Measuring system

Abstract

Provided is a system for measuring the state of a rotating member rotatable about a rotating member axis. The system (100) is provided with a measurement device (105) which is provided with a rotation mechanism (106), a support member (107) which is rotatable about a support member axis (108) by means of the rotation mechanism (106), and a displacement meter (109) which is disposed on the support member (107), and the system (100) is further provided with a reference inclined surface (110), the displacement meter (109) being configured so as to measure the distance to the reference inclined surface (110). The rotating member (101) is fixed at a specified measurement position, the rotating mechanism (106) rotates the support member (107) at the measurement position of the rotating member (101), and the displacement meter (109) measures the distance to the reference inclined surface (110) at a plurality of scanning angles based on the rotation of the support member (107), and measures the state of the rotating member (101) on the basis of the distances at the plurality of scanning angles.

Description

Technical Field

[0001] The present invention relates to a measuring system capable of directly, highly accurately and simply measuring the state of a rotating component. Background Art

[0002] The workpiece is arranged at an arbitrary position on the surface of a rotating component and the rotating component is rotated while processing and / or inspecting the workpiece. In the case where the workpiece needs to be positioned with high precision for processing and / or inspection, it is necessary to use the position on the surface of the rotating component as a measurement position to directly and accurately measure the rotational movement angle. For example, in the case where a gyro sensor is arranged at the measurement position, the rotational movement angle can be directly measured. In addition, the rotational movement angle can be measured by a rotary encoder. Furthermore, it is necessary to accurately measure the perpendicularity or parallelism of the surface of the rotating component relative to the axis of the rotating component and the axis of the rotating component relative to the reference plane. In the case of processing a workpiece arranged on the surface of the rotating component without adjusting the perpendicularity or parallelism, a processing error occurs in the workpiece. For example, a displacement meter is scanned on the surface of the rotating component using a precision plate, a three-dimensional measuring instrument, etc., and the scanning result is calculated to measure the perpendicularity and parallelism.

[0003] Patent document 1 discloses a mobile environment recognition method, which projects a cone scanning detection light from a sensor origin that scans in a direction along a conical surface with a collimated direction as the center, onto a measured object, receives the cone scanning detection light reflected from an intersection circle of the cone scanning detection light and the surface of the measured object to measure the distance from the sensor origin to the measured object, calculates a feature value of the intersection circle based on the measured distance, and obtains the shape of the surface of the measured object using the feature value of the intersection circle.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2011-059071 Summary of the invention

[0007] The detection resolution of the gyro sensor is only at the level of 1 / 10° even if it is highly accurate. The gyro sensor has the problem of not being able to measure the rotational movement angle with high accuracy, for example, at the level of 1 / 3600°. In addition, the scale plate of the rotary encoder needs to be arranged coaxially with the axis of the rotating component, and the rotational movement angle as the measurement position cannot be directly measured. Furthermore, deformation occurs in the component from the axis of the rotating component to the measurement position, so the rotary encoder has the problem of inconsistency between the rotational movement angle on the axis of the rotating component and the actual rotational movement angle at the measurement position. This is particularly significant when the axis of the rotating component is horizontal and a gravity load is applied in the rotation direction of the measurement position. In addition, in order to measure verticality and parallelism, large-scale equipment is generally required, and there is a problem that the measurement environment cannot be constructed in a narrow space.

[0008] In the mobile environment recognition method of Patent Document 1, the measurement result of the distance from the sensor origin to the measurement object changes according to the posture of the measurement object, and the feature value of the intersection circle obtained based on the measurement result also changes, so there is a problem that the shape of the surface of the required measurement object also changes.

[0009] Therefore, an object of the present invention is to solve the above-mentioned problems and to provide a measuring system capable of directly, highly accurately and simply measuring the state of a rotating component.

[0010] According to one aspect of the present invention, a system is provided for measuring a state of a rotating member that can rotate about an axis of the rotating member, wherein the system comprises a measuring device, the measuring device comprising a rotating mechanism, a supporting member that can rotate about an axis of the supporting member through the rotating mechanism, and a displacement meter arranged on the supporting member, the system further comprising a reference inclined surface, the displacement meter being configured to measure a distance to the reference inclined surface, the rotating member being fixed at a specified measurement position, the rotating mechanism rotating the supporting member at the measurement position of the rotating member, the displacement meter measuring the distance to the reference inclined surface at a plurality of scanning angles based on the rotation of the supporting member, and the state of the rotating member being measured based on the distances at the plurality of scanning angles.

[0011] According to a specific example of the present invention, in the system, a rotating component is fixed at a plurality of designated measurement positions, a rotating mechanism rotates a supporting component at each designated measurement position of the rotating component, and a displacement meter measures the distance to a reference inclined surface at a plurality of scanning angles based on the rotation of the supporting component.

[0012] According to a specific example of the present invention, in the system, the displacement meter measures the distance waveform at the distance to the reference inclined surface relative to each scanning angle at each designated measurement position, and measures the rotational movement angle of each designated measurement position of the rotating component based on the phase difference between the distance waveforms at multiple designated measurement positions.

[0013] According to a specific example of the present invention, in the system, the rotating mechanism starts rotating the displacement meter from the same position via the supporting member relative to the rotating member at each designated measurement position.

[0014] According to a specific example of the present invention, in the system, the axis of the supporting component is parallel to the axis of the rotating component.

[0015] According to a specific example of the present invention, in the system, the displacement meter measures the distance to the reference inclined surface along a direction parallel to the axis of the supporting member.

[0016] According to a specific example of the present invention, in the system, the displacement meter measures the distance to the reference inclined surface along a direction inclined relative to the axis of the supporting member.

[0017] According to a specific example of the present invention, in this system, a measuring device is configured on the surface of a rotating component, and a reference inclined surface is configured to be opposite to the measuring device by being inclined at a specific angle relative to a plane perpendicular to the axis of the rotating component, or the reference inclined surface is configured on the surface of the rotating component by being inclined at a specific angle relative to a plane perpendicular to the axis of the rotating component, and the measuring device is configured to be opposite to the reference inclined surface in a plane perpendicular to the axis of the rotating component.

