Fluid switching device, fluid switching method and device purging method

Abstract

The invention discloses fluid switching equipment, a fluid switching method and an equipment purging method, and relates to the technical field of fluid conveying. The fluid switching equipment comprises a base and a plurality of flow channels arranged in the base, each flow channel is provided with a first valve, every two flow channels are communicated, and a second valve is arranged between every two communicated flow channels. According to the fluid switching equipment, directional transmission of the fluid in a single flow channel or flow switching among multiple flow channels can be achieved under cooperation of the first valve and the second valve, the fluid switching accuracy is effectively improved, and therefore the phenomenon that the fluid flows back can be prevented; internal pollution caused by fluid countercurrent is effectively avoided, and it is ensured that the produced semiconductor chip has high purity and high performance.

Description

Technical Field

[0001] The present application relates to the field of fluid delivery technology, and in particular to a fluid switching device, a fluid switching method and a device purging method. Background Art

[0002] In the semiconductor manufacturing process, gas switching equipment is crucial. It can accurately control the gas flow and type to meet the needs of different process steps for specific gases. For example, in the chemical vapor deposition process, fast and accurate gas switching can ensure the quality and uniformity of the film, improve production efficiency to meet the requirements of continuous production, reduce waiting time and production interruptions, and ensure process stability and product quality.

[0003] However, the fluid switching devices in the prior art are prone to contamination problems caused by fluid backflow during the fluid switching process, which not only affects the quality of semiconductor production, but also increases valve loss and reduces device performance and production efficiency. Summary of the invention

[0004] The first object of the present application is to overcome the deficiencies of the prior art and provide a fluid switching device capable of preventing fluid backflow.

[0005] The fluid switching device provided in this application adopts the following technical solution: A fluid switching device comprises a base, a plurality of flow channels arranged in the base, each of the flow channels is provided with a first valve, the plurality of flow channels are connected in pairs and a second valve is provided between each two connected flow channels.

[0006] By adopting the above technical solution, the fluid can be directedly transmitted in a single channel or flow switched between multiple channels with the cooperation of the first valve and the second valve, which effectively improves the accuracy of fluid switching, thereby preventing the fluid from flowing back, effectively avoiding internal contamination caused by fluid backflow, and ensuring that the produced semiconductor chips have high purity and high performance.

[0007] Preferably, the multiple flow channels include a first flow channel and a second flow channel, and the two sides of the base are respectively provided with a first input pipe and a first output pipe connected to the two ends of the first flow channel, and the other two sides of the base are respectively provided with a second input pipe and a second output pipe connected to the two ends of the second flow channel.

[0008] By adopting the above technical solution, the operator can input the fluid from the first input pipe and the second input pipe into multiple flow channels respectively, and output the fluid from the first output pipe and the second output pipe respectively through the switching coordination of the first flow channel and the second flow channel, thereby further improving the accuracy of fluid switching.

[0009] Preferably, the first flow channel includes a first flow channel section a and a first flow channel section b, the first valve includes a first valve a arranged on the side of the base, the first flow channel section a and the first flow channel section b are connected to the first valve a at one end close to each other, and are connected to the first input pipe and the first output pipe at another end away from each other.

[0010] By adopting the above technical solution, the operator can realize the directional flow of the fluid between the first flow channel section a and the first flow channel section b by opening and closing the first valve a, and the operation is highly convenient.

[0011] Preferably, the second flow channel includes a second flow channel section a and a second flow channel section b, the first valve also includes a first valve b arranged on the side of the base, the second flow channel section a and the second flow channel section b are connected to the first valve b at their ends close to each other, and are connected to the second input pipe and the second output pipe respectively at their ends away from each other.

[0012] By adopting the above technical solution, the operator can realize the directional flow of the fluid between the second flow channel section a and the second flow channel section b by opening and closing the first valve b, and the operation is highly convenient.

[0013] Preferably, a third flow channel is arranged between the first flow channel and the second flow channel, the third flow channel includes a third flow channel section a, the second valve includes a second valve a and a second valve b respectively arranged on two sides of the base, one end of the third flow channel section a and the first flow channel are both connected to the second valve a, and the other end of the third flow channel section a and the second flow channel are both connected to the second valve b.

