Dismounting and mounting device, dismounting method and mounting method for supporting column in heating plate

Abstract

The invention discloses a dismounting and mounting device, dismounting method and mounting method for a supporting column in a heating plate, and is applied to the field of semiconductors, the dismounting and mounting device comprises a device main body, and the device main body comprises a bottom side extension part extending to the bottom side of the heating plate and a moving part; the heating disc is mounted in the cavity; when the device body is installed at the heating disc, the orthographic projection of the supporting column in the vertical direction is located in the bottom side extending part. A clamping part bearing table is arranged in the bottom side extension part; the clamping part is used for clamping the plug pin part, the moving part comprises a first moving part, a second moving part and a motion conversion part, and the second moving part is used for moving between the side part of the heating disc and the side wall of the cavity and is connected with the first moving part through the motion conversion part so as to drive the first moving part to move along a straight line. In the limited space between the heating disc and the inner wall of the cavity, the movement of the second movement part is converted into the linear movement of the first movement part, so that the bolt component is pulled away and installed, and the working efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and in particular to a device, method and method for removing and installing a support column in a heating plate. Background Technology

[0002] Lift pins are commonly used in the semiconductor industry for wafer transfer, specifically to support the wafer during lifting and lowering, particularly in chemical vapor deposition (CVD) processes to facilitate wafer transfer between the robotic arm and the work position. In CVD chambers, lift pins are typically mounted on the heater to facilitate wafer placement and removal. The mainstream design for CVD chambers uses lift pins with pins. However, due to the limited space between the heater and the chamber body, it's impossible to install or remove the lift pin while the heater is inside the chamber. Current methods for removing lift pins involve first removing the heater from the chamber, followed by removal or installation. However, this process significantly extends the time required for preventative maintenance (removing the heater and restarting the machine requires re-leveling the heater, repositioning the robotic arm, and performing leak checks).

[0003] Therefore, providing a device that allows for the disassembly and installation of support columns in a heating plate without excessively prolonging the duration of preventative maintenance operations is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of this invention is to provide a device, method, and method for disassembling and assembling a support column in a heating plate, which solves the problem that in the prior art, the heating plate needs to be removed from the chamber first when disassembling the support column. However, the above-mentioned disassembly and installation operations of the heating plate greatly prolong the time of preventive maintenance operations.

[0005] To solve the above-mentioned technical problems, the present invention provides

[0006] A device for assembling and disassembling a support column in a heating plate, wherein the heating plate is installed in a cavity, and the support column extends through the heating plate from top to bottom, comprising a support column body, a pin component, and a counterweight; the pin component and the support column body form a pluggable connection.

[0007] The disassembly and assembly device includes a device body that is at least partially fixed to the side of the heating plate; the device body includes a bottom side extension extending to the bottom side of the heating plate and a moving part; the length of the bottom side extension satisfies the following condition: when the device body is installed on the heating plate, the orthographic projection of the support column in the vertical direction is located within the bottom side extension;

[0008] The bottom extension is provided with a support platform and a clamping component for clamping the pin component. The platform surface is used to support the weight, and a recessed structure is formed in the support platform to accommodate the pin component and the clamping component.

[0009] The moving component includes a first moving part, a second moving part, and a motion conversion part. The first moving part is connected to the clamping component, and the second moving part is connected to the first moving part through the motion conversion part. The second moving part is used to move between the side of the heating plate and the side wall of the chamber, so as to drive the first moving part to move in a straight line through the motion conversion part, and drive the clamping component to move the pin component along the straight line after clamping the pin component. The movement path of the pin component is on the same straight line as the axis of the pin component.

[0010] Optionally, the recessed structure has a limiting portion for limiting the pin component; when the limiting portion limits the pin component, the movement path of the pin component and the movement path of the first moving part are on the same straight line.

[0011] Optionally, the first moving part of the moving component includes a connecting rod, and the second moving part of the moving component includes a rotating part;

[0012] The motion conversion unit includes a rack structure disposed at the connecting rod and a gear structure disposed on the rotating part, and the connecting rod and the rotating part are connected by the rack structure and the gear structure.

[0013] Optionally, the rotating part includes a telescopic rod, which is connected to the gear and used to drive the gear to rotate;

[0014] The main body of the device is provided with an anti-rotation hole, and the telescopic rod is provided with an anti-rotation part in conjunction with the anti-rotation hole.

[0015] Optionally, the telescopic rod includes an inner tube and an outer tube, wherein the inner tube is slidably fitted into the outer tube along the axial direction;

[0016] The inner tube body is provided with a retractable limiting block on its surface, and the outer tube body is provided with an opening that matches the limiting block, so as to restrict the inner tube body and the outer tube body from sliding relative to each other in the radial direction through the limiting block and the opening.

[0017] Optionally, the clamping component includes at least two clamping arms, a first slider, a first guide rail connecting the first slider, and a crank portion corresponding to each of the clamping arms, wherein the first guide rail extends along the moving direction of the moving component.

[0018] The surface of the first slider is formed with a second guide rail, and each of the clamping arms is connected to a corresponding second slider. The second slider is slidably connected to the second guide rail. The second guide rail is perpendicular to the extension direction of the first guide rail.

[0019] One end of each crank portion is hinged to the corresponding clamping arm, and the other end of each crank portion is hinged to the first moving part. A fixing block is provided on the side of the first guide rail away from the support column. An elastic member is provided between the first slider and the fixing block to prevent the first slider from moving toward the fixing block before the clamping arm clamps the pin component.

[0020] Optionally, the upper surface of the first guide rail is flush with the upper surface of the limiting part;

[0021] The platform surface of the support is composed of the upper surface of the first guide rail and the upper surface of the limiting part.

[0022] Optionally, the main body of the device includes an upper clamping plate for abutting against the upper surface of the heating plate, and a lower clamping plate for abutting against the lower surface of the heating plate.

[0023] The present invention also provides a method for removing a support column in a heating plate, and a device for disassembling and assembling the support column in the heating plate, comprising:

[0024] The support column body is lifted upwards, and the disassembly and assembly device is installed at the heating plate; the pin component is installed in the support column body;

[0025] After the disassembly and assembly device is installed, the support column body is lowered. After the weight falls onto the support platform, the support column body drives the pin component to continue falling until the pin component falls into the recessed structure.

[0026] The clamping component is controlled to hold the pin component, and the first moving part is controlled to move in a straight line by the second moving part to pull the pin component out of the support column body.

[0027] The present invention also provides a method for installing a support column in a heating plate, and a device for disassembling and assembling the support column in the heating plate, comprising:

[0028] After clamping the pin component in the clamping arm, drive the first moving part to move the pin component to make way for the area below the opening in the hammer and fix it, and place the hammer on the support platform.

[0029] The disassembly and assembly device is installed on the heating plate. The support column body is passed through the through hole in the heating plate from top to bottom, passes through the opening in the weight, and the opening in the support column body falls into the recessed structure. The opening in the support column body faces the direction of the first moving part in a straight line.

