxiliary equipment such as oil, gas, and liquid of the machine tool are connected to the corresponding Beckhoff IO module and controlled by PLC.

[0048] S4: Debug the Triamec drive and motion axis separately to optimize the motion state of the motion axis;

[0049] S5: Change the standalone operation mode of all Triamec drives to bus mode and adjust the controller via Power PMACIDE;

[0050] S6: Configure the controller, drive, and Beckhoff IO modules through the Power PMAC IDE debugging wizard or write script files to achieve high-precision single-axis motion or multi-axis linkage for ultra-precision machine tools.

[0051] Further, such as Figure 1As shown, in S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a three-axis ultra-precision machine tool, which has an X-axis, a Z-axis and a C-axis (i.e., three motion axes), and the C-axis motor power line of the three-axis ultra-precision machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the three-axis ultra-precision machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD80 driver; the low-speed moving X-axis and Z-axis are driven by the TSD80 driver, and the high-speed moving C-axis is driven by the TSD300 driver.

[0052] Further, such as Figure 2 As shown, in S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a four-axis ultra-precision horizontal machine tool, which has two linear axes, namely, X-axis and Z-axis, and two rotary axes, namely, C-axis and B-axis (i.e., four motion axes); the C-axis and B-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD300 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD80 driver; the X-axis and Z-axis are driven by the TSD80 driver, and the C-axis and B-axis are driven by the TSD300 driver.

[0053] Further, such as Figure 3As shown, in S1, the number of the group of Triamec drivers is three, namely, two TSD80 drivers and one TSD300 driver, the two TSD80 drivers are respectively the first TSD80 driver and the second TSD80 driver; the ultra-precision machine tool is a five-axis ultra-precision horizontal machine tool, the five-axis ultra-precision horizontal machine tool has three linear axes, namely, X-axis, Y-axis and Z-axis, and two rotary axes, namely, C-axis and B-axis (i.e., five motion axes), the X-axis and Z-axis motor power lines of the five-axis ultra-precision horizontal machine tool are both connected to the power interface of the first TSD80 driver, and the feedback lines of the corresponding motor gratings are connected to the first TSD80 The Y-axis and B-axis motor power lines of the five-axis ultra-precision horizontal machine tool are connected to the power interface of the second TSD80 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the second TSD80 driver (the Y-axis and B-axis are driven by the second TSD80 driver); the C-axis motor power line of the five-axis ultra-precision horizontal machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver (the C-axis is driven by the TSD300 driver).

[0054] Further, such as Figure 1 As shown, in S2, for the three-axis ultra-precision machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0055] Taking the CK3M-121 controller as an example, when connecting the CK3M-121 controller and the drive, you need to connect the EtherCAT network port of the CK3M-121 controller to the EtherCAT input network port of the TSD80 drive with a network cable, then connect the EtherCAT output network port of the TSD80 drive to the EtherCAT input network port of the TSD300 drive with a network cable, and finally connect the EtherCAT output network port of the TSD300 drive to the input network port of the Beckhoff IO module coupler EK1100. The specific connection method is shown as follows Figure 1 shown.

[0056] Further, such as Figure 2As shown, in S2, for a four-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0057] Taking the CK3M-121 controller as an example, when connecting the CK3M-121 controller and the drive, you need to connect the EtherCAT network port of the CK3M-121 controller to the EtherCAT input network port of the TSD80 drive with a network cable, then connect the EtherCAT output network port of the TSD80 drive to the EtherCAT input network port of the TSD300 drive with a network cable, and finally connect the EtherCAT output network port of the TSD300 drive to the input network port of the Beckhoff IO module coupler EK1100. The specific connection method is shown as follows Figure 2 shown.

[0058] Further, such as Figure 3 As shown, in S2, for a five-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the first TSD80 driver with a network cable, and then the EtherCAT output network port of the first TSD80 driver needs to be connected to the EtherCAT input network port of the second TSD80 driver with a network cable, and then the EtherCAT output network port of the second TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

[0059] Taking the CK3M-121 controller as an example, when connecting the CK3M-121 controller and the drive, you need to connect the EtherCAT network port of the CK3M-121 controller to the EtherCAT input network port of the first TSD80 drive with a network cable, and then connect the EtherCAT output network port of the first TSD80 drive to the EtherCAT input network port of the second TSD80 drive with a network cable, and then connect the EtherCAT output network port of the second TSD80 drive to the EtherCAT input network port of the TSD300 drive with a network cable, and finally connect the EtherCAT output network port of the TSD300 drive to the input network port of the Beckhoff IO module coupler EK1100. The specific connection method is shown as follows Figure 3 shown.

