Carrier device for film coating

Abstract

The utility model relates to a carrier device for coating. The carrier device comprises a carrier frame, a loading rod and an adjusting mechanism, the carrying frame is provided with an upper assembling mechanism and a lower assembling mechanism, the upper assembling mechanism is provided with upper assembling parts, the lower assembling mechanism is provided with lower assembling parts, the lower assembling mechanism comprises a lower mounting seat, the lower assembling parts are rotationally mounted on the lower mounting seat, each lower assembling part comprises an assembling shaft, and the assembling shafts are rotationally mounted on the lower mounting seat through bearing assemblies A; the upper end of the assembling shaft is provided with an assembling connecting port used for being detachably assembled and connected with the lower end of the loading rod, the lower end of the assembling shaft is provided with a conductive connecting piece installed in a floating mode, and the conductive connecting piece is assembled with the conductive piece on the lower installation base in an abutting mode when the loading rod rotates. According to the scheme, the conductive connecting piece which is arranged in a floating manner is additionally arranged at the bottom of the assembly shaft and is made of brass, so that the stability of bias voltage in the coating process is ensured. In addition, the two ends of the assembling shaft are positioned through a bearing assembly A, so that deflection and jamming of the loading rod during operation are prevented.

Description

Technical Field

[0001] The utility model relates to the field of film coating, in particular to a carrier device for film coating. Background Art

[0002] In vacuum coating, a carrier is required to load the workpiece to be coated. Reliable loading of the workpiece and proper posture adjustment of the workpiece to be coated during the coating process have a great impact on the coating quality of the workpiece. When the product is coated, the ions of the target material are scattered in a trumpet-shaped form along a specific direction. The carrier device for loading the coated product needs to rotate to ensure that the product surface can be coated all around and the film layer is uniform. In addition, for products with relatively small dimensions, more rotatable loading rods need to be set for product loading in order to increase the loading capacity and reduce costs. The carrier devices currently used have problems such as jamming, poor rotation, and unstable bias during the coating process, resulting in uneven coating on the product surface and low yield rate. The reason for the analysis is that the carrier devices currently used do not fully consider the deflection of the loading rod when rotating after the load is added, which causes the loading rod to rub against the mating parts and increase the resistance; in addition, the bearing for rotating assembly has a retainer, and the radial pressure caused by the deflection causes the retainer to deform, resulting in jamming during operation, affecting the coating quality and efficiency. Therefore, it is necessary to solve this problem. Utility Model Content

[0003] The purpose of the utility model is to provide a coating carrier device, which can be used to solve the above-mentioned problems and improve the quality and reliability of workpiece coating.

[0004] The technical solution adopted by the utility model is specifically as follows.

[0005] A carrier device for coating, characterized in that: it includes a carrier, on which are provided loading rods rotatably installed for loading workpieces and an adjusting mechanism for adjusting the rotation of each loading rod; the carrier has an upper assembly mechanism and a lower assembly mechanism correspondingly arranged at the upper and lower parts, the loading rod is assembled between the upper assembly mechanism and the lower assembly mechanism, the upper assembly mechanism has upper assembly parts, the lower assembly mechanism has lower assembly parts, and the two ends of the loading rod are respectively detachably assembled and connected with the upper assembly part and the lower assembly part; the lower assembly mechanism includes a lower mounting seat, each lower assembly part is rotatably installed on the lower mounting seat, and the adjusting mechanism is transmission-connected with each lower assembly part; the lower assembly part includes an assembly shaft, which is rotatably installed on the lower mounting seat through an A-bearing assembly, the upper end of the assembly shaft is provided with an assembly connection port for detachably assembling and connecting with the lower end of the loading rod, and the lower end of the assembly shaft is provided with a floatingly installed conductive connector, which is assembled against the conductive connector on the lower mounting seat when the loading rod rotates.

[0006] The specific solution is: an assembly hole is set at the lower end of the assembly shaft, the conductive connecting piece is composed of a ball set at the mouth of the assembly hole, a compression spring is set in the assembly hole, and the compression spring drives the ball to roll and abut against the conductive piece on the lower mounting seat for assembly.

[0007] The balls are made of brass.

[0008] The lower mounting seat comprises an A upper plate and an A lower plate which are arranged correspondingly at the upper and lower parts. The A lower plate constitutes the conductive member. The ball bearings and the A lower plate are assembled by rolling against each other.

