Performance test system and method for special gas conveying component and semiconductor process equipment

Abstract

The invention relates to a special gas conveying component performance test system and method and semiconductor process equipment. The special gas conveying component performance test system comprises a first gas conveying unit, at least one test unit and a first vacuum unit. The device has the advantages that the testing unit is respectively communicated with the first gas conveying unit and the first vacuum unit, so that the testing unit can carry out leakage detection on the special gas conveying component; besides, various components such as a manual diaphragm valve, a pneumatic diaphragm valve, a vacuum transmitter, a one-way valve, a pressure regulating valve and the like can also be mounted on the test unit, so that the system can test various products, and the applicability of the whole test system is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of special gas conveying component detection, and in particular to a special gas conveying component performance testing system, method and semiconductor process equipment. Background Art

[0002] In the field of semiconductor production, product performance is not only an important indicator to measure its technological advancement, but also a key factor that directly affects the quality of semiconductor products. The performance of semiconductor products includes but is not limited to electrical characteristics, thermal stability, reliability and durability, etc. The precise control of these performance parameters is crucial to ensure the quality and reliability of the final product.

[0003] In order to effectively monitor and optimize the performance of semiconductor products, the industry generally adopts a series of precise testing methods. Among them, the detection of special gas delivery components is particularly critical. As an indispensable part of the semiconductor manufacturing process, special gas delivery components are responsible for accurately controlling and delivering various special gases (such as doping gases, etching gases, etc.) to various links of the production line. The purity, flow rate and stability of these gases directly affect the manufacturing accuracy and performance of semiconductor devices.

[0004] The detection equipment for special gas delivery components in the prior art usually only performs detection on one product (for example, valve body, etc.). However, when different special gas delivery components need to be detected, different detection equipment needs to be replaced, and the actual applicability is low. In addition, although the detection equipment of some related semiconductor companies can be adapted to a variety of special gas delivery components, such detection equipment can only detect one performance of the special gas delivery components (i.e., flow rate, pressure, temperature, etc.), and cannot perform comprehensive performance detection on the special gas delivery components, which has limitations.

[0005] At present, there is no effective solution to the problems that the existing detection equipment in the relevant technology cannot adapt to different special gas transportation components for detection and cannot comprehensively detect the various performances of special gas transportation components. Summary of the invention

[0006] The purpose of the present invention is to provide a special gas delivery component performance testing system, method and semiconductor process equipment to address the deficiencies in the prior art, so as to solve the problems existing in the related technology that the existing detection equipment cannot adapt to different special gas delivery components for detection and cannot comprehensively detect the various performances of the special gas delivery components.

[0007] To achieve the above object, the technical solution adopted by the present invention is:

[0008] In a first aspect, the present invention provides a performance testing system for special gas transmission components, comprising:

[0009] a first gas delivery unit, the first gas delivery unit being connected to a high-pressure nitrogen source and being used to deliver high-pressure nitrogen for external leakage detection;

[0010] at least one testing unit, the testing unit being arranged downstream of the first gas delivery unit and being in communication with the first gas delivery unit, and being used for cooperating with the first gas delivery unit to perform leakage detection;

[0011] The first vacuum unit is disposed downstream of the test unit and communicated with the test unit for discharging test exhaust gas.

[0012] In some of the embodiments, it also includes:

[0013] A purge unit is arranged downstream of the first gas delivery unit and upstream of the test unit, and is respectively connected to the first gas delivery unit, the test unit, and the exhaust gas treatment equipment, and is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the test unit and discharge the purge exhaust gas to the exhaust gas treatment equipment.

[0014] In some of the embodiments, it also includes:

[0015] A second gas delivery unit, the second gas delivery unit is connected to the high-pressure helium source and the test unit respectively, and is used to deliver high-pressure helium for internal leakage detection;

[0016] Wherein, the test unit cooperates with the second gas delivery unit to perform internal leakage detection.

[0017] In some of the embodiments, it also includes:

[0018] A pressurizing unit is connected to the first gas delivery unit and the test unit respectively, and is used to pressurize the test gas and deliver the pressurized test gas to the test unit.

[0019] In some of the embodiments, it also includes:

[0020] a first flow detection unit, the first flow detection unit being in communication with the test unit and being used for detecting a gas flow input into the test unit;

[0021] A second flow detection unit, the second flow detection unit is connected to the test unit and is used to detect the gas flow output by the test unit.

[0022] In a second aspect, the present invention further provides a semiconductor process equipment, comprising:

[0023] In a third aspect, the present invention further provides a method for testing the performance of special gas delivery components, which is applied to the performance testing system of special gas delivery components as described in the first aspect or the semiconductor process equipment as described in the second aspect, comprising:

[0024] The first gas delivery unit cooperates with the test unit to perform leakage detection on the special gas delivery components installed on the test unit.

[0025] In some of the embodiments, it also includes:

[0026] The second gas delivery unit cooperates with the test unit to perform internal leakage detection on the special gas delivery components installed on the test unit.

[0027] In some of the embodiments, it also includes:

[0028] The purge unit obtains high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit and discharge the purge exhaust gas to the exhaust gas treatment equipment.

[0029] In some of the embodiments, it also includes:

[0030] The booster unit boosts the test gas and delivers the boosted test gas to the test unit, so as to perform overpressure and pressure holding tests on the special gas delivery components installed on the test unit.

[0031] In some of the embodiments, it also includes:

[0032] When the first gas delivery unit delivers low-pressure gas to the front end of the test unit through the purge unit and the purge unit forms a vacuum condition at the rear end of the test unit, the valve body of the test unit is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit.

[0033] In some of the embodiments, it also includes:

[0034] The gas flow passing through the test unit and the gas pressure obtained by the test unit are obtained through the first flow detection unit and the second flow detection unit, so as to perform CV value test on the special gas delivery components installed on the test unit.

[0035] The present invention adopts the above technical solution, and has the following technical effects compared with the prior art:

[0036] A special gas conveying component performance testing system, method and semiconductor process equipment of the present invention connects the test unit with the first gas conveying unit and the first vacuum unit respectively, so that the test unit can perform leakage detection on the special gas conveying components; in addition, various components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, one-way valves, pressure regulating valves, etc. can be installed on the test unit, so that the system can realize the testing of various products and improve the applicability of the overall test system. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 1 is a schematic diagram of a performance test system for special gas delivery components according to an embodiment of the present invention (I);

[0038] Figure 2 is a schematic structural diagram of a first gas delivery unit, a test unit and a first vacuum unit according to an embodiment of the present invention;

[0039] Figure 3 Schematic diagram of a performance test system for special gas delivery components according to an embodiment of the present invention (II);

[0040] Figure 4 is a schematic structural diagram of a purge unit according to an embodiment of the present invention;

[0041] Figure 5 Schematic diagram of a performance test system for special gas delivery components according to an embodiment of the present invention (III);

[0042] Figure 6 is a schematic structural diagram of a second gas delivery unit according to an embodiment of the present invention;

[0043] Figure 7 Schematic diagram of a performance test system for special gas delivery components according to an embodiment of the present invention (IV);

[0044] Figure 8 is a schematic structural diagram of a boosting unit according to an embodiment of the present invention;

[0045] Fig. 9 Schematic diagram of a performance test system for special gas delivery components according to an embodiment of the present invention (V);

[0046] Fig.10 is a schematic structural diagram of a first flow detection unit and a second flow detection unit according to an embodiment of the present invention;

[0047] Fig.11 It is a specific embodiment of the performance testing system of special gas transportation components according to an embodiment of the present invention.

[0048] The reference numerals are: 100, first gas delivery unit; 101, purification element; 102, filtering element; 103, first manual control element; 104, first automatic control element; 105, first detection element; 106, fifth manual control element; 107, fifth automatic control element; 108, fifth detection element; 109, sixth manual control element; 110, sixth automatic control element;

[0049] 200, test unit; 201, test disc element; 202, second manual control element; 203, second automatic control element; 204, second detection element; 205, third detection element; 206, third manual control element; 207, third automatic control element; 208, fourth detection element; 209, helium test element; 210, eleventh manual control element; 211, tenth automatic control element;

[0050] 300, first vacuum unit; 301, first vacuum element; 302, fourth manual control element; 303, fourth automatic control element; 304, first one-way element;

[0051] 400, purge unit; 401, first pressure regulating element; 402, second vacuum element; 403, seventh manual control element; 404, seventh automatic control element; 405, eighth manual control element; 406, eighth automatic control element; 407, second one-way element; 408, ninth manual control element; 409, sixth detection element; 410, third one-way element;

[0052] 500, second gas delivery unit; 501, tenth manual control element; 502, second pressure regulating element; 503, ninth automatic control element; 504, micro-leakage control element;

[0053] 600, boost unit; 601, boost element; 602, twelfth manual control element; 603, eleventh automatic control element; 604, thirteenth manual control element; 605, twelfth automatic control element;

[0054] 700, first flow detection unit; 701, first flow detection element; 702, fourteenth manual control element; 703, thirteenth automatic control element; 704, fifteenth manual control element; 705, fourteenth automatic control element;

[0055] 800, second flow detection unit; 801, second flow detection element; 802, third flow detection element; 803, sixteenth manual control element; 804, fifteenth automatic control element; 805, third pressure regulating element; 806, fourth one-way element; 807, seventeenth manual control element; 808, sixteenth automatic control element; 809, fifth one-way element. DETAILED DESCRIPTION

[0056] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0057] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0058] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0059] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0060] Example 1

[0061] This embodiment relates to a performance testing system for special gas transport components in the present invention.

