Bearing shock absorber and molecular pump

Abstract

The invention relates to the technical field of bearing accessories, and discloses a bearing shock absorber and a molecular pump. The inner ring sleeves the periphery of the outer ring at intervals and is suitable for being assembled on the outer ring of the bearing; the elastic piece is arranged between the outer ring and the inner ring; the elastic piece is fixedly connected with the outer ring and the inner ring; the outer ring, the inner ring and the elastic piece are all made of metal materials; the bearing shock absorber utilizes the counter-acting force generated by the elastic deformation of the elastic piece to carry out shock absorption on the bearing or the bearing seat. According to the bearing shock absorber, radial shock absorption and axial shock absorption are provided by designing the bearing shock absorber made of the metal material; in an oil-containing environment, the mechanical property of the bearing shock absorber is not changed, the influence of the temperature on the performance of the bearing shock absorber is small, and the bearing shock absorber can keep stable shock absorption performance. Compared with an existing rubber shock absorber, the manufacturing cost of the shock absorber is remarkably reduced.

Description

Technical Field

[0001] The invention relates to the technical field of bearing accessories, and in particular to a bearing vibration damper and a molecular pump. Background Art

[0002] The speed of molecular pump is usually very high, and its maximum speed can reach 90000r / min. During the whole process of molecular pump starting from 0r / min to full speed 90000r / min, the stability of the bearing in the molecular pump is very important for stabilizing the speed of molecular pump.

[0003] In order to improve the stability of the bearing, it is generally necessary to equip the bearing with a vibration damper. Currently, the commonly used vibration damper is a rubber vibration damper, which adds vibration damping rubber in the axial and radial directions of the bearing to reduce vibration and noise.

[0004] However, the rubber shock absorber will swell in an oily environment, causing the stiffness of the rubber shock absorber to change, reducing the vibration reduction performance and the stability of the bearing, which will seriously affect the stability of the molecular pump. In addition, as the molecular pump runs, the temperature rises inside the molecular pump, which also seriously reduces the vibration reduction performance of the rubber shock absorber. Since the rubber shock absorber is adversely affected by the oily environment and the temperature rise, it is necessary to place high requirements on the material ratio of the vibration reduction rubber in the rubber shock absorber, which significantly increases the manufacturing cost of the shock absorber. Summary of the invention

[0005] In view of this, the present invention provides a bearing vibration damper to solve the problem that the existing rubber vibration damper is adversely affected by the oily environment and the temperature rise, which puts high requirements on the material ratio of the vibration damping rubber in the rubber vibration damper, thereby significantly increasing the manufacturing cost of the vibration damper.

[0006] In a first aspect, the present invention provides a bearing damper, comprising:

[0007] An outer ring, suitable for mounting on a bearing seat;

[0008] An inner ring, sleeved at intervals on the outer circumference of the outer ring, the inner ring being suitable for being assembled on the outer ring of the bearing;

[0009] An elastic member is arranged in the annular gap between the outer ring and the inner ring; and the elastic member is fixedly connected to the outer ring and the inner ring; the outer ring, the inner ring and the elastic member are all made of metal material;

[0010] The bearing vibration damper is suitable for utilizing the reaction force generated by the elastic deformation of the elastic member to reduce vibration of the bearing or bearing seat. Beneficial effect: The present application adopts the above technical solution, and provides radial vibration reduction and axial vibration reduction for the bearing and the bearing seat by designing a bearing vibration damper made of metal material; in an oily environment, the mechanical properties of the bearing vibration damper will not change, and the temperature has little effect on the performance of the bearing vibration damper. The bearing vibration damper described in the present application can maintain stable vibration reduction performance. Compared with the existing rubber vibration damper, the manufacturing cost of the vibration damper is significantly reduced. In addition, the vibration damper made of metal material can also easily and efficiently transfer the heat generated by the bearing heating to dissipate heat for the bearing.