[0009] The A bearing assembly includes an A deep groove ball bearing and an A thrust ball bearing. The two sections of the assembly shaft are rotationally assembled through the A deep groove ball bearing, the A thrust ball bearing, the A upper plate, and the A lower plate.

[0010] A B assembly tube is provided in the middle of the A upper plate, and the adjustment mechanism includes A gears respectively provided on each assembly shaft and B gears rotatably assembled on the B assembly tube through a B bearing assembly, each A gear is located on the outside of the B gear and is meshed and connected with the B gear for transmission, and the A gears and the B gears are both located between the A upper plate and the A lower plate.

[0011] There is a gap of 1 to 2 mm when gear A and gear B are meshed and connected.

[0012] The B bearing assembly is a B deep groove ball bearing.

[0013] The upper assembly mechanism includes an upper mounting seat, the carrier also includes a central shaft, the lower end of the central shaft is assembled in the B assembly tube, the upper mounting seat includes a B plate body, the upper mounting portion is composed of an outer sleeve installed on the B plate body along its circumferential interval, the upper end of the loading rod and the outer sleeve are rotatably assembled, the middle part of the B plate body is provided with an inner sleeve, the inner sleeve is provided with a locking pin, the upper end of the central shaft is provided with a locking hole, the locking pin and the locking hole cooperate to achieve the locking between the inner sleeve and the central shaft. Specifically, a flat key can be provided on the central shaft, and a locking hole can be provided on the flat key.

[0014] The inner sleeve and the outer sleeve are made of brass material.

[0015] The above solution provided by the utility model adds a floating conductive connector at the bottom of the assembly shaft, and the material is brass, which ensures the stability of the bias voltage during the coating process. In addition, the positioning of the two ends of the assembly shaft through the A bearing assembly can solve the problem of the assembly shaft and other parts causing jamming due to the unstable yaw when the loading rod in the traditional carrier is running. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the utility model.

[0017] Figure 2 It is a schematic diagram of the cross-sectional structure of the lower mounting seat.

[0018] The correspondence between the figure numbers and the components is: 11-center shaft, 12-loading rod, 13-B plate, 14-inner sleeve, 15-outer sleeve, 21-A lower plate, 22-A upper plate, 23-cover body, 24-assembly shaft, 25-A gear, 26-B gear, 27-ball, 28-compression spring, 31-A thrust ball bearing, 32-A deep groove ball bearing, 33-B deep groove ball bearing, 34-spacer, 35-shaft retaining ring, 36-nut, 37-retaining rod. DETAILED DESCRIPTION

[0019] In order to make the purpose and advantages of the utility model more clear, the utility model is specifically described in combination with the following embodiments. It should be understood that the following text is only used to describe one or several specific implementations of the utility model, and does not strictly limit the protection scope of the specific request of the utility model.

[0020] like Figure 1 , 2As shown, a carrier device for coating includes a carrier, on which are provided loading rods 12 rotatably installed for loading workpieces and an adjusting mechanism for adjusting the rotation of each loading rod 12; the carrier has an upper assembly mechanism and a lower assembly mechanism correspondingly arranged at the upper and lower parts, the loading rod 12 is assembled between the upper assembly mechanism and the lower assembly mechanism, the upper assembly mechanism has upper assembly parts, the lower assembly mechanism has lower assembly parts, and the two ends of the loading rod 12 are detachably assembled and connected with the upper assembly part and the lower assembly part respectively; the lower assembly mechanism includes a lower mounting seat, each lower assembly part is rotatably installed on the lower mounting seat, and the adjusting mechanism is transmission-connected with each lower assembly part; the lower assembly part includes an assembly shaft 24, which is rotatably installed on the lower mounting seat through an A-bearing assembly, the upper end of the assembly shaft 24 is provided with an assembly connection port for detachably assembling and connecting with the lower end of the loading rod 12, and the lower end of the assembly shaft 24 is provided with a floatingly installed conductive connector, which is assembled against the conductive connector on the lower mounting seat when the loading rod 12 rotates. The specific scheme is as follows: the lower end of the assembly shaft 24 is provided with an assembly hole, the conductive connecting member is composed of a ball 27 arranged at the mouth of the assembly hole, and a compression spring 28 is arranged in the assembly hole. The compression spring 28 drives the ball 27 to roll against the conductive member on the lower mounting seat for assembly. The lower mounting seat includes an upper plate 22 and a lower plate 21 arranged correspondingly at the upper and lower ends, and the lower plate 21 constitutes the conductive member, and the ball 27 and the lower plate 21 roll against each other for assembly. The compression spring 28 and the ball 27 are both made of brass material. The lower plate 21 can also be made of brass material. In the above scheme, a floating conductive connecting member is added to the bottom of the assembly shaft 24, and the material is brass, which increases the conductivity and plays a lubricating role. The compression spring 28 makes the ball 27 always in point contact with the lower plate 21 during the operation of the assembly shaft 24, thereby ensuring the stability of the bias voltage during the coating process. In addition, the setting of the ball 27 prevents the assembly shaft 24 from directly contacting the lower plate 21, thereby reducing the resistance when the assembly shaft 24 rotates.

