Photomask storage box with anti-abrasion structure
By designing anti-wear structures in the optical mask storage box, including anti-wear pads, support rods and clamps, the displacement and wear problems of the optical mask when transporting in the storage box are solved, and the service life of the optical mask is extended.
Patent Information
- Application Number
- CN202420979161.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-08
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-05-08
AI Technical Summary
The optical cover is easily displaced and worn when transported in the storage box, which affects its service life.
A photocapsule storage box with anti-wear structure is designed, including a cover plate, storage box body, anti-wear device, J-shaped rod, L-shaped plate and transparent plate. The anti-wear device is made of anti-wear pad, support rod, and hinged The rod, movable plate, crossbar, spring, limit block, vertical rod, movable plate and clamp are composed. Through the cooperation of these components, the optical cover can be limited and shaken in the storage box to avoid wear.
Effectively prevent the displacement and wear of the mask in the storage box and extend the service life of the mask.
Smart Images
Figure CN222137410U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photomask storage, in particular to a photomask storage box with an anti-wear structure. Background Art
[0002] During the process of making IC, photomask is formed on semiconductor by photo-etching technology. In order to copy the pattern on wafer, the principle of photomask must be used, which is similar to using negative film to copy the image onto the photo when developing photos. In the industry, it is also called photomask or mask. During the transportation of photomask, special tools must be used to ensure that the photomask is not contaminated or damaged. In this context, photomask storage box came into being.
[0003] During the use of the mask storage box, the mask is easily displaced when placed in the box for transportation, so that the mask and the box body rub against each other and wear, which will cause serious wear of the mask and affect the service life of the mask. Therefore, a mask storage box with an anti-wear structure is proposed to solve the above problem. Utility Model Content
[0004] In view of this, the purpose of the utility model is to propose a mask storage box with an anti-wear structure to solve the problem that during the use of the mask storage box, the mask is easily displaced when placed in the box body for transportation, so that the mask and the box body rub against each other and wear, which will cause serious wear of the mask and affect the service life of the mask.
[0005] Based on the above purpose, the utility model provides a mask storage box with an anti-wear structure, comprising a cover plate, a storage box body is arranged outside the cover plate, an anti-wear device is arranged inside the storage box body, a connection box is arranged outside the storage box body, a J-shaped rod is arranged inside the connection box, a first spring is sleeved outside the J-shaped rod, an L-shaped plate is arranged outside the cover plate, and a transparent plate is arranged on the top of the cover plate;
[0006] The anti-wear device includes an anti-wear pad, a support rod, a hinged rod, a movable plate, a cross bar, a second spring, a limit block, a vertical rod, a movable plate, a third spring and a clamping plate. The anti-wear pad is fixedly installed inside the storage box body, the support rod is movably installed inside the storage box body, the support rod is hinged on the outside with a hinged rod, the top of the hinged rod is hinged on the movable plate, the support rod is fixedly installed on the outside with a cross bar, the second spring is sleeved on the outside of the cross bar, the storage box body is fixedly installed with a limit block, the cross bar is fixedly installed on the outside with a vertical rod, the movable plate is fixedly installed on the outside of the vertical rod, the movable plate is fixedly installed on the outside with the third spring, and the third spring is fixedly installed on the outside with a clamping plate.
[0007] Furthermore, the anti-wear pad is located on the inner rear wall of the storage box body, and the front end of the support rod is movably connected to the inner front wall of the storage box body.
[0008] Furthermore, the number of the support rods is two, the number of the hinged rods is two, and the two hinged rods are both hinged to the movable plate.
[0009] Furthermore, the cross bar passes through the limit block and is movably connected to the limit block, and the second spring is fixedly connected to the limit block.
[0010] Furthermore, there are two vertical rods, which are respectively located on the left and right sides of the storage box body.
[0011] Furthermore, the number of the clamping plates is two, the two clamping plates are in a relative state, and the anti-wear pad and the movable plate are distributed in a relative state.
[0012] Furthermore, the L-shaped plate passes through the connection box and extends into the connection box, the J-shaped rod passes through the connection box and extends into the connection box, and the top end of the J-shaped rod passes through the L-shaped plate and is plugged into the L-shaped plate.
[0013] The beneficial effects of the utility model are as follows: when the light shield is placed inside the storage box body, the back of the light shield fits against the anti-wear pad, and the front end fits against the movable plate; the position of the movable plate is adjusted according to the size of the light shield, so that the support rod moves, and the vertical rod is driven to move by the horizontal rod, so that the two splints approach the left and right sides of the light shield at the same time and fit with the light shield; when the anti-wear pad, the movable plate and the two splints are fitted with the light shield at the same time, the position of the light shield inside the storage box body can be limited, and the light shield can be prevented from being worn due to shaking during the movement. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0015] Figure 1 It is a three-dimensional diagram of an embodiment of the utility model;
[0016] Figure 2 It is a top view of an embodiment of the utility model;
[0017] Figure 3 For the utility model embodiment Figure 2 Enlarged view of point A in the middle;
[0018] Figure 4 It is a side view of an embodiment of the utility model.