[0030] The first moving part is controlled by the second moving part to move in a straight line so as to insert the pin component into the opening in the support column body.

[0031] As can be seen, the disassembly and assembly device for the support column in the heating plate provided by the present invention simultaneously supports the weight and separates the weight and the pin component through the bottom extension and its recessed structure. Within the limited space between the heating plate and the inner wall of the cavity, the motion of the second motion part is converted into the linear motion of the first motion part through the motion conversion part, so as to realize the removal and installation of the pin component. The disassembly and assembly of the support column body can be achieved without removing the heating plate, thus improving work efficiency.

[0032] In addition, the present invention also provides a method for removing and installing a support column in a heating plate, which also has the above-mentioned beneficial effects. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0034] Figure 1 A schematic diagram of a device for disassembling and assembling a support column in a heating plate, provided in an embodiment of the present invention, is shown below.

[0035] Figure 2 This is a schematic diagram of a heating plate installed in a cavity, as provided in an embodiment of the present invention.

[0036] Figure 3 This is a schematic diagram of the structure of a heating plate provided in an embodiment of the present invention;

[0037] Figure 4 An exploded view of a support column provided in an embodiment of the present invention;

[0038] Figure 5 This is a front view structural diagram of a heating plate provided in an embodiment of the present invention;

[0039] Figure 6 A top view of the bottom extension of a support column disassembly and assembly device in a heating plate provided in an embodiment of the present invention;

[0040] Figure 7 A schematic diagram of the structure of the telescopic rod in the disassembly and assembly device of the support column in the heating plate provided in an embodiment of the present invention;

[0041] Figure 8 A schematic diagram of the main body of a device for disassembling and assembling a support column in a heating plate, provided in an embodiment of the present invention;

[0042] Figure 9 A schematic diagram of another heating plate support column disassembly and assembly device provided in an embodiment of the present invention, installed at the heating plate;

[0043] Figure 10 A flowchart illustrating a method for removing a support column in a heating plate, as provided in an embodiment of the present invention;

[0044] Figure 11 A flowchart illustrating a method for installing a support column in a heating plate, as provided in an embodiment of the present invention;

[0045] The annotations in the attached figures are explained as follows:

[0046] 1-Heating plate, 2-Main body of device, 3-Support column, 4-Cavity, 5-Flag, 6-Pin component, 7-Support column body, 8-Opening hole in the center of the flank, 9-Opening hole in the center of the support column body, 10-Connecting rod, 20-Rotating part, 31-Anti-rotation hole, 32-Anti-rotation part, 41-Inner tube, 42-Outer tube, 43-Limiting block, 51-Clamping arm, 52-First slider, 53-First guide rail, 54-Crank part, 55-Second guide rail, 56-Fixing block, 57-Elastic component, 58-Moving direction of the first moving part, 60-Limiting part, 71-Upper clamping plate, 72-Lower clamping plate, 80-Recessed structure, 90-Notch. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0048] Example 1:

[0049] Please refer to Figure 1 , Figure 1This is a schematic diagram of a device for disassembling and assembling a support column in a heating plate, provided by an embodiment of the present invention. The heating plate 1 is installed in a cavity, and the support column 3 extends from top to bottom through the heating plate 1, including a support column body, a pin component, and a counterweight. The pin component of the support column 3 forms a pluggable connection with the support column body. The device may include at least a portion of a device body 2 for fixing to the side of the heating plate 1. The device body 2 includes a bottom extension extending to the bottom side of the heating plate 1 and a moving component. The length of the bottom extension satisfies the following condition: when the device body 2 is installed on the heating plate 1, the vertical projection of the support column 3 is located within the bottom extension. The bottom extension is provided with a support platform and a clamping component for holding the pin component 6. The platform surface is used to support the counterweight of the support column 3. A recessed structure 80 is formed in the support platform to accommodate the pin component 6 and the clamping component.

[0050] The gripping component of the bottom extension is used to grip the pin component 6. The moving component includes a first moving part, a second moving part, and a motion conversion part. The first moving part is connected to the gripping component, and the second moving part is connected to the first moving part through the motion conversion part. The second moving part is used to move between the side of the heating plate 1 and the side wall of the chamber, so as to drive the first moving part to move in a straight line through the motion conversion part, and drive the gripping component to move the pin component in a straight line after gripping the pin component. The moving path of the pin component 6 is on the same straight line as the axis of the pin component 6.

[0051] It should be noted that the heating plate 1 is generally installed inside the chamber during use. For example, in the chemical vapor deposition process, the heating plate 1 is installed in the chemical vapor deposition working chamber, and the inner wall contour of the chamber 4 matches the heating plate 1, with only a gap between them. (See reference...) Figure 2 , Figure 2 This is a schematic diagram of a heating plate installed in a cavity according to an embodiment of the present invention. The heating plate 1 typically has a support pillar 3 for supporting the wafer located at its edge, as shown in the reference diagram. Figure 3 , Figure 3 This is a schematic diagram of a heating plate provided in an embodiment of the present invention. The support column 3 includes a support column body, a counterweight, and a pin component, which can be referred to as... Figure 4 , Figure 4 This is an exploded view of a support column provided in an embodiment of the present invention. The support column body 7 penetrates the heating plate 1 vertically, forming a corresponding through hole in the heating plate 1 for the support column body 7 to pass through. The upper end of the support column body 7 is used to support the wafer, and the counterweight 5 has an opening 8, as shown in the figure. Figure 4As shown. The weight 5 is fitted through the opening 8 in the weight onto the portion of the support column body 7 that protrudes from the lower surface of the heating plate 1. The lower end of the support column body 7 can be exposed after passing through the opening 8 in the weight, and the opening 9 in the support column body 7 at the lower end can also be exposed from below the weight. After the support column 3 is installed on the heating plate, a mounting pin 6 is inserted into the opening 9 in the support column body to limit the weight 5 between the pin 6 and the lower surface of the heating plate 1. The pin 6 is rod-shaped, and its axis is the direction in which the pin 6 is inserted into the support column body 7 and the direction in which it is pulled out of the support column body 7. (See reference...) Figure 4 as well as Figure 5 , Figure 5 This is a front view schematic diagram of a heating plate according to an embodiment of the present invention. The pin component 6 is inserted into the opening 9 in the support column body, as shown in the diagram. Figure 4 As shown. Therefore, when it is necessary to replace or maintain the support column 3, especially when replacing or maintaining the support column body 7, it is necessary to remove the pin component 6 so that the support column body 7 can be separated from the counterweight 5 and then pulled out from the through hole in the heating plate 1. This embodiment mainly addresses the problem of the pin component 6 being difficult to remove. Since the pin component 6 and the counterweight 5 are both located on the bottom side of the heating plate 1, and there is only a gap and a notch 90 between the heating plate 1 and the inner wall of the chamber 4, and the opening of the chamber 4 is located on the upper side, it is necessary to remove the heating plate 1 first in order to facilitate the operation of the components on the bottom side of the heating plate 1.

