Crucible rotating device and single crystal furnace

Abstract

The invention discloses a crucible rotating device and a single crystal furnace, the crucible rotating device is used for the single crystal furnace, the crucible rotating device comprises a rotating shaft main body, a cavity extending in the axial direction of the rotating shaft main body is formed in the rotating shaft main body, one axial end of the rotating shaft main body is open, and the other axial end of the rotating shaft main body is closed and connected with a crucible of the single crystal furnace; the flow guide ring extends in the axial direction of the rotating shaft body, at least part of the flow guide ring is coaxially arranged in a cavity in the rotating shaft body, an outer cavity is formed between the outer wall of the flow guide ring and the inner wall of the cavity, an inner cavity is formed in the flow guide ring, and the ends, close to the crucible, of the outer cavity and the inner cavity communicate with each other; the ends, close to the crucible, of the outer cavity and the inner cavity are mutually communicated, the ends, away from the crucible, of the outer cavity and the inner cavity are mutually independent, one is an air inlet, and the other is an air outlet; and the fan is communicated with one end, far away from the crucible, of the outer cavity or the inner cavity. The crucible rotating device is simple in structure, convenient to operate, high in safety and reliability and low in cost.

Description

Technical Field

[0001] The present application relates to a single crystal furnace, and in particular to a crucible rotating device and a single crystal furnace. Background Art

[0002] The crucible is one of the important components of the single crystal furnace. In order to ensure better refining of crystalline silicon, a corresponding rotating device is usually required to drive the crucible to rotate according to the process parameter requirements. Since the temperature of the single crystal furnace is high during operation, the rotating device also needs to be cooled. However, traditional crucible rotating devices are cooled by water. In order to seal, the crucible rotating axis is connected to the cooling water pipe through a rotating joint. The structure is complex and the operation is inconvenient. In addition, the rotating joint is easily damaged due to poor processing and other problems. It is also easy to cause risks such as damage to the cooling water pipe due to silicon leakage. The safety and reliability are low, which increases the cost and cannot meet the increasingly high production needs. Summary of the invention

[0003] The purpose of this application is to provide a crucible rotating device and a single crystal furnace, which have a simple structure, are easy to operate, have high safety and reliability, and are low in cost.

[0004] In order to solve at least one of the above technical problems, the technical solution of the present application is as follows:

[0005] According to a first aspect of the present application, there is provided a crucible rotating device for a single crystal furnace, comprising: a rotating shaft body, a cavity extending along its axial direction is formed inside the rotating shaft body, one axial end of the rotating shaft body is open, and the other end is closed and connected to the crucible of the single crystal furnace; a guide ring, the guide ring extends along the axial direction of the rotating shaft body and is at least partially coaxially arranged in the cavity inside the rotating shaft body, an outer cavity is formed between the outer wall of the guide ring and the inner wall of the cavity, an inner cavity is formed inside the guide ring, the outer cavity and the inner cavity are connected to each other at one end close to the crucible, the outer cavity and the inner cavity are connected to each other at one end close to the crucible, the outer cavity and the inner cavity are independent of each other at one end away from the crucible and one of them is an air inlet and the other is an air outlet; a fan, the fan is connected to one end of the outer cavity or the inner cavity away from the crucible.

[0006] In a possible implementation of the first aspect above, one end of the guide ring away from the crucible extends out of the rotating shaft body, and a plurality of partition bars are arranged at the end of the outer cavity away from the crucible. The partition bars extend radially and one end is connected to the outer wall of the guide ring and the other end is connected to the inner wall of the rotating shaft body, and the plurality of partition bars are evenly distributed along the circumference of the guide ring.

[0007] In a possible implementation of the first aspect, the fan is sleeved on the periphery of the portion of the guide ring extending outside the rotating shaft body and is connected to an end of the outer cavity away from the crucible.