[0021] A further solution is that the A bearing assembly includes an A deep groove ball bearing 32 and an A thrust ball bearing 31, and the two sections of the assembly shaft 24 are respectively assembled by rotating with the A upper plate 22 and the A lower plate 21 through the A deep groove ball bearing 32 and the A thrust ball bearing 31. The upper and lower ends of the assembly shaft 24 are respectively positioned by the A deep groove ball bearing 32 and the A thrust ball bearing 31, the A thrust ball bearing 31 carries the assembly shaft 24, and the A deep groove ball bearing 32 straightens the assembly shaft 24, and the A deep groove ball bearing 32 does not have a retainer, thereby ensuring that the assembly shaft 24 will not have a large swing, thereby solving the problem of the assembly shaft 24 and other parts rubbing and jamming due to unstable swing when the loading rod 12 in the traditional carrier is running.

[0022] A B assembly tube is provided in the middle of the A upper plate 22, and the adjustment mechanism includes an A gear 25 respectively provided on each assembly shaft 24 and a B gear 26 rotatably assembled on the B assembly tube through a B bearing assembly, each A gear 25 is located on the outside of the B gear 26 and is meshed and transmission-connected with the B gear 26, and the A gear 25 and the B gear 26 are both located between the A upper plate 22 and the A lower plate 21. Preferably, the A gear 25 and the assembly shaft 24 are an integrated structure. There is a gap of 1 to 2 mm when the A gear 25 and the B gear 26 are meshed and transmission-connected. The pitch circle of the meshing of the B gear 26 and the A gear 25 is not on the pitch circle, and there will be a gap of several millimeters when the teeth are meshed, to ensure that the gear biting during operation due to errors in installation and processing will not occur.

[0023] The upper assembly mechanism includes an upper mounting seat, and the carrier also includes a central shaft 11. The lower end of the central shaft 11 is assembled in the B assembly tube. The upper mounting seat includes a B plate 13. The upper mounting portion is composed of an outer sleeve 15 installed on the B plate 13 along its circumferential interval. The upper end of the loading rod 12 and the outer sleeve 15 are rotatably assembled. The middle part of the B plate 13 is provided with an inner sleeve 14, and a locking pin is provided on the inner sleeve 14. The upper end of the central shaft 11 is provided with a locking hole. The locking pin and the locking hole cooperate to achieve the locking between the inner sleeve 14 and the central shaft 11. Specifically, a flat key can be provided on the central shaft 11, and a locking hole is provided on the flat key. The inner sleeve 14 and the outer sleeve 15 are both made of brass material. The lower end of the central shaft 11 and the A upper plate 22 have only up and down and rotational freedom, and the left and right freedom is limited. When a load is added, the central shaft 11 will not jump up and down. The upper end of the central shaft 11 and the B plate 13 are fixed by a flat key and a nut, so as to minimize the transmission of the deflection instability of the central shaft 11 to the loading rod 12. The outer sleeve 15 provided on the B plate 13 can reduce the resistance caused by friction on the one hand, and facilitate installation and have a simple structure on the other hand, solving the problem of increasing the thickness of the B plate 13 due to the provision of bearings in the traditional solution.

