Evaporation boat and vacuum evaporation coating device
By setting up multiple drainage tanks and melting tanks in the accommodating tank of the evaporation boat, combined with the drainage wire and slope structure, the problem of difficulty in spreading the melting tank of the evaporation boat is solved, extending the service life and improving the stability of the coating.
Patent Information
- Application Number
- CN202420215483.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-29
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-01-29
AI Technical Summary
When used in existing evaporation boats, the liquid targets have poor wetting properties on the boat body and the molten pool is difficult to spread, resulting in overheating, decomposition and cracking, reducing service life, and affecting the quality of film formation.
An evaporation boat was designed, with a melting tank and multiple drainage tanks in its housing tank. The melting tank is connected to the drainage tank. The drainage tank is designed as a drainage melting target material, which expands the melting pool area through the drainage wire and slope structure to reduce dryness. The burning area ensures the stability of the molten pool spreading.
By expanding the area of the melt pool, extending the service life of the evaporation boat, ensuring the stability of the coating, reducing the risk of concentrated boiling of the melt pool, and improving the film formation quality.
Smart Images
Figure CN222139238U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of vacuum coating, and in particular to an evaporation boat and a vacuum evaporation coating device. Background Art
[0002] PVD (Physical Vapor Deposition) technology is one of the main technologies for preparing thin target materials, and vacuum coating is widely used in many fields as a traditional PVD technology. Its process control is simple and the film purity is high. Vacuum coating technology is to contact the metal wire with the evaporation boat, the metal wire will melt and sublimate into metal vapor, and the substrate to be coated will pass over the evaporation boat, and the metal vapor will be deposited on the surface of the substrate as a thin metal layer.
[0003] When the evaporation boat in the related art is in use, the liquid target has poor wettability on the boat body, and the molten pool is difficult to spread. The unspread area of the molten pool is overheated, and the back of the boat body is prone to decomposition and cracking, which reduces the service life. Secondly, the molten liquid is difficult to spread, and there is a risk of concentrated boiling of the molten pool, which in turn affects the film quality. Utility Model Content
[0004] The purpose of the present disclosure is to provide an evaporation boat and a vacuum evaporation coating device, which can solve at least one of the above-mentioned technical problems. The specific solution is as follows:
[0005] According to a specific embodiment of the present disclosure, on the one hand, the present disclosure provides an evaporation boat, which is used for vacuum evaporation coating, and the evaporation boat comprises: an evaporation boat body, and the evaporation boat body is provided with a receiving groove; wherein a melting groove and a first drainage groove are provided at the bottom of the receiving groove, and the first drainage groove is connected to the melting groove, and the depth of the melting groove is greater than the depth of the first drainage groove; the melting groove is configured to melt the target material, and the first drainage groove is configured to drain the molten target material.
[0006] In an optional embodiment, one end of the first drainage groove is connected to the melting groove, and the other end is away from the melting groove.
[0007] In an optional embodiment, there are at least two first drainage grooves.
[0008] In an optional embodiment, a second drainage groove is provided at the bottom of the first drainage groove, and the second drainage groove is connected to the melting groove; the depth of the second drainage groove is substantially the same as the depth of the melting groove.
[0009] In an optional embodiment, the evaporation boat further includes: a drainage wire, the drainage wire is made of metal, one end of the drainage wire is located at the bottom of the melting tank, and the other end of the drainage wire is located in the second drainage tank.
[0010] In an optional embodiment, a first slope is provided at one end of the melting trough close to the first drainage trough.
[0011] In an optional embodiment, a second slope is provided at one end of the accommodating groove.
[0012] In an optional embodiment, a third slope is provided at the other end of the accommodating groove.
[0013] In an optional embodiment, the length of the melting groove is 1 / 3-1 / 2 of the length of the accommodating groove.
[0014] In an optional embodiment, the width of the melting groove is smaller than the width of the accommodating groove.
[0015] In an optional embodiment, the melting groove and the containing groove have a common side wall; the melting groove and the containing groove have a common third slope.
[0016] According to a specific embodiment of the present disclosure, on the other hand, the present disclosure provides a vacuum evaporation coating device, including: an evaporation boat as described in any one of the above technical solutions.