[0052] In this embodiment, the pin component 6 can be removed without taking out the heating plate 1, and the weight 5 and the support column body 7 can be separated. At this time, without changing other components, the disassembly and assembly device can be inserted through the notch 90 between the heating plate 1 and the inner wall of the chamber 4. Therefore, at least part of the device body is fixed to the side of the heating plate 1. It can also be understood that the device body 2 extends part of the structure (i.e., the above-mentioned bottom extension) to the bottom side of the heating plate 1 through the notch 90 between the heating plate 1 and the inner wall of the chamber 4. When the device body 2 is installed on the heating plate 1, the vertical projection of the support column 3 is located in the bottom extension. The bottom extension is provided with a support platform for supporting the weight 5, so that the weight 5 can be lifted by the support platform and the support column body 7 can continue to fall during the operation of removing the pin component 6, so as to expose the pin component 6 or the opening 9 in the support column body that was covered by the weight 5. Specifically, since the pin component 6 abuts against the weight 5 from below in this embodiment, in order to separate the pin component 6 from the weight 5 and expose the pin component 6, a recessed structure 80 needs to be provided in the support platform. The upper surface of the recessed structure 80, i.e. the support platform, can support the weight 5 and allow the pin component 6 to continue to fall into the recessed structure 80 to separate the pin component 6 from the weight 5 and expose the pin component 6. At this time, the pin component 6 will fall into the recessed structure 80.

[0053] The pin component 6 and the support column body 7 form a pluggable connection. The support column body 7 can be provided with an opening 9. By inserting the pin component 6 into the opening 9, the weight 5 can be locked between the pin component 6 and the bottom side of the heating plate 1.

[0054] In this embodiment, a limiting part 60 for limiting the pin component 6 is formed in the recessed structure 80; when the limiting part 60 limits the pin component 6, the moving path of the pin component 6 and the moving path of the first moving part are on the same straight line.

[0055] In this embodiment, since the support column body 7 is rotatable along the through hole in the heating plate 1, the pin component 6 provided in the support column body 7 will rotate in the horizontal plane with the support column body 7 as the rotation axis. To avoid this situation and ensure that the axial direction of the pin component 6 is fixed to one side so that the clamping component can stably clamp the pin component 6, a limiting part needs to be provided in the above-mentioned recessed structure 80. When the pin component 6 rotates with the support column body 7 by a corresponding angle, the pin component 6 abuts against the side wall of the limiting part. At this time, the pin component 6 is always fixed in one direction and can be clamped by the clamping component every time it is removed.

[0056] In this embodiment, the clamping component is used to clamp the pin component 6, and the moving component is used to drive the clamping component to move along a preset direction, so as to pull out or insert the pin component 6 held by the clamping component from the support column body 7. In this embodiment, the moving component includes a first moving part, a second moving part, and a motion conversion part. The second moving part moves in the gap between the side of the heating plate 1 and the side wall of the chamber 4. One end of the first moving part is connected to the clamping component, so as to pull out or insert the pin component 6 by driving the clamping component to move in a straight line. In this embodiment, the first moving part and the second moving part are connected by the motion conversion part. The external power input acts on the second moving part to convert the movement of the second moving part into the linear movement of the first moving part, so as to realize the disassembly and assembly of the pin component 6 in the gap between the heating plate 1 and the inner wall of the chamber 4 without removing the heating plate 1, so as to further realize the disassembly and assembly of the support column 3. This embodiment does not limit the specific structure of the first moving part, the second moving part, and the motion conversion part. As long as the second moving part, which is located between the side of the heating plate and the inner wall of the cavity, can convert its own motion into the linear motion of the first moving part through the motion conversion part, it is acceptable. For example, the second moving part can be a rotating part, and the first moving part can be a connecting rod. The motion conversion part includes a gear structure in the rotating part and a rack structure in the connecting rod. During movement, the rotating part rotates around a fixed axis, driving the gear structure to rotate around the fixed axis. Through the meshing connection of the gear structure and the rack structure, the rotation of the gear structure drives the rack structure to move in a straight line. Alternatively, the second moving part can be a long rod. In this case, the motion conversion part includes a rack structure in both long rods and a bevel gear structure that meshes with the rack structures in both long rods. Since the second moving part has a rack structure, when the second moving part moves in a straight line, the rack of the second moving part meshes with the bevel gear, thereby converting the linear motion of the second moving part into the rotational motion of the bevel gear. The bevel gear also meshes with the rack on the first moving part. Therefore, the rotation of the bevel gear will push the rack of the first moving part, thereby causing the first moving part to move in a straight line.

[0057] In this embodiment, the main body 2 of the device may include one or more clamping plates, which are directly clamped to the edge of the heating plate 1 by means of screw fastening; or, if the material of the heating plate 1 allows, the main body 2 of the device may be set as a permanent magnet or electromagnet structure, which is fixed to the heating plate 1 by magnetic adsorption; or, a specific snap-fit ​​structure may be designed on the main body 2 to form a quick-locking connection with the corresponding structure on the side of the heating plate 1, such as a groove or flange; in some embodiments, the main body 2 may also be connected to a fixed point on the inner wall of the chamber 4 to provide additional stability, as long as it can ultimately achieve fixation relative to the heating plate 1. The bottom extension is the part that extends from the main body 2 to the bottom of the heating plate 1, which is used to provide an operating platform to ensure that all operations of disassembling and assembling the pin component 6 are completed within the limited space below the heating plate 1.

[0058] The extension to the bottom side of the heating plate 1 does not necessarily mean contact, but rather that the spatial position covers the area on the bottom side of the heating plate 1 that needs to be operated. This extension can be a complete plate structure or a non-enclosed structure composed of beams or frames, as long as it can meet the installation and functional requirements of subsequent components. That is, it needs to ensure that the support platform can accurately receive the counterweight 5. At this time, the support column body 7 continues to fall downward so that the pin component 6 falls into the recessed structure 80, creating space for the operation of clamping the pin component 6. In this embodiment, the recessed structure 80 can be a simple pit, a groove, or a through hole, and is not specifically limited here. In this embodiment, the limiting part can be a baffle, a protrusion, or the side wall of the recessed structure 80 itself. When the support column body 7 rotates around its axis in the horizontal plane, the pin component 6 will be abutted by the limiting part after rotating a certain angle in the horizontal direction, thus limiting the pin component 6 and keeping it in a known, preset position. This position is set to facilitate the gripping of the clamping component.

[0059] This embodiment does not limit the specific structure of the gripping component. For example, the gripping component can be configured as a gripping arm based on the crank-slider principle, with gripping achieved by opening and closing the two gripping arms; or it can be configured as a sleeve with an inner diameter that matches the size of the pin component 6, with gripping achieved by moving the sleeve around the pin component 6; or when the pin component 6 is made of magnetic material, it can be configured to grip and release the pin component 6 by means of electromagnet attraction and power-off release; or the gripping component can be configured as a finger gripper driven by a small cylinder.

