Pipeline butting device and continuous silicon carbide material manufacturing system

Abstract

The invention relates to the field of transmission of silicon carbide material manufacturing equipment, in particular to a pipeline butt joint device which comprises a reaction box arranged on a displacement track and capable of moving in the length direction of the displacement track; the reaction box comprises a gas outlet channel and a plurality of gas inlet channels, and the gas outlet channel and the gas inlet channels are arranged on the two sides of the reaction box respectively; the housing is arranged above the displacement track, and a processing chamber is formed between the housing and the displacement track; the gas module comprises a gas supply assembly, a gas exhaust assembly and a driving assembly; the air supply assembly and the exhaust assembly are arranged on the two sides of the housing correspondingly. When the reaction box moves into the treatment chamber along the displacement track, the driving assembly drives a plurality of gas supply pipes of the gas supply assembly to penetrate through preformed holes of the housing and are detachably connected with the gas inlet channels respectively; the driving assembly drives the exhaust pipe of the exhaust assembly to penetrate through the reserved hole of the housing and is detachably connected with the air outlet channel.

Description

Technical Field

[0001] The invention relates to the technical field of transmission of silicon carbide material manufacturing equipment, and in particular to a pipeline docking device and a continuous silicon carbide material manufacturing system. Background Art

[0002] Silicon carbide is a representative ceramic material that is widely used throughout the industrial field due to its excellent physical, chemical and electrical properties.

[0003] In recent years, with the active progress in the development of semiconductor processing parts using silicon carbide materials, the importance of silicon carbide materials has increased. In particular, silicon carbide materials are widely used as components for etching processes in semiconductor process parts due to their high plasma tolerance. Silicon carbide materials for semiconductor etching process parts are the traditional method of manufacturing silicon carbide. Since quality and performance cannot be met by this method, chemical vapor deposition is often used in the prior art.

[0004] In the process of chemical vapor deposition of silicon carbide, a mixture of Si-containing gas such as SiH4, SiCl2, SiCl4 and C-containing gas such as C2H2, CH4, C3H8 is used as raw material gas, or a single gas such as CH3SiCl3, CH3SiH3, (CH3)3SiH) is used as raw material for deposition. In the prior art, the pipeline for injecting raw material gas is manually connected with the corresponding pipeline of the existing equipment, which is inefficient and has poor airtightness. Summary of the invention

[0005] In order to solve or at least partially solve the above technical problems, the present invention provides a pipeline docking device and a continuous silicon carbide material manufacturing system.

[0006] The present invention provides a pipeline docking device, which comprises a reaction box, a cover shell, and a gas module; the reaction box is arranged on a displacement track and can move along the length direction of the displacement track; the reaction box comprises an air outlet channel and multiple air inlet channels, and the air outlet channel and the multiple air inlet channels are respectively arranged on both sides of the reaction box; the cover shell is arranged above the displacement track, and a processing chamber is formed between the cover shell and the displacement track; the gas module comprises an air supply component, an exhaust component and a driving component; the air supply component and the exhaust component are respectively arranged on both sides of the cover shell; when the reaction box moves along the displacement track into the processing chamber, the driving component drives multiple air supply pipes of the air supply component to pass through the reserved holes of the cover shell and are respectively detachably connected to the multiple air inlet channels; the driving component drives the exhaust pipe of the exhaust component to pass through the reserved holes of the cover shell and be detachably connected to the air outlet channel.

[0007] Optionally, the driving assembly includes a first hydraulic cylinder, a telescopic end of the first hydraulic cylinder is connected to the air supply pipe, and the first hydraulic cylinder is used to drive the air supply pipe to move.

[0008] Optionally, the air supply pipe includes an air supply sub-pipe, one end of which has a first thread; the air intake channel has a second thread that matches the first thread; the air supply sub-pipe and the air intake channel are detachably connected by threaded connection.

[0009] Optionally, the driving assembly also includes a base, a motor, an electric push rod, multiple wheels, and a transmission belt. The base is slidably connected to the side plate of the cover; the motor is arranged on the base; the electric push rod is arranged between the base and the cover; a wheel is arranged on the driving shaft of the motor, and the remaining wheels are respectively arranged on multiple air supply sub-pipes; the transmission belt is sleeved on the multiple wheels, and the belt teeth of the transmission belt are meshed with the gear teeth of the wheel.

[0010] Optionally, the air supply sub-pipe is provided with two limiting plates, and a limiting interlayer is formed between the two limiting plates.

[0011] Optionally, the drive assembly also includes a clamping plate, which is arranged at the telescopic end of the first hydraulic cylinder and has a plurality of arc-shaped notches; when the clamping plate is located in the limiting interlayer, a portion of the air supply sub-pipe is located in the arc-shaped notch.

[0012] Optionally, the driving assembly includes a second hydraulic cylinder, a telescopic end of the second hydraulic cylinder is connected to the exhaust pipe, and the second hydraulic cylinder is used to drive the exhaust pipe to move.

[0013] Optionally, the exhaust pipe includes an exhaust sub-pipe, one end of which has a first thread; the outlet channel has a second thread that matches the first thread; the exhaust sub-pipe and the outlet channel are detachably connected by threaded connection.

[0014] Optionally, the driving assembly also includes a base, a motor, an electric push rod, multiple wheels, and a transmission belt. The base is slidably connected to the side plate of the cover; the motor is arranged on the base; the electric push rod is arranged between the base and the cover; one wheel is arranged on the driving shaft of the motor, and the other wheel is arranged on the exhaust sub-pipe; the transmission belt is sleeved on the multiple wheels, and the belt teeth of the transmission belt are meshed with the gear teeth of the wheel.

[0015] Optionally, the driving assembly further includes a fixing plate and a spring, wherein the fixing plate is arranged on the side plate, and the spring is arranged between the motor and the fixing plate.

