High-stability single-crystal silicon differential pressure transmitter

Abstract

This invention relates to a highly stable single-crystal silicon differential pressure transmitter, belonging to the field of differential pressure transmitter technology. It includes a transmitter body with two symmetrically mounted clamping blocks on both sides of its bottom. A diaphragm is located on both sides of the bottom of the transmitter body. The transmitter body also features two sealing components and two replacement parts. This design enables immediate sealing of the pressure transmission channel when the measured medium experiences overload pressure impact, effectively preventing secondary damage to the damaged diaphragm caused by continuous pressure. Simultaneously, it automatically replaces the diaphragm with a new one, ensuring the new diaphragm is always in optimal elastic working condition to maintain stable measurement accuracy. The damaged diaphragm is automatically moved to the external space, allowing for convenient removal and maintenance by personnel without disassembling the entire transmitter body. Ultimately, this achieves continuous and accurate differential pressure measurement without shutting down the equipment, improving the operational reliability and stability of the transmitter body.

Description

Technical Field

[0001] This invention relates to the field of differential pressure transmitter technology, specifically a highly stable single-crystal silicon differential pressure transmitter. Background Technology

[0002] The single-crystal silicon differential pressure transmitter is a high-precision industrial instrument based on single-crystal silicon resonant sensing technology. Its core function is to measure the pressure difference between two pressure sources and convert it into a standard electrical signal output for monitoring and regulating parameters such as flow rate, liquid level, and pressure in industrial process control.

[0003] Patent publication number CN120628417A discloses "an intelligent single-crystal silicon pressure differential transmitter". The patent describes a technical solution that "by setting an overload blocking device, when the measured pressure end of the transmitter is subjected to excessive instantaneous pressure, the interface can be cut off, thereby reducing the impact of instantaneous pressure on the diaphragm of the measured pressure end, and improving the transmitter's protection against large instantaneous pressure."

[0004] However, this patent has the following drawbacks: from the time the instantaneous pressure causes overload to the time the cutoff takes effect, the diaphragm has already been subjected to the stress caused by the instantaneous pressure, which makes it very easy to produce plastic deformation, microcracks or fatigue damage, and it cannot be restored to the best measurement state. This directly leads to changes in the elastic properties of the diaphragm, and the accuracy and precision of subsequent measurements will decrease. Summary of the Invention

[0005] A high-stability single-crystal silicon differential pressure transmitter includes a transmitter body with two clamping blocks symmetrically mounted on both sides of its bottom. A diaphragm is disposed on both sides of the bottom of the transmitter body. The transmitter body is equipped with two blocking assemblies and two replacement components. The blocking assemblies are used to block the flow path of the measured medium when it is overloaded, preventing further damage to the diaphragm. The replacement components are used to individually retract the overloaded diaphragm and replace it with a new one when an overload occurs. The blocking assemblies include a sealing plate used to block the flow path of the measured medium. The replacement components include two sets of scissor arms, each corresponding to a diaphragm, used to replace the old diaphragm with a new one. The replacement components also include a housing with two symmetrically symmetrically shaped cavities (cavity 1 and cavity 2) on its side walls. Two side plates are installed, corresponding to cavity one and cavity two respectively. Two sets of scissor arms are respectively set in cavity one and cavity two. A mounting plate is slidably connected in each cavity one and cavity two. The bottom end of each mounting plate is fixedly connected to a diaphragm. A slide rod is slidably connected in each of the two slide grooves. A pressure plate is fixedly connected to the top of each slide rod. A spring is fitted on each slide rod. The two ends of the spring are fixedly connected to the top of the housing and the pressure plate respectively. An electric push rod is fixedly connected to the top of the housing. The electric push rod has a fixed shaft and an output shaft. The output shaft end of the electric push rod faces the slide rod. A frame plate is fixedly connected to the output shaft end of the electric push rod. Two pressure blocks are fixedly connected to the two sides of the frame plate in a staggered and symmetrical manner. A protective shell is detachably installed on the top of the housing.

