System for zero-position calibration of high-precision tilt sensors

Abstract

This invention relates to the field of tilt sensor calibration technology, and discloses a system for zero-point calibration of a high-precision tilt sensor. The high-precision tilt sensor is adjustablely connected to a mounting base and includes an adjustment mechanism, a square box, a tilting mechanism, and a lifting mechanism. A first adjustment plate of the adjustment mechanism is rotatably connected to a connecting base about a first axis, and a second adjustment plate is rotatably connected to the first adjustment plate about a second axis. A first adjustment element is coupled to the first adjustment plate, and a second adjustment element is coupled to the second adjustment plate. The sensor is connected to the second adjustment plate, the mounting base is connected to the connecting base, and the mounting surface of the mounting base abuts against the end face of the square box. The tilting mechanism is coupled to the square box and can drive the square box to rotate along a third axis. The lifting mechanism is coupled to the square box and the tilting mechanism, and is configured to move the square box and the tilting mechanism up and down along the height direction. This system is not only highly reliable and easy to operate, but also has high calibration accuracy.

Description

Technical Field

[0001] This invention relates to the field of tilt sensor calibration technology, and more specifically to a system for zero-position calibration of high-precision tilt sensors. Background Technology

[0002] High-precision tilt sensors are commonly used in aerospace equipment, and the zeroing accuracy of their reference plane directly affects their overall accuracy. Existing zeroing calibration methods for tilt sensors often require introducing another tilt sensor as a reference for zeroing the sensor to be zeroed. This method is highly dependent on the accuracy of the introduced tilt sensor and the zeroing equipment, and it is cumbersome to operate, failing to meet the zeroing requirements of high-precision tilt sensors. Summary of the Invention

[0003] To address the aforementioned technical problems, this invention provides a system for zero-position calibration of a high-precision tilt sensor.

[0004] This disclosure provides a system for zero-point calibration of a high-precision tilt sensor. The high-precision tilt sensor is adjustablely connected to a mounting base. The system includes an adjustment mechanism, a square box, a tilting mechanism, and a lifting mechanism. The adjustment mechanism includes a connecting base, a first adjustment plate, a second adjustment plate, a first adjustment member, and a second adjustment member. The first adjustment plate is rotatably connected to the connecting base about a first axis. The second adjustment plate is rotatably connected to the first adjustment plate about a second axis. The first adjustment member is coupled to the first adjustment plate and configured to drive the first adjustment plate to rotate about the first axis. The second adjustment member is coupled to the second adjustment plate and configured to drive the second adjustment plate to rotate about the second axis. The square box includes two end faces perpendicular to the horizontal direction and four circumferential surfaces disposed between the two end faces. The high-precision tilt sensor is connected to the second adjustment plate. The mounting base is connected to the connecting base, and the mounting surface located outside the mounting base abuts against one end face of the square box. The tilting mechanism is coupled to the square box and configured to drive the square box to rotate along a third axis. A lifting mechanism is coupled to a square box and a tilting mechanism. The lifting mechanism is configured to move the square box and the tilting mechanism up and down along the height direction, allowing the square box to be lifted to a suitable rotation height or lowered onto a horizontal platform. Specifically, when the square box is tilted around a third axis to 0°, 90°, 180°, and 270°, the voltage value corresponding to the high-precision tilt sensor can be measured. Based on the voltage value, at least one of the first or second adjusting components is driven to rotate the corresponding adjusting plate, thereby changing the orientation of the zero-position reference surface of the high-precision tilt sensor until the zero-position reference surface is parallel to the mounting surface. When the square box is tilted to 0°, 90°, 180°, and 270°, the four circumferential surfaces are located at the bottom of the square box. The third axis is perpendicular to the mounting surface of the mounting base and parallel to the four circumferential surfaces.

[0005] Furthermore, the system for zero-position calibration of high-precision tilt sensors also includes a support mechanism, which includes a first marble platform and a second marble platform arranged sequentially from bottom to top, and three leveling mechanisms disposed between the first marble platform and the second marble platform; wherein the three leveling mechanisms are arranged non-collinearly, the lifting mechanism is connected to the second marble platform, and the leveling platform surface is disposed on the second marble platform.

[0006] Furthermore, the second marble platform includes a first part of the second marble and a second part of the second marble, with the second part of the second marble located at the upper center of the first part of the second marble. The lifting mechanism is connected to the first part of the second marble, and the platform surface is located on the second part of the second marble. The support mechanism also includes three support blocks located at the bottom of the first part of the second marble, each support block having a groove at its bottom. Each leveling mechanism includes a first motor, a first gear, and a micro jack. The first gear is connected to the output shaft of the first motor, and the micro jack has a second gear on its outer periphery, with the first gear meshing with the second gear. The movable end of each micro jack abuts against the groove of a support block. When the first motor rotates, the movable end of the micro jack drives the corresponding support block to move in the height direction.

[0007] Furthermore, the system for zero-position calibration of the high-precision tilt sensor also includes a connector; the flipping mechanism includes a flipping connecting frame, a rotating platform, and a second motor. The rotating platform includes a platform housing and a platform input shaft and a platform output shaft that are rotatable relative to the platform housing and coupled to it. The platform input shaft is connected to the motor output shaft of the second motor, and the platform output shaft is connected to the flipping connecting frame. One end of the connector is connected to the square box, and the other end of the connector is coupled to the flipping connecting frame. The platform housing is connected to the lifting mechanism.

[0008] Furthermore, the flip-connector has a connector interface at one end near the connector. The connector interface is configured to accommodate the end of the connector near the flip-connector. The inner contour of the connector interface and the outer contour of the end of the connector near the flip-connector are configured to be similar rectangles, and there is a large clearance fit between the connector interface and the end of the connector near the flip-connector.

[0009] Furthermore, the system for zero-position calibration of the high-precision tilt sensor also includes a protective ring fixed to the square box. The protective ring has an axially extending channel, and the adjustment mechanism is disposed within the channel of the protective ring. The lifting mechanism includes a lifting telescopic component, a first support frame, and a second support frame. The lifting telescopic component is connected to the second marble platform, and both the first and second support frames are connected to the movable end of the lifting telescopic component. The first support frame is disposed on the outer periphery of the protective ring and is used to support the protective ring. The second support frame is disposed on the outer periphery of the connector and is used to support the connector. The platform housing and the second motor are both fixedly connected to the second support frame.

[0010] Furthermore, the lifting mechanism also includes a first support wheel and a second support wheel. The first support wheel is rotatably connected to the first support frame, and the second support wheel is rotatably connected to the second support frame. The outer periphery of the connector is provided with a first annular groove, the cross-section of which is rectangular. The second support wheel is configured to engage with the first annular groove. The outer periphery of the protective ring is provided with a second annular groove, the cross-section of which is triangular or trapezoidal, and the opening of the second annular groove is wider than its bottom. The first support wheel is configured to engage with the second annular groove.

[0011] Furthermore, the first support frame and the second support frame are each provided with a first slider. The lifting mechanism also includes two upright plates fixed to the second marble platform. Each upright plate is provided with a first guide rail extending in the height direction. Each first slider is combined with a first guide rail to guide the first support frame and the second support frame to move in the height direction.

[0012] Furthermore, the system for zero-position calibration of a high-precision tilt sensor also includes a translation mechanism, which includes a translation telescopic member, a support plate, a second slider, and a second guide rail. The translation telescopic member and the second guide rail are fixed to a second marble platform. The movable end of the translation telescopic member is connected to the support plate. The second guide rail extends axially. The second slider is connected to the support plate and is configured to engage with the second guide rail. The upright plate near the second support frame is connected to the support plate.

[0013] Furthermore, the system for zero-point calibration of the high-precision tilt sensor also includes a nanoprobe, which is set on the second marble platform with its probe end flush with the horizontal platform surface; the horizontal platform surface located directly below the square box is provided with grooves for purging ventilation.

[0014] The features and advantages of this disclosure include: when calibrating the zero-point reference plane of a high-precision tilt sensor using the system disclosed herein, a lifting mechanism can move the square box and the tilting mechanism up and down along the height direction, allowing the square box to be lifted to a suitable rotation height, or lowered onto a horizontal platform; the tilting mechanism can rotate the square box along a third axis; no additional tilt sensor is required, calibration is achieved simply by measuring the voltage values ​​of the high-precision tilt sensor to be calibrated at multiple tilting angles, comparing the measured voltage values ​​U1, U2, U3, and U4 with the target voltage value U, and adjusting the corresponding adjustment components to rotate the high-precision tilt sensor around the first or second axis. This system is not only highly reliable and easy to operate, but also has high calibration accuracy. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 The diagram shows the structure of the device for zero-position calibration of a high-precision tilt sensor and the connection of the high-precision tilt sensor according to the present invention.

[0017] Figure 2 It shows Figure 1 The exploded view shown is of the device connected to a high-precision tilt sensor, wherein the high-precision tilt sensor is located inside the adjustment mechanism;

[0018] Figure 3 A schematic diagram of the high-precision tilt sensor and mounting base of the present invention connected to the adjustment mechanism is shown;

[0019] Figure 4 An exploded view of a high-precision tilt sensor, mounting base, and adjustment mechanism is shown, with the line of sight from the end plate side to the mounting base side.

[0020] Figure 5 An exploded view of a high-precision tilt sensor, mounting base, and adjustment mechanism is shown, with the line of sight from the mounting base side towards the end plate side.

[0021] Figure 6 A schematic diagram showing the high-precision tilt sensor and mounting base connected to the end of the adjustment mechanism is shown;

[0022] Figure 7 It shows along Figure 6 Schematic diagram of the sectional view along the AA section line;

[0023] Figure 8 A schematic diagram of the structure of the square box, clamping mechanism, linear motion mechanism and connecting parts of the present invention is shown;

[0024] Figure 9 It shows Figure 8 The exploded view of the component shown is from the box side to the linear telescopic mechanism side.

