Combination sensor and electronic device

Abstract

The invention discloses a combined sensor and electronic equipment, and relates to the technical field of sensors, the combined sensor comprises a packaging shell, an MEMS chip and an ASIC chip which are in signal connection, a waterproof breathable film and a water residue detection assembly, the packaging shell forms a containing cavity and is provided with a breathable hole communicating the containing cavity with the external environment, the MEMS chip is arranged in the containing cavity, and the ASIC chip is arranged in the waterproof breathable film. The ASIC chip is arranged in the accommodating cavity or embedded in the packaging shell; the waterproof breathable film covers the breathable hole, the water residue detection assembly is arranged on the packaging shell and corresponds to the waterproof breathable film, and the water residue detection assembly is in signal connection with the ASIC chip; the water residue detection assembly is used for detecting whether water residues exist at the waterproof breathable film or not, and the ASIC chip is used for starting heating to remove the water residues when detecting that the water residues exist. According to the technical scheme, the waterproof requirement can be met, and meanwhile the measurement precision of the acoustic signal and the air pressure signal is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and particularly to a combined sensor and an electronic device. Background Art

[0002] At present, some intelligent electronic devices (such as smart watches, mobile phones, etc.) integrate an acoustic sensor and a barometric pressure sensor in the same package to form a combined sensor for voice recognition and altitude measurement. In order to ensure effective acquisition of external sound signals and barometric pressure signals, the package is usually opened to communicate with the external environment, and a waterproof breathable membrane is provided at the opening to meet the waterproof requirement. However, when the combined sensor is applied to a wading scenario, water remains on the waterproof breathable membrane, and the water residue will cause the acoustic and breathable performance of the waterproof breathable membrane to deteriorate, thereby resulting in poor measurement accuracy of the acoustic signal and the barometric pressure signal. Summary of the Invention

[0003] The main object of the present invention is to propose a combined sensor and an electronic device, aiming to improve the measurement accuracy of acoustic signals and barometric pressure signals while meeting the waterproof requirement.

[0004] To achieve the above object, a combined sensor proposed by the present invention includes:

[0005] A packaging shell, the packaging shell forms a receiving cavity and is provided with a breathable hole communicating the receiving cavity with the external environment;

[0006] An MEMS chip and an ASIC chip connected by signals, the MEMS chip is disposed in the receiving cavity, and the ASIC chip is disposed in the receiving cavity or buried in the packaging shell;

[0007] A waterproof breathable membrane, the waterproof breathable membrane covers the breathable hole;

[0008] A water residue detection component, the water residue detection component is disposed on the packaging shell and corresponds to the waterproof breathable membrane, and the water residue detection component is signal-connected to the ASIC chip;

[0009] The water residue detection component is used to detect whether there is water residue at the waterproof breathable membrane, and the ASIC chip is used to start heating to remove the water residue when it is detected that there is water residue at the waterproof breathable membrane.

[0010] In one embodiment, the encapsulation housing includes a substrate and an outer shell. The substrate and the outer shell cooperate to form the accommodation cavity. The air vent is formed in the substrate. The ASIC chip is disposed in the accommodation cavity or embedded in the substrate. The waterproof breathable film is disposed in the accommodation cavity and covers the air vent. A first gap is provided between the waterproof breathable film and the substrate. The water residue detection component is disposed on the surface of the substrate facing the first gap.

[0011] In one embodiment, the size of the first gap in the direction perpendicular to the surface of the substrate is 50μm - 100μm.

[0012] In one embodiment, the water residue detection component includes a first electrode and a second electrode. The first electrode and the second electrode are spaced apart and disposed on the surface of the substrate facing the first gap.

[0013] In one embodiment, the first electrode includes a plurality of nested and connected first electrode portions. The second electrode includes a plurality of segmented and connected second electrode portions. The plurality of first electrode portions and the plurality of second electrode portions are alternately and nestedly disposed.

[0014] In one embodiment, a ring-shaped pad is provided on the surface of the substrate facing away from the outer shell corresponding to the air vent. The air vent is located inside the ring-shaped pad.

[0015] In one embodiment, the combined sensor further includes a support plate. The support plate is disposed on the side of the waterproof breathable film facing away from the substrate and forms a second gap with the waterproof breathable film. The support plate is provided with sound holes communicating the accommodation cavity and the second gap. The MEMS chip is disposed on the support plate. The ASIC chip is disposed on the support plate or embedded in the substrate.