[0017] Compared with the prior art, the above solution of the embodiment of the present disclosure has at least the following beneficial effects:
[0018] The evaporation boat disclosed in the present invention is used for vacuum evaporation coating, and a first drainage groove is arranged in the containing groove, and the metal target material is fed into the melting groove during the wire feeding process. By using the evaporation boat disclosed in the present invention for vacuum evaporation coating, the area of the molten pool can be expanded, the dry burning area can be reduced, and the service life of the evaporation boat can be extended; and the molten pool can be spread stably, thereby ensuring the stability of the coating. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 A schematic diagram of an evaporation boat in the related art is shown.
[0020] Figure 2 Schematic diagrams comparing the evaporation boat in the related art and the evaporation boat molten pool of the present disclosure are shown; wherein, (a) is a schematic plan view of the molten pool of the evaporation boat in the related art; (b) is a schematic plan view of the molten pool of the evaporation boat according to one embodiment of the present disclosure; (c) is a schematic plan view of the molten pool of the evaporation boat according to another embodiment of the present disclosure.
[0021] Figure 3 A schematic diagram of the structure of an evaporation boat according to an embodiment of the present disclosure is shown.
[0022] Figure 4 A schematic diagram of the structure of an evaporation boat according to another embodiment of the present disclosure is shown.
[0023] Figure 5A cross-sectional schematic diagram of an evaporation boat according to an embodiment of the present disclosure is shown.
[0024] Figure 6 A cross-sectional schematic diagram of an evaporation boat according to another embodiment of the present disclosure is shown.
[0025] Figure 7 A schematic diagram of the structure of an evaporation boat according to an embodiment of the present disclosure is shown.
[0026] Reference numerals:
[0027] 100: evaporation boat body; 110: containing groove; 111: melting groove; 112: first drainage groove; 1121: second drainage groove; 1122: drainage wire; 120: first slope; 130: second slope; 140: third slope; 150: molten pool.
[0028] Related technologies:
[0029] 200: evaporation boat; 210: containing tank; 220: molten pool. DETAILED DESCRIPTION
[0030] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0031] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "said" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two.
[0032] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.
[0033] It should be understood that although the terms first, second, third, etc. may be used to describe structures in the disclosed embodiments, these structures should not be limited to these terms. These terms are only used to distinguish different structures. For example, without departing from the scope of the disclosed embodiments, a first component may also be referred to as a second component, and similarly, a second component may also be referred to as a first component.
[0034] As used herein, the words "if" and "if" may be interpreted as "at the time of" or "when" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when it is determined" or "in response to determining" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)", depending on the context.
[0035] It should also be noted that the term "includes", "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, so that a commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the commodity or device including the elements.
[0036] Figure 1 FIG. 2 shows a schematic diagram of an evaporation boat 200 in the related art. Figure 2 (a) shows a schematic plan view of a molten pool 220 of an evaporation boat 200 in the related art. Figure 1 and Figure 2 As shown in (a), the main process of vacuum evaporation coating using the evaporation boat 200 in the related art is as follows: the target material is heated by resistance to evaporate or sublimate it, and becomes gaseous particles (atoms, molecules and atomic groups) with a certain energy; the gaseous particles leaving the target surface and having a considerable movement speed are transported to the substrate surface in a straight line flight without collision; the gaseous particles reaching the substrate surface condense to form nuclei and then grow into a solid phase film; the atoms constituting the film are reorganized or chemically bonded. The basis of this is resistance heating and control of the molten pool 220 to ensure the stability of the evaporation amount and the deposition amount during the film formation process. When the ceramic evaporation boat 200 sold on the market is copper-plated, the molten pool 220 is difficult to spread due to the poor wettability of the copper liquid to the boat body. The unspread area of the molten pool 220 in the accommodating tank 210 is overheated, and the back of the boat body is prone to decomposition and cracking, which reduces the service life. Secondly, the molten liquid is difficult to spread, and there is a risk of concentrated boiling of the molten pool 220, which in turn affects the film quality. In the related art, there is also a method of applying a special evaporation paste for copper plating to improve the surface wettability, but the timeliness of applying the special evaporation paste for copper plating is poor. The evaporation paste coating disappears after one furnace of coating. In addition, the evaporation paste has certain drainage limitations. After application, the molten pool 220 is still difficult to cover, and dry burning decomposition and cracking occur on the back of the boat body.