[0060] Furthermore, to improve the ease of assembly and disassembly and to enhance the structural compactness of the assembly and disassembly device, reference can be made to... Figure 6 , Figure 6This is a top view of the bottom extension of a support column disassembly and assembly device in a heating plate according to an embodiment of the present invention. The first moving part of the aforementioned moving component can be a connecting rod 10, and the second moving part can be a rotating part 20.

[0061] The motion conversion unit includes a rack structure provided at the connecting rod 10 and a gear structure provided on the rotating part 20, and the connecting rod 10 and the rotating part 20 are connected by the rack structure and the gear structure meshing.

[0062] In this embodiment, the rotating part 20 can be configured to rotate automatically via an external drive structure, or it can be configured to rotate manually by an operator. The first moving part is specifically defined as a connecting rod 10, which is a rigid component in the moving part that ultimately outputs linear motion. The connecting rod 10 is mainly used to transmit linear motion and thrust / pull force. One end of the connecting rod 10 is integrated with or fixedly connected to a rack structure, while the other end is directly or indirectly linked to the clamping component. In this embodiment, the specific form of the connecting rod 10 is not limited to a strict rod shape; it can be a long rod shape, a plate shape, such as a rack plate with a rack, or a sleeve shape, as long as it can convert the rotational motion of the second moving part into the linear motion of the first moving part. In this embodiment, the connecting rod 10 can be configured to be constrained within the device body 2 via a linear guide rail or guide hole, ensuring that the first moving part can only move along a preset linear path (i.e., the insertion / removal direction of the pin component 6), preventing deflection and jamming during transmission. Furthermore, in this embodiment, the motion conversion unit includes a gear and a rack to convert rotary motion into linear motion. The length of the rack should be greater than or equal to the insertion / removal stroke required by the pin component 6. It should be noted that the motion conversion unit in this embodiment can also be configured with other structures; for example, it can be configured as a crank-slider structure.

[0063] Furthermore, in order to maintain the gear at the current angle when the clamping component installs the pin component 6, it is possible to refer to... Figure 7 and Figure 8 , Figure 7 This is a schematic diagram of the telescopic rod in a disassembly and assembly device for a support column in a heating plate, provided in an embodiment of the present invention. Figure 8 This is a schematic diagram of the main body of a device in a heating plate support column disassembly and assembly device provided in an embodiment of the present invention. The rotating part 20 may include a telescopic rod connected to a gear for driving the gear to rotate.

[0064] The main body 2 of the device is provided with an anti-rotation hole 31, and the telescopic rod is provided with an anti-rotation part 32 in conjunction with the anti-rotation hole 31.

[0065] In this embodiment, the rotating part 20 is explicitly configured as a rod-shaped structure that can change its length, extending the operating position from the narrow vicinity of the gear to a more easily accessible telescopic rod. In this embodiment, the telescopic rod typically consists of an inner rod and an outer rod, which are engaged by splines, keyways, or non-circular cross-sections to ensure both relative sliding (changing length) and synchronous rotation. The end of the telescopic rod, typically the end of the inner rod, is fixedly connected to the gear structure or connected to the gear shaft via a coupling, key, or other structure to ensure effective transmission of rotational motion. The other end of the telescopic rod, typically the end of the outer rod, is equipped with an operating interface. This interface can be an external hexagonal handle, an internal hexagonal handle, a knob, a handwheel, or an interface adapted to specific tools, allowing the operator to operate from a spacious area outside the chamber 4 or above the heating plate 1. An anti-rotation hole 31 is provided in the main body 2 of the device. In this embodiment, a special hole is provided on the main body 2 of the device. This hole is used to cooperate with the anti-rotation part 32 on the telescopic rod. The cross-section of the anti-rotation part 32 corresponding to the cross-section of the hole is a non-circular cross-section. When the anti-rotation part 32 is located in the hole, the outer contour of the non-circular cross-section of the anti-rotation part 32 resists the rotational torque and prevents the telescopic rod from rotating uncontrollably. The anti-rotation hole 31 is usually provided on the upper part or side of the main body 2 of the device. Its axis is basically coincident with or parallel to the axis of the telescopic rod. This hole is not a simple circular hole. Its cross-sectional shape is a non-circular hole that matches the shape of the anti-rotation part 32. For example, the anti-rotation hole 31 can be set as a polygonal hole.

[0066] Furthermore, in order to reduce the complexity of the telescopic rod and further avoid uncontrollable axial expansion and contraction deformation of the telescopic rod length, the telescopic rod can be provided to include an inner tube 41 and an outer tube 42, with the inner tube 41 slidably fitted into the outer tube 42 along the axial direction.

[0067] The inner tube 41 is provided with a retractable limiting block 43 on its surface, and the outer tube 42 is provided with an opening that matches the limiting block 43, so as to restrict the inner tube 41 and the outer tube 42 to slide relative to each other in the radial direction through the limiting block 43 and the opening.

[0068] This embodiment defines the specific structure of the telescopic rod, specifying that it consists of two main tubular components: an inner tube 41 and an outer tube 42. The telescopic function is achieved through the sleeve connection between the inner tube 41 and the outer tube 42. Sleeving refers to one tube being inserted into another tube, with both having matching cross-sectional shapes. In this embodiment, the limiting block 43 can be spring-loaded in and out radially along the inner tube 41 based on a spring. Furthermore, in this embodiment, the limiting block 43 can be a single block or multiple blocks distributed circumferentially or axially to provide a more balanced limiting force and higher reliability. In this embodiment, when the length of the telescopic rod needs to be fixed, the extension length of the inner tube 41 is adjusted. As the inner tube 41 moves axially relative to the outer tube 42, the limiting block 43 also moves relative to the outer tube 42. When the limiting block 43 moves into an opening in the outer tube 42, it springs into the opening under the action of a spring. At this time, the limiting block 43 is stuck in the opening, preventing axial relative movement between the inner tube 41 and the outer tube 42 through mechanical interference. When the length needs to be adjusted again, a vertical movement stroke is formed by the above-mentioned opening and the limiting block 43, allowing for sliding adjustment. In this embodiment, the limiting structure is only used for axial positioning and does not replace the above-mentioned anti-rotation function.

[0069] Furthermore, in order to improve the ease of installation of the disassembly and assembly device relative to the heating plate 1, the surface of the main body 2 of the device corresponding to the side wall of the heating plate 1 can be set to be an arc-shaped surface that matches the side wall of the heating plate 1.