[0016] In one embodiment, the periphery of the waterproof breathable film is connected to the substrate through a first adhesive layer. The periphery of the support plate is connected to the waterproof breathable film through a second adhesive layer.

[0017] In one embodiment, the MEMS chip includes a microphone MEMS chip and a barometric pressure MEMS chip. The ASIC chip includes a microphone ASIC chip and a barometric pressure ASIC chip. The microphone MEMS chip is signal-connected to the microphone ASIC chip. The barometric pressure MEMS chip is signal-connected to the barometric pressure ASIC chip. The barometric pressure ASIC chip is configured to start heating to remove water residue when water residue is detected at the waterproof breathable film. The microphone ASIC chip and the barometric pressure ASIC chip are disposed in the accommodation cavity or embedded in the encapsulation housing.

[0018] In one embodiment, the barometric ASIC chip is disposed near the water residue.

[0019] The present invention further provides an electronic device, which includes the combined sensor as described above.

[0020] The combined sensor provided by the present invention includes a packaging housing, an MEMS chip and an ASIC chip connected by signals, a waterproof and breathable membrane, and a water residue detection component. The packaging housing forms a receiving cavity and is provided with a ventilation hole communicating the receiving cavity with the external environment. The MEMS chip is disposed in the receiving cavity, and the ASIC chip is disposed in the receiving cavity or embedded in the packaging housing; the waterproof and breathable membrane covers the ventilation hole, the water residue detection component is disposed on the packaging housing and corresponds to the waterproof and breathable membrane, and the water residue detection component is signal-connected to the ASIC chip; the water residue detection component is used to detect whether there is water residue at the waterproof and breathable membrane, and the ASIC chip is used to start heating to remove the water residue when it detects that there is water residue at the waterproof and breathable membrane. After the combined sensor of the present invention is applied to a wading scenario, due to the setting of the waterproof and breathable membrane, a good waterproof effect can be achieved. At the same time, a small amount of water will enter through the ventilation hole to the position corresponding to the water residue detection component of the waterproof and breathable membrane. When the water residue detection component detects that there is water residue at this position, the ASIC chip will start heating to evaporate and remove the water residue at this position, thereby restoring the acoustic and breathable performance of the waterproof and breathable membrane and improving the measurement accuracy of the acoustic signal and the barometric signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0022] Figure 1 It is a schematic cross-sectional structure diagram of an embodiment of the combined sensor provided by the present invention;

[0023] Figure 2 For Figure 1 It is a schematic structural diagram of a substrate of the combined sensor from one perspective;

[0024] Figure 3 For Figure 1 It is a schematic structural diagram of a substrate of the combined sensor from another perspective;

[0025] Figure 4 For Figure 1 It is a schematic top view structural diagram of the combined sensor after removing the outer shell.

[0026] Description of the attached reference numerals:

[0027] 100, combined sensor; 10, encapsulation housing; 10a, accommodation cavity; 11, substrate; 111, ventilation hole; 112, annular pad; 12, outer shell; 20, MEMS chip; 21, microphone MEMS chip; 22, barometric pressure MEMS chip; 30, ASIC chip; 31, microphone ASIC chip; 32, barometric pressure ASIC chip; 40, waterproof and breathable membrane; 41, first interval; 42, first adhesive layer; 50, support plate; 51, sound hole; 52, second interval; 53, second adhesive layer; 60, water residue detection component; 61, first electrode; 62, second electrode.

[0028] The realization, functional features and advantages of the purpose of the present invention will be further described in conjunction with the embodiments with reference to the accompanying drawings. Specific embodiments

[0029] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the scope of protection of the present invention.

[0030] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0031] In addition, if there are descriptions such as "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution where A and B are satisfied simultaneously. In addition, the technical solutions between the embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0032] At present, some smart wearable devices on the market, such as smart watches, integrate an acoustic sensor and a barometric pressure sensor in the same package to form a combined sensor for voice recognition and altitude measurement. To ensure effective acquisition of external sound signals and barometric pressure signals, the package is usually opened to connect to the external environment, and a waterproof and breathable membrane is provided at the opening to meet the waterproof requirement. However, when the combined sensor is applied to a wading scenario, water remains on the waterproof and breathable membrane, which will deteriorate the acoustic and breathable performance of the waterproof and breathable membrane, thereby affecting the measurement accuracy of the acoustic signal and the barometric pressure signal.

