Ion beam polishing machine based on vacuum mechanical arm

Abstract

The utility model relates to the technical field of ion beam polishing equipment, in particular to an ion beam polishing machine based on a vacuum mechanical arm, and the ion beam polishing machine based on the vacuum mechanical arm realizes conveying of workpieces between a main vacuum chamber and an auxiliary vacuum chamber through the vacuum mechanical arm arranged in the main vacuum chamber. The vacuum mechanical arm can work in the vacuum environment, the vacuum degree needed by ion beam machining is not damaged, and compared with a numerical control machine tool, the vacuum mechanical arm is convenient to use, low in cost and higher in flexibility.

Description

Technical Field

[0001] The utility model relates to the technical field of ion beam polishing equipment, in particular to an ion beam polishing machine based on a vacuum mechanical arm. Background Art

[0002] Ion beam polishing is a polishing technology that uses physical collision methods. It uses a neutral ion beam to bombard the surface of the workpiece to remove atoms or molecules in a certain area of ​​the workpiece surface, thereby achieving high-precision correction of the workpiece surface and achieving the purpose of ultra-smooth polishing. The ion beam polishing equipment is relatively complex and mainly consists of three parts: vacuum system, ion source, and ion source motion system. The vacuum system provides a certain vacuum working environment for ion beam polishing. The ion source provides a neutral ion beam for ion beam polishing. The ion source motion system is completed by a five-axis CNC system to ensure that the ion beam can bombard any part of the workpiece surface.

[0003] The ion beam polishing process can be summarized as follows: first, pre-polish the workpiece surface to a certain accuracy and detect the surface accuracy. Then, based on the workpiece surface accuracy detection data and the material removal function, calculate the ion beam residence time matrix and convert it into a local velocity map of a complex positioning system corresponding to a multi-axis system. Finally, the ion beam is controlled by a CNC machine tool to move according to the velocity map.

[0004] The vacuum system provides a certain vacuum working environment for ion beam polishing. In order to improve work efficiency and avoid frequent inflation and deflation of the vacuum chamber due to the placement and removal of workpieces, the vacuum system adds a secondary vacuum chamber on the basis of the original main vacuum chamber to form a double vacuum chamber ion beam polisher, in which the main vacuum chamber is also called the processing chamber, which is used for ion beam processing and is equipped with a CNC machine tool motion system. It has a large volume to ensure sufficient movement space for the ion source; the secondary vacuum chamber is also called the loading and unloading chamber, which is used for loading and unloading workpieces and has a smaller volume. The double vacuum chamber ion beam polisher requires a workpiece transport device to enable the workpiece to travel back and forth between the main vacuum chamber and the secondary vacuum chamber. The placement and removal of the workpiece can be achieved by only inflating and deflation of the secondary vacuum chamber with a smaller volume, which improves production efficiency.

[0005] However, CNC machine tools often need to design CNC machine tool motion systems according to the workpieces being processed, which are not very versatile and have high costs. CNC machine tools have high requirements on the quality of operators and even higher technical requirements on maintenance personnel. At the same time, a transport device is required to transport the workpiece between the main vacuum chamber and the auxiliary vacuum chamber. Therefore, the structure of the double vacuum chamber ion beam polisher is more complicated. It can be seen that the structural composition of the ion beam polisher is relatively complex. In the prior art, CNC machine tools are not very versatile and have high costs. It is difficult to transport the workpiece between the main vacuum chamber and the auxiliary vacuum chamber. Utility Model Content

[0006] The utility model provides an ion beam polishing machine based on a vacuum mechanical arm to solve the problems in the prior art that CNC machine tools are not versatile, have high costs, and are difficult to transport workpieces between a main vacuum chamber and a secondary vacuum chamber.

[0007] In order to achieve the above purpose, the utility model is implemented through the following technical solutions:

[0008] The utility model provides an ion beam polishing machine based on a vacuum mechanical arm, comprising: a main vacuum chamber, a secondary vacuum chamber, and a vacuum mechanical arm arranged in the main vacuum chamber, wherein the main vacuum chamber and the secondary vacuum chamber are connected through a plug valve, and the main vacuum chamber and the secondary vacuum chamber are connected and isolated by opening and closing the plug valve.