[0062] An exemplary embodiment of the present invention is as follows Figure 1 As shown, a performance test system for a special gas delivery component includes a first gas delivery unit 100, at least one test unit 200 and a first vacuum unit 300. The first gas delivery unit 100 is connected to a high-pressure nitrogen source and is used to deliver high-pressure nitrogen for external leakage detection; the test unit 200 is arranged downstream of the first gas delivery unit 100 and is connected to the first gas delivery unit 100, and is used to cooperate with the first gas delivery unit 100 for external leakage detection; the first vacuum unit 300 is arranged downstream of the test unit 200 and is connected to the test unit 200, and is used to discharge test exhaust gas.

[0063] It should be noted that the first end and the second end in the present invention are respectively the two ends in the length direction.

[0064] like Figure 2As shown, the first gas delivery unit 100 includes a first gas delivery element, a purification element 101 and a filter element 102. The first gas delivery element is connected to the high-pressure nitrogen source and the test unit 200, respectively, and is used to deliver high-pressure nitrogen to the test unit 200; the purification element 101 is arranged in the first gas delivery element, and is used to purify the high-pressure nitrogen to improve the purity of the high-pressure nitrogen and reduce the humidity of the high-pressure nitrogen; the filter element 102 is arranged in the first gas delivery element, and is located downstream of the purification element 101, and is used to filter the high-pressure nitrogen to remove particulate matter in the high-pressure nitrogen.

[0065] Specifically, a first end of the first gas delivery element is communicated with the high-pressure nitrogen pipeline, and a second end of the first gas delivery element is communicated with the test unit 200 .

[0066] In some of these embodiments, the first gas delivery element includes, but is not limited to, a stainless steel tube.

[0067] Specifically, the purification element 101 can purify the high-pressure nitrogen delivered by the first gas delivery element to remove moisture and oxygen in the high-pressure nitrogen.

[0068] In some of these embodiments, purification element 101 includes, but is not limited to, a high pressure purifier.

[0069] Specifically, the filter element 102 can filter the high-pressure nitrogen after being processed by the purification element 101, thereby removing particulate matter in the high-pressure nitrogen.

[0070] In some of these embodiments, filter element 102 includes, but is not limited to, a particulate filter.

[0071] Furthermore, the first gas delivery unit 100 further includes a first manual control element 103, a first automatic control element 104 and a first detection element 105. The first manual control element 103 is arranged at the first gas delivery element and is located downstream of the filter element 102, and is used to manually control the opening and closing of the first gas delivery element; the first automatic control element 104 is arranged at the first gas delivery element and is located downstream of the first manual control element 103, and is used to automatically control the opening and closing of the first gas delivery element; the first detection element 105 is arranged at the first gas delivery element and is located downstream of the first automatic control element 104, and is used to detect the temperature and pressure of the first gas delivery element.

[0072] In some embodiments, the first manual control element 103 includes but is not limited to a manual diaphragm valve.

[0073] In some of the embodiments, the first automatic control element 104 includes, but is not limited to, a pneumatic diaphragm valve.

[0074] In some of the embodiments, the first detection element 105 includes but is not limited to a temperature and pressure sensor.

[0075] like Figure 2 As shown, the test unit 200 includes a first test gas input element, a test disc element 201 and a first test gas output element. The first test gas input element is connected to the first gas delivery unit 100 for obtaining high-pressure nitrogen; the test disc element 201 is connected to the first test gas input element for external leakage detection; the first test gas output element is respectively connected to the test disc element 201 and the first vacuum unit 300 for outputting test exhaust gas.

[0076] Specifically, a first end of the first test gas input element is in communication with the first gas delivery element, and a second end of the first test gas input element is in communication with the test disk element 201 .

[0077] In some of the embodiments, the first test gas input element includes, but is not limited to, a stainless steel tube.

[0078] Specifically, the test disc element 201 can be connected to the first test gas input element and the first test gas output element, and the test disc element 201 can be used to install components such as manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, one-way valves, and pressure regulating valves.

[0079] In some of the embodiments, the test disc element 201 includes but is not limited to a test station.

[0080] Specifically, a first end of the first test gas output element is in communication with the test disc element 201 , and a second end of the first test gas output element is in communication with the first vacuum unit 300 .

[0081] In some of the embodiments, the first test gas output element includes but is not limited to a stainless steel tube.

[0082] Furthermore, the test unit 200 also includes a first heat preservation element, a second heat preservation element, a second manual control element 202, a second automatic control element 203, a second detection element 204, a third detection element 205, a third manual control element 206, a third automatic control element 207 and a fourth detection element 208. Among them, the first heat preservation element is arranged at the first test gas input element for heat preservation; the second heat preservation element is arranged at the first test gas output element for heat preservation; the second manual control element 202 is arranged at the first test gas input element for manually controlling the opening and closing of the first test gas input element; the second automatic control element 203 is arranged at the first test gas input element and is located upstream of the second manual control element 202, and is used to automatically control the opening and closing of the first test gas input element; the second detection element 204 is arranged at the first test gas input element and is located downstream of the second manual control element 202, and is used to detect the temperature and pressure of the first test gas input element; The detection element 205 is arranged at the first test gas output element, and is used to detect the temperature and pressure of the first test gas output element; the third manual control element 206 is arranged at the first test gas output element, and is located downstream of the third detection element 205, and is used to manually control the opening and closing of the test gas output element; the third automatic control element 207 is arranged at the first test gas output element, and is located downstream of the third manual control element 206, and is used to automatically control the opening and closing of the first test gas output element; the fourth detection element 208 is arranged at the first test gas output element, and is located downstream of the third automatic control element 207, and is used to detect the temperature and pressure of the first test gas output element.

[0083] Specifically, the first heat-insulating element covers the outer side wall of the first test gas input element, so as to keep the first test gas input element warm.

[0084] In some of the embodiments, the first thermal insulation element includes but is not limited to a thermal insulation sleeve.

[0085] Specifically, the second heat-insulating element covers the outer side wall of the first test gas output element, so as to keep the first test gas output element warm.

[0086] In some of the embodiments, the second thermal insulation element includes but is not limited to a thermal insulation sleeve.

[0087] In some of the embodiments, the second manual control element 202 includes but is not limited to a manual diaphragm valve.

[0088] In some of the embodiments, the second automatic control element 203 includes but is not limited to a pneumatic diaphragm valve.

[0089] In some of the embodiments, the second detection element 204 includes but is not limited to a temperature and pressure sensor.

[0090] In some of the embodiments, the third detection element 205 includes but is not limited to a temperature and pressure sensor.

[0091] In some of the embodiments, the third manual control element 206 includes but is not limited to a manual diaphragm valve.

[0092] In some of the embodiments, the third automatic control element 207 includes but is not limited to an automatic diaphragm valve.

[0093] In some of the embodiments, the fourth detection element 208 includes but is not limited to a temperature and pressure sensor.

[0094] like Figure 2 As shown, the first vacuum unit 300 includes a first exhaust gas delivery element and a first vacuum element 301. The first exhaust gas delivery element is disposed downstream of the test unit 200 and communicated with the test unit 200 for discharging test exhaust gas; the first vacuum element 301 is disposed in the first exhaust gas delivery element for forming a vacuum environment in the first exhaust gas delivery element.

[0095] Specifically, a first end of the first exhaust gas delivery element is communicated with the first test gas output element, and a second end of the first exhaust gas delivery element is communicated with the exhaust port.

[0096] In some of these embodiments, the first exhaust gas delivery element includes, but is not limited to, a stainless steel tube.

[0097] Specifically, the first vacuum element 301 is used to provide a vacuum negative pressure at the end of the first exhaust gas conveying element, so that the test exhaust gas inside the first exhaust gas conveying element can be exhausted.

[0098] In some of the embodiments, the first vacuum element 301 includes but is not limited to a vacuum pump.

[0099] Furthermore, the first vacuum unit 300 further includes a fourth manual control element 302, a fourth automatic control element 303 and a first one-way element 304. The fourth manual control element 302 is arranged at the first exhaust gas delivery element, and is used to manually control the opening and closing of the first exhaust gas delivery element; the fourth automatic control element 303 is arranged at the first exhaust gas delivery element, and is located downstream of the fourth manual control element 302, and is used to automatically control the opening and closing of the first exhaust gas delivery element; the first one-way element 304 is arranged at the first exhaust gas delivery element, and is located downstream of the fourth manual control element 302 and upstream of the first vacuum element 301, and is used to make the test exhaust gas flow in one direction.

[0100] In some of the embodiments, the fourth manual control element 302 includes but is not limited to a manual diaphragm valve.

[0101] In some of the embodiments, the fourth automatic control element 303 includes but is not limited to a pneumatic diaphragm valve.

[0102] In some of the embodiments, the first one-way element 304 includes, but is not limited to, a one-way valve.

[0103] The method of using this embodiment is as follows:

[0104] In the actual test, the staff manually opened all the manual diaphragm valves in the entire test system and kept all the pneumatic diaphragm valves closed through the system to complete the preparation work before the system test;

[0105] Subsequently, the system turns on the first automatic control element 104, so that the purification element 101 and the filter element 102 filter the high-pressure nitrogen delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter in the high-pressure nitrogen;

[0106] Then, the system turns on the second automatic control element 203, so that the first gas delivery element delivers high-pressure nitrogen to the test disc element 201, and performs leakage detection on the special gas delivery components by observing the value changes of the second detection element 204 and the third detection element 205;

[0107] Finally, after the external leakage detection is completed, the system turns on the third automatic control element 207, the fourth automatic control element 303, and the first vacuum element 301, so that the test exhaust gas can be discharged through the first exhaust gas delivery element.

