Efficient diffusion pump cold trap

Abstract

The invention relates to the technical field of cold traps, in particular to an efficient diffusion pump cold trap which comprises a cold trap shell, and the cold trap shell comprises a cold trap shell body and a cold trap cover body. The condensation assembly comprises a cylindrical main condensation cavity, a plurality of sub condensation cavities and a coiled pipe type condensation pipe; a main condensation cavity is formed in the main condensation cavity; one end of each sub-condensation cavity extends into the main condensation cavity in the radial direction of the main condensation cavity to form a condensation connecting part, and the other end of each sub-condensation cavity extends outwards in the radial direction of the main condensation cavity to form a condensation diffusion part; an edge condensation sub-cavity is formed in the condensation sub-cavity; the plurality of sub condensation cavities are respectively communicated with the main condensation cavity; the coiled pipe type condensation pipe is in contact with the inner wall of the main condensation cavity; and the coil pipe type condensation pipe is also respectively contacted with the condensation connecting parts of the plurality of sub condensation cavities. Oil vapor and other gas molecules generated by the diffusion pump can be efficiently condensed, and the trapping, adsorption and condensation efficiency of the oil vapor is remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of cold traps, in particular to a high-efficiency diffusion pump cold trap. Background Art

[0002] A cold trap is a device that prevents vapor or liquid from entering a measuring instrument from a system, or from entering a system from a measuring instrument. It can provide a very low temperature surface on which molecules can condense and can increase the vacuum degree by one to two orders of magnitude. It is generally used to maintain low temperature conditions in chemical, biological, and physical tests and provide constant temperature circulating cooling liquid. It is also often used in oil diffusion pumps and is often installed between the vacuum container and the vacuum pump. By cooling the gas, the vapor condenses and is captured. The cold trap is crucial for oil diffusion pumps, as it can capture organic matter and water vapor, prevent other substances and water vapor from entering the oil pump, and reduce the service life and vacuum degree of the oil pump.

[0003] In the related art, the traditional diffusion pump cold trap has many deficiencies in condensation efficiency, structural rationality and maintenance convenience. For example, the unreasonable design of the condensation cavity leads to low condensation efficiency. For example, the application number CN202120840894.0 discloses a high-efficiency diffusion pump cold trap, including a cold trap body installed at the inlet of the diffusion pump, and a plurality of grooves are provided on the inner surface of the cold trap body. The inner surface of the cold trap body of the utility model is provided with a plurality of grooves or is wrinkled or wavy. These designs can increase the surface area of ​​the inner side of the cold trap body, thereby increasing the area of ​​heat exchange and the area for capturing and adsorbing oil vapor, thereby improving the efficiency of capturing, adsorbing and condensing oil vapor, improving the effect of the coating process, and ensuring the quality of the product. The device has the following problems: 1. The cold trap body is a cylindrical structure, and the surface area of ​​the inner side of the cold trap body is small, which has the disadvantage of low efficiency in capturing, adsorbing and condensing oil vapor; 2. The liquid condensed inside it often waits for the droplets to automatically condense and drip, and the long-term accumulation of droplets has an adverse effect on the condensation effect. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the purpose of the present invention is to provide a high-efficiency diffusion pump cold trap, which can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump through the design of the main condensation cavity and the sub-condensation cavity, the close contact of the coil-type condenser tube and the circulation of the cooling medium, and significantly improve the efficiency of capturing, adsorbing and condensing the oil vapor.

[0005] The first aspect of the present invention provides a high-efficiency diffusion pump cold trap, comprising a cold trap housing, wherein the cold trap housing comprises a cold trap shell and a cold trap cover, wherein the interior of the cold trap shell forms a receiving cavity with an open top, and the cold trap cover covers the top opening of the cold trap shell; and further comprising:

[0006] A condensation component, which includes a cylindrical main condensation cavity, a plurality of sub-condensation cavities and a coil-type condenser; the interior of the main condensation cavity forms a cylindrical main condensation cavity that passes through the cavity along its axial direction; the plurality of sub-condensation cavities are distributed at intervals along the circumference of the main condensation cavity, one end of the sub-condensation cavity extends into the main condensation cavity along the radial direction of the main condensation cavity to form a condensation connection part, and the other end thereof extends outwardly along the radial direction of the main condensation cavity to form a condensation diffusion part; the plurality of condensation diffusion parts are respectively detachably connected to the inner wall of the accommodating cavity; the interior of the sub-condensation cavity forms a rectangular sub-condensation cavity that passes through its upper and lower surfaces in a vertical direction; the plurality of sub-condensation cavities are respectively connected to the main condensation cavity; the coil-type condenser is installed in the main condensation cavity and contacts with the inner wall of the main condensation cavity; the coil-type condenser also contacts with the condensation connection parts of the plurality of sub-condensation cavities respectively.

[0007] In the first aspect of the present invention, as a preferred embodiment, it also includes a water storage container, which is arranged in the accommodating cavity and located below the condensation component, and the water storage container is used to receive the droplets dripping from the condensation component.

[0008] In the first aspect of the present invention, as a preferred embodiment, a drain outlet is provided on the outer wall of the water storage container, and the drain outlet passes through the cold trap shell and is connected to an external water pumping device through a pipe or a joint.