[0016] Optionally, the exhaust sub-pipe is provided with two limiting pieces, and a limiting sandwich is formed between the two limiting pieces;

[0017] Optionally, the drive assembly also includes a clamping plate, which is arranged at the telescopic end of the second hydraulic cylinder and has an arc-shaped notch; when the clamping plate is located in the limiting interlayer, a portion of the exhaust sub-pipe is located in the arc-shaped notch.

[0018] The present invention also provides a continuous silicon carbide material manufacturing system, comprising at least three pipeline docking devices as described in any one of the above items, wherein the at least three pipeline docking devices are arranged in sequence along the length direction of the displacement track.

[0019] Compared with the prior art, in this embodiment, an automatic detachable connection is realized by using a set of driving components to drive the air supply pipe of the air supply component and the air inlet channel, and the connection mode of the air supply pipe and the air inlet channel is a threaded connection, which further improves the air tightness of the air supply pipe and the air inlet channel. At the same time, an automatic detachable connection is realized by using another set of driving components to drive the exhaust pipe of the exhaust component and the air outlet channel, and the connection mode of the exhaust pipe and the air outlet channel is a threaded connection, which further improves the air tightness of the exhaust pipe and the air outlet channel. The pipeline docking device disclosed in this embodiment improves the efficiency of pipeline docking, saves manpower, and improves safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention, the following briefly introduces the relevant drawings. It is understood that the drawings described below are only used to illustrate some embodiments of the present invention, and those skilled in the art can also obtain many other technical features and connection relationships not mentioned in this document based on these drawings.

[0021] Figure 1 It is a front view schematic diagram of an embodiment of a pipeline docking device of the present invention;

[0022] Figure 2 It is a partial cross-sectional schematic diagram of an embodiment of a reaction box of a pipeline docking device of the present invention;

[0023] Figure 3 It is a schematic diagram of an embodiment of the connection between a driving component and a gas supply component of a pipeline docking device of the present invention;

[0024] Figure 4 It is a three-dimensional schematic diagram of an embodiment of the connection between a driving component and an exhaust component of a pipeline docking device of the present invention;

[0025] Figure 5 It is a partial schematic diagram of an embodiment of a side plate and a base of a pipeline docking device of the present invention being slidably connected;

[0026] Figure 6 It is a schematic diagram of an embodiment of the clamping connection between an air supply sub-pipe and a first hydraulic cylinder of a pipeline docking device of the present invention.

[0027] Figure 7 It is a schematic diagram of an embodiment of the clamping connection between an exhaust sub-pipe and a second hydraulic cylinder of a pipeline docking device of the present invention;

[0028] Figure 8 It is a schematic diagram of an embodiment of a driving assembly of a pipeline docking device of the present invention;

[0029] Fig. 9 It is a front view schematic diagram of another embodiment of a pipeline docking device of the present invention;

[0030] Fig.10 It is a schematic diagram of an embodiment of a transmission system of a continuous silicon carbide material manufacturing equipment of the present invention;

[0031] Fig.11 It is a front view schematic diagram of an embodiment of a displacement track of a continuous silicon carbide material manufacturing equipment transmission system of the present invention;

[0032] Fig.12 It is a cross-sectional schematic diagram of an embodiment of a closed gate of a continuous silicon carbide material manufacturing equipment transmission system of the present invention.

[0033] Fig.13 It is a cross-sectional schematic diagram of an embodiment of a transmission system of a continuous silicon carbide material manufacturing equipment of the present invention;

[0034] Description of reference numerals:

[0035] 1. Reaction box; 11. Air outlet channel; 12. Air inlet channel; 2. Cover; 21. Heating layer; 22. Insulation layer; 23. Shell; 24. Processing chamber; 25. Reserved pipe; 26. Side plate; 261. Dovetail groove; 3. Displacement track; 31. Bottom plate; 32. Roller; 35. Base; 41. Air supply assembly; 42. Air supply mother pipe; 43. Air supply sub-pipe; 45. Exhaust assembly; 46. Exhaust mother pipe; 47. Exhaust sub-pipe; 48. Limiting piece; 49. Limiting interlayer; 5. Driving assembly; 51. First hydraulic cylinder; 52. Second hydraulic cylinder Cylinder; 53, base; 531, slide rail; 532, ball bearing; 54, motor; 55, electric push rod; 56, rotating wheel; 57, transmission belt; 58, reducer; 59, clamping plate; 591, arc notch; 61, fixing plate; 62, spring; 63, driving plate; 7, closing gate; 71, gate housing; 72, gate; 73, lifting drive; 81, pushing rod; 82, pulling rod; 9, quick release parts; 91, connecting cover; 92, connecting hole; 95, preparation processing module; 96, reaction processing module; 97, post-processing module. DETAILED DESCRIPTION

[0036] In the prior art, chemical vapor deposition equipment usually has a reaction chamber, and a gas support device is connected to the reaction chamber. The gas support device mixes the raw materials used in the process with other process gases and supplies them to the reactor in the form of gas phase under the premise of meeting the process conditions. The reactor thermally decomposes the supplied mixed gas under high temperature and constant atmosphere. Silicon carbide is deposited on the substrate pre-set in the reaction chamber. The gas support device often also includes an exhaust mechanism for exhausting by-products and excess mixed gas generated during the chemical vapor deposition process.

[0037] The applicant has found that the current manual method of docking the pipeline for injecting raw gas with the corresponding pipeline of the existing equipment is inefficient and has poor airtightness. In view of this, the inventor of the present invention provides a pipeline docking device and a continuous silicon carbide material manufacturing system to solve the above problems.

[0038] Several specific implementations of the present invention are described in detail below in conjunction with the accompanying drawings.