[0033] To solve the above technical problems, the present invention provides a combined sensor, aiming to improve the measurement accuracy of acoustic signals and barometric pressure signals while meeting the waterproof requirement.

[0034] Please refer to Figure 1 and Figure 2 , in an embodiment of the present invention, the combined sensor 100 includes a package housing 10, an MEMS chip 20 and an ASIC chip 30 connected by signals, a waterproof and breathable membrane 40, and a water residue detection component 60. The package housing 10 forms a receiving cavity 10a and is provided with a ventilation hole 111 communicating the receiving cavity 10a with the external environment. The MEMS chip 20 is disposed in the receiving cavity 10a, and the ASIC chip 30 is disposed in the receiving cavity 10a or buried in the package housing 10; the waterproof and breathable membrane 40 covers the ventilation hole 111, and the water residue detection component 60 is disposed on the package housing 10 and corresponds to the waterproof and breathable membrane 40. The water residue detection component 60 is signal-connected to the ASIC chip 30; the water residue detection component 60 is used to detect whether there is water residue at the waterproof and breathable membrane 40, and the ASIC chip 30 is used to start heating to remove the water residue when it is detected that there is water residue at the waterproof and breathable membrane 40.

[0035] The material of the package housing 10 can be a metal material, a ceramic material, etc., so as to utilize the electromagnetic shielding effect to prevent the external environment from forming electromagnetic interference on the combined sensor 100. The interior of the package housing 10 forms a receiving cavity 10a, and the shape of the receiving cavity 10a is not limited. The ventilation hole 111 is opened at any position of the package housing 10 and communicates with the receiving cavity 10a. The shape of the ventilation hole 111 can be circular, square or other reasonable shapes, and the size of the ventilation hole 111 is not limited.

[0036] The MEMS chip 20 may at least include a microphone MEMS chip 21 and a barometric pressure MEMS chip 22. The ASIC chip 30 may at least include a microphone ASIC chip 31 and a barometric pressure ASIC chip 32. The microphone MEMS chip 21 is signal-connected to the microphone ASIC chip 31 to form a microphone sensor, and the barometric pressure MEMS chip 22 is signal-connected to the barometric pressure ASIC chip 32 to form a microphone sensor. The microphone MEMS chip 21 is used to receive sound signals, and after being processed, it is transmitted to the microphone ASIC chip 31 to achieve the function of sound pickup, specifically, it can achieve the function of voice calls. The barometric pressure MEMS chip 22 can receive barometric pressure signals, and after being processed, it is transmitted to the barometric pressure ASIC chip 32 to achieve the function of altitude and position determination, where altitude determination refers to determining the altitude of the wearer.

[0037] At least one of the microphone ASIC chip 31 and the barometric pressure ASIC chip 32 can be used to start heating to remove water residues when water residues are detected at the waterproof and breathable membrane 40. One way to achieve heating is that the chip generates heat by itself during operation to remove the water residues. Since the power consumption of the microphone ASIC chip 31 is very small and it mostly works continuously; while the power consumption of the barometric pressure ASIC chip 32 is relatively large and it works intermittently, it is thus optional to use the heat generated by the barometric pressure ASIC chip 32 itself during operation to remove the water residues. Another way to achieve heating can be to set a heating module on the chip. The specific implementation method can be that in the chip manufacturing process, a heating resistor (i.e., the heating module) is fabricated on the chip surface using thin film deposition technology, and heat is generated by applying a voltage across the resistor using the current heating effect. Of course, the specific implementation method can also be an external heating module, such as a small heating sheet. Or other reasonable implementation methods, as long as the purpose of heating and evaporating the water residues can be achieved. When using the heating module included in the chip to remove the water residues, a heating module can be set in at least one of the microphone ASIC chip 31 and the barometric pressure ASIC chip 32.

[0038] The waterproof and breathable membrane 40 can allow sound and air flow to pass through, but can prevent water molecules from passing through. The waterproof and breathable membrane 40 is a mesh-like breathable thin film, and its material can be selected from polytetrafluoroethylene, polyethylene or other reasonable waterproof and breathable materials. The waterproof and breathable membrane 40 can be set in the accommodation cavity 10a and cover the air vent 111, or can be directly set in the air vent 111. The specific setting method is not limited here.

