Precise metal slit protection device for optical imaging system and use method

Abstract

According to the precise metal slit protection device for the optical imaging system and the using method, the metal slit cleaning plate and the metal slit protection assembly are used in cooperation, so that the two functions of pollution prevention and cleaning of the metal slit are achieved. The metal slit protection assembly comprises a metal slit placing plate and a protection assembly upper cover plate, and a finished product of the metal slit is placed in the metal slit protection assembly to realize physical protection of the metal slit. Two cleaning grooves used for cleaning the metal slits are machined in the surface of the metal slit cleaning plate. Potential pollution possibly occurring in the links of machining, cleaning, transferring, storing and the like of the metal slit can be effectively avoided, powerful guarantee is provided for debugging and assembling of the metal slit in follow-up whole machine equipment, the protection problem of the precise metal slit is solved, the reliability of the optical performance of the precise metal slit is guaranteed, and the service life of the precise metal slit is prolonged. The method has a remarkable guarantee and support effect on the development of various high-end precision optical imaging devices.

Description

Technical Field

[0001] The present invention relates to the field of high-end equipment manufacturing industry, and specifically proposes a device and a method for using the device to prevent pollution and clean the precision metal slits of a high-resolution optical imaging system. Background Art

[0002] The metal slit in the high-resolution optical imaging system is one of the key core parts of the spectrometer. The machining accuracy of the metal slit directly determines the spectral resolution of the optical imaging system. Therefore, the geometric accuracy of the metal slit is very important, and the width of the metal slit is one of them. However, due to the presence of a large number of suspended particles and dust in the air environment, the particle size ranges from 0.001μm to 1000μm. When the width of the precision metal slit is less than 50μm, the slit is easily contaminated by these particles and human skin sweat during processing, cleaning, transportation, storage, and human touch. When the metal slit is contaminated, the geometric indicators such as the slit width will be directly affected, which will cause the imaging field of the optical system to be blocked, thereby affecting the imaging quality, which will lead to rework in the development process of the optical imaging system and increase the manpower and material costs. In order to prevent the precision metal slit from affecting the normal working indicators of the optical imaging system due to the above-mentioned pollution problems, protective measures must be arranged in advance during the metal slit processing, cleaning, transportation, storage, and clamping. Therefore, designing a dedicated anti-pollution and cleaning device for the anti-pollution problem of precision metal slits in high-resolution optical imaging systems has become an urgent problem that needs to be solved.

[0003] At present, there are no relevant reports on the precision metal slit anti-pollution device for high-resolution optical imaging systems. In order to improve the stability of the optical imaging system, the precision metal slit anti-pollution and cleaning device for high-resolution optical imaging systems and the use method thereof are urgently needed to be developed.

[0004] In the invention with publication number CN115683332A, a dustproof device for an ultra-narrow slit of a spectrometer is disclosed. The invention solves the slit contamination problem of the spatial spectrometer by optimizing the design of the dustproof glass material, shape, thickness, film system and other parameters at both ends of the slit, and by the installation position of the dustproof glass and the design of an incompletely closed mouth. However, the dustproof device involved in the invention is suitable for the installation of the slit in the use environment of the spectrometer, but is not suitable for the pollution prevention of metal slits during processing, cleaning, transportation, storage and clamping, so there are limitations. A spectrometer with a dustproof device is disclosed in the utility model patent with announcement number CN211741039U. The utility model patent provides a spectrometer with a dustproof device, thereby reducing the possibility of dust accumulation in the slit. However, the dust-proof device involved in the utility model patent is suitable for the use environment of the slit installed in the spectrometer, and is not suitable for the pollution prevention of the metal slit during processing, cleaning, transportation, storage and clamping. Moreover, the slit in the invention is a disc-type slit turntable, which is essentially different from the metal slit involved in the present invention, so the limitations are obvious.