[0009] Optionally, it also includes an ion source and a workpiece fixture, wherein the ion source is arranged at the end of the vacuum robot arm, and the workpiece fixture is arranged in the auxiliary vacuum chamber.

[0010] Optionally, the workpiece clamp includes a first clamping plate and a second clamping plate vertically connected to the first clamping plate, the first clamping plate is provided with M clamping parts, M is a positive integer greater than or equal to 1, and the workpiece clamp clamps the workpiece through the M clamping parts.

[0011] Optionally, the space size of the secondary vacuum chamber is larger than the movement space required by the ion source when processing the workpiece.

[0012] Optionally, it also includes a multi-dimensional force sensor, a force control device, a clamp and an ion source, the multi-dimensional force sensor is arranged at the end of the vacuum robot arm, one end of the force control device is connected to the multi-dimensional force sensor, the other end of the force control device is connected to the clamp, and the ion source is arranged in the main vacuum chamber.

[0013] Optionally, a workpiece library is further included, which is arranged in the auxiliary vacuum chamber and is used to place the workpiece clamped by the clamp.

[0014] Optionally, the ion source is detachably fixed in the main vacuum chamber via a bracket.

[0015] Optionally, the number of the auxiliary vacuum chambers is N, where N is a positive integer. When N is greater than or equal to 2, each of the auxiliary vacuum chambers is connected to the main vacuum chamber via a gate valve.

[0016] Optionally, each of the auxiliary vacuum chambers is provided with an exhaust device.

[0017] Optionally, a movable distance of the vacuum robot arm is greater than a distance between the main vacuum chamber and the auxiliary vacuum chamber.

[0018] Beneficial effects:

[0019] The ion beam polishing machine based on the vacuum robot provided by the utility model realizes the transportation of the workpiece between the main vacuum chamber and the auxiliary vacuum chamber by the vacuum robot arranged in the main vacuum chamber. In this way, the operation in a vacuum environment can be realized by the vacuum robot without destroying the vacuum degree required for ion beam processing. Compared with CNC machine tools, the ion beam polishing machine is easy to use, has low cost and greater flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is one of the structural schematic diagrams of an ion beam polishing machine based on a vacuum mechanical arm when the ion source moves in a preferred embodiment of the utility model;

[0021] Figure 2 This is a second structural schematic diagram of an ion beam polishing machine based on a vacuum mechanical arm when the ion source moves according to a preferred embodiment of the utility model;

[0022] Figure 3 This is one of the structural schematic diagrams of a vacuum robot-based ion beam polishing machine when moving a workpiece in a preferred embodiment of the utility model;

[0023] Figure 4 This is the second structural schematic diagram of a preferred embodiment of the utility model when an ion beam polishing machine based on a vacuum mechanical arm moves a workpiece.

[0024] Reference numerals:

[0025] 1. Vacuum chamber; 11. Main vacuum chamber; 12. Auxiliary vacuum chamber; 13. Gate valve; 131. First gate valve; 132. Second gate valve; 121. Auxiliary vacuum chamber 1; 122. Auxiliary vacuum chamber 2; 2. Vacuum robot; 20. Base; 3. Ion source; 30. Ion beam; 4. Workpiece fixture; 41. First workpiece fixture; 42. Second workpiece fixture; 5. Processing workpiece; 51. First processing workpiece; 52. Second processing workpiece; 6. Workpiece library; 61. Workstation; 7. Multi-dimensional sensor; 71. Force control device; 72. Gripper. DETAILED DESCRIPTION

[0026] The technical solution of the utility model is described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0028] The present application provides an ion beam polishing machine based on a vacuum robot, comprising: a main vacuum chamber 11, a secondary vacuum chamber 12, and a vacuum robot 2 arranged in the main vacuum chamber 11, wherein the main vacuum chamber 11 and the secondary vacuum chamber 12 are connected via a gate valve 13, and the main vacuum chamber 11 and the secondary vacuum chamber 12 are connected and isolated by opening and closing the gate valve 13.

