Ultrasonic water bath heating tank

Abstract

The utility model relates to the technical field of wafer degumming, and discloses an ultrasonic water bath heating tank which comprises a shell, the shell is of a square structure without a cover, a sealing cavity is formed in the shell, a water outlet pipe is arranged on the bottom face of the sealing cavity, a heating cavity is formed between the sealing cavity and the shell, sleeves are arranged on the two sides of the lower end of the front side face of the heating cavity in a penetrating mode respectively, and heating rods are arranged in the sleeves. A dual-purpose pipe is arranged on the lower surface of the rear side of the heating cavity; a water outlet hole is formed below the rear side face of the ultrasonic generator, a floating ball liquid level device and an air cylinder are arranged on the left side face or the right side face of the shell, the air cylinder is connected with a cover plate, and the cover plate is rotationally arranged above the shell. According to the utility model, the glue layer is more easily damaged by the vibration of ultrasonic waves, so that the glue removing speed is accelerated, meanwhile, the heat energy is beneficial to more quickly permeating the glue removing liquid into the deep part of the glue layer, so that the glue layer is more easily stripped, and the glue layer can be more thoroughly removed and residues are reduced through the combination of heating and ultrasonic waves, so that the glue removing quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer debonding, in particular to an ultrasonic water bath heating tank. Background Art

[0002] After photolithography, there will be residues of chemical solution and photoresist on the wafer. The existing degumming equipment has poor cleaning effect, long cleaning time, and incomplete degumming effect, which may cause residues of photoresist or degumming agent to remain on the wafer surface, affecting the subsequent process steps and even affecting the performance of the device. There is difficult-to-remove glue in the gaps in the wafer, and the existing degumming equipment will produce residual glue, affecting the degumming quality. Therefore, in response to the above problems, an ultrasonic water bath heating tank is proposed. Utility Model Content

[0003] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an ultrasonic water bath heating tank, comprising a shell, the shell is a square structure without a cover, a sealed cavity is arranged in the shell, a water outlet pipe is arranged on the bottom surface of the sealed cavity, a heating cavity is formed between the sealed cavity and the shell, the heating cavity surrounds the sealed cavity, sleeves are respectively penetrated and arranged on both sides of the lower end of the front side surface of the heating cavity, a heating rod is arranged in the sleeve, and a dual-purpose tube is arranged on the lower surface of the rear side of the heating cavity; an ultrasonic generator is arranged at the lower end of the sealed cavity, a water outlet hole is arranged below the rear side surface of the ultrasonic generator, a float liquid level gauge and a cylinder are arranged on the left side or right side surface of the shell, the cylinder is connected to a cover plate, and the cover plate is rotatably arranged above the shell.

[0004] Furthermore, fixing columns are arranged at the four corners of the bottom surface of the sealing cavity, a filter plate is arranged above the fixing columns, and a plurality of filter holes are penetrated and arranged on the upper surface of the filter plate.

[0005] Furthermore, an air inlet pipe is arranged on the side of the ultrasonic generator.

[0006] Furthermore, a plurality of fixing plates are arranged on the inner wall of the sealing cavity. The fixing plates are arranged on the inner wall of the sealing cavity in a longitudinal arrangement. A plurality of fixing holes with different diameters are arranged on the upper surface of the fixing plates.

[0007] Furthermore, the height of the sealed cavity is lower than the height of the shell, an overflow pipe is arranged on the side of the shell, and the height of the upper end of the outer side surface of the overflow pipe is consistent with the height of the upper end of the heating cavity.