[0005] In summary, in order to avoid possible contamination of metal slits during processing, cleaning, transportation, storage and clamping, and to ensure the normal assembly and use of the optical system in the later stage, it is urgently necessary to propose a precision metal slit anti-contamination and cleaning device and a method for use of a high-resolution optical imaging system. Summary of the invention

[0006] In order to effectively avoid possible contamination of metal slits during processing, cleaning, transportation, storage and clamping, and to ensure the normal assembly and use of the optical system in the later stage, the present invention proposes a precision metal slit protection device for an optical imaging system and a method of use.

[0007] The precise metal slit protection device for an optical imaging system proposed by the present invention is used in conjunction with a metal slit cleaning plate and a metal slit protection component to achieve the two functions of anti-pollution and cleaning of the metal slit.

[0008] The metal slit protection assembly includes the metal slit placement plate, the protection assembly upper cover plate and the vacuum valve, wherein the protection assembly upper cover plate is fixed to the upper surface of the metal slit placement plate; the vacuum valve is located on the upper surface of the protection assembly upper cover plate and is installed on the vacuum valve installation hole. When the metal slit is completed, the finished metal slit is placed in the metal slit protection assembly to achieve physical protection of the metal slit.

[0009] The upper cover plate of the protection component is also a rectangular plate. The vacuum valve installation hole is located on a symmetric line in the width direction of the upper cover plate of the protection component.

[0010] The upper surface of the metal slit placement plate is processed with two long strip metal slit placement grooves in parallel; a partition plate is provided between the two metal slit placement grooves. The inner cavity size of the metal slit placement groove is the same as the outer size of the metal slit. A sealing groove is processed around the two long strip metal slit placement grooves.

[0011] Connection holes are distributed on the upper surface of the four edges of the metal slit placement plate; upper cover plate positioning pin holes are distributed on the four surfaces of the two metal slit placement grooves and the upper surface of the partition plate. The metal slit placement plate is fixedly connected to the upper cover plate of the protective component through the connection holes and the upper cover plate positioning pin holes.

[0012] A plurality of upper cover plate positioning pins are distributed on the lower surface of the upper cover plate of the protection component, and each upper cover plate positioning pin corresponds to the upper cover plate positioning pin hole on the metal slit placement plate. Connection holes are also distributed on the four edges of the upper cover plate of the protection component, and each connection hole corresponds to the connection hole on the metal slit placement plate.

[0013] When the upper cover plate of the protective component is assembled with the metal slit placement plate, a gap is formed between the lower surface of the upper cover plate of the protective component and the upper surface of the metal slit placement plate through a sealing ring placed in the sealing groove, so that the metal slit placement groove can be evacuated through a vacuum valve.

[0014] The surface of the metal slit cleaning plate is processed with two cleaning grooves, and the positions of the two cleaning grooves correspond to the positions of the metal slit placement grooves. The inner cavity size of the cleaning groove is the same as the size of the metal slit placement groove. There will be multiple grooves parallel to each other in the cleaning groove, which are cleaning liquid circulation grooves.

[0015] The specific process of using the metal slit protection device for protection proposed by the present invention is:

[0016] Step 1, cleaning of equipment and tools:

[0017] Perform ultrasonic cleaning on the metal slit guard to ensure it is clean.

[0018] Step 2, Precision Metal Slit Placement:

[0019] Two pieces of precision metal slits are clamped respectively and placed in the metal slit placement grooves of the metal slit placement plate to complete the metal slit placement.

[0020] Step 3, closed protection:

[0021] A sealing ring is placed in the sealing groove of the metal slit placement plate.

[0022] The upper cover plate of the protection component is buckled on the upper surface of the metal slit placement plate and positioned by means of the positioning pins of each upper cover plate; the upper cover plate of the protection component is fixed to the metal slit placement plate.

[0023] Step 4, sealing protection:

[0024] Install the vacuum valve in the vacuum valve installation hole of the upper cover plate of the protection component.

[0025] The protective component is evacuated to a low vacuum, and the protective component is placed in a vacuum bag and sealed to complete the sealing protection of the metal slit.

[0026] This completes the contamination protection process of the precision metal slit of the optical imaging system.

