Sawtooth grating wave component and optical module

Abstract

The sawtooth grating wave grouping assembly comprises an optical transmission waveguide structure and an output coupling receiving structure, and an adjusting structure used for adjusting the wavelength of an optical signal is arranged between the optical transmission waveguide structure and the output coupling receiving structure. The adjusting structure comprises an MEMS system and a sawtooth grating in terminal control connection with the MEMS system, and a grating sawtooth-shaped inclined groove face of the sawtooth grating faces the optical signal output end of the optical transmission waveguide structure and the optical signal input end of the output coupling receiving structure. According to the invention, the MEMS system is configured below the sawtooth grating, the input angle of the incident light signal received by the sawtooth grating is adjusted, and the light signals of different incident angles generate different wavelengths after passing through the sawtooth grating, so that the purpose of flexibly configuring the wavelength of the light is achieved.

Description

Technical Field

[0001] The invention relates to a wavelength division component, belonging to the technical field of optical modules, and in particular to a sawtooth grating wavelength division component and an optical module. Background Art

[0002] With the rapid development of optical communication technology, the demand for data transmission rate and capacity continues to rise. Traditional capacity expansion solutions mainly rely on increasing the number of optical cables between transmission nodes, but this method is not only costly, but also limited by the space and physical path of laying optical fiber cables. In order to meet these challenges, wavelength division multiplexing (WDM) system has emerged as a new solution and has gradually become a widely used technology.

[0003] At present, there are many types of wavelength division schemes, mainly including thin film filter type and grating waveguide type. However, these existing wavelength division components have a common limitation: their output wavelength is fixed and cannot be adjusted once installed. This means that if a new wavelength needs to be used, new optical components must be re-laid, which greatly increases the complexity and cost of the system.

[0004] In addition, current wavelength division networks generally adopt a pre-fixed design, which lacks flexibility. This design method makes it impossible to dynamically adjust the allocation and use of network wavelengths according to actual needs, limiting the adaptability and efficiency of the system. Therefore, it is urgent to develop an adjustable and more flexible sawtooth grating wavelength division component. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a sawtooth grating wavelength division component and an optical module in response to the technical defects existing in the prior art. The MEMS system is configured under the sawtooth grating to adjust the input angle of the incident light signal received by the grating. Different light signal input angles produce different wavelengths after passing through the sawtooth grating, thereby achieving the purpose of flexible configuration of the light wavelength.

[0006] The technical solution adopted by the present invention to solve its technical problem is: the present invention discloses a sawtooth grating wavelength division component, including an optical transmission waveguide structure and an output coupling receiving structure, an adjustment structure for adjusting the wavelength of an optical signal is arranged between the optical transmission waveguide structure and the output coupling receiving structure, the adjustment structure includes a MEMS system and a sawtooth grating connected to the active end of the MEMS system, and the sawtooth grating sawtooth oblique groove surface of the sawtooth grating faces the optical signal output end of the optical transmission waveguide structure and the optical signal input end of the output coupling receiving structure.

[0007] In a preferred embodiment of the present invention, the MEMS system includes a PCBA, on which a control component and a flexible mechanical sheet shaft device are arranged, the control component includes a sensor module, a voltage control, a storage module and a transmission control module, the flexible mechanical sheet shaft device includes a mechanical rotating central axis, and the mechanical rotating central axis realizes rotation adjustment through a voltage control module, and two mirror-symmetrically arranged X-axis flexible mechanical sheet shafts and two mirror-symmetrically arranged Y-axis flexible mechanical sheet shafts are arranged on the mechanical rotating central axis, the central axis of the X-axis flexible mechanical sheet shaft and the central axis of the Y-axis flexible mechanical sheet shaft are perpendicular to each other, and a groove structure for limiting the rotation amplitude of the Y-axis flexible mechanical sheet shaft is also provided on the PCBA.

[0008] In a preferred embodiment of the present invention, the rotational vibration of the MEMS system drives the sawtooth grating above to deflect, thereby adjusting the incident angle of the sawtooth grating receiving the output light signal from the optical transmission waveguide structure, so that the angle of the received incident light beam signal is different from the sawtooth bevel groove surface of the sawtooth grating, thereby changing the wavelength of the reflected light signal.