[0018] According to a specific example of the present invention, in this system, when a rotating part is rotated in a manner so that the surface of the rotating part is approximately perpendicular to the axis of the rotating part, the perpendicularity of a portion of the surface of the rotating part where a measuring device or a reference inclined surface is configured relative to the axis of the rotating part is measured based on the distance to a reference inclined surface.

[0019] According to a specific example of the present invention, in the system, when a rotating part is rotated in a manner so that the surface of the rotating part is approximately parallel to the axis of the rotating part, the parallelism of a portion of the surface of the rotating part where a measuring device or a reference inclined surface is configured relative to the axis of the rotating part is measured based on the distance to the reference inclined surface.

[0020] According to the present invention, the measuring system can directly, highly accurately, and easily measure the state of a rotating component.

[0021] Furthermore, other objects, features, and advantages of the present invention will become more apparent from the following description of the embodiments of the present invention taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a front view of a system for measuring a state of a rotating member rotatable about a rotating member axis as one embodiment of the present invention.

[0023] Figure 2A yes Figure 1A stereoscopic view of the rotating components and the rotating device in the system of an embodiment.

[0024] Figure 2B yes Figure 1 A stereoscopic view of a rotating component, a rotating device, and a measuring device in a system of an embodiment of the present invention.

[0025] Figure 2C yes Figure 1 A stereoscopic view of a measuring device in a system of an embodiment of the present invention.

[0026] Figure 3A yes Figure 1 A front view and a top view of a system of an embodiment of the present invention when the rotational movement angle of the rotating component is 0° and the displacement meter is at the scanning starting point.

[0027] Figure 3B yes Figure 1 A front view and a top view of a system of an embodiment of the present invention when the rotational movement angle of the rotating component is 180° and the displacement meter is at the scanning starting point.

[0028] Figure 4A yes Figure 1 A graph of calculated values ​​of measured distances relative to scanning angles when the rotational movement angles of the rotating member are 0° and 180° in the system of the embodiment.

[0029] Figure 4B yes Figure 1 A graph of measured values ​​of the measured distance relative to the scanning angle when the rotational movement angle of the rotating member is 0° in the system of the embodiment.

[0030] Figure 5A yes Figure 1 A graph of scanning radius with respect to tilt angle when a target measurement resolution of the rotational movement angle of the rotating component is satisfied in a system of an embodiment of the present invention.

[0031] Figure 5B yes Figure 1 A graph of the peak-to-peak value of a distance waveform relative to the tilt angle in a system of an embodiment of the present invention.

[0032] Fig. 6A is from Figure 1 A perspective view of a system of an embodiment of the present invention is shown in which the arrangement position of the measuring device relative to the rotating member is changed so that the axis of the supporting member is aligned with the axis of the rotating member.

[0033] Figure 6B is from Figure 1 A stereoscopic view of a system of an embodiment of the present invention when the reference inclined surface is changed to be arranged on a rotating member.

[0034] Fig. 7A It is a front view of a system for measuring the state of a rotating member rotatable about the rotating member axis as another embodiment of the present invention.

[0035] Figure 7B yes Fig. 7A A perspective view of a system of an embodiment of the present invention.

[0036] Fig. 8A yes Fig. 7A A stereoscopic view of the rotating components and the rotating device in the system of an embodiment.

[0037] Figure 8B yes Fig. 7A A stereoscopic view of a rotating component, a rotating device, and a measuring device in a system of an embodiment of the present invention.

[0038] Fig.9A yes Fig. 7A A side view of a system in an embodiment of the present invention, in which the rotational movement angle of the rotating component is 0° and the displacement meter is at the scanning start point.

[0039] Fig. 9B yes Fig. 7A A side view of a system in an embodiment of the present invention, in which the rotational movement angle of the rotating component is 90° and the displacement meter is at the scanning start point.

[0040] Fig. 9C yes Fig. 7A A side view of a system in an embodiment of the present invention, in which the rotational movement angle of the rotating component is 180° and the displacement meter is at the scanning start point.

[0041] Fig. 10A yes Fig. 7A A graph of measured values ​​of the measured distance relative to the scanning angle when the rotational movement angle of the rotating member is 0° in the system of the embodiment.

[0042] Fig. 10B yes Fig. 7A A graph of measured values ​​of the measured distance relative to the scanning angle when the rotational movement angle of the rotating member is 90° in the system of the embodiment.

[0043] Fig. 10C yes Fig. 7A A graph of measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member is 180° in the system of the embodiment.

[0044] Fig.11 is from Fig. 7A A stereoscopic view of a system of an embodiment of the present invention when the reference inclined surface is changed to be arranged on a rotating member.

[0045] Fig.12 It is a front view of a system for measuring the state of a rotating member rotatable about the rotating member axis as another embodiment of the present invention.

[0046] Fig.13 yes Fig.12 A stereoscopic view of a measuring device in a system of an embodiment of the present invention.

[0047] Fig.14 yes Fig.12 A graph of calculated values ​​of measured distances relative to scanning angles when the rotational movement angles of the rotating member are 0° and 180° in the system of the embodiment.

[0048] Fig.15A yes Figure 1 A front view of a system according to an embodiment of the present invention, in which the rotational movement angle of the rotating member is 0° and the scanning angle of the displacement meter is fixed.

[0049] Fig. 15B yes Figure 1 A front view of a system according to an embodiment of the present invention, in which the rotational movement angle of the rotating member is 90° and the scanning angle of the displacement meter is fixed.

[0050] Fig. 15C yes Figure 1 A front view of a system in an embodiment of the present invention in which the rotational movement angle of the rotating component is 180° and the scanning angle of the displacement meter is fixed.

[0051] Fig.16 yes Figure 1 A front view of a system of an embodiment of the present invention in which the rotational displacement angle of a rotating member is fixed and the displacement meter is rotated to measure the verticality of the surface of the rotating member.

[0052] Fig.17 yes Fig. 7A A front view of a system of an embodiment of the present invention in which the rotational displacement angle of a rotating member is fixed and the displacement meter is rotated to measure the parallelism of the surface of the rotating member.

[0053] Fig.18A It is a front view and a top view of a system for measuring the state of a rotating member rotatable about the rotating member axis as another embodiment of the present invention.

