Efficient and accurate rapid defect detection method and equipment

Abstract

The invention relates to the technical field of detection devices, and discloses an efficient, accurate and rapid defect detection method and equipment, the equipment comprises a main base, the bottom of the main base is fixedly connected with a footstand, the top of the main base is fixedly connected with an upper shell, and the inner wall of the side surface of the upper shell is fixedly connected with a display; a visible window is formed in the side face of the upper shell, a bin body door is formed in the inner wall of the side face of the upper shell, the conveying device is arranged, a mechanical arm automatically conveys a silicon carbide substrate slice to the position below the image collecting device, automation of the working process is achieved, and the working efficiency is improved; through the arrangement of the image acquisition module, the defect feature extraction module, the defect classification module and the report output module, after image acquisition is completed, the image passes through the image acquisition module, the defect feature extraction module, the defect classification module and the report output module and is finally displayed in a display in a report form, so that the automation of equipment is realized, and the efficiency is improved. And the working efficiency of equipment is improved.

Description

Technical Field

[0001] This invention relates to the field of detection device technology, and more specifically to a highly efficient and accurate method and equipment for rapid defect detection. Background Technology

[0002] Silicon carbide (SiC) substrates are semiconductor substrates made from single-crystal SiC material. They are a key material in the manufacture of semiconductor devices, and due to their unique physicochemical properties, SiC substrates have become a cornerstone material in power electronics, radio frequency technology, and emerging consumer electronics. With technological iteration and cost optimization, their penetration rate in new energy vehicles, clean energy, and AR / VR applications will continue to increase, driving the semiconductor industry towards higher efficiency and miniaturization. Inspecting the surface of SiC substrates is not only a necessary step to ensure material quality and improve device performance, but also an important means to reduce costs, promote technological progress, meet market demands, and ensure production safety.

[0003] Current technology has its shortcomings: Traditional defect detection methods involve workers using microscopes to observe, identify, and classify the surface of silicon carbide substrates. This method is time-consuming, requiring more than ten hours to inspect a single silicon carbide substrate. Furthermore, it is affected by the accuracy of the workers' operation and identification, resulting in low efficiency and accuracy. Summary of the Invention

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides an efficient and accurate method and device for rapid defect detection, so as to solve the problems existing in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a highly efficient and accurate method and device for rapid defect detection, comprising a main base, a foot fixedly connected to the bottom of the main base, an upper housing fixedly connected to the top of the main base, a display fixedly connected to the inner side wall of the upper housing, a viewing window opened on the side of the upper housing, a compartment door opened on the inner side wall of the upper housing, and a conveying device fixedly connected to the top of the main base. The conveying device includes a first hydraulic rod base, a first hydraulic rod, a lower turntable of a robotic arm, a first robotic arm, a second robotic arm, a third robotic arm, and a support claw. The bottom of the first hydraulic rod base is fixedly connected to the top of the main base, the top of the first hydraulic rod base is fixedly connected to the bottom of the first hydraulic rod, the top of the first hydraulic rod is movably connected to the bottom of the lower turntable of the robotic arm, the top of the lower turntable of the robotic arm is movably connected to the bottom of the first robotic arm, the top of the first robotic arm is movably connected to the bottom of the second robotic arm, and the top of the second robotic arm is movably connected to the bottom of the third robotic arm. The third robotic arm is connected to the inner side wall of its supporting claw. A film cassette support base is fixedly connected to the top of the main base. A film cassette is fixedly connected to the top of the film cassette support base. A lead screw assembly is fixedly connected to the top of the main base. The lead screw assembly includes a transverse lead screw drive, a longitudinal lead screw drive, a film support base, and a film support rod. The bottom of the longitudinal lead screw drive is fixedly connected to the top of the main base. The top of the longitudinal lead screw drive is fixedly connected to the bottom of the transverse lead screw drive. A film support base is fixedly connected to the top of the transverse lead screw drive. A film support rod is fixedly connected to the top of the film support base. An image acquisition device assembly is fixedly connected to the top of the main base. The image acquisition device assembly includes an acquisition device and an acquisition support device. The top of the main base is fixedly connected to the bottom of the acquisition support device. The top of the acquisition support device is fixedly connected to the bottom of the acquisition device. A processor is fixedly connected to the top of the acquisition device.

