Integrated equipment for detecting and repairing fine metal mask

Abstract

The invention relates to the technical field of fine metal mask processing, in particular to fine metal mask detection and repair integrated equipment which comprises a repair platform and a comprehensive repair head, and the comprehensive repair head is arranged above the repair platform and performs three-dimensional motion relative to the repair platform; the repairing platform comprises a mounting seat, an ESC adsorption platform, a porous ceramic adsorption platform and a backlight mechanism; the comprehensive repairing head comprises a large mounting plate, a dust sticking mechanism, a repairing mechanism, detection mechanisms and a grinding mechanism, the large mounting plate is arranged above the repairing platform in the X direction, the dust sticking mechanism is mounted at the left end of the large mounting plate, the repairing mechanism is mounted in the middle of the large mounting plate, and the detection mechanisms are arranged on the right side of the repairing mechanism in parallel and used for detecting defects on products; the grinding mechanism is mounted at the right end of the mounting large plate; the invention provides the detection and repair integrated equipment for the fine metal mask, which integrates detection and repair, ensures the repair efficiency and precision, and is low in cost and high in repair capacity.

Description

Technical Field

[0001] The invention relates to the technical field of fine metal mask processing, and in particular to a fine metal mask detection and repair integrated equipment. Background Art

[0002] Fine metal mask (FMM) repair is a necessary means to improve the yield after FMM wet etching. Fine metal mask repair mainly includes laser repair, grinding belt bump grinding repair and particle dust adhesion.

[0003] The existing fine metal mask repair is mainly carried out through AOI (online monitoring) equipment to detect defects (leakage holes, residual glue, bumps, etc.), and export the defect coordinate information to the repair equipment for repair. Since the detection and repair are performed independently by two devices, the product is prone to damage when it is circulated back and forth, which affects the improvement of yield. In addition, there are coordinate system and precision errors between the two devices, resulting in low repair efficiency and precision, and the cost of the two devices is also very high. In addition, in laser repair, due to the different absorption rates of various defects to laser wavelengths, the repair ability of a single-band laser is limited. For example, the use of infrared bands can remove residual glue, but the cleaning effect on rust spots is not good; the use of ultraviolet bands can remove rust spots, but the repair ability of residual glue is not good. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide a fine metal mask inspection and repair integrated device which integrates inspection and repair, has guaranteed repair efficiency and accuracy, is low in cost, and has strong repair capability.

[0005] The technical solution adopted by the present invention to solve the technical problem is: a fine metal mask detection and repair integrated equipment, including a repair platform and a comprehensive repair head, the comprehensive repair head is arranged above the repair platform, and it moves three-dimensionally relative to the repair platform; the repair platform includes a mounting seat, an ESC adsorption platform, a porous ceramic adsorption platform and a backlight mechanism; the comprehensive repair head includes

[0006] Install the large plate and set it above the repair platform along the X direction.

[0007] The dust sticking mechanism is installed on the left end of the installation plate and is used to clean the dust during repair.

[0008] The repair mechanism is installed in the middle of the mounting plate to repair defects on the product.

[0009] The detection mechanism is arranged on the right side of the repair mechanism and is used to detect defects on the product.

[0010] and a grinding mechanism, which is installed at the right end of the mounting plate and is used for detecting and grinding protrusions on the product.

[0011] Furthermore, the repair mechanism includes a mounting plate, a moving seat, a switching assembly, a laser and a first objective lens. The mounting plate is vertically mounted on the large mounting plate. The moving seat is arranged in parallel below the mounting plate and is connected to the mounting plate through the switching assembly. There are several lasers arranged in an array on the mounting plate. A plurality of circular holes corresponding to the lasers are opened in the middle of the mounting plate. There are several types of the first objective lens, which are arranged in an array on the moving seat.

[0012] Furthermore, the switching assembly includes a moving plate, a Y-direction drive group and an X-direction drive group, the moving plate is slidably mounted on the bottom end of the mounting plate, the Y-direction drive group is arranged on the right side of the mounting plate to drive the moving plate to move along the Y-direction, a square hole is opened in the middle of the moving plate, the moving seat is slidably mounted on the bottom end of the moving plate, and its top end extends into the square hole, and the X-direction drive group is arranged on the rear side of the moving plate to drive the moving seat to move along the X-direction.