[0070] In this embodiment, the surface of the device body 2 that is directly or indirectly opposite, in contact with, or adjacent to the side wall of the heating plate 1 is configured as a curved, arc-shaped surface, and the curvature of this arc is designed to match the contour of the side wall of the target heating plate 1. Specifically, in this embodiment, the radius of the arc surface of the device body 2 can be set to be the same as the radius of the arc surface of the side wall of the heating plate 1 to achieve surface contact between the two, providing high positioning accuracy and stability; or, in this embodiment, the radius of the arc surface of the device body 2 can be set to be slightly larger than the radius of the side wall of the heating plate 1, forming an effect of embracing the side wall of the heating plate 1, while achieving good radial positioning. In this embodiment, the center of the arc-shaped surface in the main body 2 can be aligned with the center of the heating plate 1. When installing or removing the device, simply align the arc-shaped surface of the main body 2 with the circular sidewall of the heating plate 1 and place it against it. The device will automatically determine a roughly correct position on the horizontal plane, simplifying operation in the narrow, poorly oriented chamber 4. This also increases the contact area, improving the stability of the device. When the device is fixed using clamps or similar methods, the force is more evenly distributed, the connection is more secure, and it is less prone to shaking or displacement during operation. Furthermore, the arc-shaped surface in the main body 2 in this embodiment prevents stress concentration. The contact between this arc-shaped surface and the sidewall of the heating plate 1 avoids line or point contact caused by sharp corners or planar edges, preventing scratches or indentations on the precision surface of the heating plate 1 and protecting it.

[0071] Furthermore, to improve the versatility of the disassembly and assembly device while ensuring its stable installation, reference can be made to... Figure 9 , Figure 9 This is a schematic diagram of another heating plate support column disassembly and assembly device provided in an embodiment of the present invention, installed at the heating plate. The main body 2 of the device may include an upper clamping plate 71 for abutting against the upper surface of the heating plate 1, and a lower clamping plate 72 for abutting against the lower surface of the heating plate 1.

[0072] In this embodiment, the upper clamping plate 71 is used to contact the heating plate 1 from above and apply force to the heating plate 1, providing downward clamping force or limiting force for the disassembly and assembly device. The upper clamping plate 71 is usually configured as a plate-shaped, block-shaped or arm-shaped structure with a certain rigidity and area. In this embodiment, the contact surface that contacts the upper surface of the heating plate 1 can preferably be a plane to ensure stable surface contact. However, depending on the shape of the upper surface of the heating plate 1, it can also be configured as an appropriate arc or other shape. When tightened, the lower surface of the upper clamping plate 71 abuts against the upper surface of the heating plate 1. In this embodiment, the lower clamping plate 72 is used to contact the heating plate 1 from below and apply force, providing upward support force and clamping force for the disassembly and assembly device. The lower clamping plate 72 is also usually configured as a plate-shaped, block-shaped or arm-shaped structure with a certain rigidity and area, contacting the lower surface of the heating plate 1. The contact surface is also preferably a plane. When tightened, the upper surface of the lower clamping plate 72 abuts against the lower surface of the heating plate 1. In this embodiment, the upper clamping plate 71 and the lower clamping plate 72 cooperate to clamp the edge of the heating plate 1. In this embodiment, the upper clamping plate 71 and the lower clamping plate 72 together form a clamping pair, which act on the edge (or flange) of the heating plate 1 from both the upper and lower sides, thereby fixing the disassembly and assembly device on the heating plate 1.

[0073] In this embodiment, the upper clamping plate 71 and the lower clamping plate 72 can be connected by an adjustable connection mechanism to achieve the application and release of clamping force. This includes, but is not limited to, fastening with screws, fastening with a quick-clamp mechanism, or clamping by the elastic force provided by an elastomer. To accommodate heating plate 1 edges of different thicknesses, the connection mechanism should have sufficient adjustment stroke; alternatively, replaceable shims or soft pads, such as rubber pads or polyurethane pads, can be added to the contact surface of the heating plate 1, which can be used to adjust the spacing and protect the surface of the heating plate 1 from scratches.

[0074] The present invention supports the weight 5 simultaneously through the support platform of the bottom extension and separates the pin component 6 from the weight 5 based on the recessed structure therein. In the limited space between the heating plate 1 and the inner wall of the chamber 4, the motion of the second motion part is converted into the linear motion of the first motion part through the motion conversion part, so as to realize the removal and installation of the pin component 6. The disassembly and maintenance of the support column body 7 can be achieved without removing the heating plate 1, thus improving work efficiency.

[0075] Furthermore, in this embodiment of the invention, the first moving part of the moving component is a connecting rod 10, the second moving part is a rotating part 20, and the motion conversion part includes a rack structure provided at the connecting rod 10 and a gear structure provided on the rotating part 20. The connecting rod 10 and the rotating part 20 are connected by the meshing of the rack structure and the gear structure, which improves the convenience of disassembly and assembly on the one hand, and the structural compactness of the disassembly and assembly device on the other hand. By providing an anti-rotation hole 31 in the main body 2 of the device, and an anti-rotation part 32 provided at the telescopic rod in conjunction with the anti-rotation hole 31, when the support column 3 is removed, the gear rotates until the clamping part pulls out the pin part 6, and when the support column 3 is installed, the gear rotates until the clamping part clamps the pin part 6 and pulls it backward a certain distance. The gear can be kept at the current angle and not rotated by the cooperation of the anti-rotation hole 31 and the anti-rotation part 32; by setting a retractable limiting block 43 on the surface of the inner tube 41 and setting an opening in the outer tube 42 that matches the limiting block 43, the complexity of the telescopic rod is reduced and the uncontrollable axial expansion and contraction deformation of the telescopic rod length is further avoided; by setting the surface of the device body 2 corresponding to the side wall of the heating plate 1 to be an arc-shaped surface that matches the side wall of the heating plate 1, the convenience of installing the disassembly and assembly device relative to the heating plate 1 is improved; by setting the device body 2 to include an upper clamping plate 71 for abutting against the upper surface of the heating plate 1 and a lower clamping plate 72 for abutting against the lower surface of the heating plate 1, the versatility of the disassembly and assembly device is improved while the stability of the disassembly and assembly device installation is achieved.

[0076] Example 2:

[0077] Please refer to Figure 6 , Figure 6 This is a top view of the bottom extension of a disassembly and assembly device for a support column in a heating plate, provided in an embodiment of the present invention. The difference between this disassembly and assembly device and that of Embodiment 1 described above is:

[0078] The clamping component includes at least two clamping arms 51, a first slider 52, a first guide rail 53 connecting the first slider 52, and a crank portion 54 corresponding to each clamping arm 51. The first guide rail 53 extends along the moving direction of the first moving part.

[0079] The surface of the first slider 52 has a second guide rail 55, and the clamping arm 51 is connected to the second slider. The second slider and the second guide rail 55 are slidably connected. The extension direction of the second guide rail 55 is perpendicular to that of the first guide rail 53.

[0080] One end of each crank portion 54 is hinged to the corresponding clamping arm 51, and the other end of each crank portion 54 is hinged to the first moving part. A fixing block 56 is provided on the side of the first guide rail 53 away from the support column 3. An elastic member 57 is provided between the first slider 52 and the fixing block 56 to prevent the first slider 52 from moving toward the fixing block 56 before the clamping arm 51 clamps the pin member 6.