[0039] The water residue detection component 60 is disposed on the encapsulation housing 10 and is correspondingly disposed with the waterproof breathable film 40 for detecting whether there is water residue at the position of the waterproof breathable film 40 corresponding to the water residue detection component 60. Specifically, the water residue detection component 60 is a capacitive electrode detection component, including two electrodes and a water-sensitive dielectric material filled between the two electrodes. When applied to a water-related scenario, water molecules will enter the dielectric material, causing the dielectric constant to change, thereby changing the capacitance value between the electrodes. Thus, the water residue amount can be deduced by measuring the change in the capacitance value. Alternatively, the water residue detection component 60 is a resistive electrode detection component, including two electrodes. Based on the conductivity of water, the resistance between the two electrodes will change with the change in the moisture content. When applied to a water-related scenario, water molecules will enhance the ion conduction ability between the electrodes, resulting in a decrease in resistance. Thus, the water residue amount can be deduced by measuring the change in the resistance between the two electrodes. Of course, the water residue detection component 60 can also be other reasonable structures as long as it can detect whether there is water residue.

[0040] It should be noted that when the waterproof breathable film 40 is disposed in the accommodation cavity 10a, the water residue detection component 60 is disposed on the inner surface of the encapsulation housing 10 and is correspondingly disposed with the waterproof breathable film 40. In this way, when applied to a water-related scenario, a small amount of water will enter between the waterproof breathable film 40 and the water residue detection component 60 through the ventilation holes 111, and the water residue detection component 60 can detect whether there is water residue at the position of the waterproof breathable film 40 corresponding to the water residue detection component 60. When the waterproof breathable film 40 is disposed in the ventilation holes 111, the water residue detection component 60 is disposed on the outer surface of the encapsulation housing 10 and is correspondingly disposed with the waterproof breathable film 40. In this way, when applied to a water-related scenario, a small amount of water will enter the outer surface of the waterproof breathable film 40 corresponding to the water residue detection component 60 inside the ventilation holes 111. At this time, the water residue detection component 60 can also detect whether there is water residue at the position of the waterproof breathable film 40 corresponding to the water residue detection component 60.

[0041] The water residue detection component 60 is signal-connected to the ASIC chip 30. The connection method can be that the water residue detection component 60 is directly signal-connected to the ASIC chip 30, or a detection circuit is additionally provided to be signal-connected to the water residue detection component 60 and the ASIC chip 30. The specific setting method is not limited. When the water residue detection component 60 detects that there is water residue, this signal will be transmitted to the ASIC chip 30. After receiving this signal, the ASIC chip 30 will start heating to heat and evaporate the water residue for removal.

[0042] After the combined sensor 100 with the above structure of the present invention is applied to a wading scenario, due to the setting of the waterproof breathable membrane 40, a good waterproof effect can be achieved. At the same time, a small amount of water will enter the waterproof breathable membrane 40 corresponding to the water residue detection component 60 through the ventilation holes 111. When the water residue detection component 60 detects water residue at this place, the ASIC chip 30 will start heating to evaporate and remove the water residue at this place, thereby restoring the acoustic and breathable performance of the waterproof breathable membrane 40 and improving the measurement accuracy of the acoustic signal and the air pressure signal.

[0043] In some alternative embodiments, the ASIC chip 30 is arranged close to the water residue. Thus, when water residue is detected at this place, the ASIC chip 30 can remove the water residue more quickly and effectively, achieving a more effective improvement in the measurement accuracy of the acoustic signal and the air pressure signal.

[0044] Please refer again to Figure 1 and Figure 2 , in an embodiment of the present invention, the packaging housing 10 includes a substrate 11 and a housing 12. The substrate 11 and the housing 12 cooperate to form a receiving cavity 10a. The ventilation holes 111 are opened on the substrate 11. The ASIC chip 30 is arranged in the receiving cavity 10a or buried in the substrate 11; the waterproof breathable membrane 40 is arranged in the receiving cavity 10a and covers the ventilation holes 111. A first gap 41 is arranged between the waterproof breathable membrane 40 and the substrate 11. The water residue detection component 60 is arranged on the surface of the substrate 11 facing the first gap 41.

[0045] The substrate 11 can be selected as a PCB circuit board. The material of the housing 12 can be selected as a metal material, a ceramic material, etc. The housing 12 can be mounted on the substrate 11 by surface mounting or gluing. The housing 12 and the substrate 11 cooperate to form the receiving cavity 10a together. The ventilation holes 111 are opened on the substrate 11, penetrate through the opposite two surfaces of the substrate 11 and communicate with the receiving cavity 10a. The MEMS chip 20 can be surface-mounted on the surface of the substrate 11 located in the receiving cavity 10a, or can be surface-mounted on a support structure (such as a support plate 50) in the receiving cavity 10a. Its specific setting is not limited here. The ASIC chip 30 can be surface-mounted on the surface of the substrate 11 located in the receiving cavity 10a, or can be surface-mounted on a support structure (such as a support plate 50) in the receiving cavity 10a, or can be buried in the substrate 11. Its specific setting is not limited here. Optionally, both the MEMS chip 20 and the ASIC chip 30 are signal-connected to the substrate 11. The specific signal connection method can be wire bonding or other reasonable connection methods.