[0013] Furthermore, the detection mechanism includes a connecting plate, a focusing sensor, a line scan camera, a detection light source, a Z-direction module and a second objective lens. The focusing sensor is mounted on the mounting plate through the connecting plate. The line scan camera and the detection light source are both mounted on the focusing sensor. The Z-direction module is mounted on the connecting plate and is arranged on the left side of the focusing sensor. The second objective lens is arranged below the focusing sensor, and its top end is connected to the slide plate of the Z-direction module through an angle plate.

[0014] Furthermore, the dust sticking mechanism includes an inclined plate, a camera assembly, a telescopic cylinder, a mounting block and a dust sticking rod, the inclined plate is installed at the left end of the mounting plate, the camera assembly is installed on the inclined plate, the cylinder body of the telescopic cylinder is obliquely installed on the inclined plate and is arranged on the left side of the camera assembly, and the dust sticking rod is installed on the driving end of the telescopic cylinder through the mounting block.

[0015] Furthermore, the grinding mechanism includes a connecting frame, a measuring assembly and a grinding assembly, the connecting frame is installed at the right end of the mounting plate, the measuring assembly is installed in the connecting frame, and the grinding assembly is installed on the front side of the connecting frame.

[0016] Furthermore, the ESC adsorption platform includes a glass electrostatic platform, a screw, a transverse wedge, a lifting wedge and a first driving component. The glass electrostatic platform is arranged in the middle of the mounting seat along the X direction. The screw is rotatably installed in the mounting seat along the X direction and is arranged below the glass electrostatic platform. There are two screws, which are arranged in parallel along the Y direction. There are several transverse wedges, which are evenly distributed along the axial direction of the screw. The transverse wedge is threadedly sleeved on the screw, and its bottom end is slidably connected to the mounting seat. The lifting wedge is arranged opposite to the transverse wedge, and its inclined surface is slidably connected to the inclined surface of the transverse wedge. The top of the lifting wedge is connected to the bottom end of the glass electrostatic platform, and its right side is slidably connected to the fixed plate in the mounting seat. The first driving component drives the two screws to rotate synchronously.

[0017] Furthermore, the porous ceramic adsorption platform includes a fixed frame, a movable frame, a porous ceramic platform and a second driving component. The fixed frame and the movable frame are respectively arranged on the left and right sides of the ESC adsorption platform. The bottom end of the fixed frame is fixedly connected to the mounting seat, and the bottom end of the movable frame is slidably connected to the mounting seat. There are two porous ceramic platforms, which are respectively installed on the top of the fixed frame and the movable frame. The second driving component drives the movable frame to approach or move away from the fixed frame along the X direction.

[0018] Furthermore, the backlight mechanism includes an X-direction module and a backlight source, the X-direction module is arranged in the middle of the mounting seat along the X direction, and the backlight source is mounted on a slide plate of the X-direction module.

[0019] Furthermore, the repair platform also includes a calibration mechanism, which includes a calibration camera and a backlight cross, the calibration camera is installed at the right rear end of the mounting seat, and the backlight cross is installed at the left rear end of the mounting seat.

[0020] The beneficial effects of the present invention are:

[0021] (1) The integrated repair head of the present invention integrates the detection mechanism and the repair mechanism, which improves the integration of the equipment, avoids the back-and-forth flow of products between devices, and realizes direct online repair after detection and secondary detection after repair. The detection mechanism and the repair mechanism share a set of coordinate systems and execution power, avoiding the influence of repair dislocation caused by the mismatch of coordinate systems and precision, and the repair efficiency and precision are guaranteed, while significantly reducing the equipment cost.

[0022] (2) The present invention uses lasers of different bands in combination with first objective lenses of different magnifications, and uses a switching component to achieve high-precision online switching between multi-band repairs, while also achieving coaxial observation and automatic focusing after flexible switching of multi-bands, thereby fully meeting the product's demand for multi-band laser repairs.

[0023] (3) The setting of the calibration mechanism in the present invention realizes the online position and height calibration of contact processing heads such as dust sticking mechanism and grinding mechanism through the calibration camera, and performs online position and focal length calibration of non-contact processing heads such as multi-band repair mechanism, online detection mechanism and 3D measurement component through the backlight cross, thereby realizing intelligent online calibration, online defect monitoring and online multi-type repair. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 is a schematic diagram of the repair mechanism of the present invention;

[0027] Figure 3 is a schematic diagram of a switching component in the present invention;

[0028] Figure 4 is a schematic diagram of a circular hole in the present invention;

[0029] Figure 5 It is a schematic diagram of the detection mechanism in the present invention;

[0030] Figure 6 Schematic diagram of the dust sticking mechanism in the present invention;

[0031] Figure 7 is a schematic diagram of the grinding mechanism in the present invention;

[0032] Figure 8 is an internal view of the mounting base of the present invention;

[0033] Fig. 9 is a schematic diagram of the ESC adsorption platform of the present invention;

[0034] Fig.10 is a schematic diagram of the second driving assembly in the present invention;

[0035] Fig.11 It is a schematic diagram of the backlight mechanism in the present invention.

