Visual inspection equipment for semiconductor module packaging

Abstract

The invention discloses visual detection equipment for semiconductor module packaging, and relates to the technical field of semiconductor detection, the visual detection equipment comprises a base, the top end of the base is slidably connected with a moving assembly, the inner wall of the base is rotatably provided with a synchronous belt, and the top end of the synchronous belt is fixedly connected to the bottom end of the moving assembly; the moving assembly comprises a sliding base, the bottom end of the sliding base communicates with two sets of lower bin bodies, and the side wall of each set of lower bin body communicates with a set of air bags. The synchronous belt pushes the sliding seat to move, so that the sliding seat stretches the air bag, negative pressure is generated in the air bag, air flow passes through the position above a chip, dust is sucked into the air bag, dust outside chip packaging is sucked away, misjudgment in the subsequent visual inspection process is avoided, and the visual inspection efficiency is improved. Unnecessary loss in the chip production process is prevented, the yield is improved, the cost is reduced, and the chip production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor detection, and in particular to a visual detection device for semiconductor module packaging. Background Art

[0002] Semiconductor modules are devices that use certain semiconductor materials as working materials to produce stimulated emission. They are part of semiconductor lasers. Semiconductor packaging refers to the process of processing tested wafers into independent chips according to product models and functional requirements. Visual inspection is to use machines instead of human eyes to make measurements and judgments. Visual inspection refers to the use of machine vision products to convert the captured target into image signals and transmit them to a dedicated image processing system. It has immeasurable value in detecting defects and preventing defective products from being delivered to consumers. Therefore, packaged semiconductors usually require visual inspection equipment to judge their quality.

[0003] An existing patent (publication number: CN118299292B) discloses a visual inspection device for semiconductor module packaging, which belongs to the field of visual inspection technology and includes a main module, a drive module, two visual inspection modules and an air supply module. The main module includes an inspection frame, and the bottom of the inner wall of the inspection frame is rotatably connected to an annular bottom plate. The drive module includes two lifting components both arranged on the top of the annular bottom plate, and an inner hollow ring is fixedly connected between the tops of the two lifting components. Through the arrangement of a rotating component, a color-changing lens, a switching disk, a switching component, a ball bearing and a limit component, different light sources can be continuously switched to fill in the light for the semiconductor module during the surround visual inspection of the semiconductor module, so as to cope with different materials and metals on the semiconductor module, so as to highlight the surface defects of different materials and metals, thereby improving the accuracy of visual inspection of the device.

[0004] However, the above technical solution still has certain defects. During use, after the chip is packaged, when the chip moves inside the device, dust in the air will fall onto the external package of the chip, resulting in the dust particles on the outside of the package being misjudged as defects on the chip by the visual inspection instrument during subsequent visual inspection, resulting in misjudgment during the production process. For this reason, a visual inspection device for semiconductor module packaging is proposed. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a visual inspection device for semiconductor module packaging, which can avoid misjudgment in the subsequent visual inspection process, prevent unnecessary loss in the process of chip production, and improve the yield rate.

[0006] An embodiment of the present invention provides a visual inspection device for semiconductor module packaging, comprising a base, a top end of the base is slidably connected to a moving component, an inner wall of the base is rotatably provided with a synchronous belt, and a top end of the synchronous belt is fixedly connected to a bottom end of the moving component; The moving assembly includes a sliding seat, the bottom end of the sliding seat is connected to two groups of lower warehouse bodies, each group of side walls of the lower warehouse bodies is respectively connected to a group of air bags, the air bags are hinged with a second flap at the connection with the lower warehouse body, the end of the air bags away from the lower warehouse body is hinged with a first flap, the air bags are provided with an opening at the connection with the first flap, a dust collector head is provided at the top end of the sliding seat, the dust collector head is connected to the interior of the lower warehouse body, and the bottom end of the sliding seat is fixedly connected to the top end of the synchronous belt.