[0008] The utility model has the following beneficial effects:

[0009] In the utility model, heating by the heating rod can soften the photoresist or other target materials and reduce their adhesion, making it easier for the ultrasonic vibration to destroy the adhesive layer, thereby accelerating the speed of adhesive removal. At the same time, the heat energy helps the adhesive removal liquid to penetrate deeper into the adhesive layer faster, making the adhesive layer easier to be peeled off. The combination of heating and ultrasound can more thoroughly remove the adhesive layer and reduce the generation of residues, thereby improving the quality of adhesive removal. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic diagram of the structure of an ultrasonic water bath heating tank proposed by the utility model;

[0011] Figure 2 This is a cross-sectional structural diagram of an ultrasonic water bath heating tank proposed by the utility model;

[0012] Figure 3 The utility model is a side sectional view of an ultrasonic water bath heating tank.

[0013] Legend:

[0014] 1. Shell; 2. Sealing chamber; 3. Water outlet pipe; 4. Heating chamber; 5. Sleeve; 6. Dual-purpose pipe; 7. Ultrasonic generator; 8. Water outlet hole; 9. Float level gauge; 10. Cylinder; 11. Cover plate; 12. Air inlet pipe; 13. Overflow pipe; 21. Fixed column; 22. Filter plate; 23. Filter hole. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] Reference Figure 1-3As shown, an embodiment of the utility model is: an ultrasonic water bath heating tank, comprising a shell 1, the shell 1 is a square structure without a cover, a sealed cavity 2 is arranged in the shell 1, a water outlet pipe 3 is arranged on the bottom surface of the sealed cavity 2, a heating cavity 4 is formed between the sealed cavity 2 and the shell 1, the heating cavity 4 surrounds the sealed cavity 2, sleeves 5 are respectively penetrated on both sides of the lower end of the front side of the heating cavity 4, a heating rod is arranged in the sleeve 5, and a dual-purpose tube 6 is arranged on the lower surface of the rear side of the heating cavity 4; an ultrasonic generator 7 is arranged at the lower end of the sealed cavity 2, a water outlet hole 8 is arranged below the rear side of the ultrasonic generator 7, a float liquid level gauge 9 and a cylinder 10 are arranged on the left side or right side of the shell 1, the cylinder 10 is connected to the cover plate 11, the cover plate 11 is rotatably arranged above the shell 1, and the cylinder 1 0 is started to make the cover plate 11 rotate around one side to realize the opening and closing of the shell 1. The height of the sealed chamber 2 is lower than the height of the shell 1 to prevent the sealed chamber 2 from being too high and the internal liquid medicine from overflowing easily. An overflow pipe 13 is arranged on the side of the shell 1. The upper end height of the outer surface of the overflow pipe 13 is consistent with the upper end height of the heating chamber 4. Water flows into the heating chamber 4 through the dual-purpose pipe 6 to prevent excessive solution in the heating chamber 4 due to external factors or operational errors. The overflow pipe 13 plays the role of discharging excessive liquid. The heating rod is used to heat the solution in the heating chamber 4, and the side wall of the sealed chamber 2 is made of stainless steel. The heat is transferred to the liquid medicine in the sealed chamber 2 through the side wall of the sealed chamber 2. The float liquid level gauge 9 is used to monitor the liquid medicine height in the sealed chamber 2.

[0017] Furthermore, fixed columns 21 are arranged at the four corners of the bottom surface of the sealing cavity 2, a filter plate 22 is arranged above the fixed columns 21, and a plurality of filter holes 23 are penetrated and arranged on the upper surface of the filter plate 22. The height of the fixed columns 21 is set according to the contour of the bottom surface of the sealing cavity 2 so that the filter plate 22 is in a horizontal state, which can promote the fluid to be evenly distributed on the filter plate 22, which helps to ensure that the entire surface of the filter plate 22 can be effectively utilized, and prevent some filter holes 23 from being overloaded and causing the fluid to be unable to pass.

[0018] Furthermore, an air inlet pipe 12 is provided on the side of the ultrasonic generator 7, and nitrogen is flushed into the ultrasonic generator 7 through the air inlet pipe 12, so that the air pressure inside the ultrasonic generator 7 is greater than the external air pressure, thereby preventing steam from entering the ultrasonic generator 7 during use and affecting the generation of ultrasound and the internal circuit.