[0008] In a possible implementation of the first aspect above, the fan includes: an inner sleeve, which is used to be sleeved on the outer wall of the part of the guide ring extending outside the rotating shaft body, and the guide ring is coaxially connected to the inner sleeve; a plurality of blades, which are arranged outside the inner sleeve and are evenly distributed along the circumferential direction of the inner sleeve; a wind shield, which surrounds each blade along the circumferential direction of the inner sleeve, and each blade is located between the wind shield and the inner sleeve, and the area between the wind shield and two adjacent blades is connected to the end of the outer cavity away from the crucible.

[0009] In a possible implementation of the first aspect above, the crucible rotating device of the present application also includes: a magnetic fluid sealing device, which includes: a magnetic sleeve, which is mounted outside the rotating shaft body; an outer shell, which is mounted outside the magnetic sleeve and is rotatably connected to the magnetic sleeve through a bearing; wherein a magnetic fluid for sealing is arranged between the outer shell and the magnetic sleeve.

[0010] In a possible implementation of the first aspect, the magnetic fluid is disposed at one end of the magnetic fluid sealing device away from the fan, a cooling channel is disposed inside the housing adjacent to the magnetic fluid, and the cooling channel surrounds the magnetic sleeve along the circumferential direction of the magnetic sleeve.

[0011] In a possible implementation of the first aspect above, the magnetic fluid is disposed at one end of the magnetic fluid sealing device close to the fan.

[0012] According to a second aspect of the present application, there is provided a single crystal furnace, comprising a furnace body and a crucible rotating device, a drag rod assembly and a crucible located inside the furnace body, wherein the crucible rotating device is the crucible rotating device of the first aspect above, a connecting hole recessed away from the crucible is formed at one closed end of a rotating shaft body of the crucible rotating device, one end of the drag rod assembly is accommodated in the connecting hole and connected to the rotating shaft body, and the other end of the drag rod assembly is connected to the crucible; the connecting hole and one end of the drag rod assembly are in an inverted cone shape that fits with each other.

[0013] In a possible implementation of the second aspect, the rotating shaft body is connected to the rotating shaft body through a locking piece, and the locking piece penetrates the central axis of the tow bar assembly along the axial direction of the tow bar assembly and extends from the bottom of the tow bar assembly to be connected to the rotating shaft body.

[0014] In a possible implementation of the second aspect above, a first threaded hole is provided on the rotating shaft body, a transition nut is threadedly connected to the first threaded hole, and a second threaded hole for threaded connection with the locking member is provided on the transition nut, wherein the transition nut is made of graphite.

[0015] In a possible implementation of the second aspect above, an operating hole is provided on the transition nut, and the operating hole is used to screw the transition nut into the first threaded hole. The operating hole is coaxially arranged with the second threaded hole and is located on the upper side of the second threaded hole. The operating hole is hexagonal in cross section perpendicular to the axial direction, and the second threaded hole is an inscribed circle of the hexagon in cross section perpendicular to the axial direction.

[0016] The above technical solution of the present application has at least one of the following beneficial effects:

[0017] According to the crucible rotating device of the present application, a cavity extending along the axial direction is formed inside the rotating shaft body, one axial end of the rotating shaft body is open, and the other end is closed and connected to the crucible of the single crystal furnace, the guide ring is coaxially arranged in the cavity inside the rotating shaft body and extends along the axial direction of the rotating shaft body, an outer cavity is formed between the outer wall of the guide ring and the inner wall of the cavity, and an inner cavity is formed inside the guide ring, the outer cavity and the inner cavity are connected to each other at one end close to the crucible, the outer cavity and the inner cavity are connected to each other at one end close to the crucible, the outer cavity and the inner cavity are independent of each other at one end away from the crucible and one of them is an air inlet and the other is an air outlet, the fan is connected to one end of the outer cavity or the inner cavity away from the crucible, the fan is used to provide power for the airflow, so that the gas outside the rotating shaft body enters through the air inlet and flows out from the air outlet, and the heat of the crucible rotating device is taken away by the external cold gas, thereby cooling the crucible rotating device. Therefore, the crucible rotating device of the present application adopts an air-cooled structure, eliminating the rotating joint and cooling water pipe of the traditional water-cooled structure. It has a simple structure, is easy and quick to operate, is not prone to damage to corresponding components, etc., has high safety and reliability, reduces costs, and can meet increasingly higher production needs.