[0006] Furthermore, the sealing assembly also includes a connector tube, which is fixedly connected to the clamping block and communicates with the interior of the clamping block. A mounting bracket is fixedly connected to the outer wall of the connector tube, and a small servo motor is fixedly connected to the end of the mounting bracket away from the connector tube. The small servo motor includes a fixed end and an output shaft, with the output shaft of the small servo motor facing the connector tube. The sealing plate is rotatably connected inside the connector tube, with both ends of the sealing plate extending out of the connector tube. The end of the sealing plate closest to the small servo motor is fixedly connected to the output shaft of the small servo motor.

[0007] Furthermore, the housing is fixedly connected to the transmitter body, and both cavity one and cavity two are connected to the inside of the transmitter body. A rotating shaft is fixedly connected to the top of the inner wall of cavity one and cavity two. Two sliding grooves are symmetrically opened on the top of the housing, and the two sliding grooves are respectively connected to cavity one and cavity two. Two limiting plates are symmetrically fixedly connected to the bottom of the inner wall of cavity one and cavity two.

[0008] Furthermore, the end of the connector tube away from the clamping block is threaded inside, the sealing plate is tightly fitted with the inner wall of the connector tube, and both ends of the sealing plate that protrude from the connector tube are tightly fitted with the connector tube.

[0009] Furthermore, multiple scissor arms within a group are connected from top to bottom in a cross-hinged manner to form multiple rhomboid unit structures. The top and bottom ends of each rhomboid unit are connected sequentially to form a continuous vertical scissor telescopic mechanism. The upper part of this structure is hinged to the pivot, restricting the upper degree of freedom to only allow rotation around the pivot. The lower part is hinged to the mounting plate. The bottom end of the slide rod is hinged to the connection point between the first and second rhomboid unit structures from top to bottom.

[0010] Furthermore, the pressure plate is designed with a flat top and sloping sides, and the pressure block is designed with a trapezoidal shape that is wider at the top and narrower at the bottom with sloping sides. The two pressure plates are respectively squeezed and fitted with the adjacent pressure blocks.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] It enables immediate sealing of the pressure transmission channel when the measured medium experiences overload pressure impact, effectively preventing secondary damage caused by continuous pressure on the damaged diaphragm. At the same time, it can automatically replace the diaphragm with a brand new one, ensuring that the new diaphragm is always in the optimal elastic working condition to maintain stable measurement accuracy. Simultaneously, it automatically moves the overload-damaged old diaphragm to the external space, allowing personnel to easily remove and maintain it without disassembling the entire transmitter body. Ultimately, it achieves continuous and accurate differential pressure measurement without shutting down the equipment, improving the operational reliability and stability of the transmitter body. Attached Figure Description

[0013] Figure 1 This is a three-dimensional schematic diagram of the overall device of the present invention;

[0014] Figure 2 This is a cross-sectional schematic diagram of the transmitter body, connector tube, and other structures of the present invention.

[0015] Figure 3 For the present invention Figure 2 Enlarged view of point A in the middle;

[0016] Figure 4 This is a cross-sectional schematic diagram of the housing, protective shell, and other structures of the present invention;

[0017] Figure 5 For the present invention Figure 4 Enlarged view of point B in the middle;

[0018] Figure 6 This is an exploded view of the casing, protective shell, and other structures of the present invention;

[0019] Figure 7 This is a cross-sectional schematic diagram of the structure of the housing, transmitter body, etc. of the present invention;

[0020] Figure 8 For the present invention Figure 7 Enlarged view of point C in the middle;

[0021] Figure 9 This is a cross-sectional schematic diagram of the rotating shaft, limiting plate, and other structures of the present invention;

[0022] Figure 10 This is a schematic diagram showing the positions of the diaphragm, cavity, and other structures of the present invention;

[0023] Figure 11 This is a schematic diagram showing the positions of the membrane, cavity, and other structures of the present invention;

[0024] Figure 12 This is a detailed schematic diagram of the scissor arm, mounting plate, and other structures of the present invention;

[0025] Figure 13 This is a detailed schematic diagram of the electric push rod, pressure block, and other structures of the present invention.

