Seed crystal bonding device and method

Abstract

The embodiment of the invention provides a seed crystal bonding device and method, and relates to the technical field of silicon carbide seed crystal bonding. The seed crystal bonding method is applied to the seed crystal bonding device. The seed crystal bonding device comprises a negative pressure assembly, a first pressing assembly and a second pressing assembly. The first pressing assembly comprises a first driving piece, a lifting rod and a pressing block, the pressing block is connected with one end of the lifting rod, and the first driving piece is used for driving the lifting rod to move in the extending direction of the lifting rod. The second pressing assembly comprises a second driving part, a connecting block and two second pressing parts, the second driving part can drive the connecting block to move downwards on the driving rod, then the two pressing structures are driven to be far away from each other in the preset direction, the middle of the graphite paper can be pressed to the outer side of the graphite paper, and pressing from inside to outside is achieved; therefore, bubbles between the graphite paper and the seed crystal can be effectively removed, and the bubbles between the graphite paper and the seed crystal can be further removed under the action of the negative pressure assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon carbide seed crystal bonding, and in particular to a seed crystal bonding device and method. Background Art

[0002] Existing silicon carbide (SiC) crystal growth devices based on the physical vapor transport (PVT) method need to bond the seed crystal to a graphite cap before growing the crystal. In order to improve the stability and thermal conductivity of the seed crystal during growth and facilitate subsequent processing, most of them need to bond the seed crystal to graphite paper and then connect it to the graphite cap through the graphite paper.

[0003] The inventors have found that some existing bonding methods mostly apply glue between the graphite paper and the seed crystal, and then use a flat plate to press the two together. However, this method cannot effectively remove bubbles in the glue layer, which can easily cause holes in the corresponding position of the seed crystal, thereby affecting the subsequent growth quality of the silicon carbide crystal. Summary of the invention

[0004] The object of the present invention is to provide a seed crystal bonding device and method, which can reduce the bubbles in the glue layer between the seed crystal and the graphite paper to ensure the subsequent growth of silicon carbide crystals.

[0005] The embodiment of the present invention is achieved as follows:

[0006] In a first aspect, the present invention provides a seed crystal bonding device, comprising:

[0007] A first pressing assembly, the first pressing assembly comprises a first driving member, a lifting rod and a pressing block, the pressing block is connected to one end of the lifting rod, and the first driving member is used to drive the lifting rod to move along its own extension direction;

[0008] A second pressing assembly, the second pressing assembly includes a second driving member, a connecting block and two second pressing members, the connecting block is arranged on the lifting rod, the second driving member is used to drive the connecting block to move on the lifting rod along the extension direction of the lifting rod, the second pressing member includes a movably connected connecting rod and a pressing structure, one end of the connecting rod away from the pressing structure is movably connected to the connecting block, and the two pressing structures are arranged at intervals along a preset direction and are located on opposite sides of the pressing block;

[0009] A negative pressure assembly, the negative pressure assembly includes a negative pressure plate and a vacuum generator, the negative pressure plate is detachably mounted on the pressure block, the negative pressure plate is provided with a plurality of negative pressure holes evenly spaced, the vacuum generator is connected to the negative pressure holes, the axis of the negative pressure holes is parallel to the extension direction of the lifting rod, and the negative pressure plate is also provided with a heating module;

[0010] When the second driving member drives the connecting block to move along the extension direction of the lifting rod, the two pressing structures can move away from the pressing block or approach the pressing block in a preset direction, and the preset direction is perpendicular to the extension direction of the lifting rod.

[0011] In an optional embodiment, the second pressing member also includes an elastic member, the two ends of the elastic member are respectively connected to the lifting rod and the connecting rod, and the elastic member is located at one end of the lifting rod close to the pressing block. When the pressing structures of the two second pressing members are in contact with the side wall of the pressing block, the elastic member is in a stretched state.

[0012] In an optional embodiment, the second driving member is one of a driving cylinder, a driving oil cylinder or a screw motor;

[0013] The negative pressure hole comprises a first hole section and a second hole section which are coaxially arranged. The radial dimension of the first hole section is larger than that of the second hole section. One end of the second hole section away from the first hole section is connected to the vacuum generator.

[0014] In an optional embodiment, the pressing structure is a pressing roller, and the pressing roller can rotate around its own axis relative to the connecting rod.

[0015] In an optional embodiment, the pressing block has two opposite abutting side surfaces, the abutting side surfaces are arc-shaped surfaces adapted to the pressing roller, and the end of the pressing block away from the lifting rod also has a pressing surface, which is a plane;

[0016] The pressing surface is also provided with a matching hole, and the negative pressure plate is also provided with a matching column which is detachably connected with the matching hole.