[0054] Fig.18B yes Fig.18A A front view and a top view of a system of an embodiment of the present invention when the rotational movement angle of the rotating component is 180°.

[0055] Fig.18C yes Fig.18A In the system of the embodiment of the present invention, the rotational movement angle of the rotating member is 180° and the inclination angle is Fig.18A The front view and the top view with reference to the inclined surface are configured in the same manner.

[0056] Fig.19A yes Fig.18A A graph of measured values ​​of the measured distance relative to the scanning angle when the rotational movement angle of the rotating member is 0° in the system of the embodiment.

[0057] Fig.19B yes Fig.18A A graph of measured values ​​of measured distances with respect to scanning angles when the rotational movement angle of the rotating member is 180° in the system of the embodiment.

[0058] Fig.19C yes Fig.18A In the system of the embodiment of the present invention, the rotational movement angle of the rotating member is 180° and the inclination angle is Fig.18A In the same manner, a graph of the measured values ​​of the measured distance with respect to the scanning angle in the case of referring to the inclined surface is arranged. DETAILED DESCRIPTION

[0059] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to these embodiments.

[0060] Reference Figure 1 to Figure 5B , a system 100 for measuring the state of a rotating member 101 that can rotate around a rotating member axis 102 as a center, which is one embodiment of the present invention, is described. The system 100 includes a measuring device 105, which includes a rotating mechanism 106, a supporting member 107 that can rotate around a supporting member axis 108 as a center through the rotating mechanism 106, and a displacement meter 109 arranged on the supporting member 107. The rotating member 101 can also be rotated by a rotating device 104. The rotating device 104 can also include a motor, a speed reducer, a cam mechanism, etc. to rotate the rotating member 101, but it is not limited to this, and any device that can rotate the rotating member 101 can be used. The rotating device 104 can also include a control unit for controlling the rotation of the rotating member 101, but the control unit of the rotating device 104 can also be located outside the rotating device 104. The rotating mechanism 106 can also include a motor, a speed reducer, a cam mechanism, etc. to rotate the supporting member 107, but it is not limited to this, and any device that can rotate the supporting member 107 can be used. The rotating mechanism 106 may include a control unit for controlling the rotation of the supporting member 107 and controlling the measurement of the displacement meter 109 , but the control unit of the rotating mechanism 106 may be located outside the rotating mechanism 106 .

[0061] The system 100 further includes a reference inclined surface 110. The reference inclined surface 110 is configured such that an inclination angle 112 forms an angle φ with respect to a plane perpendicular to the axis 102 of the rotating component. The displacement meter 109 is configured to measure the distance to the reference inclined surface 110. In order to measure the distance to the reference inclined surface 110, the displacement meter 109 may also include a laser distance meter, but is not limited thereto. For example, it may also include a test indicator, as long as it is a device capable of measuring the distance to the reference inclined surface 110. The reference inclined surface 110 may be a plane, and the material is not particularly limited. It is preferably a material that is compatible with the displacement meter 109 when measuring the distance to the reference inclined surface 110.

[0062] The rotating member 101 is fixed at a designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the measurement position of the rotating member 101 , and the displacement meter 109 measures the distance to the reference inclined surface 110 at a plurality of scanning angles based on the rotation of the supporting member 107 . Figure 3A The figure shows a case where the designated measurement position of the rotating member 101 is at the rotational movement angle θ=0°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate. The rotating member 101 is fixed at the rotational movement angle θ=0° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=0° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°). Figure 3B The figure shows a case where the designated measurement position of the rotating member 101 is the rotational movement angle θ=180°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate. The rotating member 101 is fixed at the rotational movement angle θ=180° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=180° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°).

[0063] When the scanning angle α of the displacement meter 109 is 0° to 360°, the measured distance L from the displacement meter 109 to the reference inclined surface 110 is obtained as a distance waveform of the following equation.

[0064] [Mathematical formula 1]

[0065]

[0066] Here, L maxθis the maximum distance detected by the displacement meter 109 to the reference inclined surface 110 when the rotational movement angle θ is the specified measurement position of the rotating member 101, and r is the scanning radius of the displacement meter 109. For example, when the displacement meter 109 is a laser distance meter, it is the distance from the support member axis 108 to the laser irradiation part of the displacement meter 109. In addition, L oθ is the reference distance, and the measurement distance L from the displacement meter 109 to the reference inclined surface 110 is the reference distance L oθ The peak-to-peak value L can be obtained by the following formula: p .

[0067] [Mathematical formula 2]

[0068]

[0069] According to the above formula, the peak-to-peak value L p The maximum distance detection L maxθ And the reference distance L oθ Therefore, even if the maximum distance detection amount L is changed due to the replacement of the displacement meter 109, the change of the installation environment, etc. maxθ And the reference distance L oθ As long as the scanning radius r and the angle φ of the tilt angle 112 do not change, the same peak-to-peak value L is obtained. p The distance waveform of the measured distance L has excellent redundancy.