[0025] Figure 10 It shows Figure 8 The exploded view of the component shown is from the side of the linear telescopic mechanism to the side of the box.

[0026] Figure 11 It shows Figure 8 A schematic diagram showing the removal of parts of the square box and connecting parts;

[0027] Figure 12 A schematic diagram of the clamping mechanism is shown.

[0028] Figure 13 An exploded schematic diagram of the clamping mechanism is shown;

[0029] Figure 14 A schematic diagram of the clamping mechanism's movement is shown, in which the pull rod moves toward the first end face, and the pressure block locks in place;

[0030] Figure 15 A schematic diagram of the clamping mechanism's movement is shown, in which the pull rod moves away from the first end face, and the pressure block is released;

[0031] Figure 16 A schematic diagram of the clamping mechanism mounting base is shown;

[0032] Figure 17 This disclosure illustrates a system for zero-point calibration of a high-precision tilt sensor, the system comprising: Figure 1 The apparatus shown is for zero-position calibration of a high-precision tilt sensor;

[0033] Figure 18 It shows Figure 17 A schematic diagram showing the partial removal of the support base, part of the second marble platform, and the first marble platform;

[0034] Figure 19 for Figure 18 An enlarged schematic diagram of section C shown in the figure illustrates the structure of the leveling mechanism;

[0035] Figure 20 for Figure 18 An enlarged schematic diagram of part D shown in the figure illustrates the structure of the translation mechanism;

[0036] Figure 21The second marble platform, lifting mechanism, and tilting mechanism are shown. Figure 1 A schematic diagram of the device shown;

[0037] Figure 22 for Figure 21 An enlarged schematic diagram of the X section shown in the figure, which illustrates the structure of the first support frame and its related components;

[0038] Figure 23 for Figure 21 An enlarged schematic diagram of the Y section shown in the figure illustrates the structure of the second support frame and its related components;

[0039] Figure 24 A schematic diagram of the flipping mechanism is shown;

[0040] Figure 25 It shows Figure 24 The exploded view of the flipping mechanism is shown, with the line of sight from the flipping connecting frame towards the second motor;

[0041] Figure 26 It shows Figure 24 The exploded view of the flipping mechanism is shown, with the line of sight from the second motor toward the flipping connecting frame. Detailed Implementation

[0042] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0043] See Figure 4 , Figure 5 , Figure 7 A high-precision tilt sensor 60 is fixed to a user device via a mounting base 70. The user device is a high-precision measurement and control device, such as an aircraft. The high-precision tilt sensor 60 is used to detect tilt angles, and the detection signal can be resistance, capacitance, or voltage. The following explanation uses voltage as an example. Specifically, the mounting base 70 is constructed as a housing with an opening, containing a sensor receiving cavity 71 suitable for accommodating the high-precision tilt sensor 60. The high-precision tilt sensor 60 can be placed inside the sensor receiving cavity 71 through its opening. A base plate 75 is provided on the side of the mounting base 70 away from its opening. The base plate 75 has a mounting surface 72 suitable for contacting the user device, wherein the mounting surface 72 is located on the outer side of the mounting base 70, i.e., on the side of the base plate 75 away from the sensor receiving cavity 71. In some embodiments, the axis of the mounting base 70 is perpendicular to the mounting surface 72.

[0044] Before fixing the high-precision tilt sensor 60 and the mounting base 70 to the device in use, the zero-point reference plane of the high-precision tilt sensor 60 needs to be calibrated. Zero-point reference plane calibration (hereinafter referred to as zero-point calibration) refers to adjusting the tilt direction of the zero-point reference plane of the high-precision tilt sensor 60 so that it is parallel to the mounting surface 72 of the mounting base 70, that is, making the normal direction of the zero-point reference plane of the high-precision tilt sensor 60 perpendicular to the mounting surface 72 of the mounting base 70. Before zero-point reference plane calibration, the high-precision tilt sensor 60 is adjustablely connected to the mounting base 70 to facilitate adjustment of the normal direction of the zero-point reference plane. The sensor housing cavity 71 provides sufficient space for adjustment of the high-precision tilt sensor 60. Adjustable connection specifically refers to a connection that can rotate about at least two axes. Specifically, in some embodiments, the high-precision tilt sensor 60 is connected to the mounting base 70 through the adjustment mechanism 100 of this disclosure, allowing the high-precision tilt sensor 60 to rotate about two axes, thereby moving relative to the mounting surface 72 of the mounting base 70. For a detailed description of the adjustment mechanism 100, please refer to the following text. After the zero-position reference plane is adjusted, the positions of the high-precision tilt sensor 60 and the mounting base 70 need to be fixed so that the normal direction of the zero-position reference plane remains perpendicular to the mounting surface 72 of the mounting base 70. In some embodiments, adhesive can be filled between the high-precision tilt sensor 60 and the mounting base 70 to keep their relative positions unchanged. Alternatively, other feasible methods can be used, such as welding, riveting, threaded connection, etc., which will not be elaborated here.

[0045] See Figures 1 to 11 This disclosure provides a device 300 for zero-position calibration of a high-precision tilt sensor. The device 300 includes an adjustment mechanism 100 and a square box 301. The flatness accuracy of the six faces of the square box 301 is less than or equal to (not greater than) 0.005 mm, the perpendicularity between the six faces is less than or equal to (not greater than) 0.01 mm, and the parallelism between opposing faces is less than or equal to (not greater than) 0.001 mm. Specifically, the square box 301 includes two end faces and four circumferential surfaces disposed between the two end faces. The two end faces are a first end face 301a and a second end face 301b. See also... Figure 9 , Figure 10Looking from the first end face 301a to the second end face 301b, the four circumferential surfaces arranged counterclockwise are the first circumferential surface 301c, the second circumferential surface 301d, the third circumferential surface 301e, and the fourth circumferential surface 301f. When performing zero-position calibration between the high-precision tilt sensor 60 and the mounting base 70, the high-precision tilt sensor 60 and the mounting base 70 are first connected to the adjustment mechanism 100, and then the mounting surface 72 of the mounting base 70 is brought into contact with the first end face 301a of the box 301. At this time, the mounting surface 72 of the mounting base 70 is parallel to the first end face 301a of the box 301, the two end faces of the box 301 are perpendicular to the horizontal plane, and the first circumferential surface 301c and the third circumferential surface 301e are parallel to the horizontal plane. In some embodiments, the axis of the adjustment mechanism 100 is perpendicular to the mounting surface 72 of the box 301. Optionally, the axis of the adjustment mechanism 100 is parallel to the axis of the mounting base 70. The adjustment mechanism 100 keeps the mounting base 70 stationary and provides a connection for the high-precision tilt sensor 60 that can rotate about two axes.

[0046] Specifically, see Figures 3 to 7 The adjustment mechanism 100 includes a connecting base 10, a first adjusting plate 20, a second adjusting plate 30, a first adjusting member, and a second adjusting member. The first adjusting plate 20 is rotatably connected to the connecting base 10 about a first axis, and the second adjusting plate 30 is rotatably connected to the first adjusting plate 20 about a second axis. The first adjusting member is coupled to the first adjusting plate 20, and the second adjusting member is coupled to the second adjusting plate 30. The first adjusting member is configured to drive the first adjusting plate 20 to rotate about the first axis, and the second adjusting member is configured to drive the second adjusting plate 30 to rotate about the second axis. The first axis extends along a first direction 112, and the second axis extends along a second direction 113. During zero-position calibration, a high-precision tilt sensor 60 is connected to the second adjusting plate 30, and a mounting base 70 is connected to the connecting base 10 and the square box 301. The mounting surface 72 at the bottom of the mounting base 70 abuts against the first end face 301a of the square box 301.

[0047] When calibrating the high-precision tilt sensor 60 at its zero position, the square box 301 needs to be rotated along the third axis to 0°, 90°, 180°, and 270°. The voltage value of the high-precision tilt sensor 60 at each angle after rotation is measured. Based on this voltage value, at least one of the first and second adjusting components is adjusted to change the tilt direction of the zero-position reference surface (i.e., change the normal direction of the zero-position reference surface), ultimately making the zero-position reference surface parallel to the mounting surface 72 at the bottom of the mounting base. The third axis is perpendicular to the first end face 301a and the second end face 301b. Rotating the square box 301 along the third axis to 0°, 90°, 180°, and 270° specifically means rotating the square box 301 until the first circumferential surface 301c, the second circumferential surface 301d, the third circumferential surface 301e, and the fourth circumferential surface 301f are located at the bottom of the square box 301. Specifically, in... Figure 9 In the middle, the first circumferential surface 301c is located at the bottom of the square box 301. The third axis extends along the axial direction 111. Since the adjusting mechanism 100, the high-precision tilt sensor 60 and the mounting base 70 are connected to the square box 301 as a whole, when the square box is rotated to 0°, 90°, 180° and 270°, the adjusting mechanism 100, the high-precision tilt sensor 60 and the mounting base 70 rotate synchronously with the square box 301, and the zero reference surface of the high-precision tilt sensor 60 also rotates accordingly.