[0039] First embodiment

[0040] A pipe docking device mentioned in this embodiment, see Figure 1 As shown, the pipeline docking device includes a reaction box 1, a cover 2, and a gas module. The reaction box 1 has a reaction chamber, and the reaction chamber is used to manufacture silicon carbide material by chemical vapor deposition. The reaction box 1 is placed on the displacement track 3, and the reaction box 1 can move along the length direction of the displacement track 3. The reaction box 1 includes an outlet channel 11 and multiple inlet channels 12. Both sides of the reaction box 1 can be arc surfaces, wherein multiple inlet channels 12 are arranged on an arc surface, and the multiple inlet channels 12 are connected to the reaction chamber of the reaction box 1, and an outlet channel 11 is arranged on another arc surface, and the outlet channel 11 is connected to the reaction chamber of the reaction box 1. Such an arrangement is conducive to gas entering from one side of the reaction box 1 and being discharged from the other side of the reaction box 1.

[0041] See also Figure 1 As shown, the cover 2 includes a heating layer 21, a heat-insulating layer 22 and a shell 23. The cross-sectional shape of the heating layer 21 can be U-shaped or O-shaped. The heat-insulating layer 22 is covered on the heating layer 21, and the shell 23 is covered on the heat-insulating layer 22. The displacement track 3 is arranged on the base 35. Similarly, the cover 2 is arranged on the base 35, and a processing chamber 24 is formed between the U-shaped groove of the heating layer 21 and the base 35. The displacement track 3 runs through the processing chamber 24 between the cover 2 and the base 35. At this time, the cover 2 is located above the displacement track 3, which can be regarded as the processing chamber 24 between the cover 2 and the displacement track 3.

[0042] In this embodiment, there are two optional technical solutions for setting the reserved holes, which are as follows:

[0043] Optionally, not shown in the figure, after the heating layer 21, the insulation layer 22 and the shell 23 form the cover shell 2, the cover shell 2 has a plurality of reserved holes connected to the processing chamber 24. Some of the reserved holes are located on one side of the cover shell 2, and the other part of the reserved holes are located on the other side of the cover shell 2.

[0044] Alternatively, see Figure 1 As shown, based on the technology of the above optional solution, the applicant has further improved it, and the cover shell 2 also includes a plurality of reserved tubes 25, and the plurality of reserved tubes 25 respectively penetrate a reserved hole to the processing chamber 24, and the processing chamber 24 is connected to the outside through the reserved tubes 25. The tube cavity of the reserved tube 25 can be regarded as the reserved hole of the cover shell 2.

[0045] You can choose any one of the two optional technical solutions mentioned above.

[0046] See also Figure 1 As shown, the gas module includes a gas supply component 41, an exhaust component 45 and a drive component 5. The gas supply component 41 and a group of drive components 5 are arranged on one side of the cover shell 2, and the group of drive components 5 drives the gas supply component 41 to work. At the same time, the exhaust component 45 and another group of drive components 5 are arranged on the other side of the cover shell 2, and the rearranged drive component 5 drives the exhaust component 45 to work. When the reaction box 1 moves into the processing chamber 24 along the length direction of the displacement track 3, one group of drive components 5 drives the multiple gas supply pipes of the gas supply component 41 to pass through the reserved holes of the cover shell 2 and are detachably connected to the multiple air inlet channels 12 of the reaction box 1, respectively. At the same time, the exhaust pipe of the exhaust component 45 driven by another group of drive components 5 passes through the reserved holes of the cover shell 2 and is detachably connected to the air outlet channel 11 of the reaction box 1.

[0047] Specifically, see Figure 1 , Figure 2As shown, the number of gas supply pipes is the same as the number of gas inlet channels 12, and they are arranged one by one. The gas supply pipe includes a gas supply main pipe 42 and a gas supply sub-pipe 43. One end of the gas supply sub-pipe 43 is arranged in the gas supply main pipe 42, and the gas supply sub-pipe 43 is telescopically connected to the gas supply main pipe 42, and a sealing treatment is performed at the connection between the two. The end of the gas supply main pipe 42 away from the gas supply sub-pipe 43 is connected to the gas supply port of the equipment for producing chemical gas. The end of the gas supply sub-pipe 43 away from the gas supply main pipe 42 has a first thread. Optionally, the first thread can be an external thread arranged on the outer tube wall of the gas supply sub-pipe 43, or it can be an internal thread arranged on the inner tube wall of the gas supply sub-pipe 43. In this embodiment, the first thread is introduced as an external thread. The gas inlet channel 12 of the reaction box 1 has a second thread. Optionally, the second thread can be an internal thread arranged on the inner wall of the gas inlet channel 12, or it can be an external thread arranged on the outer wall of the gas inlet channel 12. In this embodiment, the second thread is introduced as an internal thread. The second thread of the air inlet passage 12 is matched with the first thread of the air supply sub-pipe 43 , and the air supply sub-pipe 43 and the air inlet passage 12 are detachably connected by threaded connection.