[0060] Further, such as Figure 1 As shown, in S4, the Triamec drive and the motion axis are debugged separately, and the specific process is:

[0061] S41: Debug the X-axis; for three-axis ultra-precision machine tools, first connect the TSD80 driver with the help of the Triamec debugging software (install the Triamec debugging software on the computer, and then connect the computer network port and the Triamec driver debugging network port through a network cable, so that the Triamec debugging software on the computer can debug the driver, so that the driver drives the X-axis connected to it), adjust the TSD80 driver to the independent operation mode, and enter the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, including: motor voltage parameters, current parameters, number of magnetic poles, resolution, grating signal type, grating resolution, X-axis motion unit, phase-seeking parameters, acceleration and deceleration parameters; then Use the TSD80 driver to sweep the X-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the current loop of the driver). Then adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the position loop of the driver). Then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis (adjusting and optimizing the position loop parameters can improve the motion state of the X-axis). When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD80 driver completes independent debugging of the X-axis.

[0062] S42: Debug the Z axis; first connect the TSD80 driver with the help of Triamec debugging software (install the Triamec debugging software on the computer, and then connect the computer network port and the Triamec driver debugging network port through a network cable, so that the Triamec debugging software on the computer can debug the driver, so that the driver drives the Z axis connected to it), adjust the TSD80 driver to independent operation mode, and enter the Z axis motor parameters and grating system feedback parameters in the Z axis module of the TSD80 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, Z axis motion unit, phase search parameters, acceleration and deceleration parameters; then use TSD8 0 driver sweeps the Z axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the current loop of the driver), then adjusts the current loop of the TSD80 driver, and after the current loop is adjusted, sweeps the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the position loop of the driver); then adjust the position loop of the TSD80 driver, and check the motion accuracy of the Z axis by debugging the Z axis (adjusting and optimizing the position loop parameters can improve the motion state of the Z axis). When the Z axis motion accuracy reaches the expected accuracy, save the debugging parameters, and the TSD80 driver independent debugging of the Z axis is now completed;

[0063] S43: Debug the C axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C axis motor parameters and grating system feedback parameters in the C axis module of the TSD300 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, C axis motion unit, phase search parameters, acceleration and deceleration parameters; then use the TSD300 driver to sweep the C axis (the sweep process automatically ends after sweeping from 20Hz to 24000Hz, and then generate a sweep data file After the current loop is adjusted, the current loop of the TSD300 driver is adjusted. After the current loop is adjusted, the frequency is swept again (the frequency sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a frequency sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the position loop of the TSD300 driver, and check the motion accuracy of the C-axis by debugging the drive C-axis (adjusting and optimizing the position loop parameters can improve the motion state of the C-axis). When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver independently debugs the C-axis.

[0064] There is no requirement for the debugging order of the two drives, and the order can be reversed.

[0065] Further, such as Figure 2As shown, in S4, the Triamec drive and the motion axis are debugged separately, and the specific process is:

[0066] S41: Debug the X-axis and Z-axis; for the four-axis ultra-precision horizontal machine tool, first connect the TSD80 driver with the help of Triamec debugging software, and enter the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, including motor voltage parameters, current parameters, magnetic pole pairs, resolution, grating signal type, grating resolution, X-axis motion unit, phase search parameters, acceleration and deceleration parameters; then use the TSD80 driver to sweep the X-axis (the sweep process automatically ends after sweeping from 20Hz to 24000Hz, and then generate a sweep data file , this data is used to debug the current loop of the driver) and then adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again (after sweeping from 20Hz to 24000Hz, the sweep process ends automatically, and then a sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis (adjusting and optimizing the position loop parameters can improve the motion state of the X-axis). When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD80 driver debugging of the X-axis is completed;

[0067] After that, enter the Z-axis motor parameters and grating system feedback parameters in the Z-axis module of the TSD80 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, Z-axis motion unit, phase-seeking parameters, acceleration and deceleration parameters; then use the TSD80 driver to sweep the Z-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the current loop of the driver) and then adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated, which is used to debug the position loop of the driver); then adjust the position loop of the TSD80 driver, and check the motion accuracy of the Z-axis by debugging the driving Z-axis (adjusting and optimizing the position loop parameters can improve the motion state of the Z-axis). When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters, and the TSD80 driver debugging of the Z-axis is completed.