[0048] Specifically, when the square box 301 is rotated to 0°, 90°, 180°, and 270°, the measured real-time voltage values ​​are U1, U2, U3, and U4, respectively. During zero-position calibration, there is a target voltage value U. In some embodiments, when the square box 301 is rotated to 0°, 90°, 180°, and 270°, the measured real-time voltage values ​​U1, U2, U3, and U4 are compared with the target voltage value U, and the first or second adjusting member is adjusted so that the real-time voltage values ​​U1, U2, U3, and U4 are less than or equal to the target voltage value U. In practical use, when the real-time voltage values ​​U1, U2, U3, and U4 are all less than or equal to the target voltage value U, it can be considered that the zero-position reference plane is parallel to the mounting surface 72 at the bottom of the mounting base. In some embodiments, the first axis is perpendicular to the third axis. Preferably, in some embodiments, the first axis is also perpendicular to the second axis (i.e., the first direction 112 is perpendicular to the second direction 113). The real-time voltage values ​​U2 and U4 are made less than or equal to the target voltage value U by adjusting the second adjusting member, and the real-time voltage values ​​U1 and U3 are made less than or equal to the target voltage value U by adjusting the first adjusting member. Specifically, the first axis (i.e., the first direction 112) can be a vertical direction or a direction parallel to the horizontal plane. The following explanation uses the first axis as a vertical direction as an example.

[0049] When the first axis is perpendicular to the second axis, the calibration accuracy and adjustment efficiency are higher during zero-point calibration. This decouples the adjustment of voltage values ​​U2 and U4 from the adjustment of voltage values ​​U1 and U3, allowing voltage values ​​U2 and U4 to be adjusted only through the second adjustment element without affecting voltage values ​​U1 and U3, and similarly, voltage values ​​U1 and U3 to be adjusted only through the first adjustment element without affecting voltage values ​​U2 and U4. Furthermore, during zero-point calibration, the first adjustment element can be adjusted first to make voltage values ​​U1 and U3 less than or equal to the target voltage value U, and then the second adjustment element can be adjusted to make voltage values ​​U2 and U4 less than or equal to the target voltage value U; alternatively, the second adjustment element can be adjusted first to make voltage values ​​U2 and U4 less than or equal to the target voltage value U, and then the first adjustment element can be adjusted to make voltage values ​​U1 and U3 less than or equal to the target voltage value U. The following illustration uses the example of adjusting the second adjustment element first.

[0050] Specifically, in some other embodiments, during the zero-point calibration process, the square box 301 is first flipped to 90° and 270° (i.e., flipped so that the second circumferential surface 301d and the fourth circumferential surface 301f are at the bottom of the square box 301), and the corresponding real-time voltage values ​​U2 and U4 are measured respectively. |U2-U4| is compared with the target voltage value U, and the second adjustment member is adjusted so that |U2-U4| is less than or equal to the target voltage value U. Then, the square box 301 is flipped to 0° and 180° (i.e., flipped so that the first circumferential surface 301c and the third circumferential surface 301e are at the bottom of the square box 301), and the corresponding real-time voltage values ​​U1 and U3 are measured respectively. |U1-U3| is compared with the target voltage value U, and the first adjustment member is adjusted so that |U1-U3| is less than or equal to the target voltage value U. In practical applications, when both |U2-U4| and |U1-U3| are less than or equal to the target voltage value U, the zero-point reference plane can be considered parallel to the mounting surface 72 at the bottom of the mounting base. By adjusting the difference between the two voltage values ​​to be less than or equal to the target voltage value U, the calibration accuracy can be improved, making the accuracy closer to the design theoretical value.

[0051] Specifically, see [link to relevant documentation] Figures 3 to 7 The connecting seat 10 is configured as a tubular housing extending axially therein, with a mounting seat receiving cavity 11 extending axially therein, and the mounting seat 70 is adapted to be received within the mounting seat receiving cavity 11. Optionally, the axis of the mounting seat 70 is parallel to the axis of the connecting seat 10, and the connecting seat 10 is sleeved onto the outside of the mounting seat 70. Preferably, the mounting seat 70 and the connecting seat 10 are arranged coaxially. In some embodiments, the connecting seat 10 has a step adapted to abut the end of the opening of the mounting seat 70, thereby restricting the movement of the mounting seat 70 toward the second adjusting plate 30. The outer contour of the mounting seat 70 and the cross-section of the mounting seat receiving cavity 11 are both configured as circular. Specifically, see Figure 5A connecting ring 14 is provided on the side of the connecting seat 10 facing the base plate 75. Specifically, the connecting ring 14 is a non-closed ring with a notch 142. The portions of the connecting ring 14 on both sides of the notch 142 are respectively provided with holes suitable for fasteners (e.g., bolts) to pass through. After the connecting ring 14 of the connecting seat 10 is sleeved onto the outer periphery of the mounting base 70, the two ends of the connecting ring 14 on both sides of the notch 142 are locked and fixed by fasteners. For example, a through hole is provided at one end of the connecting ring 14 (the upper end of the notch 142), and a threaded hole is provided at the other end (the lower end of the notch 142). The mounting base 70 is clamped and fixed to the connecting seat 10 by bolts locking the two ends at the notch 142. See also... Figure 4 The mounting base 70 is provided with a mounting base limiting block 74 on the side facing the connecting base 10. The mounting base receiving cavity 11 is provided with a limiting groove that cooperates with the mounting base limiting block 74. When the mounting base 70 is inserted into the mounting base receiving cavity 11, the mounting base limiting block 74 is located in the limiting groove, thereby restricting the circumferential movement of the mounting base 70.

[0052] Specifically, see Figure 4 , Figure 5 The adjustment mechanism 100 further includes an end plate 40. The end plate 40, the first adjustment plate 20, the second adjustment plate 30, and the connecting seat 10 are arranged sequentially along the axial direction 111. The connecting seat 10 has a support column 12 extending along the axial direction 111 on the side facing the end plate 40. The end plate 40 is connected to the cantilever end of the support column 12. The first adjustment plate 20 is rotatably connected to the end plate 40. Preferably, there are two support columns 12, which extend in parallel. The first adjustment plate 20 and the second adjustment plate 30 are disposed inside the two support columns 12.

[0053] Specifically, in some embodiments, the first adjusting member and the second adjusting member are respectively configured as a first linear adjusting member and a second linear adjusting member. The first linear adjusting member and the second linear adjusting member extend along an axial direction 111 and both have a movable end. The first linear adjusting member is fixed to the end plate 40, and its movable end abuts against the first adjusting plate 20; adjusting the first linear adjusting member allows the first adjusting plate 20 to rotate about a first axis. The second linear adjusting member is fixed to the first adjusting plate 20, and its movable end abuts against the second adjusting plate 30; adjusting the second linear adjusting member allows the second adjusting plate 30 to rotate about a second axis. The first linear adjusting member and the second linear adjusting member are specifically one of an electric telescopic rod, a hydraulic telescopic rod, a micrometer head, etc. Preferably, the first linear adjusting member is a first micrometer head 101, and the second linear adjusting member is a second micrometer head 102.

[0054] Specifically, see [link to relevant documentation] Figure 4 and Figure 5The end plate 40, the first adjusting plate 20, and the second adjusting plate 30 are all constructed as plates. The end plate 40 has a first through hole 41, through which the second micrometer head 102 extends and connects to the first adjusting plate 20. The first adjusting plate 20 and the second adjusting plate 30 have second through holes 21 and third through holes 31, respectively. The lead wire 61 of the high-precision tilt sensor 60 extends through the third through hole 31, the second through hole 21, and the first through hole 41 to the outside of the adjusting mechanism 100 and connects to the adapter 107 provided on the end plate 40. The end plate 40 also has connecting holes located on both sides of the first through hole 41. The support column 12 has a screw hole on the side near the end plate 40. Bolts or screws extend through the connecting holes of the end plate 40 and connect to the screw hole of the support column 12, thereby fixing the end plate 40 to the support column 12.

[0055] Specifically, the first adjusting plate 20 and the end plate 40, as well as the first adjusting plate 20 and the second adjusting plate, are rotatably connected via shafts and holes. The adjusting mechanism 100 also includes two first pins 103 and two second pins 104. The first adjusting plate 20 is rotatably connected to the end plate 40 via the first pins 103, and the second adjusting plate 30 is rotatably connected to the end plate 40 via the two second pins 104. More specifically, the end plate 40 has two connecting blocks 42 arranged along the height direction on the side facing the first adjusting plate 20. Each connecting block 42 has a first connecting hole 43, and the top and bottom of the first adjusting plate 20 are respectively provided with first engagement holes 24. The two connecting blocks 42 and the two support columns 12 are arranged circumferentially staggered. The first adjusting plate 20 is disposed between the two connecting blocks 42, and each first pin 103 is disposed in a first connecting hole 43 and a corresponding first engagement hole 24, and each first pin 103 is fixed to either the end plate 40 or the first adjusting plate 20. In some embodiments, only one of the first connecting hole 43 and the first engaging hole 24 may be provided, and the first pin 103 may be fixed to the other. For example, only the first connecting hole 43 may be provided, and the first pin 103 may be fixed to the first adjusting plate 20; or, only the first engaging hole 24 may be provided, and the first pin 103 may be fixed to the end plate 40.

[0056] Specifically, the first adjusting plate 20 is provided with two support arms 22 extending along its axial direction. The two support arms 22 are located on its left and right sides, and protrude from the first adjusting plate 20 towards the side facing the second adjusting plate 30. The protruding portions of the two support arms 22 are respectively provided with second engagement holes 23 for connecting second pins 104. The two second pins 104 are respectively connected to the left and right sides of the second adjusting plate 30. The second adjusting plate 30 is disposed between the two support arms 22, and each second pin 104 extends to the corresponding second engagement hole 23. Each second pin 104 is fixed to either the first adjusting plate 20 or the second adjusting plate 30, so that the second adjusting plate 30 is rotatably connected to the first adjusting plate 20. The two support arms 22 are located inside the two pillars 12 and are flush with the two pillars 12. Specifically, the inner side of the support column 12 is provided with an axially extending movable groove 13, which is configured to accommodate the support arm 22 and provides sufficient space for the support arm 22 to move when the first adjusting plate 20 rotates about the first axis.

