Film thickness real-time monitoring method, device and equipment and storage medium

Abstract

The invention relates to the technical field of sputter coating, and discloses a coating film thickness real-time monitoring method, device and equipment and a storage medium. The method comprises the following steps: respectively acquiring an initial film thickness detection image and a real-time film thickness detection image by utilizing an image acquisition device before executing sputter coating on a target coating sample and at each acquisition moment when executing sputter coating, and according to a standard coating speed of a sputter coating device, considering a prefabricated detection window generated in the real-time film thickness detection image at the standard coating speed; real-time coating thickness measurement of a target coating sample is achieved by analyzing pixel information in an updatable prefabricated detection window, the film thickness monitoring accuracy and monitoring feedback real-time performance are remarkably improved, meanwhile, the standard coating speed of the sputter coating device is updated, self-adaptive adjustment of the standard coating speed of the sputter coating device is achieved, and the sputter coating quality is improved. The image analysis difficulty is reduced; and the coating film thickness monitoring accuracy is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sputtering coating, and in particular to a method, device, equipment and storage medium for real-time monitoring of coating thickness. Background Art

[0002] Coating thickness monitoring is a technology that measures the thickness of thin films in real time or periodically during the thin film deposition process. This is crucial to ensuring film quality, controlling the production process, and meeting product performance requirements. Especially in the sputtering coating process of semiconductor device manufacturing, many application scenarios have extremely high requirements for film thickness accuracy. Accurate film thickness monitoring can ensure that the film thickness meets the design requirements, thereby ensuring the electrical performance and reliability of the device. Existing technologies usually use spectroscopic ellipsometers, optical interferometry, and image analysis methods to achieve the process of sputtering coating thickness monitoring. However, the spectroscopic ellipsometer method has the problems of complex data analysis and is only applicable to vacuum environments. The optical interferometry method has high requirements for thin film materials and is easily affected by environmental interference. The image analysis method can avoid the impact of the above two methods.

[0003] However, in practical applications, the image analysis method still has some defects, which limit the application of this method in the process of sputtering coating thickness monitoring: First, the film thickness monitoring in the sputtering coating process has very high requirements for the real-time monitoring feedback. The sputtering coating equipment needs to obtain the current coating film thickness detection results in a very short time and then control the subsequent sputtering coating process to avoid the coating film thickness not meeting the product requirements. Under such high real-time requirements, very high requirements are placed on the image processing equipment and recognition algorithms; second, the sputtering coating process in different scenarios usually has different coating speeds (for example, the sputtering coating device will experience a drop in sputtering gas source pressure and consumption of sputtering target materials as the use time increases, resulting in different coating speeds in different use periods of the sputtering coating device), and different coating speeds will affect the recognition efficiency of the coating edge during the image analysis process, thereby limiting the recognition algorithm's improvement in the real-time performance of the film thickness monitoring feedback, making it impossible for the sputtering coating film thickness monitoring to achieve the ideal effect.

[0004] Therefore, how to improve the detection speed of the coating thickness and the real-time monitoring feedback of the image analysis method in the process of sputtering coating thickness monitoring is a technical problem that needs to be solved urgently. Summary of the invention

[0005] The present invention provides a method, device, equipment and storage medium for real-time monitoring of coating thickness, aiming to solve at least one of the above-mentioned technical problems.

[0006] To achieve the above object, the present invention provides a method for real-time monitoring of coating thickness, comprising the following steps: Before performing sputtering coating on the target coating sample, controlling the detection beam to vertically irradiate the side of the target coating sample, using an image acquisition device to acquire the detection beam signal reflected by the target coating sample, and obtaining an initial film thickness detection image of the target coating sample; Controlling the sputter coating device to perform sputter coating on the target coating sample, and using the image acquisition device to acquire a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputter coating; Obtaining a standard coating speed of the sputtering coating device, and determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, taking into account a prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; It is determined whether the real-time coating thickness reaches a preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

[0007] Optionally, before performing sputtering coating on the target coating sample, the method further includes: A stable light source is installed in the sputtering coating area, so that when the stable light source emits a detection light beam, the detection light beam vertically illuminates the side of the target coating sample; An image acquisition device is installed in the sputtering coating area so that when the stable light source emits a detection beam, the image acquisition device collects the detection beam signal reflected by the side of the target coating sample to generate an initial film thickness detection image of the target coating sample.