[0026] In the picture:

[0027] 11. Transmitter body; 12. Clamp; 13. Diaphragm;

[0028] Blocking components

[0029] 21. Connector tube; 22. Mounting bracket; 23. Small servo motor; 24. Sealing plate;

[0030] Replacement Components

[0031] 31. Housing; 32. Cavity 1; 33. Cavity 2; 34. Shaft; 35. Slide groove; 36. Limiting plate; 37. Side plate; 38. Scissor arm; 39. Mounting plate; 310. Slide rod; 311. Pressure plate; 312. Spring; 313. Electric push rod; 314. Frame plate; 315. Pressure block; 316. Protective shell. Detailed Implementation

[0032] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0033] Reference Figures 1 to 13 As shown, a highly stable single-crystal silicon differential pressure transmitter includes a transmitter body 11, two clamping blocks 12 are symmetrically installed on both sides of the bottom of the transmitter body 11, and diaphragms 13 are provided on both sides of the bottom of the transmitter body 11.

[0034] In the prior art, the transmitter body 11, clamp 12, and diaphragm 13 are all known technologies. A single-crystal silicon resonant beam chip is installed inside the transmitter body 11. An isolation cavity is formed on each side of the single-crystal silicon resonant beam chip. The two isolation cavities correspond to high and low pressure respectively. The diaphragm 13 is located at the outward end of the corresponding isolation cavity. The isolation cavity is filled with filling liquid. The diaphragm 13 is in direct contact with the measured medium. The two clamps 12 correspond to the high-pressure end and low-pressure end of the measured medium respectively. Both clamps 12 are connected to the inside of the transmitter body 11. The two clamps 12 are used to introduce the measured medium into the diaphragm 13 at the outer end of the two isolation cavities.

[0035] The diaphragm 13 has good elastic deformation capability. When the pressure of the measured medium acts on the outer surface of the diaphragm 13, the diaphragm 13 will produce elastic micro-deformation proportional to the pressure. This deformation is transmitted to the single crystal silicon resonant beam behind through the filling liquid in the isolation cavity, causing the resonant beam to generate a frequency difference, which is finally converted into a differential pressure measurement signal.

[0036] Two blocking components are provided on the transmitter body 11. The blocking components are used to block the channel when the measured medium is overloaded, so as to prevent the diaphragm 13 from being continuously damaged.

[0037] The sealing assembly includes a connector tube 21, which is fixedly connected to the clamping block 12 and communicates with the interior of the clamping block 12. A mounting bracket 22 is fixedly connected to the outer wall of the connector tube 21. A small servo motor 23 is fixedly connected to the end of the mounting bracket 22 away from the connector tube 21. The small servo motor 23 includes a fixed end and an output shaft. The output shaft of the small servo motor 23 faces the connector tube 21. A sealing plate 24 is rotatably connected inside the connector tube 21. Both ends of the sealing plate 24 extend out of the connector tube 21. The end of the sealing plate 24 near the small servo motor 23 is fixedly connected to the output shaft of the small servo motor 23.

[0038] Among them, the end of the connector pipe 21 away from the clamp block 12 has internal threads, which are used to introduce the medium to be measured into the external pipeline.

[0039] Wherein: the sealing plate 24 fits tightly with the inner wall of the connector tube 21, and its function is: the sealing plate 24 can block the inside of the connector tube 21 to cut off the passage of the measured medium.

[0040] Wherein: the two ends of the sealing plate 24 protruding from the connector tube 21 are tightly fitted with the connector tube 21, and its function is to ensure the airtightness of the inside of the connector tube 21.