[0057] Specifically, see Figure 7 The adjustment mechanism 100 also includes a screw 109, through which the high-precision tilt sensor 60 is connected to the second adjustment plate 30. More specifically, the second adjustment plate 30 has a first through hole 33 in its middle, and a step is formed inside the first through hole 33. The high-precision tilt sensor 60 has a screw hole 62 on the side near the second adjustment plate 30. The screw 109 extends through the first through hole 33 and engages with the screw hole 62, and the screw 109 can abut against the step inside the first through hole 33. In some embodiments, the second adjustment plate 30 has an axially extending protrusion 36 in its middle, through which the first through hole 33 passes, and the high-precision tilt sensor 60 abuts against the overhanging end of the protrusion 36.

[0058] Specifically, the end plate 40 is further provided with a first mounting hole through it, a first micrometer 101 extends through the first mounting hole and abuts its first movable end 101a against the first adjusting plate 20, and the first micrometer 101 is fixed to the end plate 40 by means of bonding or threading. In some embodiments, the first adjusting plate 20 is provided with a first abutment hole 25 on the side near the first micrometer 101, and the first movable end 101a abuts against the bottom wall of the first abutment hole 25. Specifically, the first adjusting plate 20 is further provided with a second mounting hole through it, a second micrometer 102 extends through the second mounting hole and abuts its second movable end 102a against the second adjusting plate 30, and the second micrometer 102 is fixed to the first adjusting plate 20 by means of bonding or threading. In some embodiments, the second adjusting plate 30 is provided with a second abutment hole 34 on the side near the second micrometer 102, and the second movable end 102a abuts against the bottom wall of the second abutment hole 34.

[0059] In some embodiments, the adjustment mechanism 100 further includes a first spring 105 and a second spring 106 extending along the axial direction 111. The first spring 105 is disposed between the end plate 40 and the first adjustment plate 20, stabilizing the first adjustment plate 20 which is abutted by the first movable end 101a. The second spring 106 is disposed between the first adjustment plate 20 and the second adjustment plate 30, stabilizing the second adjustment plate 30 which is abutted by the second movable end 102a. When the first spring 105 is in a compressed state, both the first spring 105 and the first micrometer head 101 abut against the first adjustment plate 20 to stabilize it. When the first micrometer head 101 is adjusted to extend or shorten, the first adjustment plate 20 rotates about the first axis, and the first spring 105 correspondingly shortens or extends to maintain the first adjustment plate 20 in the rotated position. Similarly, the second spring 106 does the same. Preferably, the first spring 105 and the first micrometer head 101 are located on the left and right sides of the axis of the adjusting mechanism 100, and the second spring 106 and the second micrometer head 102 are located on the upper and lower sides of the axis of the adjusting mechanism 100. Optionally, in some embodiments, the end plate 40 and the first adjusting plate 20 are respectively provided with a first spring groove 114 on the side adjacent to each other, and the two ends of the first spring 105 are respectively located in a first spring groove 114. The first adjusting plate 20 and the second adjusting plate 30 are respectively provided with a second spring groove 115 on the side adjacent to each other, and the two ends of the second spring 106 are respectively located in a second spring groove 115. Providing the first spring groove 114 and the second spring groove 115 is beneficial for installing the first spring 105 and the second spring 106.

[0060] It should be added that, in some embodiments, the end plate 40 is not necessary, and the first adjusting plate 20 is rotatably directly connected to the support column 12. Alternatively, the first adjusting member can be a first motor, the shaft of which is coupled to the first adjusting plate 20 to cause the first adjusting plate 20 to rotate about a first axis; the second adjusting member can be a second motor, the shaft of which is coupled to the second adjusting plate 30 to cause the second adjusting plate 30 to rotate about a second axis.

[0061] When zero-position calibration of the high-precision tilt sensor 60 is performed using the adjustment mechanism 100 of this disclosure, since the high-precision tilt sensor 60 can rotate relative to the connecting base 10 around the first axis and the second axis, while the mounting surface 72 of the mounting base 70 remains stationary relative to the connecting base 10, that is, the high-precision tilt sensor 60 can rotate relative to the mounting base 70 around the first axis and the second axis, the first adjustment plate 20 and the second adjustment plate 30 can be rotated by detecting the voltage values ​​of the high-precision tilt sensor 60 at 0°, 90°, 180°, and 270° until the zero-position reference plane of the high-precision tilt sensor 60 is parallel to the mounting surface 72. When the first direction 112 extending from the first axis is perpendicular to the second direction 113 extending from the second axis, the adjustment of the first adjustment plate 20 and the adjustment of the second adjustment plate 30 are decoupled during the zero-position calibration process. That is, adjusting the first adjustment plate 20 only changes the voltage values ​​U1 and U3, and adjusting the second adjustment plate 30 only changes the voltage values ​​U2 and U4.

[0062] See Figures 8 to 13 Specifically, the device 300 further includes a clamping mechanism 200, which clamps the fixed mounting base 70, keeping the mounting surface 72 of the mounting base 70 in contact with the end face of the square box 301 and both stationary. When the clamping mechanism 200 clamps the fixed mounting base 70, the adjusting mechanism 100, the high-precision tilt sensor 60, the mounting base 70, and the square box 301 are connected to form a whole, and the four can rotate synchronously around a third axis. Specifically, the clamping mechanism 200 includes a connecting shaft 201 and a pressure block 230. The connecting shaft 201 extends laterally and is configured to rotate around its axis. The pressure block 230 is fixed to the connecting shaft 201 and can rotate with the connecting shaft 201. The device 300 also includes a linear telescopic mechanism 310 extending axially 111. The linear telescopic mechanism 310 includes a movable shaft 312 coupled to the connecting shaft 201. When the movable shaft 312 reciprocates along the axial direction 111, it drives the connecting shaft 201 to rotate in the forward or reverse direction around its axis, thereby causing the pressure block 230 to press or release the outer edge of the base plate 75 of the mounting seat 70. When the pressure block 230 presses against the outer edge of the base plate 75, the mounting seat 70 is firmly clamped and fixed to the square box 301. Specifically, the linear telescopic mechanism 310 can be a pneumatic cylinder, hydraulic cylinder, electric cylinder, etc.

[0063] Specifically, the clamping mechanism 200 further includes a swing block 210, a pull rod 240, and a fixed block 220. The pull rod 240 is connected to the movable shaft 312. One end of the swing block 210 is coupled to the movable shaft 312, and the other end of the swing block 210 is fixedly connected to the connecting shaft 201. The fixed block 220 is fixed to the square box 301, and the connecting shaft 201 is rotatably connected to the fixed block 220 around its axis. That is, the connecting shaft 201 is rotatably connected to the square box 301 through the fixed block 220. The fixed block 220 restricts the movement of the connecting shaft 201 in the height direction but does not restrict its rotation. The connecting shaft 201 can rotate around its axis under external force. Since the other end of the swing block 210 is connected to the connecting shaft 201, the fixed block 220 restricts the swing block 210 from moving up and down (in the height direction), so that the swing block 210 can rotate synchronously with the connecting shaft 201 around its axis under external force. When the movable shaft 312 moves linearly along axis 111, the pull rod 240 moves linearly synchronously with the movable shaft 312. Under the drive of the pull rod 240 and the constraint of the fixed block 220, the swing block 210 drives the connecting shaft 201 to rotate around the axis of the connecting shaft 201. At this time, the pressure block 230 rotates synchronously with the connecting shaft 201. That is, when the movable shaft 312 reciprocates along axis 111, the movable shaft 312 can drive the pressure block 230 to press or release the outer edge of the base plate 75 of the mounting seat 70.

[0064] Specifically, the pressure block 230, the fixing block 220, and the swing block 210 are all disposed on one side of the first end face 301a of the square box. The square box 301 has a first channel passing through it, and the pull rod 240 can extend through the first channel and couple with the swing block 210. Specifically, see Figure 13The clamping mechanism 200 also includes a sliding shaft 202. The swing block 210 is constructed in a strip-shaped block form. One end of the swing block 210 near the pull rod 240 has a sliding shaft hole 213. The sliding shaft 202 is disposed within the sliding shaft hole 213 and connected to the overhanging end of the pull rod 240. Optionally, the sliding shaft hole 213 is constructed as an oval hole. Since one end of the swing block 210 is connected to the pull rod 240 via the sliding shaft 202, and the movement of the other end of the swing block 210 is restricted, when the pull rod 240 makes a linear movement, the pull rod 240 will drive the sliding shaft 202 to abut against the wall of the sliding shaft hole 213, thereby pushing and pulling the swing block 210, and subsequently causing the swing block 210 to rotate around the axis of the connecting shaft 201. When the swing block 210 rotates, the sliding shaft 202 moves along the length direction of the swing block 210 within the sliding shaft hole 213. Preferably, the end of the pull rod 240 away from the movable shaft 312 is provided with a flat portion 242, and the middle of the flat portion 242 is provided with a second through hole 244. The end of the swing block 210 near the pull rod 240 is provided with a sliding groove 212 suitable for accommodating the flat portion 242. A sliding shaft hole 213 is provided on each side wall of the sliding groove 212. The sliding shaft 202 extends through the second through hole 244, and both ends of the sliding shaft 202 are respectively located in a sliding shaft hole 213. The depth of the sliding groove 212 and the length of the sliding shaft hole 213 are configured to facilitate the movement of the pull rod 240 and the sliding shaft 202.