[0014] By adopting the above technical solution, the operator can switch the fluid between the first flow channel and the second flow channel through the cooperation of the third flow channel section a, the second valve a and the second valve b, thereby further improving the accuracy of fluid switching.

[0015] Preferably, the first flow channel also includes a first flow channel section c connected to the first flow channel section a, the second flow channel also includes a second flow channel section c connected to the second flow channel section a, the first flow channel section c is connected to the second valve a, and the second flow channel section c is connected to the second valve b.

[0016] By adopting the above technical solution, the fluid can smoothly flow into the first flow channel and the second flow channel through the transfer of the first flow channel section c and the second flow channel section c, further improving the accuracy of fluid switching.

[0017] Preferably, the third flow channel also includes a third flow channel section b and a third flow channel section c, and two side portions of the base are respectively provided with a third input pipe and a third output pipe, one end of the third flow channel section b is connected to the third flow channel section a through the second valve a, and the other end is connected to the third input pipe, and one end of the third flow channel section c is connected to the third flow channel section a through the second valve b, and the other end is connected to the third output pipe.

[0018] By adopting the above technical solution, the operator can input the purge gas from the third input pipe into the third flow channel, and realize the flow and purge of the purge gas between the first flow channel and the second flow channel through the cooperation of the second valve a and the second valve b, thereby effectively improving the purge quality and purge efficiency of the first flow channel and the second flow channel.

[0019] Preferably, a purifier is provided on one side of the base, and the third flow channel section b and the third input pipe are both connected to the purifier.

[0020] By adopting the above technical solution, the purge gas can be purified by the purifier to avoid secondary pollution of the first flow channel and the second flow channel by the purge gas.

[0021] The second object of the present application is to provide a fluid switching method.

[0022] A fluid switching method provided in this application adopts the following technical solution: A fluid switching method, based on the above-mentioned fluid switching device, comprises the following steps: Step 1, opening the first valve a, then inputting the fluid from the first input pipe, and the fluid sequentially passes through the first flow channel section a and the first flow channel section b and then outputs from the first output pipe; Step 2, opening the first valve b, the second valve a and the second valve b, and then inputting the fluid from the first input pipe, and the fluid sequentially passes through the first flow channel section a, the third flow channel section a, the second flow channel section a and the second flow channel section b and then outputs from the second output pipe; Step 3, opening the first valve b, and then inputting the fluid from the second input pipe, and the fluid sequentially passes through the second flow channel section a and the second flow channel section b and then outputs from the second output pipe; Step 4, open the first valve a, the second valve a and the second valve b, then input the fluid from the second input pipe, and the fluid passes through the second flow channel section a, the third flow channel section a, the first flow channel section a and the first flow channel section b in sequence and then outputs from the first output pipe.

[0023] By adopting the above technical solution, the accuracy of fluid switching is effectively improved, thereby preventing the fluid from flowing back, effectively avoiding internal contamination caused by fluid backflow, and ensuring that the produced semiconductor chips have high purity and high performance.

[0024] The third object of the present application is to provide a device purging method.

[0025] The present application provides a method for purging equipment using the following technical solution: The equipment purging method is based on the above-mentioned fluid switching device, which includes: opening the second valve a and the second valve b, then inputting purge gas from the third input pipe, the purge gas is divided into two paths after passing through the third flow channel section b, one path of purge gas enters the first flow channel for purging, and the other path of purge gas enters the second flow channel for purging after passing through the third flow channel section a, and then the two paths of purge gas return to the third flow channel section a respectively and then merge into the third flow channel section c, and the merged purge gas is output from the third output pipe.

[0026] By adopting the above technical solution, the purge quality and purge efficiency of the first flow channel and the second flow channel are effectively improved.

