Wafer cleaning clamp
By designing the fixture structure of the fixed rod, movable rod and spring, the problem of unstable wafer cleaning fixtures in the prior art during oscillation and failure after multiple use is achieved, and the effect of stable clamping and multiple reuse is achieved. .
Patent Information
- Application Number
- CN202420269448.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-04
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-02-04
AI Technical Summary
The existing wafer cleaning fixtures cannot maintain stable clamping of the silicon wafer during the oscillation process, and the fixtures cannot continue to be used after multiple use.
Design a wafer cleaning fixture including a fixed rod, a mobile rod, a spring, a bolt and a grip. It provides clamping force through a spring and sets an equilateral triangle support structure between the fixed rod and a mobile rod to ensure the wafer's Stable clamping and replaced by manual tightening force when the spring drops.
The stable clamping of the silicon wafer and repeated reuse during the oscillation process are achieved, avoiding instability and fixture failure caused by insufficient clamping force.
Smart Images
Figure CN222132931U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of semiconductor manufacturing and relates to a wafer cleaning fixture. Background Art
[0002] Semiconductor manufacturing is a complex process, and cleaning is a major process. Semiconductor cleaning mainly includes ultrasonic cleaning and solution cleaning. Solution cleaning is currently the most commonly used; solution cleaning is to use acid or alkaline solution to remove metal oxides and organic matter on the surface of the wafer. When using solution cleaning, the silicon wafer needs to be placed in the solution and shaken, and this process requires the use of a cleaning fixture.
[0003] There are some cleaning fixtures on the market, but there are some major problems in use. For example, when the silicon wafer is placed in the wafer cleaning basket and immersed in the liquid, the silicon wafer cannot remain relatively fixed with the cleaning basket due to the buoyancy. During the oscillation process, it may be completely out of the control of the cleaning basket and may fall out of the cleaning basket. Another type is the three-claw clamp, which uses the elastic deformation of one of the claws to generate a clamping force on the silicon wafer. After repeated use, the elastic deformation turns into plastic deformation and can no longer generate sufficient gripping force, so the clamp cannot be used anymore.
[0004] Therefore, there is an urgent need for a cleaning fixture that is stable in clamping and can be reused many times. Utility Model Content
[0005] In view of the problems existing in the prior art, the purpose of the utility model is to provide a wafer cleaning fixture that can maintain stable clamping and can be reused multiple times.
[0006] The technical solution of this application is:
[0007] A wafer cleaning fixture, characterized in that it comprises two fixed rods, a movable rod, a spring, a bolt and a handle;
[0008] The movable rod is connected to the lower end of the handle via a pin; the upper end of the handle is connected to the upper end of the movable rod via a spring;
[0009] The bottoms of the two fixed rods are respectively connected and fixed to the bottoms of the handles, and the angles between the two fixed rods and the movable rods are equal, so as to ensure that the force on the wafer to be clamped between each fixed rod and the movable rod is the same.
[0010] Furthermore, the handle is a long rectangular structure with a rectangular hole in the middle; after the movable rod passes through the handle through the rectangular hole, it is connected to the lower end of the handle through a pin.
[0011] Furthermore, a semicircular arc groove is provided at the bottom of the handle to facilitate the movement of the movable rod.
[0012] Furthermore, the two fixed rods and the movable rod serve as three support rods for clamping the wafer; the angles between the three support rods are the same, and grooves are provided at the lower ends of the fixed rods and the movable rods for conveniently clamping the wafer.
[0013] Furthermore, the top of the fixing rod is an inclined surface, which is used for the fixing rod to be connected and fixed to the handle at a set inclination angle; and the top of the fixing rod is provided with a mounting hole for the handle.
[0014] Furthermore, the top of the handle is chamfered for easy holding.
[0015] Furthermore, the upper end of the handle and the upper end of the movable rod are both provided with convex holes for connecting and fixing the spring.
[0016] The advantages of the utility model are as follows:
[0017] This solution uses springs to provide clamping force, so even first-time users can master it. There is no need to manually control the clamping force. Too much clamping force will damage the wafer, and too little clamping force will cause instability. Secondly, there are grooves at the bottom of the movable rod and the fixed rod, which can fix the wafer on the fixture, and it can still be stable on the fixture when the clamping force changes slightly. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 The fixture structure diagram.
[0019] Figure 2 This is the pin connection structure diagram;
[0020] (a) Front view, (b) Side view.
[0021] Figure 3 This is the spring connection structure diagram.
