Drying equipment

The combination of vacuum and microwave technology in the drying device addresses slow heat transfer and metal ion contamination issues, achieving rapid and uniform drying of materials by vaporizing water molecules without direct contact with metal structures.

CN222143530UActive Publication Date: 2024-12-10HUNAN WEILANG TECH CO LTD
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Patent Information

Application Number
CN202420580223.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-22
Publication Date
2024-12-10
Estimated Expiration
2034-03-22

AI Technical Summary

Technical Problem

Existing vacuum drying equipment faces challenges with slow heat transfer speed, inconsistent heating synchronization, and the risk of metal ion contamination due to physical heat conduction, which affects vaporization rates and product quality.

Method used

A drying device that combines vacuum and microwave technology, using a microwave generator to emit microwaves into a vacuum chamber, reducing air pressure with a vacuum pump unit, and eliminating the need for direct contact with metal or non-metallic structures to rapidly vaporize water molecules.

Benefits of technology

The device significantly enhances drying efficiency by rapidly vaporizing water molecules, including surface, interstitial, and encapsulated water, while minimizing the risk of metal ion contamination.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The embodiment of the utility model relates to the technical field of microwave heating equipment, in particular to drying equipment which comprises a rack, a vacuum cavity, a microwave generator and a vacuum pump unit, the vacuum cavity is installed on the rack and comprises a containing cavity with an opening and a sealing carrier used for sealing the opening, the sealing carrier is movably connected with the rack, and the microwave generator is installed in the containing cavity. The sealing carrier is used for bearing materials to move into the containing cavity, the microwave generator is connected to the vacuum cavity, and the microwave generator is used for emitting microwaves into the containing cavity; the vacuum pump unit is connected to the vacuum cavity and used for vacuumizing the interior of the containing cavity. The microwave generator is arranged on the containing cavity to provide a microwave drying source with strong energy, then the air pressure in the containing cavity is greatly reduced through the vacuum pump unit, water of materials vibrates and is rapidly gasified, and therefore the drying efficiency of the materials is greatly improved.
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Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of microwave heating equipment, and in particular to a drying equipment. Background Art

[0002] Vacuum drying refers to the process of indirectly heating materials in a space environment below normal pressure, so that water or other solvents in the materials vaporize at the corresponding temperature, thereby reducing the content of water or other solvents in the materials. Allowing materials to obtain heat energy during the drying process in a vacuum environment is one of the important functions of vacuum equipment. Vacuum drying equipment generally uses metal or non-metallic structural workpieces to transfer heat energy to materials. The process of transferring heat energy can be called structural physical heat conduction. The most common ones are heat transfer media including heat transfer oil, hot water, steam, etc. as heat sources; and heat radiation sources including resistance heating rods, far-infrared tubes, ceramic electric heating plates, etc. as heat sources.

[0003] The existing vacuum equipment structure uses physical heat conduction to heat up the material. The material is in full contact with the metal or non-metal workpiece that transfers heat energy to obtain heat energy. First, the heat conduction method generally requires preheating the metal or non-metal workpiece that transfers heat energy in advance to create a certain temperature difference between it and the material, and then transfer the heat energy to the material in the form of heat conduction.

[0004] However, in the process of implementing the embodiments of the present application, the inventors found that: the time required for the heat transfer process is relatively long, the speed of heat transfer by the heat conduction method is relatively slow, and the synchronization and uniformity of the heating of the material are difficult to maintain consistency, which affects the vaporization rate of the material including surface water, interstitial water, capillary water, and encapsulated water; the encapsulated water cannot be completely vaporized. Secondly, in the process of full contact between the material and the metal or non-metallic structure workpiece that transfers heat energy, for some materials with metal ion protection requirements, there is a risk of metal ions being introduced into the material, which in turn affects production output and product quality. Utility Model Content

[0005] The embodiment of the present application provides a drying device that dries quickly and reduces the risk of materials being introduced into metal ions.

[0006] In order to solve the above technical problems, a technical solution adopted in this application is to provide a drying device, comprising:

[0007] frame;

[0008] A vacuum chamber, mounted on the frame, wherein the vacuum chamber comprises a containing cavity with an opening;

[0009] A sealing carrier, the sealing carrier is movably connected to the frame, the sealing carrier is used to carry materials and move them into the accommodating cavity, and the sealing carrier is used to close the opening;

[0010] A microwave generator is connected to the vacuum cavity, and is used to emit microwaves into the accommodating cavity;

[0011] The vacuum pump unit is connected to the vacuum chamber, and the vacuum pump assembly is used to evacuate the interior of the accommodating chamber.