[0017] In an optional embodiment, the pressing block has a mounting surface opposite to the pressing surface, the mounting surface is connected to the lifting rod, and a size of the mounting surface in a preset direction is smaller than a size of the pressing surface in the preset direction.

[0018] In an optional embodiment, the lifting rod is provided with a plurality of mounting portions along its extension direction, and the second driving member is used for being detachably connected to the mounting portions.

[0019] In an optional embodiment, the pressing block and the lifting rod are symmetrically arranged about a preset plane, and the preset plane is parallel to the extension direction of the lifting rod.

[0020] In an optional embodiment, at least one of the pressing surface of the pressing block and the pressing surface of the pressing structure is provided with a buffer layer.

[0021] In a second aspect, the present invention provides a seed crystal bonding method, which is applied to the seed crystal bonding device of any one of the aforementioned embodiments, for pressing a piece to be pressed, wherein the piece to be pressed includes bonded graphite paper and a seed crystal, and the method comprises:

[0022] Controlling the second pressing assembly to be in an initial state, when the second pressing assembly is in the initial state, the two pressing structures are respectively in contact with two sides of the pressing block;

[0023] Move the first pressing assembly to the top of the graphite paper and make the pressing block located in the middle of the graphite paper, and control the first driving member to drive the lifting rod to drive the pressing block and the pressing structure to press the middle of the graphite paper;

[0024] Controlling the second driving member to drive the connecting block to press downward, so as to drive the two pressing structures to gradually move away from each other along a preset direction from an initial state until the connecting block moves downward to the limit position of the lifting rod;

[0025] Control the first driving member to drive the lifting rod to rise so as to drive the pressing block and the second pressing assembly to rise;

[0026] Controlling the second driving member to drive the connecting block to rise, so as to drive the two pressing structures to approach each other until they are in an initial state;

[0027] Install a negative pressure plate on the pressing block, and control the first driving member to drive the lifting rod to descend, so that the pressing block drives the negative pressure plate to press on the graphite paper with a preset pressure;

[0028] The vacuum generator and the heating module are controlled to be turned on, so that the multiple negative pressure holes generate negative pressure on the graphite paper, and the negative pressure plate performs heat pressing on the graphite paper.

[0029] The beneficial effect of the embodiment of the present invention is: the embodiment of the present invention provides a seed crystal bonding device and method, the seed crystal bonding method is applied to the seed crystal bonding device, the seed crystal bonding device has a first pressing component and a second pressing component. The first pressing component includes a first driving member, a lifting rod and a pressing block, the pressing block is connected to one end of the lifting rod, the first driving member is used to drive the lifting rod to move along its own extension direction, and the first driving member is connected to one end of the driving rod away from the pressing block. The second pressing component includes a second driving member, a connecting block and two second pressing members, the connecting block is arranged on the lifting rod, and the second driving member can drive the connecting block to move downward on the driving rod, thereby driving the two pressing structures to move away from each other in a preset direction. In the process of the two pressing structures moving away from each other, the middle of the graphite paper can be pressed to the outside of the graphite paper, and the pressing from the inside to the outside can be realized, thereby effectively removing the bubbles between the graphite paper and the seed crystal, and through the setting of the negative pressure component, the bubbles between the graphite paper and the seed crystal can be further removed to ensure the growth quality of the silicon carbide crystal in the subsequent crystal growth process. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0031] Figure 1 A schematic diagram of the structure of the seed crystal bonding device provided by an embodiment of the present invention when it is not started;

[0032] Figure 2 A schematic diagram of the structure of the seed crystal bonding device provided by an embodiment of the present invention when the first pressing component is pressed down and the second pressing component is not pressed down;

[0033] Figure 3 A schematic diagram of the structure after the first pressing component and the second pressing component in the seed crystal bonding device provided by an embodiment of the present invention are pressed down;

[0034] Figure 4 A schematic diagram of the structure of the seed crystal bonding device provided by an embodiment of the present invention when the first pressing component rises and the second pressing component does not rise again;

[0035] Figure 5 A schematic structural diagram of the seed crystal bonding device provided in an embodiment of the present invention when the first pressing assembly and the second pressing assembly are both recovered after the pressing is completed;

[0036] Figure 6 A schematic structural diagram of a first pressing assembly driving a negative pressure plate to press graphite paper in a seed crystal bonding device provided by an embodiment of the present invention;

[0037] Figure 7 A schematic diagram of the structure of a negative pressure plate provided by an embodiment of the present invention at a first viewing angle;

[0038] Figure 8 A schematic structural diagram of a negative pressure plate provided in an embodiment of the present invention at a second viewing angle.