[0108] The advantage of this embodiment is that by connecting the test unit with the first gas delivery unit and the first vacuum unit respectively, the test unit can perform leakage detection on special gas delivery components; in addition, manual diaphragm valves, pneumatic diaphragm valves, vacuum transmitters, one-way valves, pressure regulating valves and other components can be installed on the test unit, so that the system can realize the testing of various products and improve the applicability of the overall test system.

[0109] Example 2

[0110] This embodiment is a variation of Embodiment 1.

[0111] like Figure 3 As shown, the special gas delivery component performance test system also includes a purge unit 400. The purge unit 400 is arranged downstream of the first gas delivery unit 100 and upstream of the test unit 200, and is respectively connected to the first gas delivery unit 100, the test unit 200, and the exhaust gas treatment equipment, and is used to obtain high-pressure nitrogen, process the high-pressure nitrogen to obtain low-pressure nitrogen, and use the low-pressure nitrogen to purge the test unit 200 and discharge the purge exhaust gas to the exhaust gas treatment equipment.

[0112] It should be noted that when replacing special gas delivery components on the test unit 200, it is necessary to purge the pipelines in the entire test system, so the purge operation of the pipelines in the entire test system is achieved by setting up a purge unit 400 and cooperating with the first gas delivery unit 100.

[0113] like Figure 4 As shown, the first gas delivery unit 100 further includes a second gas delivery element and a third gas delivery element. The second gas delivery element is connected to the first gas delivery element of the first gas delivery unit 100, and is used to obtain and deliver high-pressure nitrogen; the third gas delivery element is respectively connected to the second gas delivery element, the purge unit 400, and the test unit 200, and is used to obtain and deliver high-pressure nitrogen and low-pressure nitrogen to the test unit 200.

[0114] Specifically, the first end of the second gas delivery element is connected to the first gas delivery element, and the connection point between the first end of the second gas delivery element and the first gas delivery element is located downstream of the first detection element 105, and the second end of the second gas delivery element is connected to the first end of the third gas delivery element.

[0115] In some of these embodiments, the second gas delivery element includes, but is not limited to, a stainless steel tube.

[0116] Specifically, the first end of the third gas delivery element is communicated with the second end of the second gas delivery element and the second end of the purge unit 400 , respectively, and the second end of the third gas delivery element is communicated with the first end of the first test gas input element.

[0117] In some of these embodiments, the third gas delivery element includes, but is not limited to, a stainless steel tube.

[0118] Further, the first gas delivery unit 100 also includes a fifth manual control element 106, a fifth automatic control element 107, a fifth detection element 108, a sixth manual control element 109 and a sixth automatic control element 110. The fifth manual control element 106 is arranged on the second gas delivery element for manually controlling the opening and closing of the second gas delivery element; the fifth automatic control element 107 is arranged on the second gas delivery element and upstream of the fifth manual control element 106 for automatically controlling the opening and closing of the second gas delivery element; the fifth detection element 108 is arranged on the third gas delivery element for detecting the temperature and pressure of the third gas delivery element; the sixth manual control element 109 is arranged on the third gas delivery element and located downstream of the fifth detection element 108 for manually controlling the opening and closing of the third gas delivery element; the sixth automatic control element 110 is arranged on the third gas delivery element and located upstream of the sixth manual control element 109 for automatically controlling the opening and closing of the third gas delivery element.

[0119] In some of the embodiments, the fifth manual control element 106 includes but is not limited to a manual diaphragm valve.

[0120] In some of the embodiments, the fifth automatic control element 107 includes but is not limited to a pneumatic diaphragm valve.

[0121] In some of the embodiments, the fifth detection element 108 includes but is not limited to a temperature and pressure sensor.

[0122] In some of the embodiments, the sixth manual control element 109 includes but is not limited to a manual diaphragm valve.

[0123] In some of the embodiments, the sixth automatic control element 110 includes but is not limited to a pneumatic diaphragm valve.

[0124] like Figure 4 As shown, the purge unit 400 includes a purge gas delivery element, a first pressure regulating element 401, a second exhaust gas delivery element, a second vacuum element 402 and a power gas delivery element. The purge gas delivery element is placed downstream of the first gas delivery unit 100 and upstream of the test unit 200, and is respectively connected to the first gas delivery unit 100 and the test unit 200, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test unit 200; the first pressure regulating element 401 is arranged at the purge gas delivery element, for regulating the pressure of high-pressure nitrogen to obtain low-pressure nitrogen; the second exhaust gas delivery element is arranged downstream of the test unit 200, and is connected to the test unit 200, for exhausting the purge exhaust gas; the second vacuum element 402 is arranged at the second exhaust gas delivery element, for making the second exhaust gas delivery element form a vacuum environment; the power gas delivery element is respectively connected to the power gas source and the second vacuum element 402, for delivering the power gas to the second vacuum element 402.

[0125] Specifically, the first end of the purge gas delivery element is in communication with the second end of the first gas delivery element, and the second end of the purge gas delivery element is in communication with the first end of the third gas delivery element.

[0126] In some of these embodiments, the purge gas delivery element includes, but is not limited to, a stainless steel tube.

[0127] Specifically, the first pressure regulating element 401 can adjust the pressure of the gas inputted into the purge gas conveying element by the first gas conveying element, so that the high-pressure nitrogen in the first gas conveying element can be adjusted to the low-pressure nitrogen.

[0128] In some of the embodiments, the first pressure regulating element 401 includes but is not limited to a pressure regulating valve.

[0129] Specifically, the first end of the second exhaust gas delivery element is connected to the second end of the first exhaust gas delivery element, and the connection point between the second exhaust gas delivery element and the first exhaust gas delivery element is located between the fourth detection element 208 and the sixth manual control element 109, and the second end of the second exhaust gas delivery element is connected to the exhaust port.

[0130] In some of these embodiments, the second exhaust gas delivery element includes, but is not limited to, a stainless steel tube.

[0131] Specifically, the second vacuum element 402 can form a vacuum negative pressure at the end of the second exhaust gas delivery element, so that the gas in each pipeline in the test system can be quickly discharged through the second exhaust gas delivery element.

[0132] In some of these embodiments, the second vacuum element 402 includes, but is not limited to, a Venturi vacuum pump.

[0133] Specifically, a first end of the power gas delivery element is in communication with the low-pressure nitrogen pipeline, and a second end of the power gas delivery element is in communication with the second vacuum element 402 .

[0134] In some of these embodiments, the motive gas delivery element includes, but is not limited to, a stainless steel tube.

[0135] Furthermore, the purge unit 400 also includes a seventh manual control element 403, a seventh automatic control element 404, an eighth manual control element 405, an eighth automatic control element 406, a second one-way element 407, a ninth manual control element 408, a sixth detection element 409 and a third one-way element 410. The seventh manual control element 403 is arranged at the purge gas delivery element and is located downstream of the first pressure regulating unit, and is used to manually control the opening and closing of the purge gas delivery element; the seventh automatic control element 404 is arranged at the purge gas delivery element and is located downstream of the first pressure regulating unit and upstream of the seventh manual control element 403, and is used to automatically control the opening and closing of the purge gas delivery element; the eighth manual control element 405 is arranged at the second exhaust gas delivery element and is used to manually control the opening and closing of the second exhaust gas delivery element; the eighth automatic control element 406 is arranged at the second exhaust gas delivery element and is located downstream of the eighth manual control element 405, and is used to automatically control the opening and closing of the second exhaust gas delivery element. The opening and closing of the gas delivery element; the second one-way element 407 is arranged on the second exhaust gas delivery element, and is located downstream of the eighth automatic control element 406 and upstream of the second vacuum element 402, and is used to make the purge exhaust gas flow in one direction; the ninth manual control element 408 is arranged on the power gas delivery element, and is used to manually control the opening and closing of the power gas delivery element; the sixth detection element 409 is arranged on the power gas delivery element, and is located downstream of the ninth manual control element 408, and is used to detect the temperature and pressure of the power gas delivery element; the third one-way element 410 is arranged on the power gas delivery element, and is located downstream of the sixth detection element 409, and is used to make the power gas flow in one direction.

[0136] In some of the embodiments, the seventh manual control element 403 includes but is not limited to a manual diaphragm valve.

[0137] In some of the embodiments, the seventh automatic control component 404 includes but is not limited to a pneumatic diaphragm valve.

[0138] In some of the embodiments, the eighth manual control element 405 includes but is not limited to a manual diaphragm valve.

[0139] In some of the embodiments, the eighth automatic control component 406 includes but is not limited to a pneumatic diaphragm valve.

[0140] In some of the embodiments, the second one-way element 407 includes but is not limited to a one-way valve.

[0141] In some of the embodiments, the ninth manual control element 408 includes but is not limited to a manual diaphragm valve.

[0142] In some of the embodiments, the ninth automatic control element 503 includes but is not limited to a pneumatic diaphragm valve.

[0143] In some of the embodiments, the sixth detection element 409 includes but is not limited to a temperature and pressure sensor.

[0144] In some of the embodiments, the third one-way element 410 includes but is not limited to a one-way valve.