[0006] Furthermore, a first motor is fixedly connected to the inner wall of the first hydraulic rod, a first drive shaft is fixedly connected to the top of the first motor, a lower turntable of the robotic arm is fixedly connected to the top of the first drive shaft, a second motor is fixedly connected to the inner wall of the lower turntable of the robotic arm, a second drive shaft is fixedly connected to the top of the second motor, a first robotic arm is fixedly connected to the top of the second drive shaft, a third motor is fixedly connected to the inner wall of the first robotic arm, a third drive shaft is fixedly connected to the top of the third motor, a second robotic arm is fixedly connected to the top of the third drive shaft, a fourth motor is fixedly connected to the inner wall of the second robotic arm, a fourth drive shaft is fixedly connected to the top of the fourth motor, and a third robotic arm is fixedly connected to the top of the fourth drive shaft.

[0007] Furthermore, the film cassette includes a cassette shell, a film baffle, and a film cassette baffle plate. The bottom of the film cassette baffle plate is fixedly connected to the top of the film cassette support base. The side of the cassette shell is movably connected to the side of the film cassette baffle plate. The inner wall of the cassette shell is fixedly connected to the side of the film baffle plate.

[0008] Furthermore, the transverse screw drive device includes a fixed slide rod, a screw motor, a coupling, a transmission screw, and an upper base plate. The top of the longitudinal screw drive device is fixedly connected to the bottom of the fixed slide rod, the top of the longitudinal screw drive device is fixedly connected to the side of the screw motor, the top of the screw motor is fixedly connected to the top of the coupling, the bottom of the coupling is fixedly connected to the top of the transmission screw, the side of the transmission screw is movably connected to the inner wall of the upper base plate, and the bottom of the upper base plate is movably sleeved with the side of the fixed slide rod.

[0009] Furthermore, the acquisition support device includes a lower sliding plate, a second hydraulic rod, a sliding plate, a fixed plate, and an upper sliding plate. The bottom of the lower sliding plate is fixedly connected to the top of the main base, the inner wall of the lower sliding plate is fixedly connected to the bottom of the second hydraulic rod, a groove is provided on the inner side wall of the lower sliding plate, the top of the second hydraulic rod is fixedly connected to the inner wall of the upper sliding plate, a sliding plate is fixedly connected to the side of the upper sliding plate, the sliding plate is movably connected to the groove on the lower sliding plate, and the top of the upper sliding plate is fixedly connected to the bottom of the fixed plate.

[0010] Furthermore, the acquisition device includes a camera body, a camera lens, an illumination lamp, an illumination lamp holder, an illumination lamp holder support plate, and an acquisition device support plate. One bottom end of the acquisition device support plate is fixedly connected to the top of a fixed plate, and the other top end of the acquisition device support plate is fixedly connected to a processor. The bottom of the processor is fixedly connected to the camera body, the bottom of the camera body is fixedly connected to the top of the camera lens, the bottom of the acquisition device support plate is fixedly connected to the top of the illumination lamp holder, the bottom of the illumination lamp holder support plate is fixedly connected to the top of the illumination lamp holder, and an illumination lamp is fixedly connected to the inner wall of the illumination lamp holder.

[0011] Furthermore, the processor includes an image acquisition module, a defect feature extraction module, a defect classification module, and a report output module. The image acquisition module acquires image data of the film surface through an acquisition device and sends the acquired image data to the defect feature extraction module. The defect feature extraction module extracts and preprocesses the image data and sends it to the defect classification module. The defect classification module identifies and classifies the data and sends it to the report output module. The report output module organizes the received data into a report and outputs it to the display.

[0012] The technical effects and advantages of this invention are as follows: 1. The present invention, by providing a conveying device, allows a robotic arm to automatically deliver a silicon carbide substrate to the area below the image acquisition device, which facilitates the automation of the workflow and improves work efficiency.

