Water tank for gas washing
By designing a gas water washing water tank and using structures such as intake pipes, exhaust pipes and cooling chambers, the problems of large water consumption and poor results in exhaust treatment in the semiconductor industry are solved, and efficient exhaust water washing and water saving are achieved, reducing costs and Security risks.
Patent Information
- Application Number
- CN202420465983.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-11
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-03-11
AI Technical Summary
In the exhaust gas treatment of the existing semiconductor industry, the water washing treatment consumes a large amount of water and the effect is not ideal, resulting in safety hazards and environmental pollution, and is costly.
A gas washing water tank is designed. Through the structural design of the intake pipe and exhaust pipe, combined with the cooling chamber, spray head and atomizer, the full contact and recycling of gas and water is achieved, the air pressure disturbance is reduced, and the air pressure disturbance is passed through Tube connection and baffle partition area improve handling efficiency and safety.
It has achieved the improvement of exhaust gas washing effect, saved water, reduced treatment costs, and improved the safety and treatment efficiency of the equipment.
Smart Images
Figure CN222131438U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gas water washing purification, in particular to a gas water washing water tank. Background Art
[0002] In the manufacturing of semiconductor industry-related products such as chips, different waste gases are generated at each stage. For example, the thermal oxidation process of the thin film deposition process generates acidic waste gas containing unreacted halogen-containing oxidants, the CVD process generates waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, NH3, etc., the etching process generates acid, alkali, and organic waste gas, as well as some gaseous byproducts (such as H2, NO, NH3, etc.), and the doping process generates acidic waste gas containing phosphine and arsine, etc. These tail gases are generally toxic and flammable. Improper treatment will cause serious safety accidents, cause serious economic losses, and cause serious pollution to the environment. Existing semiconductor tail gas treatment equipment is divided into many different types based on different principles, such as combustion tail gas treatment equipment, plasma tail gas treatment equipment, electric heating tail gas treatment equipment, etc. In view of the complex tail gas composition, the limited processing capacity of the aforementioned treatment equipment and the high processing cost, and some tail gas components are soluble in water, the water washing tail gas method is necessary and has good economic benefits. Existing water washing of tail gas often uses a large amount of water and the washing effect between the tail gas and the water body is not ideal. Utility Model Content
[0003] The utility model discloses a gas washing water tank, which solves the technical problems of large water consumption and unsatisfactory washing effect in the prior art for tail gas washing treatment, and has the technical effects of reasonable structure, good tail gas washing effect and conducive to water conservation. The technical scheme adopted is as follows:
[0004] A water tank for gas water washing includes a tank body and a water pump. The inner cavity of the tank body is connected with an air inlet pipe and an air exhaust pipe. The end of the air inlet pipe extends into the inner cavity of the tank body and extends below the water level of the tank body. The gas on the liquid surface can be discharged to the outside through the exhaust pipe. The water pump is fixed on the tank body and includes a water inlet and a water outlet, which is used to drive the water in the tank body to circulate.
[0005] On the basis of the above technical solution, the air inlet pipe includes a first outer tube and a first inner tube, the first outer tube is connected to the air source upward, the first inner tube extends downward and extends below the water level of the box body, and the first outer tube and the first inner tube enclose a cooling chamber with a closed bottom and an upper end connected to the first inner tube. The cooling chamber is connected to a water inlet pipe, and the water inlet pipe is connected to the water outlet of the water pump. Water can accumulate in the cooling chamber from bottom to top and flow back into the box body through the first inner tube.
[0006] Based on the above technical solution, the water inlet pipe is arranged near the bottom of the cooling chamber, and the water inlet pipe is designed so that water enters the cooling chamber in a tangential direction and climbs spirally along the inner wall of the first outer tube.
[0007] On the basis of the above technical solution, a plurality of first spray heads are circumferentially arranged on the first inner tube between the cooling cavity and the box body, and the water outlets of the first spray heads are arranged toward the central axis of the first inner tube.