[0041] The transmitter body 11 is provided with two replacement parts. The replacement parts are used to separately retract the overloaded diaphragm 13 and replace it with a new diaphragm 13 when an overload occurs.

[0042] The replacement component includes a housing 31, which is fixedly connected to the transmitter body 11. A cavity 32 and a cavity 33 are symmetrically formed inside the housing 31, both communicating with the interior of the transmitter body 11. A rotating shaft 34 is fixedly connected to the top of the inner wall of each cavity 32 and cavity 33. Two sliding grooves 35 are symmetrically formed on the top of the housing 31, communicating with cavities 32 and 33 respectively. Two limiting plates 36 are symmetrically fixedly connected to the bottom of the inner wall of each cavity 32 and cavity 33. Two side plates 37 are symmetrically and detachably installed on the side wall of the housing 31, corresponding to cavities 32 and 33 respectively. A set of scissor arms 38 is provided inside each cavity 32 and cavity 33. Each sliding connection has a mounting plate 39, and the bottom end of each of the two mounting plates 39 is fixedly connected to a diaphragm 13. Each of the two sliding grooves 35 has a sliding rod 310 slidably connected, and the top end of each of the two sliding rods 310 is fixedly connected to a pressure plate 311. Each of the two sliding rods 310 is fitted with a spring 312, and the two ends of the spring 312 are fixedly connected to the top of the housing 31 and the pressure plate 311, respectively. An electric push rod 313 is fixedly connected to the top of the housing 31. The electric push rod 313 is divided into a fixed shaft and an output shaft. The output shaft end of the electric push rod 313 faces the direction of the sliding rod 310. A frame plate 314 is fixedly connected to the output shaft end of the electric push rod 313. Two pressure blocks 315 are fixedly connected to the two sides of the frame plate 314 in a staggered and symmetrical manner. A protective shell 316 is detachably installed on the top of the housing 31.

[0043] Among them, the limiting plate 36 is used to limit the position of the mounting plate 39.

[0044] The side plate 37 is detachably connected to the housing 31 by bolts. Its function is to expose the through groove on the outer wall of the housing 31 that communicates with cavity 1 32 and cavity 2 33 by removing the side plate 37, thereby facilitating the operation of the diaphragm 13 by the staff.

[0045] The structure comprises multiple scissor arms 38 within a group, which are interconnected from top to bottom to form multiple rhomboid unit structures. The top and bottom ends of each rhomboid unit are sequentially hinged, forming a continuous vertical scissor telescopic mechanism. The upper part of this structure is hinged to a pivot 34, restricting its freedom of movement to rotation only around the pivot 34. The lower part is hinged to a mounting plate 39, which can slide vertically within cavity 32 or cavity 33, providing vertical guidance for the deformation of the parallelogram units. The bottom end of the slide rod 310 is hinged to the connection point between the first and second rhomboid unit structures from top to bottom.

[0046] It should be noted that when the slide bar 310 descends, it pushes each scissor arm 38 to rotate around the hinge point, causing each rhomboid unit structure from top to bottom to expand and deform synchronously. During this process, the lower end of the scissor telescopic mechanism gradually extends downwards in the vertical direction, and the overall scissor telescopic mechanism gradually extends. Similarly, when the slide bar 310 rises, the lower end of the scissor telescopic mechanism moves upwards, and the overall scissor telescopic mechanism gradually retracts.

[0047] The purpose is to allow the diaphragm 13 to move up and down within the transmitter body 11 by raising and lowering the slide bar 310. Furthermore, the vertical movement of the diaphragm 13 can be achieved through the sliding engagement of the mounting plate 39 with cavity one 32 or cavity two 33.