[0046] The waterproof and breathable membrane 40 is disposed in the accommodation cavity 10a. A first gap 41 is provided between the waterproof and breathable membrane 40 and the substrate 11, and the waterproof and breathable membrane 40 covers the entire ventilation hole 111. Here, the first gap 41 means that the side of the ventilation hole 111 facing the waterproof and breathable membrane 40 is spaced from the waterproof and breathable membrane 40, rather than being in close contact. Thus, the size of the waterproof and breathable membrane 40 can be unrestricted by the ventilation hole 111, and a waterproof and breathable membrane 40 with a larger size can be used.

[0047] The waterproof and breathable membrane 40 transmits sound through the resonance principle. The larger the effective area of the waterproof and breathable membrane 40, the better the sound transmission effect by vibration; the smaller the effective area of the waterproof and breathable membrane 40, the worse the sound transmission effect by vibration. Compared with disposing the waterproof and breathable membrane 40 in the ventilation hole 111, in the embodiment of the present invention, the waterproof and breathable membrane 40 is disposed in the accommodation cavity 10a, and the effective area of the waterproof and breathable membrane 40 is relatively large, which can effectively reduce the sound loss and the performance of the pressure sensor and the microphone sensor is better.

[0048] The water residue detection component 60 is disposed on the surface of the substrate 11 facing the first gap 41. When applied to a wading scenario, a small amount of water will enter between the waterproof and breathable membrane 40 and the water residue detection component 60 through the ventilation hole 111, and the water residue detection component 60 can effectively detect whether there is water residue at the position of the waterproof and breathable membrane 40 corresponding to the water residue detection component 60.

[0049] In an embodiment of the present invention, the size of the first gap 41 in the direction perpendicular to the surface of the substrate 11 (that is, the distance between the waterproof and breathable membrane 40 and the substrate 11) is 50μm - 100μm (such as 50μm, 60μm, 70μm, 80μm, 90μm, 100μm and the interval values between any two end points). In the embodiment of the present invention, the first gap 41 with the above size is designed so that when the water residue contacts the surface of the waterproof and breathable membrane 40, it can contact the water residue detection component 60, thereby enabling the water residue detection component 60 to more quickly and effectively detect whether there is water residue, and thus facilitating the subsequent rapid removal of the water residue to improve the measurement accuracy of the acoustic signal and the air pressure signal.

[0050] Please refer to again Figure 2 , in an embodiment of the present invention, the water residue detection component 60 includes a first electrode 61 and a second electrode 62, and the first electrode 61 and the second electrode 62 are spaced apart on the surface of the substrate 11 facing the first gap 41.

[0051] In the embodiment of the present invention, the water residue detection component 60 adopts the resistive electrode detection principle. Among them, the first electrode 61 and the second electrode 62 are arranged at intervals. Based on the conductivity of water, the resistance between the first electrode 61 and the second electrode 62 will change with the change of the moisture content. When applied to a water-related scenario, water molecules will enhance the ion conduction ability between the first electrode 61 and the second electrode 62, resulting in a decrease in resistance. Therefore, the water residue amount can be estimated by measuring the resistance change between the first electrode 61 and the second electrode 62. Since the substrate 11 is a PCBA board, the first electrode 61 and the second electrode 62 can be fabricated by photolithography, thin film deposition and stripping processes or other reasonable processes. The specific fabrication steps are conventional operations and can be specifically referred to the existing technology, which will not be elaborated here one by one.

[0052] In some embodiments of the present invention, the first electrode 61 includes a plurality of nested and connected first electrode portions (not labeled), and the second electrode includes a plurality of segmented and connected second electrode portions (not shown); the plurality of first electrode portions and the plurality of second electrode portions are alternately and nestedly arranged.