[0008] Optionally, the step of controlling the sputtering coating device to perform sputtering coating on the target coating sample, and using the image acquisition device to acquire a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating, specifically includes: Controlling the sputter coating device to perform sputter coating on the target coating sample fixed in the sputter coating area, and using the image acquisition device to acquire the detection beam signal reflected by the target coating sample when the target coating sample is subjected to sputter coating; The detection beam signal collected by the image acquisition device is sampled according to a preset sampling period to generate a real-time film thickness detection image at each acquisition moment when the target coating sample is sputtered, and each real-time film thickness detection image is mapped and stored with the acquisition moment.

[0009] Optionally, the step of obtaining a standard coating speed of the sputtering coating device, and determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment and considering a prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed specifically includes: Acquire identification information of the sputtering coating device, and use the identification information to match the standard coating speed of the sputtering coating device in a comparison table of the sputtering coating device and the standard sputtering coating speed; According to the standard coating speed of the sputtering coating device, a prefabricated detection window is generated in the initial film thickness detection image. The real-time coating thickness of the target coating sample is determined based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment using the prefabricated detection window.

[0010] Optionally, the step of generating a prefabricated detection window in the initial film thickness detection image according to the standard coating speed of the sputtering coating device specifically includes: Identify the sample edge position of the target coating sample in the initial film thickness detection image, and calculate the predicted coating edge position of the target coating sample at the current acquisition moment in the initial film thickness detection image according to the standard coating speed at each acquisition moment between the current acquisition moment and the initial acquisition moment; A prefabricated detection window of a preset pixel size is generated at the predicted position of the coating edge in the initial film thickness detection image; wherein the preset pixel size is configured to have a pixel length and a unit pixel width that are the same as the sample edge length of the target coating sample.

[0011] Optionally, the step of determining the real-time coating thickness of the target coating sample by using the prefabricated detection window based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment specifically includes: Mapping the prefabricated detection window generated in the initial film thickness detection image to the real-time film thickness detection image at the current acquisition moment, extracting the image data of the prefabricated detection window in the real-time film thickness detection image, and determining whether the ratio of a number of pixel points in the image data of the prefabricated detection window that satisfy the color of the coating pixel exceeds a preset ratio; If yes, the position of the prefabricated detection window is used as the actual position of the coating edge, and the distance between the actual position of the coating edge and the sample edge position is converted into the real-time coating thickness of the target coating sample according to the image conversion ratio; If not, the prefabricated detection window is vertically translated by a unit pixel distance in a direction close to and away from the edge position of the sample to obtain an updated prefabricated detection window, and the step of returning to determine whether the proportion of a number of pixel points in the image data of the prefabricated detection window that satisfy the coating pixel color exceeds a preset proportion.

[0012] Optionally, the coating film thickness real-time monitoring method further includes: After obtaining the real-time coating thickness at each acquisition moment, determining whether the standard coating speed of the sputtering coating device meets the adaptation update condition, and if so, updating the standard coating speed of the sputtering coating device in the comparison table between the sputtering coating device and the standard sputtering coating speed; Among them, the adaptation update condition is configured as a prefabricated detection window update step in the real-time coating thickness monitoring process of a continuous target number of acquisition moments, and the standard coating speed update is configured to reduce the standard coating speed by a preset percentage to replace the standard coating speed before the update.

[0013] In order to achieve the above object, the present invention also provides a device for real-time monitoring of coating thickness, comprising: A first acquisition module is used to control the detection beam to vertically irradiate the side of the target coating sample before performing sputtering coating on the target coating sample, and use an image acquisition device to collect the detection beam signal reflected by the target coating sample to obtain an initial film thickness detection image of the target coating sample; The second acquisition module is used to control the sputtering coating device to perform sputtering coating on the target coating sample, and use the image acquisition device to obtain a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating; A film thickness determination module is used to obtain a standard film coating speed of the sputtering coating device, determine the real-time film coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, and consider the prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; The coating monitoring module is used to determine whether the real-time coating thickness reaches the preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

[0014] In addition, in order to achieve the above-mentioned purpose, the present invention also provides a real-time monitoring device for coating film thickness, and the real-time monitoring device for coating film thickness includes: a memory, a processor, and a real-time monitoring program for coating film thickness stored in the memory and executable on the processor, and when the real-time monitoring program for coating film thickness is executed by the processor, the steps of the real-time monitoring method for coating film thickness as described above are implemented.