[0068] S42: Debug the C-axis and B-axis; connect the TSD300 driver through the Triamec debugging software, and enter the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, C-axis motion unit, phase search parameters, acceleration and deceleration parameters; then use the TSD300 driver to sweep the C-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used for After debugging the current loop of the driver, adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the position loop of the TSD300 driver, and check the motion accuracy of the C axis by debugging the C axis (adjusting and optimizing the position loop parameters can improve the motion state of the C axis). When the motion accuracy of the C axis reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the C axis is completed;

[0069] Afterwards, enter the B-axis motor parameters and grating system feedback parameters in the B-axis module of the TSD300 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, B-axis motion unit, phase-seeking parameters, acceleration and deceleration parameters; then use the TSD300 driver to sweep the B-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated. This data is used to debug the current loop of the driver) and then adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the TSD300 driver position loop, and check the motion accuracy of the B-axis by debugging the drive B-axis (adjusting and optimizing the position loop parameters can improve the motion state of the B-axis). When the B-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the B-axis is completed.

[0070] There is no requirement for the debugging order of the two drives, and the order can be reversed.

[0071] Further, such as Figure 3 As shown, in S4, the Triamec drive and the motion axis are debugged separately, and the specific process is:

[0072] S41: Debug the X-axis and Z-axis; for the five-axis ultra-precision horizontal machine tool, first connect the first TSD80 driver with the help of Triamec debugging software, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the first TSD80 driver debugging software, including: motor voltage parameters, current parameters, number of magnetic poles, resolution, grating signal type, grating resolution, X-axis motion unit, phase search parameters, acceleration and deceleration parameters; then use the first TSD80 driver to sweep the X-axis frequency (the sweep process automatically ends after sweeping from 20Hz to 24000Hz, and then generate a sweep data file After the current loop is adjusted, the current loop of the first TSD80 driver is adjusted. After the current loop is adjusted, the frequency is swept again (the frequency sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a frequency sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the position loop of the first TSD80 driver, and check the motion accuracy of the X-axis by debugging the driving X-axis (adjusting and optimizing the position loop parameters can improve the motion state of the X-axis). When the motion accuracy of the X-axis reaches the expected accuracy, save the debugging parameters. At this time, the first TSD80 driver debugging of the X-axis is completed;

[0073] Afterwards, input the Z-axis motor parameters and grating system feedback parameters into the Z-axis module of the first TSD80 driver software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, Z-axis motion unit, phase-finding parameters, acceleration and deceleration parameters; then use the first TSD80 driver to sweep the Z-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used to debug the current loop of the driver) and then adjust the current loop of the first TSD80 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used to debug the position loop of the driver); then adjust the position loop of the first TSD80 driver, and check the motion accuracy of the Z-axis by debugging the driving Z-axis (adjusting and optimizing the position loop parameters can improve the motion state of the Z-axis). When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters, and the first TSD80 driver debugging of the Z-axis is completed;

[0074] S42: Debug the Y-axis and B-axis; connect the second TSD80 driver through the Triamec debugging software, input the Y-axis motor parameters and grating system feedback parameters in the Y-axis module of the second TSD80 driver software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, Y-axis motion unit, phase search parameters, acceleration and deceleration parameters; then use the second TSD80 driver to sweep the Y-axis (the sweep process automatically ends after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used for After debugging the current loop of the driver, adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used to debug the position loop of the driver); then adjust the position loop of the second TSD80 driver, and check the motion accuracy of the Y axis by debugging the Y axis (adjusting and optimizing the position loop parameters can improve the motion state of the Y axis). When the Y axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the second TSD80 driver Y axis debugging is completed;