[0009] In a preferred embodiment of the present invention, the MEMS system controls the displacement position of the sawtooth grating in the X, Y and Z directions by adjusting the voltage.

[0010] In a preferred embodiment of the present invention, a calibration parameter curve is stored in the MEMS system, and the voltage values ​​of the MEMS system corresponding to different wavelengths are collected by calibration. The calibration parameter curve is obtained by the following formula: λn =K1*a+K2*b+C, where a is the voltage parameter corresponding to the displacement of the resonant axis of the MEMS system in the X direction, b is the voltage parameter corresponding to the displacement of the resonant axis of the MEMS system in the Y direction, K1 and K2 are constant parameters of the calibration curve, and C is the compensation parameter.

[0011] In a preferred embodiment of the present invention, the optical transmission waveguide structure comprises an optical fiber array, a planar waveguide grating and a single-curved array silicon lens arranged in sequence along the direction of the incident light beam.

[0012] In a preferred embodiment of the present invention, the optical fiber array comprises a base plate with a light array positioning groove, a flat cover plate arranged on the base plate, and tail end protection glue.

[0013] In a preferred embodiment of the present invention, the planar waveguide grating comprises a planar grating waveguide chip and a protective cover plate.

[0014] In a preferred embodiment of the present invention, the output coupling receiving structure includes a concave reflector and a hyperbolic array silicon lens.

[0015] In a preferred embodiment of the present invention, the concave surface of the concave reflector is arranged opposite to the sawtooth bevel groove surface of the sawtooth grating.

[0016] The invention also discloses an optical module, comprising a sawtooth grating wavelength division component.

[0017] The beneficial effects of the present invention are as follows: the present invention provides a wavelength division component that cleverly combines a sawtooth grating and a MEMS system. Through this unique design, the present invention not only realizes the flexible adjustment of the wavelength, but also greatly improves the adaptability and efficiency of the entire system. Specifically, the present invention configures a MEMS system under the sawtooth grating, so that the input angle of the incident light signal received by the grating can be accurately adjusted, so that different light signal input angles can generate different wavelengths after passing through the sawtooth grating, thereby achieving the purpose of flexibly configuring the light wavelength.

[0018] After using the present invention, the multi-wavelength broadband optical signal is evenly divided into multiple optical signals through the parallel waveguide grating. Then, these optical signals are focused on the sawtooth grating through a convex lens. Then, under the action of the sawtooth grating, the optical signal is reflected and filtered into a single wavelength beam signal. Finally, these single wavelength beam signals are reflected by a concave mirror to form parallel multi-beam optical path signals, which can be received by the array lens.

[0019] It is worth mentioning that a highlight of the present invention is its three-dimensional adjustability in space. Through the MEMS adjustment device, the angle at which the sawtooth grating receives the light beam signal can be changed according to actual needs, thereby obtaining light signals of different wavelengths. This design not only makes wavelength adjustment flexible, but also brings many technical advantages.

[0020] Thanks to the precise adjustment of the MEMS system, the adaptability and flexibility of the system have been significantly improved. Secondly, the entire component is compact and highly integrated, which greatly reduces the size of the device and makes it possible to apply it in space-constrained scenarios. Furthermore, due to the use of precise optical design and advanced MEMS control technology, the wavelength division component can provide high-quality wavelength signals, ensuring the excellent performance of the product.

[0021] The MEMS system can also precisely control the swing of the sawtooth grating in three directions by adjusting the voltage or current to achieve fine adjustment of the wavelength. At the same time, the calibration parameter curve built into the system further improves the intelligence level of the wavelength adjustment process. Finally, the modular design of the wavelength division component allows it to be easily integrated into a larger optical module, greatly improving the scalability and maintainability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0023] Figure 1 A schematic diagram of the present invention;

[0024] Figure 2 A top view of the present invention;

[0025] Figure 3 A schematic diagram of the beam path of the present invention;

[0026] Figure 4 Schematic diagram of the sawtooth grating of the present invention;

[0027] Figure 5 Figure 4 A partial enlarged view of

[0028] Figure 6 It is the MEMS system structure;