[0065] Specifically, the swing block 210 has a first connecting shaft hole 211 at one end near the connecting shaft 201. The connecting shaft 201 extends through the first connecting shaft hole 211 and is fixed to the swing block 210. Optionally, the cross-section of the connecting shaft 201 is configured in a D-shape, and the first connecting shaft hole 211 is configured in a D-shape to accommodate the connecting shaft 201. Setting the two in a D-shape allows them to be connected while restricting their relative rotation.

[0066] Specifically, the fixing block 220 is fixed to the square box 301 and is constructed in the shape of a long strip. The fixing block 220 has a second connecting shaft hole 222 at one end near the connecting shaft 201. The second connecting shaft hole 222 is configured to accommodate the connecting shaft 201 so that it extends through, and the connecting shaft 201 can rotate relative to the fixing block 220 under external force. Specifically, the fixing block 220 has a second connecting hole 224, through which bolts can fix the fixing block 220 to the square box 301.

[0067] Specifically, the pressure block 230 is constructed in a block shape, and one end of the pressure block 230 is provided with a D-shaped third connecting shaft hole 232. The connecting shaft 201 is adapted to be accommodated in the third connecting shaft hole 232, and the pressure block 230 rotates synchronously when the connecting shaft 201 rotates. The wall of the pressure block 230 near the first end face 301a of the square box is a clamping wall 234, which is constructed to clamp the base plate 75 of the mounting base. Specifically, in some embodiments, the clamping wall 234 is constructed as a plane.

[0068] Preferably, the pull rod 240, the swing block 210, and the connecting shaft 201 are each configured as two, with each pull rod 240 connected to a connecting shaft 201 via a swing block 210. The two pull rods 240 are arranged parallel to each other along the height direction. Preferably, each connecting shaft 201 is further provided with two fixing blocks 220 and two pressure blocks 230, wherein the two fixing blocks 220 are located between the two pressure blocks 230, and the swing block 210 is located between the two fixing blocks 220. Optionally, in some embodiments, the connecting shaft 201 is provided with an annular groove, and a retaining spring is disposed within the annular groove to restrict the axial movement of the pressure block 230 along the connecting shaft 201.

[0069] Figure 14 , Figure 15 A schematic diagram is shown of the upper-mounted pull rod 240, swing block 210, and connecting shaft 201, etc. See also... Figure 14 When the movable shaft 312 drives the pull rod 240 to move linearly along the axial direction 111 towards the first end face 301a, that is, when the pull rod 240 moves in the direction of movement 207 as shown in the figure, the swing block 210, the connecting shaft 201, and the pressure block 230 rotate in the direction of rotation 208 as shown in the figure. Looking from the second circumferential surface 301d to the fourth circumferential surface 301f, the direction of rotation 208 is counterclockwise. When the pressure block 230 rotates counterclockwise, the clamping wall 234 of the pressure block 230 moves towards the first end face 301a, thereby clamping (or locking) the mounting base 70. See also... Figure 15 When the movable shaft 312 drives the pull rod 240 to move in the direction 207 shown in the figure, that is, to move linearly away from the first end face 301a along the axial direction 111, the swing block 210, the connecting shaft 201, and the pressure block 230 rotate in the direction 208 shown in the figure. When viewed from the second circumferential surface 301d to the fourth circumferential surface 301f, the rotation direction 208 is clockwise. When the pressure block 230 rotates clockwise, the clamping wall 234 of the pressure block 230 moves away from the first end face 301a, thereby releasing the mounting base 70.

[0070] See also Figures 9 to 11Optionally, the clamping mechanism 200 also includes a pull plate 203, through which the movable shaft 312 of the linear telescopic mechanism is connected to the two pull rods 240. Specifically, the pull plate 203 is constructed as a long strip-shaped plate extending along the height direction, and the movable shaft 312 and the pull plate 203, as well as the pull plate 203 and the pull rods 240, can be connected by fasteners such as bolts or screws.

[0071] Specifically, the clamping mechanism 200 further includes a first nanoprobe 320, which is disposed on the outer side of the second end face 301b of the square box 301. The first detection end 322 of the first nanoprobe 320 extends through the square box 301 to the first end face 301a. The first nanoprobe 320 can be used to detect whether the mounting surface 72 of the mounting base 70 is in contact with the first end face 301a. Preferably, at least three first nanoprobes 320 are configured, and a plane can be determined based on three points to determine whether the mounting surface 72 is completely in contact with the first end face 301a. Optionally, four first nanoprobes 320 are configured, and the four first nanoprobes 320 are arranged in two rows and two columns. When four first nanoprobes 320 are configured, one of them is redundant and can be used for both verification and replacement. Specifically, the clamping mechanism 200 also includes a mounting plate 205, through which the four first nanoprobes 320 are fixed to the square box 301. More specifically, the four first nanoprobes 320 can be fixed to one side of the mounting plate 205 by means of adhesive bonding or other methods. The first detection end 322 extends sequentially through the mounting plate 205 and the square box 301 to the first end face 301a. The other side of the mounting plate 205 is attached to the second end face 301b. The mounting plate 205 can be fixed to the square box 301 by fasteners such as screws.

[0072] Specifically, the clamping mechanism 200 further includes a connector 330, which is disposed on the outer side of the second end face 301b of the square box 301. The connector 330 is fixed to the square box 301, and the linear telescopic mechanism 310 is connected to the square box 301 through the connector 330. Specifically, the connector 330 includes a first body 331 and a second body 332 arranged axially, wherein the second body 332 is close to the linear telescopic mechanism 310. More specifically, the first body 331 extends axially and has a nanoprobe receiving cavity 333 therein. The first body 331 has an opening on the side facing the second end face 301b, through which the first nanoprobe 320 enters the nanoprobe receiving cavity 333.

[0073] Specifically, the outer contour of the first body 331 is constructed to be circular, and a first annular groove 335 is provided on the outer periphery of the first body 331. The first annular groove 335 is configured to be compatible with the flipping mechanism. In some embodiments, the third axis is related to the first annular groove 335. For example, the third axis is the axis of the first body 331, and the flipping mechanism flips the box 301 through this axis. Optionally, the first body 331 and the second body 332 are arranged coaxially, and the third axis is the axis of the connector 330. When the connector 330 is arranged coaxially with the box 301, the third axis is also the axis of the box 301. Optionally, in some embodiments, the flipping mechanism first lifts the box 301, connector 330, etc., placed on the platform, and flips the lifted box 301, connector 330, etc.; after the flipping is completed, the flipping mechanism lowers the box 301, connector 330, etc., back onto the platform. At this time, the third axis is equivalent to the axis of the box 301.

[0074] The first body 331 has two axially extending third through holes 334, through which the pull rod 240 can extend respectively. In some embodiments, the pull rod 240 is provided with a sliding bearing 204, and the sliding bearing 204 is located within the third through hole 334. Providing the sliding bearing 204 not only helps to support the pull rod 240, but also reduces the frictional resistance when the pull rod 240 makes linear motion. Optionally, the first body 331 also has an axially extending fourth through hole 338, through which one end of the cable 305 can extend and pass through the fourth through hole 338 to connect to an external digital multimeter and DC regulated power supply, and the other end of the cable 305 is coupled to a first magnetic head mounted on the square box 301.

[0075] Optionally, the second body 332 is configured as a square housing, with a side wall opening 336 on each of its four circumferential walls surrounding its own axis, and an end opening 337 on its end wall near the linear telescopic mechanism 310. In some embodiments, the side wall openings 336 are configured to be generally rectangular, and the end openings 337 are configured to be circular. A pull plate 203 extends through the two side wall openings 336 arranged opposite each other in the height direction. The portion of the pull plate 203 located within the second body 332 has a hole, through which a bolt or screw extends and connects to the movable shaft 312. Optionally, the linear telescopic mechanism 310 is fixed to the end wall of the second body 332 near the linear telescopic mechanism 310 by bolts or the like.

[0076] Figure 16 A schematic diagram shows the mounting base 70 being locked by the clamping mechanism 200. The clamping walls 234 of the four pressure blocks 230 respectively abut against the four corners of the base plate 75, thus fixing the mounting base 70 to the square box 301. Specifically, in some embodiments, see... Figure 4 The flange of the base plate 75 is provided with positioning holes 76; see also Figure 9The box 301 has a positioning protrusion 306 protruding from the first end face 301a, and the positioning protrusion 306 is configured to be received within the positioning hole 76. See also Figure 16 The positioning protrusion 306 is located inside the positioning hole 76. The combination of the positioning hole 76 and the positioning protrusion 306 facilitates the fixing of the mounting base 70 to the square box 301. Specifically, a positioning hole 76 is provided at each of the four corners of the flange of the base plate 75, and four positioning protrusions 306 are provided at the corresponding positions of the square box 301. Each positioning protrusion 306 is suitable for accommodating one positioning hole 76.

[0077] It should be added that, see [link / reference] Figure 2 , Figure 4 , Figure 5 and Figure 8 In some embodiments, the end plate 40 is provided with a connector seat 108 for connecting the adapter 107. The connector seat 108 is also provided with a second magnetic head. The adapter 107 is coupled to the second magnetic head through the connector seat 108. Since the lead wire 61 is connected to the adapter 107, the lead wire 61 is also coupled to the second magnetic head. When the device is powered on, the first magnetic head and the second magnetic head engage. See also... Figure 1 , Figure 2 In some embodiments, the device 300 further includes a protective ring 302 fixed to the box 301. The protective ring 302 extends axially 111 and has an axially extending channel adapted to accommodate the adjustment mechanism 100. The protective ring 302 is used to protect the adjustment mechanism 100 and the like disposed therein. In particular, the outer periphery of the protective ring 302 is provided with a second annular groove 302a, which is configured to engage with a flipping mechanism. When the flipping mechanism flips the device 300, the high-precision tilt sensor 60, and the mounting base 70, the flipping mechanism is coupled to the first annular groove 335 and the second annular groove 302a. In some embodiments, the device 300 further includes a balance block 303 fixed to the box 301, which is used to position the center of gravity of the device 300, the high-precision tilt sensor 60, and the mounting base 70 near a third axis for smooth flipping.