[0053] As Figure 2 shown, in the embodiment of the present invention, among the plurality of nested first electrode portions, the innermost first electrode portion can be linear, such as straight, and the first electrode portions in the middle region and the outermost layer are in a ring structure, such as a rectangular ring structure. Adjacent two first electrode portions are connected through the circuit inside the substrate 11. The plurality of nested second electrode portions are all in a ring structure, such as a rectangular ring structure, and adjacent two second electrode portions are connected through the circuit inside the substrate 11. Of course, in some other embodiments, the ring-shaped first electrode portion and the ring-shaped second electrode portion are both circular ring structures or other reasonable ring structures. Moreover, the plurality of first electrode portions and the plurality of second electrode portions are alternately and nestedly arranged, so that the contact area between the electrode and the measured substance (i.e., water residue) can be significantly increased within a limited space, thereby improving the detection sensitivity and response speed, making the detection more accurate and efficient. At the same time, it also helps to form a more uniform electric field distribution, making the electric field intensity in the detection area more stable, reducing the detection error, and improving the reliability and consistency of the detection result. In addition, the structure is relatively compact and suitable for the miniaturized combined sensor 100.

[0054] It should be noted that, referring back to Figure 2 , due to the setting of the ventilation holes 111, the first electrode 61 and the second electrode 62 need to be designed to avoid the ventilation holes 111. The circuits of the first electrode 61 and the second electrode 62 bypass the positions where the ventilation holes 111 are located during the extension process to avoid covering the ventilation holes 111, ensuring that the electrodes and the ventilation holes 111 are spatially independent of each other without interference.

[0055] Please refer toFigure 3 In an embodiment of the present invention, an annular pad 112 is provided on the surface of the substrate 11 facing away from the housing 12 corresponding to the air vent 111, and the air vent 111 is located inside the annular pad 112.

[0056] The shape of the annular pad 112 can be a circular ring, a square ring or other reasonable annular structures, and the annular pad 112 is arranged around the outside of the air vent 111. Thus, when the combined sensor 100 is assembled to the electronic device terminal, a sealing channel can be directly formed through the annular pad 112 and solder paste, and the sealing channel is communicated with the air vent 111. In this way, after being applied to a wading scenario, water molecules will enter the air vent 111 through the sealing channel, and then enter the first interval 41 between the water residue detection component 60 and the waterproof breathable membrane 40 through the air vent 111, so as to ensure that the water residue detection component 60 can detect water residue more accurately and effectively, and then can quickly and effectively remove the water residue, restore the acoustic and breathable performance of the waterproof breathable membrane 40, and improve the measurement accuracy of acoustic signals and air pressure signals.

[0057] Please refer to again Figure 1 In an embodiment of the present invention, the combined sensor 100 further includes a support plate 50. The support plate 50 is arranged on the side of the waterproof breathable membrane 40 facing away from the substrate 11, and a second interval 52 is formed between the support plate 50 and the waterproof breathable membrane 40. The support plate 50 is provided with a sound hole 51 communicating the accommodation cavity 10a and the second interval 52; the MEMS chip 20 is arranged on the support plate 50, and the ASIC chip 30 is arranged on the support plate 50 or embedded in the substrate 11.

[0058] The support plate 50 is arranged in the accommodation cavity 10a and on the side of the waterproof breathable membrane 40 facing away from the substrate 11. A second interval 52 is provided between the support plate 50 and the waterproof breathable membrane 40. Here, the second interval 52 means that the waterproof breathable membrane 40 and the support plate 50 are arranged at intervals, rather than being closely arranged. The specific arrangement manner of the support plate 50 and the waterproof breathable membrane 40 is not limited. The function of the support plate 50 is to support the chip, and its size depends on the size of the chip. The size of the support plate 50 and the size of the waterproof breathable membrane 40 can be the same or different, which is not limited here. The MEMS chip 20 can be mounted on the surface of the support plate 50 facing away from the waterproof breathable membrane 40 by surface mounting technology, and the ASIC chip 30 can be mounted on the surface of the support plate 50 facing away from the waterproof breathable membrane 40 by surface mounting technology, or the ASIC chip 30 is embedded in the substrate 11. The support plate 50 is provided with a sound hole 51 communicating the accommodation cavity 10a and the second interval 52. The shape and size of the sound hole 51 are not limited. The air vent 111 serves as the first transmission channel for air pressure and sound, and the sound hole 51 serves as the second transmission channel for air pressure and sound, so as to ensure that the combined sensor 100 realizes the functions of altitude measurement and voice call.