[0075] Afterwards, input the B-axis motor parameters and grating system feedback parameters into the B-axis module of the second TSD80 driver software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, B-axis motion unit, phase-finding parameters, acceleration and deceleration parameters, and then use the second TSD80 driver to sweep the B-axis (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used to debug the current loop of the driver) and then adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again (the sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then generate a sweep data file, which is used to debug the position loop of the driver); then adjust the position loop of the second TSD80 driver, check the motion accuracy of the B-axis by debugging the B-axis driver, save the debugging parameters when the B-axis motion accuracy reaches the expected accuracy, and the second TSD80 driver debugging of the B-axis is now complete;

[0076] S43: Debug the C axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C axis motor parameters and grating system feedback parameters in the C axis module of the TSD300 driver debugging software, including: motor voltage parameters, current parameters, pole pair number, resolution, grating signal type, grating resolution, C axis motion unit, phase search parameters, acceleration and deceleration parameters, and then use the TSD300 driver to sweep the C axis (the sweep process automatically ends after sweeping from 20Hz to 24000Hz, and then generate a sweep data file After the current loop is adjusted, the current loop of the TSD300 driver is adjusted. After the current loop is adjusted, the frequency is swept again (the frequency sweep process ends automatically after sweeping from 20Hz to 24000Hz, and then a frequency sweep data file is generated. This data is used to debug the position loop of the driver); then adjust the position loop of the TSD300 driver, and check the motion accuracy of the C-axis by debugging the drive C-axis (adjusting and optimizing the position loop parameters can improve the motion state of the C-axis). When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver independently debugs the C-axis.

[0077] There is no requirement for the debugging sequence of the three drives, and the order can be reversed.

[0078] In S5, the independent operation mode of all Triamec drivers is changed to bus mode, and the controller is adjusted through PowerPMAC IDE; specifically:

[0079] Change the independent operation mode of the TSD80 driver and the TSD300 driver to the bus mode, and then adjust the CK3M-121 controller through the PowerPMAC IDE (taking the CK3M-121 controller as an example); first let the CK3M-121 controller scan the devices that support the EtherCAT bus protocol. Here, the description files of all devices on the bus need to be imported into the CK3M-121 controller before the EtherCAT devices can be scanned; then set the EtherCAT bus communication frequency of the CK3M-121 controller. Due to the model limitation of the CK3M-121 controller, the communication frequency is set to 2KHz in this invention. If a higher communication frequency needs to be set, the CK5M controller can be selected. The resolution parameter in the driver can be set to 1000000. At this time, for the linear axis, the controller sends 1000000 pulses for each linear axis movement of 1mm, that is, each pulse linear axis movement of 1nm; for the rotary axis, the controller sends 1000000 pulses for each rotary axis movement of 1°, that is, each pulse rotary axis movement of 0.0036″; then activate the EtherCAT master station in the Power PMAC IDE, and the CK3M-121 controller communicates with the TSD80 driver, TSD800 driver, and Beckhoff IO module through EtherCAT.

[0080] In S6, the controller, driver and Beckhoff IO module are configured by the Power PMAC IDE debugging wizard or by writing a script file. This debugging process belongs to the Power PMAC debugging technology problem and is not the protected content of the present invention, so it will not be elaborated in detail. After the above configuration process is completed, the ultra-precision machine tool can be controlled to perform high-precision single-axis motion or multi-axis linkage by means of handwheel, jog, NC code, etc.

[0081] Embodiment 1:

[0082] This embodiment records an EtherCAT bus control method for ultra-precision machine tools based on the Power PMAC series controller. In this method, the equipment used mainly includes the Power PMAC series controller, a driver supporting the EtherCAT bus protocol, an ultra-precision machine tool, a machine tool control cabinet, a Beckhoff IO module, a pulse handwheel, and other auxiliary instruments and equipment such as oil, gas, and liquid for the machine tool (all existing equipment). The Power PMAC series controller specifically refers to the Power PMAC series controller that supports the EtherCAT protocol, including CK3M, CK5M, CK3E, Power UMAC, etc. The driver that supports the EtherCAT bus protocol includes but is not limited to the Triamec driver. The Triamec driver used in the present invention has been proven to be able to meet the requirements for the ultra-precision machine tool motion axis drive. Since the ultra-precision machine tool motion axis drive requirements are very high, not all drivers that support the EtherCAT bus protocol can be used for ultra-precision machine tools. Other drivers other than Triamec can also be used in the present invention if they have been proven to have good driving effects. The ultra-precision machine tool refers to the control object of the method proposed in the present invention. Since the method proposed in the present invention is a control method for domestic ultra-precision machine tools, not just for a specific machine tool, the three-axis, four-axis, and five-axis ultra-precision machine tools commonly found on the domestic market are all suitable for the present invention. The machine tool control cabinet is used to install the controller, driver, and other electrical components. Other electrical components include transformers, switching power supplies, contactors, relays, wiring terminals, line ducts, etc. The power supply of the controller and driver is provided by the machine tool control cabinet. The Beckhoff IO module refers to the IO input and output module of Beckhoff Company, which mainly includes EK1100 coupler, digital input and output module, analog input and output module, and pulse input module. The IO input and output module is electrically connected to the EK1100 coupler. The EK1100 coupler has an EtherCAT dedicated network port and can exchange data with the controller through the EtherCAT protocol. The pulse handwheel is used for manual control of ultra-precision machine tools. The axis number selection, multiplier selection, and emergency stop button signals of the pulse handwheel are collected by the Beckhoff digital input IO module, and the number of pulses is collected by the Beckhoff pulse input IO module. The other auxiliary instruments and equipment of the machine tool, such as oil, gas, liquid, etc., are various auxiliary devices necessary for the operation and processing of ultra-precision machine tools. For example, the opening and closing control of the cutting fluid is controlled by the controller issuing a control instruction, and the Beckhoff digital output IO module controls the opening and closing of the cutting fluid valve; if the air pressure is lower than the set threshold, the air pressure sensor sends a digital signal to the Beckhoff digital input IO module, and then the IO module informs the control of this signal through the EtherCAT protocol. Since there are too many such auxiliary devices, the present invention here only gives examples to illustrate that the proposed method can realize the control of such auxiliary devices, and does not list the specific control process of each device one by one.

[0083] The Power PMAC series controller CPU carries an EtherCAT dedicated network port and can support an EtherCAT communication frequency of up to 18KHz. The Triamec drive and Beckhoff IO module both support an EtherCAT communication frequency of up to 10KHz. The Triamec drive is divided into different models according to the input DC voltage. A high-voltage drive is required for high-speed motion axes.

[0084] The Triamec driver has the ability to independently control the motion axis of the machine tool, and the Power PMAC series controller has the ability to control multi-axis linkage. The Power PMAC series controller can simultaneously send motion instructions to the independent Triamec drivers to make each independent motion axis move synchronously, thereby realizing the function of multi-axis linkage.

[0085] In the control method proposed in the present invention, the driver determines the servo capability of the ultra-precision machine tool control system for the motion axis, and the Power PMAC series controller determines the motion trajectory planning capability of the ultra-precision machine tool control system. The PowerPMAC series controller and the driver cooperate with each other and play a vital role in the machining accuracy of the ultra-precision machine tool.

[0086] The control method proposed in the present invention is aimed at ultra-precision machine tools. The high-precision properties of ultra-precision machine tools themselves lead to extremely stringent requirements on the control system, so that there are only a handful of mature solutions for ultra-precision machine tool control systems. The method proposed in the present invention can effectively solve the control problem of ultra-precision machine tools.

[0087] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controllers, characterized in that: The method comprises the following steps: S1: Connect a group of Triamec drivers to the motion axes of the ultra-precision machine tool respectively; wherein: the power line of each motion axis motor is connected to the power interface of the corresponding Triamec driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the corresponding Triamec driver; S2: Connect the Power PMAC series controller, Triamec drive and Beckhoff IO module in sequence through network cables to realize control information interaction among the three; the Power PMAC series controller includes CK3M, CK5M, CK3E and PowerUMAC, and one of the controllers is selected when using; S3: Install the Power PMAC series controller, Triamec drive and Beckhoff IO module into the electrical control cabinet and electrically connect them to the power supply respectively; S4: Debug the Triamec drive and motion axis separately to optimize the motion state of the motion axis; S5: Change the standalone operation mode of all Triamec drives to bus mode and adjust the controller via Power PMAC IDE; S6: Configure the controller, drive, and Beckhoff IO modules through the Power PMAC IDE debugging wizard or write script files to achieve high-precision single-axis motion or multi-axis linkage for ultra-precision machine tools.