[0078] This disclosure provides a method for zero-position calibration of a high-precision tilt sensor, which uses the aforementioned apparatus 300 for zero-position calibration of a high-precision tilt sensor to adjust the tilt angle of the zero-position reference plane of the high-precision tilt sensor 60. The following description uses an example where the first axis is perpendicular to the second axis and the first axis is perpendicular to the third axis. The zero-point calibration method includes the following steps: connecting the high-precision tilt sensor 60 to the second adjustment plate 30, connecting the mounting base 70 to the connecting base 10, and then connecting the high-precision tilt sensor 60 to the square box 301 through the mounting base 70; rotating the square box around the third axis to 90° and 270°, respectively measuring the voltage values ​​U2 and U4 corresponding to the high-precision tilt sensor, comparing |U2-U4| with the target voltage value U, adjusting the second adjustment component to rotate the zero-point reference surface around the second axis, thereby making |U2-U4| less than or equal to the target voltage value U; rotating the square box around the third axis to 0° and 180°, respectively measuring the voltage values ​​U1 and U3 corresponding to the high-precision tilt sensor, comparing |U1-U3| with the target voltage value U, adjusting the first adjustment component to rotate the zero-point reference surface around the first axis, thereby making |U1-U3| less than or equal to the target voltage value U. Finally, if both |U2-U4| and |U1-U3| are less than U, then the zero-position reference plane of the high-precision tilt sensor 60 can be considered parallel to the mounting surface 72 of the mounting base 70. In a preferred embodiment, when both |U2-U4| and |U1-U3| are less than the target voltage value U, the square box 301 is rotated around the third axis to 0°, 90°, 180°, and 270° respectively, and the voltage values ​​U1, U2, U3, and U4 corresponding to the high-precision tilt sensor 60 are measured respectively. The first and second adjusting members are adjusted so that the absolute value of the difference between any two of the voltage values ​​U1, U2, U3, and U4 is less than or equal to the target voltage value U.

[0079] Specifically, the target voltage value U is less than or equal to 0.02V. In some embodiments, the target voltage value U is specifically 0.01V, 0.006V, or 0.003V, etc. Preferably, the first adjusting member is a first micrometer 101, and the second adjusting member is a second micrometer 102. Specifically, the rotational accuracy of the first micrometer 101 and the second micrometer 102 is 0.2mm / turn or 0.1mm / turn, etc. Preferably, the rotational accuracy of both is 0.1mm / turn.

[0080] When calibrating the zero-point reference plane of a high-precision tilt sensor using the zero-point calibration method disclosed herein, no additional tilt sensor is required. Calibration is achieved simply by measuring the voltage values ​​of the high-precision tilt sensor under multiple flip angles, comparing the measured voltage values ​​U1, U2, U3, and U4 with the target voltage value U, and adjusting the corresponding adjustment components to rotate the high-precision tilt sensor around the first or second axis. This calibration method is not only highly reliable and easy to operate, but also offers high calibration accuracy.

[0081] See Figures 17 to 26 The present invention also discloses a system 1000 for zero-position calibration of a high-precision tilt sensor, including a flipping mechanism 400, a lifting mechanism 500, and the aforementioned device 300 for zero-position calibration of a high-precision tilt sensor. Specifically, see [link to documentation]. Figure 17 , Figure 18 A tilting mechanism 400 is coupled to a square box 301, for example, via a connector 330. The tilting mechanism 400 is configured to rotate the square box 301 along a third axis, thereby tilting the square box 301 and other components of the device 300. A lifting mechanism 500 is coupled to the square box 301 and the tilting mechanism 400, for example, via a protective ring 302 and / or a connector 330. The lifting mechanism 500 is configured to move the square box 301 and the tilting mechanism 400 vertically, such that the square box 301 (i.e., the entire device 300) can be lifted to a suitable height for rotation, or the square box 301 (i.e., the entire device 300) can be lowered onto a horizontal platform 706a (see [reference]). Figure 23 ).

[0082] When the square box 301 is rotated around the third axis by the flipping mechanism 400 to 0°, 90°, 180°, and 270°, the voltage value corresponding to the high-precision tilt sensor 60 can be measured respectively. Based on the measured voltage value, at least one of the first or second adjusting members is driven to rotate the corresponding adjusting plate, thereby changing the orientation of the zero-position reference surface of the high-precision tilt sensor 60 until the zero-position reference surface is parallel to the mounting surface 72. As mentioned above, when the square box 301 is rotated to 0°, 90°, 180°, and 270°, the four circumferential surfaces are located at the bottom of the square box 301; the third axis is perpendicular to the mounting surface 72 of the mounting base 70 and parallel to the four circumferential surfaces.

[0083] Specifically, in some embodiments, the system 1000 further includes a support mechanism 700, which provides the platform surface 706a. More specifically, the support mechanism 700 includes a first marble platform 704 and a second marble platform 709 arranged sequentially from bottom to top, and three leveling mechanisms 710 disposed between the first marble platform 704 and the second marble platform 709. A lifting mechanism 500 is connected to the second marble platform 709, and the platform surface 706a is disposed on the second marble platform 709. The three leveling mechanisms 710 are arranged non-collinearly, and by adjusting each leveling mechanism 710, the platform surface 706a can be made parallel to the horizontal plane; that is, a plane can be defined by three points.

[0084] More specifically, the first marble platform 704 is constructed as a cuboid, with grooves, holes, or channels suitable for arranging other components. A leveling mechanism 710 is fixed to the first marble platform 704. The leveling mechanism 710 has a movable end that can move along the height direction. The movable end of the leveling mechanism 710 is connected to a second marble platform 709, for example, at the bottom of the second marble platform 709. By adjusting the movable ends of each leveling mechanism 710, the platform surface 706a can be made parallel to the horizontal plane. The leveling mechanism 710 can be a linear motor, electric cylinder, pneumatic cylinder, hydraulic cylinder, jack, etc.

[0085] Preferably, the leveling mechanism 710 is a mechanism that converts rotational motion into linear motion, and the axis of rotational motion and the axis of linear motion are arranged parallel to each other. Specifically, see... Figure 19 The leveling mechanism 710 includes a first motor 711, a first gear 712, and a miniature jack 714, with the first motor 711 and the miniature jack 714 arranged in parallel. The first motor 711 has an output shaft, and the first gear 712 is connected to the output shaft of the first motor 711. A second gear 713 is provided on the outer periphery of the miniature jack 714, and the first gear 712 meshes with the second gear 713. When the output shaft of the first motor 711 rotates, it drives the first gear 712 to rotate, and the first gear 712 drives the meshing second gear 713 to rotate, thereby causing the movable end of the miniature jack 714 to move up and down along the height direction. The leveling mechanism 710 converts the rotational motion provided by the first motor 711 into linear motion of the movable end of the miniature jack 714, which is beneficial for adjusting the horizontal platform 706a.

[0086] Specifically, the support mechanism 700 further includes a leveling connecting plate 715, which is disposed on the upper part of the first marble platform 704. The first motor 711 and the miniature jack 714 are both fixed to the first marble platform 704 via the leveling connecting plate 715. In some embodiments, the support mechanism 710 further includes three support blocks 707 disposed at the bottom of the second marble platform 709. Each support block 707 has a groove at its bottom, which is configured to abut against the movable end of the miniature jack 714. The movable end of each miniature jack 714 abuts against the groove of one support block 707. When the first motor 711 rotates, the movable end of the miniature jack 714 drives the corresponding support block 707 to move in the height direction, thereby moving the second marble platform 709.

[0087] See also Figure 17 , Figure 18The second marble platform 709 includes a first portion 705 of second marble and a second portion 706 of second marble. The second portion 706 of second marble is located at the upper center of the first portion 705 of second marble. A lifting mechanism 500 is connected to the first portion 705 of second marble, and a platform surface 706a is located on the top of the second portion 706 of second marble. Optionally, the first portion 705 of second marble has a hole extending along the height direction for accommodating the lifting mechanism 500. Specifically, the first portion 705 of second marble is constructed as a cuboid to support the second portion 706 of second marble and the lifting mechanism 500, etc. The second portion 706 of second marble is also constructed as a cuboid, the area of ​​its horizontal cross-section being smaller than the area of ​​the horizontal cross-section of the first portion 705 of second marble, and the platform surface 706a is the upper surface of the second portion 706 of second marble.

[0088] In some embodiments, see Figure 21 , Figure 23 A rectangular box limiting block 708 is provided on the horizontal platform surface 706a to guide the rectangular box 301 to be placed in a designated position and to restrict the rolling of the rectangular box 301. The rectangular box limiting block 708 has a main body and end portions disposed at both ends of the main body, wherein the extension direction of the main body is perpendicular to the extension direction of the end portions, and the two form an angle at the intersection. When the horizontal platform surface 706a is adjusted to be parallel to the horizontal plane, the main body of the rectangular box limiting block 708 extends along the axial direction 111. Preferably, the rectangular box limiting block 708 is constructed as two blocks, and the two rectangular box limiting blocks 708 are disposed opposite to each other. When the rectangular box 301 is placed on the horizontal platform surface 706a, both rectangular box limiting blocks 708 surround the outer periphery of the rectangular box 301. Preferably, see further. Figure 23 In some embodiments, the top portion of the second marble second part 706 located between the two square box limiting blocks 708 is provided with a groove 706b, that is, the top portion of the second marble second part 706 directly below the square box is provided with a groove 706b, and the system 1000 is configured to provide a purging airflow into the groove 706b to facilitate the separation of the square box 301 from the horizontal platform surface 706a.