[0029] In the figure, 1-LC optical interface, 2-base plate, 3-optical fiber array, 3-1-flat cover plate, 3-2-V-groove base plate, 3-3-tail end protection glue, 4-planar waveguide grating, 4-1-planar grating waveguide chip, 4-2-protective cover plate, 5-single-curved array silicon lens, 6-sawtooth grating, 7-MEMS system, 7-1-MEMS integrated chip, 7-2-chip PIN foot, 8-concave reflector, 9-hyperbolic array silicon lens. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0031] Example 1

[0032] The present invention provides an innovative sawtooth grating wavelength division component, which is mainly composed of an optical transmission waveguide structure, an output coupling receiving structure and an adjustment structure located between the two. The core of this design is to achieve precise adjustment of the wavelength of the optical signal through the adjustment structure, thereby solving the technical problem of fixed wavelength of traditional wavelength division components.

[0033] The adjustment structure of the present invention is a key part of the present invention, which includes a MEMS system 7 and a sawtooth grating 6 connected to its active end. The sawtooth grating 6 faces the optical signal output end of the optical transmission waveguide structure and the optical signal input end of the output coupling receiving structure. This arrangement ensures that the incident optical signal can effectively interact with the sawtooth grating, thereby achieving wavelength adjustment.

[0034] The working principle of the MEMS system 7 of the present invention is to drive the sawtooth grating 6 above to deflect by rotational vibration. This deflection realizes the adjustment of the incident angle of the output light signal received by the sawtooth grating 6 from the light transmission waveguide structure. By changing the angle between the incident light beam signal and the sawtooth slanted groove surface of the sawtooth grating, the purpose of changing the wavelength of the reflected light signal can be achieved. This method provides a high degree of flexibility and accuracy for wavelength adjustment.

[0035] Another important feature of the MEMS system 7 of the present invention is that it can control the swing amount of the sawtooth grating 6 in the three directions of X, Y and Z by adjusting the voltage or current. This three-dimensional control capability further enhances the accuracy and range of wavelength adjustment. In addition, the MEMS system 7 also stores a calibration parameter curve, which makes the wavelength adjustment process more intelligent and automated.

[0036] The MEMS system 7 includes a PCBA circuit board and a micro-mechanical shaft structure. A mechanical rotating shaft structure is arranged at the center of the PCBA circuit board. The shaft structure is controlled by a voltage control module circuit 7.3 on the circuit board. Different voltages are input to drive the shaft to rotate to a specified position. In addition to the voltage control module circuit 7.3, the PCBA circuit is also provided with a sensor module circuit 7.2, a storage module circuit 7.4 and a transmission control module circuit 7.5. The sensor on the sensor module circuit 7.2 is used to sense the rotation amplitude of the mechanical shaft and to limit the rotation amplitude. The storage module circuit 7.4 is used to store product information, calibration curve values, etc. The transmission control module circuit 7.5 is used to convert the voltage signal into a digital signal to better control the motion trajectory of the mechanical shaft. Two mirror-symmetrically arranged X-axis flexible mechanical sheet rotating shafts 7.6 and two mirror-symmetrically arranged Y-axis flexible mechanical sheet rotating shafts 7.7 are arranged on the central mechanical rotating shaft. The central axis of the X-axis flexible mechanical sheet rotating shaft 7.6 and the central axis of the Y-axis flexible mechanical sheet rotating shaft 7.7 are perpendicular to each other. The two mutually perpendicular micro-mechanical resonant shafts are used to support the sawtooth grating bonded above. The groove structure 7.8 on the periphery of the resonant shaft can prevent the X-resonant axis and the Y-resonant axis from shifting too much when the central shaft rotates.

[0037] By configuring the MEMS system, it is connected to the circuit board of the optical module through PIN 7.9. The MEMS system uses a micro-mechanical structure, and the range of rotation of the mechanical axis is very small during use. Through the linkage of circuit control and mechanics, the displacement of the sawtooth grating can be adjusted at the network terminal, making the product more intelligent and the overall grating component product structure size smaller.

[0038] The formula for obtaining the calibration parameter curve is: λn =K1*a+K2*b+C. In this formula, P λnrepresents the power signal of different wavelengths, a and b are the voltage digital parameters in the X direction and Y direction respectively, K1 and K2 are the constant parameters of the calibration curve, and C is the compensation parameter. The application of this formula enables the MEMS system 7 to accurately calculate the control parameters required for different wavelengths.