[0008] On the basis of the above technical solution, the exhaust pipe and the air inlet pipe are arranged above the box body and in parallel. A plurality of orifice plates are detachably provided in the exhaust pipe. The plurality of orifice plates are axially spaced to divide the inner cavity of the exhaust pipe into a plurality of sub-chambers. A first atomizer and / or a condensation adsorption ball is provided in at least one of the sub-chambers, and the inlet of the first atomizer is connected to the water outlet of the water pump.
[0009] Based on the above technical solution, the inner cavities of the air inlet pipe and the exhaust pipe are connected through a transverse pipe, and a second spray head or a second atomizer is provided on the side wall of the transverse pipe, and the water inlet of the second spray head or the second atomizer is connected to the water outlet of the water pump.
[0010] Based on the above technical solution, the transverse pipe has an upward tilt angle from the intake pipe to the exhaust pipe.
[0011] Based on the above technical solution, the inner bottom surface of the box body is fixed with a number of vertically arranged baffles, and the baffles and the inner wall surface of the box body divide the bottom area of the box body into a number of sub-areas to reduce the disturbance of air pressure changes to the water body in the box body.
[0012] On the basis of the above technical solution, a filter screen is provided at the water inlet of the water pump, the water inlet is provided corresponding to a sub-area and the water inlet is lower than the height of the baffle forming the sub-area.
[0013] On the basis of the above technical solution, a plurality of windows are provided on the box body, and the windows are closed by transparent acrylic plates.
[0014] Beneficial Effects
[0015] The utility model has a reasonable structure, and the air intake pipe extends below the liquid level in the box body, so that the gas can be fully contacted with water and then discharged through the exhaust pipe, which is beneficial to improving the gas water washing effect. In addition, a cross pipe is connected between the air intake pipe and the exhaust pipe to avoid the situation where the air pressure in the box body is too high and the water enters the exhaust pipe in the case of a fault. At the same time, when the air pressure in the air intake pipe is high, the exhaust gas in the air intake pipe can be diverted in time to ensure that the box body and the air intake pipe have a relatively stable air pressure, and the use safety is good.
[0016] In addition, the water in the box body can be circulated under the action of the water pump to meet the water demand of the cooling cavity, the spray pipe and the atomizer, which is conducive to saving water and reducing costs. At the same time, the bottom area of the box body is divided into several sub-areas by the baffle. On the one hand, the setting of several baffles can reduce the disturbance of the airflow to the water body and prevent impurities deposited in the box body from entering the water pump. On the other hand, the sub-areas enclosed by the baffles relatively isolate the water inlet of the water pump from the outlet of the air inlet pipe. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.
[0018] Figure 1 : The three-dimensional structure of the utility model is shown in FIG. Figure 1 ;
[0019] Figure 2 : The three-dimensional structure of the utility model is shown in FIG. Figure 2 ;
[0020] Figure 3 : A schematic diagram of the cross-sectional structure of the main view of the utility model; DETAILED DESCRIPTION
[0021] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.
[0022] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0023] As used herein, the term "plurality" means two or more than two, unless otherwise specified.
[0024] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.
[0025] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.
[0026] like Figures 1 to 3 A water tank for gas washing shown in the figure comprises a tank body 1 and a water pump 2. The tank body 1 comprises an inner cavity, the inner cavity contains water, and the inner cavity is connected with a first inlet and a first outlet, wherein the first inlet allows water to be injected into the inner cavity, and the water in the inner cavity can be discharged through the first outlet. A plurality of windows 7 are provided on the tank body 1, and the windows 7 are closed by transparent acrylic plates.
[0027] The water pump 2 is fixed on the box body 1 and includes a water inlet and a water outlet, and is used to drive the water in the box body 1 to circulate.