[0009] In the first aspect of the present invention, as a preferred embodiment, it also includes a droplet scraping mechanism, which includes a plurality of scraping components respectively installed in the plurality of sub-condensation chambers and a driving device installed on the cold trap housing, and the driving device is used to synchronously drive the scrapers of the plurality of scraping components to slide up and down along the inner walls of the plurality of sub-condensation chambers respectively, so as to scrape off condensed but undripped droplets.

[0010] In the first aspect of the present invention, as a preferred embodiment,

[0011] A vertical guide groove extending along a vertical square is provided on the side wall of the condensation diffusion portion of the sub-condensation cavity;

[0012] The scraping assembly includes two fixed seats, a threaded rod, a movable seat, a transverse connecting member, a scraper fixing plate, a scraper and a first transmission assembly;

[0013] The two fixing seats are respectively installed on the upper and lower parts of the outer side wall of the sub-condensation chamber;

[0014] The threaded rod is rotatably mounted between the two fixing seats;

[0015] The movable seat body is provided with a threaded hole, and the movable seat is threadedly connected with the threaded rod through the threaded hole;

[0016] One end of the transverse connecting member is connected to one side of the movable seat body, and the other end of the transverse connecting member passes through the vertical guide groove and extends into the sub-condensation chamber of the condensation diffusion part;

[0017] The scraper fixing plate is located in the sub-condensation chamber and is installed at one end of the transverse connecting member;

[0018] The scraper is installed at the lower part of the scraper fixing plate, and one side of the scraper contacts the inner wall of the sub-condensation chamber; the scraper is in the shape of a long strip, and its length matches the long side of the sub-condensation chamber;

[0019] The first transmission assembly is installed on the fixing seat located above, and the first transmission assembly is used to drive the threaded rod to rotate.

[0020] In the first aspect of the present invention, as a preferred embodiment, the first transmission assembly includes a main transmission wheel, a transmission belt and a slave transmission wheel; the main transmission wheel and the slave transmission wheel are respectively rotatably mounted on a fixed seat above, the main transmission wheel and the slave transmission wheel are connected by a transmission belt, the slave transmission wheel is connected to the upper part of the threaded rod, and the slave transmission wheel can drive the threaded rod to rotate.

[0021] In the first aspect of the present invention, as a preferred embodiment, the scraping assembly further includes two outer guide rails and two inner guide rails;

[0022] The movable seat is symmetrically provided with two sliding grooves at both ends of the threaded hole;

[0023] The two outer guide rails are installed between the two fixing seats, and the two outer guide rails are respectively slidably matched with the two sliding grooves;

[0024] The two inner guide rails are installed in the sub-condensing chamber along a vertical square and are respectively located on both sides of the scraper connecting plate, and the two ends of the scraper connecting plate are respectively slidably matched with the two inner guide rails.

[0025] In the first aspect of the present invention, as a preferred embodiment, the scraping assembly is installed on two opposite side walls of each of the sub-condensation chambers.

[0026] In the first aspect of the present invention, as a preferred embodiment, the driving assembly includes a first transmission box, a fixing frame, a driving motor, a driving gear, a first rotating shaft, a driven gear, a toothed belt, a main gear, a first gear ring, a plurality of secondary gears, the second gear ring, a plurality of second rotating shafts and a plurality of meshing gears;

[0027] The first transmission box is installed on the top surface of the cold trap cover, and the inner wall of the first transmission box is formed with a mounting cavity;

[0028] The fixing frame includes a plurality of vertical connecting columns, a first annular support seat and a second annular support seat; the first annular support seat and the second annular support seat are connected by a plurality of the vertical connecting columns; a supporting tray is also provided in the middle of the first annular support seat; the second disc-shaped support seat is rotatably mounted at the top opening of the cold trap shell;

[0029] The driving motor is installed at one end of the first transmission box, and the output end of the driving motor extends into the installation cavity of the first transmission box along the vertical direction;

[0030] The driving gear is mounted on the output shaft of the driving motor and is located in the mounting cavity;

[0031] The first rotating shaft is rotatably installed between the cold trap cover and the supporting tray;

[0032] The driven gear is mounted on the upper portion of the first rotating shaft; the driven gear is transmission-connected to the driven gear through the toothed belt;

[0033] The main gear is mounted on the lower part of the first rotating shaft;

[0034] The first gear ring is mounted on the inner side wall of the support tray;

[0035] The plurality of secondary gears are rotatably mounted on the inner bottom wall of the support tray, the plurality of secondary gears are respectively meshed with the primary gear, and the plurality of secondary gears are also respectively meshed with the first gear ring;

[0036] The second gear ring is mounted on the inner side wall of the second annular support seat;

[0037] The plurality of meshing gears are connected to the plurality of main transmission wheels in a one-to-one correspondence via the plurality of second rotating shafts; and the plurality of meshing gears are respectively meshed with the second gear rings.

[0038] In the first aspect of the present invention, as a preferred embodiment, the number of the sub-condensation chambers is three, the number of the scraping assemblies is six groups, and a group of the scraping assemblies is installed on two opposite side walls of each of the sub-condensation chambers.