[0022] Figure 4 This is the bolt connection structure diagram.
[0023] Figure 5 This is the handle structure diagram;
[0024] (a) Front view, (b) Side view.
[0025] Figure 6 This is the structural diagram of the fixed rod;
[0026] (a) Front view, (b) Side view.
[0027] Figure 7 It is the structure diagram of the movable rod;
[0028] (a) Front view, (b) Side view.
[0029] Figure numerals: 1-movable rod, 2-fixed rod, 3-handle, 4-bolt, 5-spring. DETAILED DESCRIPTION
[0030] The present invention will be described in further detail below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.
[0031] The wafer cleaning fixture of the present application includes two fixed rods, a movable rod, a spring, a bolt, and a handle. Figure 1 The movable rod is connected to the lower end of the handle through a pin. Figure 2 As shown, the upper end of the handle is connected to the movable rod through a spring, and the upper end of the handle and the upper end of the movable rod are respectively provided with convex holes for connecting and fixing the spring. Figure 3 The bottom of the fixed rod is connected to the handle with bolts as shown in Figure 4 When the two fixed rods and the movable rod are installed, the three angles are 120 degrees, ensuring that the forces at three points on the wafer form an equilateral triangle.
[0032] The handle is a long rectangular structure with a rectangular hole in the middle to facilitate the installation of the movable rod through the handle. The bottom is opened with a semi-circular groove to facilitate the movement of the movable rod. Figure 4 , Figure 5 As shown. The four sides of the handle are chamfered for easy holding. The top of the fixed rod is an inclined surface. In order to ensure the relative angle of the three clamping rods and the size of the clamped silicon wafer, there is a mounting hole for the handle at the top of the fixed rod, as shown in the figure. Figure 6 The upper end of the movable rod is a convex hole for installing the spring, the middle through hole is used to connect with the handle, as a pin structure, and the lower end groove is also convenient for clamping, such as Figure 7 shown.
[0033] The method of using the wafer clamp of the utility model is as follows: increase the angle between the movable rod and the grip, place the wafer in the groove of the fixed rod, use the spring's resilience to tighten the wafer, and then place it in the solution for vibration cleaning. When the spring's elasticity decreases after repeated use and it cannot be clamped, you can manually tighten the grip and the movable rod to provide a tightening force in the short term, and then you can replace the spring.
[0034] Although the specific embodiments of the present invention are disclosed for the purpose of illustration, the purpose is to help understand the content of the present invention and implement it accordingly. Those skilled in the art can understand that various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the attached claims. Therefore, the present invention should not be limited to the content disclosed in the best embodiment, and the scope of protection claimed by the present invention shall be based on the scope defined in the claims.
Claims
1. A wafer cleaning fixture, characterized in that: Includes two fixed rods, one movable rod, spring, bolt and grip; The movable rod is connected to the lower end of the handle via a pin; the upper end of the handle is connected to the upper end of the movable rod via a spring; The bottoms of the two fixed rods are respectively connected and fixed to the bottoms of the handles, and the angles between the two fixed rods and the movable rods are equal, so as to ensure that the force on the wafer to be clamped between each fixed rod and the movable rod is the same.
2. The wafer cleaning fixture according to claim 1, characterized in that: The handle is a long rectangular structure with a rectangular hole in the middle; after the movable rod passes through the handle through the rectangular hole, it is connected to the lower end of the handle through a pin shaft.
3. The wafer cleaning fixture according to claim 2, characterized in that: A semicircular arc groove is provided at the bottom of the handle to facilitate the movement of the movable rod.
4. The wafer cleaning fixture according to claim 1, 2 or 3, characterized in that: The two fixed rods and the movable rod serve as three supporting rods for the wafer to be clamped; the angles between the three supporting rods are the same, and grooves are provided at the lower ends of the fixed rods and the movable rods for conveniently clamping the wafer.
5. The wafer cleaning fixture according to claim 1, 2 or 3, characterized in that: The top of the fixing rod is an inclined surface, which is used for the fixing rod to be connected and fixed with the handle according to a set inclination angle; the top of the fixing rod is provided with a mounting hole for the handle.
6. The wafer cleaning fixture according to claim 1, 2 or 3, characterized in that: The top of the handle is chamfered for easy holding.
7. The wafer cleaning fixture according to claim 1, 2 or 3, characterized in that: The upper end of the handle and the upper end of the movable rod are both provided with convex holes for connecting and fixing the spring.