[0029] The above-mentioned ion beam polishing machine based on the vacuum robot arm realizes the transportation of the workpiece between the main vacuum chamber 11 and the auxiliary vacuum chamber 12 by the vacuum robot arm 2 arranged in the main vacuum chamber 11. In this way, the operation in a vacuum environment can be realized by the vacuum robot arm 2 without destroying the vacuum degree required for the ion beam 30 processing. Compared with CNC machine tools, it is easy to use, low cost and more flexible.

[0030] See also Figure 1-Figure 2 In one embodiment, a vacuum robot 2 is used to drive the ion source 3 into the auxiliary vacuum chamber 12 for processing, and the auxiliary vacuum chamber 12 is used as a processing chamber, thereby avoiding the use of a workpiece transport device and simplifying the structure of the ion beam polisher.

[0031] Specifically, in this embodiment, the ion beam polishing machine based on the vacuum robot further includes an ion source 3 and a workpiece fixture 4, wherein the ion source 3 is disposed at the end of the vacuum robot 2, and the workpiece fixture 4 is disposed in the auxiliary vacuum chamber 12. The workpiece fixture 4 includes a first clamping plate and a second clamping plate vertically connected to the first clamping plate, wherein the first clamping plate is provided with M clamping portions, where M is a positive integer greater than or equal to 1, and the workpiece fixture 4 clamps the workpiece through the M clamping portions.

[0032] In this way, the main vacuum chamber 11 and the auxiliary vacuum chamber 12 form a vacuum chamber 1 to provide the required vacuum environment for ion beam 30 polishing, wherein the main vacuum chamber 11 is a standby vacuum chamber for the ion source 3, and the auxiliary vacuum chamber 12 is a processing vacuum chamber, that is, the ion beam 30 polishing is performed in the auxiliary vacuum chamber 12. As a convertible embodiment, the number of the auxiliary vacuum chambers 12 includes but is not limited to one, and can be divided into auxiliary vacuum chamber 1 121, auxiliary vacuum chamber 2 122 or even more.

[0033] Specifically, the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are connected through a gate valve 13. When the gate valve 13 is closed, the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are isolated. After the auxiliary vacuum chamber 12 is evacuated to a certain vacuum degree, the gate valve 13 can be opened, and the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are connected. In this way, the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are connected and isolated by opening and closing the gate valve 13, and processing can be achieved in the auxiliary vacuum chamber 12 without affecting the vacuum degree of the main vacuum chamber 11.

[0034] It should be noted that the auxiliary vacuum chamber 1 121 and the auxiliary vacuum chamber 2 122 have independent exhaust devices, which can independently realize the connection and disconnection with the main vacuum chamber 11. The size of the auxiliary vacuum chamber 12 needs to meet the sufficient movement space of the ion source 3 when processing the workpiece therein.

[0035] In one example, the vacuum robot 2 is fixed in the main vacuum chamber 11 through the base 20, and the end of the vacuum robot 2 is equipped with an ion source 3 through a 6-dimensional force sensor. As a convertible embodiment, the vacuum robot 2 can have 1-6 degrees of freedom according to the shape and processing method of the workpiece 5. The vacuum robot 2 can drive the ion source 3 to extend into the auxiliary vacuum chamber 12, and realize the multi-degree-of-freedom movement of the ion source 3 in the auxiliary vacuum chamber 12.

[0036] Among them, the ion source 3 mainly generates a neutral ion beam 30 with a certain energy. Since the ion beam 30 is a rotationally symmetrical shape, the ion beam 30 does not need to rotate around its rotational symmetry center during the ion beam 30 polishing process. Therefore, the 5-DOF vacuum manipulator 2 can meet the ion beam 30 polishing requirements, and the vacuum manipulator 2 drives the ion source 3 to extend into the auxiliary vacuum chamber 12 for processing.