[0011] Optionally, the elastic member includes: a plurality of elastic sheets arranged in an annular gap.

[0012] Optionally, the spring sheet is U-shaped; the two side walls of the U-shaped spring sheet are arc surfaces that fit with the inner wall of the outer ring and the outer wall of the inner ring, and the two side walls of the U-shaped spring sheet are fixedly connected with the inner wall of the outer ring and the outer wall of the inner ring. Beneficial effect: The present application adopts the above technical solution, and the spring sheet with an arc surface can produce a good fit effect with the inner ring and the outer ring, further increasing the vibration reduction effect.

[0013] Optionally, the two ends of the U-shape of the spring sheet are bent outward to form convex edges; the convex edges at the two ends of the U-shape of the spring sheet are respectively embedded in the embedding groove provided on the inner wall of the outer ring and the embedding groove provided on the outer wall of the inner ring. Beneficial effect: The application adopts the above technical solution, and through the cooperation of the convex edge and the embedding groove, the installed spring sheet is more firmly, and the bearing shock absorber is a tightly integrated whole, which is conducive to providing a better shock absorption effect.

[0014] Optionally, it also includes:

[0015] The rubber ring is embedded in the U-shaped groove of the plurality of spring sheets. Beneficial effect: The present application adopts the above technical solution, and by setting the rubber ring, the damping of the bearing shock absorber is increased, thereby further improving the vibration reduction effect.

[0016] Optionally, by adjusting the thickness of the spring sheet, the stiffness of the bearing damper is adjusted, thereby adjusting the damping performance of the bearing damper. Beneficial effect: The present application adopts the above technical solution, and can adjust the damping performance of the bearing damper more conveniently by adjusting the thickness of the spring sheet.

[0017] Optionally, by adjusting the number of spring pieces, the stiffness of the bearing damper is adjusted, thereby adjusting the damping performance of the bearing damper. Beneficial effect: The present application adopts the above technical solution, and can adjust the damping performance of the bearing damper more conveniently by adjusting the number of spring pieces.

[0018] Optionally, the metal material is stainless steel, titanium alloy or aluminum alloy. Beneficial effects: The present application adopts the above technical solution, and can efficiently transfer heat through the bearing damper of stainless steel, titanium alloy or aluminum alloy.

[0019] Optionally, the stainless steel is 304 stainless steel.

[0020] In a second aspect, the present invention further provides a molecular pump, comprising:

[0021] Bearings;

[0022] Bearing seat;

[0023] The bearing vibration damper is installed between the bearing and the bearing seat. Beneficial effect: The present application adopts the above technical solution, and provides radial vibration damping and axial vibration damping for the bearing and the bearing seat through the bearing vibration damper made of metal material; in an oily environment, the mechanical properties of the bearing vibration damper will not change, and the temperature has little effect on the performance of the bearing vibration damper. The bearing vibration damper described in the present application can maintain a stable vibration damping performance, thereby ensuring the stability of the molecular pump operation. Compared with the existing rubber vibration damper, the manufacturing cost of the vibration damper is significantly reduced. In addition, the vibration damper made of metal material can also easily and efficiently transfer the heat generated by the bearing heating, dissipate heat for the bearing, and thus put the molecular pump in a good working condition. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a schematic cross-sectional structural diagram of a bearing damper provided in an embodiment of the present invention;

[0026] Figure 2 It is a schematic diagram of the three-dimensional structure of the bearing damper provided in an embodiment of the present invention;

[0027] Figure 3 Schematic diagram of the three-dimensional structure of the spring provided in the embodiment of the present invention Figure 1 ;

[0028] Figure 4 Schematic diagram of the three-dimensional structure of the spring provided in the embodiment of the present invention Figure 2 .

[0029] Description of reference numerals:

[0030] 1. Outer ring; 2. Inner ring; 3. Spring piece; 4. Raised edge; 5. Rubber ring. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0032] like Figures 1 to 4 A specific implementation of the bearing vibration damper shown includes: an outer ring 1, an inner ring 2, an elastic member and a rubber ring 5. The bearing vibration damper described in the present application adopts a form of combining a mechanical structure with a rubber structure.