[0013] 2. The present invention, by providing a transverse lead screw drive device and a longitudinal lead screw drive device, allows the two devices to move in coordination when acquiring images of a silicon carbide substrate. This enables the image acquisition device to uniformly acquire image information from various parts and angles of the silicon carbide substrate, which helps to improve the accuracy of recognition and increase work efficiency.

[0014] 3. This invention includes an image acquisition module, a defect feature extraction module, a defect classification module, and a report output module. After image acquisition is completed, the image passes through these modules and is ultimately presented on the display in the form of a report. This facilitates the automation of the equipment and improves its working efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall appearance of the present invention; Figure 3 This is a schematic diagram of the conveying device structure of the present invention; Figure 4 This is a cross-sectional view of the conveying device of the present invention; Figure 5 This is a schematic diagram of the film cassette structure of the present invention; Figure 6 This is a schematic diagram of the transverse lead screw drive device of the present invention; Figure 7 This is a schematic diagram of the data acquisition device of the present invention; Figure 8 This is a schematic diagram of the data acquisition support device of the present invention; Figure 9 This is a schematic diagram of the lead screw assembly structure of the present invention; Figure 10 This is a schematic diagram of the overall system composition of the present invention.

[0016] The attached figures are labeled as follows: 1. Main base; 11. Foot; 12. Display; 13. Upper housing; 14. Viewing window; 15. Chamber door; 2. Conveying device; 21. First hydraulic rod base; 22. First hydraulic rod; 221. First motor; 222. First drive shaft; 23. Lower turntable of robotic arm; 231. Second motor; 232. Second drive shaft; 24. First robotic arm; 241. Third motor; 242. Third drive shaft; 25. Second robotic arm; 251. Fourth motor; 252. Fourth drive shaft; 26. Third robotic arm; 27. Support claw; 3. Film cassette support base; 31. Film cassette; 311. Cartridge shell; 312. Film baffle; 313. Film cassette baffle; 4. Screw assembly; 41. Transverse screw... 411. Rod drive device; 412. Fixed slide rod; 413. Screw motor; 414. Coupling; 415. Drive screw; 416. Upper base plate; 42. Longitudinal screw drive device; 43. Film support base; 44. Film support rod; 5. Image acquisition device assembly; 51. Acquisition device; 511. Camera body; 512. Camera lens; 513. Illumination lamp; 514. Illumination lamp holder; 515. Lamp holder support plate; 516. Acquisition device support plate; 52. Acquisition support device; 521. Lower slide plate; 522. Second hydraulic rod; 523. Slide plate; 524. Fixed plate; 525. Upper slide plate; 6. Processor; 61. Image acquisition module; 62. Defect feature extraction module; 63. Defect classification module; 64. Report output module. Detailed Implementation

[0017] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. In addition, the forms of the various structures described in the following embodiments are merely illustrative. The efficient and accurate rapid defect detection method and device involved in the present invention are not limited to the structures described in the following embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Reference Figures 1 to 10This invention provides a highly efficient and accurate method and device for rapid defect detection, including a main base 1, with feet 11 fixedly connected to the bottom of the main base 1, an upper housing 13 fixedly connected to the top of the main base 1, a display 12 fixedly connected to the inner side wall of the upper housing 13, a viewing window 14 on the side of the upper housing 13, a compartment door 15 on the inner side wall of the upper housing 13, and a conveying device 2 fixedly connected to the top of the main base 1. The conveying device 2 includes a first hydraulic rod base 21, a first hydraulic rod 22, a robotic arm lower turntable 23, and a first mechanical... The system comprises an arm 24, a second robotic arm 25, a third robotic arm 26, and a support claw 27. The bottom of the first hydraulic rod base 21 is fixedly connected to the top of the main base 1. The top of the first hydraulic rod base 21 is fixedly connected to the bottom of the first hydraulic rod 22. The top of the first hydraulic rod 22 is movably connected to the bottom of the lower turntable 23 of the robotic arm. The top of the lower turntable 23 is movably connected to the bottom of the first robotic arm 24. The top of the first robotic arm 24 is movably connected to the bottom of the second robotic arm 25. The top of the second robotic arm 25 is movably connected to the bottom of the third robotic arm 26. The third robotic arm 26 is fixedly connected to the inner side wall of the support claw 27. A film cassette support base 3 is fixedly connected to the top of the main base 1. A film cassette 31 is fixedly connected to the top of the film cassette support base 3. A lead screw assembly 4 is fixedly connected to the top of the main base 1. The lead screw assembly 4 includes a transverse lead screw drive 41, a longitudinal lead screw drive 42, a film support base 43, and a film support rod 44. The bottom of the longitudinal lead screw drive 42 is fixedly connected to the top of the main base 1, and the top of the longitudinal lead screw drive 42 is fixedly connected to the transverse lead screw drive 41. The bottom of the rod drive device 41 is fixedly connected, the top of the transverse screw drive device 41 is fixedly connected to the film support base 43, the top of the film support base 43 is fixedly connected to the film support rod 44, the top of the main base 1 is fixedly connected to the image acquisition device assembly 5, the image acquisition device assembly 5 includes an acquisition device 51 and an acquisition support device 52, the top of the main base 1 is fixedly connected to the bottom of the acquisition support device 52, the top of the acquisition support device 52 is fixedly connected to the bottom of the acquisition device 51, and the top of the acquisition device 51 is fixedly connected to the processor 6.