[0007] According to some embodiments of the present invention, a fixed block is provided at the top sliding sleeve of the sliding seat, a groove is opened at the sliding seat at the contact position with the fixed block, two groups of magnetic strips are fixedly connected to the top of the sliding seat, the magnetic strips are tightly adsorbed on the bottom end of the fixed block, the lower warehouse body is connected to the inside of the groove, a chip is provided at the top of the fixed block, and two groups of racks are fixedly connected to the bottom end of the sliding seat.

[0008] According to some embodiments of the present invention, a unloading mechanism is provided at one end of the base, and the unloading mechanism includes two groups of gear plates, the two groups of gear plates are rotatably connected to the side walls of the base, the side walls of each group of gear plates are respectively fixedly connected with a group of rotating arms, the ends of the two groups of rotating arms are rotatably connected with a hanging plate, and the top end of the hanging plate is connected to the air pump.

[0009] According to some embodiments of the present invention, the bottom end of the lifting plate is connected to a plurality of groups of suction heads, the outer wall of each group of the suction heads is respectively sleeved with a group of sleeves, the bottom end of the sleeves is fixedly connected to a silicone pad, the inner wall of the sleeves is fixedly connected to a plurality of groups of sliders extending to the interior of the suction heads, the top of each group of the sliders is respectively fixedly connected to a group of first springs, and the top of the first springs is fixedly connected to the inner wall of the suction head.

[0010] According to some embodiments of the present invention, the top of each group of the fixed blocks is slidably connected to two groups of clamping blocks, the side walls of each group of the clamping blocks are fixedly connected to a group of second springs, and the ends of each group of the second springs are fixedly connected to the inner wall of the fixed block.

[0011] According to some embodiments of the present invention, a detection mechanism is fixedly connected to the top of the base, and the detection mechanism includes two groups of fixed sleeves, and the inner wall of each group of the fixed sleeves is fixedly connected to multiple groups of catheters, and the tops of the multiple groups of catheters are connected to a light collecting cover, and the inner wall fixed sleeve of the light collecting cover is provided with a visual detection instrument body.

[0012] According to some embodiments of the present invention, a group of first refractors are fixedly connected to the inner wall of each group of the conduits, a second refractor located next to the first refractors is fixedly connected to the inner wall of the conduits, and two groups of LED lamp beads are fixedly connected to the inner wall of the conduits near the bottom.

[0013] According to some embodiments of the present invention, the bottom sliding sleeve of the fixed sleeve is provided with an elastic strip, and the outer wall of the elastic strip is fixedly connected to multiple groups of lenses, and the lenses are attached to the bottom end of the fixed sleeve.

[0014] According to some embodiments of the present invention, the bottom end of the fixed sleeve is rotatably connected to a rotating sleeve, the bottom end of the fixed sleeve is fixedly connected to a motor, the output end of the motor is fixedly connected to the bottom end of the rotating sleeve, and the inner wall sliding sleeve of the rotating sleeve is provided with multiple groups of sliding rods.

[0015] According to some embodiments of the present invention, one end of the sliding rod extends to the outer wall of the rotating sleeve, the end of the sliding rod located outside the rotating sleeve is hinged to the side wall of the lens, the end of the sliding rod located inside the rotating sleeve is fixedly connected to a telescopic spring, and the end of the telescopic spring is fixedly connected to the inside of the rotating sleeve.