[0048] It should be noted that when the scissor telescopic mechanism formed by the scissor arms 38 is fully extended, the diaphragm 13 completely passes through the corresponding cavity 32 or cavity 33, and the diaphragm 13 descends to fit against the bottom of the inner wall of the transmitter body 11. At this time, the diaphragm 13 is in close contact with the inner wall of the transmitter body 11, which ensures the isolation effect of the diaphragm 13 on the single-crystal silicon resonant beam chip of the transmitter body 11. At this time, the bottom of the mounting plate 39 abuts against the upper surface of the limiting plate 36, which ensures the airtightness of the isolation cavity formed between the diaphragm 13 and the single-crystal silicon resonant beam chip.

[0049] When the scissor telescopic mechanism formed by the scissor arm 38 is fully retracted, the diaphragm 13 is completely retracted into the corresponding cavity 32 or cavity 33. At this time, the diaphragm 13 is no longer located in the passage of the measured medium into the transmitter body 11.

[0050] Wherein: the pressure plate 311 is configured to be flat at the top and inclined on both sides, and the pressure block 315 is configured to be trapezoidal in shape with a wider top and narrower bottom and inclined on both sides. The two pressure plates 311 are respectively pressed and engaged with the adjacent pressure block 315.

[0051] Among them, the two pressure blocks 315 are symmetrically distributed on the frame plate 314 in a staggered manner. As the telescopic shaft of the electric push rod 313 extends and retracts, the two pressure blocks 315 and the corresponding side pressure plate 311 have a sequential difference in their contact and compression.

[0052] The protective shell 316 is bolted to the top of the housing 31, serving to provide shielding and protection for the exposed structure at the top of the housing 31. Its detachable nature also facilitates maintenance of the structure at the top of the housing 31 by personnel.

[0053] It should be noted that both the small servo motor 23 and the electric actuator 313 are controlled by the transmitter body 11's own control system. The control system of the transmitter body 11 is existing known technology and will not be described in detail here. When the measured medium is overloaded, the control system of the transmitter body 11 controls the operation of the small servo motor 23 and the electric actuator 313.

[0054] It should be noted that the blocking and replacement components shown in the attached diagrams are in operation, meaning that when the measured medium is overloaded, the blocking component has blocked the passage of the measured medium into the transmitter body 11, thus preventing the overloaded measured medium from flowing into the transmitter body 11. In the replacement component, the diaphragm 13 located on cavity one 32 has already been subjected to the overload impact of the measured medium; this diaphragm 13 is retracted into cavity one 32, thus detaching from the transmitter body 11. The diaphragm 13 located on cavity two 33 extends into the transmitter body 11 and fits tightly with it, forming an isolation cavity with the single-crystal silicon resonant beam chip of the transmitter body 11.

[0055] In the initial state of the plugging and replacement components, i.e., when the tested medium is not yet overloaded, the structural states within the plugging and replacement components are as follows:

[0056] The sealing plate 24 is horizontally positioned inside the connector tube 21, and does not block the passage for the measured medium to enter the transmitter body 11. The telescopic shaft of the electric push rod 313 is fully extended, and the pressure plate 311 on the side near the cavity 32 is pressed against the adjacent pressure block 315. The top plane of the pressure plate 311 on this side abuts against the lower surface of the pressure block 315. The bottom end of the slide rod 310 located on the cavity 32 extends into the cavity 32, and the spring 312 is elastically compressed. The scissor telescopic mechanism composed of multiple scissor arms 38 located in the cavity 32 is fully extended, and the lower surface of the mounting plate 39 located in the cavity 32 abuts against the limiting plate 36. The diaphragm 13 located in the cavity 32 extends into the transmitter body 11 and is pressed against the transmitter body 11. The diaphragm 13 and the single crystal silicon resonant beam chip of the transmitter body 11 form an isolation cavity, which is filled with isolation fluid. The inclined surface of the pressure plate 311 located on cavity two 33 abuts against the inclined surface of the corresponding pressure block 315 but is not compressed. The spring 312 corresponding to the pressure plate 311 does not undergo elastic deformation, and the bottom end of the slide rod 310 does not move downward. At this time, the scissor telescopic mechanism composed of multiple scissor arms 38 in cavity two 33 is fully retracted, and the diaphragm 13 corresponding to cavity two 33 is completely retracted into cavity two 33. Both side plates 37 are threadedly connected to the housing 31, sealing cavity one 32 and cavity two 33.