[0019] Furthermore, a plurality of fixing plates 24 are arranged on the inner wall of the sealed cavity 2, and the fixing plates 24 are arranged longitudinally on the inner wall of the sealed cavity 2. A plurality of fixing holes 25 with different diameters are arranged on the upper surface of the fixing plates 24, and a plurality of pipelines with different diameters and containing different liquid medicines are fixed on the inner wall of the sealed cavity 2 through the fixing holes 25 with different diameters.

[0020] Working principle: When in use, the staff first starts the cylinder 10 to open the cover 11 and put the wafer into the sealed chamber 2, then fills the heating chamber 4 with water through the dual-purpose tube 6, starts the heating rod to heat the aqueous solution in the heating chamber 4, and at the same time fixes a plurality of pipelines of different diameters on the fixed hole 25, adds medicine solution into the sealed chamber 2 through the pipeline, and the float liquid level gauge 9 monitors the height of the solution in the sealed chamber 2. When the appropriate position is reached, the addition of medicine solution is stopped, the temperature of the solution in the heating chamber 4 gradually increases and transfers heat inward through the inner wall of the sealed chamber 2, so that the temperature of the medicine solution gradually increases, and starts the ultrasonic generator 7 to generate ultrasound. The vibration of the ultrasonic wave can more easily destroy the glue layer, and the heat energy helps the medicine solution to penetrate deeper into the glue layer faster, making the glue layer easier to be peeled off. The combination of heating and ultrasound can remove the glue layer more thoroughly, and at the same time, nitrogen is flushed into the ultrasonic generator 7 through the air inlet pipe 12. After the degumming is completed, the heating rod is turned off, and the solutions in the heating chamber 4 and the sealed chamber 2 are discharged through the dual-purpose tube and the drain pipe respectively.

[0021] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An ultrasonic water bath heating tank, characterized in that: The invention comprises a shell (1), wherein the shell (1) is a square structure without a cover, wherein a sealed cavity (2) is arranged inside the shell (1), a water outlet pipe (3) is arranged on the bottom surface of the sealed cavity (2), a heating cavity (4) is formed between the sealed cavity (2) and the shell (1), and the heating cavity (4) surrounds the sealed cavity (2), sleeves (5) are respectively penetrated and arranged on both sides of the lower end of the front side surface of the heating cavity (4), a heating rod is arranged inside the sleeves (5), and a dual-purpose pipe (6) is arranged on the lower surface of the rear side of the heating cavity (4); an ultrasonic generator (7) is arranged at the lower end of the sealed cavity (2), and a water outlet hole (8) is arranged below the rear side surface of the ultrasonic generator (7); a float liquid level gauge (9) and a cylinder (10) are arranged on the left side or right side surface of the shell (1), and the cylinder (10) is connected to a cover plate (11), and the cover plate (11) is rotatably arranged above the shell (1).

2. The ultrasonic water bath heating tank according to claim 1, characterized in that: Fixed columns (21) are arranged at the four corners of the bottom surface of the sealed cavity (2), a filter plate (22) is arranged above the fixed columns (21), and a plurality of filter holes (23) are penetrated through the upper surface of the filter plate (22).

3. The ultrasonic water bath heating tank according to claim 1, characterized in that: An air inlet pipe (12) is arranged on the side of the ultrasonic generator (7).

4. The ultrasonic water bath heating tank according to claim 1, characterized in that: A plurality of fixing plates (24) are arranged on the inner wall of the sealing cavity (2); the fixing plates (24) are arranged longitudinally on the inner wall of the sealing cavity (2); and a plurality of fixing holes (25) of different diameters are arranged on the upper surface of the fixing plates (24).

5. The ultrasonic water bath heating tank according to claim 1, characterized in that: The height of the sealed chamber (2) is lower than the height of the shell (1); an overflow pipe (13) is provided on the side of the shell (1); the height of the upper end of the outer surface of the overflow pipe (13) is consistent with the height of the upper end of the heating chamber (4).

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