[0027] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The fluid can realize the flow switching in a single flow channel or between multiple flow channels under the cooperation of the first valve and the second valve, which effectively improves the accuracy of fluid switching, thereby preventing the fluid from flowing back and effectively avoiding the internal contamination caused by the fluid flowing back, ensuring that the produced semiconductor chips have high purity and high performance; 2. Multiple valves are centrally arranged on the same base, which is convenient for production and assembly, improves production efficiency, reduces labor costs and loss costs in the production process, and meets the development requirements of semiconductor equipment integration; at the same time, it also reduces the floor space of the equipment and reduces manufacturing costs; 3. Multiple valves cooperate with each other and complete different operating conditions, reducing valve wear and reducing the frequency of valve replacement; 4. The pollution-free environment ensures the smooth progress of the semiconductor processing technology. Reducing the frequency of valve replacement means reducing the downtime of the device, improving production efficiency, and enhancing the economic benefits and market competitiveness of the enterprise; 5. When the equipment is abnormal, the damaged valve can be quickly identified by checking the circulation of different flow channels, which improves the equipment maintenance efficiency, shortens the maintenance time and reduces the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic diagram of the three-dimensional structure of the fluid switching device in the embodiment of the present application; Figure 2 yes Figure 1 A front view of Figure 3 yes Figure 2 AA section diagram in; Figure 4 yes Figure 2 BB cross-section diagram in; Figure 5 yes Figure 2 Schematic diagram of CC cross section; Figure 6 yes Figure 2 DD cross-section diagram in; Figure 7 yes Figure 2 EE cross-sectional diagram in ; Figure 8 yes Figure 1 Right view of; Fig. 9 yes Figure 8 Schematic diagram of the FF cross section.

[0029] Markings in the accompanying drawings: 1. Base; 1a. First valve block; 1b. Second valve block; 2. First valve; 2a. First valve a; 2b. First valve b; 3. Second valve; 3a. Second valve a; 3b. Second valve b; 4. first flow channel; 4a. first flow channel section a; 4b. first flow channel section b; 4c. first flow channel section c; 5. Second flow channel; 5a. Second flow channel section a; 5b. Second flow channel section b; 5c. Second flow channel section c; 6. First input pipe; 7. First output pipe; 8. Second input pipe; 9. Second output pipe; 10. third flow channel; 10a. third flow channel section a; 10b. third flow channel section b; 10c. third flow channel section c; 11. The third input pipe; 12. The third output pipe; 13. The purifier. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-9 The present invention is described in further detail.

[0031] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0032] Example 1: See Figure 1-9 As shown, a fluid switching device is shown, which includes a base 1 and two flow channels arranged in the base 1. The two flow channels are respectively provided with a first valve 2. The two flow channels are interconnected and a second valve 3 is arranged between the two flow channels.

[0033] In the semiconductor manufacturing process, the fluid can be directional transmitted in a single channel or flow switched between multiple channels with the cooperation of the first valve 2 and the second valve 3, which effectively improves the accuracy of fluid switching, thereby preventing the fluid from flowing back, effectively avoiding internal contamination caused by fluid backflow, and ensuring that the produced semiconductor chips have high purity and high performance.

[0034] In this embodiment, combined with Figure 1-4 As shown, the two flow channels include a first flow channel 4 and a second flow channel 5, and the base 1 includes a rectangular first valve block 1a and a second valve block 1b, and the first valve block 1a and the second valve block 1b are connected to each other. A first input pipe 6 and a second output pipe 9 are provided on one side of the first valve block 1a, and a second input pipe 8 is provided on the other side of the first valve block 1a. The first input pipe 6 and the second output pipe 9 are located on one side of the first valve block 1a, and the second input pipe 8 is located on the other side adjacent to the first valve block 1a. A first output pipe 7 is provided on one side of the second valve block 1b, and both ends of the first flow channel 4 are connected to the first input pipe 6 and the first output pipe 7 respectively, and both ends of the second flow channel 5 are connected to the second input pipe 8 and the second output pipe 9 respectively.

[0035] The operator can input the fluid into the flow channel from the first input pipe 6 and the second input pipe 8 respectively, and output the fluid from the first output pipe 7 and the second output pipe 9 respectively through the switching coordination of the first flow channel 4 and the second flow channel 5, further improving the accuracy of fluid switching.