[0028] The inner cavity of the box body 1 is connected with an air inlet pipe 3 and an exhaust pipe 4. In the present embodiment, the exhaust pipe 4 and the air inlet pipe 3 are arranged above the box body 1 and are arranged in parallel. The air inlet pipe 3 includes a first outer tube 31 and a first inner tube 32, wherein the first outer tube 31 and the first inner tube 32 are coaxially arranged, the first outer tube 31 is connected with the air source upward, the first inner tube 32 extends downward and extends below the water level of the box body 1, and the first outer tube 31 and the first inner tube 32 enclose a cooling chamber 35 with a closed bottom end and an upper end connected with the first inner tube 32. The cooling chamber 35 is connected with a water inlet pipe 33, wherein the water inlet pipe 33 is connected with the water outlet of the water pump 2, and the water pump 2 can pump the water in the box body 1 into the cooling chamber 35 through the water inlet pipe 33.
[0029] In this embodiment, there are two water inlet pipes 33 and they are symmetrically arranged. The water inlet pipes 33 are arranged near the bottom of the cooling chamber 35, and the water inlet pipes 33 are designed so that water enters the cooling chamber 35 in a tangential direction and climbs spirally along the inner wall of the first outer pipe 31. Then, the water accumulates from bottom to top in the cooling chamber 35 and flows back to the box body 1 through the first inner pipe 32. Figure 3 As shown, the top edge of the first inner tube 32 is slightly lower than the top edge of the first outer tube 31, so as to prevent the water level in the cooling chamber from being higher than the gap at the connection between the first outer tube 31 and the air source, thereby improving safety in use.
[0030] like Figure 2 and 3 As shown, a plurality of first spray heads 34 are circumferentially arranged on the first inner tube 32 between the cooling cavity 35 and the box body 1, and the water outlet of the first spray head 34 is arranged toward the central axis of the first inner tube 32, and the water inlet of the first spray head 34 is connected to the water outlet of the water pump 2, so that the water in the box body 1 is used as the water source.
[0031] The lower port of the exhaust pipe 4 is fixed on the top surface of the box body 1, and the gas on the liquid surface can be discharged outward through the exhaust pipe. A plurality of orifice plates 41 are detachably provided in the exhaust pipe 4. The plurality of orifice plates 41 are axially spaced to divide the inner cavity of the exhaust pipe 4 into a plurality of sub-chambers. At least one of the sub-chambers is provided with a first atomizer 42 and / or a condensation adsorption ball, and the inlet of the first atomizer 42 is connected to the water outlet of the water pump 2; wherein, the condensation adsorption ball is loose and porous, and one or more of activated carbon blocks, Hakaiden fillers, Raschig ring fillers or ball ring fillers can be used. When the exhaust gas after water washing passes through the condensation adsorption ball, the diffusion speed is further slowed down, and the diffusion path is extended, which is conducive to fully combining with the water droplets produced by the first atomizer 42, and further improving the gas water washing effect.
[0032] like Figure 3 As shown, the inner cavities of the air inlet pipe 3 and the exhaust pipe 4 are connected through a transverse pipe 5, and a second spray head 51 or a second atomizer is provided on the side wall of the transverse pipe 5. The water inlet of the second spray head 51 or the second atomizer is connected to the water outlet of the water pump 2, and the transverse pipe 5 has an upward tilt angle from the air inlet pipe 3 to the exhaust pipe 4, which is conducive to the exhaust gas entering the box body 1 downward under normal working conditions, and at the same time facilitates the water discharged from the second spray head 51 or the second atomizer to quickly flow back to the box body 1.
[0033] like Figure 2As shown, the inner bottom surface of the box body 1 is fixed with a plurality of vertically arranged baffles 6, and the baffles 6 and the inner wall surface of the box body 1 divide the bottom area of the box body 1 into a plurality of sub-areas to reduce the disturbance of the water body in the box body 1 by the air pressure change, and prevent the impurities deposited in the box body 1 from entering the water pump 2. In addition, a filter screen is provided at the water inlet of the water pump 2, and the water inlet is arranged corresponding to a sub-area and the water inlet is lower than the height of the baffle 6 forming the sub-area, which can further prevent impurities from entering the water pump. In this embodiment, the position of the water inlet of the water pump 2 is arranged away from the air outlet of the air inlet pipe.