[0019] The first hydraulic rod 22 has a first motor 221 fixedly connected to its inner wall. The top of the first motor 221 has a first drive shaft 222 fixedly connected to its top. The top of the first drive shaft 222 has a lower turntable 23 fixedly connected to its top. The inner wall of the lower turntable 23 has a second motor 231 fixedly connected to its inner wall. The top of the second motor 231 has a second drive shaft 232 fixedly connected to its top. The top of the second drive shaft 232 has a first robotic arm 24 fixedly connected to its top. The inner wall of the first robotic arm 24 has a third motor 241 fixedly connected to its inner wall. The top of the third motor 241 has a third drive shaft 242 fixedly connected to its top. The top of the third drive shaft 242 has a second robotic arm 25 fixedly connected to its top. The inner wall of the second robotic arm 25 has a fourth motor 251 fixedly connected to its inner wall. The top of the fourth motor 251 has a fourth drive shaft 252 fixedly connected to its top. The top of the fourth drive shaft 252 has a third robotic arm 26 fixedly connected to its top.

[0020] The film cassette 31 includes a cassette shell 311, a film baffle 312, and a film cassette baffle 313. The bottom of the film cassette baffle 313 is fixedly connected to the top of the film cassette support base 3. The side of the cassette shell 311 is movably connected to the side of the film cassette baffle 313. The inner wall of the cassette shell 311 is fixedly connected to the side of the film baffle 312.

[0021] The transverse screw drive device 41 includes a fixed slide rod 411, a screw motor 412, a coupling 413, a transmission screw 414, and an upper base plate 415. The top of the longitudinal screw drive device 42 is fixedly connected to the bottom of the fixed slide rod 411, the top of the longitudinal screw drive device 42 is fixedly connected to the side of the screw motor 412, the top of the screw motor 412 is fixedly connected to the top of the coupling 413, the bottom of the coupling 413 is fixedly connected to the top of the transmission screw 414, the side of the transmission screw 414 is movably connected to the inner wall of the upper base plate 415, and the bottom of the upper base plate 415 is movably sleeved with the side of the fixed slide rod 411.

[0022] In this embodiment, the longitudinal lead screw drive device 42 and the transverse lead screw drive device 41 have the same structure. During operation, the longitudinal lead screw drive device 42 and the transverse lead screw drive device 41 move in coordination, so that the silicon carbide substrate moves uniformly.

[0023] The data acquisition support device 52 includes a lower slide plate 521, a second hydraulic rod 522, a slide plate 523, a fixing plate 524, and an upper slide plate 525. The bottom of the lower slide plate 521 is fixedly connected to the top of the main base 1. The inner wall of the lower slide plate 521 is fixedly connected to the bottom of the second hydraulic rod 522. A groove is provided on the inner side wall of the lower slide plate 521. The top of the second hydraulic rod 522 is fixedly connected to the inner wall of the upper slide plate 525. The slide plate 523 is fixedly connected to the side of the upper slide plate 525. The slide plate 523 is movably connected to the groove on the lower slide plate 521. The top of the upper slide plate 525 is fixedly connected to the bottom of the fixing plate 524.