[0089] Preferably, the second marble section 706 has a hole extending along the height direction. The system 1000 also includes a second nanoprobe 1002, which extends through the hole through the second marble section 706 until the second detection end 1002a of the second nanoprobe is flush with the platform surface 706a, for detecting whether the box 301 is stably placed on the platform surface 706a. That is, it is used to detect whether the circumferential surface of the box 301 is in contact with the platform surface 706a, which will help to efficiently adjust the zero reference plane of the high-precision tilt sensor 60. Preferably, four second nanoprobes 1002 are constructed, with one second nanoprobe 1002 respectively set at each corner of the box limiting block 708.

[0090] In some embodiments, the support mechanism 700 further includes foot pads 701 and a support base 702, wherein the foot pads 701, the support base 702, and the first marble platform 704 are arranged sequentially from bottom to top. The support base 702 is constructed as a cuboid with a hollow structure, and the material may be cast iron. Optionally, four foot pads 701 are constructed, and the four foot pads 701 are respectively arranged at the four corners of the bottom of the support base 702. Preferably, a spacer 703 is further provided between the support base 702 and the first marble platform 704. Four spacers 703 are constructed, and each spacer 703 is respectively disposed at one corner of the bottom of the first marble platform 704.

[0091] See Figure 17 , Figure 18 , Figures 24 to 26 Specifically, the tilting mechanism 400 includes a tilting connecting frame 410, a rotating platform 420, and a second motor 430. The rotating platform 420 includes a platform input shaft 422 and a platform output shaft 423 coupled to each other. The second motor 430 is connected to the platform input shaft 422, and the tilting connecting frame 410 is connected to the platform output shaft 423. The end of the connector 330 away from the square box 301 is coupled to the tilting connecting frame 410. The rotating platform 420 is connected to the lifting mechanism 500. The second motor 430 can drive the tilting connecting frame 410 to rotate via the rotating platform 420.

[0092] More specifically, the rotating platform 420 also includes a platform housing 421, wherein the platform input shaft 422 and the platform output shaft 423 are rotatable relative to the platform housing 421, and the second motor 430 is fixed to the platform housing 421, which is fixedly connected to the lifting mechanism 500. The second motor 430 has a motor output shaft 431 connected to the platform input shaft 422. When the motor output shaft 431 drives the platform input shaft 422 to rotate, due to the coupling between the platform input shaft 422 and the platform output shaft 423, the platform input shaft 422 will drive the platform output shaft 423 to rotate, thereby driving the flipping connecting frame 410, the connecting member 330, and the square box 301 to rotate together. In some embodiments, the platform output shaft 423, the flipping connecting frame 410, the connecting member 330, and the square box 301 rotate synchronously (i.e., at the same speed). Preferably, when the motor output shaft 431 rotates, the platform input shaft 422 rotates synchronously with the motor output shaft 431. The rotational speed of the platform input shaft 422 is greater than the rotational speed of the platform output shaft 423, which is beneficial for the torque output by the platform output shaft 423 to be greater than the torque provided by the motor output shaft 431, thus enabling the tilting mechanism 400 to provide a larger output torque. Specifically, in some embodiments, the platform input shaft 422 and the platform output shaft 423 are coupled by two meshing gears. The outer diameter of the gear connected to the platform input shaft 422 is smaller than the outer diameter of the gear connected to the platform output shaft 423. Both the platform input shaft 422 and the platform output shaft 423 are connected to the platform housing 421 through bearings.

[0093] See also Figures 24 to 26The flip-up connecting frame 410 is configured to extend along the axial direction 111, with a connector interface 412 at one end and a rotary platform connecting end 413 at the other end. The rotary platform connecting end 413 is connected to the platform output shaft 423, for example, by bolts, screws, or other components. The connector interface 412 is configured to accommodate the end of the connector 330 near the flip-up connecting frame 410, meaning the flip-up connecting frame 410 can be sleeved onto the connector 330 through the connector interface 412, thereby causing the connector 330 to flip. Specifically, the inner contour of the connector interface 412 is configured to include edges, such that the edges can abut against the outer periphery of the connector 330, thereby allowing the flip-up connecting frame 410 to cause the connector 330 to flip. Preferably, the inner contour of the connector interface 412 is constructed as a first rectangle, and the outer contour of the end of the connector 330 near the flip-up connecting frame 410 is a second rectangle, that is, the outer contour of the second body 332 of the connector 330 is a second rectangle. The first rectangle and the second rectangle are similar, allowing the second body 332 to be placed in the connector interface 412 and enabling the flip-up connecting frame 410 to rotate the connector 330. More preferably, the first rectangle and the second rectangle have a large clearance fit, that is, the connector interface 412 and the second body 332 have a large clearance fit. The large clearance fit facilitates the installation and connection between the flip-up connecting frame 410 and the connector 330, and also provides adjustment space for the square box 301 to be placed on the horizontal platform 706a. In some embodiments, the flip-up connecting frame 410 also has a linear telescopic mechanism cavity 411 suitable for accommodating the linear telescopic mechanism 310, and the opening of the connector interface 412 communicates with the linear telescopic mechanism cavity 411.

[0094] See Figure 18 , Figures 21 to 23 The lifting mechanism 500 includes a lifting telescopic component 501, a first support frame 505a, and a second support frame 505b. The lifting telescopic component 501 has a movable end and is connected to the second marble platform 709. Both the first support frame 505a and the second support frame 505b are connected to the movable end of the lifting telescopic component 501. The first support frame 505a is located on the outer periphery of the protective ring 302 and supports the protective ring 302. The second support frame 505b is located on the outer periphery of the connecting member 330 and supports the connecting member 330. The platform housing 421 and the second motor 430 are both fixedly connected to the second support frame 505b. Optionally, both the first support frame 505a and the second support frame 505b have an opening slot extending axially 111 with the opening facing upwards. The cross-section of the opening slots of the two support frames can be constructed in a triangular or trapezoidal shape to facilitate support, such as an isosceles triangle or an isosceles trapezoid. When the cross-section of the opening slots of the two support frames is constructed as an isosceles triangle, the vertex of the isosceles triangle is located at the bottom; when it is an isosceles trapezoid, the shorter base of the isosceles trapezoid is located at the bottom.

[0095] Specifically, the first marble platform 704 has a channel extending through it along its height, and the lifting telescopic member 501 is disposed within this channel. The lifting mechanism 500 also includes a first connecting plate 502 and a second connecting plate 503. The lifting telescopic member 501 is suspended to the second marble platform 709 via the first connecting plate 502. The first support frame 505a and the second support frame 505b are connected to the movable end of the lifting telescopic member 501 via the second connecting plate 503. More specifically, the lifting mechanism 500 also includes a third connecting plate 508 and a first connecting rod 504. The third connecting plate 508 is placed on the first part 705 of the second marble platform, and one end of the first connecting rod 504 is connected to the third connecting plate 508, while the other end is connected to the first connecting plate 502. Preferably, the third connecting plate 508 is constructed as two pieces, and the two third connecting plates 508 are arranged along the axial direction 111 on both sides of the bottom of the second part 706 of the second marble; the first connecting rod 504 is constructed as four pieces, and each third connecting plate 508 is connected to the first connecting plate 502 through two first connecting rods 504.

[0096] Optionally, in some embodiments, the lifting mechanism 500 further includes a linear bearing 511 extending along the height direction. The linear bearing 511 includes a fixed portion and a movable portion, with the fixed portion connected to the first connecting plate 502 and the movable portion connected to the second connecting plate 503. Providing the linear bearing 511 facilitates guiding the first support frame 505a and the second support frame 505b to move along the height direction. Preferably, two linear bearings 511 are configured, arranged axially 111 on both sides of the lifting telescopic member 501.

[0097] Specifically, the lifting mechanism 500 further includes two second connecting rods 507, and both the first support frame 505a and the second support frame 505b are connected to the second connecting plate 503 via a second connecting rod 507. Optionally, in some embodiments, the lifting mechanism 500 further includes two upright plates 506 extending along the height direction, with each third connecting plate 508 having an upright plate 506, and the first support frame 505a and the second support frame 505b located between the two upright plates 506. See also Figure 22 , Figure 23Preferably, the first support frame 505a and the second support frame 505b are each provided with a first slider 516, and each upright plate 506 is provided with a first guide rail 517 extending in the height direction. Each first slider 516 is coupled to a first guide rail 517 to guide the first support frame 505a and the second support frame 505b to move in the height direction. Specifically, the two first sliders 516 are respectively positioned facing the adjacent upright plate 506, and each first slider 516 is provided with a groove. The two first guide rails 517 are respectively positioned facing the adjacent support frame, and each first guide rail 517 is configured to be accommodated in the groove of the mating first slider 516. Alternatively, the first slider 516 is provided with a protrusion, and the first guide rail 517 is configured to have a groove adapted to the protrusion.