[0039] Compared with the prior art, the present invention has the following beneficial effects:

[0040] 1. The cold trap housing of the present invention is used to be installed at or near the air inlet of a diffusion pump; a gap for air to enter is formed between the cold trap cover and the cold trap shell, or an air inlet pipe is arranged on the cold trap cover, and an air outlet pipe is arranged on the side wall of the cold trap shell; when the diffusion pump starts working, it will generate a strong negative pressure environment to attract and discharge gas molecules in the vacuum system. When these gas molecules pass through the air inlet of the diffusion pump, they enter the accommodating cavity of the cold trap housing through diffusion. Under the action of the condensation assembly, the gas molecules exchange heat with the coil-type condenser tube, are absorbed by the cooling medium and take away the heat, and thus condense into a liquid state. The condensed droplets drip along the wall of the sub-condensation cavity and the main condensation cavity. The present invention surrounds the main condensation cavity, and multiple sub-condensation cavities are distributed circumferentially, one end extends into the main condensation cavity to form a condensation connection part, and the other end extends to form a condensation diffusion part, which is connected to the inner wall of the accommodating cavity. This layout increases the condensation area and promotes the effective condensation of gas molecules. The coil-type condenser is placed in the main condensation chamber, in close contact with the inner wall of the main condensation chamber and the condensation connection part of the sub-condensation chamber. This design ensures that the condenser can effectively transfer the low temperature of the cooling medium, so that the gas molecules passing through can be quickly cooled and condensed; through the ingenious design of the main condensation chamber and the sub-condensation chamber, as well as the close contact of the coil-type condenser and the circulation of the cooling medium, the present invention can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump, and significantly improve the efficiency of capturing, adsorbing and condensing the oil vapor. The condensation diffusion part of the sub-condensation chamber is detachably connected to the inner wall of the accommodating chamber. This design facilitates the disassembly and assembly of the condensation assembly, while ensuring that the condensation assembly can be installed in the accommodating chamber in a suspended manner, so that the droplets can drip smoothly.

[0041] 2. The present invention also includes a droplet scraping mechanism, which includes a plurality of scraping components respectively installed in the plurality of sub-condensation chambers and a driving device installed on the cold trap housing, and the driving device is used to synchronously drive the scrapers of the plurality of scraping components to slide up and down along the inner walls of the plurality of sub-condensation chambers respectively to scrape off the condensed but undropped droplets. When the driving device is started, the driving force generated by it is transmitted to each scraping component through a synchronization mechanism. Under the action of the driving force, the scraper begins to slide up and down along the inner wall of the sub-condensation chamber. During this process, the scraper scrapes off the droplets condensed on the inner wall. The scraped droplets fall into the water storage container under the action of gravity, thereby realizing effective collection and treatment of the droplets. The droplet scraping mechanism can ensure that the droplets on the inner wall of the sub-condensation chamber are scraped off in time, avoiding the influence of droplet accumulation on the condensation effect, thereby improving the condensation efficiency. The scraped droplets fall directly into the water storage container, improving the collection efficiency and collection amount of the droplets. Regularly starting the droplet scraping mechanism can effectively avoid the long-term accumulation of droplets on the inner wall of the sub-condensation chamber, reducing the frequency and cost of cleaning and maintenance.

[0042] 3. The present invention realizes synchronous rotation of multiple threaded rods through a driving motor. The rotation of the threaded rod is transmitted to the moving seat through a threaded connection, so that the moving seat moves up and down along the threaded rod. The movement of the moving seat is transmitted to the scraper fixing plate and the scraper through a transverse connecting piece, so that the scraper slides up and down along the inner wall of the sub-condensation chamber. The scraper scrapes off the droplets condensed on the inner wall during the sliding process. It has the advantages of compact structure, high transmission efficiency, low cost and good synchronization, which ensures the synchronous movement of multiple threaded rods and scrapers and improves the stability and reliability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a schematic structural diagram of a high-efficiency diffusion pump cold trap of the present invention;

[0044] Figure 2 It is a structural schematic diagram of a high-efficiency diffusion pump cold trap without the cold trap cover of the present invention;

[0045] Figure 3 It is a structural schematic diagram of a high-efficiency diffusion pump cold trap of the cold trap housing of the present invention;

[0046] Figure 4 It is a structural schematic diagram of the present invention without the cold trap cover;

[0047] Figure 5 It is a schematic diagram of the separate structures of the condensing component, the scraping component and the driving component of the present invention;

[0048] Figure 6 It is a schematic structural diagram of the scraping assembly of the present invention;

[0049] Figure 7 It is a schematic diagram of the structure of the scraper fixing, scraper and inner guide rail of the present invention;

[0050] Figure 8 It is a schematic diagram of the separate structure of the scraper fixing, scraper and inner guide rail of the present invention.