[0036] In this embodiment, combined with Figure 2-3As shown, the first flow channel 4 includes a first flow channel section a4a and a first flow channel section b4b, the first valve 2 includes a first valve a2a disposed on the side of the second valve block 1b, the first valve a2a and the first output pipe 7 are respectively located on two adjacent sides of the second valve block 1b, the first flow channel section a4a and the first flow channel section b4b are connected to the first valve a2a at one end close to each other, and are connected to the first input pipe 6 and the first output pipe 7 at the other end away from each other. The operator can realize the directional flow of the fluid between the first flow channel section a4a and the first flow channel section b4b by opening and closing the first valve a2a, and the operation is highly convenient.

[0037] Combination Figure 2 and Figure 4 As shown, the second flow channel 5 includes a second flow channel section a5a and a second flow channel section b5b, the first valve 2 also includes a first valve b2b disposed on the side of the first valve block 1a, the first valve b2b and the second output pipe 9 are respectively located on the adjacent two sides of the first valve block 1a, the second flow channel section a5a and the second flow channel section b5b are connected to the first valve b2b at one end close to each other, and are connected to the second input pipe 8 and the second output pipe 9 at the other end away from each other. The operator can realize the directional flow of the fluid between the second flow channel section a5a and the second flow channel section b5b by opening and closing the first valve b2b, and the operation is highly convenient.

[0038] In this embodiment, combined with Figure 2 and Figure 7 As shown, a third flow channel 10 is provided between the first flow channel 4 and the second flow channel 5, and the third flow channel 10 includes a third flow channel section a10a, and the second valve 3 includes a second valve a3a provided at the side of the second valve block 1b and a second valve b3b provided at the side of the first valve block 1a, and the second valve a3a and the first output pipe 7 are respectively located at the adjacent two sides of the second valve block 1b, and the second valve b3b and the second output pipe 9 are respectively located at the opposite two sides of the first valve block 1a, and one end of the third flow channel section a10a and the first flow channel 4 are both connected to the second valve a3a, and the other end of the third flow channel section a10a and the second flow channel 5 are both connected to the second valve b3b. The operator can realize the switching of the fluid between the first flow channel 4 and the second flow channel 5 through the cooperation of the third flow channel section a10a, the second valve a3a and the second valve b3b, which further improves the accuracy of the fluid switching; at the same time, through the precise switching of the first flow channel 4 and the second flow channel 5, the flow path of the fluid is effectively enriched, ensuring that the fluid can be correctly transmitted under different requirements.

[0039] In this embodiment, combined with Figure 2-4 and Figure 7As shown, the first flow channel 4 further includes a first flow channel section c4c connected to the first flow channel section a4a, the second flow channel 5 further includes a second flow channel section c5c connected to the second flow channel section a5a, the first flow channel section c4c is connected to the second valve a3a, and the second flow channel section c5c is connected to the second valve b3b. The fluid can smoothly flow into the first flow channel 4 and the second flow channel 5 through the transfer of the first flow channel section c4c and the second flow channel section c5c, further improving the accuracy of fluid switching.

[0040] In this embodiment, combined with Figure 2 and Figure 5-9 As shown, the third flow channel 10 further includes a third flow channel section b10b and a third flow channel section c10c, and the adjacent two sides of the first valve block 1a are respectively provided with a third input pipe 11 and a third output pipe 12, one end of the third flow channel section b10b is connected to the third flow channel section a10a through the second valve a3a, and the other end is connected to the third input pipe 11, and one end of the third flow channel section c10c is connected to the third flow channel section a10a through the second valve b3b, and the other end is connected to the third output pipe 12. The operator can input the purge gas from the third input pipe 11 into the third flow channel 10, and realize the flow and purge of the purge gas between the first flow channel 4 and the second flow channel 5 through the cooperation of the second valve a3a and the second valve b3b, which effectively improves the purge quality and purge efficiency of the first flow channel 4 and the second flow channel 5.