[0018] In addition, according to the single crystal furnace of the present application, the above-mentioned crucible rotating device is adopted. The above-mentioned crucible rotating device adopts an air-cooled structure, which eliminates the rotating joint and cooling water pipe of the traditional water-cooled structure. It has a simple structure, convenient and quick operation, and is not easy to cause damage to corresponding components. It has high safety and reliability, reduces costs, and can meet increasingly higher production needs.

[0019] In addition, in the technical solution of the present application, unless otherwise specified, the technical solution can be implemented by adopting conventional means in the art. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 This is a schematic structural diagram of a crucible rotating device according to an embodiment of the present application;

[0022] Figure 2 This is a schematic structural diagram of a crucible rotating device according to an embodiment of the present application after removing the drag rod assembly;

[0023] Figure 3 This is a schematic structural diagram of a rotating shaft body and a guide ring according to an embodiment of the present application;

[0024] Figure 4 A cross-sectional view of a rotating shaft body and a guide ring according to an embodiment of the present application;

[0025] Figure 5 A schematic diagram of the structure of a fan according to an embodiment of the present application;

[0026] Figure 6 This is a schematic structural diagram of a transition nut according to an embodiment of the present application;

[0027] Figure 7 A cross-sectional view of a magnetic fluid sealing device according to an embodiment of the present application;

[0028] Figure 8 This is a schematic structural diagram of a magnetic fluid sealing device according to an embodiment of the present application.

[0029] Description of the reference numerals in the accompanying drawings:

[0030] Rotating shaft body 100; outer cavity 101; spacer 102; connecting hole 103; first threaded hole 104; shaft shoulder 105;

[0031] Guide ring 200; inner cavity 201;

[0032] Fan 300; inner sleeve 301; blades 302; wind shield 303;

[0033] Tow bar assembly 400; connecting portion 401;

[0034] Magnetic fluid sealing device 500; magnetic sleeve 501; housing 502; magnetic fluid 503; bearing 504; connecting flange 505; dust collecting plate 506; cooling channel 507;

[0035] Locking member 600;

[0036] Transition nut 700 ; second threaded hole 701 ; operating hole 702 . DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all of the embodiments, and are only used to explain the present application, and are not used to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0038] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside", "two ends", "both sides", "bottom", "top" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred elements must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limitations on the present application. In addition, the terms "first", "second", "superior", "inferior", "primary", "secondary" and the like are only used for descriptive purposes and can be simply used to more clearly distinguish different components, but cannot be understood as indicating or implying relative importance.

[0039] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] See also Figures 1 to 8 , schematically shows a crucible rotating device provided according to an embodiment of the present application, which is mainly used to drive the crucible to rotate in a single crystal furnace. The crucible rotating device of the present application may include: a rotating shaft body 100 (ie, a core shaft), a guide ring 200 and a fan 300.