[0048] See also Figure 1 , Figure 3As shown, the driving assembly 5 includes a first hydraulic cylinder 51, and a flange is provided at one end of the main body of the first hydraulic cylinder 51 away from its telescopic end. The main body of the first hydraulic cylinder 51 is installed on the outer surface of the housing 2 through the flange, and the first hydraulic cylinder 51 is located on one side of the housing 2. The installation through the flange means that screws or bolts are passed through the holes on the flange and the flange is fixed to the housing 2. The telescopic end of the first hydraulic cylinder 51 is connected to the air supply sub-pipe 43 of the air supply pipe, and the first hydraulic cylinder 51 is used to drive the air supply sub-pipe 43 to move. The driving assembly 5 also includes a base 53, a motor 54, an electric push rod 55, a plurality of rotating wheels 56, and a transmission belt 57. A side plate 26 is provided on one side of the housing 2, and the base 53 is provided on the side plate 26 of the housing 2, and the base 53 can slide on the side plate 26, that is, the base 53 is slidably connected to the side plate 26 of the housing 2. The motor 54 is mounted on the base 53. The main body and the telescopic end of the electric push rod 55 are both provided with flanges. The main body of the electric push rod 55 is mounted on the outer surface of the housing 2 through the flange, and the telescopic end of the electric push rod 55 is mounted on the base 53 through the flange. At this time, the electric push rod 55 is arranged between the base 53 and the housing 2, and the base 53 moves on the side plate 26 of the housing 2 as the electric push rod 55 is extended and retracted. The rotating wheel 56 has gear teeth. Among the multiple rotating wheels 56, one rotating wheel 56 is arranged on the driving shaft of the motor 54, and the rotating wheel 56 is arranged coaxially with the driving shaft of the motor 54. The remaining rotating wheels 56 are respectively arranged on multiple air supply sub-tubes 43, and the rotating wheel 56 is arranged coaxially with the air supply sub-tubes 43. The motor 54 and the base 53 are located on one side of the multiple air supply sub-tubes 43. The inner belt wall of the transmission belt 57 has multiple belt teeth, and the belt teeth of the transmission belt 57 are matched with the gear teeth of the rotating wheel 56. The transmission belt 57 is sleeved on the multiple rotating wheels 56, and the belt teeth of the transmission belt 57 are simultaneously meshed with the gear teeth of the multiple rotating wheels 56. Optionally, of course, a reducer 58 is further provided between the driving shaft of the motor 54 and one rotating wheel 56, the driving shaft of the motor 54 is connected to the input end of the reducer 58, and the output shaft of the reducer 58 is connected to the rotating wheel 56. The electric push rod 55 drives the base 53 to move, and the motor 54 moves accordingly, so that the motor 54 can move synchronously with the air supply sub-pipe 43, and the transmission belt 57 can be prevented from being skewed.

[0049] See also Figure 1 , Figure 2As shown, the number of exhaust pipes is the same as the number of gas outlet channels 11, and they are arranged one by one. The exhaust pipe includes an exhaust main pipe 46 and an exhaust sub-pipe 47. One end of the exhaust sub-pipe 47 is arranged in the exhaust main pipe 46, and the exhaust sub-pipe 47 is telescopically connected to the exhaust main pipe 46, and a sealing treatment is performed at the connection between the two. The end of the exhaust main pipe 46 away from the exhaust sub-pipe 47 is connected to the air inlet of the exhaust gas recovery device. The end of the exhaust sub-pipe 47 away from the exhaust main pipe 46 has a first thread. Optionally, the first thread can be an external thread arranged on the outer tube wall of the exhaust sub-pipe 47, or it can be an internal thread arranged on the inner tube wall of the exhaust sub-pipe 47. In this embodiment, the first thread is introduced as an external thread. The gas outlet channel 11 of the reaction box 1 has a second thread. Optionally, the second thread can be an internal thread arranged on the inner wall of the gas outlet channel 11, or it can be an external thread arranged on the outer wall of the gas outlet channel 11. In this embodiment, the second thread is introduced as an internal thread. The second thread of the air outlet channel 11 is matched with the first thread of the exhaust sub-pipe 47 , and the exhaust sub-pipe 47 and the air outlet channel 11 are detachably connected by threaded connection.

[0050] See also Figure 1 , Figure 4As shown, the driving assembly 5 includes a second hydraulic cylinder 52, and a flange is provided at one end of the body of the second hydraulic cylinder 52 away from its telescopic end. The body of the second hydraulic cylinder 52 is mounted on the outer surface of the housing 2 through the flange, and the second hydraulic cylinder 52 is located on the other side of the housing 2. The telescopic end of the second hydraulic cylinder 52 is connected to the exhaust sub-pipe 47 of the exhaust pipe, and the second hydraulic cylinder 52 is used to drive the exhaust sub-pipe 47 to move. The driving assembly 5 also includes a base 53, a motor 54, an electric push rod 55, a plurality of rotating wheels 56, and a transmission belt 57. A side plate 26 is provided on the other side of the housing 2. The base 53 is provided on the side plate 26 of the housing 2, and the base 53 can slide on the side plate 26, that is, the base 53 is slidably connected to the side plate 26 of the housing 2. The motor 54 is mounted on the base 53, and the body and telescopic end of the electric push rod 55 are both provided with flanges. The body of the electric push rod 55 is mounted on the outer surface of the housing 2 through the flange, and the telescopic end of the electric push rod 55 is mounted on the base 53 through the flange. At this time, the electric push rod 55 is arranged between the base 53 and the housing 2, and the base 53 moves on the side plate 26 of the housing 2 as the electric push rod 55 is extended and retracted. The rotating wheel 56 has gear teeth. Among the multiple rotating wheels 56, one rotating wheel 56 is arranged on the driving shaft of the motor 54, and the rotating wheel 56 is arranged coaxially with the driving shaft of the motor 54, and the other rotating wheel 56 is arranged on the exhaust sub-pipe 47, and the rotating wheel 56 is arranged coaxially with the exhaust sub-pipe 47. The motor 54 and the base 53 are located on one side of the exhaust sub-pipe 47. The inner belt wall of the transmission belt 57 has multiple belt teeth, and the belt teeth of the transmission belt 57 are adapted to the gear teeth of the rotating wheel 56. The transmission belt 57 is sleeved on the multiple rotating wheels 56, and the belt teeth of the transmission belt 57 are meshed with the gear teeth of the multiple rotating wheels 56 at the same time. Optionally, of course, a reducer 58 is further provided between the driving shaft of the motor 54 and a rotating wheel 56, the driving shaft of the motor 54 is connected to the input end of the reducer 58, and the output shaft of the reducer 58 is connected to the rotating wheel 56. The electric push rod 55 drives the base 53 to move, and the motor 54 moves accordingly, so that the motor 54 can move synchronously with the exhaust sub-pipe 47, and the transmission belt 57 can be prevented from being skewed.