[0016] In summary, the present invention mainly has the following beneficial effects: 1. The present invention pushes the sliding seat to move with the synchronous belt, so that the sliding seat stretches the airbag, thereby generating negative pressure inside the airbag, so that the airflow passes over the chip and drives the dust to be sucked into the airbag, so that the dust outside the chip package is sucked away, avoiding misjudgment in the subsequent visual inspection process, preventing unnecessary loss in the process of chip production, improving the yield rate, reducing costs, and improving chip production efficiency; 2. The present invention drives the rack through the sliding seat, so that the toothed disk drives the rotating arm to flip, so that the suction head is attached to the top of the chip, and the silicone pad is attached to the PCB board of the chip, and the chip is taken off from the moving component, and the unloading component does not contact the chip package, preventing the chip from being damaged during the unloading process, and the visual inspection equipment can be connected to the subsequent processing equipment through the conveyor belt, so that the chip can be unloaded quickly and efficiently through the unloading mechanism after visual inspection, further improving the production efficiency of the chip; 3. The present invention allows the light from two groups of LED lamp beads to pass through the lens and illuminate the top of the chip, and uses different lenses to align with the catheter so that light of different colors is illuminated on the outside of the chip, and uses the first refractor and the second refractor to refract the light, so that the visual inspection instrument body can detect multiple groups of chips at the same time, making the detection efficiency more efficient. In the above process, the visual inspection instrument body is mounted inside the light collecting cover to prevent dust particles in the air from adhering to the lens of the visual inspection instrument body, thereby avoiding misjudgment during the detection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 It is a schematic diagram of the main structure of an embodiment of the present invention; Figure 2 It is a bottom view structural schematic diagram of an embodiment of the present invention; Figure 3 It is a bottom view structural diagram of a sliding seat according to an embodiment of the present invention; Figure 4 Schematic diagram of the cross-sectional structure of the lower bin body according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the suction head and the chip in the bonding state according to an embodiment of the present invention; Figure 6 Schematic diagram of the cross-sectional structure of the suction head and the fixing block according to an embodiment of the present invention; Figure 7 is a schematic diagram of the cross-sectional structure of an airbag according to an embodiment of the present invention; Figure 8 It is a bottom view structural schematic diagram of the detection mechanism of an embodiment of the present invention; Fig. 9 This is a schematic diagram of the explosion structure of the detection mechanism according to an embodiment of the present invention; Fig.10 It is a schematic diagram of a first cross-sectional structure of a detection mechanism according to an embodiment of the present invention; Fig.11 It is a schematic diagram of a second cross-sectional structure of a detection mechanism according to an embodiment of the present invention; Fig.12 It is a schematic diagram of the cross-sectional structure of a rotating sleeve according to an embodiment of the present invention.

[0018] In the figure: 1. Base; 2. Moving assembly; 3. Unloading mechanism; 4. Detection mechanism; 5. Synchronous belt; 201, sliding seat; 202, fixed block; 203, chip; 204, dust collector head; 205, lower compartment; 206, air bag; 207, first flap; 208, second flap; 209, magnetic strip; 301, toothed disc; 302, rotating arm; 303, lifting plate; 304, suction head; 305, sleeve; 306, slider; 307, first spring; 308, clamping block; 309, second spring; 310, silicone pad; 311, rack; 401, fixed sleeve; 402, guide tube; 403, light collecting cover; 404, first refractor; 405, second refractor; 406, LED lamp bead; 407, visual inspection instrument body; 408, elastic strip; 409, lens; 410, rotating sleeve; 411, sliding rod; 412, telescopic spring; 413, motor. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0020] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0021] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0022] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0023] The technical solution of the present invention is described in detail below through the accompanying drawings and specific embodiments: The present invention provides a visual inspection device for semiconductor module packaging, such as Figures 1 to 12 As shown, it includes a base 1, the top of the base 1 is slidably connected to a moving component 2, the inner wall of the base 1 is rotatably provided with a synchronous belt 5, and the top of the synchronous belt 5 is fixedly connected to the bottom end of the moving component 2; The mobile assembly 2 includes a sliding seat 201, the bottom end of the sliding seat 201 is connected to two groups of lower warehouse bodies 205, and the side walls of each group of lower warehouse bodies 205 are respectively connected to a group of air bags 206. The air bags 206 are hinged with a second flap 208 at the connection with the lower warehouse body 205, and the end of the air bags 206 away from the lower warehouse body 205 is hinged with a first flap 207. The air bags 206 are opened at the connection with the first flap 207. The top of the sliding seat 201 is provided with a dust collector 204, and the dust collector 204 is connected to the lower warehouse body 2 05, the bottom end of the sliding seat 201 is fixedly connected to the top end of the synchronous belt 5, the top sliding sleeve of the sliding seat 201 is provided with a fixed block 202, the sliding seat 201 is provided with a groove at the contact position with the fixed block 202, the top of the sliding seat 201 is fixedly connected with two groups of magnetic strips 209, the magnetic strips 209 are tightly adsorbed on the bottom end of the fixed block 202, the lower compartment 205 is connected to the inside of the groove, the top of the fixed block 202 is provided with a chip 203, and the bottom end of the sliding seat 201 is fixedly connected with two groups of racks 311.