[0039] Icons: 1-seed crystal bonding device; 100-first pressing assembly; 110-first driving member; 120-lifting rod; 130-pressing block; 131-abutting side; 132-pressing surface; 133-installing surface; 200-second pressing assembly; 210-second driving member; 220-connecting block; 230-connecting rod; 240-pressing structure; 250-elastic member; 300-negative pressure assembly; 310-negative pressure plate; 311-negative pressure hole; 320-heating module; 330-matching column; 2-frame; 3-horizontal plane; 4-piece to be pressed; 401-seed crystal; 402-graphite paper. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0043] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0044] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0045] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] The specific structure of a seed crystal bonding device 1 provided by an embodiment of the present invention and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.

[0047] Please refer to Figure 1-Figure 2 A seed crystal bonding device 1 provided by an embodiment of the present invention includes a negative pressure component, a first pressing component 100 and a second pressing component 200. The first pressing component 100 includes a first driving member 110, a lifting rod 120 and a pressing block 130, wherein the pressing block 130 is connected to one end of the lifting rod 120, and the first driving member 110 is used to drive the lifting rod 120 to move along its own extension direction, and the first driving member 110 is connected to one end of the driving rod away from the pressing block 130.

[0048] The second pressing assembly 200 includes a second driving member 210, a connecting block 220 and two second pressing members. The connecting block 220 is arranged on the lifting rod 120. The second driving member 210 is used to drive the connecting block 220 to move on the lifting rod 120 along the extension direction of the lifting rod 120. The second pressing member includes a movably connected connecting rod 230 and a pressing structure 240. The end of the connecting rod 230 away from the pressing structure 240 is movably connected to the connecting block 220. The two pressing structures 240 are arranged at intervals along a preset direction and are located on opposite sides of the pressing block 130. When the second driving member 210 drives the connecting block 220 to move along the extension direction of the lifting rod 120, the two pressing structures 240 can be away from the pressing block 130 or close to the pressing block 130 in the preset direction, and the preset direction is perpendicular to the extension direction of the lifting rod 120.

[0049] The negative pressure assembly 300 includes a negative pressure plate 310 and a vacuum generator (not shown in the figure). The negative pressure plate 310 is detachably mounted on the pressure block 130. That is, the negative pressure plate 310 can be easily removed from the pressure block 130 or installed on the pressure block 130 by the operator. In detail, in the present embodiment, the negative pressure plate 310 can be detachably mounted on the bottom.

[0050] The negative pressure plate 310 is provided with a plurality of negative pressure holes 311 arranged at even intervals, and the vacuum generator is connected to the negative pressure hole 311, that is, the vacuum generator can control the negative pressure hole 311 to generate negative pressure, and the axis of the negative pressure hole 311 is parallel to the extension direction of the lifting rod 120. The negative pressure plate 310 is also provided with a heating module 320, and the heating module 320 can heat the negative pressure plate 310, and the negative pressure plate 310 has a certain thermal conductivity.

[0051] Please refer to Figure 2-Figure 5It should be noted that the seed crystal bonding device 1 provided in this embodiment is used to press the part to be pressed 4, and the part to be pressed includes a bonded graphite paper 402 and a seed crystal 401. It can be understood that when pressing, the part to be pressed 4 can be placed on a plane in advance, and the graphite paper 402 is facing upward, and then the first pressing component 100 is moved above the graphite paper 402, and the pressing block 130 is located above the middle of the graphite paper 402, and then the lifting rod 120 is driven downward by the first driving member 110, and the pressing block 130 is pressed to the middle of the graphite paper 402.

[0052] It should be noted that when the graphite paper 402 is pressed and the second driving member 210 has not yet driven the connecting block 220 to move, the second pressing block in the second pressing member abuts against the pressing block 130. After the pressing block 130 presses the graphite paper 402, the pressing structure 240 is also pressed on the graphite paper 402. The second driving member 210 can drive the connecting block 220 to move downward on the driving rod, thereby driving the two pressing structures 240 to move away from each other in a preset direction. In the process of the two pressing structures 240 moving away from each other, they can press the middle of the graphite paper 402 to the outside of the graphite paper 402, thereby achieving inside-out pressing, thereby effectively removing bubbles in the glue layer between the graphite paper 402 and the seed crystal 401.

[0053] After the pressing structure 240 is pressed, in order to prevent the two pressing structures 240 from approaching each other in a preset direction to affect the bonding effect between the seed crystal 401 and the graphite paper 402, the first driving member 110 can be controlled to drive the lifting rod 120 to rise to drive the pressing block 130 and the second pressing assembly 200 to rise at the same time.