[0027] The specific process of using the metal slit protection device for cleaning proposed by the present invention is:

[0028] Step 1, cleaning preparation:

[0029] When cleaning the metal slit, the protective component located in the vacuum seal is taken out from the vacuum bag and the vacuum valve is removed.

[0030] Step 2, replace the metal slit cleaning plate:

[0031] The upper cover plate of the protection component is replaced with the metal slit cleaning plate, and the metal slit placement groove on the metal slit placement plate is made to fit face to face with the cleaning groove on the metal slit cleaning plate.

[0032] The metal slit placement plate and the metal slit cleaning plate that are bonded together are turned over so that the metal slit placement plate is located on the upper surface of the metal slit cleaning plate, and then the metal slits placed in each metal slit placement groove fall into the cleaning groove on the metal slit cleaning plate. The metal slit cleaning plate with metal slits is placed in an ultrasonic cleaning tank for cleaning.

[0033] Turn on the ultrasonic cleaning for 10 minutes. During cleaning, the ultrasonic power is 50-80KHz.

[0034] The metal slit cleaning is now completed.

[0035] The present invention can effectively avoid potential contamination problems that may occur in the processing, cleaning, transportation, storage and other links of the metal slit, and provide a strong guarantee for the subsequent debugging and assembly of the metal slit in the whole machine equipment.

[0036] Compared with the prior art, the beneficial effects of the present invention are:

[0037] When it is necessary to protect the precision metal slit from pollution, the metal slit placement plate and the upper cover plate of the protective component of the device of the present invention are used in combination. After the metal slit is placed, a sealing ring is installed in the sealing groove of the metal slit placement plate, and the device is bagged, vacuumed and sealed after assembly. When it is necessary to clean the precision metal slit, the metal slit placement plate and the metal slit cleaning plate of the device of the present invention are used in combination. The metal slit is flipped and transferred to the cleaning groove of the metal slit cleaning plate, and then the metal slit cleaning plate is placed in the cleaning groove for cleaning. The cleaning liquid flow groove feature effectively ensures the convection of the ultrasonic cleaning medium, thereby realizing effective contactless cleaning of the precision metal slit. Figure 7 After the precision metal slit is exposed to the air for a period of time, the three-coordinate optical imager inspection image of the slit shows that there are granular foreign matter in the slit; Figure 8 This is a three-coordinate optical imager test image of a precision metal slit cleaned and preserved by the device of the present invention. Obviously, the present invention not only achieves the anti-pollution of the precision metal slit, but also has the effect of contactless cleaning of the precision metal slit. Therefore, the device of the present invention and its use method can effectively prevent dust and suspended particles in the air from adhering to the precision metal slit during the processing, cleaning, transportation, and preservation of the precision metal slit, solve the protection problem of the precision metal slit, ensure the reliability of the optical performance of the precision metal slit, and play a significant role in supporting the development of various high-end precision optical imaging equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 Place plate 3D diagram for metal slits.

[0039] Figure 2 This is a three-dimensional diagram of the upper cover of the protective component.

[0040] Figure 3 3D illustration of a metal slit cleaning plate.

[0041] Figure 4 A cross-sectional view of a metal slot cleaning plate.

[0042] Figure 5 A three-dimensional image of a metal slit.

[0043] Figure 6 This is the three-dimensional assembly diagram of the precision metal slit anti-pollution device.

[0044] Figure 7 This is the inspection picture of the unprotected metal slit optical imager.

[0045] Figure 8 This is a metal slit optical imager detection image preserved using the anti-pollution device.

[0046] In the figure: 1. Metal slit placement groove; 2. Upper cover positioning pin hole; 3. Sealing groove; 4. Connection hole; 5. Metal slit placement plate; 6. Upper cover positioning pin; 7. Upper cover fixing hole; 8. Vacuum valve installation hole; 9. Protective component upper cover; 10. Cleaning liquid circulation groove; 11. Cleaning groove; 12. Metal slit cleaning plate; 13. Slit; 14. Metal slit; 15. Vacuum valve; 16. Screw. DETAILED DESCRIPTION

[0047] Embodiment 1:

[0048] This embodiment is a device for preventing pollution and cleaning the precision metal slits in the processing, cleaning, transportation and storage of the optical imaging system. The prevention of pollution and cleaning of the precision metal slits are achieved through the coordinated use of a metal slit placement plate, a protective component upper cover plate, a metal slit cleaning plate, etc.