[0041] Among them, a cavity extending along its axial direction is formed inside the rotating shaft body 100, the guide ring 200 extends along the axial direction of the cavity and is at least partially coaxially arranged in the cavity, one axial end of the rotating shaft body 100 is open, and the other axial end of the rotating shaft body 100 is closed and used to connect with the crucible of the single crystal furnace, an outer cavity 101 is formed between the guide ring 200 and the inner wall of the cavity, and an inner cavity 201 is formed inside the guide ring 200, the outer cavity 101 and the inner cavity 201 are connected to each other at one end (away from the opening) of the crucible, the outer cavity 101 and the inner cavity 201 are independent of each other and one of them serves as an air inlet and the other serves as an air outlet, the fan 300 is arranged at one end (close to the opening) of the rotating shaft body 100 away from the crucible, and the fan 300 is connected to one end (close to the opening) of the outer cavity 101 or the inner cavity 201 away from the crucible. The fan 300 can provide power for airflow, so that external gas enters through the air inlet and flows out from the air outlet. For example, the end of the outer cavity 101 away from the crucible is used as the air inlet, and the end of the inner cavity 201 away from the crucible is used as the air outlet. Then, driven by the fan 300, the gas enters the outer cavity 101 from the end of the outer cavity 101 away from the crucible, and then enters the end of the inner cavity 201 close to the crucible from the end of the outer cavity 101 close to the crucible, and then enters the inner cavity 201, and finally flows out from the end of the inner cavity 201 away from the crucible, forming an airflow in the rotating shaft body 100, and taking away the heat of the crucible rotating device through the external cold gas, thereby cooling the crucible rotating device.

[0042] It should be noted that see Figures 1-2 As shown in FIG. 4 , the rotating shaft body 100 is usually arranged in a vertical direction, and the rotating shaft body 100 can be made of stainless steel. A motor can be used to drive the rotating shaft body 100 to rotate through a gear mechanism, thereby driving the crucible to rotate.

[0043] See also Figure 1 , 4As shown, according to one embodiment of the present application, the fan 300 is connected to the end of the outer cavity 101 away from the crucible. When the fan 300 rotates forward, the end of the outer cavity 101 away from the crucible is an air inlet, and the airflow passes through the end of the outer cavity 101 away from the crucible, the outer cavity 101, the inner cavity 201 and the end of the inner cavity 201 away from the crucible in sequence, and flows to the outside of the rotating shaft body 100. When the fan 300 rotates reversely, the end of the outer cavity 101 away from the crucible is an air outlet, and the airflow passes through the end of the inner cavity 201 away from the crucible, the inner cavity 201, the outer cavity 101 and the end of the outer cavity 101 away from the crucible in sequence to the outside of the rotating shaft body 100, thereby cooling the rotating shaft body 100 of the crucible rotating device. According to other embodiments of the present application, the fan 300 can be connected to the end of the inner cavity 201 away from the crucible. When the fan 300 rotates forward, the end of the inner cavity 201 away from the crucible is an air inlet, and the airflow passes through the end of the inner cavity 201 away from the crucible, the inner cavity 201, the outer cavity 101 and the end of the outer cavity 101 away from the crucible in sequence, and flows to the outside of the rotating shaft body 100. When the fan 300 rotates reversely, the end of the inner cavity 201 away from the crucible is an air outlet, and the airflow passes through the end of the outer cavity 101 away from the crucible, the outer cavity 101, the inner cavity 201 and the end of the inner cavity 201 away from the crucible in sequence to flow to the outside of the rotating shaft body 100, thereby cooling the rotating shaft body 100 of the crucible rotating device.

[0044] Therefore, the crucible rotating device of the present application adopts an air-cooled structure, eliminating the rotating joint and cooling water pipe of the traditional water-cooled structure. It has a simple structure, is easy and quick to operate, is not prone to damage to corresponding components, etc. It has high safety and reliability, a long service life, reduces costs, and can meet increasingly high production needs.

[0045] In some embodiments, see Figure 3 As shown, one end of the guide ring 200 away from the crucible extends out of the rotating shaft body, and a plurality of partition bars 102 are arranged at the end of the outer cavity 101 away from the crucible. The partition bars 102 extend radially and one end is connected to the outer wall of the guide ring 200 and the other end is connected to the inner wall of the rotating shaft body 100. The plurality of partition bars 102 are evenly distributed along the circumference of the guide ring 200. Ventilation holes are formed between two adjacent partition bars 102, and the plurality of partition bars 102 divide the end of the outer cavity 101 away from the crucible into a plurality of ventilation holes, and the plurality of ventilation holes are evenly distributed along the circumferential direction of the guide ring 200. In this way, sufficient airflow is ensured to pass evenly, and the cooling effect is better.