[0024] In this embodiment, the up-and-down movement of the acquisition support device 52 is to facilitate the focusing of the acquisition device 51, so as to capture clearer image information, and to control the movement of the hydraulic rod in conjunction with the image recognized by the camera.

[0025] The data acquisition device 51 includes a camera body 511, a camera lens 512, an illumination lamp 513, an illumination lamp holder 514, a lamp holder support plate 515, and a data acquisition device support plate 516. One end of the data acquisition device support plate 516 is fixedly connected to the top of a fixing plate 524, and the other end of the data acquisition device support plate 516 is fixedly connected to a processor 6. The bottom of the processor 6 is fixedly connected to the camera body 511. The bottom of the camera body 511 is fixedly connected to the top of the camera lens 512. The bottom of the data acquisition device support plate 516 is fixedly connected to the top of the lamp holder support plate 515. The bottom of the lamp holder support plate 515 is fixedly connected to the top of the illumination lamp holder 514. An illumination lamp 513 is fixedly connected to the inner wall of the illumination lamp holder 514.

[0026] The processor 6 includes an image acquisition module 61, a defect feature extraction module 62, a defect classification module 63, and a report output module 64. The image acquisition module 61 acquires image data of the film surface through the acquisition device 51 and sends the acquired image data to the defect feature extraction module 62. The defect feature extraction module 62 extracts and preprocesses the image data and sends it to the defect classification module 63. The defect classification module 63 identifies and classifies the data and sends it to the report output module 64. The report output module 64 organizes the received data into a report and outputs it to the display 12.

[0027] The working principle of this invention is as follows: Step 1: The operator places the silicon carbide substrate into the film cassette 31, fixes the film cassette 31 to the film cassette support base 3, and starts the equipment. Step 2: The second motor 231 drives the first robotic arm 24 to rotate, the third motor 241 drives the second robotic arm 25 to rotate, and the fourth motor 251 drives the third robotic arm 26 to move. The third robotic arm 26 brings the support claw 27 to below the silicon carbide substrate. The first hydraulic rod 22 drives the device to move upward, and the support claw 27 lifts the silicon carbide substrate. Step 3: With the cooperation of various components, the device transports the support claw 27 above the film support rod 44. The first hydraulic rod 22 moves downward, placing the silicon carbide substrate on top of the film support rod 44, and the support claw 27 extends. Step 4: With the cooperation of the transverse screw drive device 41 and the longitudinal screw drive device 42, the silicon carbide substrate is moved to the working position. At the desired position, the second hydraulic rod 522 retracts, and the acquisition device 51 moves downwards with the retraction of the second hydraulic rod 522 to complete focusing. The illumination lamp 513 then lights up. Step five: The acquisition device 51 completes the shooting. With the cooperation of the horizontal lead screw drive device 41 and the vertical lead screw drive device 42, the silicon carbide substrate moves evenly under the acquisition device 51, so that the acquisition device 51 can capture all the required image information. Step six: The acquisition device 51 sends all the captured image information to the image acquisition module 61. After the image acquisition module 61 completes the acquisition, it sends the received image information to the defect feature extraction module 62. The defect feature extraction module 62 extracts defect features from the received image information and sends it to the defect classification module 63 after processing. The defect classification module 63 classifies the received information and sends it to the report output module 64 after classification. The report output module 64 converts the information into a report and sends it to the display 12 in the form of a report. The defect report can be displayed on the display 12.