[0051] In the figure:

[0052] 10. Cold trap housing; 11. Cold trap shell; 12. Cold trap cover;

[0053] 20. Condensation assembly; 21. Main condensation cavity; 22. Sub-condensation cavity; 221. Condensation connection part; 222. Condensation diffusion part; 2221. Vertical guide groove; 23. Coil condenser;

[0054] 30. Water storage container;

[0055] 41. scraping assembly; 411. fixed seat; 412. threaded rod; 413. movable seat; 414. transverse connecting member; 415. scraper fixing plate; 416. scraper; 417. first transmission assembly; 4171. main transmission wheel; 4172. transmission belt; 4173. slave transmission wheel; 418. outer guide rail; 419. inner guide rail;

[0056] 42. Drive assembly; 421. First transmission box; 422. Fixed frame; 4221. Vertical connecting column; 4222. First annular support seat; 4223. Second annular support seat; 423. Drive motor; 424. Driving gear; 425. First rotating shaft; 426. Driven gear; 427. Toothed belt; 428. Main gear; 429. First gear ring; 4210. Secondary gear; 4211. Second gear ring; 4212. Second rotating shaft; 4213. Meshing gear. DETAILED DESCRIPTION

[0057] Below, in conjunction with the accompanying drawings and specific embodiments, the invention is further described. It should be noted that, under the premise of no conflict, the various embodiments described below or the various technical features can be arbitrarily combined to form a new embodiment. Except as otherwise specified, the materials and equipment used in this embodiment can be purchased from the market. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0058] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In the description of the present application, "plurality" means two or more, unless otherwise precisely and specifically specified.

[0059] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, or it can be connected through an intermediary medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0060] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0061] Please refer to Figure 1-8 As shown, this embodiment provides a high-efficiency diffusion pump cold trap, including a cold trap housing 10, the cold trap housing 10 includes a cold trap shell 11 and a cold trap cover 12, the interior of the cold trap shell 11 forms a receiving cavity with an open top, and the cold trap cover 12 covers the top opening of the cold trap shell 11; and also includes a condensation component 20;

[0062] Specifically, the condensation component 20 includes a cylindrical main condensation cavity 21, a plurality of sub-condensation cavities 22 and a coil-type condenser tube 23; a cylindrical main condensation cavity is formed inside the main condensation cavity 21 and penetrates along its axial direction; a plurality of sub-condensation cavities 22 are distributed at intervals along the circumference of the main condensation cavity 21, one end of the sub-condensation cavity 22 extends into the main condensation cavity along the radial direction of the main condensation cavity 21 to form a condensation connection portion 221, and the other end thereof extends outward along the radial direction of the main condensation cavity 21 to form a condensation diffusion portion 222; a plurality of condensation diffusion portions 222 are respectively detachably connected to the inner wall of the accommodating cavity; a rectangular sub-condensation cavity is formed inside the sub-condensation cavity 22 and penetrates through its upper and lower surfaces in the vertical direction; a plurality of sub-condensation cavities are respectively connected to the main condensation cavity; the coil-type condenser tube 23 is installed in the main condensation cavity and contacts with the inner wall of the main condensation cavity 21; the coil-type condenser tube 23 also contacts with the condensation connection portions 221 of a plurality of sub-condensation cavities 22 respectively.

[0063] On the basis of the above structure, the cold trap housing 10 is used to be installed at or near the air inlet of the diffusion pump; a gap for air to enter is formed between the cold trap cover 12 and the cold trap housing 11, or an air inlet pipe is arranged on the cold trap cover 12, and an air outlet pipe is arranged on the side wall of the cold trap housing 11; when the diffusion pump starts working, it will generate a strong negative pressure environment to attract and discharge gas molecules in the vacuum system. When these gas molecules pass through the air inlet of the diffusion pump, these gas molecules enter the accommodating cavity of the cold trap housing 10 by diffusion. Under the action of the condensation component 20, the gas molecules exchange heat with the coil-type condenser 23, are absorbed by the cooling medium and take away heat, and are condensed into liquid. The condensed droplets drip along the wall of the sub-condensation cavity 22 and the main condensation cavity. The present invention surrounds the main condensation cavity 21, and multiple sub-condensation cavities 22 are distributed circumferentially, one end extends into the main condensation cavity to form a condensation connection part 221, and the other end extends to form a condensation diffusion part 222, which is connected to the inner wall of the accommodating cavity. This layout increases the condensation area and promotes the effective condensation of gas molecules. The coil-type condenser 23 is placed in the main condensation chamber, in close contact with the inner wall of the main condensation chamber 21 and the condensation connection part 221 of the sub-condensation chamber 22. This design ensures that the condenser can effectively transfer the low temperature of the cooling medium, so that the gas molecules passing through can be quickly cooled and condensed; the present invention can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump through the ingenious design of the main condensation chamber 21 and the sub-condensation chamber 22, as well as the close contact of the coil-type condenser 23 and the circulation of the cooling medium, and significantly improves the efficiency of capturing, adsorbing and condensing the oil vapor. The condensation diffusion part 222 of the sub-condensation chamber 22 is detachably connected to the inner wall of the accommodating chamber. This design facilitates the disassembly and assembly of the condensation assembly 20, while ensuring that the condensation assembly 20 can be installed in the accommodating chamber in a suspended manner, so that the droplets can drip smoothly.

[0064] In a preferred embodiment of the present invention, a water storage container 30 is further included. The water storage container 30 is disposed in the accommodating cavity and is located below the condensation component 20. The water storage container 30 is used to receive the liquid drops dripping from the condensation component 20.

[0065] Based on the above structure, the water storage container 30 of the present invention is cleverly arranged under the condensation assembly 20 to collect the droplets that drip after condensation. This layout simplifies the collection process of the condensate, improves the collection efficiency, and reduces the risk of contamination of other components of the cold trap by the condensate.

[0066] In a preferred embodiment of the present invention, a drain port is provided on the outer wall of the water storage container 30 , and the drain port penetrates the cold trap housing 11 through a pipe or a joint and is connected to an external water pumping device.