[0059] Optionally, the sound hole 51 is disposed corresponding to the microphone MEMS chip 21, whereby the sound signal can be transmitted to the microphone MEMS chip 21 more directly and efficiently, achieving efficient sound pickup, and interference can be reduced to ensure the quality of the sound signal.

[0060] Optionally, a plurality of sound holes 51 are provided, and the plurality of sound holes 51 are all disposed corresponding to the microphone MEMS chip 21, whereby multi-angle sound pickup, optimization of the sound signal, and enhancement of the sound pickup effect can be achieved.

[0061] Please refer to again Figure 1 , in an embodiment of the present invention, the periphery of the waterproof and breathable membrane 40 is connected to the substrate 11 through the first adhesive layer 42, and the periphery of the support plate 50 is connected to the waterproof and breathable membrane 40 through the second adhesive layer 53.

[0062] In the embodiment of the present invention, the waterproof and breathable membrane 40 and the support plate 50 have the same size. The periphery of the waterproof and breathable membrane 40 is connected to the substrate 11 through the first adhesive layer 42, and the periphery of the support plate 50 is connected to the waterproof and breathable membrane 40 through the second adhesive layer 53. By providing the first adhesive layer 42, a first gap 41 can be formed between the waterproof and breathable membrane 40 and the substrate 11, and by providing the second adhesive layer 53, a second gap 52 can be formed between the support plate 50 and the waterproof and breathable membrane 40. The first adhesive layer 42 and the second adhesive layer 53 have the same thickness, that is, the first gap 41 and the second gap 52 have the same size. The first gap 41 and the second gap 52 form the front cavity of the microphone sensor, and the cavity of the accommodation cavity 10a excluding the first gap 41 and the second gap 52 forms the rear cavity of the microphone sensor. The size of the front cavity of the microphone sensor is smaller than that of its rear cavity, which is beneficial to improving the acoustic performance and optimizing the signal-to-noise ratio.

[0063] In the embodiment of the present invention, the waterproof and breathable membrane 40 is mounted on the substrate 11, which can maximize the effective breathable area of the waterproof and breathable membrane 40, so that the performance of the pressure sensor and the sound sensor is better.

[0064] Of course, in some other embodiments, the support plate 50 can be set as a metal plate, the ASIC chip 30 can be buried in the support plate 50, and pads can be provided on the surface of the support plate 50 to realize signal connection between the ASIC chip 30, the MEMS chip 20, and the substrate 11. The specific connection method is not limited herein.

[0065] Refer to again Figure 1 and Figure 4, in an embodiment of the present invention, the microphone MEMS chip 21, the barometric pressure MEMS chip 22, and the microphone ASIC chip 31 are arranged at intervals on the support plate 50. The sound hole 51 is opened on the support plate 50 corresponding to the microphone ASIC chip 31. The barometric pressure ASIC chip 32 is buried in the substrate 11. The barometric pressure MEMS chip 22 is connected to the pad on the surface of the substrate 11 through a gold wire. The barometric pressure ASIC chip 32 is signal-connected to the substrate 11 through the metal trace inside the substrate 11. Thus, the barometric pressure MEMS chip 22 and the barometric pressure ASIC chip 32 are signal-connected to form a barometric pressure sensor, realizing the altitude measurement function. The microphone MEMS chip 21 and the microphone ASIC chip 31 are signal-connected through a gold wire, and the microphone ASIC chip 31 is signal-connected to the substrate 11 through a gold wire. Thus, the microphone MEMS chip 21 and the microphone ASIC chip 31 form a microphone sensor, realizing the voice call function.

[0066] In the embodiment of the present invention, burying the barometric pressure ASIC chip 32 in the substrate 11 can make the structure setting relatively compact, reduce the overall size, and is suitable for the design of the miniaturized combined sensor 100. At the same time, the barometric pressure ASIC chip 32 can be spatially isolated from the microphone sensor to a certain extent, ensuring that the propagation paths of the sound signal and the barometric pressure signal are relatively independent, and reducing the interference between signals.

[0067] Furthermore, the barometric pressure ASIC chip 32 is arranged at a position close to the water residue. Thus, when the water residue detection component detects water residue at this place, the barometric pressure ASIC chip 32 will start heating to quickly and effectively evaporate the water residue at this place. Thus, the acoustic and breathable properties of the waterproof and breathable membrane can be restored more quickly, and the measurement accuracy of the acoustic signal and the barometric pressure signal can be effectively improved.