[0034] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.
Claims
1. A water tank for gas washing, characterized in that: The invention comprises a box body (1) and a water pump (2); the inner cavity of the box body (1) is connected with an air inlet pipe (3) and an air outlet pipe (4); the end of the air inlet pipe (3) extends into the inner cavity of the box body (1) and extends below the water surface of the box body (1); the gas on the liquid surface can be discharged to the outside through the air outlet pipe (4); the water pump (2) is fixedly mounted on the box body (1) and comprises a water inlet and a water outlet, and is used to drive the water in the box body (1) to circulate.
2. The gas washing water tank according to claim 1, characterized in that: The air inlet pipe (3) comprises a sleeved first outer pipe (31) and a first inner pipe (32); the first outer pipe (31) is connected to an air source upwards; the first inner pipe (32) extends downwards and extends below the water level of the box body (1); the first outer pipe (31) and the first inner pipe (32) enclose a cooling chamber (35) with a closed bottom and connected to the first inner pipe (32) at the top; the cooling chamber (35) is connected to a water inlet pipe (33); the water inlet pipe (33) is connected to a water outlet of a water pump (2); water can be accumulated from bottom to top in the cooling chamber (35) and flow back to the box body (1) through the first inner pipe (32).
3. The gas washing water tank according to claim 2, characterized in that: The water inlet pipe (33) is arranged near the bottom of the cooling chamber (35), and the water inlet pipe (33) is designed so that water enters the cooling chamber (35) in a tangential direction and climbs in a spiral shape along the inner wall surface of the first outer tube (31).
4. The gas washing water tank according to claim 2, characterized in that: A plurality of first spray heads (34) are circumferentially arranged on the first inner tube (32) between the cooling cavity (35) and the box body (1), and the water outlets of the first spray heads (34) are arranged toward the central axis of the first inner tube (32).
5. The gas washing water tank according to any one of claims 1 to 4, characterized in that: The exhaust pipe (4) and the air inlet pipe (3) are arranged above the box body (1) and arranged in parallel. A plurality of orifice plates (41) are detachably arranged in the exhaust pipe (4). The plurality of orifice plates (41) are axially spaced apart to divide the inner cavity of the exhaust pipe (4) into a plurality of sub-chambers. A first atomizer (42) and / or a condensation adsorption ball is arranged in at least one of the sub-chambers, and the inlet of the first atomizer (42) is connected to the water outlet of the water pump.
6. The gas washing water tank according to claim 5, characterized in that: The inner cavities of the air inlet pipe (3) and the air outlet pipe (4) are connected via a transverse pipe (5), and a second spray head (51) or a second atomizer is provided on the side wall of the transverse pipe (5), and the water inlet of the second spray head (51) or the second atomizer is connected to the water outlet of the water pump (2).
7. The gas washing water tank according to claim 6, characterized in that: The transverse pipe (5) has an upward tilt angle from the air intake pipe (3) to the exhaust pipe (4).
8. The gas washing water tank according to claim 6 or 7, characterized in that: The inner bottom surface of the box body (1) is fixedly provided with a plurality of baffles (6) arranged vertically, and the plurality of baffles (6) and the inner wall surface of the box body (1) divide the bottom area of the box body (1) into a plurality of sub-areas, so as to reduce the disturbance of the water body in the box body (1) caused by the change of air pressure.
9. The gas washing water tank according to claim 8, characterized in that: A filter screen is provided at the water inlet of the water pump (2); the water inlet is provided corresponding to a sub-region and is lower than the height of a baffle (6) forming the sub-region.
10. The gas washing water tank according to claim 9, characterized in that: The box body (1) is provided with a plurality of viewing windows (7), and the viewing windows (7) are closed with transparent acrylic plates.