[0024] The sliding seat 201 is pushed to slide on the top of the base 1 by the synchronous belt 5, so that the sliding seat 201 slides from one end of the base 1 to the other end. In the process of the sliding seat 201 moving toward the detection mechanism 4, the sliding seat 201 pulls the airbag 206, so that the airbag 206 is deployed, thereby generating negative pressure inside the airbag 206. At this time, the second flap 208 is flipped open, so that the negative pressure inside the airbag 206 sucks the external air into the airbag 206, so that the air passes through the surface of the chip 203 and takes away the dust on the surface of the chip 203. Then these airflows enter the interior of the dust collector 204, and then these airflows enter the interior of the airbag 206. When the chip 203 is removed by the unloading mechanism 3, the synchronous belt 5 pushes the sliding seat 201 to slide on the top of the base 1, so that the sliding seat 201 slides from one end of the base 1 to the other end. In the process of the sliding seat 201 moving toward the detection mechanism 4, the sliding seat 201 pulls the airbag 206, so that the airbag 206 is deployed, thereby generating negative pressure inside the airbag 206. At this time, the second flap 208 is flipped open, so that the negative pressure inside the airbag 206 draws the external air into the airbag 206, so that the air passes through the surface of the chip 203 and takes away the dust on the surface of the chip 203. Then these airflows enter the interior of the dust collector 204, and then these airflows enter the interior of the airbag 206. When the chip 203 is removed by the unloading mechanism 3, the synchronous belt 5 pushes the sliding seat 201 to slide on the top of the base 1. The movable seat 201 slides back and resets, so that the sliding seat 201 compresses the airbag 206, thereby generating a high-pressure state inside the airbag 206, so that the second flap 208 is closed, and at this time the first flap 207 is pushed by the air pressure to flip open, so that the air is discharged from the inside of the airbag 206, and the fixed block 202 is adsorbed on the top of the sliding seat 201 through the magnetic strip 209, so that the corresponding fixed block 202 can be quickly replaced when visual inspection of chips 203 of different models is performed, and in the process of movement of the sliding seat 201, the negative pressure inside the lower chamber 205 causes the negative pressure to generate an adsorption force on the fixed block 202, so that the fixed seat is separated from the sliding seat 201 during the visual inspection, causing damage to the chip 203.

[0025] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6A feeding mechanism 3 is provided at one end of the base 1. The feeding mechanism 3 includes two sets of toothed discs 301, which are rotatably connected to the side walls of the base 1. The side walls of each set of toothed discs 301 are respectively fixedly connected with a set of rotating arms 302. The ends of the two sets of rotating arms 302 are rotatably connected with a hanging plate 303. The top of the hanging plate 303 is connected to the air pump. The bottom end of the hanging plate 303 is connected with multiple sets of suction heads 304. The outer wall of each set of suction heads 304 is respectively sleeved with a set of sleeves 305. The bottom end of the sleeve 305 is fixedly connected with a silicon The rubber pad 310 and the inner wall of the sleeve 305 are fixedly connected with multiple groups of sliders 306 extending into the interior of the suction head 304, and the top of each group of sliders 306 is fixedly connected with a group of first springs 307, and the top of the first springs 307 is fixedly connected to the inner wall of the suction head 304. The top of each group of fixed blocks 202 is slidably connected with two groups of clamping blocks 308, and the side walls of each group of clamping blocks 308 are fixedly connected with a group of second springs 309, and the end of each group of second springs 309 is fixedly connected to the inner wall of the fixed block 202.