[0012] In some embodiments, the frame includes a main body and a support arm, and two ends of the support arm are respectively connected to the main body and the vacuum chamber;

[0013] The opening is arranged on a side of the accommodating cavity facing the main body, and the sealing carrier can move between the main body and the vacuum chamber.

[0014] In some embodiments, a driving mechanism is further included, wherein the driving mechanism is mounted on the frame, the driving mechanism is connected to the sealing carrier, and the driving mechanism can drive the sealing carrier to move between the main body and the vacuum chamber.

[0015] In some embodiments, a microwave feed port is provided on a side of the vacuum cavity facing away from the opening, and the microwave generator is installed at the microwave feed port.

[0016] In some embodiments, the sealing carrier includes a sealing plate and a material carrier, the material carrier is mounted on a side of the sealing plate facing the vacuum chamber, and the sealing plate is movably connected to the frame;

[0017] The sealing plate is used to close the opening, and the material carrier is used to carry materials.

[0018] In some embodiments, the vacuum pump unit includes a pump body, a tank body and an exhaust pipe. The pump body and the tank body are respectively installed on the frame, and the tank body is connected to the pump body and the accommodating chamber through the exhaust pipe.

[0019] In some embodiments, the air extraction pipe includes a first air extraction pipe and a second air extraction pipe, the first air extraction pipe is connected between the accommodating chamber and the tank body, and the second air extraction pipe is connected between the tank body and the pump body;

[0020] Wherein, a check valve is provided at the connection between the pump body and the second air extraction pipe; and / or,

[0021] A metal bellows is provided at the connection between the tank body and the second air extraction pipe.

[0022] In some embodiments, the vacuum pump unit includes an air inlet pipe, a first end of the air inlet pipe is connected to the accommodating chamber, a second end of the air inlet pipe is connected to the atmosphere, and an air filter is provided at the second end of the air inlet pipe.

[0023] In some embodiments, a condensate outlet is provided at the bottom of the tank body, and the condensate outlet is connected to the outside through a drainage pipe.

[0024] In some embodiments, a controller is further included, wherein the controller is mounted on the frame and is electrically connected to the microwave generator and the vacuum pump unit respectively.

[0025] The beneficial effect of the embodiments of the present application is as follows: Different from the prior art, the drying equipment provided by the embodiments of the present application combines vacuum and microwave technology, and provides a powerful microwave drying source by arranging a microwave generator on the accommodating cavity, and then significantly reduces the air pressure inside the accommodating cavity through a vacuum pump unit. As the boiling point of water decreases after the air pressure drops, and the microwaves cause the water molecules to vibrate and then quickly vaporize, the drying efficiency of the material is significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the drawings without paying creative work.

[0027] Figure 1 is a three-dimensional diagram of a drying device provided in an embodiment of the present application;

[0028] Figure 2 yes Figure 1 A plan view of the drying equipment shown;

[0029] Figure 3 yes Figure 1 A schematic plan view of a vacuum chamber in the drying device shown;

[0030] Figure 4 yes Figure 3 A schematic diagram of the structure of the accommodating cavity in the vacuum cavity shown;

[0031] Figure 5 yes Figure 1 The structural diagram of the vacuum pump unit in the drying equipment shown;

[0032] Figure 6 It is a plan view of the vacuum pump unit shown in the figure.

[0033] Reference numerals:

[0034] 100. Drying equipment;

[0035] 10. Frame; 11. Main body; 12. Support arm;

[0036] 20. vacuum cavity; 21. containing cavity; 210. opening; 220. microwave feed port; 230. air outlet; 240. air inlet; 22. sealing carrier; 221. sealing plate; 222. material carrier;

[0037] 30. Microwave generator;

[0038] 40. Vacuum pump unit;

[0039] 410, pump body;

[0040] 420, tank body; 421, air inlet; 422, air outlet; 423, condensate outlet;

[0041] 430, air extraction pipe; 431, first air extraction pipe; 432, second air extraction pipe;

[0042] 440, check valve;

[0043] 450. Metal bellows;

[0044] 460, drainage pipe;

[0045] 471, first valve body; 472, second valve body; 473, third valve body; 474, fourth valve body;

[0046] 480, intake pipe;

[0047] 490. Air filter;

[0048] 200. Materials. DETAILED DESCRIPTION

[0049] In order to facilitate the understanding of the present application, the present application is described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this specification are for illustrative purposes only.