[0037] In order to solve at least one of the technical problems mentioned above, the present disclosure provides an evaporation boat and a vacuum evaporation coating device, wherein the evaporation boat is used for vacuum evaporation coating, and the evaporation boat may include: an evaporation boat body 100, wherein the evaporation boat body 100 is provided with a receiving groove 110; wherein a melting groove 111 and a first drainage groove 112 are provided at the bottom of the receiving groove 110, wherein the first drainage groove 112 is connected to the melting groove 111, and the depth of the melting groove 111 is greater than the depth of the first drainage groove 112; the melting groove 111 is configured to melt the target material, and the first drainage groove 112 is configured to drain the melted target material. The evaporation boat of the present disclosure is used for vacuum evaporation coating, and the evaporation boat of the present disclosure solves the technical problems mentioned above by redesigning the structure of the receiving groove 110 in the evaporation boat. During the evaporation process, the copper wire is fed to the surface of the evaporation boat in the initial wire feeding stage and melted by heat radiation and heat conduction on the boat surface to form a molten pool 150. At this stage, the wire is difficult to melt and is prone to bending. After a stable molten pool 150 is formed, the copper wire can contact the molten pool 150 and can be melted by heat conduction and heat radiation. The evaporation boat of the present disclosure is slotted at the melting tank 111 so that there is a stable molten pool 150 near the wire feeding point, which is conducive to the melting of the copper wire and further ensures the stability of the coating.
[0038] The optional embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.
[0039] Figure 2 (b) shows a schematic plan view of the molten pool 150 of the evaporation boat according to an embodiment of the present disclosure. Figure 3 A schematic diagram of the structure of an evaporation boat according to an embodiment of the present disclosure is shown. Figure 5 FIG. 4 is a cross-sectional schematic diagram of an evaporation boat according to an embodiment of the present disclosure. Figure 2 (b) Figure 3 and Figure 5As shown, according to a specific embodiment of the present disclosure, on the one hand, an evaporation boat is provided for vacuum evaporation coating, and the evaporation boat may include: an evaporation boat body 100, the evaporation boat body 100 is provided with a receiving groove 110; wherein, a melting groove 111 and a first drainage groove 112 are provided at the bottom of the receiving groove 110, the first drainage groove 112 is connected with the melting groove 111, and the depth of the melting groove 111 is greater than the depth of the first drainage groove 112; the melting groove 111 is configured to melt the target material, and the first drainage groove 112 is configured to drain the melted target material. The evaporation boat of the present disclosure is used for vacuum evaporation coating, and the first drainage groove 112 is provided in the receiving groove 110, and the metal target material is fed into the melting groove 111 during the wire feeding process. By using the evaporation boat of the present disclosure for vacuum evaporation coating, the area of the molten pool 150 can be expanded, the dry burning area can be reduced, and the service life of the evaporation boat can be extended; and the molten pool 150 can be ensured to spread stably, thereby ensuring the stability of the coating. It should be noted that the melting groove 111 is located at one end of the containing groove 110, one end of the first drainage groove 112 is connected to the melting groove 111, and the other end of the first drainage groove 112 extends to (in the containing groove 110) an end away from the melting groove 111. In an optional embodiment, the first drainage groove 112 is a linear groove, one end of which is connected to the melting groove 111 and the other end is away from the melting groove 111.
[0040] Figure 4 FIG. 2 shows a schematic diagram of the structure of an evaporation boat according to another embodiment of the present disclosure. Figure 4 As shown, in some embodiments, there are at least two first drainage grooves 112. Specifically, when there are two first drainage grooves 112, the first drainage grooves 112 are located at both ends of the melting groove 111; when there are multiple first drainage grooves 112, the intervals between the first drainage grooves 112 are roughly the same, and they are evenly arranged in the accommodating groove 110. During the wire feeding process, the target metal wire is fed to the melting groove 111 by the wire feeding mechanism. Through the wire feeding method of this structure, the area of the molten pool 150 can be expanded, the dry burning area can be reduced, and the service life of the evaporation boat can be extended; and the molten pool 150 can be ensured to spread stably, thereby ensuring the stability of the coating. Figure 6 FIG. 4 is a cross-sectional schematic diagram of an evaporation boat according to another embodiment of the present disclosure. Figure 6 As shown, in some embodiments, the bottom of the first drainage groove 112 is provided with a second drainage groove 1121, and the second drainage groove 1121 is connected to the melting groove 111; the depth of the second drainage groove 1121 is substantially the same as the depth of the melting groove 111. Figure 6In the figure, h1 is the depth of the containing groove 110, i.e., the depth from the plane where the opening of the containing groove 110 is located (the top surface of the evaporation boat) to the plane where the bottom of the groove of the containing groove 110 is located; h2 is the depth of the first drainage groove 112, i.e., the depth from the plane where the opening of the containing groove 110 is located (the top surface of the evaporation boat) to the plane where the bottom of the groove of the first drainage groove 112 is located; h3 is the depth of the second drainage groove 1121, i.e., the depth from the plane where the opening of the containing groove 110 is located (the top surface of the evaporation boat) to the plane where the bottom of the groove of the second drainage groove 1121 is located, and h3 can also be the depth of the melting groove 111, i.e., the depth from the plane where the opening of the containing groove 110 is located (the top surface of the evaporation boat) to the plane where the bottom of the groove of the melting groove 111 is located.