[0098] Preferably, see continue to see Figure 22 , Figure 23 The lifting mechanism 500 also includes a first support wheel 514 and a second support wheel 515. The first support wheel 514 is rotatably connected to the upper part of the first support frame 505a away from the adjacent vertical plate 506, and the second support wheel 515 is rotatably connected to the upper part of the second support frame 505b away from the adjacent vertical plate 506. The second support wheel 515 is configured to engage with the first annular groove 335, and the first support wheel 514 is configured to engage with the second annular groove 302a. Preferably, the cross-section of the first annular groove 335 is rectangular, and the second support wheel 515 is configured to engage with the first annular groove 335. For example, the circumferential surface of the second support wheel 515 is configured to be smooth, i.e., the second support wheel 515 is cylindrical. This will facilitate stable support of the tilting device 300 during operation. The cross-section of the second annular groove 302a is configured as a triangle or trapezoid, and the opening of the second annular groove 302a is wider than its bottom. The first support wheel 514 is configured to engage with the second annular groove 302a. For example, the cross-section of the second annular groove 302a is an isosceles trapezoid, with the long base of the isosceles trapezoid located at the opening. The cross-section of the central protrusion of the first support wheel 514 is configured to fit the isosceles trapezoid of the second annular groove 302a.

[0099] Specifically, in some embodiments, the lifting mechanism 500 further includes a fixed base 512, and the platform housing 421 and the second motor 430 are both fixedly connected to the second support frame 505b via the fixed base 512. The fixed base 512 is configured in an L-shape, having a horizontal extension and a vertical extension. The horizontal extension is connected to the second support frame 505b, and the vertical extension is connected to the platform housing 421 and the second motor 430. In some embodiments, the system 1000 includes a device for detecting the moving height of the first support frame 505a or the second support frame 505b. This device includes a first part and a second part. The first part is fixed to a vertical plate 506 near the fixed base 512, and the second part is fixed to the fixed base 512. When the second part of the device moves to align with the first part, the device 300 is moved to a height suitable for flipping. Optionally, see [link to documentation]. Figure 18 , Figure 21 The upright plate 506 is provided with a support frame limiting block 518, which is used to restrict the first support frame 505a and the second support frame 505b from moving upward.

[0100] Optionally, the system 1000 also includes a translation mechanism 720, which is disposed on the second marble platform 709. The upright plate 506 near the second support frame 505b is fixed to the translation mechanism 720, and the translation mechanism 720 can drive the upright plate 506 to move along the axial direction 111.

[0101] Specifically, see Figure 18 , Figure 20 The translation mechanism 720 includes a translation telescopic member 721, a support plate 722, a second slider 723, and a second guide rail 724. A vertical plate 506 near the second support frame 505b is fixedly connected to the support plate 722. The translation telescopic member 721 and the second guide rail 724 are fixed to the second marble platform 709 via a third connecting plate 508. The movable end of the translation telescopic member 721 is connected to the support plate 722. The second guide rail 724 extends axially 111. The second slider 723 is connected to the support plate 722 and is configured to engage with the second guide rail 724. Specifically, the engagement method of the second slider 723 and the second guide rail 724 can be referred to the engagement method of the first slider 516 and the first guide rail 517, which will not be repeated here. The telescopic component 721 extends and retracts along the axial direction 111, causing the support plate 722 to move along the axial direction 111. This, in turn, causes the upright plate 506 near the second support frame 505b to move, thereby adjusting the distance between the two upright plates 506. This allows for the adjustment of the distance between the first support frame 505a and the second support frame 505b, so that the first support wheel 514 on the first support frame 505a and the second support wheel 515 on the second support frame 505b can be aligned with the second annular groove 302a on the protective ring 302 and the first annular groove 335 on the connector 330, respectively.

[0102] See Figure 17Optionally, the system 1000 also includes a collimator 1001 disposed above the second part 706 of the second marble. The collimator 1001 can be used in conjunction with other equipment to detect whether the platform surface is parallel to the horizontal plane.

[0103] The above descriptions are merely a few embodiments of the present invention. Those skilled in the art can make various modifications or variations to the embodiments of the present invention based on the content disclosed in the application documents without departing from the spirit and scope of the present invention.

Claims

1. A system for high-precision tilt sensor zero calibration, characterized in that, The high-precision tilt sensor is adjustablely connected to the mounting base, and the system includes: An adjustment mechanism includes a connecting seat, a first adjustment plate, a second adjustment plate, a first adjustment member, and a second adjustment member. The first adjustment plate is rotatably connected to the connecting seat about a first axis, and the second adjustment plate is rotatably connected to the first adjustment plate about a second axis. The first adjustment member is coupled to the first adjustment plate and is configured to drive the first adjustment plate to rotate about the first axis. The second adjustment member is coupled to the second adjustment plate and is configured to drive the second adjustment plate to rotate about the second axis. A square box, the square box including two end faces perpendicular to the horizontal direction and four circumferential surfaces disposed between the two end faces, the high-precision tilt sensor is connected to the second adjustment plate, the mounting base is connected to the connecting base, and the mounting surface located outside the mounting base abuts against one end face of the square box; A flipping mechanism, coupled to the square box, is configured to drive the square box to rotate along a third axis; A lifting mechanism is coupled to the square box and the tilting mechanism. The lifting mechanism is configured to move the square box and the tilting mechanism up and down in the height direction, so that the square box can be lifted to a suitable height for rotation, or the square box can be lowered to a horizontal platform. When the square box is rotated around the third axis to 0°, 90°, 180°, and 270° by the flipping mechanism, the voltage value corresponding to the high-precision tilt sensor can be measured respectively. Based on the voltage value, at least one of the first or second adjusting member is driven to rotate the corresponding adjusting plate, thereby changing the orientation of the zero-position reference surface of the high-precision tilt sensor until the zero-position reference surface is parallel to the mounting surface. When the square box is rotated to 0°, 90°, 180°, and 270°, the four circumferential surfaces are located at the bottom of the square box; the third axis is perpendicular to the mounting surface of the mounting base and parallel to the four circumferential surfaces.

2. The system of claim 1, wherein, The system also includes a support mechanism, which includes a first marble platform and a second marble platform arranged sequentially from bottom to top, and three leveling mechanisms disposed between the first marble platform and the second marble platform. The three leveling mechanisms are arranged non-collinearly, the lifting mechanism is connected to the second marble platform, and the platform surface is set on the second marble platform.

3. The system according to claim 2, characterized in that, The second marble platform includes a first part of second marble and a second part of second marble, and the second part of second marble is disposed in the upper middle part of the first part of second marble. The lifting mechanism is connected to the first part of second marble, and the platform surface is disposed in the second part of second marble. The support mechanism also includes three support blocks disposed at the bottom of the first part of the second marble, each support block having a groove at its bottom; Each leveling mechanism includes a first motor, a first gear, and a miniature jack. The first gear is connected to the output shaft of the first motor, and a second gear is provided on the outer periphery of the miniature jack. The first gear meshes with the second gear. Each miniature jack has its movable end abutting against a groove in a support block; when the first motor rotates, the movable end of the miniature jack drives the corresponding support block to move in the height direction.

4. The system according to claim 3, characterized in that, The system also includes connectors; The flipping mechanism includes a flipping connecting frame, a rotating platform, and a second motor. The rotating platform includes a platform housing and a platform input shaft and a platform output shaft that are rotatable relative to the platform housing and coupled to each other. The platform input shaft is connected to the motor output shaft of the second motor, and the platform output shaft is connected to the flipping connecting frame. One end of the connector is connected to the square box, the other end of the connector is coupled to the flipping connecting frame, and the platform housing is connected to the lifting mechanism.

5. The system according to claim 4, characterized in that, The flip-up connecting frame has a connecting interface at one end near the connecting member. The connecting interface is configured to accommodate the end of the connecting member near the flip-up connecting frame. The inner contour of the connecting interface and the outer contour of the end of the connecting member near the flip-up connecting frame are configured as similar rectangles, and there is a large clearance fit between the connecting interface and the end of the connecting member near the flip-up connecting frame.

6. The system according to claim 4, characterized in that, The system also includes a protective ring fixed to the square box, the protective ring having an axially extending channel, and the adjustment mechanism being disposed within the channel of the protective ring; The lifting mechanism includes a lifting telescopic component, a first support frame, and a second support frame. The lifting telescopic component is connected to the second marble platform, and both the first support frame and the second support frame are connected to the movable end of the lifting telescopic component. The first support frame is disposed on the outer periphery of the protective ring and is used to support the protective ring; the second support frame is disposed on the outer periphery of the connector and is used to support the connector; and the platform housing and the second motor are both fixedly connected to the second support frame.

7. The system according to claim 6, characterized in that, The lifting mechanism further includes a first support wheel and a second support wheel, wherein the first support wheel is rotatably connected to the first support frame and the second support wheel is rotatably connected to the second support frame; The connector has a first annular groove on its outer periphery, the cross-section of which is rectangular, and the second support wheel is configured to engage with the first annular groove. The protective ring has a second annular groove on its outer periphery, the cross-section of which is triangular or trapezoidal, and the opening of the second annular groove is wider than its bottom. The first support wheel is configured to engage with the second annular groove.

8. The system according to claim 6, characterized in that, The first support frame and the second support frame are each provided with a first slider. The lifting mechanism also includes two upright plates fixed to the second marble platform. Each upright plate is provided with a first guide rail extending in the height direction. Each first slider is combined with a first guide rail to guide the first support frame and the second support frame to move in the height direction.

9. The system according to any one of claims 6 to 8, characterized in that, The system also includes a translation mechanism, which includes a translation telescopic member, a support plate, a second slider, and a second guide rail. The translation telescopic member and the second guide rail are fixed to the second marble table. The movable end of the translation telescopic member is connected to the support plate. The second guide rail extends axially. The second slider is connected to the support plate and is configured to engage with the second guide rail. The upright plate near the second support frame is connected to the support plate.

10. The system according to any one of claims 3 to 8, characterized in that, The system also includes a nanoprobe, which is disposed on the second marble platform and the probe end of the nanoprobe is flush with the surface of the platform. The platform surface located directly below the square box is provided with grooves for purging and ventilation.

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