[0036] In the figure: 100, repair platform; 110, mounting seat; 120, ESC adsorption platform; 121, glass electrostatic platform; 122, lead screw; 123, lateral wedge; 124, lifting wedge; 125, first drive assembly; 126, fixed plate; 130, porous ceramic adsorption platform; 131, fixed frame; 132, movable frame; 133, porous ceramic platform; 134, second drive assembly; 140, backlight mechanism; 141, X-axis module; 142, backlight source; 150, calibration mechanism; 151, calibration camera; 152, backlight cross; 200, comprehensive repair head; 210, installation plate; 220, dust sticking mechanism; 221, inclined plate; 22 2. Camera assembly; 223. Telescopic cylinder; 224. Mounting block; 225. Dust sticking stick; 230. Repair mechanism; 231. Mounting plate; 2311. Round hole; 232. Moving seat; 233. Switching assembly; 2331. Moving plate; 23311. Square hole; 2332. Y-axis driving group; 2333. X-axis driving group; 234. Laser; 235. First objective lens; 240. Detection mechanism; 241. Connecting plate; 242. Focus sensor; 243. Line scan camera; 244. Detection light source; 245. Z-axis module; 246. Second objective lens; 250. Grinding mechanism; 251. Connecting frame; 252. Measuring assembly; 253. Grinding assembly. DETAILED DESCRIPTION

[0037] The present invention will now be further described in conjunction with the accompanying drawings and preferred embodiments. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0038] like Figure 1As shown, a fine metal mask plate detection and repair integrated equipment includes a repair platform 100 and an integrated repair head 200, the integrated repair head 200 is arranged above the repair platform 100, and it moves three-dimensionally relative to the repair platform 100; the repair platform 100 includes a mounting seat 110, an ESC adsorption platform 120, a porous ceramic adsorption platform 130 and a backlight mechanism 140; the integrated repair head 200 includes a mounting plate 210, a dust sticking mechanism 220, a repair mechanism 230, a detection mechanism 240 and a grinding mechanism 250, the mounting plate 210 is arranged above the repair platform 100 along the X direction, the dust sticking mechanism 220 is installed at the left end of the mounting plate 210, and is used to clean the dust in the repair, the repair mechanism 230 is installed in the middle of the mounting plate 210, and is used to repair defects on the product, the detection mechanism 240 is arranged in parallel on the right side of the repair mechanism 230, and is used to detect defects on the product, and the grinding mechanism 250 is installed at the right end of the mounting plate 210, and is used to detect and grind protrusions on the product. The integrated repair head 200 integrates the detection mechanism 240 and the repair mechanism 230, which improves the integration of the equipment, avoids the back-and-forth flow of products between devices, and realizes direct online repair after detection and secondary detection after repair. The detection mechanism 240 and the repair mechanism 230 share a set of coordinate systems and execution power, avoiding the influence of repair dislocation caused by mismatch of coordinate systems and precision, thereby ensuring repair efficiency and precision and significantly reducing equipment costs.

[0039] like Figure 1-Figure 3 As shown, the repair mechanism 230 includes a mounting plate 231, a moving seat 232, a switching assembly 233, a laser 234 and a first objective lens 235. The mounting plate 231 is vertically mounted on the mounting plate 210. The moving seat 232 is arranged in parallel below the mounting plate 231 and connected to the mounting plate 231 through the switching assembly 233. There are several lasers 234 arranged in an array on the mounting plate 231. The middle of the mounting plate 231 is provided with a plurality of circular holes 2311 corresponding to the lasers 234. There are several types of first objective lenses 235 arranged in an array on the moving seat 232. Specifically, there are three lasers 234, each configured with a different wavelength band. Alternatively, one integrated multi-band laser 234 may be used, and the wavelength bands may be configured as 343nm, 355nm, 515nm, 532nm, 1030nm, 1064nm, etc. By using lasers 234 of different bands in combination with first objective lenses 235 of different magnifications, the switching component 233 can realize high-precision online switching between multi-band repairs, while realizing coaxial observation and automatic focusing after flexible switching of multi-bands, thereby fully meeting the product's demand for multi-band laser repair.