[0051] Compared with the prior art, in this embodiment, an automatic detachable connection is realized by using a set of driving components 5 to drive the air supply pipe of the air supply component 41 and the air inlet channel 12, and the connection mode of the air supply pipe and the air inlet channel 12 is a threaded connection, which further improves the air tightness of the air supply pipe and the air inlet channel 12. At the same time, an automatic detachable connection is realized by using another set of driving components 5 to drive the exhaust pipe of the exhaust component 45 and the air outlet channel 11, and the connection mode of the exhaust pipe and the air outlet channel 11 is a threaded connection, which further improves the air tightness of the exhaust pipe and the air outlet channel 11. The pipeline docking device disclosed in this embodiment improves the efficiency of pipeline docking, saves manpower, and improves safety.

[0052] An exemplary use process of the pipeline docking device disclosed in this embodiment:

[0053] See also Figures 1 to 4 As shown, the reaction box 1 is placed on the displacement track 3. When the reaction box 1 moves into the processing chamber 24, the telescopic end of the first hydraulic cylinder 51 retracts, and the air supply sub-tube 43 moves toward the air inlet channel 12. At the same time, the telescopic end of the electric push rod 55 also retracts, and the base 53 moves toward the cover 2, and the motor 54 and the rotating wheel 56 arranged on the base 53 also move accordingly, which can prevent the transmission belt 57 from being skewed during transmission. When the air supply sub-tube 43 moves to the pipe mouth of the air inlet channel 12, the driving shaft of the motor 54 starts to rotate, and the rotating wheel 56 arranged on the driving shaft of the motor 54 rotates accordingly, and the transmission belt 57 starts to rotate and drives the remaining rotating wheels 56 arranged on the air supply sub-tube 43 to start rotating synchronously. With the retraction of the telescopic end of the first hydraulic cylinder 51, the retraction of the telescopic end of the electric push rod 55 and the rotation of the motor 54, the first thread of the air supply sub-tube 43 can be very conveniently connected with the second thread of the air inlet channel 12. After the first thread of the air supply sub-tube 43 and the second thread of the air inlet channel 12 are connected in a small part, the subsequent connection between the two is mainly driven by the motor 54 through the rotating wheel 56 and the transmission belt 57 to drive the air supply sub-tube 43 to rotate and continuously tighten the first thread of the air supply sub-tube 43 and the second thread of the air inlet channel 12. At this time, the first hydraulic cylinder 51 plays an auxiliary role to cooperate with the movement of the air supply sub-tube 43. At the same time, the electric push rod 55 plays an auxiliary role. The electric push rod 55 moves the base 53 and cooperates with the synchronous work of the auxiliary motor 54 and the rotating wheel 56. In this way, the connection between the air supply component 41 and the reaction box 1 is completed. The connection process of the exhaust component 45 and the reaction box 1 is the same as the connection process of the air supply component 41 and the reaction box 1.

[0054] Second embodiment

[0055] In the first embodiment, the base 53 is driven to move on the side plate 26 by the electric push rod 55 , but there may be a situation where the stability of the base 53 moving on the side plate 26 is slightly poor.

[0056] In view of this, this embodiment also proposes a pipe docking device. The second embodiment is a further improvement based on the first embodiment, and the main improvement lies in the structure and setting method of the base 53 and the side plate 26, which are as follows:

[0057] See also Figure 1 , Figure 3 , Figure 4As shown, both sides of the housing 2 are provided with side panels 26, and two groups of drive assemblies 5 are respectively provided on both sides of the housing 2. The way in which the base 53 of one group of drive assemblies 5 is provided on the side panel 26 located on one side of the housing 2 is the same as the way in which the base 53 of the other group of drive assemblies 5 is provided on the side panel 26 located on the other side of the housing 2, so the drive assembly 5 located on the same side of the housing 2 as the air supply assembly 41 is taken as an example for introduction, the upper surface of the side panel 26 has a dovetail groove 261, and the lower surface of the base 53 has a slide rail 531, the shape of the slide rail 531 is adapted to the dovetail groove 261, and by providing the slide rail 531 in the dovetail groove 261, the base 53 of the drive assembly 5 is slidably connected to the side panel 26 of the housing 2.

[0058] Compared with the prior art, in the present embodiment, a dovetail groove 261 is provided on the side panel 26, and a slide rail 531 is provided on the base 53. By providing the slide rail 531 in the dovetail groove 261, the base 53 can be slidably connected to the side panel 26, and the base 53 can be prevented from slipping off the side panel 26, and the movement of the base 53 can be guided.

[0059] Preferably, see Figure 4 , Figure 5 As shown, this optional technical solution is a further improvement of the above-mentioned base 53, and a ball bearing 532 is provided on the lower surface of the base 53. Similarly, a ball bearing 532 is also provided on the slide rail 531. By improving and optimizing the contact mode between the base 53 and the side plate 26 to a rolling contact mode, when the slide rail 531 is set in the dovetail groove 261, the ball bearing 532 can further reduce the friction between the base 53 and the side plate 26, so that the base 53 can move along the dovetail groove 261 on the side plate 26.