[0081] This embodiment specifically defines the aforementioned clamping component. The core function of this mechanism is to convert the linear input of the first moving part into the synchronous and symmetrical opening and closing motion of the clamping arms 51. This embodiment specifies that the clamping actuators are two or more clamping arms 51, used to grip or clamp the pin component 6 from both sides. In this embodiment, the first guide rail 53 is fixedly mounted on the device body 2, typically on the bottom extension. The extension direction of the first guide rail 53 is parallel to the linear direction of pulling out or inserting the pin component 6, i.e., the moving direction of the first moving part. The first slider 52 is slidably mounted on the first guide rail 53, meaning that the first slider 52 can move as a whole along the first guide rail 53. In this embodiment, the crank portion 54 is a power conversion component, which can be understood as a double-hinged connecting rod. One end of the crank portion 54 can be hinged to the clamping arm 51, and the swinging of the crank portion 54 can cause the clamping arm 51 to move. Figure 6 The double-headed arrow in the middle indicates the direction of movement of the first moving part 58.

[0082] In this embodiment, the second guide rail 55 is machined or fixed to the upper surface or inside the first slider 52, and the extension direction of the second guide rail 55 is perpendicular to the extension direction of the first guide rail 53, forming a planar XY guide rail system. In this embodiment, each clamping arm 51 is connected to a corresponding second slider, and the second slider is slidably connected to the second guide rail 55. At this time, the clamping arm 51 will translate based on the sliding of the second slider within the second guide rail 55. For example, when the second slider moves from the end of the second guide rail 55 towards the center within the second guide rail 55, the clamping arm 51 will translate towards the center to clamp the pin component 6. Specifically, the second slider can be a protrusion protruding downward from the lower surface of the clamping arm 51 at the hinge connection structure between the crank portion 54 and the clamping arm 51. This protrusion can be provided in the second guide rail 55 as the second slider to drive the clamping arm 51 to move. In this embodiment, in order to facilitate the movement of the second slider, the second guide rail 55 can be configured in a V-shape, wherein the pointed end of the V-shaped second guide rail 55 faces the side of the fixed block 56 to facilitate the movement of the second slider.

[0083] One end of each crank portion 54 is hinged to the corresponding clamping arm 51, and the other end of each crank portion 54 is hinged to the first moving part, which is the power input point of the entire mechanism. The linear motion of the first moving part will simultaneously pull or push the end of each crank portion 54 that is connected to the first moving part.

[0084] The first stage in this embodiment:

[0085] The first moving part (connecting rod 10) moves away from the support column 3. The hinge point of the first moving part drives the corresponding ends of all crank parts 54 to move together, thereby driving the clamping arm 51 to move. This hinge point is the hinge point formed at the hinge connection between the first moving part and the crank part 54. At this time, the second guide rail 55 is fixedly connected or integrally connected with the first slider 52. The first slider 52 does not move due to the elastic force of the elastic member 57. Since the clamping arm 51 is constrained within the second guide rail 55 by the second slider, the linear motion of the first moving part forces the crank part 54 to rotate from an angle of inclination relative to the first guide rail 52 to a parallel angle relative to the first guide rail 52. In this embodiment, the rotational movement of the crank portion 54 can push the clamping arm 51 to close inward or move in parallel through the hinge point that is hinged to the clamping arm 51, thereby achieving the closure of the clamping arm 51. The pin component 6 is limited by the limiting portion 60, and the lower end of the pin component 6 installed in the support column body 7 is located in the recessed structure 80 of the support platform. At this time, the clamping arm 51 can be driven to clamp the pin component 6. During this stage, since the clamping force has not been fully established, the first slider 52 has not moved as a whole.

[0086] The second stage in this embodiment:

[0087] When the pin component 6 is clamped and the clamping arm 51 can no longer close, the first moving part continues to move. At this time, the crank part 54 is hinged to the clamping arm 51 and cannot continue to rotate. It will then move with the first moving part in a direction away from the support column body 7. The crank part 54 drives the first slider 52 to move along the first guide rail 53 through the second guide rail 55 and begins to compress the elastic member 57, which can be set as a spring. When the crank part 54 moves, it clamps the pin component 6 through the clamping arm 51 and pulls it out of the support column body 7.

[0088] Before or during the initial compression phase of clamping, the elastic component 57 provides a certain preload to prevent the first slider 52 from moving toward the fixed block 56, thus keeping the mechanism in a stable, ready position. After clamping the pin component 6, the continued compression phase of the clamping component involves the spring being compressed, allowing a continuous movement of the first moving part to be decomposed into two consecutive stages: "clamping first, then pulling."

[0089] Furthermore, in order to simplify the assembly and disassembly device and improve the integration of the structure, the upper surface of the first guide rail 53 can be made flush with the upper surface of the limiting part 60.

[0090] The platform surface of the support is composed of the upper surface of the first guide rail 53 and the upper surface of the limiting part 60.

[0091] In this embodiment, by setting the upper surface of the first guide rail 53 and the upper surface of the limiting part 60 to be flush and together forming the platform of the support, the disassembly and assembly device can be simplified while ensuring its functionality, thus achieving a high degree of structural integration.

[0092] In this embodiment, the housing of the device body 2 corresponding to the connecting rod 10, that is, the housing corresponding to the movement direction 58 of the first moving part, can be provided with an opening that allows the connecting rod 10 to pass through, so as to avoid the housing of the device body 2 from limiting the movement of the connecting rod 10. Of course, in addition to providing the above-mentioned opening, the problem of limited movement space of the connecting rod 10 can also be improved by other means. For example, an additional gear or other connecting structure can be added to the side of the rotating part 20 facing the fixed block 56 to mesh with the connecting rod 10. At this time, the position where the rotating part 20 contacts the connecting rod 10 is closer to the fixed block 56 and farther away from the housing of the device body 2. Thus, the limitation of the movement of the connecting rod 10 by the housing of the device body 2 can be improved by further shortening the length of the connecting rod 10, thereby increasing the tail space of the connecting rod 20. In this embodiment, the space at the tail of the connecting rod 10 can also be improved by tilting the device body 2. When the axis of the bottom extension in the device body 2 points to the center of the heating plate 1, the space left for the tail of the connecting rod 10 in the chamber 4 is relatively small. By setting the axis of the bottom extension in the main body 2 to be inclined relative to the radial direction of the heating plate, that is, after rotating the main body 2 in the horizontal direction by a certain angle, more tail space can be left for the connecting rod 10, and the tail space of the connecting rod 10 can be improved by increasing the shell size of the main body 2.

[0093] The disassembly and assembly device for the support column in the heating plate 1 provided in this embodiment of the invention uses two or more clamping arms 51 as the clamping actuators to hold or clamp the pin component 6 from both sides. Furthermore, by setting the upper surface of the first guide rail 53 and the upper surface of the limiting part 60 to be flush and together forming the platform of the support, this embodiment of the invention simplifies the disassembly and assembly device while ensuring its functionality, achieving a high degree of structural integration.

[0094] The following describes a method for removing a support column in a heating plate according to an embodiment of the present invention. The method for removing the support column in the heating plate described below can be referred to in correspondence with the disassembly and assembly device for the support column in the heating plate described above.

[0095] Please refer to the details. Figure 10 , Figure 10A flowchart of a method for removing a support column in a heating plate, provided by an embodiment of the present invention, is applied to the aforementioned device for disassembling and assembling a support column in a heating plate and may include:

[0096] S101: Lift the support column body upwards and install the disassembly and assembly device on the heating plate.