2. The EtherCAT bus control method for ultra-precision machine tools based on the Power PMAC series controller according to claim 1 is characterized in that: In S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a three-axis ultra-precision machine tool, which has an X-axis, a Z-axis and a C-axis, and the C-axis motor power line of the three-axis ultra-precision machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the three-axis ultra-precision machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD80 driver; the X-axis and Z-axis of the three-axis ultra-precision machine tool are driven by the TSD80 driver at low speed, and the C-axis of the high-speed movement is driven by the TSD300 driver.

3. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 1, characterized in that: In S1, the number of the group of Triamec drivers is two, namely, TSD80 driver and TSD300 driver; the ultra-precision machine tool is a four-axis ultra-precision horizontal machine tool, which has two linear axes, namely, X-axis and Z-axis, and two rotary axes, namely, C-axis and B-axis. The C-axis and B-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD300 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD300 driver; the X-axis and Z-axis motor power lines of the four-axis ultra-precision horizontal machine tool are respectively connected to the power interface of the TSD80 driver, and the feedback lines of the corresponding motor gratings are connected to the feedback interface of the TSD80 driver; the X-axis and Z-axis are driven by the TSD80 driver, and the C-axis and B-axis are driven by the TSD300 driver.

4. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 1 is characterized in that: In S1, the number of the group of Triamec drivers is three, namely, two TSD80 drivers and one TSD300 driver, and the two TSD80 drivers are respectively the first TSD80 driver and the second TSD80 driver; the ultra-precision machine tool is a five-axis ultra-precision horizontal machine tool, which has three linear axes, namely, X-axis, Y-axis and Z-axis, and two rotary axes, namely, C-axis and B-axis. The X-axis and Z-axis motor power lines of the five-axis ultra-precision horizontal machine tool are both connected to the power interface of the first TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the first TSD80 driver; the Y-axis and B-axis motor power lines of the five-axis ultra-precision horizontal machine tool are both connected to the power interface of the second TSD80 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the second TSD80 driver; the C-axis motor power line of the five-axis ultra-precision horizontal machine tool is connected to the power interface of the TSD300 driver, and the feedback line of the corresponding motor grating is connected to the feedback interface of the TSD300 driver.

5. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 2, characterized in that: In S2, for the three-axis ultra-precision machine tool, one of the controllers in the Power PMAC series is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

6. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 3 is characterized in that: In S2, for the four-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the TSD80 driver with a network cable, and then the EtherCAT output network port of the TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

7. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 4, characterized in that: In S2, for the five-axis ultra-precision horizontal machine tool, one of the controllers in the Power PMAC series controllers is selected. When the controller and the driver are connected, the EtherCAT network port of the controller needs to be connected to the EtherCAT input network port of the first TSD80 driver with a network cable, and then the EtherCAT output network port of the first TSD80 driver needs to be connected to the EtherCAT input network port of the second TSD80 driver with a network cable, and then the EtherCAT output network port of the second TSD80 driver needs to be connected to the EtherCAT input network port of the TSD300 driver with a network cable, and finally the EtherCAT output network port of the TSD300 driver needs to be connected to the input network port of the Beckhoff IO module coupler EK1100.

8. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 2 or 5, characterized in that: In S4, the Triamec drive and the motion axis are debugged separately. The specific process is: S41: Debug the X-axis. For three-axis ultra-precision machine tools, first connect the TSD80 driver with the help of Triamec debugging software, adjust the TSD80 driver to independent operation mode, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the X-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis driver. When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the X-axis of the TSD80 driver is completed; S42: Debug the Z axis; first connect the TSD80 driver with the help of Triamec debugging software, adjust the TSD80 driver to independent operation mode, enter the Z axis motor parameters and grating system feedback parameters in the Z axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the Z axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the Z axis by debugging the driving Z axis. When the Z axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the Z axis of the TSD80 driver is completed; S43: Debug the C-axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the C-axis by debugging the drive C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the C-axis by the TSD300 driver is completed.

9. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 3 or 6, characterized in that: In S4, the Triamec drive and the motion axis are debugged separately. The specific process is: S41: Debug the X-axis and Z-axis. For the four-axis ultra-precision horizontal machine tool, first connect the TSD80 driver with the help of Triamec debugging software, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the X-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD80 driver, and check the motion accuracy of the X-axis by debugging the X-axis. When the X-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD80 driver debugging of the X-axis is completed. After that, input the Z-axis motor parameters and grating system feedback parameters in the Z-axis module of the TSD80 driver debugging software, and then use the TSD80 driver to sweep the Z-axis and adjust the current loop of the TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD80 driver position loop, and check the motion accuracy of the Z-axis by debugging the driving Z-axis. When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters, and the TSD80 driver debugging of the Z-axis is completed; S42: Debug the C-axis and B-axis; connect the TSD300 driver through the Triamec debugging software, input the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the TSD300 driver, and check the motion accuracy of the C-axis by debugging the C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the C-axis is completed; Afterwards, enter the B-axis motor parameters and grating system feedback parameters in the B-axis module of the TSD300 driver debugging software, then use the TSD300 driver to sweep the B-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the B-axis by debugging the drive B-axis. When the B-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the TSD300 driver debugging of the B-axis is completed.

10. The EtherCAT bus control method for ultra-precision machine tools based on Power PMAC series controller according to claim 4 or 7, characterized in that: In S4, the Triamec drive and the motion axis are debugged separately. The specific process is: S41: Debug the X-axis and Z-axis; for the five-axis ultra-precision horizontal machine tool, first connect the first TSD80 driver with the help of Triamec debugging software, input the X-axis motor parameters and grating system feedback parameters in the X-axis module of the first TSD80 driver debugging software, and then use the first TSD80 driver to sweep the X-axis and adjust the current loop of the first TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the first TSD80 driver, check the motion accuracy of the X-axis by debugging the driving X-axis, save the debugging parameters when the X-axis motion accuracy reaches the expected accuracy, and then the first TSD80 driver completes the debugging of the X-axis; After that, input the Z-axis motor parameters and the grating system feedback parameters into the Z-axis module of the first TSD80 driver software, and then use the first TSD80 driver to sweep the Z-axis and adjust the current loop of the first TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the first TSD80 driver, and check the motion accuracy of the Z-axis by debugging the driving Z-axis. When the Z-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the first TSD80 driver completes the debugging of the Z-axis; S42: Debug the Y-axis and B-axis; connect the second TSD80 driver through the Triamec debugging software, input the Y-axis motor parameters and the grating system feedback parameters in the Y-axis module of the second TSD80 driver software, and then use the second TSD80 driver to sweep the Y-axis and adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the second TSD80 driver, check the motion accuracy of the Y-axis by debugging the driving Y-axis, save the debugging parameters when the Y-axis motion accuracy reaches the expected accuracy, and the second TSD80 driver debugging of the Y-axis is completed; After that, input the B-axis motor parameters and grating system feedback parameters into the B-axis module of the second TSD80 driver software, and then use the second TSD80 driver to sweep the B-axis and adjust the current loop of the second TSD80 driver. After the current loop is adjusted, sweep the frequency again; then adjust the position loop of the second TSD80 driver, and check the motion accuracy of the B-axis by debugging the B-axis. When the B-axis motion accuracy reaches the expected accuracy, save the debugging parameters. At this time, the second TSD80 driver completes the debugging of the B-axis; S43: Debug the C-axis; connect the TSD300 driver through the Triamec debugging software, adjust the TSD300 driver to the independent operation mode, enter the C-axis motor parameters and grating system feedback parameters in the C-axis module of the TSD300 driver debugging software, and then use the TSD300 driver to sweep the C-axis and adjust the current loop of the TSD300 driver. After the current loop is adjusted, sweep the frequency again; then adjust the TSD300 driver position loop, and check the motion accuracy of the C-axis by debugging the drive C-axis. When the motion accuracy of the C-axis reaches the expected accuracy, save the debugging parameters. At this time, the independent debugging of the C-axis by the TSD300 driver is completed.

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