[0070] like Figure 4A As shown in FIG. 1, according to [Equation 1], the distance waveform of the measured distance L relative to the scanning angle α when the rotation movement angle θ of the rotating member 101 is 0° and 180° is obtained. Figure 4A so that the reference distance L oθ Independent of the rotation angle θ and L o For example, in [Equation 1], the reference distance L is set to α+θ=90°. oθ The distance waveform is adjusted in a consistent manner independent of the rotational movement angle θ. Peak-to-peak value L p The maximum distance detection L maxθ And the reference distance L oθ It is irrelevant, so the reference distance L oθ The adjustment of can also be handled numerically. Figure 4BAs shown, the displacement meter 109 obtains a distance waveform of the measured distance L relative to the scanning angle α when the rotational movement angle θ of the designated measurement position of the rotating member 101 is 0°. The phase of the distance waveform of the measured distance L changes according to the rotational movement angle θ of the measurement position of the rotating member 101, so the displacement meter 109 can measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 relative to each scanning angle α at the rotational movement angle θ of each designated measurement position, and obtain the rotational movement angle θ of each designated measurement position of the rotating member 101 according to the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ of the plurality of designated measurement positions. For example, in the case where the reference distance L is set as described above, oθ Independent of the rotation angle θ and L o Adjust in a consistent manner and make L o When it becomes 0 in terms of value, when the rotating part 101 is fixed as a specified measurement position such as the rotational movement angle θ=0, the displacement meter 109 is used to obtain L(θ=0)=rcosαtanφ as a distance waveform of the measured distance L for each scanning angle α, and when the rotating part 101 is fixed as another specified measurement position such as the rotational movement angle θ=θ0, the displacement meter 109 is used to obtain L(θ=θ0)=rcos(α+θ0)tanφ as a distance waveform of the measured distance L for each scanning angle α. When the rotating member 101 rotates and the measurement position is rotated by the rotational movement angle θ0, the displacement meter 109 of the measuring device 105 disposed on the rotating member 101 is also rotated by the rotational movement angle θ0, and the phase of the distance waveform of the measurement distance L is also changed by θ0, so that the displacement meter 109 can measure the distance waveform of the measurement distance L with respect to each scanning angle α at the rotational movement angles θ=0 and θ0 as two designated measurement positions, and obtain the rotational movement angle θ0 of each designated measurement position of the rotating member 101 based on the phase difference between the distance waveforms of the measurement distance L at the rotational movement angles θ=0 and θ0 as the two designated measurement positions. That is, the rotational movement angle θ when the rotating member 101 is rotationally moved can be obtained by obtaining the phase difference θ0 of the distance waveforms of the two measurement distances L. In this way, the rotational movement angle θ as the measurement position of the state of the rotating member 101 can be measured based on the measurement distances L at a plurality of scanning angles α. In addition, the control unit of the measuring device 105 can also obtain the rotational movement angle θ based on the measurement distance L obtained by the displacement meter 109, but is not limited to this. For example, the rotational movement angle θ can also be obtained by a processing device located outside the rotating mechanism 106.

[0071] Regarding the rotational movement angle θ as the measurement position of the rotating member 101, although it can also be obtained from the following Figure 4BThe distance waveform of the measured distance L based on the point group data composed of the measured values ​​shown in FIG. Figure 4B The distance waveform of the measured distance L is obtained by curve fitting the point group data composed of the measured values ​​shown.

[0072] The scanning start point, which is the position where the rotation mechanism 106 starts rotating the displacement meter 109 relative to the rotating member 101 via the support member 107, may be any position relative to the rotating member 101. However, the rotation mechanism 106 needs to start rotating the displacement meter 109 from the scanning start point, which is the same position, relative to the rotating member 101 via the support member 107 at the rotational movement angle θ as each designated measurement position. For example, Figure 3A In the embodiment, the specified measurement position of the rotating member 101 is the rotational movement angle θ=0°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts rotating. Figure 3B In the embodiment, the designated measurement position of the rotating member 101 is a rotational movement angle θ=180°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate. Thus, the rotating mechanism 106 needs to start rotating the displacement meter 109 from the scanning start point (α=0°) as the same position relative to the rotating member 101 via the supporting member 107 at the rotational movement angle θ of all designated measurement positions including the rotational movement angle θ=0° and 180° as the two designated measurement positions, but the scanning start point α is not limited to 0° and may be any angle. In addition, the rotation direction of the displacement meter 109 may be any direction, but the rotating mechanism 106 needs to start rotating the displacement meter 109 in the same direction via the supporting member 107 at the rotational movement angle θ of each designated measurement position.

[0073] According to [Equation 1], the detection sensitivity ΔL becomes maximum when α+θ=90° (or 270°), and is obtained as the following equation.

[0074] [Mathematical formula 3]

[0075]

[0076] Here, Δθ is a target measurement resolution of the rotational mobility θ, and is obtained as the following equation.

[0077] [Formula 4]

[0078]

[0079] The scanning radius r, the angle φ of the tilt angle 112, and the detection sensitivity ΔL as the resolution of the displacement meter 109 may be selected so as to satisfy the target measurement resolution Δθ of the rotational movement angle θ. For example, when the measurement resolution Δθ=1 / 3600° of the rotational mobility θ is targeted and the displacement meter 109 with the detection sensitivity ΔL=0.001 mm is used, Figure 5A As shown in FIG. 1 , the scanning radius r of the angle φ relative to the tilt angle 112 is obtained when the target measurement resolution Δθ of the rotational movement angle θ of the rotating member 101 is satisfied. For example, when the angle φ of the tilt angle 112 is set to 45°, the scanning radius r that satisfies the target measurement resolution Δθ of the rotational movement angle θ is greater than 200 mm. In addition, according to [Mathematical Formula 2], as Figure 5B As shown in FIG. 1 , the peak-to-peak value L of the angle φ with respect to the tilt angle 112 is obtained when the target measurement resolution Δθ of the rotational movement angle θ of the rotating member 101 is satisfied. p For example, when the angle φ of the tilt angle 112 is set to 45°, the peak-to-peak value L that satisfies the target measurement resolution Δθ of the rotational movement angle θ is p is more than 400mm. The relationship between the angle φ of the tilt angle 112 and the scanning radius r is a value that can be realistically selected and designed for the machine, which means that the present invention can detect a high-precision rotational movement angle θ of the order of Δθ=1 / 3600°. In addition, instead of processing each distance waveform of the measured distance L, the distance waveforms of two measured distances L that differ only in phase difference are relatively compared, so the dimensional accuracy of the angle φ of the tilt angle 112 and the scanning radius r is not particularly limited. In addition, according to [Mathematical Formula 4], the displacement meter 109 having a detection sensitivity ΔL as the target can also be selected based on the angle φ of the tilt angle 112 and the scanning radius r.

[0080] exist Figure 1 to Figure 3B In the system 100, the measuring device 105 is arranged on the rotating member 101 in such a way that the supporting member axis 108 is not aligned with the rotating member axis 120, that is, in such a way that it is offset from the rotating member axis 120. Fig. 6A As shown, the measuring device 105 can also be arranged on the rotating member 101 in such a way that the supporting member axis 108 is aligned with the rotating member axis 120. Even if the arrangement position of the measuring device 105 relative to the rotating member 101 is changed, as long as the supporting member axis 108 is parallel to the rotating member axis 102, the measuring device 105 can be arranged on the rotating member 101 in a straight line. Figure 1 to Figure 3BSimilarly, in the system 100, the displacement meter 109 can measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 relative to each scanning angle α at the rotational movement angle θ as each designated measurement position, and the rotational movement angle θ of the rotating component 101 as each designated measurement position can be obtained based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ as multiple designated measurement positions.