[0049] The metal slit protection device is used in conjunction with a metal slit cleaning plate 12 and a metal slit protection assembly to achieve two functions of anti-pollution and cleaning of the metal slit.

[0050] The metal slit protection assembly comprises the metal slit placement plate 5, the protection assembly upper cover plate 9 and the vacuum valve 15, wherein the protection assembly upper cover plate is fixed on the upper surface of the metal slit placement plate; the vacuum valve is located on the upper surface of the protection assembly upper cover plate and is installed on the vacuum valve installation hole 8. The finished metal slit is placed in the metal slit protection assembly to achieve physical protection of the metal slit.

[0051] The metal slit placement plate 5 is a rectangular plate, and two long strip metal slit placement grooves 1 are processed in parallel on the upper surface of the metal slit placement plate; there is a partition plate between the two metal slit placement grooves. The inner cavity size of the metal slit placement groove is the same as the outer size of the metal slit. A sealing groove 3 is processed around the two long strip metal slit placement grooves.

[0052] The upper surface of the four edges of the metal slit placement plate is provided with connection holes 4; the upper cover plate positioning pin holes 2 are distributed on the four sides of the two metal slit placement grooves and the upper surface of the partition plate. The metal slit placement plate 5 is fixedly connected to the upper cover plate 9 of the protective assembly through the connection holes and the upper cover plate positioning pin holes.

[0053] The upper cover plate 9 of the protection component is also a rectangular plate. A plurality of upper cover plate positioning pins 6 are distributed on the lower surface of the upper cover plate of the protection component, and each upper cover plate positioning pin corresponds to the upper cover plate positioning pin hole on the metal slit placement plate. Connection holes are also distributed on the four edges of the upper cover plate of the protection component, and each connection hole corresponds to the connection hole 4 on the metal slit placement plate. There is a vacuum valve installation hole 8 on the upper cover plate of the protection component, and the vacuum valve installation hole is located on the symmetry line in the width direction of the upper cover plate of the protection component.

[0054] When the upper cover plate of the protection component is assembled with the metal slit placement plate, a gap is formed between the lower surface of the upper cover plate of the protection component and the upper surface of the metal slit placement plate through a sealing ring placed in the sealing groove 3, so that the metal slit placement groove can be evacuated through a vacuum valve.

[0055] The metal slit cleaning plate 12 is also a rectangular plate; two cleaning grooves 11 are processed on the surface of the metal slit cleaning plate, and the positions of the two cleaning grooves correspond to the positions of the metal slit placement grooves 1. The inner cavity size of the cleaning groove is the same as the size of the metal slit placement groove. There will be a plurality of grooves parallel to each other in the cleaning groove, which are cleaning liquid flow grooves 10.

[0056] In this embodiment, the metal slit placement plate 5 is made of a lightweight and high-strength aluminum alloy material, and its main feature is that two metal slit placement grooves 1 with the same length, width and thickness as the metal slit are processed on the upper surface of the metal slit placement plate 5, and the metal slit placement grooves 1 are symmetrically distributed on the upper surface of the metal slit placement plate 5. The upper surfaces of the two long edges of the two metal slit placement grooves 1 are each processed with two connection holes 2, and the upper surfaces of the two short edges are each processed with one connection hole 2. A total of 12 connection holes 2 are processed on the upper surfaces of the four edges of the two metal slit placement grooves 1. A circle of sealing grooves 3 are processed around the two metal slit placement grooves 1. The upper surfaces of the four edges of the metal slit placement plate 5 are distributed with 8 connection holes 4, of which the upper surfaces of the long edges of the metal slit placement plate 5 are each distributed with 3 connection holes 4, and the upper surfaces of the short edges are each distributed with 3 connection holes 4.