[0041] A purifier 13 is provided on one side of the base 1, and the third flow channel section b10b and the third input pipe 11 are both connected to the purifier 13. The purge gas can be purified by the purifier 13 to avoid secondary contamination of the first flow channel 4 and the second flow channel 5 by the purge gas.

[0042] In this embodiment, the first valve a2a, the first valve b2b, the second valve a3a and the second valve b3b can all be made of corrosion-resistant and wear-resistant materials such as SUS316L or Hastelloy C-22. These materials can withstand the erosion of various chemical media that may be exposed during the semiconductor processing process, preventing valve damage or performance degradation due to corrosion; at the same time, good wear resistance can reduce the wear of the valve during frequent opening and closing, and extend the service life of the valve.

[0043] In this embodiment, a sensor can also be installed on the base 1 to detect the valve to ensure the normal operation of the valve. The key operating parameters of the valve, including the opening and closing time, opening and closing angle, internal pressure, etc. of the valve, can be monitored by installing a sensor on the base 1.

[0044] The monitoring of the opening and closing time can be achieved by installing a position sensor on the base 1. When a deviation in the opening and closing time of the valve is detected, it may indicate that there is a problem with the valve drive device, and the pneumatic device of the valve needs to be inspected and maintained in time.

[0045] Internal pressure monitoring can be achieved by installing a pressure sensor. When abnormal internal pressure is detected in the valve, it may be a problem with the valve seal, and the sealing parts need to be checked and replaced. For example, if the pressure is too high, it may be caused by wear of the seal, which leads to leakage, and the seal needs to be replaced in time.

[0046] Embodiment 2: This embodiment discloses a fluid switching method based on the fluid switching device of embodiment 1, which comprises the following steps: Step 1, open the first valve a2a, then input the fluid from the first input pipe 6, the fluid passes through the first flow channel section a4a and the first flow channel section b4b in sequence, and then outputs from the first output pipe 7; Step 2, open the first valve b2b, the second valve a3a and the second valve b3b, then input the fluid from the first input pipe 6, and the fluid sequentially passes through the first flow channel section a4a, the third flow channel section a10a, the second flow channel section a5a and the second flow channel section b5b before being output from the second output pipe 9; Step 3, open the first valve b2b, then input the fluid from the second input pipe 8, and the fluid passes through the second flow channel section a5a and the second flow channel section b5b in sequence and then outputs from the second output pipe 9; Step 4, open the first valve a2a, the second valve a3a and the second valve b3b, then input the fluid from the second input pipe 8, and the fluid passes through the second flow channel section a5a, the third flow channel section a10a, the first flow channel section a4a and the first flow channel section b4b in sequence before being output from the first output pipe 7.

[0047] Example 3: This example discloses a device purging method for a fluid switching device based on Example 1, comprising: opening the second valve a3a and the second valve b3b, and then inputting a purge gas from the third input pipe 11, the purge gas passing through the third flow channel section b10b is divided into two paths, one of which enters the first flow channel 4 for purging, and the other purge gas passes through the third flow channel section a10a and enters the second flow channel 5 for purging, and then the two purge gases are respectively returned to the third flow channel section a10a and then merged into the third flow channel section c10c, and the merged purge gas is output from the third output pipe 12.

[0048] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, all equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A fluid switching device, characterized in that: It comprises a base (1), and a plurality of flow channels arranged in the base (1), each of the flow channels being provided with a first valve (2), the plurality of flow channels being connected in pairs, and a second valve (3) being provided between each two connected flow channels.

2. The fluid switching device according to claim 1, characterized in that: The plurality of flow channels include a first flow channel (4) and a second flow channel (5); two side portions of the base (1) are respectively provided with a first input pipe (6) and a first output pipe (7) connected to both ends of the first flow channel (4); the other two side portions of the base (1) are respectively provided with a second input pipe (8) and a second output pipe (9) connected to both ends of the second flow channel (5).

3. The fluid switching device according to claim 2, characterized in that: The first flow channel (4) comprises a first flow channel section a (4a) and a first flow channel section b (4b); the first valve (2) comprises a first valve a (2a) arranged on the side of the base (1); the first flow channel section a (4a) and the first flow channel section b (4b) are connected to the first valve a (2a) at their ends close to each other, and are connected to the first input pipe (6) and the first output pipe (7) at their ends away from each other.