[0026] After the sliding seat 201 passes through the detection mechanism 4, the sliding seat 201 continues to move toward the direction of the unloading mechanism 3, so that the sliding seat 201 drives the rack 311 to mesh with the toothed disc 301, thereby driving the toothed disc 301 to rotate, and the toothed disc 301 drives the rotating arm 302 to flip during the rotation process, so that the rotating arm 302 drives the hanging plate 303 to flip, and because the center of gravity of the hanging plate 303 itself is relatively low, the suction head 304 is always downward, and then with the flipping of the rotating arm 302, the suction head 304 is turned downward. The hanging plate 303 is reversed to the top of the sliding seat 201, so that the sleeve 305 contacts the chuck, and then as the hanging plate 303 continues to press down, the suction head 304 compresses the first spring 307. When the first spring 307 is compressed to the limit, the downward pressure of the suction head 304 is transmitted to the top of the slider 306, thereby pushing the sleeve 305 to push the chuck downward, so that the chuck slides on the top of the fixed block 202 and compresses the second spring 309. When the bottom end of the sleeve 305 fits on the fixed block 202, the silicone pad 310 is attached to the top of the PCB of the chip 203. Under the action of the air pump, suction is generated inside the suction head 304, so that the chip 203 is sucked, and the chuck is blocked by the sleeve 305 and does not generate a clamping force on the chip 203. Then, when the sliding seat 201 slides back and resets, the sliding seat 201 drives the rack 311 to move in the opposite direction, so that the toothed disc 301 rotates in the opposite direction, so that the rotating arm 302 flips in the opposite direction, and the hanging plate 303 is reversed. When the lifting plate 303 is flipped over, the first spring 307 gradually rebounds during the lifting process, so that the sleeve 305 is always located between the two groups of clamps 308, and the chip 203 slides into the sleeve 305 driven by the suction head 304. When the slider 306 slides to the bottom on the inner wall of the suction head 304 and cannot slide further, the slider drives the sleeve 305 to rise, so that the sleeve 305 is separated from the two groups of clamps 308, so that the second spring 309 rebounds and pushes the clamp 308 to reset.

[0027] Please refer to Figure 1 , Figure 2 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 and Fig.12The top of the base 1 is fixedly connected with a detection mechanism 4, and the detection mechanism 4 includes two groups of fixed sleeves 401. The inner wall of each group of fixed sleeves 401 is fixedly connected with multiple groups of conduits 402. The tops of the multiple groups of conduits 402 are connected with light collecting covers 403. The inner wall fixed sleeves 401 of the light collecting covers 403 are provided with a visual detector body 407. The inner walls of each group of conduits 402 are respectively fixedly connected with a group of first refractors 404, and the inner walls of the conduits 402 are fixedly connected with a second refractor 405 located next to the first refractor 404. Two groups of LED lamp beads 406 are fixedly connected to the inner wall of the conduits 402 near the bottom end. The bottom sliding sleeve of the fixed sleeve 401 is provided with an elastic strip 408, and the outer wall of the elastic strip 408 There are multiple groups of lenses 409 fixedly connected, the lenses 409 are attached to the bottom end of the fixed sleeve 401, the bottom end of the fixed sleeve 401 is rotatably connected to a rotating sleeve 410, the bottom end of the fixed sleeve 401 is fixedly connected to a motor 413, the output end of the motor 413 is fixedly connected to the bottom end of the rotating sleeve 410, the inner wall sliding sleeve of the rotating sleeve 410 is provided with multiple groups of sliding rods 411, one end of the sliding rod 411 extends to the outer wall of the rotating sleeve 410, one end of the sliding rod 411 located outside the rotating sleeve 410 is hinged to the side wall of the lens 409, one end of the sliding rod 411 located inside the rotating sleeve 410 is fixedly connected to a telescopic spring 412, and the end of the telescopic spring 412 is fixedly connected to the inside of the rotating sleeve 410.