[0145] The method of using this embodiment is as follows:

[0146] After the inspection of a special gas delivery component is completed, in actual work, the staff manually opens all manual diaphragm valves in the entire test system and keeps all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0147] Subsequently, the system turns on the second automatic control element 203, the third automatic control element 207, the fourth automatic control element 303, the sixth automatic control element 110, the seventh automatic control element 404, and the eighth automatic control element 406, and turns off the first automatic control element 104. The second vacuum element 402 provides a vacuum negative pressure at the end of the second exhaust gas delivery element, so that the pipelines in the entire test system are in a vacuum state.

[0148] Then, the system turns on the first automatic control element 104 and turns off the eighth automatic control element 406, so that the high-pressure nitrogen is converted into low-pressure nitrogen through the first pressure regulating element 401, and the low-pressure nitrogen fills the entire test system pipeline, and the air pressure in the pipeline reaches the standard requirement and is maintained for a period of time;

[0149] Finally, the system closes the first automatic control element 104 and opens the eighth automatic control element 406, and the second vacuum element 402 provides a vacuum negative pressure at the end of the second exhaust gas delivery element, thereby exhausting the gas in the pipeline in the entire test system.

[0150] The advantage of this embodiment is that by setting up a purge unit and cooperating with the first gas delivery unit, the purge operation of the pipeline in the entire test system is realized, thereby improving the accuracy of subsequent special gas delivery component detection.

[0151] Example 3

[0152] This embodiment is a variation of Embodiments 1 to 2.

[0153] like Figure 5 As shown, the special gas delivery component performance test system also includes a second gas delivery unit 500. The second gas delivery unit 500 is connected to the high-pressure helium source and the test unit 200, respectively, and is used to deliver high-pressure helium for internal leakage detection; wherein the test unit 200 cooperates with the second gas delivery unit 500 to perform internal leakage detection.

[0154] like Figure 6As shown, the second gas delivery unit 500 includes a fourth gas delivery element, wherein the fourth gas delivery element is connected to the high-pressure helium source and the test unit 200 respectively, and is used to deliver high-pressure helium to the test unit 200 .

[0155] Specifically, a first end of the fourth gas delivery element is communicated with the high-pressure helium pipeline, and a second end of the fourth gas delivery element is communicated with a first end of the first test gas input element.

[0156] In some of these embodiments, the fourth gas delivery element includes, but is not limited to, a stainless steel tube.

[0157] Further, the second gas delivery unit 500 also includes a tenth manual control element 501, a second pressure regulating element 502, a ninth automatic control element 503 and a micro-leakage control element 504. The tenth manual control element 501 is provided at the fourth gas delivery element for manually controlling the opening and closing of the fourth gas delivery element; the second pressure regulating element 502 is provided at the fourth gas delivery element and is located downstream of the tenth manual control element 501, and is used to regulate the pressure of high-pressure helium to obtain low-pressure helium; the ninth automatic control element 503 is provided at the fourth gas delivery element and is located downstream of the second pressure regulating element 502, and is used to automatically control the opening and closing of the fourth gas delivery element; the micro-leakage control element 504 is provided at the fourth gas delivery element and is located downstream of the ninth automatic control element 503.

[0158] In some of the embodiments, the tenth manual control element 501 includes but is not limited to a manual diaphragm valve.

[0159] In some of the embodiments, the second pressure regulating element 502 includes but is not limited to a pressure regulating valve.

[0160] In some of the embodiments, the ninth automatic control element 503 includes but is not limited to a pneumatic diaphragm valve.

[0161] In some of the embodiments, the micro-leakage control element 504 includes but is not limited to a micro-leakage valve.

[0162] like Figure 6 As shown, the test unit 200 further includes a second test gas input element and a helium test element 209. The second test gas input element is connected to the first test gas output element of the test unit 200 for obtaining the test gas; the helium test element 209 is connected to the second test gas input element for internal leakage detection.

[0163] Specifically, the first end of the second test gas input element is communicated with the second end of the first test gas output element, and the second end of the second test gas input element is communicated with the helium test element 209 .

[0164] In some of the embodiments, the second test gas input element includes, but is not limited to, a stainless steel tube.

[0165] In some of the embodiments, the helium testing element 209 includes but is not limited to a helium detector.

[0166] Furthermore, the test unit 200 further includes an eleventh manual control element 210 and a tenth automatic control element 211. The eleventh manual control element 210 is disposed at the second test gas input element and is used to manually control the opening and closing of the second test gas input element; the tenth automatic control element 211 is disposed at the second test gas input element and is located downstream of the eleventh manual control element 210 and is used to automatically control the opening and closing of the second test gas input element.

[0167] In some of the embodiments, the eleventh manual control element 210 includes but is not limited to a manual diaphragm valve.

[0168] In some of the embodiments, the tenth automatic control element 211 includes but is not limited to a pneumatic diaphragm valve.

[0169] like Figure 6 As shown, the test unit 200 further includes a second test gas output element, wherein the second test gas output element is respectively connected to the first test gas output element of the test unit 200 and the first vacuum unit 300, and is used to output the test exhaust gas.

[0170] Specifically, the first end of the second test gas output element is communicated with the second end of the first test gas output element, and the second end of the second test gas output element is communicated with the first end of the first exhaust gas delivery element and the second end of the second exhaust gas delivery element.

[0171] In some of the embodiments, the second test gas output element includes but is not limited to a stainless steel tube.

[0172] The method of using this embodiment is as follows:

[0173] In actual work, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0174] Then, the system turns on the second pressure regulating element 502, thereby converting the high-pressure helium into low-pressure helium;

[0175] Then, the system turns on the ninth automatic control element 503, the micro-leakage control element 504, the second automatic control element 203, the third automatic control element 207, and the tenth automatic control element 211, so that the low-pressure helium enters the helium test element 209 through the first test gas input element, the first test gas output element, and the second test gas input element;

[0176] Finally, the staff sprayed air towards the special gas delivery components and observed the numerical changes of the helium detection element, thereby realizing internal leakage detection of the special gas delivery components.

[0177] The advantage of this embodiment is that by connecting the second gas delivery unit with the test unit, controlling the opening and closing of the diaphragm valve at the front end of the test disk element, and observing the value change of the helium detection element, internal leakage detection of special gas delivery components can be achieved.

[0178] Example 4

[0179] This embodiment is a variation of Embodiments 1 to 3.

[0180] like Figure 7 As shown, the special gas delivery component performance test system also includes a booster unit 600. The booster unit 600 is connected to the first gas delivery unit 100 and the test unit 200, respectively, for boosting the test gas and delivering the boosted test gas to the test unit 200.

[0181] like Figure 8 As shown, the boosting unit 600 includes a fifth gas delivery element and a boosting element 601. The fifth gas delivery element is connected to the first test gas input element of the test unit 200 for obtaining the test gas; the boosting element 601 is arranged on the fifth delivery element for boosting the test gas.

[0182] Specifically, the first end of the fifth gas delivery element is connected to the first end of the first test gas input element, the second end of the fifth gas delivery element is connected to the second end of the first test gas input element, and the connection point between the fifth gas delivery element and the first test gas input element is located downstream of the second automatic control element 203 and upstream of the second detection element 204.

[0183] In some of these embodiments, the fifth gas delivery element includes, but is not limited to, a stainless steel tube.

[0184] In some of the embodiments, the boosting element 601 includes but is not limited to a boosting pump.

[0185] Further, the pressurizing unit 600 further includes a twelfth manual control element 602, an eleventh automatic control element 603, a thirteenth manual control element 604 and a twelfth automatic control element 605. The twelfth manual control element 602 is arranged on the fifth gas delivery element and is located upstream of the pressurizing element 601, and is used to manually control the opening and closing of the fifth gas delivery element; the eleventh automatic control element 603 is arranged on the fifth gas delivery element and is located upstream of the twelfth manual control element 602, and is used to automatically control the opening and closing of the fifth gas delivery element; the thirteenth manual control element 604 is arranged on the fifth gas delivery element and is located downstream of the pressurizing element 601, and is used to manually control the opening and closing of the fifth gas delivery element; the twelfth automatic control element 605 is arranged on the fifth gas delivery element and is located downstream of the pressurizing element 601 and upstream of the thirteenth manual control element 604, and is used to automatically control the opening and closing of the fifth gas delivery element.

[0186] In some of the embodiments, the twelfth manual control element 602 includes but is not limited to a manual diaphragm valve.

[0187] In some of the embodiments, the eleventh automatic control element 603 includes but is not limited to a pneumatic diaphragm valve.

[0188] In some of the embodiments, the thirteenth manual control element 604 includes but is not limited to a manual diaphragm valve.

[0189] In some of the embodiments, the twelfth automatic control element 605 includes but is not limited to a pneumatic diaphragm valve.

[0190] The method of using this embodiment is as follows:

[0191] In actual work, when conducting overpressure and pressure holding tests on special gas transmission components, the staff manually opens all manual diaphragm valves in the entire test system and keeps all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0192] Subsequently, the system turns on the first automatic control element 104, the fifth automatic control element 107, and the sixth automatic control element 110, so that the test gas is pressure-regulated through the pressurizing element 601, so that the pressure of the test gas exceeds the outlet pressure of the cylinder, thereby allowing the front end of the test disc element 201 to input high-pressure test gas;

[0193] Then, the system turns on the second vacuum element 402, the third automatic control element 207, and the eighth automatic control element 406, so that the rear end of the test disc element 201 is in a vacuum state;

[0194] Finally, the staff can implement overpressure and pressure maintenance testing on special gas transportation components by observing the value changes of the second detection element 204 and the third detection element 205.