[0028] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-efficiency, accurate, and rapid defect detection device, comprising a main base (1), characterized in that: The bottom of the main base (1) is fixedly connected to a foot (11), the top of the main base (1) is fixedly connected to an upper shell (13), a display (12) is fixedly connected to the inner side wall of the upper shell (13), a viewing window (14) is opened on the side of the upper shell (13), a compartment door (15) is opened on the inner side wall of the upper shell (13), and a conveying device (2) is fixedly connected to the top of the main base (1). The conveying device (2) includes a first hydraulic rod base (21), a first hydraulic rod (22), a robotic arm lower turntable (23), a first robotic arm (24), a second robotic arm (25), and a third robotic arm (26). The first hydraulic rod base (21) is fixedly connected to the top of the main base (1), the top of the first hydraulic rod base (21) is fixedly connected to the bottom of the first hydraulic rod (22), the top of the first hydraulic rod (22) is movably connected to the bottom of the lower turntable (23) of the robotic arm, the top of the lower turntable (23) of the robotic arm is movably connected to the bottom of the first robotic arm (24), the top of the first robotic arm (24) is movably connected to the bottom of the second robotic arm (25), the top of the second robotic arm (25) is movably connected to the bottom of the third robotic arm (26), and the side of the third robotic arm (26) is... The inner wall is fixedly connected to the side of the support claw (27). The top of the main base (1) is fixedly connected to the film box support base (3). The top of the film box support base (3) is fixedly connected to the film box (31). The top of the main base (1) is fixedly connected to the lead screw assembly (4). The lead screw assembly (4) includes a transverse lead screw drive device (41), a longitudinal lead screw drive device (42), a film support base (43), and a film support rod (44). The bottom of the longitudinal lead screw drive device (42) is fixedly connected to the top of the main base (1). The top of the longitudinal lead screw drive device (42) is fixedly connected to the transverse lead screw drive device (41). The bottom of the main base (1) is fixedly connected to the image acquisition device assembly (5), which includes an acquisition device (51) and an acquisition support device (52). The top of the main base (1) is fixedly connected to the bottom of the acquisition support device (52), and the top of the acquisition support device (52) is fixedly connected to the bottom of the acquisition device (51). The top of the acquisition device (51) is fixedly connected to the image acquisition device assembly (5), which includes an acquisition device (51) and an acquisition support device (52). The top of the main base (1) is fixedly connected to the bottom of the acquisition support device (52), and the top of the acquisition support device (52) is fixedly connected to the bottom of the acquisition device (51). The top of the acquisition device (51) is fixedly connected to the processor (6).

2. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: A first motor (221) is fixedly connected to the inner wall of the first hydraulic rod (22). A first drive shaft (222) is fixedly connected to the top of the first motor (221). A lower turntable (23) of the robotic arm is fixedly connected to the top of the first drive shaft (222). A second motor (231) is fixedly connected to the inner wall of the lower turntable (23). A second drive shaft (232) is fixedly connected to the top of the second motor (231). A first robotic arm (24) is fixedly connected to the top of the second drive shaft (232). The inner wall of the first robotic arm (24) is fixedly connected to a third motor (241), the top of the third motor (241) is fixedly connected to a third transmission shaft (242), the top of the third transmission shaft (242) is fixedly connected to a second robotic arm (25), the inner wall of the second robotic arm (25) is fixedly connected to a fourth motor (251), the top of the fourth motor (251) is fixedly connected to a fourth transmission shaft (252), and the top of the fourth transmission shaft (252) is fixedly connected to a third robotic arm (26).

3. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: The film cassette (31) includes a cassette shell (311), a film baffle (312), and a film cassette baffle (313). The bottom of the film cassette baffle (313) is fixedly connected to the top of the film cassette support base (3). The side of the cassette shell (311) is movably connected to the side of the film cassette baffle (313). The inner wall of the cassette shell (311) is fixedly connected to the side of the film baffle (312).

4. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: The transverse screw drive device (41) includes a fixed slide rod (411), a screw motor (412), a coupling (413), a transmission screw (414), and an upper base plate (415). The top of the longitudinal screw drive device (42) is fixedly connected to the bottom of the fixed slide rod (411). The top of the longitudinal screw drive device (42) is fixedly connected to the side of the screw motor (412). The top of the screw motor (412) is fixedly connected to the top of the coupling (413). The bottom of the coupling (413) is fixedly connected to the top of the transmission screw (414). The side of the transmission screw (414) is movably connected to the inner wall of the upper base plate (415). The bottom of the upper base plate (415) is movably sleeved with the side of the fixed slide rod (411).

5. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: The acquisition support device (52) includes a lower slide plate (521), a second hydraulic rod (522), a slide plate (523), a fixed plate (524), and an upper slide plate (525). The bottom of the lower slide plate (521) is fixedly connected to the top of the main base (1). The inner wall of the lower slide plate (521) is fixedly connected to the bottom of the second hydraulic rod (522). A groove is provided on the inner side wall of the lower slide plate (521). The top of the second hydraulic rod (522) is fixedly connected to the inner wall of the upper slide plate (525). A slide plate (523) is fixedly connected to the side of the upper slide plate (525). The slide plate (523) is movably connected to the groove on the lower slide plate (521). The top of the upper slide plate (525) is fixedly connected to the bottom of the fixed plate (524).

6. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: The acquisition device (51) includes a camera body (511), a camera lens (512), an illumination lamp (513), an illumination lamp holder (514), a lamp holder support plate (515), and an acquisition device support plate (516). One end of the acquisition device support plate (516) is fixedly connected to the top of a fixing plate (524). The other end of the acquisition device support plate (516) is fixedly connected to a processor (6). The bottom of the processor (6) is fixedly connected to the camera body (511). The bottom of the camera body (511) is fixedly connected to the top of the camera lens (512). The bottom of the acquisition device support plate (516) is fixedly connected to the top of the lamp holder support plate (515). The bottom of the lamp holder support plate (515) is fixedly connected to the top of the illumination lamp holder (514). An illumination lamp (513) is fixedly connected to the inner wall of the illumination lamp holder (514).

7. The efficient and accurate rapid defect detection device according to claim 1, characterized in that: The processor (6) includes an image acquisition module (61), a defect feature extraction module (62), a defect classification module (63), and a report output module (64). The image acquisition module (61) acquires image data of the film surface through the acquisition device (51) and sends the acquired image data to the defect feature extraction module (62). The defect feature extraction module (62) extracts and preprocesses the image data and sends it to the defect classification module (63). The defect classification module (63) identifies and classifies the data and sends the data to the report output module (64). The report output module (64) organizes the received data into a report and outputs it to the display (12).

8. A method for a high-efficiency, accurate, rapid defect detection device, as described in any one of claims 1-7, characterized in that: The process includes the following steps: Step 1: The operator places the silicon carbide substrate into the film cassette (31), fixes the film cassette (31) on the film cassette support base (3), and starts the equipment. Step 2: The second motor (231) drives the first robotic arm (24) to rotate, the third motor (241) drives the second robotic arm (25) to rotate, and the fourth motor (251) drives the third robotic arm (26) to move. The third robotic arm (26) brings the support claw (27) to the bottom of the silicon carbide substrate. A hydraulic rod (22) drives the device upward, and the support claw (27) lifts the silicon carbide substrate. In step three, with the cooperation of various components, the device transports the support claw (27) above the substrate support rod (44). The first hydraulic rod (22) moves downward, placing the silicon carbide substrate on top of the substrate support rod (44). The support claw (27) extends. In step four, with the cooperation of the transverse screw drive device (41) and the longitudinal screw drive device (42), the silicon carbide substrate is moved. When the second hydraulic rod (522) retracts to the required position, the acquisition device (51) moves downwards as the second hydraulic rod (522) retracts, completing the focusing. The lighting lamp (513) then lights up. In step five, the acquisition device (51) completes the shooting. With the cooperation of the horizontal lead screw drive device (41) and the vertical lead screw drive device (42), the silicon carbide substrate moves evenly under the acquisition device (51), so that the acquisition device (51) can capture all the required image information. In step six, the acquisition device (51) sends all the captured image information to the image acquisition module (61). After the image acquisition module (61) completes the acquisition, it sends the received image information to the defect feature extraction module (62). The defect feature extraction module (62) extracts defect features from the received image information. After processing, it sends the information to the defect classification module (63). The defect classification module (63) classifies the received information. After classification, it sends the information to the report output module. (64) The report output module (64) converts the information into a report and sends it to the display (12) in the form of a report. The defect report can be displayed on the display (12).

Images