[0039] The working principle of the present invention is as follows: First, the three pins of the MEMS system 7 are connected to the circuit board and powered. Then, the rotational vibration of the MEMS system 7 is controlled by software, thereby driving the sawtooth grating 6 above to deflect. This deflection adjusts the incident angle of the sawtooth grating 6 receiving the output light signal from the planar waveguide grating. As the angle between the incident light beam signal and the sawtooth slanted groove surface of the sawtooth grating changes, the wavelength of the reflected light signal also changes accordingly.

[0040] The MEMS system 7 is a micro-electromechanical system, which belongs to the prior art, but its application in the present invention is innovative. The internal structure of this chip is usually at the nanometer level, and it is an independent intelligent control system. It integrates multiple functional units such as sensors, memory, micro-suspended mechanical vibration devices, voltage and current systems, and control circuits on the chip through semiconductor etching technology.

[0041] The working process of the MEMS system 7 includes the following steps: First, the control parameters of the external product are calibrated and stored in the memory in the chip. In actual use, by inputting the corresponding data, the MEMS chip uses different voltages or currents to control the swing amount of its mechanical device in the three-dimensional direction, thereby driving the displacement of the external product (the sawtooth grating 6 in the present invention) and finally realizing the required function.

[0042] The specific process of wavelength adjustment is as follows: by calibrating the input horizontal and vertical coordinate voltages, the MEMS mechanical axis is deflected to the specified position, thereby obtaining different deflection angles and outputting power signals of different wavelengths. This process can be described by the formula mentioned above: λn =K1*a+K2*b+C. After the calibration parameter curve is written into the MEMS chip memory, in actual application, only different voltage parameters need to be input to control the acquisition of wavelength optical signals with different maximum powers.

[0043] The sawtooth grating 6 used in the present invention is also prior art, but its application in the present invention is innovative. The working principle of the sawtooth grating 6 is to design a specific reflection or transmission diffraction grating structure that produces the maximum diffraction efficiency at a specific diffraction level. In this structure, the optical power at the designed diffraction level accounts for the majority, while the optical power loss at other levels (especially the zeroth order) is minimal. Based on this design, each specific sawtooth grating corresponds to a specific wavelength.

[0044] The operation of a sawtooth grating 6 can be described by the grating equation:∧ *( s i n θi -sinθd)=m*λ. Where m is the grating order, ∧ is the grating period, λ is the wavelength, θi is the incident angle of the light beam, and θd is the reflection angle of the light beam after diffraction. θd When the diffracted beam signal satisfies this equation, coherent wavelength interference of wavelengths will occur in the imaging plane. For different wavelengths, the grating equation can be satisfied at different points in the imaging plane, so different independent wavelength beams can be separated after grating diffraction.

[0045] The present invention combines the sawtooth grating 6 and the MEMS system 7 and applies them to the wavelength adjustment of the wavelength division component. This combination solves an important problem of the wavelength division component in the prior art: the output wavelength is fixed and cannot be adjusted once installed. This problem results in the need to re-lay new optical components when a new wavelength is needed, which greatly increases the complexity and cost of the system.

[0046] The present invention not only solves this technical problem by innovatively combining the prior art, but also brings significant progress to the wavelength division component. It makes the wavelength adjustment flexible and precise, greatly improving the adaptability and efficiency of the system. Therefore, although the present invention belongs to a combined invention, in view of the particularity of the technical problem it solves and the significant progress it brings, the present invention has made an outstanding substantial contribution to the prior art.

[0047] Example 2

[0048] like Figure 1-3 As shown, this embodiment describes in detail the specific structure and working principle of a sawtooth grating wavelength division component. The wavelength division component is mainly composed of two parts: an optical transmission waveguide structure and an output coupling receiving structure. An adjustment structure is arranged between the two parts to achieve precise adjustment of the wavelength of the optical signal.

[0049] The optical transmission waveguide structure is the input part of the wavelength division component, which includes an optical fiber array 3, a planar waveguide grating 4 and a single-curved array silicon lens 5 in the direction of the incident light beam. The arrangement order of these three elements ensures that the optical signal can be effectively transmitted and processed.