[0028] When the sliding seat 201 drives the chip 203 to pass under the detection mechanism 4, the synchronous belt 5 stops so that the chip 203 has enough time to be detected. The light of the LED lamp bead 406 passes through the lens 409 and irradiates the surface of the chip 203. The color of the lens 409 is different, so that the light passing through the lens 409 presents a corresponding color, which is convenient for detection under different light conditions. The rotating sleeve 410 is driven to rotate by the motor 413, so that the rotating sleeve 410 drives the sliding rod 411 to rotate, so that the sliding rod 411 drives the lens 409 to rotate. During the rotation process, the lens 409 drives the elastic strip 408 to slide on the bottom end of the fixed sleeve 401, so that the lens 409 can be accurately rotated to the bottom end of the catheter 402. During the rotation process of the lens 409, since the position of the lens 409 is The elastic strip 408 is restricted so that the distance between the lens 409 and the rotating sleeve 410 changes, so that the sliding rod 411 slides out of the rotating sleeve 410, thereby compressing the telescopic spring 412. When the distance between the lens 409 and the rotating sleeve 410 decreases, the telescopic spring 412 rebounds, and the sliding rod 411 slides into the rotating sleeve 410 at this time, so that when the motor 413 drives the rotating sleeve 410 to rotate, the sliding rod 411 can always push the lens 409 to rotate, and the light is irradiated to the surface of the chip 203 and reflected back into the catheter 402. After these lights are refracted by the first refractor 404 and the second refractor 405, they are captured by the visual detector body 407, so that the visual detector body 407 can collect and analyze the image information of multiple groups of chips 203 at the same time, thereby improving the detection efficiency.

[0029] When in use, the sliding seat 201 is pushed to move on the synchronous belt 5, so that the sliding seat 201 stretches the airbag 206, thereby generating negative pressure inside the airbag 206, allowing the airflow to pass over the chip 203 and suck the dust into the airbag 206, so that the dust on the outside of the chip 203 package is sucked away, avoiding misjudgment in the subsequent visual inspection process, preventing unnecessary losses in the process of producing the chip 203, improving the yield rate, reducing costs, and improving the production efficiency of the chip 203. The parts not involved in the device are the same as the prior art or can be implemented using the prior art.

[0030] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present invention.

Claims

1. A visual inspection device for semiconductor module packaging, comprising a base (1), characterized in that: The top end of the base (1) is slidably connected to a moving assembly (2), the inner wall of the base (1) is rotatably provided with a synchronous belt (5), and the top end of the synchronous belt (5) is fixedly connected to the bottom end of the moving assembly (2); The moving assembly (2) comprises a sliding seat (201), the bottom end of the sliding seat (201) is connected to two groups of lower bins (205), the side walls of each group of the lower bins (205) are respectively connected to a group of air bags (206), the air bags (206) are hingedly connected to a second flap (208) at the connection point with the lower bins (205), one end of the air bags (206) away from the lower bins (205) is hingedly connected to a first flap (207), the air bags (206) are provided with an opening at the connection point with the first flap (207), the top end of the sliding seat (201) is provided with a dust collector head (204), the dust collector head (204) is connected to the interior of the lower bins (205), and the bottom end of the sliding seat (201) is fixedly connected to the top end of the synchronous belt (5).

2. The visual inspection device for semiconductor module packaging according to claim 1, characterized in that: The top sliding sleeve of the sliding seat (201) is provided with a fixed block (202); the sliding seat (201) is provided with a groove at a position where the sliding seat (201) contacts the fixed block (202); the top of the sliding seat (201) is fixedly connected with two groups of magnetic strips (209); the magnetic strips (209) are tightly adsorbed on the bottom end of the fixed block (202); the lower compartment (205) is connected to the inside of the groove; the top of the fixed block (202) is provided with a chip (203); and the bottom end of the sliding seat (201) is fixedly connected with two groups of racks (311).