[0195] The advantage of this embodiment is that by providing a booster unit, the pressure of the test gas entering the test unit can be adjusted, so that the special gas delivery component performance test system can test various performances of the special gas delivery components.

[0196] Example 5

[0197] This embodiment is a variation of Embodiments 1 to 4.

[0198] like Fig. 9 As shown, the performance test system for special gas delivery components also includes a first flow detection unit 700 and a second flow detection unit 800. The first flow detection unit 700 is connected to the test unit 200 and is used to detect the gas flow input to the test unit 200; the second flow detection unit 800 is connected to the test unit 200 and is used to detect the gas flow output from the test unit 200.

[0199] like Fig.10 As shown, the first flow detection unit 700 includes a sixth gas delivery element and a first flow detection element. The sixth gas delivery element is connected to the test unit 200 and the second gas delivery unit 500 respectively, and is used to obtain the test gas; the first flow detection element is arranged on the sixth gas delivery element, and is used to detect the gas flow input into the test unit 200.

[0200] Specifically, the first end of the sixth gas delivery element is connected to the first end of the first test gas input element, the second end of the sixth gas delivery element is connected to the first test gas input element, and the connection point between the sixth gas delivery element and the first test gas input element is located downstream of the second automatic control element 203 and upstream of the second detection element 204.

[0201] In some of these embodiments, the sixth gas delivery element includes, but is not limited to, a stainless steel tube.

[0202] In some of the embodiments, the first flow detection element includes but is not limited to a flow control meter.

[0203] Further, the first flow detection unit 700 also includes a fourteenth manual control element 702, a thirteenth automatic control element 703, a fifteenth manual control element 704 and a fourteenth automatic control element 705. Among them, the fourteenth manual control element 702 is arranged on the sixth gas delivery element and is located upstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; the thirteenth automatic control element 703 is arranged on the sixth gas delivery element and is located upstream of the fourteenth manual control element 702, and is used to automatically control the opening and closing of the sixth gas delivery element; the fifteenth manual control element 704 is arranged on the sixth gas delivery element and is located downstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; the fourteenth automatic control element 705 is arranged on the sixth gas delivery element, and is located downstream of the first flow detection element and upstream of the fifteenth manual control element 704, and is used to automatically control the opening and closing of the sixth gas delivery element.

[0204] In some of the embodiments, the fourteenth manual control element 702 includes but is not limited to a manual diaphragm valve.

[0205] In some of the embodiments, the thirteenth automatic control element 703 includes but is not limited to an automatic diaphragm valve.

[0206] In some of the embodiments, the fifteenth manual control element 704 includes but is not limited to a manual diaphragm valve.

[0207] In some of the embodiments, the fourteenth automatic control element 705 includes but is not limited to an automatic diaphragm valve.

[0208] like Fig.10 As shown, the second flow detection unit 800 includes a seventh gas delivery element, a second flow detection element 801, an eighth gas delivery element and a third flow detection element 802. The seventh gas delivery element is respectively connected to the test unit 200 and the second vacuum unit for obtaining the test gas; the second flow detection element 801 is arranged on the seventh gas delivery element for detecting the low-pressure gas flow output by the test unit 200; the eighth gas delivery element is respectively connected to the test unit 200 and the second vacuum unit for obtaining the test gas; the third flow detection element 802 is arranged on the eighth gas delivery element for detecting the high-pressure gas flow output by the test unit 200.

[0209] Specifically, the first end of the seventh gas delivery element is connected to the first test gas output element, and the connection point between the first end of the seventh gas delivery element and the first test gas output element is located downstream of the third detection element 205 and upstream of the third manual control element 206, and the second end of the seventh gas delivery element is connected to the second end of the first test gas output element.

[0210] In some of these embodiments, the seventh gas delivery element includes, but is not limited to, a stainless steel tube.

[0211] In some of the embodiments, the second flow detection element 801 includes but is not limited to a low-pressure mass flow meter.

[0212] Specifically, the first end of the eighth gas delivery element is connected to the first test gas output element, and the connection point between the first end of the eighth gas delivery element and the first test gas output element is located downstream of the third detection element 205 and upstream of the third manual control element 206, and the second end of the eighth gas delivery element is connected to the second end of the first test gas output element.

[0213] In some of these embodiments, the eighth gas delivery element includes, but is not limited to, a stainless steel tube.

[0214] In some of the embodiments, the third flow detection element 802 includes but is not limited to a high pressure flow meter.

[0215] Further, the second flow detection unit 800 also includes a sixteenth manual control element 803, a fifteenth automatic control element 804, a third pressure regulating element 805, a fourth one-way element 806, a seventeenth manual control element 807, a sixteenth automatic control element 808 and a fifth one-way element 809. Among them, the sixteenth manual control element 803 is arranged on the seventh gas delivery element and is located upstream of the second flow detection element 801, and is used to manually control the opening and closing of the seventh gas delivery element; the fifteenth automatic control element 804 is arranged on the seventh gas delivery element and is located downstream of the sixteenth manual control element 803 and upstream of the second flow detection element 801, and is used to automatically control the opening and closing of the seventh gas delivery element; the third pressure regulating element 805 is arranged on the seventh gas delivery element and is located downstream of the second flow detection element 801, and is used to adjust the gas pressure inside the seventh gas delivery element; the fourth one-way element 806 is arranged on the seventh gas delivery element , and is located downstream of the third pressure regulating element 805, for allowing the test exhaust gas to flow in one direction; the seventeenth manual control element 807 is arranged on the eighth gas delivery element, and is located upstream of the third flow detection element 802, for manually controlling the opening and closing of the eighth gas delivery element; the sixteenth automatic control element 808 is arranged on the eighth gas delivery element, and is located downstream of the seventeenth manual control element 807 and upstream of the third flow detection element 802, for automatically controlling the opening and closing of the eighth gas delivery element; the fifth unidirectional element 809 is arranged on the eighth gas delivery element, and is located downstream of the third flow detection element 802, for allowing the test exhaust gas to flow in one direction.

[0216] In some of the embodiments, the sixteenth manual control element 803 includes but is not limited to a manual diaphragm valve.

[0217] In some of these embodiments, the fifteenth automatic control element 804 includes, but is not limited to, an automatic diaphragm valve.

[0218] In some of the embodiments, the third pressure regulating element 805 includes but is not limited to a pressure regulating valve.

[0219] In some of these embodiments, the fourth one-way element 806 includes but is not limited to a one-way valve.

[0220] In some of the embodiments, the seventeenth manual control element 807 includes but is not limited to a manual diaphragm valve.

[0221] In some of these embodiments, the sixteenth automatic control element 808 includes, but is not limited to, an automatic diaphragm valve.

[0222] In some of these embodiments, the fifth one-way element 809 includes but is not limited to a one-way valve.

[0223] The method of using this embodiment is as follows:

[0224] In actual work, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0225] Subsequently, the system turns on the first automatic control element 104, the seventh automatic control element 404, the sixth automatic control element 110, the thirteenth automatic control element 703, the fourteenth automatic control element 705, the fifteenth automatic control element 804, and the fourth automatic control element 303, so that the low-pressure test gas can pass through the first flow detection element, the second detection element 204, the test disc element 201, the third detection element 205, and the second flow detection element 801 in sequence, and then the pressure and temperature of the low-pressure test gas at the front end and the rear end of the test disc element 201 can be obtained;

[0226] Then, repeat the steps described in Example 2 to purge the entire system heavy pipeline to keep the pipeline clean;

[0227] Then, the system closes the seventh automatic control element 404 and the fifteenth automatic control element 804, and opens the fifth automatic control element 107 and the sixteenth automatic control element 808, so that the high-pressure test gas can pass through the first flow detection element, the second detection element 204, the test disc element 201, the third detection element 205, and the third flow detection element 802 in sequence, and then the pressure and temperature of the high-pressure test gas at the front end and the rear end of the test disc element 201 can be obtained;

[0228] Finally, the staff can obtain the CV value of the special gas delivery component installed on the test disk element 201 based on the pressure and temperature of the low-pressure test gas at the front and rear ends of the test disk element 201 and the pressure and temperature of the high-pressure test gas at the front and rear ends of the test disk element 201.

[0229] The advantage of this embodiment is that by connecting the first flow detection unit and the second flow detection unit with the test unit, the CV value test can be performed on the special gas delivery components installed on the test unit, so that the entire system can achieve different performance tests on the special gas delivery components.

[0230] Example 6

[0231] This embodiment is a variation of Embodiments 1 to 5.

[0232] In this embodiment, the number of the test units 200 is two, and the two test units 200 are arranged in parallel.

[0233] It should be noted that the number of the test units 200 can also be 3, 4, etc. The number of the test units 200 can be set according to actual test requirements and no excessive restrictions are made here.

[0234] Furthermore, in the case where there are multiple test units 200, in order to control the test gas to enter different test units 200, the test unit 200 further includes a seventeenth automatic control element, an eighteenth manual control element, an eighteenth automatic control element and a nineteenth manual control element. Among them, the seventeenth automatic control element is arranged at the first test gas input element, and is located downstream of the two first test gas input elements connected in parallel and upstream of the second detection element 204, and is used to manually control the opening and closing of the first test gas input element; the eighteenth manual control element is arranged at the first test gas input element, and is located downstream of the seventeenth automatic control element and upstream of the second detection element 204, and is used to automatically control the opening and closing of the first test gas input element; the eighteenth automatic control element is arranged at the first test gas output element, and is located downstream of the third detection element 205 and upstream of the parallel connection of the two first test gas output elements, and is used to automatically control the opening and closing of the first test gas output element; the nineteenth manual control element is arranged at the first test gas output element, and is located downstream of the eighteenth automatic control element and upstream of the parallel connection of the two first test gas output elements, and is used to manually control the opening and closing of the first test gas output element.