[0046] Further, a dust screen (not shown) is provided at the end of the outer cavity 101 or the inner cavity 201 which is away from the crucible and serves as the air inlet. Thus, by providing the dust screen on the air inlet, dust and other debris are prevented from entering the rotating shaft body 100, which is safer and more reliable.

[0047] In some embodiments, see Figures 1 to 4 As shown, the fan 300 is sleeved on the periphery of the portion of the guide ring 200 extending outside the rotating shaft body 100 and is connected to an end of the outer cavity 101 away from the crucible.

[0048] That is, the rotating shaft body 100 and the guide ring 200 are coaxially arranged and connected to each other through the spacer 102, the fan 300 is arranged on the guide ring 200, the guide ring 200 and the fan 300 rotate synchronously with the rotating shaft body 100, the rotating shaft body 100 rotates forward, the fan 300 rotates forward, and the rotating shaft body 100 rotates reversely, and the fan 300 also reverses. Therefore, the fan 300 can realize the action of rotating synchronously with the rotating shaft body 100 without a separate driving member, thereby driving the cold gas outside the rotating shaft body 100 to enter the inside of the rotating shaft body 100 to cool the crucible rotating device, the structure is simpler and more compact, the volume is reduced, the operation is more convenient, and the cost is reduced.

[0049] Furthermore, if Figure 5 As shown, the fan 300 includes: an inner sleeve 301, a windshield 303 and a plurality of blades 302. The inner sleeve 301 is used to be sleeved on the outer wall of the portion of the guide ring 200 extending out of the rotating shaft body 100, the guide ring 200 is coaxially connected to the inner sleeve 301, a plurality of blades 302 are arranged outside the inner sleeve 301 and are evenly distributed along the circumferential direction of the inner sleeve 301, the windshield 303 surrounds each blade 302 along the circumferential direction of the inner sleeve 301, each blade 302 is located between the windshield 303 and the inner sleeve 301, and the area between the windshield 303 and two adjacent blades is connected to the end of the outer cavity 101 away from the crucible.

[0050] When the blades 302 of the fan 300 rotate forward, the vent between two adjacent spacers 102 is an air inlet, and the airflow flows to the outside of the rotating shaft body 100 through the vent, the outer cavity 101 and the inner cavity 201 in sequence. When the blades 302 of the fan 300 rotate backward, the vent between two adjacent spacers 102 is an air outlet, and the airflow flows to the outside of the rotating shaft body 100 through the inner cavity 201, the outer cavity 101 and the vent, thereby cooling the rotating shaft body 100 of the crucible rotating device. As a result, not only is the structure simple and stable, but the cooling effect is also good. In addition, the angle of the blades should be increased as much as possible to ensure that there is enough air flow for cooling at low speeds.

[0051] In some embodiments, see Figures 1-2 As shown, the crucible rotating device of the present application further includes: a magnetic fluid sealing device 500, which is sleeved outside the rotating shaft body 100. Therefore, the rotating shaft body 100 is dynamically sealed by the magnetic fluid sealing device 500 in an environment with strict vacuum requirements, and the sealing effect is better, more stable and reliable.

[0052] Specifically, see Figure 7 As shown, the magnetic fluid sealing device 500 includes: a magnetic sleeve 501 and a shell 502. The magnetic sleeve 501 is sleeved on the outside of the rotating shaft body 100, the shell 502 is sleeved on the outside of the magnetic sleeve 501 and is rotatably connected to the magnetic sleeve 501, and a magnetic fluid 503 for sealing is arranged between the shell 502 and the magnetic sleeve 501. The magnetic sleeve 501 rotates together with the rotating shaft body 100, and the shell 502 is usually connected and fixed to the corresponding mechanism of the single crystal furnace. Since the magnetic fluid 503 needs to work at an ambient temperature of less than 80°C, according to an embodiment of the present application, the magnetic fluid 503 is arranged at one end of the magnetic fluid sealing device 500 close to the fan 300, that is, the end away from the crucible. The temperature of the end close to the fan 300 is lower, which can prevent the temperature of the magnetic fluid 503 from being too high and ensure that the magnetic fluid 503 is better sealed.