[0054] Please refer to Figure 6-Figure 8 In order to further remove the bubbles in the glue layer between the graphite paper 402 and the seed crystal 401, the negative pressure plate 310 can be installed on the pressing block 130. At this time, the bottom surface of the negative pressure plate 310 is located between the graphite paper 402 and the pressing block 130, and then the lifting rod 120 is driven down by the first driving member 110, so that the pressing block 130 drives the negative pressure plate 310 to descend, so that the negative pressure plate 310 is pressed against the graphite paper 402 and the end surface of the negative pressure hole 311 abuts against the graphite paper 402. At this time, the heating module 320 and the vacuum generator can be turned on. At this time, the multiple negative pressure holes 311 on the negative pressure plate 310 all generate negative pressure, and negative A low-pressure area is formed around the pressure hole 311, so the gas between the graphite paper 402 and the seed crystal 401 will flow from the high-pressure area to the low-pressure area, thereby effectively discharging the bubbles between the graphite paper 402 and the seed crystal 401, and because the negative pressure holes 311 are evenly distributed on the negative pressure plate, it can ensure that the negative pressure acts evenly on the graphite paper 402, thereby effectively avoiding the accumulation of bubbles between the graphite paper 402 and the seed crystal 401, and can effectively discharge the bubbles between the graphite paper 402 and the seed crystal 401.

[0055] It should be noted that if there are tiny channels or gaps in the glue layer between the graphite paper 402 and the seed crystal 401 or in the graphite paper 402, the channels or gaps can play a role similar to that of a capillary. Under the action of the negative pressure at the negative pressure hole 311 and the auxiliary action of a capillary phenomenon, the bubbles between the graphite paper 402 and the seed crystal 401 can be discharged more effectively.

[0056] In addition, with the effect of negative pressure, a low-pressure area will be formed in the area around the negative pressure hole 311, and the pressure in the low-pressure area will be significantly lower than the external atmospheric pressure. Since the external atmospheric pressure is higher than the pressure in the low-pressure area, a significant pressure difference will be formed between the two, and the pressure difference will exert an inward net force on the graphite paper 402. Since the net force generated by the pressure difference is inward, that is, the force is perpendicular to the graphite paper 402 and points to the seed crystal, the net force can further ensure that the graphite paper 402 and the seed crystal 401 are tightly fitted, so that the graphite paper 402 is tightly pressed on the seed crystal 401.

[0057] Furthermore, since a heating module is also provided on the negative pressure plate 310 , under the action of the heating module 320 , the negative pressure plate 310 can be pressed on the graphite paper 402 for hot pressing, which can further ensure the discharge effect of the bubbles between the seed crystal 401 and the graphite paper 402 .

[0058] Optionally, the negative pressure hole 311 includes a first hole segment and a second hole segment coaxially arranged, the first hole segment is connected to the second hole segment, the radial dimension of the first hole segment is larger than the radial dimension of the second hole segment, and the end of the second hole segment away from the first hole segment is connected to the vacuum generator.

[0059] It can be understood that since the radial dimension of the first hole segment is larger than the radial dimension of the second hole segment, and, when pressed on the graphite paper 402, the first hole segment is closer to the graphite paper 402 relative to the second hole segment, therefore, the first hole segment with a larger radial dimension can improve the negative pressure acting on the graphite paper 402 to be more uniform. During the air extraction process, the gas will transition from the first hole segment with a larger diameter to the second hole segment with a smaller diameter, which can reduce the assistance of the airflow through the negative pressure hole and make the gas be extracted more smoothly.

[0060] It should be noted that the internal channels of the multiple negative pressure holes 311 provided on the negative pressure plate 310 are connected to a vacuum interface, and the vacuum interface is used to connect to a vacuum generator.

[0061] Of course, in some other optional embodiments, the negative pressure hole 311 may also be a hole with a constant aperture along its own axial direction.

[0062] It should be noted that, during pressing, the first driving member 110 can be installed on the frame 2 and the first driving member 110 is located above the graphite paper 402. In addition, the lengths of the pressing block 130 and the pressing structure 240 can be greater than or equal to the radial dimension of the graphite paper 402 to ensure the efficiency of removing bubbles in the glue layer between the graphite paper 402 and the seed crystal 401.

[0063] Optionally, in some embodiments, the second pressing member also includes an elastic member 250, the number of the elastic members 250 is two, and the two ends of each elastic member 250 are respectively connected to the lifting rod 120 and the connecting rod 230, and the elastic member 250 is located at one end of the lifting rod 120 close to the pressing block 130. When the pressing structures 240 of the two second pressing members are both in contact with the side wall of the pressing block 130, the elastic member 250 is in a stretched state.