4. The fluid switching device according to claim 3, characterized in that: The second flow channel (5) comprises a second flow channel section a (5a) and a second flow channel section b (5b), and the first valve (2) further comprises a first valve b (2b) arranged on the side of the base (1); the second flow channel section a (5a) and the second flow channel section b (5b) are connected to the first valve b (2b) at their ends close to each other, and are connected to the second input pipe (8) and the second output pipe (9) at their ends away from each other.

5. The fluid switching device according to claim 4, characterized in that: A third flow channel (10) is provided between the first flow channel (4) and the second flow channel (5), the third flow channel (10) comprising a third flow channel section a (10a), the second valve (3) comprising a second valve a (3a) and a second valve b (3b) respectively provided on two side portions of the base (1), one end of the third flow channel section a (10a) and the first flow channel (4) are both connected to the second valve a (3a), and the other end of the third flow channel section a (10a) and the second flow channel (5) are both connected to the second valve b (3b).

6. The fluid switching device according to claim 5, characterized in that: The first flow channel (4) further includes a first flow channel section c (4c) connected to the first flow channel section a (4a), and the second flow channel (5) further includes a second flow channel section c (5c) connected to the second flow channel section a (5a), the first flow channel section c (4c) is connected to the second valve a (3a), and the second flow channel section c (5c) is connected to the second valve b (3b).

7. The fluid switching device according to claim 5, characterized in that: The third flow channel (10) further comprises a third flow channel section b (10b) and a third flow channel section c (10c); two side portions of the base (1) are respectively provided with a third input pipe (11) and a third output pipe (12); one end of the third flow channel section b (10b) is connected to the third flow channel section a (10a) via the second valve a (3a), and the other end is connected to the third input pipe (11); one end of the third flow channel section c (10c) is connected to the third flow channel section a (10a) via the second valve b (3b), and the other end is connected to the third output pipe (12).

8. The fluid switching device according to claim 7, characterized in that: A purifier (13) is provided on one side of the base (1), and the third flow channel section b (10b) and the third input pipe (11) are both connected to the purifier (13).

9. A fluid switching method, characterized in that: The fluid switching method is based on the fluid switching device according to claim 5 or 6, and comprises the following steps: Step 1, opening the first valve a (2a), then inputting the fluid from the first input pipe (6), and the fluid sequentially passes through the first flow channel section a (4a) and the first flow channel section b (4b) and then outputs from the first output pipe (7); Step 2, opening the first valve b (2b), the second valve a (3a) and the second valve b (3b), then inputting the fluid from the first input pipe (6), and the fluid sequentially passing through the first flow channel section a (4a), the third flow channel section a (10a), the second flow channel section a (5a) and the second flow channel section b (5b) before being output from the second output pipe (9); Step 3, opening the first valve b (2b), then inputting the fluid from the second input pipe (8), and the fluid sequentially passes through the second flow channel section a (5a) and the second flow channel section b (5b) and then outputs from the second output pipe (9); Step 4, opening the first valve a (2a), the second valve a (3a) and the second valve b (3b), then inputting the fluid from the second input pipe (8), and the fluid sequentially passes through the second flow channel section a (5a), the third flow channel section a (10a), the first flow channel section a (4a) and the first flow channel section b (4b) before being output from the first output pipe (7).

10. A method for purging equipment, characterized in that: The device purging method is based on the fluid switching device described in claim 7 or 8, which includes: opening the second valve a (3a) and the second valve b (3b), and then inputting purge gas from the third input pipe (11), and the purge gas is divided into two paths after passing through the third flow channel section b (10b), one path of the purge gas enters the first flow channel (4) for purging, and the other path of the purge gas enters the second flow channel (5) for purging after passing through the third flow channel section a (10a), and then the two paths of purge gas return to the third flow channel section a (10a) respectively and then merge into the third flow channel section c (10c), and the merged purge gas is output from the third output pipe (12).

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