[0053] In some embodiments, see Figure 8 As shown, according to some embodiments of the present application, the magnetic fluid 503 is arranged at one end of the magnetic fluid sealing device 500 away from the fan 300. In this case, a cooling channel 507 is arranged inside the end of the housing 502 away from the fan 300, and the cooling channel 507 is adjacent to the position of the magnetic fluid 503 to cool the magnetic fluid 503. Among them, the cooling channel 507 surrounds the magnetic sleeve 501 along the circumferential direction of the magnetic sleeve 501. Since the housing 502 is usually fixed, the cooling channel 507 can be cooled by water cooling, and the corresponding circulating cooling water supply device is connected to the cooling channel 507, and there is no need to set a rotary joint. Thereby, the temperature of the magnetic fluid 503 is prevented from being too high, and the magnetic fluid 503 is ensured to be better sealed. In addition, the cooling channel 507 can also be cooled by air cooling.

[0054] In some embodiments, see Figures 2 to 4 As shown in , 7 and 8, a connecting flange 505 is provided at one end of the magnetic fluid sealing device 500 away from the fan 300, and a shoulder 105 for matching with the connecting flange 505 is provided on the rotating shaft body 100. The outer diameter of the shoulder 105 is smaller than the outer diameter of the connecting flange 505, and the shoulder 105 is coaxially connected to the connecting flange 505.

[0055] That is, the connecting flange 505 is arranged on the housing 502, and the housing 502 is conveniently fixed by connecting the connecting flange 505 with the corresponding mechanism of the single crystal furnace, and the shaft shoulder 105 of the rotating shaft body 100 can also abut against the end face of the connecting flange 505. Therefore, the operation is simpler and faster, and the structure is more stable and reliable.

[0056] In some embodiments, see Figure 7As shown, a dust collecting plate 506 is provided on the end surface of the connecting flange 505 close to the shaft shoulder 105, and a avoidance hole is provided on the dust collecting plate 506 for the rotating shaft body 100 to pass through. Therefore, by providing the dust collecting plate 506, dust and other debris are prevented from entering the magnetic fluid sealing device 500 to affect the rotation and damage the parts, etc., thereby improving the safety and reliability and extending the service life.

[0057] In some embodiments, see Figures 7-8 As shown, a bearing 504 is further provided between the housing 502 and the magnetic sleeve 501. The housing 502 is rotatably connected to the magnetic sleeve 501 via the bearing 504. The bearing 504 may be one, two or more. Thus, the magnetic sleeve 501 is ensured to rotate better relative to the housing 502.

[0058] According to an embodiment of the present application, a single crystal furnace is also provided, comprising a furnace body, a crucible rotating device, a drag rod assembly 400 and a crucible located in the furnace body. The crucible rotating device is the above-mentioned crucible rotating device, and a connection hole 103 that is recessed away from the crucible is formed at one closed end of the rotating shaft body 100 of the crucible rotating device, and the connection hole 103 can be in an inverted cone shape, which is used to accommodate the drag rod assembly 400. One end of the drag rod assembly 400 is accommodated in the connection hole 103 and connected to the rotating shaft body 100, and the other end of the drag rod assembly 400 is connected to the crucible. Specifically, the outer wall of the drag rod assembly 400 at one end of the connection hole 103 forms a connection portion 401, and the connection portion 401 is in an inverted cone shape that matches the connection hole 103 to form a more stable and reliable structure. In addition, the single crystal furnace also includes a furnace body, a heating device, a water cooling screen and other mechanisms, which can adopt the corresponding mechanisms of the single crystal furnace in the prior art, and will not be described in detail here.