[0067] On the basis of the above structure, when the liquid droplets in the water storage container 30 accumulate to a certain amount, the pumping device will automatically start to pump out the liquid droplets through the drain port. The pumping device can quickly pump out the liquid droplets from the water storage container 30, avoiding the long-term accumulation of liquid droplets in the box, thereby improving the treatment efficiency.

[0068] In a preferred embodiment of the present invention, a droplet scraping mechanism is also included, which includes a plurality of scraping components 41 respectively installed in a plurality of sub-condensation chambers and a driving device installed on the cold trap housing 10, and the driving device is used to synchronously drive the scrapers 416 of the plurality of scraping components 41 to slide up and down along the inner walls of the plurality of sub-condensation chambers respectively, so as to scrape off condensed but undripped droplets.

[0069] On the basis of the above structure, when the driving device is started, the driving force it generates is transmitted to each scraping component 41 through a synchronization mechanism. Under the action of the driving force, the scraper 416 begins to slide up and down along the inner wall of the sub-condensation chamber. During this process, the scraper 416 will scrape off the droplets condensed on the inner wall. The scraped droplets fall into the water storage container 30 under the action of gravity, thereby achieving effective collection and treatment of the droplets. The droplet scraping mechanism can ensure that the droplets on the inner wall of the sub-condensation chamber are scraped off in time, avoiding the influence of droplet accumulation on the condensation effect, thereby improving the condensation efficiency. The scraped droplets fall directly into the water storage container 30, which improves the collection efficiency and collection amount of the droplets. Regularly starting the droplet scraping mechanism can effectively avoid the long-term accumulation of droplets on the inner wall of the sub-condensation chamber, reducing the frequency and cost of cleaning and maintenance.

[0070] In a preferred embodiment of the present invention,

[0071] A vertical guide groove 2221 extending along a vertical square is formed on the side wall of the condensation diffusion portion 222 of the sub-condensation chamber 22;

[0072] The scraping assembly 41 includes two fixed seats 411, a threaded rod 412, a movable seat 413, a transverse connecting member 414, a scraper fixing plate 415, a scraper 416 and a first transmission assembly 417;

[0073] The two fixing seats 411 are respectively installed on the upper and lower parts of the outer side wall of the sub-condensation chamber 22;

[0074] The threaded rod 412 is rotatably mounted between the two fixing seats 411;

[0075] The movable seat 413 is provided with a threaded hole, and the movable seat 413 is threadedly connected with the threaded rod 412 through the threaded hole;

[0076] One end of the transverse connecting member 414 is connected to one side of the movable seat 413 body, and the other end of the transverse connecting member 414 passes through the vertical guide groove 2221 and extends into the sub-condensation chamber of the condensation diffusion portion 222;

[0077] The scraper fixing plate 415 is located in the sub-condensation chamber and is installed at one end of the transverse connecting member 414;

[0078] The scraper 416 is installed at the lower part of the scraper fixing plate 415, and one side of the scraper 416 contacts the inner wall of the sub-condensation chamber; the scraper 416 is in the shape of a long strip, and its length matches the long side of the sub-condensation chamber;

[0079] The first transmission assembly 417 is installed on the upper fixing seat 411 , and the first transmission assembly 417 is used to drive the threaded rod 412 to rotate.

[0080] On the basis of the above structure, when the first transmission assembly 417 is started, it drives the threaded rod 412 to rotate. The rotation of the threaded rod 412 is transmitted to the moving seat 413 through the threaded connection, so that the moving seat 413 moves up and down along the threaded rod 412. The movement of the moving seat 413 is transmitted to the scraper fixing plate 415 and the scraper 416 through the transverse connecting member 414, so that the scraper 416 slides up and down along the inner wall of the sub-condensation chamber. The scraper 416 scrapes off the droplets condensed on the inner wall during the sliding process, and the droplets then fall into the storage box or are collected by other collection devices. The vertical guide groove 2221 provides a moving path for the transverse connecting member 414 of the scraping assembly 41, ensuring that the scraper 416 can slide up and down along the inner wall of the sub-condensation chamber 22. The transverse connecting member 414 ensures that the scraper 416 can stably extend into the sub-condensation chamber and move along the inner wall. The scraper 416 is in close contact with the inner wall of the sub-condensation chamber, and can efficiently scrape off the condensed droplets. The design of the threaded transmission and the transverse connector 414 ensures the stability and accuracy of the scraper 416 during the scraping process. In this way, the scraping assembly 41 can achieve efficient scraping of droplets on the inner wall of the sub-condensation chamber. In addition, the combination design of the rectangular sub-condensation chamber and the long strip scraper 416 ensures that the scraper 416 is in full contact with the inner wall, achieving an efficient and uniform scraping effect.

[0081] In a preferred embodiment of the present invention, the first transmission assembly 417 includes a main transmission wheel 4171, a transmission belt 4172 and a slave transmission wheel 4173; the main transmission wheel 4171 and the slave transmission wheel 4173 are respectively rotatably mounted on the upper fixed seat 411, the main transmission wheel 4171 and the slave transmission wheel 4173 are connected by a transmission belt 4172, and the slave transmission wheel 4173 is connected to the upper part of the threaded rod 412, and the slave transmission wheel 4173 can drive the threaded rod 412 to rotate.