[0024] The loading rod 12 is provided with mounting holes for mounting workpieces at intervals on the rod body along its length direction. The workpiece to be coated is loaded on the loading rod 12. Eight loading rods 12 can be provided, which are evenly distributed and installed between the lower mounting seat and the upper mounting seat along the circumferential direction. A lower plate 21 is provided with an A lower countersunk hole for installing an A thrust ball bearing 31 at a corresponding position, and an A upper countersunk hole for installing an A deep groove ball bearing 32 is provided on the lower surface of the A upper plate 22; in order to avoid the situation in the traditional scheme where the radial pressure causes the deformation of the retainer and causes the assembly shaft 24 to become stuck, the deep groove ball bearing in the utility model uses an oil-free and retainer-free model. The lower end of the loading rod 12 is snap-fitted and assembled on the assembly shaft 24, and rotates with the assembly shaft 24. The upper end of the loading rod 12 is inserted into the outer sleeve 15 made of brass material provided on the B plate body 13, and the outer sleeve 15 made of brass material can play a good role in limiting and lubricating. The lower mounting seat also includes a cover body 23, which covers the A upper plate 22 and the A lower plate 21. This prevents carbon ash or target material from being sputtered onto the components inside the lower mounting seat during coating, and prevents the carrier device from not being able to operate normally and losing its basic functions due to this factor. A vacant portion is provided on the cover body, and the vacant portion is used for the upper end of the assembly shaft 24 to pass through and set the assembly connection port. A circular tube arranged concentrically with the vacant portion is provided around the vacant portion. A cover plate is provided (welded) at the lower end of the loading rod 12, and the cover plate covers the upper end of the circular tube. The cover plate can prevent dust from falling into the gap, and avoid causing the components inside the lower mounting seat to operate poorly.

[0025] The B bearing assembly is a B deep groove ball bearing 33, and a baffle 34 is provided on the lower side of the B deep groove ball bearing 33 to prevent impurities from entering the B deep groove ball bearing 33, and the baffle 34 is assembled through a shaft retaining ring 35. The baffle 34 and the shaft retaining ring 35 are assembled on the tube body of the B assembly tube extending to the lower side of the A lower plate 21. The baffle 34 can not only limit the B deep groove ball bearing 33, but also play a role in blocking dust and preventing dust from entering from below. The B gear 26 has a B assembly section, and a part of the B assembly section extends to the outside of the A lower plate 21. The B gear 26 (the B assembly section extending to the outside of the A lower plate 21) is provided with a B threaded hole or an assembly nut, and a baffle rod 37 is provided on the lower side of the A lower plate 21. The baffle rod 37 has a threaded section, and the threaded section and the B threaded hole / assembly nut (specifically, an M5 nut) are assembled to limit the rotation of the B gear 26. The A upper plate 22 and the A lower plate 21 are assembled and connected by stud assemblies arranged at intervals along the circumference of the lower mounting seat. Specifically, 6 sets of stud assemblies can be used to assemble the A upper plate 22 and the A lower plate 21, so that a space for installing the A gear 25 and the B gear 26 is formed between the A upper plate 22 and the A lower plate 21. The end of the stud assembly extending to the outside of the cover body 23 is locked with a nut 36. During actual assembly, after the assembly shaft 24 is assembled, the A upper plate 22 is pressed to the correct position and then the cover body 23 is placed and locked.

[0026] When installing the assembly shaft 24, first place the A thrust ball bearing 31 in the A sink hole, then put in the ball 27 and the compression spring 28, and use the assembly hole at the bottom of the assembly shaft 24 to cover the compression spring 28 to press the ball 27 and limit it. The ball 27 and the A lower plate 21 rotate in point contact to reduce the friction with the A lower plate 21. On the other hand, because the elastic force of the compression spring 28 is relatively small, the resistance to the rotation of the assembly shaft 24 is also relatively small. A step shaft structure A is provided at the lower part of the assembly shaft 24, and the A step shaft structure A is pressed on the upper surface of the A thrust ball bearing 31. The weight of the workpiece to be coated is pressed on the A thrust ball bearing 31, and then transmitted to the A lower plate 21. The upper end of the assembly shaft 24 is inserted into the A deep groove ball bearing 32, and there is a step to limit it. The A upper countersunk hole on the A upper plate 22 is pressed on the upper surface of the A deep groove ball bearing 32. At this time, except for the rotational freedom, the other degrees of freedom of the assembly shaft 24 are constrained, thereby ensuring that the assembly shaft 24 rotates smoothly without obvious deflection. The central shaft rod 11 plays the role of connecting the lower assembly seat and the upper assembly seat, so that the B plate body 13 rotates with the lower assembly seat at the same speed. The lower end of the central shaft rod 11 is assembled in the B assembly tube. The lower end of the central shaft rod 11 has a B step shaft structure. The B step shaft structure is attached to the A upper plate 22. The upper end of the central shaft rod 11 is inserted with a flat key with a threaded hole. The inner sleeve 14 set in the middle of the B plate body is aligned with the flat key with a threaded hole and inserted into the step position of the upper end of the central shaft rod 11. The locking piece on the inner sleeve 14 is aligned with the flat key with a threaded hole, and the locking piece is rotated to press the B plate body 13. When the coating carrier device is assembled on the coating device, the vertically arranged drive shaft on the coating device and the lower end of the B assembly tube are assembled, and the drive shaft and the B assembly tube are detachably plugged and assembled and rotate synchronously. The drive shaft drives the A upper plate 22 to rotate, thereby adjusting each A gear 25 to rotate, thereby driving the loading rod 12 to rotate. After the coating carrier device is assembled, the limiting component set on the coating device has the function of limiting the rotation of the gear lever 37. The specific limiting component can be a vertical rod, so that the B gear 26 remains in a fixed state.