[0059] Therefore, the single crystal furnace of the present application adopts the above-mentioned crucible rotating device, which adopts an air-cooled structure, eliminating the rotating joint and cooling water pipe of the traditional water-cooled structure. It has a simple structure, convenient and quick operation, and is not easy to cause damage to corresponding components. It has high safety and reliability, reduces costs, and can meet increasingly higher production needs.

[0060] In some embodiments, see Figures 1-2As shown in FIGS. 4 and 6, the rotating shaft body 100 is connected to the tow bar assembly 400 through a locking member 600. The locking member 600 penetrates the central axis of the tow bar assembly 400 along the axial direction of the tow bar assembly 400 and extends from the bottom of the tow bar assembly 400 to be connected to the rotating shaft body 100. The rotating shaft body 100 is provided with a first threaded hole 104 corresponding to the locking member 600. A transition nut 700 is internally threadedly connected to the first threaded hole 104. The transition nut 700 is provided with a second threaded hole 701 for threading with the locking member 600. The first threaded hole 104 can be located on the bottom surface of the connecting hole 103. Therefore, by arranging the transition nut 700 in the first threaded hole 104, the locking member 600 is prevented from directly contacting the rotating shaft body 100, and the locking member 600 is effectively prevented from being stuck with the rotating shaft body 100, so as to ensure that the rotating shaft body 100 is better connected to the tow bar assembly 400, with high safety and reliability, and more convenient operation.

[0061] In some embodiments, see Figure 6 As shown, the transition nut 700 is provided with an operation hole 702, and the operation hole 702 is used to screw the transition nut 700 into the first threaded hole 104. The operation hole 702 can be coaxially arranged with the second threaded hole 701 and located on the upper side of the second threaded hole 701. The cross section of the operation hole 702 perpendicular to the axial direction is a hexagon, and the cross section of the second threaded hole 701 perpendicular to the axial direction is an inscribed circle of the hexagon. The locking member 600 can pass through the operation hole 702 and enter the second threaded hole 701 for threaded connection. At the same time, a wrench can be inserted into the operation hole 702 to screw the transition nut 700 into the first threaded hole 104. As a result, the operation is more convenient and quick.

[0062] In some embodiments, the locking member 600 is a screw made of graphite, the transition nut 700 is a nut made of graphite, and the towing rod assembly 400 is also generally made of graphite. Therefore, graphite has high strength and self-lubricating properties, which not only improves the structural strength and prolongs the service life, but also can better prevent the locking member 600 and the rotating shaft body 100 from getting stuck.

[0063] Based on the above-mentioned embodiments of the present application, in the absence of explicit negation or conflict, the technical features of one embodiment may be beneficially combined with one or more other embodiments.

[0064] The above are only some embodiments of the present application, which are only used to illustrate the technical solution of the present application, rather than to limit it. It should be understood that, for those skilled in the art, without departing from the creative concept of the present application, it is possible to improve or replace it according to the above description, and all these improvements and replacements should belong to the protection scope of the claims attached to the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes and sizes can also be arbitrary.

Claims

1. A crucible rotating device, characterized in that: For single crystal furnace, including: A rotating shaft body, wherein a cavity extending along the axial direction is formed inside the rotating shaft body, one axial end of the rotating shaft body is open, and the other end is closed and connected to the crucible of the single crystal furnace; A guide ring, the guide ring extends along the axial direction of the rotating shaft body and is at least partially coaxially arranged in the cavity inside the rotating shaft body, an outer cavity is formed between the outer wall of the guide ring and the inner wall of the cavity, an inner cavity is formed inside the guide ring, the outer cavity and the inner cavity are connected to each other at one end close to the crucible, the outer cavity and the inner cavity are independent of each other at one end away from the crucible, one of them is an air inlet and the other is an air outlet; A fan is connected to an end of the outer cavity or the inner cavity away from the crucible.