[0082] On the basis of the above structure, the rotation of the main transmission wheel 4171 is transmitted to the slave transmission wheel 4173 through the transmission belt 4172, so that the slave transmission wheel 4173 also starts to rotate. The rotation of the slave transmission wheel 4173 drives the threaded rod 412 connected thereto to rotate. The rotation of the threaded rod 412 is converted into the up and down movement of the moving seat 413 through the threaded connection. The movement of the moving seat 413 is transmitted to the scraper fixing plate 415 and the scraper 416 through the transverse connecting member 414, so that the scraper 416 slides up and down on the inner wall of the sub-condensation chamber to achieve the function of scraping droplets. The present invention adopts a transmission belt 4172 to connect the main transmission wheel 4171 and the slave transmission wheel 4173, which can realize efficient rotational power transmission. The combined design of the main transmission wheel 4171, the transmission belt 4172 and the slave transmission wheel 4173 makes the transmission component structure compact and easy to install and maintain.

[0083] In a preferred embodiment of the present invention, the scraping assembly 41 further includes two outer guide rails 418 and two inner guide rails 419;

[0084] Two sliding grooves are symmetrically arranged at both ends of the threaded hole on the movable seat 413;

[0085] The two outer guide rails 418 are installed between the two fixing seats 411, and the two outer guide rails are respectively slidably matched with the two sliding grooves;

[0086] Two inner guide rails 419 are installed in the sub-condensing chamber along a vertical square and are respectively located on both sides of the scraper 416 connecting plate, and the two ends of the scraper 416 connecting plate are respectively slidably matched with the two inner guide rails 419.

[0087] On the basis of the above structure, when the threaded rod 412 rotates, the movable seat 413 moves up and down along the threaded rod 412 through a threaded connection. At the same time, the sliding groove on the movable seat 413 slides with the outer guide rail to ensure that the moving trajectory of the movable seat 413 remains vertical and stable. The scraper 416 connecting plate slides with the inner guide rail through the sliding parts at both ends thereof, so that the scraper 416 can accurately slide up and down on the inner wall of the sub-condensation chamber. The present invention significantly enhances the stability of the scraper 416 during movement through the matching design of the outer guide rail and the inner guide rail, avoiding uneven scraping or damage to the scraper 416 caused by deflection or shaking. Through the dual guiding effect of the inner and outer guide rails, the scraper 416 can more accurately fit the inner wall of the sub-condensation chamber for scraping operations.

[0088] In a preferred embodiment of the present invention, scraping components 41 are installed on two opposite side walls of each sub-condensation chamber 22 .

[0089] On the basis of the above structure, the scrapers 416 installed on both sides can work at the same time, thereby significantly improving the efficiency of scraping off the droplets. Compared with the single-sided installation, the double-sided scraper 416 can complete the cleaning of the inner wall of the entire sub-condensation chamber in a shorter time. The two scrapers 416 scrape from both sides of the sub-condensation chamber respectively, which can ensure that every corner and gap of the inner wall can be effectively cleaned. This double-sided scraping method avoids omissions or uneven cleaning that may occur during single-sided scraping. The scrapers 416 installed on both sides can balance each other when working, reducing the deflection or shaking of the scraper 416 caused by single-sided force. This balance helps to maintain the stable movement of the scraper 416 and improve the accuracy and effect of scraping.

[0090] In a preferred embodiment of the present invention, the driving assembly 42 includes a first transmission box 421, a fixing frame 422, a driving motor 423, a driving gear 424, a first rotating shaft 425, a driven gear 426, a toothed belt 427, a main gear 428, a first gear ring 429, a plurality of secondary gears 4210, a second gear ring 4211, a plurality of second rotating shafts 4212 and a plurality of meshing gears 4213;

[0091] The first transmission box 421 is installed on the top surface of the cold trap cover 12, and the inner wall of the first transmission box 421 is formed with an installation cavity;

[0092] The fixing frame 422 includes a plurality of vertical connecting columns 4221, a first annular support seat 4222 and a second annular support seat 4223; the first annular support seat 4222 and the second annular support seat 4223 are connected by a plurality of vertical connecting columns 4221; a supporting tray is also provided in the middle of the first annular support seat 4222; the second disc-shaped support seat is rotatably mounted at the top opening of the cold trap housing 11;

[0093] The driving motor 423 is installed at one end of the first transmission box 421, and the output end of the driving motor 423 extends into the installation cavity of the first transmission box 421 along the vertical direction;

[0094] The driving gear 424 is mounted on the output shaft of the driving motor 423 and is located in the mounting cavity;

[0095] The first rotating shaft 425 is rotatably installed between the cold trap cover 12 and the supporting tray;

[0096] The driven gear 426 is mounted on the upper portion of the first rotating shaft 425; the driven gear 426 is transmission-connected to the driven gear 426 via a toothed belt 427;

[0097] The main gear 428 is mounted on the lower portion of the first rotating shaft 425;

[0098] The first toothed ring 429 is mounted on the inner side wall of the support tray;

[0099] A plurality of secondary gears 4210 are rotatably mounted on the inner bottom wall of the support tray, and the plurality of secondary gears 4210 are respectively meshed with the main gear 428, and the plurality of secondary gears 4210 are also respectively meshed with the first gear ring 429;

[0100] The second gear ring 4211 is installed on the inner side wall of the second annular support seat 4223;

[0101] The multiple meshing gears 4213 are connected to the multiple main transmission wheels 4171 in a one-to-one correspondence through the multiple second rotating shafts 4212 ; the multiple meshing gears 4213 are respectively meshed with the second gear ring 4211 .