[0064] That is to say, when the second pressing member is in the initial state before the second driving member 210 is started, the pressing structure 240 has not moved away from the pressing block 130 in the preset direction, and the pressing structure 240 is in contact with the side wall of the pressing block 130. Since the elastic member 250 is in a stretched state at this time, the elastic member 250 will give the connecting rod 230 a force close to the lifting rod 120, so that the pressing structure 240 is close to the side wall of the pressing block 130, so as to ensure that when the pressing block 130 presses the graphite paper 402, the pressing structures 240 located on both sides of the pressing block 130 will not easily move away from each other in the preset direction, so as to ensure that when the graphite paper 402 is pressed, the pressing structure 240 on both sides of the pressing block 130 can realize the pressing of the graphite paper 402 from the inside to the outside through the pressing block 130 and the pressing structures 240 on both sides of the pressing block 130, so as to ensure that the bubbles in the glue layer between the graphite paper 402 and the seed crystal 401 are better removed.

[0065] It should be noted that the second driving member 210 is one of a driving cylinder, a driving oil cylinder or a screw motor. It can be understood that a driving cylinder, a driving oil cylinder and a screw motor with a locking function are selected. Therefore, after the second driving member 210 drives the connecting block 220 to stop moving in the height direction of the lifting rod 120, the relative position of the connecting block 220 on the lifting rod 120 at this time can be locked, thereby ensuring the moving position of the two pressing structures 240 in the preset direction.

[0066] Optionally, the first driving member 110 may also be a driving cylinder, a driving oil cylinder or a lead screw motor.

[0067] Optionally, in this embodiment, the pressing structure 240 is a pressing roller, and the pressing roller can rotate around its own axis relative to the connecting rod 230. It can be understood that since the pressing structure 240 in this embodiment is a pressing roller, and the outer surface of the pressing roller is an arc surface, during the pressing process, when the second driving member 210 drives the connecting rod 230, it is easy to rotate the pressing roller on the graphite paper 402 so that the pressing roller moves in a preset direction, and in the process of rolling, the bubbles in the glue layer between the graphite paper 402 and the seed crystal 401 can be better removed.

[0068] In order to match with the pressing roller, the pressing block 130 has two opposite abutting side surfaces 131, the abutting side surfaces 131 are used to abut with the pressing roller, and the abutting side surfaces 131 are arc-shaped surfaces that match with the pressing roller. The end of the pressing block 130 away from the lifting rod 120 also has a pressing surface 132, and the pressing surface 132 is a plane. It can be understood that since the abutting side surfaces 131 are arc-shaped surfaces that match with the pressing roller, to ensure that the pressing roller abuts more closely with the pressing block 130, when pressing the graphite paper 402, the two pressing rollers will start to give pressure to the graphite paper 402 from both sides of the pressing block 130 and move outward from both sides of the pressing block 130 to ensure the removal efficiency of the glue layer between the graphite paper 402 and the seed crystal 401.

[0069] Furthermore, since the pressing surface 132 of the pressing block 130 is a plane, when the graphite paper 402 is pressed, a relatively uniform pressing force is provided, and the air in the adhesive layer corresponding to the pressing position can be better removed.

[0070] The pressing block 130 has a mounting surface 133 opposite to the pressing surface 132, the mounting surface 133 is connected to the lifting rod 120, and the size of the mounting surface 133 in the preset direction is smaller than the size of the pressing surface 132 in the preset direction. It can be understood that the size of the pressing surface 132 is larger, which can ensure the pressing area when pressing the graphite paper 402, and can ensure that the graphite paper 402 will not be easily crushed.

[0071] Optionally, the pressing surface 132 is provided with a matching hole, and the negative pressure plate 310 is also provided with a matching column 330 detachably connected to the matching hole. That is, since the pressing surface is provided with a matching hole 132, when the pressing block is pressed on the graphite paper 402, the matching hole is relative to the structure protruding from the pressing surface 132, which can ensure that the pressing surface 132 and the graphite paper 402 are in close contact.

[0072] Among them, the mating hole can be snapped or threadedly connected to the mating column 330. When the mating column 330 is threadedly connected to the mating hole, the mating hole is a threaded hole, and the mating column 330 can be provided with an external thread threadedly connected to the mating hole to ensure the connection strength between the pressure block 130 and the negative pressure plate 310.

[0073] It can be understood that since the abutting side 131 is an arc surface that is compatible with the pressing roller, and the size of the mounting surface 133 in the preset direction is smaller than the size of the pressing surface 132 in the preset direction, the arc angle corresponding to the arc surface of the abutting side 131 is less than 180°. In this embodiment, the abutting side 131 is a 1 / 4 arc surface.