[0037] When in use, the vacuum robot-based ion beam polisher operates as follows:

[0038] S1, the vacuum robot 2 carries the ion source 3 to emit the ion beam 30 and stands by in the main vacuum chamber 11;

[0039] S2, installing the workpiece 5 on the first workpiece fixture 41 in the auxiliary vacuum chamber 12 and closing the chamber door;

[0040] S3, evacuate the auxiliary vacuum chamber 12 to a certain vacuum degree and open the gate valve 13;

[0041] S4, the vacuum robot arm 2 drives the ion source 3 to extend into the auxiliary vacuum chamber 121 to process the workpiece 5 therein;

[0042] S5. During the processing of the first workpiece 51, the first workpiece 51 is mounted on the second workpiece fixture 42 in the auxiliary vacuum chamber 12 and the door of the auxiliary vacuum chamber 12 is closed;

[0043] S6, evacuate the auxiliary vacuum chamber 12 to a certain vacuum degree and open the gate valve 13;

[0044] S7, after the first workpiece 51 is processed, the vacuum robot arm 2 drives the ion source 3 to extend into the auxiliary vacuum chamber 121 to process the second workpiece 52 therein;

[0045] S8, during the processing of the second processing workpiece 52, the first gate valve 131 of the auxiliary vacuum chamber 121 is closed and the auxiliary vacuum chamber 121 is inflated before replacing the first processing workpiece 51;

[0046] S9, repeat step S2 to step S8 until all workpieces are processed.

[0047] In this way, the vacuum robot 2 is used instead of the CNC machine tool to realize the movement of the ion source 3, making the movement of the ion source 3 more flexible. The vacuum robot 2 can even drive the ion source 3 into the auxiliary vacuum chamber 12 for processing, and the auxiliary vacuum chamber 12 is used as a processing chamber, avoiding the use of a workpiece transport device and simplifying the structure of the ion beam polisher.

[0048] See also Figure 3-Figure 4 In another embodiment, a vacuum robot arm 2 is used to clamp the workpiece instead of the workpiece transport device and the ion source five-axis CNC motion system to realize the transfer of the workpiece between the loading and unloading vacuum chamber and the processing vacuum chamber. The relative motion between the processed workpiece 5 and the ion source 3 is realized, which saves the workpiece transport device and the five-axis CNC system and simplifies the structure of the double vacuum chamber ion beam polisher.

[0049] Specifically, in this embodiment, the above-mentioned ion beam polishing machine based on the vacuum manipulator further includes a multi-dimensional force sensor 7, a force control device 71, a clamp 72 and an ion source 3, wherein the multi-dimensional force sensor 7 is arranged at the end of the vacuum manipulator 2, one end of the force control device 71 is connected to the multi-dimensional force sensor 7, and the other end of the force control device 71 is connected to the clamp 72, and the ion source 3 is arranged in the main vacuum chamber 11. Specifically, the ion source 3 is detachably fixed in the main vacuum chamber 11 by a bracket. In this way, the ion source 3 can be flexibly disassembled.

[0050] In this embodiment, the main vacuum chamber 11 is a processing vacuum chamber 1, and the auxiliary vacuum chamber 12 is a loading and unloading vacuum chamber 1. The main vacuum chamber 11 and the auxiliary vacuum chamber 12 are connected by a gate valve 13. When the gate valve 13 is closed, the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are isolated, and the auxiliary vacuum chamber 12 can be opened after inflation to replace the workpiece without affecting the vacuum degree and processing progress in the main vacuum chamber 11. After the workpiece is replaced and the auxiliary vacuum chamber 12 is evacuated to a certain vacuum degree, the gate valve 13 can be opened, and the main vacuum chamber 11 and the auxiliary vacuum chamber 12 are connected.

[0051] In this embodiment, the vacuum robot arm 2 is fixed to the main vacuum chamber 11 and has 6 degrees of freedom. A 6-dimensional force sensor is installed at the end of the robot arm. A clamp 72 for clamping the workpiece is installed at the other end of the 6-dimensional force sensor. The clamping force of the clamp 72 can be controlled by a force control device 71.