[0050] The optical fiber array 3 is the initial input point of the optical signal, and it consists of three main parts: a bottom plate 3-2 with a light array positioning groove, a flat cover plate 3-1 arranged on the bottom plate 3-2, and a tail end protection glue 3-3. This structural design not only ensures the precise positioning of the optical fiber, but also provides the necessary protection to prevent the optical fiber from being damaged by the external environment.

[0051] The planar waveguide grating 4 is the core component of optical signal processing, which includes a planar grating waveguide chip 4-1 and a protective cover 4-2. The waveguide chip is responsible for dividing the input optical signal into multiple paths, while the protective cover ensures the safety and stable operation of the chip.

[0052] The output coupling receiving structure is the output part of the wavelength division component, which includes a concave reflector 8 and a hyperbolic array silicon lens 9. The concave surface of the concave reflector 8 is arranged opposite to the sawtooth slanted groove surface of the sawtooth grating 6. This arrangement can effectively collect and reflect the optical signal from the sawtooth grating.

[0053] It should be noted that the embodiments of the present invention are not limited to Figure 3 The four-way optical transmission waveguide structure shown here, as well as the optical signal input mode are not limited to the optical fiber array coupling mode, and the final output coupling receiving mode is not limited to the hyperbolic array silicon lens receiving mode. In addition, the MEMS chip mentioned in the present invention is a micro-electromechanical combined driving mode device, which is not specifically described in the present invention. The focus of the present invention is to provide a wavelength division component with a sawtooth grating structure to achieve adjustable wavelength. The following description takes the four-way optical signal transmission as an example for detailed explanation.

[0054] like Figure 3 As shown in the optical path structure diagram, the present invention is designed to divide the input optical signal into multiple wavelengths and output them in parallel through the plane waveguide grating 4, and then collimate it through the single-curved array silicon lens 5 and input it into the sawtooth grating 6. The sawtooth grating 6 can receive the light beam signal output from each path. After the light beam signal is diffracted and reflected by the sawtooth grating 6, it will reflect light signals of different wavelengths. After the light signal is reflected twice by the concave reflector 8, it is finally output in parallel after being focused by the hyperbolic array silicon lens 9. When the wavelength needs to be changed, different parameters are input to drive the MEMS system 7 to adjust the position of the sawtooth grating 6, so that the incident angle of the received light signal changes, and finally light signals of different wavelengths are obtained.

[0055] Example 3

[0056] This embodiment discloses the assembly method and working principle of the present invention. The assembly process of the present invention is as follows: First, the LC optical interface 1 is assembled with the optical fiber array 3, and then coupled with the input waveguide of the planar waveguide grating 4. Next, the single-curved array silicon lens 5 is coupled with the output waveguide of the planar waveguide grating 4 to make the output light parallel light. These components are combined to form an integral component and bonded to the base plate 2.

[0057] Then, the base of the MEMS system 7 is bonded to the groove at the tail of the bottom plate, and the sawtooth grating 6 is bonded to the mechanical rotating plane on the MEMS system. This step is the key to achieve wavelength adjustment. Next, the concave reflector 8 is bonded to the bottom plate, and its position is adjusted to ensure that the reflected light signal from the sawtooth grating can be fully received. Finally, the hyperbolic array silicon lens 9 is bonded to the bottom plate, located in front of the concave reflector, and its position is adjusted so that the reflected light signal can be output in parallel.

[0058] The working principle of the present invention is as follows: the optical signal is first coupled into the planar waveguide grating 4 through the optical fiber array 3. In the planar waveguide grating, the optical signal is divided into multiple beam signals, and then output in parallel from the output waveguide of the planar waveguide grating. These beam signals then pass through the single curved array silicon lens 5 and are output in a parallel state.

[0059] Next, the optical signal is diffracted and reflected by the sawtooth grating 6. After multiple interferences, the reflected wavelengths of multiple paths with the same phase form optical signals of different independent wavelengths. These optical signals are finally output in parallel through the concave reflector 8 and the hyperbolic array silicon lens 9.

[0060] Example 3

[0061] This embodiment provides an improved sawtooth grating wavelength division component, which, while retaining the core functions of the aforementioned embodiments, adds a temperature compensation mechanism and an automatic calibration system, thereby further improving the stability and accuracy of the component.