[0057] When the plugging and replacement components are running, i.e., the control system of the transmitter body 11 detects an overload of the measured medium, the operation process is as follows:

[0058] When the single-crystal silicon resonant beam chip feeds back to the control system of the transmitter body 11 when the measured medium is overloaded, the control system of the transmitter body 11 simultaneously drives the small servo motor 23 and the electric push rod 313. As the small servo motor 23 operates, its output shaft rotates. Simultaneously, the rotation of the output shaft drives the sealing plate 24 to rotate within the connector tube 21, causing the sealing plate 24 to rotate into a vertical position within the connector tube 21. At this point, the sealing plate 24 blocks the interior of the connector tube 21, preventing the measured medium from entering the transmitter body 11 through the connector tube 21. After this is completed, the small servo motor 23 stops operating, thus locking the sealing state of the connector tube 21. At this point, the overloaded measured medium cannot affect the structure of the transmitter body 11.

[0059] As the electric push rod 313 operates, its telescopic shaft retracts. This retraction causes the two pressure blocks 315 to move towards the fixed shaft. During this process, the pressure block 315 near the second cavity 33 presses against the inclined surface of the adjacent pressure plate 311, causing the slide rod 310 on the second cavity 33 to move downwards. Simultaneously, the pressure block 315 near the first cavity 32 gradually moves away from the top of the corresponding pressure plate 311. However, since the contact between the top surface of the pressure plate 311 and the bottom surface of the pressure block 315 is planar, it takes a considerable amount of time for the pressure block 315 near the first cavity 32 to move away from the pressure plate 311. During this time, the pressure block 315 near the side of cavity 2 33 gradually presses against the adjacent pressure plate 311, causing the pressure plate 311 to be pressed until its top plane contacts the bottom plane of the pressure block 315, thereby causing the slide rod 310 in cavity 2 33 to move downward. As the telescopic shaft of the electric push rod 313 extends and retracts, the scissor telescopic mechanism located in cavity 2 33 fully extends as the slide rod 310 moves downward, causing the diaphragm 13 in cavity 2 33 to be inserted into the transmitter body 11, specifically: the diaphragm 13 inserted into cavity 1 32 and the isolation cavity formed between the single crystal silicon resonant beam chip of the transmitter body 11.

[0060] Meanwhile, since the pressure block 315 near cavity 32 has not been completely removed from the top surface of the corresponding pressure plate 311, the diaphragm 13 located in cavity 32 is still inserted inside the transmitter body 11. Therefore, there will be a brief period where both diaphragms 13 are inserted inside the transmitter body 11. The purpose is to ensure that after the diaphragm 13 in cavity 33 is inserted into the transmitter body 11, the new isolation cavity formed between the newly inserted diaphragm 13 and the single-crystal silicon resonant beam chip of the transmitter body 11 remains filled with isolation fluid. This ensures that the new diaphragm 13 can still provide vibration conduction for the single-crystal silicon resonant beam chip of the transmitter body 11.

[0061] As the telescopic shaft of the electric push rod 313 continues to retract, the pressure block 315 located on one side of the cavity 32 is completely removed from the pressure plate 311. At this time, under the elastic extension of the spring 312, the spring 312 pushes the slide rod 310 to move upward in the cavity 32, thereby causing the scissor telescopic mechanism inside the cavity 32 to fully retract, driving the diaphragm 13 to rise, so that the diaphragm 13, which has been impacted by the overload of the measured medium, is retracted into the cavity 32.