[0033] like Figure 1 and Figure 2 As shown, the outer ring 1 is suitable for being installed on the bearing seat. The inner ring 2 is sleeved at intervals on the outer circumference of the outer ring 1, and the inner ring 2 is suitable for being assembled on the outer ring of the bearing. The elastic member is arranged in the annular gap between the outer ring 1 and the inner ring 2; and the elastic member is fixedly connected to the outer ring 1 and the inner ring 2, specifically, it can be welded and fixedly connected; the outer ring 1, the inner ring 2 and the elastic member are all made of metal materials; the metal material can be metal materials such as stainless steel, titanium alloy or aluminum alloy; the stainless steel can be 304 stainless steel. The bearing damper is suitable for using the reaction force generated by the elastic deformation of the elastic member to reduce the vibration of the bearing or the bearing seat.

[0034] Specifically, Figure 1 and Figure 2 As shown, the elastic member includes: a plurality of spring pieces 3 arranged in an annular gap. The spring piece 3 is U-shaped; the two side walls of the U-shaped spring piece 3 are arc surfaces that are respectively arranged to fit the inner wall of the outer ring 1 and the outer wall of the inner ring 2, and the two side walls of the U-shaped spring piece 3 are respectively fixedly connected to the inner wall of the outer ring 1 and the outer wall of the inner ring 2, and specifically can be fixedly connected by welding.

[0035] Further, such as Figure 1 , Figure 3 and Figure 4As shown, the two ends of the U-shaped spring sheet 3 are bent outward to form convex edges 4; the convex edges 4 at the two ends of the U-shaped spring sheet 3 are respectively embedded in the embedded grooves provided on the inner wall of the outer ring 1 and the embedded grooves provided on the outer wall of the inner ring 2. When the bearing vibrates, the inner ring 2 of the bearing shock absorber is caused to reciprocate, thereby periodically squeezing the spring sheet 3 in the radial direction. The reaction force generated by the deformation of the spring sheet 3 reduces the radial displacement of the bearing to achieve a vibration reduction effect.

[0036] like Figure 1 and Figure 2 As shown, the rubber ring 5 is embedded and installed in the U-shaped groove of multiple spring pieces 3. Specifically, the rubber ring 5 can be embedded and installed in the bottom of the U-shaped groove of multiple spring pieces 3. The damping characteristics of the bearing shock absorber can be changed by adjusting the size of the rubber ring 5. The rubber ring 5 can be made of silicone rubber. Compared with the existing vibration-damping rubber, the rubber ring 5 described in the present application does not require good performance and consistency. The rubber ring 5 of the present application only plays a little damping effect in the bearing shock absorber. Therefore, after the oil and temperature affect the rubber ring 5, it will not have a great impact on the vibration-damping effect of the bearing shock absorber.

[0037] For existing rubber shock absorbers, the shock absorption performance of a shock absorbing rubber with a specific size and a specific material ratio cannot be changed. If you want to change the shock absorption performance, you can only redesign the size and re-proportion the raw materials. However, for the bearing shock absorber of the present application, the thickness of the spring piece 3 can be adjusted to adjust the stiffness of the bearing shock absorber, thereby adjusting the shock absorption performance of the bearing shock absorber. The number of spring pieces 3 can also be adjusted to adjust the stiffness of the bearing shock absorber, thereby adjusting the shock absorption performance of the bearing shock absorber. The stiffness of the bearing shock absorber includes: radial support stiffness.

[0038] The present invention further provides a molecular pump, comprising: a bearing, a bearing seat and the bearing vibration damper; the bearing vibration damper is installed between the bearing and the bearing seat.