[0057] The upper cover plate 9 of the protection component is made of a lightweight and high-strength aluminum alloy material, and its main feature is that it has the same external dimensions as the metal slit placement plate 5. The lower surface of the upper cover plate 9 of the protection component is processed with upper cover plate positioning pins 6 corresponding to the upper cover plate positioning pin holes 2 on the upper surface of the metal slit placement plate 5, a total of 12 upper cover plate positioning pins 6, the height of which is the same as the depth of the upper cover plate positioning pin holes 2, and its function is that after the metal slit placement plate 5 and the upper cover plate 9 of the protection component are assembled, the upper cover plate positioning pins 6 can prevent the precise metal slit 14 from moving at will. The lower surface of the upper cover plate 9 of the protection component is processed with upper cover plate fixing holes 7 corresponding to the upper cover plate connection holes 4 on the upper surface of the metal slit placement plate 5, and its function is that after the metal slit placement plate 5 and the upper cover plate 9 of the protection component are assembled, they are fastened with screws. The upper cover plate 9 of the protection component is processed with vacuum valve mounting holes 8, and the vacuum valve mounting holes 8 are located on the symmetry line of the width direction of the upper cover plate 9 of the protection component.

[0058] The metal slit cleaning plate 12 is made of lightweight and high-strength aluminum alloy material, and its structural features are basically the same as those of the metal slit placement plate 5. The main difference is that the sealing groove 3 is not processed on the upper surface of the metal slit cleaning plate 12, and 12 penetrating cleaning liquid flow grooves 10 are processed along the length direction of the bottom surface of two metal slit placement grooves 1 with the same length, width and thickness as the metal slit. Its function is to remove the protective component upper cover plate 9 when cleaning the metal slit, and then directly assemble the metal slit cleaning plate 12 with the metal slit placement plate 5, and transfer the metal slit to the metal slit placement groove 11 of the metal slit cleaning plate 12 by flipping, thereby avoiding the problem of contamination of the metal slit caused by manual operation during ultrasonic cleaning.

[0059] During assembly, install the rubber sealing ring in the sealing groove 3 of the metal slit placement plate 5 so as to achieve sealing after assembly with the protective assembly upper cover plate 9. Install the screws 16 into the upper cover plate fixing holes 7 of the protective assembly upper cover plate 9 in sequence and tighten them in sequence to complete the locking and fixing of the device. Install the vacuum valve 15 at the vacuum valve installation hole 8 of the protective assembly upper cover plate 9 and tighten it as an interface for subsequent vacuuming.

[0060] Embodiment 2:

[0061] This embodiment is a protection method for the precision metal slits of an optical imaging system during processing, cleaning, transportation, and storage.

[0062] The material of the precision metal slit 14 is pure tungsten alloy, with a thickness of 0.1 mm and 0.2 mm, and the width of the slits 13 distributed on the surface is 40 μm.

[0063] The specific process of this embodiment is:

[0064] Step 1, cleaning of equipment and tools:

[0065] The metal slit placement plate 5, the protective assembly upper cover plate 9, the metal slit cleaning plate 12, the vacuum valve 15, the screws 16, and the tweezers and sealing ring used for clamping the precision metal slit are ultrasonically cleaned with distilled water to ensure that they are clean.

[0066] Step 2, Precision Metal Slit Placement:

[0067] Use clean tweezers with rubber sleeves on the heads to clamp two pieces of precision metal slits 14 respectively, and place them in the metal slit placement grooves 1 of the metal slit placement plate 5 to complete the metal slit placement.

[0068] Step 3, installation of sealing ring:

[0069] After completing the above step 2, a sealing ring is placed in the sealing groove 3 of the metal slit placement plate 5.

[0070] Step 4, assembly of the metal slit placement plate and the upper cover of the protective assembly:

[0071] The upper cover plate positioning pins 6 of the protective component upper cover plate 9 are fully matched with the upper cover plate positioning pin holes 2, so that the upper cover plate positioning pins 6 correspond to the upper cover plate positioning pin holes 2 to complete the assembly of the metal slit placement plate 5 and the protective component upper cover plate 9.