2. The crucible rotating device according to claim 1, characterized in that: One end of the guide ring away from the crucible extends out of the rotating shaft body, and a plurality of partition bars are arranged at the end of the outer cavity away from the crucible. The partition bars extend radially and one end is connected to the outer wall of the guide ring and the other end is connected to the inner wall of the rotating shaft body. The plurality of partition bars are evenly distributed along the circumference of the guide ring.

3. The crucible rotating device according to claim 1, characterized in that: The fan is sleeved on the periphery of the portion of the guide ring extending outside the rotating shaft body and is communicated with an end of the outer cavity away from the crucible.

4. The crucible rotating device according to claim 3, characterized in that: The fan comprises: An inner sleeve, wherein the inner sleeve is sleeved on the outer wall of the guide ring extending out of the rotating shaft body, and the guide ring is coaxially connected to the inner sleeve; A plurality of blades, wherein the plurality of blades are arranged outside the inner sleeve and are evenly distributed along the circumferential direction of the inner sleeve; A windshield surrounds each of the blades along the circumferential direction of the inner sleeve, each of the blades is located between the windshield and the inner sleeve, and the area between the windshield and two adjacent blades is connected to an end of the outer cavity away from the crucible.

5. The crucible rotating device according to claim 1, characterized in that: Also includes: A magnetic fluid sealing device, the magnetic fluid sealing device comprising: A magnetic conductive sleeve, which is sleeved outside the rotating shaft body; A housing, the housing being sleeved outside the magnetic conductive sleeve and rotatably connected to the magnetic conductive sleeve via a bearing; Wherein, magnetic liquid for sealing is arranged between the shell and the magnetic conductive sleeve.

6. The crucible rotating device according to claim 5, characterized in that: The magnetic fluid is arranged at one end of the magnetic fluid sealing device away from the fan. A cooling channel is arranged inside the housing at a position adjacent to the magnetic fluid. The cooling channel surrounds the magnetic sleeve along the circumferential direction of the magnetic sleeve.

7. The crucible rotating device according to claim 5, characterized in that: The magnetic fluid is arranged at one end of the magnetic fluid sealing device close to the fan.

8. A single crystal furnace, characterized in that: The invention comprises a furnace body, a crucible rotating device, a drag rod assembly and a crucible located in the furnace body, wherein the crucible rotating device is the crucible rotating device according to any one of claims 1 to 7, a connection hole recessed away from the crucible is formed at one closed end of the rotating shaft body of the crucible rotating device, one end of the drag rod assembly is accommodated in the connection hole and connected to the rotating shaft body, and the other end of the drag rod assembly is connected to the crucible; The connecting hole and the one end of the towing rod assembly are in an inverted cone shape that matches each other.

9. The single crystal furnace according to claim 8, characterized in that: The tow bar assembly is connected to the rotating shaft body via a locking piece, and the locking piece penetrates the central axis of the tow bar assembly along the axial direction of the tow bar assembly and extends from the bottom of the tow bar assembly to be connected to the rotating shaft body.

10. The single crystal furnace according to claim 9, characterized in that: The rotating shaft body is provided with a first threaded hole, a transition nut is threadedly connected in the first threaded hole, and the transition nut is provided with a second threaded hole for threading with the locking member. Wherein, the transition nut is made of graphite.

11. The single crystal furnace according to claim 10, characterized in that: An operating hole is provided on the transition nut, and the operating hole is used to screw the transition nut into the first threaded hole. The operating hole is coaxially arranged with the second threaded hole and is located on the upper side of the second threaded hole. The operating hole is hexagonal in cross section perpendicular to the axial direction, and the second threaded hole is an inscribed circle of the hexagon in cross section perpendicular to the axial direction.

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