[0081] exist Figure 1 to Figure 3B In the system 100, the measuring device 105 is arranged on the surface 103 of the rotating component 101, and the reference inclined surface 110 is arranged to be inclined at an angle φ of an inclination angle 112 relative to a plane perpendicular to the axis 102 of the rotating component, and is opposite to the measuring device 105. On the other hand, it is also possible to Figure 6B As shown in FIG. 1 , the reference inclined surface 110 is arranged on the surface 103 of the rotating member 101 at an angle φ of an inclination angle 112 relative to a plane perpendicular to the rotating member axis 102, and the measuring device 105 is arranged on a plane perpendicular to the rotating member axis 102 to face the reference inclined surface 110. Even if the arrangement positions of the measuring device 105 and the reference inclined surface 110 are changed, as long as the supporting member axis 108 is parallel to the rotating member axis 102, the measuring device 105 and the reference inclined surface 110 are arranged on the surface 103 of the rotating member 101. Figure 1 to Figure 3B Similarly, in the system 100, the displacement meter 109 can measure the distance waveform of the measurement distance L from the displacement meter 109 to the reference inclined surface 110 relative to each scanning angle α at the rotational movement angle θ as each designated measurement position, and the rotational movement angle θ of the rotating component 101 as each designated measurement position can be obtained based on the phase difference between the distance waveforms of the measurement distance L at the rotational movement angle θ as multiple designated measurement positions.

[0082] Reference Figure 7A to Figure 10C , a system 100 for measuring the state of a rotating member 101 that can rotate about a rotating member axis 102 as another embodiment of the present invention is described. Figure 1 to Figure 3B In the system 100, the rotating component 101 is arranged so that the surface 103 of the rotating component 101 is substantially perpendicular to the rotating component axis 102. Figure 7A to Figure 9C In the system 100, the rotating component 101 is arranged so that the surface 103 of the rotating component 101 is substantially parallel to the rotating component axis 102. In addition, Figure 7A to Figure 9C The structure of the system 100 is Figure 1 to Figure 3B The structure of system 100 is the same.

[0083] The rotating member 101 is fixed at a designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the measurement position of the rotating member 101 , and the displacement meter 109 measures the distance to the reference inclined surface 110 at a plurality of scanning angles based on the rotation of the supporting member 107 . Fig.9A The figure shows a case where the designated measurement position of the rotating member 101 is at the rotational movement angle θ=0°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate. The rotating member 101 is fixed at the rotational movement angle θ=0° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=0° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°). Fig. 9B The case where the designated measurement position of the rotating member 101 is the rotational movement angle θ=90° and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate is shown. The rotating member 101 is fixed at the rotational movement angle θ=90° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=90° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°). Fig. 9C The figure shows a case where the designated measurement position of the rotating member 101 is the rotational movement angle θ=180°, and the displacement meter 109 is at the scanning start point (α=0°) as the position at which the displacement meter 109 starts to rotate. The rotating member 101 is fixed at the rotational movement angle θ=180° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=180° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°).

[0084] like Fig. 10A As shown in FIG. 1 , the displacement meter 109 obtains a distance waveform of the measurement distance L relative to the scanning angle α when the rotation movement angle θ of the specified measurement position of the rotating member 101 is 0°. Fig. 10B As shown in FIG. 1 , the displacement meter 109 obtains a distance waveform of the measurement distance L relative to the scanning angle α when the rotation movement angle θ of the specified measurement position of the rotating member 101 is 90°. Fig. 10CAs shown, the displacement meter 109 obtains a distance waveform of the measured distance L with respect to the scanning angle α when the rotational movement angle θ is 180° as the designated measurement position of the rotating member 101. The phase change of the distance waveform of the measured distance L is caused by the rotational movement angle θ as the measurement position of the rotating member 101. Therefore, the displacement meter 109 can measure the distance waveform of the measured distance L from the displacement meter 109 to the reference inclined surface 110 with respect to each scanning angle α at the rotational movement angle θ as each designated measurement position, and obtain the rotational movement angle θ of each designated measurement position of the rotating member 101 based on the phase difference between the distance waveforms of the measured distance L at the rotational movement angle θ as the plurality of designated measurement positions. That is, the rotational movement angle θ when the rotating member 101 is rotationally moved can be obtained by obtaining the phase difference θ between the distance waveforms of the two measured distances L. In this way, the rotational movement angle θ as the measurement position of the state of the rotating member 101 can be measured based on the measured distances L at the plurality of scanning angles α.

[0085] The rotational movement angle θ as the measurement position of the rotating member 101 can also be obtained from Figure 10A to Figure 10C The distance waveform of the measured distance L based on the point group data composed of the measured values ​​shown in FIG. Figure 10A to Figure 10C The distance waveform of the measured distance L is obtained by curve fitting the point group data composed of the measured values ​​shown in FIG. In addition, the distance waveform of the measured distance L does not need to be obtained within the range of the scanning angle α of 0° to 360°. The distance waveform of the measured distance L in the range of the scanning angle α that has not been measured can also be obtained as shown in FIG. Figure 10A to Figure 10C As shown, the results are supplemented by curve fitting of the point group data consisting of measured values.