[0062] First, a micro temperature sensor and a thin film heater are installed on the base plate 2 of the component. The temperature sensor monitors the operating temperature of the component in real time, while the thin film heater is used to adjust the temperature when necessary. These two components are connected to the MEMS system 7 to form a closed-loop control system.

[0063] The firmware of the MEMS system 7 has been upgraded to include a temperature compensation algorithm. The algorithm is based on a pre-established temperature-wavelength shift model and can automatically adjust the position of the sawtooth grating 6 according to the current temperature to compensate for the wavelength shift caused by temperature changes. This design greatly improves the stability and reliability of the component under different ambient temperatures.

[0064] Secondly, this embodiment adds a small spectrum analyzer at the output end. This spectrum analyzer adopts micro-Chuanganqi technology, is small in size, and can be directly integrated behind the hyperbolic array silicon lens 9. The spectrum analyzer samples the output optical signal, analyzes its wavelength and intensity in real time, and feeds the data back to the MEMS system 7.

[0065] Based on this feedback system, the software of the MEMS system 7 is further optimized and an automatic calibration function is added. The system can automatically start the calibration procedure regularly or when it detects that the output wavelength deviates from the preset value. During the calibration process, the MEMS system 7 will fine-tune the position of the sawtooth grating 6 until the output wavelength reaches the desired value. This self-calibration mechanism ensures the accuracy of the component's long-term operation and reduces the need for manual maintenance.

[0066] In order to improve the working efficiency of the components, this embodiment also adds a preset wavelength mode to the MEMS system 7. The operator can pre-set multiple sets of commonly used wavelengths through the external interface, and the MEMS system 7 will store these settings in the internal memory. In actual use, it is only necessary to quickly switch to the desired wavelength through a simple command, which greatly improves the convenience of operation.

[0067] In addition, this embodiment adds an anti-reflection coating on the planar waveguide grating 4 in the optical transmission waveguide structure. This coating can effectively reduce the loss of the optical signal during the transmission process and improve the overall optical efficiency. At the same time, nanometer-level precision polishing technology is also applied to the surface of the sawtooth grating 6 to further improve the diffraction efficiency of the grating.

[0068] In order to enhance the environmental adaptability of the component, this embodiment adopts a fully enclosed design. Except for the necessary optical windows, the entire component is sealed in a cavity filled with inert gas. This design not only protects the precision optical components from dust and moisture, but also further improves the temperature control effect.

[0069] Finally, in order to facilitate system integration and remote management, this embodiment adds a micro Ethernet interface to the MEMS system 7. Through this interface, the wavelength division component can directly communicate with the upper control system to achieve remote monitoring and adjustment. The system administrator can view the working status of the component in real time through the network, including the current output wavelength, temperature, light intensity and other parameters, and make remote adjustments when necessary.

[0070] These improvements make the sawtooth grating wavelength division component of this embodiment not only maintain the advantage of wavelength tunability, but also have higher stability, accuracy and manageability. It is particularly suitable for optical communication systems that require long-term stable operation, frequent wavelength switching or remote management, such as large data centers, remote scientific research sites or submarine cable systems.

[0071] Example 4

[0072] This embodiment discloses an optical module, which uses the sawtooth grating wavelength division component disclosed in embodiment 1, including an LC optical interface 1 and a bottom plate 2, on which a single-fiber optical fiber array 3, a sawtooth grating wavelength division component and an array hyperbolic silicon lens 6 arranged in sequence are arranged. The single-fiber optical fiber array 3 includes a bottom plate 3-1 with an optical fiber positioning groove, a flat cover plate 3-2 arranged on the bottom plate 3-1, and a tail end protective glue 3-3.

[0073] The present invention uses silicon photonic integration technology to integrate different types of gratings together, making them more compact. Each optical signal is transmitted separately, and the transmission between optical fiber signals with separated wavelengths is less affected by interference. Different Bragg grating lengths and periods can be flexibly set according to the layout of the channel to obtain different reflection wavelengths, which is more flexible in communication network applications.