[0015] In addition, in order to achieve the above-mentioned purpose, the present invention also provides a storage medium, on which a real-time monitoring program for coating film thickness is stored. When the real-time monitoring program for coating film thickness is executed by a processor, the steps of the above-mentioned real-time monitoring method for coating film thickness are implemented.

[0016] The beneficial effects of the present invention are as follows: a method, device, equipment and storage medium for real-time monitoring of coating thickness are proposed, a detection beam is deployed to vertically irradiate the side of a target coating sample, an initial film thickness detection image and a real-time film thickness detection image are respectively obtained by using an image acquisition device before the target coating sample is subjected to sputter coating and at each acquisition moment of the sputter coating, according to the standard coating speed of the sputter coating device, a prefabricated detection window generated by the standard coating speed in the real-time film thickness detection image is considered, and the real-time coating thickness of the target coating sample is measured by analyzing the pixel information in the updateable prefabricated detection window instead of the pixel information in the entire real-time film thickness detection image, which significantly improves the accuracy of film thickness monitoring and the real-time monitoring feedback in the sputter coating process, and at the same time, after the coating thickness measurement at each acquisition moment is performed, the standard coating speed of the sputter coating device is updated according to the continuous update judgment result of the prefabricated detection window, so as to realize the adaptive adjustment of the standard coating speed of the sputter coating device, without considering several factors of the sputter coating device that affect the standard coating speed, thereby reducing the difficulty of image analysis and improving the accuracy of coating thickness monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the device structure of the hardware operating environment involved in the embodiment of the present invention; Figure 2 A schematic diagram of a process flow of an embodiment of a method for real-time monitoring of coating thickness of the present invention; Figure 3 It is a structural block diagram of a device for real-time monitoring of coating thickness in an embodiment of the present invention.

[0018] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0019] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0020] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] like Figure 1 As shown, Figure 1 It is a schematic diagram of the device structure of the hardware operating environment involved in the embodiment of the present invention.

[0022] like Figure 1As shown, the device may include: a processor 1001, such as a CPU, a communication bus 1002, a user interface 1003, a network interface 1004, and a memory 1005. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display), an input unit such as a keyboard (Keyboard), and the optional user interface 1003 may also include a standard wired interface and a wireless interface. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a WI-FI interface). The memory 1005 may be a high-speed RAM memory, or it may be a stable memory (non-volatile memory), such as a disk memory. The memory 1005 may also be a storage device independent of the aforementioned processor 1001.

[0023] Those skilled in the art will understand that Figure 1 The structure of the device shown in the figure does not constitute a limitation of the device, and may include more or less components than shown in the figure, or combine certain components, or arrange the components differently.

[0024] like Figure 1 As shown, the memory 1005 as a computer storage medium may include an operating system, a network communication module, a user interface module, and a coating thickness real-time monitoring program.

[0025] exist Figure 1 In the terminal shown, the network interface 1004 is mainly used to connect to the backend server and communicate data with the backend server; the user interface 1003 is mainly used to connect to the client (user end) and communicate data with the client; and the processor 1001 can be used to call the real-time monitoring program of the coating thickness stored in the memory 1005 and perform the following operations: Before performing sputtering coating on the target coating sample, controlling the detection beam to vertically irradiate the side of the target coating sample, using an image acquisition device to acquire the detection beam signal reflected by the target coating sample, and obtaining an initial film thickness detection image of the target coating sample; Controlling the sputter coating device to perform sputter coating on the target coating sample, and using the image acquisition device to acquire a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputter coating; Obtaining a standard coating speed of the sputtering coating device, and determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, taking into account a prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; It is determined whether the real-time coating thickness reaches a preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

[0026] The specific embodiments of the present invention applied to the device are basically the same as the embodiments of the following method for real-time monitoring of coating thickness, and will not be described in detail here.

[0027] The embodiment of the present invention provides a method for real-time monitoring of coating thickness, referring to Figure 2 , Figure 2 It is a schematic diagram of the process of an embodiment of the method for real-time monitoring of coating thickness of the present invention.