[0102] On the basis of the above structure, the driving motor 423 starts to work, and its output shaft drives the driving gear 424 to rotate. The driving gear 424 is connected to the driven gear 426 through the toothed belt 427, so the rotation of the driving gear 424 will drive the driven gear 426 to rotate synchronously. The driven gear 426 is installed on the upper part of the first rotating shaft 425, so the rotation of the driven gear 426 will drive the first rotating shaft 425 to rotate. The lower part of the first rotating shaft 425 is installed with a main gear 428, and the main gear 428 is meshed with a plurality of secondary gears 4210. Therefore, the rotation of the first rotating shaft 425 will drive the main gear 428 to rotate, and then drive the plurality of secondary gears 4210 to rotate synchronously. The plurality of secondary gears 4210 are respectively meshed with the first gear ring 429. Therefore, the rotation of the secondary gear 4210 will drive the first gear ring 429 to rotate. The first gear ring 429 is installed on the inner side wall of the support tray, and the support tray is a part of the fixed frame 422. Therefore, the rotation of the first gear ring 429 will drive the entire fixed frame 422 to rotate. A second gear ring 4211 is installed on the inner side wall of the second annular support seat 4223 of the fixed frame 422. Therefore, the rotation of the fixed frame 422 will drive the second gear ring 4211 to rotate. The second gear ring 4211 is meshed with a plurality of meshing gears 4213. Therefore, the rotation of the second gear ring 4211 will drive the plurality of meshing gears 4213 to rotate synchronously. The plurality of meshing gears 4213 are connected to the plurality of main transmission wheels 4171 in a one-to-one correspondence through the plurality of second rotating shafts 4212. Therefore, the rotation of the meshing gears 4213 will drive the main transmission wheel 4171 to rotate synchronously. The main transmission wheel 4171 is connected to the slave transmission wheel 4173 through a transmission belt 4172. Therefore, the rotation of the main transmission wheel 4171 will drive the slave transmission wheel 4173 to rotate synchronously. The slave transmission wheel 4173 is connected to the threaded rod 412. Therefore, the rotation of the transmission wheel 4173 drives the threaded rod 412 to rotate. The threaded rod 412 is connected to the movable seat 413 by a thread. Therefore, the rotation of the threaded rod 412 is converted into the up and down movement of the movable seat 413. In this way, the present invention realizes the synchronous rotation of multiple threaded rods 412 through a driving motor 423, and the rotation of the threaded rod 412 is transmitted to the movable seat 413 through the threaded connection, so that the movable seat 413 moves up and down along the threaded rod 412, and the movement of the movable seat 413 is transmitted to the scraper fixing plate 415 and the scraper 416 through the transverse connecting member 414, so that the scraper 416 slides up and down along the inner wall of the sub-condensation chamber, and the scraper 416 scrapes off the droplets condensed on the inner wall during the sliding process, which has the advantages of compact structure, high transmission efficiency, low cost and good synchronization, ensures the synchronous movement of multiple threaded rods 412 and the scraper 416, and improves the stability and reliability of the system.

[0103] In a preferred embodiment of the present invention, there are three sub-condensation chambers 22, six scraping assemblies 41, and one scraping assembly 41 is installed on two opposite side walls of each sub-condensation chamber 22. Thus, the advantages of good stability are achieved.

[0104] Although only certain components and embodiments of the present application have been illustrated and described, many modifications and changes may be conceived by those skilled in the art without actually departing from the scope and spirit of the claims, such as changes in the size, dimensions, structure, shape and proportion of the various elements, mounting arrangements, material usage, color, orientation, etc.

[0105] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. A high-efficiency diffusion pump cold trap, comprising a cold trap housing, wherein the cold trap housing comprises a cold trap shell and a cold trap cover, wherein the interior of the cold trap shell forms a receiving cavity with an open top, and the cold trap cover covers the top opening of the cold trap shell; characterized in that: Also includes: A condensation component, which includes a cylindrical main condensation cavity, a plurality of sub-condensation cavities and a coil-type condenser; the interior of the main condensation cavity forms a cylindrical main condensation cavity that passes through the cavity along its axial direction; the plurality of sub-condensation cavities are distributed at intervals along the circumference of the main condensation cavity, one end of the sub-condensation cavity extends into the main condensation cavity along the radial direction of the main condensation cavity to form a condensation connection part, and the other end thereof extends outwardly along the radial direction of the main condensation cavity to form a condensation diffusion part; the plurality of condensation diffusion parts are respectively detachably connected to the inner wall of the accommodating cavity; the interior of the sub-condensation cavity forms a rectangular sub-condensation cavity that passes through its upper and lower surfaces in a vertical direction; the plurality of sub-condensation cavities are respectively connected to the main condensation cavity; the coil-type condenser is installed in the main condensation cavity and contacts with the inner wall of the main condensation cavity; the coil-type condenser also contacts with the condensation connection parts of the plurality of sub-condensation cavities respectively.