[0235] In some of the embodiments, the seventeenth automatic control element includes but is not limited to a pneumatic diaphragm valve.

[0236] In some of the embodiments, the eighteenth manual control element includes but is not limited to a manual diaphragm valve.

[0237] In some of the embodiments, the eighteenth automatic control element includes but is not limited to a pneumatic diaphragm valve.

[0238] In some of the embodiments, the nineteenth manual control element includes but is not limited to a manual diaphragm valve.

[0239] The usage and advantages of this embodiment are the same as those of the above embodiment and will not be described in detail here.

[0240] Example 7

[0241] This embodiment relates to the semiconductor process equipment in the present invention.

[0242] A semiconductor process equipment, comprising a special gas transport component performance testing system as described in any of Examples 1 to 6.

[0243] It should be noted that the semiconductor process equipment also includes a high-pressure nitrogen supply device, a high-pressure helium supply device, and a low-pressure nitrogen supply device. Among them, the high-pressure nitrogen supply device is connected to the first gas delivery unit 100 of the special gas delivery component performance test system; the high-pressure helium supply device is connected to the second gas delivery unit 500 of the special gas delivery component performance test system; and the low-pressure nitrogen supply device is connected to the second vacuum element 402 in the special gas delivery component performance test system.

[0244] The method of use of this embodiment is basically the same as that of Embodiments 1 to 6, and will not be described again here.

[0245] The technical effects of this embodiment are basically the same as those of Embodiments 1 to 6, and will not be described in detail here.

[0246] Example 8

[0247] This embodiment relates to a performance testing method for special gas delivery components in the present invention.

[0248] A method for testing the performance of a special gas delivery component is applied to a special gas delivery component performance testing system as described in any one of Embodiments 1 to 6 or a semiconductor process equipment as described in Embodiment 7, comprising:

[0249] The first gas delivery unit 100 cooperates with the test unit 200 to perform leakage detection on the special gas delivery components installed on the test unit 200.

[0250] Specifically, the performance testing method of special gas transportation components refers to Example 1.

[0251] Furthermore, the performance test method of special gas transmission components also includes:

[0252] The purge unit 400 obtains high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit 200 and discharge the purge exhaust gas to an exhaust gas treatment device.

[0253] Specifically, the performance testing method of special gas transportation components refers to Example 2.

[0254] Furthermore, the performance test method of special gas transmission components also includes:

[0255] The second gas delivery unit 500 cooperates with the test unit 200 to perform internal leakage detection on the special gas delivery components installed on the test unit 200.

[0256] Specifically, the performance testing method of special gas transportation components refers to Example 3.

[0257] Furthermore, the performance test method of special gas transmission components also includes:

[0258] The boosting unit 600 boosts the test gas and delivers the boosted test gas to the test unit 200 , so as to perform an overpressure and pressure-maintaining test on the special gas delivery components installed on the test unit 200 .

[0259] Specifically, the performance testing method of special gas transportation components refers to Example 4.

[0260] Furthermore, the performance test method of special gas transmission components also includes:

[0261] When the first gas delivery unit 100 delivers low-pressure gas to the front end of the test unit 200 through the purge unit 400 and the purge unit 400 forms a vacuum condition at the rear end of the test unit 200, the valve body of the test unit 200 is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit 200.

[0262] Specifically, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0263] Subsequently, the system turns on the first automatic control element 104, the seventh automatic control element 404, the sixth automatic control element 110, the eighth automatic control element 406, and the second vacuum element 402, so that the front end of the test disc element 201 is input with low-pressure test gas and the rear end of the test disc element 201 is vacuumed;

[0264] Finally, the second automatic control element 203 and the third automatic control element 207 are frequently opened and closed by the system, and the value changes of the second detection element 204 and the third detection element 205 are observed to realize fatigue testing of the special gas delivery components installed on the test disk element 201.

[0265] Specifically, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0266] Then, the system turns on the first automatic control element 104, the fifth automatic control element 107, the sixth automatic control element 110, and the fourth automatic control element 303, so that the front end of the test disc element 201 is input with high-pressure test gas, and the rear end of the test disc element 201 is filled with low-pressure test gas;

[0267] Finally, the second automatic control element 203 and the third automatic control element 207 are frequently opened and closed by the system, and the value changes of the second detection element 204 and the third detection element 205 are observed to realize fatigue testing of the special gas delivery components installed on the test disk element 201.

[0268] Furthermore, the performance test method of special gas transmission components also includes:

[0269] The gas flow passing through the test unit 200 and the gas pressure obtained by the test unit 200 are obtained through the first flow detection unit 700 and the second flow detection unit 800 to perform a CV value test on the special gas delivery components installed on the test unit 200.

[0270] Specifically, the performance testing method of special gas transportation components refers to Example 5.

[0271] The technical effects of this embodiment are basically the same as those of Embodiments 1 to 6, and will not be described in detail here.

[0272] Example 9

[0273] This embodiment relates to a specific implementation of the present invention.

[0274] like Fig.11 As shown, the first gas delivery unit 100 includes a purifier (PUR), a particulate filter (DPF), manual diaphragm valves (V1, V2, V4), pneumatic diaphragm valves (T1, T2, T4), and temperature and pressure sensors (Z1, Z2).

[0275] The test unit 200 includes a test disk (DIT), manual diaphragm valves (V6, V11, C2, C4, C6, C8, V15), pneumatic diaphragm valves (T1, T2, T4, C1, C43, C5, C7, T16), temperature and pressure sensors (Z3, Z4, Z5), and a helium detector (HMLD).

[0276] The first vacuum unit 300 includes a manual diaphragm valve (V15), a pneumatic diaphragm valve (T16), a one-way valve (X5), and a vacuum pump (EVP).

[0277] The purge unit 400 includes a pressure regulating valve (Q1), manual diaphragm valves (V3, V14, V16), pneumatic diaphragm valves (T3, T15), a one-way valve (X3, X4), a vacuum transmitter (VG), and a temperature and pressure sensor (Z6).

[0278] The second gas delivery unit 500 includes a pressure regulating valve (Q2), a manual diaphragm valve (V5), a pneumatic diaphragm valve (T5), and a micro-leakage valve (T6).

[0279] The boosting unit 600 includes manual diaphragm valves (V7, V9), pneumatic diaphragm valves (T8, T10), and a boosting pump (BP).

[0280] The first flow detection unit 700 includes a manual diaphragm valve (V8, V10), a pneumatic diaphragm valve (T9, T11), and a flow control meter (FLW).

[0281] The second flow detection unit 800 includes a manual diaphragm valve (V12, V13), a pneumatic diaphragm valve (T13, T14), a pressure regulating valve (Q3), a one-way valve (X1, X2), a low-pressure mass flowmeter (MFM), and a high-pressure flowmeter (HPF).

[0282] Specifically, the performance test method of the special gas delivery components of this embodiment is as follows:

[0283] (1) Leakage detection

[0284] The staff manually opens all manual diaphragm valves in the entire test system and keeps all pneumatic diaphragm valves closed through the system to complete the preparation work before the system test;

[0285] PUR and DPF filter the high-pressure nitrogen delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter in the high-pressure nitrogen;

[0286] The system turns on T1, T2, T4, T7, and C1, so that the first gas delivery component delivers high-pressure nitrogen to the DIT, and performs leakage detection on the special gas delivery components by observing the value changes of Z3 and Z4;

[0287] After the external leak test is completed, the system opens C3, T12, T16, and EVP so that the test exhaust gas can be discharged through the first exhaust gas delivery element.

[0288] (2) Internal leakage detection

[0289] In actual work, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0290] The system turns on Q2, thereby converting high-pressure helium to low-pressure helium;

[0291] The system opens T5, T6, T7, C1, C3, T12, and D16, so that low-pressure helium enters the HMLD through the first test gas input element, the first test gas output element, and the second test gas input element;

[0292] Finally, the staff sprayed air toward the special gas conveying components and observed the changes in the HMLD value, thereby realizing the internal leakage detection of the special gas conveying components.

[0293] (3) Overpressure and pressure holding test

[0294] In actual work, when conducting overpressure and pressure holding tests on special gas transmission components, the staff manually opens all manual diaphragm valves in the entire test system and keeps all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0295] PUR and DPF filter the high-pressure nitrogen delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter in the high-pressure nitrogen;

[0296] The system opens T1, T2, T4, and T8, so that the test gas is pressure-regulated through BP, so that the pressure of the test gas exceeds the outlet pressure of the cylinder;

[0297] The system turns on T10 and C1, so that the DIT front end can input high-pressure test gas;

[0298] The system turns on C3, T12, T15, and VG, so that the back end of the DIT is in a vacuum state;

[0299] By observing the numerical changes of Z3 and Z4, the staff can carry out over-pressure and pressure-maintaining tests on special gas transportation components.