[0019] The markings in the figure are:
[0020] 1. Cover plate; 2. Storage box body; 3. Anti-wear device; 301. Anti-wear pad; 302. Support rod; 303. Articulated rod; 304. Movable plate; 305. Cross bar; 306. Second spring; 307. Limit block; 308. Vertical rod; 309. Moving plate; 310. Third spring; 311. Clamp; 4. Connecting box; 5. J-shaped rod; 6. First spring; 7. L-shaped plate; 8. Transparent plate. DETAILED DESCRIPTION
[0021] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.
[0022] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0023] like Figure 1 , Figure 4 As shown, the L-shaped plate 7 enters the connection box 4 from the top of the connection box 4, a socket is provided at the bottom end of the L-shaped plate 7, a J-shaped rod 5 passes through the socket and is plugged into the L-shaped plate 7, the J-shaped rod 5 passes through the connection box 4, but a button is installed on the outside of the J-shaped rod 5, and the first spring 6 is fixedly connected to the outside of the connection box 4.
[0024] like Figure 1 , Figure 4 As shown, the transparent plate 8 is located on the top of the cover plate 1 , and the light shield inside the storage box body 2 can be observed through the transparent plate 8 . The storage box body 2 is hinged to the cover plate 1 .
[0025] like Figure 1 , Figure 4 As shown, a slide groove is provided on the inner front wall of the storage box body 2, and sliders are installed on the outside of the support rod 302 and the vertical rod 308. The sliders are slidably connected to the slide groove, and the bottom of the light cover fits with the inner bottom wall of the storage box body 2.
[0026] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.
[0027] The utility model is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.
Claims
1. A mask storage box with an anti-wear structure, comprising a cover plate (1), characterized in that: A storage box body (2) is arranged outside the cover plate (1), an anti-wear device (3) is arranged inside the storage box body (2), a connection box (4) is arranged outside the storage box body (2), a J-shaped rod (5) is arranged inside the connection box (4), a first spring (6) is sleeved on the outside of the J-shaped rod (5), an L-shaped plate (7) is arranged outside the cover plate (1), and a transparent plate (8) is arranged on the top of the cover plate (1); The anti-wear device (3) comprises an anti-wear pad (301), a support rod (302), a hinge rod (303), a movable plate (304), a cross rod (305), a second spring (306), a limit block (307), a vertical rod (308), a movable plate (309), a third spring (310) and a clamping plate (311); the anti-wear pad (301) is fixedly installed inside the storage box body (2); the support rod (302) is movably installed inside the storage box body (2); the support rod (302) is hingedly connected to the outside of the support rod (302); the hinge rod (303) A movable plate (304) is hinged on the top of the support rod (302); a cross bar (305) is fixedly installed on the outside of the support rod (302); a second spring (306) is sleeved on the outside of the cross bar (305); a limit block (307) is fixedly installed on the inside of the storage box body (2); a vertical bar (308) is fixedly installed on the outside of the cross bar (305); a movable plate (309) is fixedly installed on the outside of the vertical bar (308); a third spring (310) is fixedly installed on the outside of the movable plate (309); and a clamping plate (311) is fixedly installed on the outside of the third spring (310).
2. The photomask storage box with a wear-resistant structure according to claim 1, characterized in that: The anti-wear pad (301) is located on the inner rear wall of the storage box body (2), and the front end of the support rod (302) is movably connected to the inner front wall of the storage box body (2).
3. The mask storage box with a wear-resistant structure according to claim 1, characterized in that: The number of the support rods (302) is two, the number of the hinge rods (303) is two, and the two hinge rods (303) are both hinged to the movable plate (304).
4. The mask storage box with a wear-resistant structure according to claim 1, characterized in that: The cross bar (305) passes through the limit block (307) and is movably connected to the limit block (307), and the second spring (306) is fixedly connected to the limit block (307).
5. The mask storage box with a wear-resistant structure according to claim 1, characterized in that: There are two vertical rods (308), and the two vertical rods (308) are respectively located on the left and right sides of the storage box body (2).
6. The photomask storage box with a wear-resistant structure according to claim 1, characterized in that: The number of the clamping plates (311) is two, the two clamping plates (311) are in an opposing state, and the anti-wear pad (301) and the movable plate (304) are distributed in an opposing state.
7. The mask storage box with a wear-resistant structure according to claim 1, characterized in that: The L-shaped plate (7) passes through the connection box (4) and extends into the interior of the connection box (4); the J-shaped rod (5) passes through the connection box (4) and extends into the interior of the connection box (4); the top end of the J-shaped rod (5) passes through the L-shaped plate (7) and is plugged into the L-shaped plate (7).