[0097] Before this step, the heating plate 1 can be raised a certain distance, but it is not necessary to remove the heating plate 1 from the chamber 4. The purpose of raising the heating plate 1 is to create a large gap 90 between the heating plate 1 and the chamber 4 at a specific position, so that the bottom extension can slide under the heating plate 1 through the gap 90. After the bottom extension is slid under the heating plate 1, it is necessary to move the bottom extension under the support column body 7 by rotating and translating the main body 2. At this time, a mark indicating the position of the bottom extension can be set on the top of the main body 2. Based on the mark, the bottom extension is moved under the support column body 7. At this time, the pin component 6 is installed in the support column body 7, and the counterweight 5 is locked between the pin component 6 and the heating plate 1.

[0098] In this embodiment, the arc-shaped surface on the main body 2 can be pressed against the side wall of the heating plate 1 to achieve rapid center positioning. Alternatively, the main body 2 can be firmly clamped to the edge of the heating plate 1 using the upper clamping plate 71 and lower clamping plate 72 provided in the main body 2, as well as the fastening screws. In this embodiment, before installation, the support column body 7 needs to be lifted upwards. After installation, the support column body 7 can be lowered again to place the weight 5 on the support platform. The pin component 6 installed in the support column body 7 will fall into the recessed structure 80 formed in the support platform by continuing to lower the support column body 7. Therefore, when the disassembly and assembly device is installed on the heating plate 1, it is necessary to ensure that the support platform on the bottom extension is directly below the support column.

[0099] S102: After the installation and disassembly device is installed, the support column body is lowered. After the weight falls onto the support platform, the support column body drives the pin component to continue falling until the pin component falls into the recessed structure.

[0100] In this embodiment, the support column body 7 is manually lowered from top to bottom to a lower maintenance position, and the weight 5 falls onto the support platform where it is caught and supported. Since the pin component 6 and the support column body 7 are separate, pluggable connections to support the weight 5 at the lower end of the support column body 7, after the weight 5 is supported, the support column body 7 continues to fall under gravity, causing the pin component 6 to settle relative to the weight 5 and the support platform surface. When the support column body 7 descends to contact the bottom of the recessed structure 80, it indicates that the pin component 6 is at the same height as the clamping component, at which point the pin component 6 can be clamped by the clamping component. When a limiting part is provided in the recessed structure 80, to ensure that the clamping component can accurately clamp the pin component 6, the pin component 6 can be rotated by rotating the support column body 7 to limit the pin component 6. At this time, the movable path of the pin component 6 will face the same direction and be on the same straight line as the moving path of the first moving part. The rotation direction of the aforementioned support column body 7 is usually counterclockwise.

[0101] S103: Control the clamping component to clamp the pin component, and control the first moving part to move in a straight line through the second moving part to pull the pin component out of the support column body.

[0102] In this embodiment, the clamping component is used to clamp the pin component 6 so that when the first moving part moves in a straight line, specifically when it moves away from the clamping component, the pin component 6 is pulled out from the support column body 7, thus realizing the disassembly step.

[0103] After pulling out the pin component 6, the support column body 7 can be pulled out of the heating plate 1. At this time, the counterweight 5 will remain on the support platform. After that, the disassembly and assembly device can be removed to complete the disassembly of the support column 3.

[0104] The method for removing the support column in the heating plate provided in this embodiment of the invention simultaneously supports the weight 5 through the bottom extension. In the limited space between the heating plate 1 and the inner wall of the chamber 4, the motion of the second motion part is converted into the linear motion of the first motion part through the motion conversion part, so as to remove and install the pin component 6. The disassembly and maintenance of the support column body 7 can be achieved without removing the heating plate 1, thus improving work efficiency.

[0105] The following describes a method for installing a support column in a heating plate according to an embodiment of the present invention. The method for installing the support column in the heating plate described below can be referred to in correspondence with the disassembly and assembly device for the support column in the heating plate described above.

[0106] Please refer to the details. Figure 11 , Figure 11 A flowchart of a method for installing a support column in a heating plate, provided by an embodiment of the present invention, can be applied to the disassembly and assembly device for the support column in the heating plate as described above, and may include:

[0107] S201: After clamping the pin component in the clamping arm, drive the first moving part to move the pin component to make way for the area below the opening in the hammer and fix it, and place the hammer on the support platform.

[0108] In this step, the clamping arm 51 is first used to hold the pin component 6, and the counterweight 5 is placed on the support platform. After the clamping arm 51 holds the pin component 6, the first moving part will pull the pin component 6 backward a certain distance, so that the pin component 6 is positioned away from the center of the counterweight 5, thereby clearing the area below the opening 8 in the counterweight. This ensures that the support column body 7 will not be blocked by the pin component 6 when it passes through the opening 8 in the counterweight, thus preventing the pin component 6 from obstructing the movement of the support column body 7 in subsequent steps. After the pin component 6 clears the area below the opening 8 in the counterweight, its position needs to be fixed. This can be achieved by fixing the second moving part. Specifically, in this embodiment, the anti-rotation hole 31 can be used to prevent the second moving part from rotating, keeping the gear at the current angle and thus fixing the position of the pin component 6. In this embodiment, the pin component 6 is not yet installed in the support column body; at this time, the counterweight, support column body, and pin component are all separated from each other.

[0109] S202: Install the disassembly and assembly device at the heating plate, pass the support column body through the through hole in the heating plate from top to bottom, pass through the opening in the counterweight, and make the opening in the support column body fall into the recessed structure, with the opening in the support column body facing the direction of the first moving part moving in a straight line.

[0110] Similar to the process of installing the disassembly and assembly device on the heating plate 1 in the above embodiments, the main difference is that in this embodiment, the pin component 6 is clamped by the clamping arm 51 and its counterweight is placed on the support platform. The rest are basically the same and will not be described in detail here. In this embodiment, the disassembly and assembly device can be installed on the heating plate 1 using the upper clamping plate 71 and the lower clamping plate 72. The specific structure of the upper clamping plate 71 and the lower clamping plate 72 has been described in detail in the above embodiments and will not be repeated here. Of course, other methods can also be used to fix the disassembly and assembly device in this embodiment, and no specific limitation is made here.

[0111] In this embodiment, the support column body 7 is first installed in the heating plate 1, and the support column body 7 is first passed through the central opening 8 of the counterweight. At this time, the central opening 9 of the support column body 7, which is used to install the pin component 6, needs to be lowered into the recessed structure 80, and the central opening 9 of the support column body needs to be oriented towards the direction of the first moving part moving in a straight line, so that the pin component 6 can be smoothly inserted into the central opening 9 of the support column body.