[0300] (4) CV value test

[0301] In actual work, the staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the test;

[0302] PUR and DPF filter the high-pressure nitrogen delivered by the upstream high-pressure nitrogen pipeline to remove moisture, oxygen and particulate matter in the high-pressure nitrogen;

[0303] The system turns on T1 and Q1, so that the high-pressure test gas is converted into low-pressure test gas through Q1;

[0304] The system opens T3, T4, T9, T11, C1, C3, and T13, so that the low-pressure test gas can pass through FLW, Z3, Z4, and MFM in sequence, and then the pressure and temperature of the low-pressure test gas at the front and back ends of DIT can be obtained;

[0305] The system closes T3, T9, and T11, and opens T7, T15, and VG. VG provides vacuum negative pressure at the end of the second exhaust gas delivery element, so that the pipeline in the entire test system is in a vacuum state;

[0306] The system opens T3 and closes T15, so that the low-pressure nitrogen fills the entire test system pipeline, and the air pressure in the pipeline reaches the standard requirement and is maintained for a period of time;

[0307] The system closes T1 and opens T15, and VG provides vacuum negative pressure at the end of the second exhaust gas delivery element, thereby exhausting the gas in the pipeline in the entire test system;

[0308] The system turns on T1, turns off T3, and turns on T2 and T9, so that the high-pressure test gas can pass through FLW, Z3, Z4, and MFM in sequence, and then the pressure and temperature of the high-pressure test gas at the front and back ends of DIT can be obtained;

[0309] The staff can obtain the CV value of the special gas delivery components installed on the DIT based on the pressure and temperature of the low-pressure test gas at the front and rear ends of the DIT and the pressure and temperature of the high-pressure test gas at the front and rear ends of the DIT.

[0310] (5) Fatigue test 1

[0311] The staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0312] The system turns on T1, T3, T4, T7, T12, T15, and VG, so that low-pressure test gas is input to the front end of DIT and vacuum is formed at the back end of DIT;

[0313] By frequently opening and closing C1 and C3 and observing the value changes of Z3 and Z4, fatigue testing of special gas conveying components installed on DIT can be achieved.

[0314] (6) Fatigue test 2

[0315] The staff manually opened all manual diaphragm valves in the entire test system and kept all pneumatic diaphragm valves closed through the system to complete the preparation work before the fatigue test;

[0316] The system opens T1, T2, T4, T7, T12, and T16, so that high-pressure test gas is input to the front end of the DIT and low-pressure test gas is stored at the back end of the DIT;

[0317] By frequently opening and closing C1 and C3 and observing the value changes of Z3 and Z4, fatigue testing of special gas conveying components installed on DIT can be achieved.

[0318] (7) Purge

[0319] When changing the test type of the special gas delivery component or replacing the special gas delivery component on the test disk element 201, the entire system needs to be purged. The specific purging method is as follows:

[0320] The system closes T3, T9, and T11, and opens T7, T15, and VG. VG provides vacuum negative pressure at the end of the second exhaust gas delivery element, so that the pipeline in the entire test system is in a vacuum state;

[0321] The system opens T3 and closes T15, so that the low-pressure nitrogen fills the entire test system pipeline, and the air pressure in the pipeline reaches the standard requirement and is maintained for a period of time;

[0322] The system closes T1 and opens T15, and VG provides vacuum negative pressure at the end of the second exhaust gas delivery element, thereby exhausting the gas in the pipeline in the entire test system.

[0323] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0324] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A performance test system for special gas conveying components, characterized in that: include: a first gas delivery unit, the first gas delivery unit being connected to a high-pressure nitrogen source and being used to deliver high-pressure nitrogen for external leakage detection; at least one testing unit, the testing unit being arranged downstream of the first gas delivery unit and being in communication with the first gas delivery unit, and being used for cooperating with the first gas delivery unit to perform leakage detection; The first vacuum unit is disposed downstream of the test unit and communicated with the test unit for discharging test exhaust gas.

2. The performance test system for special gas delivery components according to claim 1 is characterized in that: The first gas delivery unit comprises: a first gas delivery element, the first gas delivery element being connected to a high-pressure nitrogen source and the test unit, respectively, and being used for delivering high-pressure nitrogen to the test unit; A purification element, which is disposed on the first gas delivery element and is used to purify the high-pressure nitrogen to increase the purity of the high-pressure nitrogen and reduce the humidity of the high-pressure nitrogen; a filter element, the filter element being disposed on the first gas delivery element and located downstream of the purification element, for filtering the high-pressure nitrogen to remove particulate matter in the high-pressure nitrogen; and / or The test unit comprises: a first test gas input element, the first test gas input element being in communication with the first gas delivery unit and being used for obtaining high-pressure nitrogen; a test disc element, the test disc element being in communication with the first test gas input element for leak detection; A first test gas output element, the first test gas output element is connected to the test disc element and the first vacuum unit respectively, and is used to output the test exhaust gas; and / or The first vacuum unit comprises: a first exhaust gas delivery element, the first exhaust gas delivery element being disposed downstream of the test unit and in communication with the test unit for discharging test exhaust gas; A first vacuum element is disposed on the first exhaust gas conveying element and is used to form a vacuum environment in the first exhaust gas conveying element.

3. The performance test system for special gas delivery components according to claim 2 is characterized in that: The first gas delivery unit also includes: A first manual control element, which is disposed on the first gas delivery element and is located downstream of the filter element, and is used to manually control the opening and closing of the first gas delivery element; A first automatic control element, which is disposed on the first gas delivery element and is located downstream of the first manual control element, and is used to automatically control the opening and closing of the first gas delivery element; a first detection element, which is disposed on the first gas delivery element and is located downstream of the first automatic control element, and is used to detect the temperature and pressure of the first gas delivery element; and / or The testing unit also includes: A first heat preservation element, which is disposed at the first test gas input element and is used for heat preservation; A second heat preservation element, which is disposed on the first test gas output element and is used for heat preservation; a second manual control element, which is disposed on the first test gas input element and is used to manually control the opening and closing of the first test gas input element; a second automatic control element, which is disposed at the first test gas input element and is located upstream of the second manual control element, and is used to automatically control the opening and closing of the first test gas input element; A second detection element, which is disposed at the first test gas input element and is located downstream of the second manual control element, and is used to detect the temperature and pressure of the first test gas input element; a third detection element, the third detection element being disposed at the first test gas output element and being used to detect the temperature and pressure of the first test gas output element; A third manual control element, which is disposed at the first test gas output element and is located downstream of the third detection element, and is used to manually control the opening and closing of the test gas output element; a third automatic control element, which is disposed at the first test gas output element and is located downstream of the third manual control element, and is used to automatically control the opening and closing of the first test gas output element; a fourth detection element, which is disposed at the first test gas output element and is located downstream of the third automatic control element, and is used to detect the temperature and pressure of the first test gas output element; and / or The first vacuum unit also includes: a fourth manual control element, the fourth manual control element being disposed on the first exhaust gas delivery element and being used for manually controlling the opening and closing of the first exhaust gas delivery element; a fourth automatic control element, the fourth automatic control element being arranged at the first exhaust gas delivery element and being located downstream of the fourth manual control element, and being used for automatically controlling the opening and closing of the first exhaust gas delivery element; A first one-way element is disposed on the first exhaust gas conveying element and is located downstream of the fourth manual control element and upstream of the first vacuum element, and is used to allow the test exhaust gas to flow in one direction.

4. The performance test system for special gas conveying components according to any one of claims 1 to 3, characterized in that: Also includes: a purge unit, the purge unit being arranged downstream of the first gas delivery unit and upstream of the test unit, and being respectively connected to the first gas delivery unit, the test unit, and the exhaust gas treatment equipment, for obtaining high-pressure nitrogen, treating the high-pressure nitrogen to obtain low-pressure nitrogen, and using the low-pressure nitrogen to purge the test unit and discharge the purge exhaust gas to the exhaust gas treatment equipment; and / or A second gas delivery unit, the second gas delivery unit is connected to the high-pressure helium source and the test unit respectively, and is used to deliver high-pressure helium for internal leakage detection; wherein the test unit cooperates with the second gas delivery unit to perform internal leakage detection; and / or a pressurizing unit, the pressurizing unit being connected to the first gas delivery unit and the test unit respectively, and being used for pressurizing the test gas and delivering the pressurized test gas to the test unit; and / or a first flow detection unit, the first flow detection unit being connected to the test unit and used for detecting the flow of gas input into the test unit; A second flow detection unit, the second flow detection unit is connected to the test unit and is used to detect the gas flow output by the test unit.