[0068] Of course, in some other embodiments, the microphone ASIC chip 31 can also be buried in the substrate 11, which can further reduce the overall size of the combined sensor 100 and is beneficial to its miniaturized design.

[0069] The present invention also proposes an electronic device, which includes the combined sensor 100. The specific structure of the combined sensor 100 refers to the above embodiments. Since this electronic device adopts all the technical solutions of the above all embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be elaborated one by one here. Among them, the electronic device can be a smart wearable device, such as an earphone, a smart watch, a ring, a bracelet or an earphone, or it can be a mobile terminal, such as a mobile phone or a laptop computer, etc., which is not limited here.

[0070] The above are only exemplary embodiments of the present invention, and thus do not limit the patent scope of the present invention. Any equivalent structural transformation made under the technical concept of the present invention by using the content of the specification and drawings of the present invention, or any direct / indirect application in other related technical fields, is included in the patent protection scope of the present invention.

Claims

1. A combined sensor, characterized in that: The combined sensor comprises: A packaging shell, wherein the packaging shell is formed with a containing cavity and is provided with a vent hole connecting the containing cavity with the external environment; A signal-connected MEMS chip and an ASIC chip, wherein the MEMS chip is disposed in the accommodating cavity, and the ASIC chip is disposed in the accommodating cavity or buried in the packaging shell; A waterproof and breathable membrane, wherein the waterproof and breathable membrane covers the breathable hole; A water residue detection component, which is arranged on the packaging shell and corresponds to the waterproof breathable membrane, and is connected to the ASIC chip signal; The water residue detection component is used to detect whether there is water residue at the waterproof breathable membrane, and the ASIC chip is used to start heating to remove the water residue when water residue is detected at the waterproof breathable membrane.

2. The combined sensor according to claim 1, characterized in that: The packaging shell comprises a substrate and a shell, the substrate and the shell cooperate to form the accommodating cavity, the vent hole is opened in the substrate, and the ASIC chip is arranged in the accommodating cavity or buried in the substrate; The waterproof breathable membrane is arranged in the accommodating cavity and covers the breathable hole. A first interval is arranged between the waterproof breathable membrane and the substrate. The water residue detection component is arranged on the surface of the substrate facing the first interval.

3. The combined sensor according to claim 2, characterized in that: The first interval has a size of 50 μm to 100 μm in a direction perpendicular to the surface of the substrate.

4. The combined sensor according to claim 2, characterized in that: The water residue detection component includes a first electrode and a second electrode, and the first electrode and the second electrode are arranged at intervals on a surface of the substrate facing the first interval.

5. The combined sensor according to claim 4, characterized in that: The first electrode comprises a plurality of first electrode portions which are nested and connected, and the second electrode comprises a plurality of second electrode portions which are block-shaped and connected; The plurality of first electrode portions and the plurality of second electrode portions are arranged alternately and nested.

6. The combined sensor according to claim 2, characterized in that: A ring-shaped pad is arranged on a surface of the substrate facing away from the shell and corresponding to the air vent, and the air vent is located on the inner side of the ring-shaped pad.

7. The combined sensor according to claim 2, characterized in that: The combined sensor further comprises a support plate, which is arranged on a side of the waterproof breathable membrane facing away from the substrate and forms a second gap with the waterproof breathable membrane, and the support plate is provided with a sound hole connecting the accommodating cavity and the second gap; The MEMS chip is arranged on the support plate, and the ASIC chip is arranged on the support plate or buried in the substrate.

8. The combined sensor according to claim 7, characterized in that: The periphery of the waterproof breathable membrane is connected to the base plate through a first adhesive layer, and the periphery of the support plate is connected to the waterproof breathable membrane through a second adhesive layer.

9. The combined sensor according to any one of claims 1 to 8, characterized in that: The MEMS chip includes a microphone MEMS chip and an air pressure MEMS chip, the ASIC chip includes a microphone ASIC chip and an air pressure ASIC chip, the microphone MEMS chip is signal-connected to the microphone ASIC chip, and the air pressure MEMS chip is signal-connected to the air pressure ASIC chip; The air pressure ASIC chip is used to start heating to remove the water residue when water residue is detected at the waterproof breathable membrane. The microphone ASIC chip and the air pressure ASIC chip are arranged in the accommodating cavity or buried in the packaging shell.

10. The combined sensor according to claim 9, characterized in that: The air pressure ASIC chip is arranged near the water residue.

11. An electronic device, characterized in that: The electronic device comprises the combined sensor according to any one of claims 1 to 10.

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