[0028] In this embodiment, the coating film thickness real-time monitoring method comprises the following steps: S100: before performing sputtering coating on a target coating sample, controlling a detection beam to vertically irradiate a side of the target coating sample, using an image acquisition device to acquire a detection beam signal reflected by the target coating sample, and obtaining an initial film thickness detection image of the target coating sample; S200: controlling the sputtering coating device to perform sputtering coating on the target coating sample, and using the image acquisition device to acquire a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating; S300: acquiring a standard coating speed of the sputtering coating device, determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, and taking into account a prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; S400: Determine whether the real-time coating thickness reaches a preset film thickness, and if so, generate a sputtering coating stop instruction to control the sputtering coating device to complete the sputtering coating of the target coating sample.

[0029] It should be noted that in practical applications, the image analysis method still has some defects, which limit the application of this method in the process of sputtering coating thickness monitoring: First, the film thickness monitoring in the sputtering coating process has very high requirements for the real-time monitoring feedback. The sputtering coating equipment needs to obtain the current coating film thickness detection results in a very short time and then control the subsequent sputtering coating process to avoid the coating film thickness not meeting the product requirements. Under such high real-time requirements, very high requirements are placed on the image processing equipment and recognition algorithm; second, the sputtering coating process in different scenarios usually has different coating speeds (for example, the sputtering coating device will experience a drop in sputtering gas source pressure and consumption of sputtering target materials as the use time increases, resulting in different coating speeds in different use periods of the sputtering coating device), and different coating speeds will affect the recognition efficiency of the coating edge during the image analysis process, thereby limiting the recognition algorithm's improvement in the real-time performance of the film thickness monitoring feedback, making it impossible for the sputtering coating film thickness monitoring to achieve the ideal effect.

[0030] In order to solve the above problems, this embodiment deploys a detection beam to vertically irradiate the side of the target coating sample, and uses an image acquisition device to obtain an initial film thickness detection image and a real-time film thickness detection image before the target coating sample is subjected to sputtering coating and at each acquisition moment of the sputtering coating. According to the standard coating speed of the sputtering coating device, a prefabricated detection window generated by the standard coating speed in the real-time film thickness detection image is considered, and the real-time coating thickness of the target coating sample is measured by analyzing the pixel information in the updateable prefabricated detection window instead of the pixel information in the entire real-time film thickness detection image, which significantly improves the accuracy of film thickness monitoring and the real-time monitoring feedback in the sputtering coating process. At the same time, after the coating thickness measurement at each acquisition moment is performed, the standard coating speed of the sputtering coating device is updated according to the continuous update judgment result of the prefabricated detection window, so as to realize the adaptive adjustment of the standard coating speed of the sputtering coating device, without considering several factors of the sputtering coating device that affect the standard coating speed, thereby reducing the difficulty of image analysis and improving the accuracy of coating film thickness monitoring.

[0031] In a preferred embodiment, before performing sputtering coating on the target coating sample, the method further includes: S110: Install a stable light source in the sputtering coating area, so that when the stable light source emits a detection light beam, the detection light beam vertically illuminates the side of the target coating sample; S120: Install an image acquisition device in the sputtering coating area so that when the stable light source emits a detection beam, the image acquisition device acquires the detection beam signal reflected by the side of the target coating sample to generate an initial film thickness detection image of the target coating sample.

[0032] On this basis, the steps of controlling the sputtering coating device to perform sputtering coating on the target coating sample and using the image acquisition device to obtain the real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating include: S210: controlling the sputter coating device to perform sputter coating on the target coating sample fixed in the sputter coating area, and using the image acquisition device to acquire the detection beam signal reflected by the target coating sample when the target coating sample is sputter coated; S220: sampling the detection beam signal collected by the image acquisition device according to a preset sampling period, generating a real-time film thickness detection image at each acquisition moment when the target coating sample is subjected to sputtering coating, and mapping and storing each real-time film thickness detection image with the acquisition moment.

[0033] In this embodiment, before performing sputter coating on the target coating sample, a stable light source and an image acquisition device are deployed in the sputter coating area, and the detection beam emitted by the stable light source is used to vertically irradiate the side of the target coating sample, and then the image acquisition device is used to collect the detection beam signal reflected by the side of the target coating sample to generate an initial film thickness detection image of the target coating sample (the initial film thickness detection image is configured to only include the image of the target coating sample); when performing sputter coating on the target coating sample, the image acquisition device is used to collect the real-time film thickness detection image of the target coating sample at each acquisition moment (the real-time film thickness detection image is configured to include the image of the target coating sample and the thin film sputtered on the target coating sample). It should be noted that the images of the target coating sample and the thin film on the target coating sample in the initial film thickness detection image and the real-time film thickness detection image need to be significantly different from the background color, so as to facilitate image analysis and recognition, so as to achieve the measurement effect of the coating film thickness.