5. The performance test system for special gas delivery components according to claim 4 is characterized in that: The first gas delivery unit also includes: a second gas delivery element, the second gas delivery element being in communication with the first gas delivery element of the first gas delivery unit and configured to obtain and deliver high-pressure nitrogen; A third gas delivery element, the third gas delivery element is connected to the second gas delivery element, the purge unit, and the test unit, respectively, and is used to obtain and deliver high-pressure nitrogen and low-pressure nitrogen to the test unit; and / or The purge unit comprises: a purge gas delivery element, the purge gas delivery element being disposed downstream of the first gas delivery unit and upstream of the test unit, and being communicated with the first gas delivery unit and the test unit, respectively, for obtaining high-pressure nitrogen and delivering low-pressure nitrogen to the test unit; A first pressure regulating element, which is disposed on the purge gas delivery element and is used to regulate the pressure of high-pressure nitrogen to obtain low-pressure nitrogen; a second exhaust gas delivery element, the second exhaust gas delivery element being disposed downstream of the test unit and in communication with the test unit for discharging purge exhaust gas; a second vacuum element, the second vacuum element being disposed on the second exhaust gas delivery element and configured to form a vacuum environment in the second exhaust gas delivery element; a power gas delivery element, the power gas delivery element being connected to a power gas source and the second vacuum element respectively, and being used for delivering power gas to the second vacuum element; and / or The second gas delivery unit comprises: a fourth gas delivery element, the fourth gas delivery element being connected to the high-pressure helium source and the test unit, respectively, and being used for delivering high-pressure helium to the test unit; and / or The testing unit also includes: a second test gas input element, the second test gas input element being in communication with the first test gas output element of the test unit and being used for obtaining the test gas; a helium test element, the helium test element being in communication with the second test gas input element for internal leakage detection; and / or The testing unit also includes: A second test gas output element, which is connected to the first test gas output element of the test unit and the first vacuum unit respectively, and is used to output the test exhaust gas; and / or The booster unit comprises: a fifth gas delivery element, the fifth gas delivery element being in communication with the first test gas input element of the test unit and being used for obtaining the test gas; a pressurizing element, the pressurizing element being arranged on the fifth gas delivery element and being used for pressurizing the test gas; and / or The first flow detection unit comprises: a sixth gas delivery element, the sixth gas delivery element being connected to the test unit and the second gas delivery unit respectively, and being used for obtaining the test gas; A first flow detection element, which is disposed on the sixth gas delivery element and is used to detect the gas flow input into the test unit; and / or The second flow detection unit includes: a seventh gas delivery element, the seventh gas delivery element being connected to the test unit and the second vacuum unit respectively, and being used for obtaining the test gas; a second flow detection element, the second flow detection element being disposed on the seventh gas delivery element and being used to detect the flow of the low-pressure gas output by the test unit; an eighth gas delivery element, the eighth gas delivery element being connected to the test unit and the second vacuum unit respectively, and being used for obtaining test gas; A third flow detection element, wherein the third flow detection element is disposed on the eighth gas delivery element and is used to detect the flow of the high-pressure gas output by the test unit.

6. The performance test system for special gas delivery components according to claim 5, characterized in that: The first gas delivery unit also includes: a fifth manual control element, the fifth manual control element being arranged on the second gas delivery element and being used for manually controlling the opening and closing of the second gas delivery element; a fifth automatic control element, which is disposed on the second gas delivery element and upstream of the fifth manual control element, and is used to automatically control the opening and closing of the second gas delivery element; a fifth detection element, the fifth detection element being disposed on the third gas delivery element and being used to detect the temperature and pressure of the third gas delivery element; a sixth manual control element, which is disposed on the third gas delivery element and is located downstream of the fifth detection element, and is used to manually control the opening and closing of the third gas delivery element; a sixth automatic control element, which is disposed on the third gas delivery element and located upstream of the sixth manual control element, and is used to automatically control the opening and closing of the third gas delivery element; and / or The purge unit also includes: a seventh manual control element, which is disposed on the purge gas delivery element and is located downstream of the first pressure regulating element, and is used to manually control the opening and closing of the purge gas delivery element; a seventh automatic control element, which is disposed on the purge gas delivery element and is located downstream of the first pressure regulating element and upstream of the seventh manual control element, and is used to automatically control the opening and closing of the purge gas delivery element; an eighth manual control element, the eighth manual control element being disposed on the second exhaust gas delivery element and being used for manually controlling the opening and closing of the second exhaust gas delivery element; an eighth automatic control element, the eighth automatic control element being disposed at the second exhaust gas delivery element and being located downstream of the eighth manual control element, and being used for automatically controlling the opening and closing of the second exhaust gas delivery element; a second one-way element, the second one-way element being disposed on the second exhaust gas conveying element and being located downstream of the eighth automatic control element and upstream of the second vacuum element, for enabling the purge exhaust gas to flow in one direction; a ninth manual control element, the ninth manual control element being disposed on the power gas delivery element and being used for manually controlling the opening and closing of the power gas delivery element; a sixth detection element, which is disposed on the power gas delivery element and is located downstream of the ninth manual control element, and is used to detect the temperature and pressure of the power gas delivery element; a third one-way element, the third one-way element being disposed at the power gas delivery element and located downstream of the sixth detection element, and being used for making the power gas flow in one direction; and / or The second gas delivery unit also includes: a tenth manual control element, the tenth manual control element being disposed on the fourth gas delivery element and being used for manually controlling the opening and closing of the fourth gas delivery element; a second pressure regulating element, which is disposed at the fourth gas delivery element and is located downstream of the tenth manual control element, and is used for regulating the pressure of the high-pressure helium to obtain the low-pressure helium; a ninth automatic control element, which is disposed at the fourth gas delivery element and is located downstream of the second pressure regulating element, and is used for automatically controlling the opening and closing of the fourth gas delivery element; a micro-leakage control element, the micro-leakage control element being arranged at the fourth gas delivery element and being located downstream of the ninth automatic control element; and / or The testing unit also includes: an eleventh manual control element, the eleventh manual control element being disposed on the second test gas input element and being used for manually controlling the opening and closing of the second test gas input element; a tenth automatic control element, which is disposed at the second test gas input element and is located downstream of the eleventh manual control element, and is used for automatically controlling the opening and closing of the second test gas input element; and / or The boost unit further comprises: a twelfth manual control element, which is disposed on the fifth gas delivery element and located upstream of the pressurizing element, and is used to manually control the opening and closing of the fifth gas delivery element; an eleventh automatic control element, the eleventh automatic control element being disposed on the fifth gas delivery element and being located upstream of the twelfth manual control element, and being used for automatically controlling the opening and closing of the fifth gas delivery element; a thirteenth manual control element, which is disposed on the fifth gas delivery element and is located downstream of the pressurizing element, and is used to manually control the opening and closing of the fifth gas delivery element; a twelfth automatic control element, which is disposed on the fifth gas delivery element and is located downstream of the pressurizing element and upstream of the thirteenth manual control element, and is used to automatically control the opening and closing of the fifth gas delivery element; and / or The first flow detection unit also includes: a fourteenth manual control element, which is disposed on the sixth gas delivery element and located upstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; a thirteenth automatic control element, the thirteenth automatic control element being disposed on the sixth gas delivery element and being located upstream of the fourteenth manual control element, and being used for automatically controlling the opening and closing of the sixth gas delivery element; a fifteenth manual control element, which is disposed on the sixth gas delivery element and is located downstream of the first flow detection element, and is used to manually control the opening and closing of the sixth gas delivery element; a fourteenth automatic control element, which is disposed on the sixth gas delivery element and is located downstream of the first flow detection element and upstream of the fifteenth manual control element, and is used to automatically control the opening and closing of the sixth gas delivery element; and / or The second flow detection unit also includes: a sixteenth manual control element, which is disposed on the seventh gas delivery element and located upstream of the second flow detection element, and is used to manually control the opening and closing of the seventh gas delivery element; a fifteenth automatic control element, which is disposed on the seventh gas delivery element and is located downstream of the sixteenth manual control element and upstream of the second flow detection element, and is used to automatically control the opening and closing of the seventh gas delivery element; a third pressure regulating element, the third pressure regulating element being disposed at the seventh gas delivery element and being located downstream of the second flow detection element, and being used for regulating the gas pressure inside the seventh gas delivery element; a fourth one-way element, the fourth one-way element being disposed at the seventh gas delivery element and located downstream of the third pressure regulating element, and being used for making the test exhaust gas flow in one direction; a seventeenth manual control element, the seventeenth manual control element being disposed on the eighth gas delivery element and located upstream of the third flow detection element, and being used for manually controlling the opening and closing of the eighth gas delivery element; a sixteenth automatic control element, which is disposed on the eighth gas delivery element and is located downstream of the seventeenth manual control element and upstream of the third flow detection element, and is used to automatically control the opening and closing of the eighth gas delivery element; A fifth one-way element is disposed on the eighth gas delivery element and is located downstream of the third flow detection element, and is used to allow the test exhaust gas to flow in one direction.

7. A semiconductor process equipment, characterized in that: include: A special gas transport component performance testing system as described in any one of claims 1 to 6.

8. A method for testing the performance of a special gas delivery component, applied to the special gas delivery component performance testing system as claimed in any one of claims 1 to 6 or the semiconductor process equipment as claimed in claim 7, characterized in that: include: The first gas delivery unit cooperates with the test unit to perform leakage detection on the special gas delivery components installed on the test unit.

9. The method for testing the performance of special gas delivery components according to claim 8, characterized in that: Also includes: The second gas delivery unit cooperates with the test unit to perform internal leakage detection on the special gas delivery components installed on the test unit.

10. The method for testing the performance of special gas delivery components according to claim 8 or 9, characterized in that: Also includes: The purge unit obtains high-pressure nitrogen, processes the high-pressure nitrogen to obtain low-pressure nitrogen, and uses the low-pressure nitrogen to purge the test unit and discharge the purge exhaust gas to the exhaust gas treatment equipment; and / or The booster unit boosts the test gas and delivers the boosted test gas to the test unit to perform an overpressure and pressure holding test on the special gas delivery components installed on the test unit; and / or When the first gas delivery unit delivers low-pressure gas to the front end of the test unit through the purge unit and the purge unit forms a vacuum condition at the rear end of the test unit, the valve body of the test unit is frequently opened and closed to perform fatigue testing on the special gas delivery components installed on the test unit; and / or The gas flow passing through the test unit and the gas pressure obtained by the test unit are obtained through the first flow detection unit and the second flow detection unit, so as to perform CV value test on the special gas delivery components installed on the test unit.

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