[0041] Figure 2 (c) shows a schematic plan view of a molten pool 150 of an evaporation boat according to another embodiment of the present disclosure. Figure 7 FIG. 2 shows a schematic diagram of the structure of an evaporation boat according to another embodiment of the present disclosure. Figure 2 (c) and Figure 7 As shown, in some embodiments, the evaporation boat may further include: a drainage wire 1122, the drainage wire 1122 is made of metal, one end of the drainage wire 1122 is located at the bottom of the melting tank 111, and the other end is located in the second drainage tank 1121. The first drainage tank 112 and the second drainage tank 1121 are opened at the same time, and the copper liquid is drained by capillary action to achieve the effect of filling the molten pool 150; the metal wire (the drainage wire 1122) is placed in the second drainage tank 1121 to further increase the drainage effect, and the copper liquid has good wettability to the metal wire. In an optional embodiment, the material of the drainage wire 1122 can be one or more of tungsten, molybdenum and tungsten-copper alloy.
[0042] Figure 2 Schematic diagrams comparing the evaporation boat in the related art and the evaporation boat melt pool 150 of the present disclosure are shown; wherein (a) is a plan view schematic diagram of the melt pool 150 of the evaporation boat in the related art; (b) is a plan view schematic diagram of the melt pool 150 of the evaporation boat according to one embodiment of the present disclosure; (c) is a plan view schematic diagram of the melt pool 150 of the evaporation boat according to another embodiment of the present disclosure. Figure 2 As shown, (a) shows a schematic plan view of a molten pool 220 of an evaporation boat in the related art, specifically, Figure 2 (a) is an evaporation boat 200 coated with evaporation paste in the related art, and the state of the molten pool 220 when in use: the surface size of the molten pool 220 only occupies about 40-50% of the surface of the accommodating groove 210; Figure 2 (b) shows a schematic plan view of a molten pool 150 of an evaporation boat according to an embodiment of the present disclosure. Specifically, Figure 2(b) The first protrusion and the melting groove 111 are arranged in the containing groove 110, but no drainage wire 1122 is arranged, and only the first drainage groove 112 and the second drainage groove 1121 are arranged in the evaporation boat. When in use, the state of the molten pool 150 is: the surface size of the molten pool 150 occupies about 60-70% of the surface of the containing groove 110; Figure 2 (c) shows a schematic plan view of a molten pool 150 of an evaporation boat according to another embodiment of the present disclosure. Specifically, Figure 2 (c) The first protrusion and the melting groove 111 are arranged in the receiving groove 110, and the evaporation boat with the first drainage groove 112 and the second drainage groove 1121 is opened, and the drainage wire 1122 is placed at the same time. When in use, the state of the molten pool 150 is: the surface size of the molten pool 150 occupies about 90-100% of the surface of the receiving groove 110.
[0043] In some embodiments, the evaporation boat body 100 is a rectangular evaporation boat, and the melting groove 111 and the first drainage groove 112 are respectively located at two ends of the evaporation boat body 100 in the length direction.