[0050] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in this specification and in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0051] In view of the technical limitations of existing vacuum equipment, this application is based on the combination of vacuum and microwave technology, and refers to the space physical energy transfer method. Develop equipment that transmits microwaves in a vacuum environment and acts on materials. The equipment does not need to be preheated in advance, and the microwaves can be turned on or off instantly according to process requirements. The microwaves instantly reach the material and the inside of the material, so that the inside and outside of the material simultaneously obtain microwave energy and heat up rapidly, which can make the water in the material, including surface water, interstitial water, capillary water, and encapsulated water, evaporate rapidly. Under the dual effects of the pressure difference and temperature difference between the vacuum environment and the material, the water encapsulated in the material can be completely vaporized and discharged. Under certain conditions, microwaves can realize the physical transmission of energy in space, without relying on any metal or non-metallic structure workpiece to transmit energy to the material, reducing the risk of metal ions being introduced into the material.

[0052] Specifically, see Figure 1 and Figure 2 , Figure 1 FIG. 1 shows a three-dimensional schematic diagram of a drying device 100 according to an embodiment of the present application. Figure 2 The schematic plan view of the drying device 100 is shown. The drying device 100 includes a frame 10, a vacuum cavity 20, a microwave generator 30, a vacuum pump unit 40 and a controller. The vacuum cavity 20, the vacuum pump unit 40 and the controller are all installed on the frame 10. The vacuum cavity 20 is used to accommodate the material 200, the microwave generator 30 and the vacuum pump unit 40 are respectively connected to the vacuum cavity 20, the microwave generator 30 is used to feed microwaves into the interior of the vacuum cavity 20 to heat the material 200, and the vacuum pump unit 40 is used to evacuate the vacuum cavity 20. The controller is electrically connected to the microwave generator 30 and the vacuum pump unit 40, respectively, and is used to control the opening or closing of the microwave generator 30 and the vacuum pump unit 40, so that the water of the material 200 is quickly vaporized, which greatly improves the drying efficiency of the material 200.

[0053] In some embodiments, the frame 10 includes a main body 11 and a support arm 12 , and two ends of the support arm 12 are respectively connected to the main body 11 and the vacuum chamber 20 .

[0054] In some embodiments, the number of the support arms is 2, and the two support arms 12 are arranged opposite to each other. The space between the two support arms 12 is configured as a passage allowing the material 200 to enter and exit.

[0055] In some embodiments, the main body 11 is a frame structure.

[0056] In some embodiments, a plurality of feet are provided at the bottom of the main body 11 , and the plurality of feet are evenly arranged to facilitate fixing the frame 10 to the ground or any other required working platform.

[0057] In some embodiments, universal wheels are provided at the bottom of the main body 11 to facilitate the movement of the frame 10 .

[0058] In some embodiments, the main body 11 is provided with a plurality of heat dissipation holes for dissipating heat for components installed in the main body, for example, for dissipating heat for the pump body and driving mechanism described below.

[0059] In some embodiments, see Figure 3 and Figure 4 The vacuum cavity 20 includes a receiving cavity 21 having an opening 210, and the opening 210 is used to allow the material 200 to enter the receiving cavity 21. The opening 210 is arranged on a side of the receiving cavity 21 facing the main body 11. A microwave feed port 220 is arranged on a side of the vacuum cavity 20 facing away from the opening 210. The microwave generator 30 is installed at the microwave feed port 220 and is used to emit microwaves into the receiving cavity 21 to heat the material 200 accommodated in the receiving cavity 21.

[0060] In some embodiments, the vacuum chamber 20 includes a sealing carrier 22, which is movably connected to the frame 10, and is used to carry the material 200 and move it into the accommodating chamber 21, and the sealing carrier 22 is used to close the opening 210. Specifically, the sealing carrier 22 is disposed between the two support arms 12, and the sealing carrier 22 can move between the main body 11 and the vacuum chamber 20, and the sealing carrier 22 is configured to carry the material 200 and accommodate the material 200 in the accommodating chamber 21, so as to heat the material 200 using microwaves.

[0061] In some embodiments, to facilitate loading of the material 200 onto the sealing carrier 22, the sealing carrier 22 includes a sealing plate 221 and a material carrier 222. The material carrier 222 is installed on the side of the sealing plate 221 facing the vacuum chamber 20. The sealing plate 221 is movably connected to the main body 11 of the frame 10. The sealing plate 221 is used to close the opening 210, and the material carrier 222 is used to carry the material 200.