[0034] In a preferred embodiment, the standard coating speed of the sputtering coating device is obtained, and based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, the prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed is considered to determine the real-time coating thickness of the target coating sample, specifically including: S310: Acquire identification information of the sputtering coating device, and use the identification information to match the standard coating speed of the sputtering coating device in a comparison table between the sputtering coating device and the standard sputtering coating speed; S320: Generate a prefabricated detection window in the initial film thickness detection image according to the standard coating speed of the sputtering coating device, and determine the real-time coating thickness of the target coating sample by using the prefabricated detection window based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment.

[0035] On this basis, according to the standard coating speed of the sputtering coating device, the step of generating a prefabricated detection window in the initial film thickness detection image specifically includes: S321: Identify the sample edge position of the target coating sample in the initial film thickness detection image, and calculate the predicted coating edge position of the target coating sample at the current acquisition moment in the initial film thickness detection image according to the standard coating speed at each acquisition moment between the current acquisition moment and the initial acquisition moment; S322: Generate a prefabricated detection window of a preset pixel size at the predicted position of the coating edge in the initial film thickness detection image; wherein the preset pixel size is configured to have a pixel length and a unit pixel width that are the same as the sample edge length of the target coating sample.

[0036] On this basis, the step of determining the real-time coating thickness of the target coating sample by using the prefabricated detection window based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment specifically includes: S323: mapping the prefabricated detection window generated in the initial film thickness detection image to the real-time film thickness detection image at the current acquisition moment, extracting the image data of the prefabricated detection window in the real-time film thickness detection image, and determining whether the ratio of a number of pixel points in the image data of the prefabricated detection window that satisfy the color of the coating pixel exceeds a preset ratio; S324: If yes, taking the position of the prefabricated detection window as the actual position of the coating edge, and converting the distance between the actual position of the coating edge and the sample edge position into the real-time coating thickness of the target coating sample according to the image conversion ratio; S325: If not, vertically translate the prefabricated detection window by a unit pixel distance in a direction close to and away from the edge position of the sample to obtain an updated prefabricated detection window, and return to execute the step of determining whether the ratio of a number of pixel points in the image data of the prefabricated detection window that satisfy the coating pixel color exceeds a preset ratio.

[0037] In this embodiment, after using the image acquisition device to obtain the initial film thickness detection image and the real-time film thickness detection image before the target coating sample is sputtered and at each acquisition moment of the sputtering, the standard coating speed of the sputtering device can be used to consider the prefabricated detection window generated in the real-time film thickness detection image. The real-time coating thickness of the target coating sample can be measured by analyzing the pixel information in the updateable prefabricated detection window rather than the pixel information in the entire real-time film thickness detection image. Therefore, the accuracy of film thickness monitoring and the real-time monitoring feedback during the sputtering process can be significantly improved in this way.

[0038] In a preferred embodiment, the coating film thickness real-time monitoring method further includes: S510: after obtaining the real-time coating thickness at each acquisition moment, determining whether the standard coating speed of the sputtering coating device meets the adaptation update condition, and if so, updating the standard coating speed of the sputtering coating device in the comparison table between the sputtering coating device and the standard sputtering coating speed; Among them, the adaptation update condition is configured as a prefabricated detection window update step in the real-time coating thickness monitoring process of a continuous target number of acquisition moments, and the standard coating speed update is configured to reduce the standard coating speed by a preset percentage to replace the standard coating speed before the update.

[0039] In this embodiment, after performing the coating thickness measurement at each acquisition moment, the standard coating speed of the sputtering coating device is updated according to the continuous update judgment result of the prefabricated detection window, so as to realize adaptive adjustment of the standard coating speed of the sputtering coating device. There is no need to consider several factors that affect the standard coating speed of the sputtering coating device, which reduces the difficulty of image analysis and improves the accuracy of coating film thickness monitoring.

[0040] Reference Figure 3 , Figure 3 It is a structural block diagram of an embodiment of a device for real-time monitoring of coating thickness of the present invention.