[0044] In some embodiments, a first slope 120 is provided at one end of the melting tank 111 close to the first drainage tank 112. In an optional embodiment, a second slope 130 is provided at one end of the containing tank 110. In an optional embodiment, a third slope 140 is provided at the other end of the containing tank 110. Specifically, the side of the containing tank 110 close to the melting tank 111 is the third slope 140, and the side of the containing tank 110 close to the first drainage tank 112 is the second slope 130. By providing a slope structure (the first slope 120, the second slope 130 and the third slope 140), wire feeding is prevented from getting stuck and stress concentration from damaging the boat body. At the same time, during the expansion of the molten pool, the first slope 120, the second slope 130 and the third slope 140 also play a buffering role, so that the resistance of the expansion process of the molten pool is reduced.
[0045] In some embodiments, the length of the melting groove 111 in the length direction is 1 / 3-1 / 2 of the length of the containing groove 110. The present disclosure opens the first drainage groove 112 and the second drainage groove 1121 at the wire feeding point, for example, at 1 / 3 or 1 / 2, so that there is a stable molten pool 150 near the wire feeding point, which is beneficial to the melting of the copper wire and further ensures the stability of the coating.
[0046] In some embodiments, the melting groove 111 and the receiving groove 110 have a common side wall; specifically, the melting groove 111 and the receiving groove 110 have only one common side wall; the melting groove 111 and the receiving groove 110 have a common third slope 140. It should be noted that, except for the side wall having the third slope 140, the other sides of the melting groove 111 are surrounded by the receiving groove 110 (i.e., the receiving groove 110 half surrounds the melting groove 111).
[0047] According to a specific embodiment of the present disclosure, on the other hand, a vacuum evaporation coating device is provided, which may include: an evaporation boat as described in any one of the above embodiments.
[0048] The present disclosure is intended to protect an evaporation boat and a vacuum evaporation coating device, the evaporation boat is used for vacuum evaporation coating, the evaporation boat may include: an evaporation boat body 100, the evaporation boat body 100 is provided with a receiving groove 110; wherein, a melting groove 111 and a first drainage groove 112 are provided at the bottom of the receiving groove 110, the first drainage groove 112 is connected with the melting groove 111, and the depth of the melting groove 111 is greater than the depth of the first drainage groove 112; the melting groove 111 is configured to melt the target material, and the first drainage groove 112 is configured to provide a channel for wire feeding. The evaporation boat of the present disclosure is used for vacuum evaporation coating, the first drainage groove 112 is provided in the receiving groove 110, and the metal target material is fed into the melting groove 111 during the wire feeding process. By using the evaporation boat of the present disclosure for vacuum evaporation coating, the area of the molten pool 150 can be expanded, the dry burning area can be reduced, and the service life of the evaporation boat can be extended; and the molten pool 150 can be ensured to spread stably, thereby ensuring the stability of the coating.
[0049] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.
[0050] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.
Claims
1. An evaporation boat for vacuum evaporation coating. It is characterized in that include: An evaporation boat body, wherein the evaporation boat body is provided with a containing groove; Among them, a melting groove and a first drainage groove are provided at the bottom of the accommodating groove, the first drainage groove is connected to the melting groove, and the depth of the melting groove is greater than the depth of the first drainage groove; the melting groove is configured to melt the target material, and the first drainage groove is configured to drain the melted target material.
2. The evaporation boat according to claim 1, It is characterized in that One end of the first drainage groove is connected to the melting groove, and the other end is far away from the melting groove.
3. The evaporation boat according to claim 2, It is characterized in that There are at least two first drainage grooves.
4. The evaporation boat according to any one of claims 1 to 3, It is characterized in that A second drainage groove is provided at the bottom of the first drainage groove, and the second drainage groove is connected to the melting groove; The depth of the second drainage groove is substantially the same as the depth of the melting groove.
5. The evaporation boat according to claim 4, It is characterized in that Also includes: The drainage wire is made of metal, one end of the drainage wire is located at the bottom of the melting tank, and the other end is located in the second drainage tank.
6. The evaporation boat according to claim 1, It is characterized in that A first slope is provided at one end of the melting trough close to the first drainage trough.
7. The evaporation boat according to claim 1, It is characterized in that A second slope is disposed at one end of the accommodating groove, and a third slope is disposed at the other end of the accommodating groove.
8. The evaporation boat according to claim 1, It is characterized in that The length of the melting tank is 1 / 3-1 / 2 of the length of the containing tank.
9. The evaporation boat according to claim 6, It is characterized in that The width of the melting groove is smaller than the width of the accommodating groove.
10. A vacuum evaporation coating device, It is characterized in that include: The evaporation boat according to any one of claims 1 to 9.