[0086] exist Figure 7A to Figure 9C In the system 100, the measuring device 105 is arranged on the surface 103 of the rotating member 101, and the reference inclined surface 110 is arranged to be inclined at an angle φ of an inclination angle 112 relative to a plane perpendicular to the axis 102 of the rotating member and opposite to the measuring device 105. Fig.11 As shown in FIG. 1 , the reference inclined surface 110 is arranged on the surface 103 of the rotating member 101 at an angle φ of an inclination angle 112 relative to a plane perpendicular to the rotating member axis 102, and the measuring device 105 is arranged on a plane perpendicular to the rotating member axis 102 to face the reference inclined surface 110. Even if the arrangement positions of the measuring device 105 and the reference inclined surface 110 are changed, as long as the supporting member axis 108 is parallel to the rotating member axis 102, the measuring device 105 and the reference inclined surface 110 are arranged on the surface 103 of the rotating member 101. Figure 7A to Figure 9CSimilarly, in the system 100, the displacement meter 109 is capable of measuring a distance waveform of a measurement distance L from the displacement meter 109 to a reference inclined surface 110 relative to each scanning angle α at a rotational movement angle θ as each designated measurement position, and the rotational movement angle θ of the rotating component 101 as each designated measurement position is obtained based on a phase difference between the distance waveforms of the measurement distance L at the rotational movement angle θ as multiple designated measurement positions.

[0087] Reference Figure 12~Figure 14 , a system 100 for measuring the state of a rotating member 101 that can rotate about a rotating member axis 102 as another embodiment of the present invention is described. Figure 1 to Figure 3B In the system 100, the displacement meter 109 measures the distance to the reference inclined surface 110 along a direction parallel to the axis 108 of the support member. Fig.12 as well as Fig.13 In the system 100, the displacement meter 109 measures the distance to the reference inclined surface 110 along the direction inclined at an angle β relative to the support member axis 108. Figure 1 to Figure 3B In the system 100, the displacement meter 109 is arranged on the support member 107 in a manner that the distance from the support member axis 108 is the scanning radius r. Fig.12 as well as Fig.13 In the system 100, the displacement meter 109 is arranged on the support member 107 in such a manner that the starting point for measuring the distance to the reference inclined surface 110 is substantially aligned on the support member axis 108. For example, when the displacement meter 109 is a laser distance meter, the irradiation portion of the laser of the displacement meter 109 is substantially aligned on the support member axis 108. In addition, Fig.12 as well as Fig.13 The structure of the system 100 is Figure 1 to Figure 3B The structure of system 100 is the same.

[0088] When the scanning angle α of the displacement meter 109 is 0° to 360°, the measured distance L from the displacement meter 109 to the reference inclined surface 110 is obtained as the distance waveform of the following formula: c .

[0089] [Mathematical formula 5]

[0090]

[0091] Here, L maxCθ is the maximum distance detected by the displacement meter 109 from the reference inclined surface 110 when the rotational movement angle θ is the specified measurement position of the rotating member 101. In addition, the measurement distance L from the displacement meter 109 to the reference inclined surface 110 is obtained as the following formula: C The peak-to-peak value LpC .

[0092] [Mathematical formula 6]

[0093]

[0095] like Fig.14 As shown, according to [Equation 5], the measurement distance L relative to the scanning angle α when the rotation movement angle θ of the rotating member 101 is 0° and 180° is obtained. C In addition, Fig.14 so that the reference distance L oθ The distance waveform is adjusted to be consistent regardless of the rotational movement angle θ. For example, in [Equation 5], the reference distance L when α+θ=90° is oθ Independent of the rotation angle θ, L o The distance waveform is adjusted in a consistent manner. The distance L is measured based on the rotational movement angle θ as the measurement position of the rotating member 101. C Therefore, the displacement meter 109 can measure the measurement distance L from the displacement meter 109 to the reference inclined surface 110 at each scanning angle α at the rotational movement angle θ as each designated measurement position. C The distance waveform is a measurement distance L according to the rotation movement angle θ as a plurality of designated measurement positions. C The phase difference between the distance waveforms can be used to obtain the rotational movement angle θ of the rotating member 101 at each specified measurement position. That is, the rotational movement angle θ when the rotating member 101 is rotated can be obtained by obtaining the two measurement distances L C In this way, the measured distance L under multiple scanning angles α can be obtained. C , a rotational movement angle θ as a measurement position as a state of the rotating member 101 is measured.

[0096] Reference Figure 15A to Figure 16 , a system 100 for measuring a state of a rotating component 101 rotatable about a rotating component axis 102 is described. Figure 15A to Figure 16 The structure of the system 100 is Figure 1 to Figure 3B The structure of the system 100 is the same as that of the system 100. The displacement meter 109 of the measuring device 105 is fixed relative to the rotating member 101 at a scanning angle α, the rotating member 101 is rotated 360°, and the displacement meter 109 measures the distance to the reference inclined surface 110. For example, Fig.15A As shown, when the rotational movement angle θ of the rotating member 101 is 0°, the displacement meter 109 measures the distance to the reference inclined surface 110, as shown in FIG. Fig. 15BAs shown, when the rotational movement angle θ of the rotating member 101 is 90°, the displacement meter 109 measures the distance to the reference inclined surface 110, as shown in FIG. Fig. 15C As shown, when the rotational movement angle θ of the rotating member 101 is 180°, the displacement meter 109 measures the distance to the reference inclined surface 110. The inclination of the rotating member 101 and / or the reference inclined surface 110 is adjusted in such a manner that the rotating member 101 rotates 360° and the distance to the reference inclined surface 110 measured by the displacement meter 109 becomes constant. For example, the reference inclined surface 110 may be fixed and the inclination of the rotating device 104 that rotates the rotating member 101 may be adjusted relative to the reference inclined surface 110, or the rotating device 104 may be fixed to the reference surface 111 and the inclination of the reference inclined surface 110 may be adjusted relative to the rotating member 101. Thus, the reference inclined surface 110 is arranged perpendicular to the rotating member axis 102 of the rotating member 101. In addition, the rotating member 101 may not be rotated 360°, but may be rotated less than 360°, for example, 180°.

[0097] like Fig.16 As shown, when the rotating member 101 rotates so that the surface 103 of the rotating member 101 is substantially perpendicular to the rotating member axis 102, the rotational movement angle θ of the rotating member 101 is fixed, and the rotation mechanism 106 rotates the displacement meter 109, and the displacement meter 109 measures the distance to the reference inclined surface 110 at two scanning angles α. For example, Fig.16 As shown, the scanning angle α=α s The displacement meter 109 is fixed in such a manner that the displacement meter 109 measures the distance L to the reference inclined surface 110. s The displacement meter 109 is rotated to achieve a scanning angle α=α e =α s The displacement meter 109 is fixed in a +180° manner, and the displacement meter 109 measures the distance L to the reference inclined surface 110 e The displacement of the surface 103 of the rotating member 101 where the measuring device 105 is arranged relative to the rotating member axis 102 is defined by the following formula: ref The verticality δ v .