[0039] The bearing damper is crucial to the stability and reliability of the molecular pump. The damping characteristics and stiffness of the bearing damper greatly affect the vibration reduction effect of the molecular pump. Therefore, it is particularly important to reasonably debug the performance parameters of the bearing damper. For the existing rubber damper, for molecular pumps with different performances, it is necessary to make damping rubbers of different sizes and damping rubbers with different formula ratios. However, the present application scheme can adjust the thickness of the spring 3, adjust the stiffness of the bearing damper, and adjust the vibration reduction of the bearing damper, thereby obtaining a molecular pump with good stability and reliability. It is also possible to adjust the stiffness of the bearing damper and adjust the vibration reduction of the bearing damper by adjusting the number of springs 3, thereby obtaining a molecular pump with good stability and reliability. It is also possible to combine adjusting the thickness of the spring 3 with adjusting the number of springs 3 to obtain a molecular pump with good stability and reliability. It is also possible to further combine adjusting the size of the rubber ring 5 to change the damping characteristics of the bearing damper, so as to better adapt to different molecular pumps to obtain a molecular pump with good stability and reliability. When the molecular pump runs at high speed, a lot of heat is generated due to friction. It is difficult for existing rubber shock absorbers to efficiently dissipate the heat of the bearing; however, the bearing shock absorber made of metal material described in the present application can efficiently transfer the heat of the bearing and dissipate the heat for the bearing.

[0040] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A bearing damper, characterized in that: include: An outer ring (1) adapted to be mounted on a bearing housing; An inner ring (2) is sleeved on the outer circumference of the outer ring (1) at intervals, and the inner ring (2) is suitable for being assembled on the outer ring of the bearing; an elastic member, arranged in an annular gap between the outer ring (1) and the inner ring (2); and the elastic member is fixedly connected to the outer ring (1) and the inner ring (2); the outer ring (1), the inner ring (2) and the elastic member are all made of metal material; The bearing vibration damper is suitable for utilizing the reaction force generated by the elastic deformation of the elastic member to dampen the vibration of the bearing or the bearing seat.

2. The bearing damper according to claim 1, characterized in that: The elastic member comprises: a plurality of elastic sheets (3) arranged in an annular gap.

3. The bearing damper according to claim 2, characterized in that: The spring sheet (3) is U-shaped; the two side walls of the U-shape of the spring sheet (3) are arc surfaces that are respectively arranged to fit the inner wall of the outer ring (1) and the outer wall of the inner ring (2), and the two side walls of the U-shape of the spring sheet (3) are respectively fixedly connected to the inner wall of the outer ring (1) and the outer wall of the inner ring (2).

4. The bearing damper according to claim 3, characterized in that: The two ends of the U-shape of the spring sheet (3) are bent outwards to form convex edges (4); the convex edges (4) at the two ends of the U-shape of the spring sheet (3) are respectively embedded in the embedding groove provided on the inner wall of the outer ring (1) and the embedding groove provided on the outer wall of the inner ring (2).

5. The bearing damper according to claim 3, characterized in that: Also includes: The rubber ring (5) is embedded in the U-shaped grooves of the plurality of spring sheets (3).

6. The bearing damper according to any one of claims 2 to 5, characterized in that: By adjusting the thickness of the spring sheet (3), the stiffness of the bearing vibration damper is adjusted, thereby adjusting the vibration damping performance of the bearing vibration damper.

7. The bearing damper according to any one of claims 2 to 5, characterized in that: By adjusting the number of spring sheets (3), the stiffness of the bearing vibration damper is adjusted, thereby adjusting the vibration damping performance of the bearing vibration damper.

8. The bearing damper according to any one of claims 1 to 5, characterized in that: The metal material is stainless steel, titanium alloy or aluminum alloy.

9. The bearing damper according to claim 8, characterized in that: The stainless steel is 304 stainless steel.

10. A molecular pump, characterized in that: include: Bearings; Bearing seat; The bearing vibration damper according to any one of claims 1 to 9 is installed between the bearing and the bearing seat.

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