3. The visual inspection device for semiconductor module packaging according to claim 1, characterized in that: A feeding mechanism (3) is provided at one end of the base (1), the feeding mechanism (3) comprising two groups of toothed discs (301), the two groups of toothed discs (301) being rotatably connected to the side walls of the base (1), the side walls of each group of toothed discs (301) being respectively fixedly connected to a group of rotating arms (302), the ends of the two groups of rotating arms (302) being rotatably connected to a hanging plate (303), the top end of the hanging plate (303) being connected to an air pump.

4. The visual inspection device for semiconductor module packaging according to claim 3, characterized in that: The bottom end of the hanging plate (303) is connected to a plurality of groups of suction heads (304), the outer wall of each group of the suction heads (304) is respectively sleeved with a group of sleeves (305), the bottom end of the sleeves (305) is fixedly connected to a silicone pad (310), the inner wall of the sleeves (305) is fixedly connected to a plurality of slide blocks (306) extending into the interior of the suction heads (304), the top end of each group of the slide blocks (306) is respectively fixedly connected to a group of first springs (307), and the top end of the first springs (307) is fixedly connected to the inner wall of the suction heads (304).

5. The visual inspection device for semiconductor module packaging according to claim 2, characterized in that: The top of each group of the fixed blocks (202) is slidably connected to two groups of clamping blocks (308), the side walls of each group of the clamping blocks (308) are fixedly connected to a group of second springs (309), and the ends of each group of the second springs (309) are fixedly connected to the inner wall of the fixed block (202).

6. The visual inspection device for semiconductor module packaging according to claim 1, characterized in that: The top of the base (1) is fixedly connected to a detection mechanism (4), the detection mechanism (4) comprising two groups of fixed sleeves (401), the inner wall of each group of the fixed sleeves (401) being fixedly connected to a plurality of groups of conduits (402), the tops of the plurality of groups of conduits (402) being connected to a light collecting cover (403), the inner wall fixed sleeve (401) of the light collecting cover (403) being provided with a visual detector body (407).

7. The visual inspection device for semiconductor module packaging according to claim 6, characterized in that: The inner wall of each group of the conduits (402) is respectively fixedly connected to a group of first refractors (404), the inner wall of the conduits (402) is fixedly connected to a second refractor (405) located next to the first refractors (404), and the inner wall of the conduits (402) is fixedly connected to two groups of LED lamp beads (406) at the bottom end.

8. The visual inspection device for semiconductor module packaging according to claim 6, characterized in that: The bottom sliding sleeve of the fixed sleeve (401) is provided with an elastic strip (408), and the outer wall of the elastic strip (408) is fixedly connected to a plurality of groups of lenses (409), and the lenses (409) are attached to the bottom end of the fixed sleeve (401).

9. The visual inspection device for semiconductor module packaging according to claim 6, characterized in that: The bottom end of the fixed sleeve (401) is rotatably connected to a rotating sleeve (410), the bottom end of the fixed sleeve (401) is fixedly connected to a motor (413), the output end of the motor (413) is fixedly connected to the bottom end of the rotating sleeve (410), and the inner wall sliding sleeve of the rotating sleeve (410) is provided with a plurality of groups of sliding rods (411).

10. The visual inspection device for semiconductor module packaging according to claim 9, characterized in that: One end of the sliding rod (411) extends to the outer wall of the rotating sleeve (410), the end of the sliding rod (411) located outside the rotating sleeve (410) is hinged to the side wall of the lens (409), and the end of the sliding rod (411) located inside the rotating sleeve (410) is fixedly connected to a telescopic spring (412), and the end of the telescopic spring (412) is fixedly connected to the inside of the rotating sleeve (410).

Images