[0072] Step 5: Lock and fix the device:

[0073] The screws 16 are sequentially installed at the upper cover fixing holes 7 of the upper cover 5 of the protection component, so that the metal slit placement plate 5 and the upper cover 9 of the protection component are tightly assembled to complete the locking and fixing of the device.

[0074] Step 6, installation of vacuum valve:

[0075] The vacuum valve 15 is installed in the vacuum valve installation hole 8 of the upper cover plate 9 of the protection component for vacuuming, thereby completing the installation of the vacuum valve 15 .

[0076] Step 7, vacuuming and bagging:

[0077] A vacuum valve 15 is provided to evacuate the protection component to a low vacuum. The protection component is placed in a vacuum bag and sealed to complete the sealing protection of the metal slit.

[0078] This completes the contamination protection process of the precision metal slit of the optical imaging system.

[0079] Experiments show that the application of the present invention can effectively prevent dust and suspended particles in the air from adhering to the precision metal slit during processing, cleaning, transportation and storage, thereby ensuring the reliability of the optical characteristics of the precision metal slit.

[0080] Embodiment 3:

[0081] This embodiment is a method for cleaning the precision metal slit of an optical imaging system using the metal slit cleaning plate. The precision metal slit 14 is made of pure tungsten alloy, has a thickness of 0.1 mm, has 6 slits distributed on the surface, and the width of the slit 13 is 40 μm.

[0082] The specific process is:

[0083] Step 1, cleaning preparation:

[0084] When cleaning the metal slit 14, the protective component located in the vacuum seal is taken out from the vacuum bag, and the vacuum valve 15 and the connecting screws are removed.

[0085] Step 2, replace the metal slit cleaning plate:

[0086] Replace the protective component upper cover plate 9 with the metal slit cleaning plate 12. After replacement, ensure that the metal slit placement plate 5 and the metal slit cleaning plate 12 are aligned in the geometric length and width directions, and make the metal slit placement groove 1 on the metal slit placement plate 5 face to face with the cleaning groove 11 on the metal slit cleaning plate 12.

[0087] The metal slit placement plate and the metal slit cleaning plate that are bonded together are turned over so that the metal slit placement plate is located on the upper surface of the metal slit cleaning plate, and then the metal slits placed in each metal slit placement groove fall into the cleaning groove on the metal slit cleaning plate. The metal slit cleaning plate 12 with metal slits is placed in an ultrasonic cleaning tank for cleaning.

[0088] Turn on the ultrasonic cleaning for 10 minutes. During cleaning, the ultrasonic power is 50-80KHz.

[0089] The metal slit cleaning is now completed.

[0090] Experiments show that the present invention can effectively clean the precision metal slit, thereby ensuring the reliability of the optical characteristics of the precision metal slit.

Claims

1. A precision metal slit protection device for an optical imaging system, characterized in that: The metal slit cleaning plate (12) and the metal slit protection component are used in combination to achieve the two functions of pollution prevention and cleaning of the metal slit. The metal slit protection assembly comprises the metal slit placement plate (5), a protection assembly upper cover plate (9) and a vacuum valve (15), wherein the protection assembly upper cover plate is fixed on the upper surface of the metal slit placement plate; the vacuum valve is located on the upper surface of the protection assembly upper cover plate and is installed on the vacuum valve installation hole (8). The finished metal slit is placed in the metal slit protection assembly to achieve physical protection of the metal slit. The upper cover plate (9) of the protection component is also a rectangular plate. The vacuum valve installation hole is located on a symmetric line in the width direction of the upper cover plate of the protection component.

2. The precision metal slit protection device for an optical imaging system as claimed in claim 1, characterized in that: The upper surface of the metal slit placement plate (5) is processed with two long strip metal slit placement grooves (1) in parallel; a partition plate is provided between the two metal slit placement grooves. The inner cavity size of the metal slit placement groove is the same as the outer size of the metal slit. A sealing groove (3) is processed around the two long strip metal slit placement grooves.