[0052] The above-mentioned ion beam polishing machine based on vacuum robot also includes a workpiece library 6, which is arranged in the auxiliary vacuum chamber 12 and is used to place the workpiece clamped by the clamp 72. The workpiece library 6 includes a plurality of workstations 61, which can place a plurality of workpieces.

[0053] In this embodiment, when the gate valve 13 is opened, the vacuum robot arm 2 can be extended into the auxiliary vacuum chamber 12, and the workpiece on the workpiece storage 6 can be clamped by the clamping claw 72, and then the vacuum robot arm 2 is retracted into the main vacuum chamber 11 to realize the workpiece transportation from the auxiliary vacuum chamber 12 to the main vacuum chamber 11. When the processing is completed, the vacuum robot arm 2 transports the workpiece from the main vacuum chamber 11 back to the auxiliary vacuum chamber 12 and places it on the workpiece storage 6.

[0054] Among them, using the vacuum robot 2 to clamp the workpiece instead of the workpiece transporting equipment means: after the vacuum robot 2 transports the workpiece from the workpiece storage 6 of the auxiliary vacuum chamber 12 to the main vacuum chamber 11, the vacuum robot 2 controls the processed workpiece 5 to move according to the speed diagram, while the ion source 3 is fixed, thereby converting the five-axis CNC system driving the ion source 3 to move relative to the processed workpiece 5 into the vacuum robot 2 driving the processed workpiece 5 to move relative to the ion source 3.

[0055] When in use, the ion beam polishing machine based on a vacuum robot operates as follows:

[0056] S1. Open the auxiliary vacuum chamber 12 and place the workpiece on the workpiece storage 6.

[0057] S2, close the auxiliary vacuum chamber 12 and evacuate the chamber.

[0058] S3, open the gate valve 13, the vacuum robot arm 2 extends to the auxiliary vacuum chamber 12, and uses the force-controlled clamping claw 72 to clamp the workpiece on the workstation 61 of the workpiece storage 6.

[0059] S4, the vacuum robot arm 2 drives the workpiece to retract to the main vacuum chamber 11 and places the workpiece at the initial machining coordinate position.

[0060] S5. The vacuum robot arm 2 drives the workpiece to move relative to the ion beam 30 according to the calculated velocity diagram to perform processing until the processing is completed.

[0061] S6 . The vacuum robot arm 2 returns the processed workpiece to the original workstation 61 of the workpiece storage 6 in the auxiliary vacuum chamber 12 .

[0062] S7 . The vacuum robot arm 2 clamps the workpiece at another workstation 61 .

[0063] S8. Repeat steps S3 to S6 until all workpieces are processed.

[0064] S9 , the vacuum robot arm 2 retracts to the main vacuum chamber 11 .

[0065] S10, closing the gate valve 13, and inflating the auxiliary vacuum chamber 12 to atmospheric pressure.

[0066] S11. Open the auxiliary vacuum chamber 12 and remove the workpiece.

[0067] It should be noted that, in this embodiment, the number of the auxiliary vacuum chambers 12 may be multiple, and the implementation method is consistent with the above steps, which will not be described in detail here.

[0068] In this way, the vacuum robot arm 2 is used to clamp the workpiece instead of the workpiece transporting equipment and the five-axis CNC motion system of the ion source, so that the workpiece can be transferred between the loading and unloading vacuum chamber 1 and the processing vacuum chamber 1, and the relative movement of the workpiece and the ion source 3 can be realized, which saves the workpiece transporting equipment and the five-axis CNC system and simplifies the structure of the double vacuum chamber ion beam polishing machine.