[0040] like Figure 2-Figure 4As shown, the switching assembly 233 includes a moving plate 2331, a Y-direction driving group 2332 and an X-direction driving group 2333. The moving plate 2331 is slidably mounted on the bottom end of the mounting plate 231. The Y-direction driving group 2332 is arranged on the right side of the mounting plate 231 to drive the moving plate 2331 to move along the Y direction. A square hole 23311 is provided in the middle of the moving plate 2331. The moving seat 232 is slidably mounted on the bottom end of the moving plate 2331, and its top end extends into the square hole 23311. The X-direction driving group 2333 is arranged on the rear side of the moving plate 2331 to drive the moving seat 232 to move along the X direction. When lasers 234 of different wavelength bands correspond to first objective lenses 235 of different magnifications, the first objective lens 235 is moved to the corresponding circular hole 2311 below the laser 234 through the coordinated movement of the moving seat 232 and the moving plate 2331.

[0041] like Figure 1 and Figure 5 As shown, the detection mechanism 240 includes a connecting plate 241, a focus sensor 242, a line scan camera 243, a detection light source 244, a Z-direction module 245 and a second objective lens 246. The focus sensor 242 is mounted on the mounting plate 210 through the connecting plate 241. The line scan camera 243 and the detection light source 244 are both mounted on the focus sensor 242. The Z-direction module 245 is mounted on the connecting plate 241 and is arranged on the left side of the focus sensor 242. The second objective lens 246 is arranged below the focus sensor 242, and its top end is connected to the slide plate of the Z-direction module 245 through an angle plate. The Z-direction module 245 drives the second objective lens 246 to rise and fall to achieve automatic focusing.

[0042] like Figure 1 and Figure 6 As shown, the dust sticking mechanism 220 includes an inclined plate 221, a camera assembly 222, a telescopic cylinder 223, a mounting block 224 and a dust sticking rod 225. The inclined plate 221 is mounted on the left end of the mounting plate 210, the camera assembly 222 is mounted on the inclined plate 221, the cylinder body of the telescopic cylinder 223 is obliquely mounted on the inclined plate 221 and is arranged on the left side of the camera assembly 222, and the dust sticking rod 225 is mounted on the driving end of the telescopic cylinder 223 through the mounting block 224.

[0043] like Figure 1 and Figure 7 As shown, the grinding mechanism 250 includes a connecting frame 251, a measuring assembly 252 and a grinding assembly 253. The connecting frame 251 is installed at the right end of the mounting plate 210, the measuring assembly 252 is installed in the connecting frame 251, and the grinding assembly 253 is installed on the front side of the connecting frame 251. The measuring assembly 252 is used to detect the profile and height of the protrusion; the grinding assembly 253 is used to grind the protrusion. The grinding mechanism 250 is a prior art and will not be described in detail here.

[0044] like Figure 1 and Fig. 9 As shown, the ESC adsorption platform 120 includes a glass electrostatic platform 121, a screw rod 122, a lateral wedge block 123, a lifting wedge block 124 and a first driving assembly 125. The glass electrostatic platform 121 is arranged in the middle of the mounting seat 110 along the X direction. The screw rod 122 is rotatably installed in the mounting seat 110 along the X direction and is arranged below the glass electrostatic platform 121. There are two screw rods 122, which are arranged in parallel along the Y direction. There are a plurality of lateral wedge blocks 123, which are arranged along the screw rod 1 22 is evenly distributed in the axial direction, the transverse wedge 123 is threadedly sleeved on the screw rod 122, and its bottom end is slidably connected to the mounting seat 110, the lifting wedge 124 is arranged opposite to the transverse wedge 123, and its inclined surface is slidably connected to the inclined surface of the transverse wedge 123, the top of the lifting wedge 124 is connected to the bottom end of the glass electrostatic platform 121, and its right side is slidably connected to the fixed plate 126 in the mounting seat 110, and the first drive component 125 drives the two screw rods 122 to rotate synchronously. Specifically, the first drive component 125 includes a synchronous motor, a synchronous shaft and a steering gear, which is the prior art. When the glass electrostatic platform 121 needs to be lifted or lowered, the first drive component 125 drives the two screw rods 122 to rotate synchronously, and the transverse wedge 123 moves axially along the screw rod 122, forcing the lifting wedge 124 to be lifted or lowered, thereby driving the glass electrostatic platform 121 to be lifted or lowered.