[0074] Optionally, the pressing block 130 and the lifting rod 120 are symmetrically arranged about a preset plane, and the preset plane is parallel to the extension direction of the lifting rod 120. Since the pressing block 130 and the lifting rod 120 are symmetrically arranged about the preset plane, when pressing the graphite paper 402, it can ensure that the pressure at various locations is relatively uniform.

[0075] Optionally, the lifting rod 120 is provided with a plurality of mounting portions along its own extension direction, and the second driving member 210 is used to be detachably connected to the mounting portions. It is understandable that, since the lifting rod 120 is provided with a plurality of mounting portions along its own extension direction, the second driving member 210 can be installed at different positions of the lifting rod 120 according to different sizes of the connecting rod 230.

[0076] Optionally, at least one of the pressing surface 132 of the pressing block 130 and the pressing surface of the pressing structure 240 is provided with a buffer layer, and the buffer layer can effectively prevent the graphite paper 402 from being crushed to affect the bonding effect with the seed crystal 401 .

[0077] The embodiment of the present invention further provides a method for bonding a seed crystal 401 , which is applied to the above-mentioned seed crystal bonding device 1 to press a piece to be pressed 4 , wherein the piece to be pressed 4 includes a bonded graphite paper 402 and a seed crystal 401 .

[0078] Bonding methods include:

[0079] Please continue to refer to Figure 1 The second pressing assembly 200 is controlled to be in an initial state. When the second pressing assembly 200 is in the initial state, the two pressing structures 240 are respectively in contact with two sides of the pressing block 130 .

[0080] Please refer to Figure 2 , move the first pressing assembly 100 to the top of the graphite paper 402 and make the pressing block 130 located in the middle of the graphite paper 402 , control the first driving member 110 to drive the lifting rod 120 to drive the pressing block 130 and the pressing structure 240 to press the middle of the graphite paper 402 .

[0081] It should be noted that the middle part in this embodiment should not be understood as the middle part in a strict sense, and it is sufficient to be roughly in the middle position. The pressing block 130 is pressed on the side of the graphite paper 402 away from the seed crystal 401.

[0082] Please refer to Figure 3, control the second driving member 210 to drive the connecting block 220 to press down, so as to drive the two pressing structures 240 to gradually move away from each other in a preset direction from the initial state, until the connecting block 220 moves downward to the limit position of the lifting rod 120. In this process, when the connecting block 220 is pressed down, a downward force will be given to the pressing structure 240. Since the two ends of the connecting rod 230 are movably connected to the connecting block 220 and the pressing block 130 respectively, a force moving away from the pressing block 130 in a preset direction will also be given to the pressing structure 240, thereby realizing the pressing of the graphite paper 402 from the inside to the outside, so as to efficiently remove the bubbles in the glue layer between the graphite paper 402 and the seed crystal 401.

[0083] Please refer to Figure 4-Figure 5 After the second pressing assembly 200 completes the preliminary pressing operation, in order to prevent the two pressing structures 240 from approaching each other in the preset direction to affect the bonding effect between the seed crystal 401 and the graphite paper 402, in this embodiment, the first driving member 110 is first controlled to drive the lifting rod 120 to rise so as to drive the pressing block 130 and the second pressing assembly 200 to rise simultaneously;

[0084] Then, the second driving member 210 is controlled to drive the connecting block 220 to rise, so as to drive the two pressing structures 240 to approach each other until they are in the initial state.

[0085] Please refer to Figure 6 , and then the negative pressure plate 310 can be installed on the pressing block 130, and the first driving member 110 is controlled to drive the lifting rod 120 to descend, so that the pressing block 130 drives the negative pressure plate 310 to be pressed against the graphite paper 402 with a preset pressure. At this time, the end surface of the first hole section of the negative pressure plate 310 away from the second hole section abuts against the graphite paper 402;

[0086] Then, the vacuum generator and the heating module 320 are controlled to open, so that the multiple negative pressure holes 311 generate negative pressure on the graphite paper 402, and the graphite paper 402 is hot-pressed by the negative pressure plate 310. According to the above analysis, the bubbles between the graphite paper 402 and the seed crystal 401 can be effectively removed by setting the negative pressure holes 311, and the bubbles can be further removed under the action of hot pressing, thereby ensuring the growth quality of silicon carbide crystals in the subsequent crystal growth process.

[0087] It should be noted that when the vacuum generator is turned on, the negative pressure strength can be gradually increased until a preset negative pressure strength is reached, and the vacuum generator is kept turned on for a preset time to ensure that the bubbles between the graphite paper 402 and the seed crystal 401 are discharged.