[0060] Third embodiment

[0061] The third embodiment is a further improvement based on the first or second embodiment, and the main improvement lies in the arrangement of the air supply sub-pipe 43 and the first hydraulic cylinder 51 and the arrangement of the exhaust sub-pipe 47 and the second hydraulic cylinder 52, which are as follows:

[0062] Alternatively, see Figure 3 , Figure 6As shown, two limiting plates 48 are arranged on the outer tube wall of each air supply sub-tube 43. The limiting plates 48 are circular and arranged coaxially with the air supply sub-tube 43, and a limiting interlayer 49 is formed between the two limiting plates 48. The driving assembly 5 also includes a clamping plate 59. A flange is arranged on the telescopic end of the first hydraulic cylinder 51. The telescopic end of the first hydraulic cylinder 51 is installed on one side of the clamping plate 59 through the flange. The clamping plate 59 has a plurality of arc-shaped notches 591 on the side facing the side plate 26. The number of the arc-shaped notches 591 is the same as the number of the air supply sub-tube 43. When the clamping plate 59 is clamped with the air supply sub-tube 43, the clamping plate 59 is located in the limiting interlayer 49, and at the same time, a part of the air supply sub-tube 43 away from the side plate 26 is located in the arc-shaped notch 591. The first hydraulic cylinder 51 is clamped in the limiting interlayer 49 of the air supply sub-pipe 43 through the clamping plate 59. This clamping method is convenient for disassembly and assembly, and is convenient for later maintenance and replacement.

[0063] Alternatively, see Figure 4 , Figure 7 As shown, two limiting plates 48 are arranged on the outer tube wall of the exhaust sub-pipe 47. The limiting plates 48 are circular and arranged coaxially with the exhaust sub-pipe 47, and a limiting interlayer 49 is formed between the two limiting plates 48. The driving assembly 5 also includes a clamping plate 59. A flange is arranged on the telescopic end of the second hydraulic cylinder 52. The telescopic end of the second hydraulic cylinder 52 is mounted on one side of the clamping plate 59 through the flange. The clamping plate 59 has an arc-shaped notch 591 on the side facing the side plate 26. When the clamping plate 59 is clamped with the exhaust sub-pipe 47, the clamping plate 59 is located in the limiting interlayer 49, and at the same time, a part of the exhaust sub-pipe 47 away from the side plate 26 is located in the arc-shaped notch 591. The second hydraulic cylinder 52 is clamped in the limiting interlayer 49 of the exhaust sub-pipe 47 through the clamping plate 59. This clamping method is convenient for disassembly and assembly, and is convenient for later maintenance and replacement.

[0064] Fourth embodiment

[0065] This embodiment also proposes a pipe docking device. The fourth embodiment is a further improvement based on any one of the first to third embodiments:

[0066] See also Figure 1 , Figure 3 , Figure 4 , Figure 8As shown, the way in which one group of drive components 5 is arranged on the side plate 26 located on one side of the cover shell 2 is the same as the way in which another group of drive components 5 is arranged on the side plate 26 located on the other side of the cover shell 2. Therefore, the structure of one group of drive components 5 and the way in which they are arranged on the side plate 26 located on one side of the cover shell 2 are taken as an example for introduction. The drive component 5 also includes a fixing plate 61, a spring 62, and a driving plate 63. The fixing plate 61 is T-shaped or L-shaped. One end of the fixing plate 61 has a hole. The hole on the fixing plate 61 is penetrated by a screw and the fixing plate 61 is fixed to the side of the fixing plate 61 facing the cover shell 2. The other end of the spring 62 is connected to one side of the driving plate 63. The side of the driving plate 63 away from the spring 62 contacts the base 53 or the motor 54 or the reducer 58.

[0067] In the first embodiment, the movement of the base 53 requires the drive of the electric push rod 55, and the motor 54 moves with the movement of the base 53. Compared with the first embodiment, in this embodiment, the motor 54 or the base 53 or the reducer 58 is driven by the spring 62 to move, and the electric push rod 55 plays a limiting role to control the expansion and contraction of the spring 62. In this way, the motor 54 can move synchronously with the air supply sub-pipe 43 and the motor 54 can move synchronously with the exhaust sub-pipe 47, so as to prevent the transmission belt 57 from being skewed.

[0068] Fifth embodiment

[0069] The applicant has found that the silicon carbide layer deposited on the substrate processed in the reaction chamber of the reaction box 1 may have the risk of being uneven.

[0070] In view of this, this embodiment also proposes a pipeline docking device. The fifth embodiment is a further improvement based on any one of the first to fourth embodiments:

[0071] See also Fig. 9 As shown, multiple air inlet channels 12 are tilted to the reaction box 1, the side plate 26 located on one side of the cover shell 2 is tilted to the cover shell 2, and the air supply component 41 and the drive component 5 are also tilted to the cover shell 2, with an inclination angle of 45°.

[0072] Compared with the prior art, in this embodiment, the air inlet channel 12 and the gas supply assembly 41 are tilted, thereby changing the angle at which the chemical gas enters the reaction chamber of the reaction box 1. The chemical gas enters the reaction chamber through the air inlet channel 12 and fills the reaction chamber from top to bottom. At the same time, the gas distribution in the reaction chamber is more uniform, thereby improving the uniformity of the silicon carbide layer deposited on the substrate.

[0073] Sixth embodiment

[0074] This embodiment proposes a continuous silicon carbide material manufacturing system. The continuous silicon carbide material manufacturing system disclosed in the sixth embodiment includes the pipeline docking device in any one of the first to fifth embodiments, specifically:

[0075] See also Fig.10 As shown, a continuous silicon carbide material manufacturing system disclosed in this embodiment includes at least three pipeline docking devices described in any one of the first to fifth embodiments, and at least three pipeline docking devices are arranged in sequence along the length direction of the displacement track 3. In the process of depositing a silicon carbide layer on the substrate, the first pipeline docking device serves as a preparation processing module 95, which is used to preheat the substrate. The second pipeline docking device serves as a reaction processing module 96, which is used to precipitate a silicon carbide layer on the substrate. The third pipeline docking device serves as a post-processing module 97, which is used for subsequent processing of the silicon carbide layer. Among them, the heating temperature borne by the reaction box 1 of the reaction processing module is higher than the temperature borne by the reaction boxes 1 of the other two contact modules.

[0076] Compared with the prior art, in this embodiment, such a configuration further increases the automation and work efficiency of the continuous silicon carbide material manufacturing system disclosed in this embodiment.