[0045] like Figure 1 , Fig. 9 and Fig.10 As shown, the porous ceramic adsorption platform 130 includes a fixed frame 131, a movable frame 132, a porous ceramic platform 133 and a second driving assembly 134. The fixed frame 131 and the movable frame 132 are respectively arranged on the left and right sides of the ESC adsorption platform 120. The bottom end of the fixed frame 131 is fixedly connected to the mounting seat 110, and the bottom end of the movable frame 132 is slidably connected to the mounting seat 110. There are two porous ceramic platforms 133, which are respectively installed on the top of the fixed frame 131 and the movable frame 132. The second driving assembly 134 drives the movable frame 132 to approach or move away from the fixed frame 131 along the X direction. Specifically, the second driving assembly 134 can adopt a linear motor.

[0046] like Figure 8 and Fig.11 As shown, the backlight mechanism 140 includes an X-direction module 141 and a backlight source 142. The X-direction module 141 is disposed in the middle of the mounting seat 110 along the X direction, and the backlight source 142 is mounted on a slide of the X-direction module 141. Specifically, the X-direction module 141 is disposed between two screw rods 122.

[0047] like Figure 1 and Figure 8As shown, the repair platform 100 further includes a calibration mechanism 150, which includes a calibration camera 151 and a backlight cross 152. The calibration camera 151 is mounted at the right rear end of the mounting seat 110, and the backlight cross 152 is mounted at the left rear end of the mounting seat 110. The calibration mechanism 150 is set up to realize online position and height calibration of contact processing heads such as the dust sticking mechanism 220 and the grinding mechanism 250 through the calibration camera 151, and realize online position and focal length calibration of non-contact processing heads such as the multi-band repair mechanism 230, the online detection mechanism 240 and the 3D measurement component 252 through the backlight cross 152, thereby realizing intelligent online calibration, online defect monitoring and online multi-type repair.

[0048] During operation, both ends of the product are placed on the porous ceramic adsorption platform 130, the porous ceramic adsorption platform 130 tensions and suspends the product, the integrated repair head 200 performs three-dimensional movement relative to the repair platform 100, and the line scanning camera 243 in the detection mechanism 240 performs large-scale high-speed online detection of the product; during repair, the first drive component 125 drives the glass electrostatic platform 121 to rise until its height is equal to or slightly greater than the height of the porous ceramic platform 133, and the repair mechanism 230 starts to repair; during grinding, the first drive component 125 drives the glass electrostatic platform 121 to descend until its height is less than the height of the porous ceramic platform 133, and the grinding mechanism 250 starts to grind; the dust-binding mechanism 220 cleans the dust generated during the repair and grinding process.

[0049] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A fine metal mask inspection and repair integrated device, comprising a repair platform (100) and an integrated repair head (200), wherein the integrated repair head (200) is arranged above the repair platform (100) and moves three-dimensionally relative to the repair platform (100); the repair platform (100) comprises a mounting seat (110), an ESC adsorption platform (120), a porous ceramic adsorption platform (130) and a backlight mechanism (140); characterized in that: The integrated repair head (200) comprises The large plate (210) is installed and arranged above the repair platform (100) along the X direction. The dust-binding mechanism (220) is installed at the left end of the installation plate (210) and is used to clean the dust during the repair. The repair mechanism (230) is installed in the middle of the installation plate (210) and is used to repair defects on the product. The detection mechanism (240) is arranged in parallel on the right side of the repair mechanism (230) and is used to detect defects on the product. And a grinding mechanism (250) is installed at the right end of the mounting plate (210) and is used for detecting and grinding the protrusions on the product.

2. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The repair mechanism (230) comprises a mounting plate (231), a moving seat (232), a switching assembly (233), a laser (234) and a first objective lens (235); the mounting plate (231) is vertically mounted on the mounting plate (210); the moving seat (232) is arranged in parallel below the mounting plate (231) and connected to the mounting plate (231) through the switching assembly (233); the lasers (234) are in the form of a plurality of units arranged in an array on the mounting plate (231); a plurality of circular holes (2311) corresponding to the lasers (234) are provided in the middle of the mounting plate (231); the first objective lens (235) is in the form of a plurality of units arranged in an array on the moving seat (232).