[0069] In summary, the traditional ion beam polisher has a main vacuum as a processing chamber, a secondary vacuum chamber as a loading and unloading vacuum chamber, and requires a workpiece transport mechanism to realize the transportation of the processed workpiece 5 between the two vacuum chambers, and a five-axis numerical control system controls the movement of the ion source relative to the processed workpiece 5 (the processed workpiece 5 is stationary during processing). In the present application, in one implementation, when the vacuum manipulator 2 moves the ion source 3, the vacuum manipulator 2 replaces the ion source movement numerical control system. The secondary vacuum chamber is the processing chamber, and the main vacuum chamber is the ion source standby chamber. During processing, the vacuum manipulator 2 drives the ion source 3 to extend to the secondary vacuum chamber for processing, and no workpiece transportation is required. In another way, when the vacuum manipulator 2 moves the processed workpiece 5, the main vacuum chamber is still the processing chamber, and the secondary vacuum chamber is still the loading and unloading chamber. While the vacuum manipulator 2 assumes the function of transporting the processed workpiece 5, it also assumes the role of the numerical control system, that is, drives the processed workpiece 5 to move relative to the ion source 3 (the ion source 3 is stationary during processing).

[0070] The preferred specific embodiments of the utility model are described in detail above. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the utility model without creative work. Therefore, all technical solutions that can be obtained by technicians in this technical field based on the concept of the utility model through logical analysis, reasoning or limited experiments on the basis of the existing technology should be within the scope of protection determined by the claims.

Claims

1. An ion beam polishing machine based on a vacuum manipulator, characterized in that: include: A main vacuum chamber (11), a secondary vacuum chamber (12), and a vacuum robot arm (2) arranged in the main vacuum chamber (11); the main vacuum chamber (11) and the secondary vacuum chamber (12) are connected via a gate valve (13); and the main vacuum chamber (11) and the secondary vacuum chamber (12) are connected and isolated by opening and closing the gate valve (13).

2. The ion beam polishing machine based on a vacuum manipulator according to claim 1, characterized in that: It also includes an ion source (3) and a workpiece fixture (4), wherein the ion source (3) is arranged at the end of the vacuum mechanical arm (2), and the workpiece fixture (4) is arranged in the auxiliary vacuum chamber (12).

3. The ion beam polishing machine based on a vacuum manipulator according to claim 2, characterized in that: The workpiece clamp (4) comprises a first clamping plate and a second clamping plate vertically connected to the first clamping plate, the first clamping plate is provided with M clamping parts, M is a positive integer greater than or equal to 1, and the workpiece clamp (4) clamps the workpiece via the M clamping parts.

4. The ion beam polishing machine based on a vacuum manipulator according to claim 2, characterized in that: The space size of the auxiliary vacuum chamber (12) is larger than the movement space required by the ion source (3) when processing a workpiece.

5. The ion beam polishing machine based on a vacuum manipulator according to claim 1, characterized in that: The invention also includes a multi-dimensional force sensor, a force control device (71), a clamp (72) and an ion source (3), wherein the multi-dimensional force sensor is arranged at the end of the vacuum mechanical arm (2), one end of the force control device (71) is connected to the multi-dimensional force sensor, and the other end of the force control device (71) is connected to the clamp (72), and the ion source (3) is arranged in the main vacuum chamber (11).

6. The ion beam polishing machine based on a vacuum manipulator according to claim 5, characterized in that: It also includes a workpiece library (6), which is arranged in the auxiliary vacuum chamber (12) and is used to place the workpiece clamped by the clamp (72).

7. The ion beam polishing machine based on a vacuum manipulator according to claim 5, characterized in that: The ion source (3) is detachably fixed in the main vacuum chamber (11) via a bracket.

8. The ion beam polishing machine based on a vacuum manipulator according to claim 1, characterized in that: The number of the auxiliary vacuum chambers (12) is N, where N is a positive integer. When N is greater than or equal to 2, each auxiliary vacuum chamber (12) is connected to the main vacuum chamber (11) via a gate valve (13).

9. The ion beam polishing machine based on a vacuum manipulator according to claim 8, characterized in that: Each of the auxiliary vacuum chambers (12) is provided with an exhaust device.

10. The ion beam polishing machine based on a vacuum manipulator according to claim 1, characterized in that: The movable distance of the vacuum mechanical arm (2) is greater than the distance between the main vacuum chamber (11) and the auxiliary vacuum chamber (12).

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