[0098] [Mathematical formula 7]

[0099]

[0100] In addition, "substantially vertical" means that the verticality δ v, the portion of the surface 103 of the rotating member 101 where the measuring device 105 is arranged is inclined relative to the plane perpendicular to the rotating member axis 102. According to [Equation 7], the perpendicularity δ of the portion of the surface 103 of the rotating member 101 where the measuring device 105 is arranged relative to the rotating member axis 102 can be obtained: v Furthermore, the perpendicularity δ of the rotating member axis 102 relative to the reference surface 111 is v0 The verticality δ is the same value as the angle φ of the reference inclined surface 110 relative to the reference surface 111. For example, the verticality δ can be obtained by a precision level, calculation based on the maximum height and minimum height of the reference inclined surface 110 from the reference surface 111, etc. v0 In addition, regarding Figure 6B The system 100, also with Figure 15A to Figure 16 Similarly, the system 100 can obtain the perpendicularity δ of the portion of the surface 103 of the rotating member 101 on which the reference inclined surface 110 is arranged relative to the rotating member axis 102. v .

[0101] Reference Fig.17 , a system 100 for measuring a state of a rotating component 101 rotatable about a rotating component axis 102 is described. Fig.17 The structure of the system 100 is Figure 7A to Figure 9C The structure of the system 100 is the same as that of the system 100. The displacement meter 109 of the measuring device 105 is fixed at a scanning angle α relative to the rotating member 101, the rotating member 101 is rotated, and the displacement meter 109 measures the distance to the reference inclined surface 110. The inclination of the rotating member 101 and / or the reference inclined surface 110 is adjusted in such a manner that the rotating member 101 rotates and the distance to the reference inclined surface 110 measured by the displacement meter 109 becomes constant. Thus, the reference inclined surface 110 is arranged perpendicular to the rotating member axis 102 of the rotating member 101.

[0102] like Fig.17 As shown, when the rotating member 101 rotates in such a manner that the surface 103 of the rotating member 101 is substantially parallel to the rotating member axis 102, Figure 15A to Figure 16 Similarly, the rotational movement angle θ of the rotating member 101 is fixed, and the rotation mechanism 106 rotates the displacement meter 109, and the displacement meter 109 measures the distance to the reference inclined surface 110 at two scanning angles α. Fig.17 As shown, the scanning angle α=α s The displacement meter 109 is fixed in such a manner that the displacement meter 109 measures the distance L to the reference inclined surface 110. s The displacement meter 109 is rotated to achieve a scanning angle α=α e =α sThe displacement meter 109 is fixed in a +180° manner, and the displacement meter 109 measures the distance L to the reference inclined surface 110 e The displacement of the surface 103 of the rotating member 101 where the measuring device 105 is arranged relative to the rotating member axis 102 is defined by the following formula: ref The parallelism of p .

[0103] [Mathematical formula 8]

[0104]

[0105] In addition, "substantially parallel" means that the parallelism δ p , the portion of the surface 103 of the rotating member 101 where the measuring device 105 is arranged is inclined relative to the plane parallel to the rotating member axis 102. According to [Equation 8], the parallelism δ of the portion of the surface 103 of the rotating member 101 where the measuring device 105 is arranged relative to the rotating member axis 102 can be obtained: p Furthermore, the parallelism δ of the rotating member axis 102 with respect to the reference surface 111 is p0 is the same value as the angle φ of the reference inclined surface 110, and can be obtained, for example, from a square ruler or the like. Fig.11 The system 100, also with Fig.17 Similarly, the system 100 can obtain the parallelism δ of the portion of the surface 103 of the rotating member 101 on which the reference inclined surface 110 is arranged with respect to the rotating member axis 102. p .

[0106] Reference Figure 18A to Figure 19C , a system 100 for measuring the state of a rotating member 101 that can rotate around a rotating member axis 102 as another embodiment of the present invention is described. A reference inclined surface 110 is perpendicular to a surface 103 of the rotating member 101, and is configured so that an inclination angle 112 forms an angle φ with respect to the rotating member axis 102. A central axis 113 is set to be perpendicular to the rotating member axis 102 and included in the reference inclined surface 110. A measuring device 105 is configured so that a supporting member axis 108 is perpendicular to both the rotating member axis 102 and the central axis 113, and the measuring device 105 faces the reference inclined surface 110. Fig.18AThe case where the designated measurement position of the rotating member 101 is at a rotational movement angle θ=0° and the displacement meter 109 is at a scanning start point (α=0°) as a position for starting the rotation of the displacement meter 109 is shown. The rotating member 101 is fixed at a rotational movement angle θ=0° as a designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at a rotational movement angle θ=0° as a designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at a scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°). Fig.19A As shown in FIG. 1 , the displacement meter 109 obtains a distance waveform of the measurement distance L relative to the scanning angle α when the rotation movement angle θ of the specified measurement position of the rotating member 101 is 0°. Fig.19A In the embodiment, the measurement distance L is measured when the scanning angle α is 0° to 180°.

[0107] Fig.18B The case where the designated measurement position of the rotating member 101 is at a rotational movement angle θ=180° and the displacement meter 109 is at a scanning start point (α=0°) as a position at which the displacement meter 109 starts to rotate is shown. The rotating member 101 is fixed at a rotational movement angle θ=180° as a designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at a rotational movement angle θ=180° as a designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at a scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning start point (α=0°). Fig.19B As shown, the displacement meter 109 obtains a distance waveform of the measured distance L relative to the scanning angle α when the rotation movement angle θ of the specified measurement position of the rotating member 101 is 180°. Fig.19B In the embodiment, the measurement distance L is measured when the scanning angle α is 90° to 180°.