[0041] like Figure 3 As shown, the coating film thickness real-time monitoring device provided in the embodiment of the present invention comprises: The first acquisition module 10 is used to control the detection beam to vertically irradiate the side of the target coating sample before performing sputtering coating on the target coating sample, and use the image acquisition device to collect the detection beam signal reflected by the target coating sample to obtain the initial film thickness detection image of the target coating sample; The second acquisition module 20 is used to control the sputtering coating device to perform sputtering coating on the target coating sample, and use the image acquisition device to obtain a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating; The film thickness determination module 30 is used to obtain the standard film coating speed of the sputtering coating device, determine the real-time film coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, and consider the prefabricated detection window generated in the real-time film thickness detection image by the standard film coating speed; The coating monitoring module 40 is used to determine whether the real-time coating thickness reaches a preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

[0042] Other embodiments or specific implementations of the device for real-time monitoring of coating thickness of the present invention may refer to the above-mentioned method embodiments and will not be described in detail here.

[0043] In addition, the present invention also proposes a real-time monitoring device for coating film thickness, which includes: a memory, a processor, and a real-time monitoring program for coating film thickness stored in the memory and executable on the processor. When the real-time monitoring program for coating film thickness is executed by the processor, the steps of the real-time monitoring method for coating film thickness as described above are implemented.

[0044] The specific implementation of the coating film thickness real-time monitoring device of the present application is basically the same as the embodiments of the coating film thickness real-time monitoring method described above, and will not be repeated here.

[0045] In addition, the present invention also proposes a readable storage medium, which includes a computer-readable storage medium on which a real-time monitoring program for coating film thickness is stored. The readable storage medium may be Figure 1 The memory 1005 in the terminal may also be at least one of a ROM (Read-Only Memory) / RAM (Random Access Memory), a magnetic disk, and an optical disk. The readable storage medium includes a number of instructions for enabling a coating film thickness real-time monitoring device with a processor to execute the coating film thickness real-time monitoring method described in each embodiment of the present invention.

[0046] The specific implementation in the readable storage medium of the present application is basically the same as the embodiments of the above-mentioned method for real-time monitoring of coating thickness, and will not be repeated here.

[0047] It is understood that, in the description of this specification, the description with reference to the terms "one embodiment", "another embodiment", "other embodiments", or "first to Nth embodiments" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0048] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or system including the element.

[0049] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0050] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) as described above, and includes a number of instructions for a terminal device (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present invention.

[0051] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A method for real-time monitoring of coating thickness, characterized in that: The following steps are involved: Before performing sputtering coating on the target coating sample, controlling the detection beam to vertically irradiate the side of the target coating sample, using an image acquisition device to acquire the detection beam signal reflected by the target coating sample, and obtaining an initial film thickness detection image of the target coating sample; Controlling the sputter coating device to perform sputter coating on the target coating sample, and using the image acquisition device to acquire a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputter coating; Obtaining a standard coating speed of the sputtering coating device, and determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, taking into account a prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; It is determined whether the real-time coating thickness reaches a preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

2. The method for real-time monitoring of coating thickness according to claim 1, characterized in that: Before performing sputter coating of the target coating sample, it also includes: A stable light source is installed in the sputtering coating area, so that when the stable light source emits a detection light beam, the detection light beam vertically illuminates the side of the target coating sample; An image acquisition device is installed in the sputtering coating area so that when the stable light source emits a detection beam, the image acquisition device collects the detection beam signal reflected by the side of the target coating sample to generate an initial film thickness detection image of the target coating sample.

3. The method for real-time monitoring of coating thickness according to claim 1, characterized in that: The steps of controlling the sputtering coating device to perform sputtering coating on the target coating sample and using the image acquisition device to obtain a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating include: Controlling the sputter coating device to perform sputter coating on the target coating sample fixed in the sputter coating area, and using the image acquisition device to acquire the detection beam signal reflected by the target coating sample when the target coating sample is subjected to sputter coating; The detection beam signal collected by the image acquisition device is sampled according to a preset sampling period to generate a real-time film thickness detection image at each acquisition moment when the target coating sample is sputtered, and each real-time film thickness detection image is mapped and stored with the acquisition moment.