[0088] After the preset time has passed, the first driving member 110 may be controlled to drive the lifting rod 120 to rise, so that the pressing block 130 drives the negative pressure plate 310 away from the graphite paper 402 .

[0089] Optionally, in order to ensure the bonding effect between the graphite paper 402 and the seed crystal 401, the negative pressure plate 310 can be removed from the pressing block 130, and then the process is repeated. Figure 1-Figure 5 The first pressing assembly 100 and the second pressing assembly 200 perform pressing operation on the graphite paper 402 .

[0090] That is, after removing the negative pressure plate 310 , the first driving member 110 can be controlled to drive the lifting rod 120 to drive the pressing block 130 and the pressing structure 240 to press the middle part of the graphite paper 402 .

[0091] Then, the second driving member 210 is controlled to drive the connecting block 220 to press down, so as to drive the two pressing structures 240 to gradually move away from each other along the preset direction from the initial state, until the connecting block 220 moves downward to the extreme position of the lifting rod 120, thereby pressing the graphite paper 402 from the inside to the outside, so as to efficiently remove the bubbles in the glue layer between the graphite paper 402 and the seed crystal 401.

[0092] In order to prevent the two pressing structures 240 from approaching each other in a preset direction and affecting the bonding effect between the seed crystal 401 and the graphite paper 402, in the present embodiment, the first driving member 110 is first controlled to drive the lifting rod 120 to rise so as to drive the pressing block 130 and the second pressing assembly 200 to rise at the same time, and then the two pressing structures 240 in the second pressing assembly 200 are controlled to approach each other in a preset direction so as to respectively abut against the two sides of the pressing block 130.

[0093] It should be noted that, when performing the pressing operation, the workpiece 4 to be pressed is placed on a horizontal plane 3, and the graphite paper 402 of the workpiece 4 to be pressed faces upward, the first driving member 110 can be installed on a frame 2 (not shown), and the end of the connecting rod 230 away from the pressing block 130 is connected to the driving end of the first driving member 110, and the frame 2 is used to support the seed crystal bonding device 1 in this embodiment.

[0094] In summary, the embodiment of the present invention provides a seed crystal bonding device 1 and method, the seed crystal 401 bonding method is applied to the seed crystal bonding device 1, the seed crystal bonding device 1 has a first pressing assembly 100 and a second pressing assembly 200. The first pressing assembly 100 includes a first driving member 110, a lifting rod 120 and a pressing block 130, the pressing block 130 is connected to one end of the lifting rod 120, the first driving member 110 is used to drive the lifting rod 120 to move along its own extension direction, and the first driving member 110 is connected to one end of the driving rod away from the pressing block 130. The second pressing assembly 200 includes a second driving member 210, a connecting block 220 and two second pressing members. The connecting block 220 is arranged on the lifting rod 120. The second driving member 210 can drive the connecting block 220 to move downward on the driving rod, thereby driving the two pressing structures 240 to move away from each other in a preset direction. In the process of the two pressing structures 240 moving away from each other, the middle of the graphite paper 402 can be pressed to the outside of the graphite paper 402 to achieve inside-out pressing, thereby effectively removing bubbles in the glue layer between the graphite paper 402 and the seed crystal 401, and the bubbles between the graphite paper 402 and the seed crystal 401 can be further removed by the negative pressure assembly 300 to ensure the growth quality of silicon carbide crystals in the subsequent crystal growth process.

[0095] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A seed crystal bonding device, characterized in that: include: A first pressing assembly (100), the first pressing assembly (100) comprising a first driving member (110), a lifting rod (120) and a pressing block (130), the pressing block (130) being connected to one end of the lifting rod (120), and the first driving member (110) being used to drive the lifting rod (120) to move along its own extension direction; A second pressing component (200), the second pressing component (200) comprising a second driving member (210), a connecting block (220) and two second pressing members, the connecting block (220) being arranged on the lifting rod (120), the second driving member (210) being used to drive the connecting block (220) to move on the lifting rod (120) along the extension direction of the lifting rod (120), the second pressing member comprising a movably connected connecting rod (230) and a pressing structure (240), one end of the connecting rod (230) away from the pressing structure (240) being movably connected to the connecting block (220), and the two pressing structures (240) being arranged at intervals along a preset direction and located on opposite sides of the pressing block (130); A negative pressure assembly (300), the negative pressure assembly (300) comprising a negative pressure plate (310) and a vacuum generator, the negative pressure plate (310) being detachably mounted on the pressing block (130), the negative pressure plate (310) being provided with a plurality of negative pressure holes (311) arranged at even intervals, the vacuum generator being connected to the negative pressure holes (311), the axis of the negative pressure holes (311) being parallel to the extension direction of the lifting rod (120), and the negative pressure plate (310) being further provided with a heating module (320); When the second driving member (210) drives the connecting block (220) to move along the extension direction of the lifting rod (120), the two pressing structures (240) can move away from the pressing block (130) or approach the pressing block (130) in the preset direction, and the preset direction is perpendicular to the extension direction of the lifting rod (120).