[0027] The above is only a preferred embodiment of the present invention. It should be noted that, for ordinary technicians in the technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. The structures, mechanisms and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A carrier device for coating, Features: The invention comprises a carrier, on which are provided loading rods rotatably installed for loading workpieces and an adjusting mechanism for adjusting the rotation of each loading rod; the carrier comprises an upper assembly mechanism and a lower assembly mechanism which are arranged correspondingly at the upper and lower parts, the loading rod is assembled between the upper assembly mechanism and the lower assembly mechanism, the upper assembly mechanism comprises upper assembly parts, the lower assembly mechanism comprises lower assembly parts, and both ends of the loading rod are detachably assembled and connected with the upper assembly parts and the lower assembly parts respectively; the lower assembly mechanism comprises a lower mounting seat, on which each lower assembly part is rotatably installed, and the adjusting mechanism is transmission-connected with each lower assembly part; the lower assembly part comprises an assembly shaft, which is rotatably installed on the lower mounting seat through an A-bearing assembly, an assembly connection port for detachably assembling and connecting with the lower end of the loading rod is arranged at the upper end of the assembly shaft, and a floatingly installed conductive connecting piece is arranged at the lower end of the assembly shaft, and the conductive connecting piece is assembled against the conductive piece on the lower mounting seat when the loading rod rotates.

2. The film deposition carrier device according to claim 1, Features: The lower end of the assembly shaft is provided with an assembly hole, the conductive connecting piece is composed of a ball arranged at the opening of the assembly hole, a compression spring is arranged in the assembly hole, and the compression spring drives the ball to roll against the conductive piece on the lower mounting seat for assembly.

3. The film deposition carrier device according to claim 1, Features: The balls are made of brass.

4. The film deposition carrier device according to claim 1, 2 or 3, Features: The lower mounting seat comprises an A upper plate and an A lower plate which are arranged correspondingly at the upper and lower parts. The A lower plate constitutes the conductive member. The ball bearings and the A lower plate are assembled by rolling against each other.

5. The film deposition carrier device according to claim 4, Features: The A bearing assembly includes an A deep groove ball bearing and an A thrust ball bearing. The two sections of the assembly shaft are rotationally assembled through the A deep groove ball bearing, the A thrust ball bearing, the A upper plate, and the A lower plate.

6. The film deposition carrier device according to claim 4, Features: A B assembly tube is provided in the middle of the A upper plate, and the adjustment mechanism includes A gears respectively provided on each assembly shaft and B gears rotatably assembled on the B assembly tube through a B bearing assembly, each A gear is located on the outside of the B gear and is meshed and connected with the B gear for transmission, and the A gears and the B gears are both located between the A upper plate and the A lower plate.

7. The film deposition carrier device according to claim 6, Features: There is a gap of 1 to 2 mm when gear A and gear B are meshed and connected.

8. The film deposition carrier device according to claim 6, Features: The B bearing assembly is a B deep groove ball bearing.

9. The film deposition carrier device according to claim 4, Features: The upper assembly mechanism includes an upper mounting seat, and the carrier also includes a central shaft rod. The lower end of the central shaft rod is assembled in the B assembly tube. The upper mounting seat includes a B plate body. The upper mounting portion is composed of an outer sleeve installed on the B plate body along its circumferential interval. The upper end of the loading rod and the outer sleeve are rotatably assembled. An inner sleeve is provided in the middle of the B plate body, and a locking pin is provided on the inner sleeve. A locking hole is provided at the upper end of the central shaft rod. The locking pin and the locking hole cooperate to achieve locking between the inner sleeve and the central shaft rod. Specifically, a flat key can be provided on the central shaft rod, and a locking hole can be provided on the flat key.

10. The film deposition carrier device according to claim 3, Features: The inner sleeve and the outer sleeve are made of brass material.

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