[0108] By comparing Fig.19A The distance waveform of the measured distance L obtained by Fig.19B The distance waveform of the measured distance L is obtained, and the phase difference is 180°+2δ p , thereby, the parallelism δ of the portion of the surface 103 of the rotating member 101 where the reference inclined surface 110 is arranged with respect to the rotating member axis 102 can be obtained. p In addition, Fig.18A In the example, the distance waveform of the measured distance L is obtained relative to the surface of one side of the reference inclined surface 110. Fig.18BIn the embodiment, a distance waveform of the measured distance L is obtained with respect to the other surface of the reference inclined surface 110 , and therefore it is preferable that the parallelism of the two surfaces of the reference inclined surface 110 is high.

[0109] Fig.18C The specified measurement position of the rotating member 101 is shown to be a position where the rotational movement angle θ=180° and the angle φ of the tilt angle 112 is equal to Fig.18A In the same manner, the reference inclined surface 110 is arranged and the displacement meter 109 is set at the scanning starting point (α=0°) as the position where the displacement meter 109 starts to rotate. The rotating member 101 is fixed at the rotational movement angle θ=180° as the designated measurement position, the rotating mechanism 106 rotates the supporting member 107 at the rotational movement angle θ=180° as the designated measurement position of the rotating member 101, and the displacement meter 109 measures the distance to the reference inclined surface 110 at the scanning angle α which is an arbitrary rotation angle based on the rotation of the supporting member 107 from the scanning starting point (α=0°). Fig.19C As shown, the displacement meter 109 obtains a distance waveform of the measured distance L relative to the scanning angle α when the rotation movement angle θ of the specified measurement position of the rotating member 101 is 180°. Fig.19C In the embodiment, the measurement distance L is measured when the scanning angle α is 90° to 180°.

[0110] By comparing Fig.19A The distance waveform of the measured distance L obtained by Fig.19C The distance waveform of the measured distance L is obtained, and the phase difference 2δ is obtained p , thereby, the parallelism δ of the portion of the surface 103 of the rotating member 101 where the reference inclined surface 110 is arranged with respect to the rotating member axis 102 can be obtained. p In addition, Fig.18A as well as Fig.18C In the embodiment, the distance waveform of the measured distance L can be obtained relative to the same surface of the reference inclined surface 110. Fig.18A The angle of inclination is 112 and the angle φ Fig.18C The angle φ of the tilt angle 112 is actually different, but the difference between these angles φ is only manifested as the peak-to-peak value L of the distance waveform of the two measured distances L. p The difference is obtained by dividing the peak-to-peak value L p For example, if the phase difference between the two distance waveforms at the measured distance L is 2δ, the normalization is 1. p In addition, the distance waveform of the measured distance L does not need to be obtained within the range of the scanning angle α of 0° to 360°. The distance waveform of the measured distance L within the range of the scanning angle α that has not been measured can also be obtained as follows: Figure 19A to Figure 19CAs shown, the results are supplemented by curve fitting of the point group data consisting of measured values.

[0111] Although specific embodiments have been described above, the present invention is not limited thereto, and it is apparent to those skilled in the art that various changes and modifications can be made within the scope of the principles of the present invention and the appended claims.

[0112] (Explanation of symbols)

[0113] 100: system; 101: rotating part; 102: axis of rotating part; 103: surface of rotating part; 104: rotating device; 105: measuring device; 106: rotating mechanism; 107: supporting part; 108: axis of supporting part; 109: displacement meter; 110: reference inclined surface; 111: reference plane; 112: inclination angle; 113: central axis.

Claims

1. A system for measuring the state of a rotating component that can rotate about an axis of the rotating component, wherein: The system includes a measuring device including a rotation mechanism, a support member that can rotate around a support member axis by the rotation mechanism, and a displacement meter disposed on the support member. The system further includes a reference inclined surface, and the displacement meter is configured to measure a distance to the reference inclined surface. The rotating component is fixed at a designated measurement position, the rotating mechanism rotates the supporting component at the measurement position of the rotating component, the displacement meter measures the distance to the reference inclined surface at a plurality of scanning angles based on the rotation of the supporting component, and measures the state of the rotating component based on the distances at the plurality of scanning angles.

2. The system according to claim 1, wherein: The rotating member is fixed at a plurality of designated measurement positions, the rotating mechanism rotates the supporting member at each designated measurement position of the rotating member, and the displacement meter measures the distance to the reference inclined surface at a plurality of scanning angles based on the rotation of the supporting member.

3. The system according to claim 2, wherein: The displacement meter measures a distance waveform at a distance to the reference inclined surface relative to each scanning angle at each designated measurement position, and measures a rotational movement angle of each designated measurement position of the rotating component based on a phase difference between the distance waveforms at the plurality of designated measurement positions.

4. The system according to claim 2, wherein: The rotating mechanism starts rotating the displacement meter at each designated measurement position from the same position relative to the rotating member via the supporting member.

5. The system according to claim 1, wherein: The supporting component axis is parallel to the rotating component axis.

6. The system according to any one of claims 1 to 5, wherein: The displacement meter measures the distance to the reference inclined surface along a direction parallel to the axis of the supporting member.

7. The system according to any one of claims 1 to 5, wherein: The displacement meter measures the distance to the reference inclined surface along a direction inclined relative to the axis of the supporting member.

8. The system according to claim 1, wherein: The measuring device is arranged on the surface of the rotating component, and the reference inclined surface is inclined at a specific angle relative to a plane perpendicular to the axis of the rotating component and is arranged opposite to the measuring device, or the reference inclined surface is inclined at a specific angle relative to a plane perpendicular to the axis of the rotating component and is arranged on the surface of the rotating component, and the measuring device is arranged opposite to the reference inclined surface in a plane perpendicular to the axis of the rotating component.

9. The system according to claim 8, wherein: When the rotating member is rotated so that the surface of the rotating member is substantially perpendicular to the axis of the rotating member, the perpendicularity of a portion of the surface of the rotating member where the measuring device or the reference inclined surface is arranged relative to the axis of the rotating member is measured based on the distance to the reference inclined surface.

10. The system according to claim 8, wherein: When the rotating member is rotated so that the surface of the rotating member is substantially parallel to the axis of the rotating member, the parallelism of a portion of the surface of the rotating member where the measuring device or the reference inclined surface is arranged with respect to the axis of the rotating member is measured based on the distance to the reference inclined surface.

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