4. The method for real-time monitoring of coating thickness according to claim 1, characterized in that: The step of obtaining a standard coating speed of the sputtering coating device, and determining the real-time coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment and considering the prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed specifically includes: Acquire identification information of the sputtering coating device, and use the identification information to match the standard coating speed of the sputtering coating device in a comparison table of the sputtering coating device and the standard sputtering coating speed; According to the standard coating speed of the sputtering coating device, a prefabricated detection window is generated in the initial film thickness detection image. The real-time coating thickness of the target coating sample is determined based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment using the prefabricated detection window.

5. The method for real-time monitoring of coating thickness according to claim 4, characterized in that: The step of generating a prefabricated detection window in the initial film thickness detection image according to the standard coating speed of the sputtering coating device specifically comprises: Identify the sample edge position of the target coating sample in the initial film thickness detection image, and calculate the predicted coating edge position of the target coating sample at the current acquisition moment in the initial film thickness detection image according to the standard coating speed at each acquisition moment between the current acquisition moment and the initial acquisition moment; A prefabricated detection window of a preset pixel size is generated at the predicted position of the coating edge in the initial film thickness detection image; wherein the preset pixel size is configured to have a pixel length and a unit pixel width that are the same as the sample edge length of the target coating sample.

6. The method for real-time monitoring of coating thickness according to claim 5, characterized in that: The step of determining the real-time coating thickness of the target coating sample by using the prefabricated detection window based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment specifically includes: Mapping the prefabricated detection window generated in the initial film thickness detection image to the real-time film thickness detection image at the current acquisition moment, extracting the image data of the prefabricated detection window in the real-time film thickness detection image, and determining whether the ratio of a number of pixel points in the image data of the prefabricated detection window that satisfy the color of the coating pixel exceeds a preset ratio; If yes, the position of the prefabricated detection window is used as the actual position of the coating edge, and the distance between the actual position of the coating edge and the sample edge position is converted into the real-time coating thickness of the target coating sample according to the image conversion ratio; If not, the prefabricated detection window is vertically translated by a unit pixel distance in a direction close to and away from the edge position of the sample to obtain an updated prefabricated detection window, and the step of returning to determine whether the proportion of a number of pixel points in the image data of the prefabricated detection window that satisfy the coating pixel color exceeds a preset proportion.

7. The method for real-time monitoring of coating thickness according to claim 6, characterized in that: Also includes: After obtaining the real-time coating thickness at each acquisition moment, determining whether the standard coating speed of the sputtering coating device meets the adaptation update condition, and if so, updating the standard coating speed of the sputtering coating device in the comparison table between the sputtering coating device and the standard sputtering coating speed; Among them, the adaptation update condition is configured as a prefabricated detection window update step in the real-time coating thickness monitoring process of a continuous target number of acquisition moments, and the standard coating speed update is configured to reduce the standard coating speed by a preset percentage to replace the standard coating speed before the update.

8. A real-time monitoring device for coating thickness, characterized in that: include: A first acquisition module is used to control the detection beam to vertically irradiate the side of the target coating sample before performing sputtering coating on the target coating sample, and use an image acquisition device to collect the detection beam signal reflected by the target coating sample to obtain an initial film thickness detection image of the target coating sample; The second acquisition module is used to control the sputtering coating device to perform sputtering coating on the target coating sample, and use the image acquisition device to obtain a real-time film thickness detection image at each acquisition moment when the target coating sample performs sputtering coating; A film thickness determination module is used to obtain a standard film coating speed of the sputtering coating device, determine the real-time film coating thickness of the target coating sample based on the initial film thickness detection image and the real-time film thickness detection image at the current acquisition moment, and consider the prefabricated detection window generated in the real-time film thickness detection image by the standard coating speed; The coating monitoring module is used to determine whether the real-time coating thickness reaches the preset film thickness. If so, a sputtering coating stop instruction is generated to control the sputtering coating device to complete the sputtering coating of the target coating sample.

9. A real-time monitoring device for coating film thickness, characterized in that: The coating film thickness real-time monitoring device comprises: a memory, a processor and a coating film thickness real-time monitoring program stored in the memory and executable on the processor. When the coating film thickness real-time monitoring program is executed by the processor, the steps of the coating film thickness real-time monitoring method as described in any one of claims 1 to 7 are implemented.

10. A storage medium, characterized in that: The storage medium stores a coating film thickness real-time monitoring program, and when the coating film thickness real-time monitoring program is executed by the processor, the steps of the coating film thickness real-time monitoring method according to any one of claims 1 to 7 are implemented.

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