2. The high-efficiency diffusion pump cold trap according to claim 1, characterized in that: It also includes a water storage container, which is arranged in the accommodating cavity and below the condensing component. The water storage container is used to receive the droplets dripping from the condensing component.

3. The high-efficiency diffusion pump cold trap according to claim 2, characterized in that: A drain port is arranged on the outer wall of the water storage container, and the drain port penetrates through the cold trap shell and is connected to an external water pumping device through a pipe or a joint.

4. The high-efficiency diffusion pump cold trap according to claim 2, characterized in that: It also includes a droplet scraping mechanism, which includes a plurality of scraping components respectively installed in the plurality of sub-condensation chambers and a driving device installed on the cold trap shell, and the driving device is used to synchronously drive the scrapers of the plurality of scraping components to slide up and down along the inner walls of the plurality of sub-condensation chambers respectively, so as to scrape off condensed but undripped droplets.

5. The high-efficiency diffusion pump cold trap according to claim 4, characterized in that: A vertical guide groove extending along a vertical square is provided on the side wall of the condensation diffusion portion of the sub-condensation cavity; The scraping assembly includes two fixed seats, a threaded rod, a movable seat, a transverse connecting member, a scraper fixing plate, a scraper and a first transmission assembly; The two fixing seats are respectively installed on the upper and lower parts of the outer side wall of the sub-condensation chamber; The threaded rod is rotatably mounted between the two fixing seats; The movable seat body is provided with a threaded hole, and the movable seat is threadedly connected with the threaded rod through the threaded hole; One end of the transverse connecting member is connected to one side of the movable seat body, and the other end of the transverse connecting member passes through the vertical guide groove and extends into the sub-condensation chamber of the condensation diffusion part; The scraper fixing plate is located in the sub-condensation chamber and is installed at one end of the transverse connecting member; The scraper is installed at the lower part of the scraper fixing plate, and one side of the scraper contacts the inner wall of the sub-condensation chamber; the scraper is in the shape of a long strip, and its length matches the long side of the sub-condensation chamber; The first transmission assembly is installed on the fixing seat located above, and the first transmission assembly is used to drive the threaded rod to rotate.

6. The high-efficiency diffusion pump cold trap according to claim 5, characterized in that: The first transmission assembly includes a main transmission wheel, a transmission belt and a slave transmission wheel; the main transmission wheel and the slave transmission wheel are respectively rotatably installed on the upper fixed seat, the main transmission wheel and the slave transmission wheel are connected by a transmission belt, the slave transmission wheel is connected to the upper part of the threaded rod, and the slave transmission wheel can drive the threaded rod to rotate.

7. The high-efficiency diffusion pump cold trap according to claim 6, characterized in that: The scraping assembly also includes two outer guide rails and two inner guide rails; The movable seat is symmetrically provided with two sliding grooves at both ends of the threaded hole; The two outer guide rails are installed between the two fixing seats, and the two outer guide rails are respectively slidably matched with the two sliding grooves; The two inner guide rails are installed in the sub-condensing chamber along a vertical square and are respectively located on both sides of the scraper connecting plate, and the two ends of the scraper connecting plate are respectively slidably matched with the two inner guide rails.

8. The high-efficiency diffusion pump cold trap according to claim 6, characterized in that: The scraping components are installed on two opposite side walls of each sub-condensation chamber.

9. The high-efficiency diffusion pump cold trap according to claim 6, characterized in that: The drive assembly includes a first transmission box, a fixed frame, a drive motor, a driving gear, a first rotating shaft, a driven gear, a toothed belt, a main gear, a first gear ring, a plurality of secondary gears, a second gear ring, a plurality of second rotating shafts and a plurality of meshing gears; The first transmission box is installed on the top surface of the cold trap cover, and the inner wall of the first transmission box is formed with a mounting cavity; The fixing frame includes a plurality of vertical connecting columns, a first annular support seat and a second annular support seat; the first annular support seat and the second annular support seat are connected by a plurality of the vertical connecting columns; a supporting tray is also provided in the middle of the first annular support seat; the second disc-shaped support seat is rotatably mounted at the top opening of the cold trap shell; The driving motor is installed at one end of the first transmission box, and the output end of the driving motor extends into the installation cavity of the first transmission box along the vertical direction; The driving gear is mounted on the output shaft of the driving motor and is located in the mounting cavity; The first rotating shaft is rotatably installed between the cold trap cover and the supporting tray; The driven gear is mounted on the upper portion of the first rotating shaft; The driven gear is transmission-connected to the driven gear via the toothed belt; The main gear is mounted on the lower part of the first rotating shaft; The first gear ring is mounted on the inner side wall of the support tray; The plurality of secondary gears are rotatably mounted on the inner bottom wall of the support tray, the plurality of secondary gears are respectively meshed with the primary gear, and the plurality of secondary gears are also respectively meshed with the first gear ring; The second gear ring is mounted on the inner side wall of the second annular support seat; The plurality of meshing gears are connected to the plurality of main transmission wheels in a one-to-one correspondence via the plurality of second rotating shafts; and the plurality of meshing gears are respectively meshed with the second gear rings.

10. The high-efficiency diffusion pump cold trap according to claim 9, characterized in that: The number of the sub-condensation chambers is three, the number of the scraping assemblies is six, and one group of the scraping assemblies is installed on two opposite side walls of each of the sub-condensation chambers.

Images