[0062] When the telescopic shaft of the electric actuator 313 is fully retracted, the diaphragm 13 in cavity one 32 is completely retracted into cavity one 32 and is no longer located in the liquid inlet channel of the transmitter body 11. The diaphragm 13 in cavity two 33 is inserted into the transmitter body 11 and fits tightly with the transmitter body 11, serving to isolate and conduct vibrations for the single-crystal silicon resonant beam chip of the transmitter body 11.

[0063] At this time, the control system of the transmitter body 11 stops operating the electric push rod 313, thus fixing the position of the two diaphragms 13.

[0064] When the measured medium is no longer overloaded, the control system of the transmitter body 11 controls the output shaft of the small servo motor 23 to rotate in the opposite direction, and rotates the sealing plate 24 back to the horizontal position, so that the sealing plate 24 no longer blocks the connector tube 21. Then the measured medium can enter the transmitter body 11 through the connector tube 21 and directly contact the diaphragm 13, thereby acting on the outer surface of the diaphragm 13. The diaphragm 13 produces elastic micro-deformation proportional to the pressure. This deformation is transmitted to the single crystal silicon resonant beam behind through the filling liquid in the isolation cavity, causing the resonant beam to generate a frequency difference, which is finally converted into a differential pressure measurement signal.

[0065] The diaphragm 13, which has been impacted by the overload of the measured medium and is located in the cavity 32, can be exposed by the operator by removing the side plate 37. This allows the operator to inspect, remove, or replace the diaphragm 13 inside the cavity 32. This enables the operator to operate the diaphragm 13, which has been impacted by the overload of the measured medium, without disassembling the entire transmitter body 11.

[0066] Meanwhile, after the operator replaces the diaphragm 13 into cavity 32, they can extend the telescopic shaft of the electric push rod 313 to insert the diaphragm 13 into the transmitter body 11, and the diaphragm 13 in cavity 33 will retract into cavity 33. The side plate 37 then opens the exposed slots in cavities 32 and 33, filling the isolation chamber formed by the diaphragm 13 and the single-crystal silicon resonant beam with isolation fluid. This allows for the reassembly and reuse of the replaced diaphragm 13. This ensures that even if the measured medium overload occurs again, the replacement assembly can still continue to detect the measured medium without completely disassembling and shutting down the transmitter body 11.

[0067] In summary, by operating the blocking and replacement components, the pressure transmission channel is immediately blocked when the measured medium experiences an overload pressure impact, effectively preventing secondary damage caused by the continued pressure on the damaged diaphragm 13. At the same time, it can automatically replace the diaphragm 13 with a brand new one, ensuring that the new diaphragm 13 is always in the optimal elastic working condition to maintain stable measurement accuracy. Simultaneously, the overload-damaged old diaphragm 13 is automatically moved to the external space, allowing personnel to easily remove and maintain it without disassembling the transmitter body 11. Ultimately, continuous and accurate differential pressure measurement is achieved without shutting down the equipment, improving the operational reliability and stability of the transmitter body 11.