3. The fine metal mask inspection and repair integrated equipment according to claim 2, characterized in that: The switching assembly (233) comprises a moving plate (2331), a Y-direction driving group (2332) and an X-direction driving group (2333); the moving plate (2331) is slidably mounted on the bottom end of the mounting plate (231); the Y-direction driving group (2332) is arranged on the right side of the mounting plate (231) to drive the moving plate (2331) to move along the Y-direction; a square hole (23311) is provided in the middle of the moving plate (2331); the moving seat (232) is slidably mounted on the bottom end of the moving plate (2331), and its top end extends into the square hole (23311); the X-direction driving group (2333) is arranged on the rear side of the moving plate (2331) to drive the moving seat (232) to move along the X-direction.

4. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The detection mechanism (240) comprises a connecting plate (241), a focus sensor (242), a line scan camera (243), a detection light source (244), a Z-direction module (245) and a second objective lens (246); the focus sensor (242) is mounted on the mounting plate (210) via the connecting plate (241); the line scan camera (243) and the detection light source (244) are both mounted on the focus sensor (242); the Z-direction module (245) is mounted on the connecting plate (241) and is arranged on the left side of the focus sensor (242); the second objective lens (246) is arranged below the focus sensor (242) and the top end of the second objective lens (246) is connected to a slide plate of the Z-direction module (245) via an angle plate.

5. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The dust sticking mechanism (220) comprises an inclined plate (221), a camera assembly (222), a telescopic cylinder (223), a mounting block (224) and a dust sticking rod (225); the inclined plate (221) is mounted on the left end of the mounting plate (210); the camera assembly (222) is mounted on the inclined plate (221); the cylinder body of the telescopic cylinder (223) is obliquely mounted on the inclined plate (221) and is arranged on the left side of the camera assembly (222); and the dust sticking rod (225) is mounted on the driving end of the telescopic cylinder (223) via the mounting block (224).

6. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The grinding mechanism (250) comprises a connecting frame (251), a measuring assembly (252) and a grinding assembly (253); the connecting frame (251) is installed at the right end of the mounting plate (210); the measuring assembly (252) is installed in the connecting frame (251); and the grinding assembly (253) is installed on the front side of the connecting frame (251).

7. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The ESC adsorption platform (120) comprises a glass electrostatic platform (121), a screw rod (122), a traverse wedge block (123), a lifting wedge block (124) and a first driving assembly (125). The glass electrostatic platform (121) is arranged in the middle of the mounting seat (110) along the X direction. The screw rod (122) is rotatably mounted in the mounting seat (110) along the X direction and is arranged below the glass electrostatic platform (121). There are two screw rods (122) arranged in parallel along the Y direction. There are a plurality of traverse wedge blocks (123) arranged along the screw rod (122). 122) are uniformly distributed axially, the transverse wedge block (123) is threadedly sleeved on the screw rod (122), and its bottom end is slidably connected to the mounting seat (110), the lifting wedge block (124) is arranged opposite to the transverse wedge block (123), and its inclined surface is slidably connected to the inclined surface of the transverse wedge block (123), the top end of the lifting wedge block (124) is connected to the bottom end of the glass electrostatic platform (121), and its right side is slidably connected to the fixed plate (126) inside the mounting seat (110), and the first driving component (125) drives the two screw rods (122) to rotate synchronously.

8. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The porous ceramic adsorption platform (130) comprises a fixed frame (131), a movable frame (132), a porous ceramic platform (133) and a second driving component (134); the fixed frame (131) and the movable frame (132) are respectively arranged on the left and right sides of the ESC adsorption platform (120); the bottom end of the fixed frame (131) is fixedly connected to the mounting seat (110); the bottom end of the movable frame (132) is slidably connected to the mounting seat (110); there are two porous ceramic platforms (133), which are respectively mounted on the top ends of the fixed frame (131) and the movable frame (132); and the second driving component (134) drives the movable frame (132) to approach or move away from the fixed frame (131) along the X direction.

9. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The backlight mechanism (140) comprises an X-direction module (141) and a backlight light source (142); the X-direction module (141) is arranged in the middle of the mounting seat (110) along the X direction; and the backlight light source (142) is mounted on a slide plate of the X-direction module (141).

10. The fine metal mask inspection and repair integrated equipment according to claim 1, characterized in that: The repair platform (100) further comprises a calibration mechanism (150), wherein the calibration mechanism (150) comprises a calibration camera (151) and a backlight cross (152), wherein the calibration camera (151) is mounted at the right rear end of the mounting seat (110), and the backlight cross (152) is mounted at the left rear end of the mounting seat (110).

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