2. The seed crystal bonding device according to claim 1, characterized in that: The second pressing member also includes an elastic member (250), the two ends of which are respectively connected to the lifting rod (120) and the connecting rod (230), and the elastic member (250) is located at one end of the lifting rod (120) close to the pressing block (130). When the pressing structures (240) of the two second pressing members are in contact with the side wall of the pressing block (130), the elastic member (250) is in a stretched state.

3. The seed crystal bonding device according to claim 1, characterized in that: The second driving member (210) is one of a driving cylinder, a driving oil cylinder or a screw motor; And / or the negative pressure hole (311) comprises a first hole segment and a second hole segment which are coaxially arranged, the radial dimension of the first hole segment is larger than the radial dimension of the second hole segment, and one end of the second hole segment away from the first hole segment is connected to the vacuum generator.

4. The seed crystal bonding device according to claim 1, characterized in that: The pressing structure (240) is a pressing roller, and the pressing roller can rotate around its own axis relative to the connecting rod (230).

5. The seed crystal bonding device according to claim 4, characterized in that: The pressing block (130) has two opposite abutting side surfaces (131), the abutting side surfaces (131) are arc-shaped surfaces adapted to the pressing roller, and the end of the pressing block (130) away from the lifting rod (120) also has a pressing surface (132), and the pressing surface (132) is a plane; The pressing surface (132) is provided with a matching hole, and the negative pressure plate (310) is further provided with a matching column (330) detachably connected to the matching hole.

6. The seed crystal bonding device according to claim 5, characterized in that: The pressing block (130) has a mounting surface (133) opposite to the pressing surface (132), the mounting surface (133) is connected to the lifting rod (120), and the size of the mounting surface (133) in the preset direction is smaller than the size of the pressing surface (132) in the preset direction.

7. The seed crystal bonding device according to claim 1, characterized in that: The lifting rod (120) is provided with a plurality of mounting portions along its extension direction, and the second driving member (210) is used for being detachably connected to the mounting portions.

8. The seed crystal bonding device according to claim 1, characterized in that: The pressing block (130) and the lifting rod (120) are both symmetrically arranged about a preset plane, and the preset plane is parallel to an extension direction of the lifting rod (120).

9. The seed crystal bonding device according to claim 1, characterized in that: At least one of the pressing surface (132) of the pressing block (130) and the pressing surface of the pressing structure (240) is provided with a buffer layer.

10. A seed crystal bonding method, applied to the seed crystal bonding device according to any one of claims 1 to 9, for pressing a piece to be pressed (4), wherein the piece to be pressed (4) comprises a bonded graphite paper (402) and a seed crystal (401), characterized in that: The method comprises: Controlling the second pressing assembly (200) to be in an initial state, when the second pressing assembly (200) is in the initial state, the two pressing structures (240) respectively abut against two sides of the pressing block (130); Move the first pressing assembly (100) to the top of the graphite paper (402) so that the pressing block (130) is located in the middle of the graphite paper (402), and control the first driving member (110) to drive the lifting rod (120) to drive the pressing block (130) and the pressing structure (240) to press the middle of the graphite paper (402); Controlling the second driving member (210) to drive the connecting block (220) to press downward, so as to drive the two pressing structures (240) to gradually move away from each other along the preset direction from the initial state until the connecting block (220) moves downward to the extreme position of the lifting rod (120); Controlling the first driving member (110) to drive the lifting rod (120) to rise, thereby driving the pressing block (130) and the second pressing assembly (200) to rise; Controlling the second driving member (210) to drive the connecting block (220) to rise, so as to drive the two pressing structures (240) to approach each other until they are in the initial state; The negative pressure plate (310) is mounted on the pressing block (130), and the first driving member (110) is controlled to drive the lifting rod (120) to descend, so that the pressing block (130) drives the negative pressure plate (310) to be pressed against the graphite paper (402) at a preset pressure; The vacuum generator and the heating module (320) are controlled to be turned on, so that the plurality of negative pressure holes (311) generate negative pressure on the graphite paper (402), and the graphite paper (402) is hot-pressed through the negative pressure plate (310).

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