[0077] Seventh embodiment

[0078] The applicant has discovered that in the continuous silicon carbide material manufacturing system disclosed in the sixth embodiment, there may be a risk that the temperature of the processing chamber 24 is slowly increased, which takes a relatively long time.

[0079] In view of this, this embodiment also proposes a continuous silicon carbide material manufacturing system. The seventh embodiment is a further improvement based on the sixth embodiment, and the main improvement is that a closed gate 7 is further provided at the cavity openings at both ends of the processing chamber 24, and the closed gate 7 is used to close the processing chamber 24, as follows:

[0080] See also Fig.10 , Fig.11As shown, the displacement track 3 includes a base plate 31 and a plurality of rollers 32. The top surface of the base plate 31 is configured with a track groove, and the track groove is arranged along the length direction of the base plate 31. The plurality of rollers 32 are all located in the track groove, and the two ends of the rollers 32 are respectively hinged to the two side edges of the base plate 31, and the plurality of rollers 32 are arranged in sequence along the length direction of the base plate 31. Such evenly distributed support points can enhance the stability of the reaction box 1 during movement and reduce the vibration caused by uneven load. Since the rolling friction causes less wear on the reaction box 1 than the sliding friction, the service life of the reaction box 1 can be effectively extended. Preferably, the roller 32 is rotatably connected to the base plate 31 through a bearing. By arranging the roller 32 on the base plate 31, the movement of the reaction box 1 on the displacement track 3 can be made more convenient. Since the roller 32 and the base plate 31 will also be baked at a higher temperature together with the reaction box 1, graphite or CMC (ceramic matrix composite) materials can be considered. This type of material can withstand high temperature environments exceeding 1500°C and is superior to high-temperature alloys in terms of high temperature resistance, oxidation resistance, strength and stiffness, density, and corrosion resistance.

[0081] See also Fig.10 As shown, the continuous silicon carbide material manufacturing system disclosed in this embodiment also includes a plurality of closed gates 7, which are all arranged on a base 35, and the displacement track 3 sequentially passes through the channels of the plurality of closed gates 7. The plurality of closed gates 7 are sequentially arranged at intervals along the length direction of the displacement track 3, and at least three pipeline docking devices are respectively arranged between two adjacent closed gates 7, that is, the cavity openings of the processing chamber 24 of each pipeline docking device are each provided with a closed gate 7.

[0082] For details, see Figures 10 to 12 As shown, the closed gate 7 includes a gate housing 71, a gate 72 and a lifting drive 73. The gate housing 71 is arranged on the base 35, the lifting drive 73 is arranged on the top of the gate housing 71, the gate 72 is arranged in the inner cavity of the gate housing 71, the screw rod of the lifting drive 73 is penetrated through the gate 72 and the lifting drive 73 can control the gate 72 to be lifted and lowered, and when the gate 72 is lowered, the gate 72 is engaged with the roller 32. The closed gate 7 can seal each chamber separately, and can also provide effective isolation between the three processing chambers 24, which helps to maintain the independent environment in each processing chamber 24, so that heat will not dissipate and prevent the mixing of gas or other media. The lifting and lowering of the gate 72 controlled by the lifting drive 73 can accurately manage the flow of fluid in the program, thereby realizing the fine regulation of the chemical reaction process. Moreover, the matching design of the gate 72 and the roller 32 enhances the airtightness of the gate 72, and plays a better isolation effect.

[0083] The closed gate 7 can be made of materials such as ceramics and CMC to ensure its high temperature resistance. A heat insulation layer made of CMC material can be provided on the gate 72 to isolate the heat between the processing chambers 24.

[0084] Eighth embodiment

[0085] This embodiment also proposes a continuous silicon carbide material manufacturing system. The eighth embodiment is a further improvement based on the sixth or seventh embodiment, and the main improvement is that a push-pull component is further provided to drive the reaction box 1 to move, as follows:

[0086] See also Fig.10 , Fig.13 As shown, the reaction box 1 is arranged on the displacement track 3, and the push-pull assembly is used to push the reaction box 1 to move along the displacement track 3, and enable the reaction box 1 to switch positions between the three processing chambers 24. The technical effect of the displacement track 3 and the push-pull assembly is mainly reflected in improving the automation and continuity of the production process. By setting the displacement track 3 and the push-pull assembly, the movement and switching of the reaction box 1 can be easily achieved. Specifically, this arrangement allows the reaction box 1 to be smoothly, quickly and accurately transferred between different processing chambers 24, thereby reducing the need for manual operation and improving production efficiency and safety.

[0087] See also Fig.13 As shown, the push-pull assembly includes a plurality of push-pull drivers (not shown in the figure), a push rod 81 and a pull rod 82, wherein the push rod 81 is arranged on a part of the push-pull driver, and the pull rod 82 is arranged on another part of the push-pull driver. The push rod 81 and the pull rod 82 can be detachably connected to the opposite sides of the reaction box 1. The push rod 81 and the pull rod 82 are respectively used to provide a driving force and a pulling force for the reaction box 1, so that the reaction box 1 moves along the displacement track 3. The push-pull driver can be a power source of many types that can be provided by the prior art and perform linear motion, such as a gas rod, a hydraulic rod or a motor 54, etc. In this embodiment, there is no need to limit the type of push-pull driver. Since the push rod 81 and the pull rod 82 can be detachably connected to the two sides of the reaction box 1, respectively, the reaction box 1 can be moved no matter which direction is blocked. When the three processing chambers 24 are separated, this design can well ensure that the reaction box 1 can still move in a desired manner. In addition, when the three processing chambers 24 need to be closed, the push rod 81 and the pull rod 82 can be moved out of the three processing chambers 24, which will cause less interference to the silicon carbide precipitation process and is less likely to be damaged due to large temperature changes.