[0068] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A high-stability single-crystal silicon differential pressure transmitter, comprising a transmitter body (11), two clamping blocks (12) symmetrically installed on the bottom of the transmitter body (11), and a diaphragm (13) arranged on the bottom of the transmitter body (11), characterized in that: The transmitter body (11) is provided with two blocking assemblies and two replacement parts. The blocking assemblies are used to block the channel when the measured medium is overloaded to prevent the diaphragm (13) from being continuously damaged. The replacement parts are used to separately retract the overloaded diaphragm (13) and replace it with a new diaphragm (13) when an overload occurs. The blocking assemblies include a sealing plate (24), which is used to block the flow channel of the measured medium. The replacement parts include two sets of scissor arms (38), which are respectively For each diaphragm (13), the scissor arms (38) are used to replace the old diaphragm (13). The replacement parts also include a housing (31). The housing (31) has two symmetrically arranged cavities (32) and (33). Two side plates (37) are symmetrically and detachably installed on the side wall of the housing (31). The two side plates (37) correspond to cavities (32) and (33) respectively. The two sets of scissor arms (38) are respectively set in cavities (32) and (33). A mounting plate (39) is slidably connected to each of the two cavities (32) and (33). The bottom ends of each mounting plate (39) are fixedly connected to a diaphragm (13). A sliding rod (310) is slidably connected to each of the two sliding grooves (35). A pressure plate (311) is fixedly connected to the top of each sliding rod (310). A spring (312) is fitted on each sliding rod (310). The two ends of the spring (312) are respectively connected to the top of the housing (31) and the pressure plate (311). The pressure plate (311) is fixedly connected, and the top of the housing (31) is fixedly connected to an electric push rod (313). The electric push rod (313) is divided into a fixed shaft and an output shaft. The output shaft end of the electric push rod (313) faces the slide rod (310). The output shaft end of the electric push rod (313) is fixedly connected to a frame plate (314). Two pressure blocks (315) are fixedly connected to the two sides of the frame plate (314) in a staggered and symmetrical manner. The top of the housing (31) is detachably installed with a protective shell (316).

2. The high-stability single-crystal silicon differential pressure transmitter according to claim 1, characterized in that: The sealing assembly also includes a connector tube (21), which is fixedly connected to the clamp (12). The connector tube (21) is connected to the inside of the clamp (12). A mounting bracket (22) is fixedly connected to the outer wall of the connector tube (21). A small servo motor (23) is fixedly connected to the end of the mounting bracket (22) away from the connector tube (21). The small servo motor (23) includes a fixed end and an output shaft. The output shaft of the small servo motor (23) faces the connector tube (21). The sealing plate (24) is rotatably connected inside the connector tube (21). Both ends of the sealing plate (24) protrude from the connector tube (21). The end of the sealing plate (24) near the small servo motor (23) is fixedly connected to the output shaft of the small servo motor (23).

3. The high-stability single-crystal silicon differential pressure transmitter according to claim 1, characterized in that: The housing (31) is fixedly connected to the transmitter body (11). Cavity 1 (32) and Cavity 2 (33) are both connected to the inside of the transmitter body (11). A rotating shaft (34) is fixedly connected to the top of the inner wall of Cavity 1 (32) and Cavity 2 (33). Two sliding grooves (35) are symmetrically opened on the top of the housing (31). The two sliding grooves (35) are respectively connected to Cavity 1 (32) and Cavity 2 (33). Two limiting plates (36) are symmetrically fixedly connected to the bottom of the inner wall of Cavity 1 (32) and Cavity 2 (33).

4. A high-stability single-crystal silicon differential pressure transmitter according to claim 2, characterized in that: The end of the connector tube (21) away from the clamping block (12) is threaded inside. The sealing plate (24) fits tightly with the inner wall of the connector tube (21). Both ends of the sealing plate (24) that protrude from the connector tube (21) fit tightly with the connector tube (21).

5. A high-stability single-crystal silicon differential pressure transmitter according to claim 3, characterized in that: Multiple scissor arms (38) in a group are connected to each other in a cross-hinged manner to form multiple rhomboid unit structures from top to bottom. The top and bottom ends of each rhomboid unit are connected sequentially to form a continuous vertical scissor telescopic mechanism. The upper part of the structure is hinged to the pivot (34), restricting the upper degree of freedom to only allow rotation around the pivot (34). The lower part is hinged to the mounting plate (39). The bottom end of the slide rod (310) is hinged to the connection point between the first and second rhomboid unit structures from top to bottom.

6. A high-stability single-crystal silicon differential pressure transmitter according to claim 3, characterized in that: The pressure plate (311) is set to a shape with a flat top and sloping sides, and the pressure block (315) is set to a trapezoidal shape with a wide top and narrow bottom and sloping sides. The two pressure plates (311) are respectively squeezed and fitted with the adjacent pressure block (315).

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