[0074] It should be understood that the size of the serial numbers of the steps in the above embodiments does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0075] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A sawtooth grating wavelength division component, comprising an optical transmission waveguide structure and an output coupling receiving structure, characterized in that: An adjustment structure for adjusting the wavelength of an optical signal is arranged between the optical transmission waveguide structure and the output coupling receiving structure, the adjustment structure comprising a MEMS system (7) and a sawtooth grating (6) connected to an active end of the MEMS system (7), the sawtooth grating sawtooth grating (6) having a sawtooth slanted groove surface facing the optical signal output end of the optical transmission waveguide structure and the optical signal input end of the output coupling receiving structure.

2. The sawtooth grating wavelength division component according to claim 1, characterized in that: The MEMS system (7) comprises a PCBA, on which a control component and a flexible mechanical sheet rotating shaft device are arranged, the control component comprises a sensor module (7.2), a voltage control module (7.3), a storage module (7.4) and a transmission control module (7.5), the flexible mechanical sheet rotating shaft device comprises a mechanical rotating middle shaft (7.1), the mechanical rotating middle shaft (7.1) realizes rotation adjustment through the voltage control module (7.3), two X-axis flexible mechanical sheet rotating shafts (7.6) arranged in mirror symmetry and two Y-axis flexible mechanical sheet rotating shafts (7.7) arranged in mirror symmetry are arranged on the mechanical rotating middle shaft (7.1), the central axis of the X-axis flexible mechanical sheet rotating shaft (7.6) and the central axis of the Y-axis flexible mechanical sheet rotating shaft (7.7) are perpendicular to each other, the X-axis and the Y-axis are designed as an integrated structure, and the PCBA is also provided with a groove structure (7.8) for limiting the rotation amplitude of the Y-axis flexible mechanical sheet rotating shaft (7.7).

3. The sawtooth grating wavelength division component according to claim 1, characterized in that: The MEMS system (7) drives the sawtooth grating (6) connected above the mechanical axis to slightly change in the three directions of X / Y / Z by controlling the rotation of the rotating shaft and the resonant vibration of the rotating shaft, and finally adjusts the incident angle of the output light signal received by the sawtooth grating (6) from the light transmission waveguide structure, so that the angle of the received incident light beam signal is different from the angle of the sawtooth grating sawtooth inclined groove surface, thereby changing the wavelength of the reflected light signal.

4. The sawtooth grating wavelength division component according to claim 1, characterized in that: The MEMS system (7) adjusts the voltage through a voltage module circuit, and different voltages form different rotation axis displacement positions and different amplitudes of resonance axis change amplitudes, thereby controlling the displacement of the sawtooth grating (6) in the X, Y, and Z directions in a linked manner.

5. The sawtooth grating wavelength division component according to claim 4, characterized in that: The MEMS system (7) stores a calibration parameter curve, and collects the MEMS system voltage values ​​corresponding to different wavelengths through calibration. The calibration parameter curve acquisition formula is as follows: the power signal P of different wavelengths λn =K1*a+K2*b+C, where a is the voltage parameter corresponding to the displacement of the resonant axis of the MEMS system in the X direction, b is the voltage parameter corresponding to the displacement of the resonant axis of the MEMS system in the Y direction, K1 and K2 are constant parameters of the calibration curve, and C is the compensation parameter.

6. The sawtooth grating wavelength division component according to claim 1, characterized in that: The optical transmission waveguide structure comprises an optical fiber array (3), a planar waveguide grating (4) and a single-curved array silicon lens (5) which are sequentially arranged along the direction of an incident light beam.

7. The sawtooth grating wavelength division component according to claim 6, characterized in that: The optical fiber array (3) comprises a bottom plate (3-2) with a light array positioning groove, a flat cover plate (3-1) arranged on the bottom plate (3-2), and tail end protection glue (3-3).

8. The sawtooth grating wavelength division component according to claim 5, characterized in that: The planar waveguide grating (4) comprises a planar grating waveguide chip (4-1) and a protective cover plate (4-2).

9. The sawtooth grating wavelength division component according to claim 1, characterized in that: The output coupling receiving structure comprises a concave reflector (8) and a hyperbolic array silicon lens (9), wherein the concave surface of the concave reflector (8) is arranged opposite to the sawtooth-shaped inclined groove surface of the sawtooth grating (6).

10. An optical module, characterized in that: Comprising the sawtooth grating wavelength division component as described in any one of claims 1-9.

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