[0112] Specifically, in this step, it can be set that when the support column body 7 contacts the bottom of the recessed structure 80, the opening 9 in the support column body falls into the recessed structure 80. Furthermore, in this embodiment, the specific angle of the support column body 7 can be determined by setting a mark on the top surface of the support column body 7. The position of this mark corresponds to the orientation of the opening 9 in the support column body. By setting a mark on the surface of the support column body 7 and rotating the support column body 7 so that the mark faces a specific position, it is ensured that the opening 9 in the support column body faces the direction of the first moving part moving in a straight line. Of course, in this embodiment, the direction of the opening 9 in the support column body moving in a straight line towards the first moving part can also be adjusted in other ways, without specific limitations.

[0113] S203: The first moving part is controlled to move in a straight line by the second moving part so as to insert the pin component into the opening in the support column body.

[0114] After the support column body 7 is placed, the clamping component is controlled to insert the clamped pin component 6 into the opening 9 in the support column body to complete the installation. In this embodiment, after installation, the disassembly and assembly device can be removed from the heating plate 1. During removal, the support column body 7 needs to be lifted up so that the pin component 6 makes correct contact with the counterweight 5 and moves upward, separating the counterweight from the support platform. Then, the disassembly and assembly device can be removed. Specifically, the device body 2 can be rotated along the edge of the heating plate 1 to the notch 90 position, and then the device body 2 can be taken out from the notch 90 to complete the removal of the disassembly and assembly device. Finally, the support column body 7 and the raised heating plate 1 are lowered to complete the installation of the support column 3.

[0115] By applying the installation method of the support column in the heating plate provided in the embodiment of the present invention, the weight 5 is supported by the bottom extension, and within the limited space between the heating plate 1 and the inner wall of the chamber 4, the motion of the second motion part is converted into the linear motion of the first motion part by the motion conversion part, so as to realize the installation of the pin component 6. The disassembly and maintenance of the support column body 7 can be achieved without removing the heating plate 1, thus improving work efficiency.

[0116] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0117] Furthermore, it should be noted that in this document, relationships such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprising," "including," or any other variations are intended to cover non-exclusive inclusion.

[0118] The above provides a detailed description of the disassembly and assembly device, disassembly method, and installation method for a support column in a heating plate provided by the present invention. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A device for disassembling and assembling a support column in a heating plate, characterized in that, The heating plate is installed in the cavity, and the support column extends through the heating plate from top to bottom, including the support column body, the pin component, and the counterweight; the pin component and the support column body form a pluggable connection. The disassembly and assembly device includes a device body that is at least partially fixed to the side of the heating plate; the device body includes a bottom side extension extending to the bottom side of the heating plate and a moving part; the length of the bottom side extension satisfies the following condition: when the device body is installed on the heating plate, the orthographic projection of the support column in the vertical direction is located within the bottom side extension; The bottom extension is provided with a support platform and a clamping component for holding the pin component. The platform surface is used to support the weight, and a recessed structure is formed in the support platform to accommodate the pin component and the clamping component. The moving component includes a first moving part, a second moving part, and a motion conversion part. The first moving part is connected to the clamping component, and the second moving part is connected to the first moving part through the motion conversion part. The second moving part is used to move between the side of the heating plate and the side wall of the chamber, so as to drive the first moving part to move in a straight line through the motion conversion part, and drive the clamping component to move the pin component along the straight line after clamping the pin component. The movement path of the pin component is on the same straight line as the axis of the pin component.

2. The device for disassembling and assembling the support column in the heating plate according to claim 1, characterized in that, The recessed structure has a limiting portion for limiting the pin component; when the limiting portion limits the pin component, the movement path of the pin component and the movement path of the first moving part are on the same straight line.

3. The device for disassembling and assembling the support column in the heating plate according to claim 1, characterized in that, The first moving part of the moving component includes a connecting rod, and the second moving part of the moving component includes a rotating part; The motion conversion unit includes a rack structure disposed at the connecting rod and a gear structure disposed on the rotating part, and the connecting rod and the rotating part are connected by the rack structure and the gear structure.

4. The device for disassembling and assembling the support column in the heating plate according to claim 3, characterized in that, The rotating part includes a telescopic rod, which is connected to the gear and is used to drive the gear to rotate. The main body of the device is provided with an anti-rotation hole, and the telescopic rod is provided with an anti-rotation part in conjunction with the anti-rotation hole.

5. The device for disassembling and assembling the support column in the heating plate according to claim 4, characterized in that, The telescopic rod includes an inner tube and an outer tube, wherein the inner tube is slidably fitted into the outer tube along the axial direction; The inner tube body is provided with a retractable limiting block on its surface, and the outer tube body is provided with an opening that matches the limiting block, so as to restrict the inner tube body and the outer tube body from sliding relative to each other in the radial direction through the limiting block and the opening.

6. The device for disassembling and assembling the support column in the heating plate according to claim 2, characterized in that, The clamping component includes at least two clamping arms, a first slider, a first guide rail connecting the first slider, and a crank portion corresponding to each of the clamping arms. The first guide rail extends along the moving direction of the moving component. The surface of the first slider is formed with a second guide rail, and each of the clamping arms is connected to a corresponding second slider. The second slider is slidably connected to the second guide rail. The second guide rail is perpendicular to the extension direction of the first guide rail. One end of each crank portion is hinged to the corresponding clamping arm, and the other end of each crank portion is hinged to the first moving part. A fixing block is provided on the side of the first guide rail away from the support column. An elastic member is provided between the first slider and the fixing block to prevent the first slider from moving toward the fixing block before the clamping arm clamps the pin component.

7. The device for disassembling and assembling the support column in the heating plate according to claim 6, characterized in that, The upper surface of the first guide rail is flush with the upper surface of the limiting part; The platform surface of the support is composed of the upper surface of the first guide rail and the upper surface of the limiting part.

8. The device for disassembling and assembling the support column in the heating plate according to claim 1, characterized in that, The main body of the device includes an upper clamping plate for abutting against the upper surface of the heating plate, and a lower clamping plate for abutting against the lower surface of the heating plate.

9. A method for removing a support column in a heating plate, characterized in that, The device for disassembling and assembling the support column in the heating plate according to claim 1 includes: The support column body is lifted upwards, and the disassembly and assembly device is installed at the heating plate; the pin component is installed in the support column body; After the disassembly and assembly device is installed, the support column body is lowered. After the weight falls onto the support platform, the support column body drives the pin component to continue falling until the pin component falls into the recessed structure. The clamping component is controlled to hold the pin component, and the first moving part is controlled to move in a straight line by the second moving part to pull the pin component out of the support column body.

10. A method for installing a support column in a heating plate, characterized in that, The device for disassembling and assembling the support column in the heating plate according to claim 1 includes: After clamping the pin component in the clamping arm, drive the first moving part to move the pin component to make way for the area below the opening in the hammer and fix it, and place the hammer on the support platform. The disassembly and assembly device is installed on the heating plate. The support column body is passed through the through hole in the heating plate from top to bottom, passes through the opening in the weight, and the opening in the support column body falls into the recessed structure. The opening in the support column body faces the direction of the first moving part in a straight line. The first moving part is controlled by the second moving part to move in a straight line so as to insert the pin component into the opening in the support column body.

Images