3. The precision metal slit protection device for an optical imaging system as claimed in claim 1, characterized in that: Connection holes (4) are distributed on the upper surface of the four edges of the metal slit placement plate; upper cover plate positioning pin holes (2) are distributed on the four surfaces of the two metal slit placement grooves and the upper surface of the partition plate. The metal slit placement plate (5) is fixedly connected to the upper cover plate (9) of the protective component through the connection holes and the upper cover plate positioning pin holes.

4. The precision metal slit protection device for an optical imaging system as claimed in claim 1, characterized in that: A plurality of upper cover plate positioning pins (6) are distributed on the lower surface of the upper cover plate of the protection component, and each upper cover plate positioning pin corresponds to the upper cover plate positioning pin hole on the metal slit placement plate. Connection holes are also distributed on the four edges of the upper cover plate of the protection component, and each connection hole corresponds to the connection hole (4) on the metal slit placement plate.

5. The precision metal slit protection device for an optical imaging system as claimed in claim 1, characterized in that: When the upper cover plate of the protection component is assembled with the metal slit placement plate, a gap is formed between the lower surface of the upper cover plate of the protection component and the upper surface of the metal slit placement plate by means of a sealing ring placed in the sealing groove (3), so that the metal slit placement groove can be evacuated through a vacuum valve.

6. The precision metal slit protection device for an optical imaging system as claimed in claim 1, characterized in that: The surface of the metal slit cleaning plate is processed with two cleaning grooves (11), and the positions of the two cleaning grooves correspond to the positions of the metal slit placement grooves (1). The inner cavity size of the cleaning groove is the same as the size of the metal slit placement groove. There are multiple grooves parallel to each other in the cleaning groove, and the grooves are cleaning liquid circulation grooves (10).

7. A protection method using the metal slit protection device as claimed in claim 1, characterized in that: The specific process is: Step 1, cleaning of equipment and tools: Perform ultrasonic cleaning on the metal slit guard to ensure it is clean. Step 2, Precision Metal Slit Placement: Two pieces of precision metal slits (14) are clamped respectively and placed in the metal slit placement grooves (1) of the metal slit placement plate (5) to complete the metal slit placement. Step 3, closed protection: A sealing ring is placed in the sealing groove (3) of the metal slit placement plate. The upper cover plate (9) of the protection component is buckled onto the upper surface of the metal slit placement plate and positioned by means of the positioning pins of each upper cover plate; the upper cover plate of the protection component is fixed to the metal slit placement plate. Step 4, sealing protection: The vacuum valve (15) is installed in the vacuum valve installation hole (8) of the upper cover plate of the protection component. The protective component is evacuated to a low vacuum, and the protective component is placed in a vacuum bag and sealed to complete the sealing protection of the metal slit. This completes the contamination protection process of the precision metal slit of the optical imaging system.

8. A cleaning method using the metal slit protection device as claimed in claim 1, characterized in that: The specific process is: Step 1, cleaning preparation: When cleaning the metal slit (14), the protective component located in the vacuum seal is taken out from the vacuum bag and the vacuum valve (15) is removed. Step 2, replace the metal slit cleaning plate: The protective component upper cover plate (9) is replaced with the metal slit cleaning plate (12), and the metal slit placement groove (1) on the metal slit placement plate (5) is made to fit face to face with the cleaning groove (11) on the metal slit cleaning plate. The metal slit placement plate and the metal slit cleaning plate that are bonded together are turned over so that the metal slit placement plate is located on the upper surface of the metal slit cleaning plate, and then the metal slits placed in the metal slit placement grooves fall into the cleaning grooves on the metal slit cleaning plate. The metal slit cleaning plate (12) with the metal slits is placed in an ultrasonic cleaning tank for cleaning. Turn on the ultrasonic cleaning for 10 minutes. During cleaning, the ultrasonic power is 50-80KHz. The metal slit cleaning is now completed.

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