[0088] Accordingly, see Fig.12 , Fig.13As shown, the reaction box 1 is provided with a quick release part 9 for connecting with the push-pull assembly. The quick release part 9 includes a connecting cover 91, which is installed on the reaction box 1 and forms a connecting cavity between the connecting cover 91 and the reaction box 1. The connecting cover 91 is provided with a connecting hole 92 connected with the connecting cavity. The head ends of the push rod 81 and the pull rod 82 are both provided with a card joint matching the shape of the connecting hole 92. The connecting hole 92 is used for access to the push rod 81 and the pull rod 82. The push-pull driver can drive the push rod 81 and the pull rod 82 to rotate along their own circumference so that the card joint is stuck in the connecting cavity. The quick release part 9 provides the reaction box 1 with the ability to quickly connect and separate with the push rod 81 and the pull rod 82. Through the cooperation of the card joint and the connecting hole 92, the push rod 81 and the pull rod 82 can be quickly connected and separated with the reaction box 1, which greatly improves the connection efficiency of the device. Moreover, the push-pull driver drives the push rod 81 and the pull rod 82 to rotate, so that the card connector can be inserted into or removed from the connection cavity. The connection operation is very simple and can be easily operated in an automated manner. The rapid assembly and disassembly shortens the time required for connection and improves the operating efficiency of the entire continuous production line.

[0089] Finally, it should be noted that those skilled in the art can understand that in order to enable readers to better understand the present invention, the embodiments of the present invention provide many technical details. However, even without these technical details and various changes and modifications based on the above-mentioned embodiments, the technical solutions claimed for protection by the claims of the present invention can be basically achieved. Therefore, in practical applications, various changes can be made to the above-mentioned embodiments in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A pipeline docking device, characterized in that: include: A reaction box is arranged on the displacement track and can move along the length direction of the displacement track; the reaction box comprises an air outlet channel and a plurality of air inlet channels, and the air outlet channel and the plurality of air inlet channels are respectively arranged on both sides of the reaction box; A cover shell is disposed above the displacement track and forms a processing chamber between the cover shell and the displacement track; The gas module comprises a gas supply component, an exhaust component and a driving component; the gas supply component and the exhaust component are respectively arranged on two sides of the housing; When the reaction box moves along the displacement track into the processing chamber, the driving component drives the multiple gas supply pipes of the gas supply component to pass through the reserved holes of the cover shell and are detachably connected to the multiple gas inlet channels respectively; the driving component drives the exhaust pipes of the exhaust component to pass through the reserved holes of the cover shell and are detachably connected to the gas outlet channels.

2. The pipe docking device according to claim 1, characterized in that: The drive assembly comprises: A first hydraulic cylinder, a telescopic end of which is connected to the air supply pipe; the first hydraulic cylinder is used to drive the air supply pipe to move.

3. The pipe docking device according to claim 2, characterized in that: The air supply pipe comprises an air supply sub-pipe, and one end of the air supply sub-pipe has a first thread; The air inlet passage has a second thread matched with the first thread; the air supply sub-pipe and the air inlet passage are detachably connected by threaded connection.

4. The pipe docking device according to claim 3, characterized in that: The drive assembly also includes: A base, slidably connected to the side plate of the housing; A motor, arranged on the base; An electric push rod is arranged between the base and the cover; A plurality of rotating wheels, one of which is arranged on the driving shaft of the motor, and the other rotating wheels are arranged on the plurality of air supply sub-pipes respectively; A transmission belt is sleeved on the plurality of rotating wheels, and the belt teeth of the transmission belt are meshed with the wheel teeth of the rotating wheels.

5. The pipe docking device according to claim 4, characterized in that: The air supply sub-tube is provided with two limiting plates, and a limiting interlayer is formed between the two limiting plates; the driving component also includes: A clamping plate is arranged at the telescopic end of the first hydraulic cylinder, and the clamping plate has a plurality of arc-shaped notches; when the clamping plate is located in the limiting interlayer, a part of the air supply sub-pipe is located in the arc-shaped notch.

6. The pipe docking device according to claim 1, characterized in that: The drive assembly comprises: A second hydraulic cylinder has a telescopic end connected to the exhaust pipe, and the second hydraulic cylinder is used to drive the exhaust pipe to move.

7. The pipe docking device according to claim 6, characterized in that: The exhaust pipe comprises an exhaust sub-pipe, one end of which has a first thread; The air outlet passage has a second thread matched with the first thread; the exhaust sub-pipe and the air outlet passage are detachably connected by threaded connection.

8. The pipe docking device according to claim 7, characterized in that: The drive assembly also includes: A base, slidably connected to the side plate of the housing; A motor, arranged on the base; An electric push rod is arranged between the base and the cover; A plurality of rotating wheels, one of which is arranged on the driving shaft of the motor, and another of which is arranged on the exhaust sub-pipe; A transmission belt is sleeved on the plurality of rotating wheels, and the belt teeth of the transmission belt are meshed with the wheel teeth of the rotating wheels.

9. The pipe docking device according to claim 4 or 8, characterized in that: The drive assembly also includes: A fixing plate, arranged on the side plate; A spring is arranged between the motor and the fixing plate.

10. The pipe docking device according to claim 8, characterized in that: The exhaust sub-pipe is provided with two limiting pieces, and a limiting sandwich is formed between the two limiting pieces; The drive assembly also includes: A clamping plate is arranged at the telescopic end of the second hydraulic cylinder, and the clamping plate has an arc-shaped notch; when the clamping plate is located in the limiting interlayer, a part of the exhaust sub-pipe is located in the arc-shaped notch.

11. A continuous silicon carbide material manufacturing system, characterized in that: include: At least three pipe docking devices according to any one of claims 1 to 10, wherein the at least three pipe docking devices are arranged in sequence along the length direction of the displacement track.

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