[0062] In some embodiments, the material carrier 222 is rotatably connected to the sealing plate 21 , so that the material 200 is heated more fully.

[0063] In some embodiments, the sealing plate 221 and the material carrier 222 are both made of non-wave-absorbing and high-temperature-resistant materials, such as glass, polytetrafluoroethylene, or alumina ceramics.

[0064] In order to facilitate the material 200 to enter and exit the accommodating chamber 21, the space between the two support arms 12 is configured to allow the sealing carrier 22 to move. Specifically, in some embodiments, the drying device 100 includes a driving mechanism (not shown), which is installed on the frame 10, and the driving mechanism is connected to the sealing carrier 22, and the driving mechanism can drive the sealing carrier 22 to move between the main body 11 and the vacuum chamber 20. Specifically, the driving mechanism is built into the main body 11, and the controller is electrically connected to the driving mechanism to control the start and stop of the driving mechanism. The output end of the driving mechanism is connected to the sealing plate 221 of the sealing carrier 22, and the driving mechanism is used to drive the sealing plate 221 to rise and fall, so as to carry the material carrier 222 and the material 200 in and out of the accommodating chamber 21.

[0065] It should be noted that the above lifting means that the sealing carrier can move relative to the accommodating cavity along the bottom of the accommodating cavity toward the top of the accommodating cavity, or the sealing carrier can move in a direction close to / away from the opening.

[0066] In some embodiments, the above-mentioned driving mechanism includes a screw transmission mechanism, a cylinder transmission mechanism, an electric cylinder transmission mechanism, etc. As long as the driving mechanism can drive the sealing carrier to rise and fall, it is included in the present application.

[0067] In some embodiments, when the material 200 is contained in the containing cavity 21 , in order to reduce microwave leakage in the containing cavity 21 , a seal and a microwave suppressor (not shown) are provided at the connection between the sealing carrier 22 and the opening 210 . For example, the seal and the microwave suppressor are both installed at the opening 210 .

[0068] In some embodiments, the drying device 100 includes an anti-overshoot structure (not shown), which is connected between the output end of the driving mechanism and the sealing carrier 22 to reduce the risk of excessive movement of the sealing carrier 22 squeezing and damaging the accommodating cavity when the sealing carrier 22 moves in a direction close to the opening 210. In some embodiments, the anti-overshoot structure includes but is not limited to the cooperation of a limiter and a shock-absorbing spring. For example, the limiter is arranged in the accommodating cavity and is arranged close to the opening, one end of the shock-absorbing spring is connected to the sealing carrier, and the other end of the shock-absorbing spring is connected to the output end of the driving structure, so that after the driving mechanism drives the sealing carrier to reach a predetermined position (the sealing carrier abuts against the limiter), the shock-absorbing spring is compressed, the driving mechanism stops moving, and the sealing carrier abuts against the opening under the elastic action of the shock-absorbing spring and then closes the opening.

[0069] In some embodiments, see Figure 5 and Figure 6The vacuum pump unit 40 includes a pump body 410, a tank body 420 and an exhaust pipe 430. The pump body 410 and the tank body 420 are both installed on the frame 10, for example, the pump body 410 and the tank body 420 are both arranged in the main body 11. The pump body 410 is electrically connected to the controller, and the controller is used to control the start and stop of the pump body 410. The tank body 420 is connected to the pump body 410 and the accommodating chamber 21 of the vacuum chamber 20 through the exhaust pipe 430.

[0070] In some embodiments, the air extraction pipe 430 includes a first air extraction pipe 431 and a second air extraction pipe 432, the first air extraction pipe 431 is connected between the accommodating chamber 21 and the tank body 420, and the second air extraction pipe 432 is connected between the tank body 420 and the pump body 410. Specifically, the accommodating chamber 21 is provided with an air outlet 230, and the tank body 420 includes an air inlet 421 and an air outlet 422. The first air extraction pipe 431 is connected between the accommodating chamber 21 and the tank body 420 through the air outlet 230 and the air inlet 421, and the second air extraction pipe 432 is connected between the tank body 420 and the pump body 410 through the air outlet 422, so that the accommodating chamber 21 is evacuated through the pump body 410 to accelerate the vaporization of water in the material 200 placed in the accommodating chamber 21.

[0071] In some embodiments, the pump body 410 is a dry screw vacuum pump.

[0072] In some embodiments, the air inlet 421 is arranged near the bottom of the tank body 420, and the air outlet 422 is arranged near the top of the tank body 420, that is, along the direction of movement of the sealing carrier 22 toward the opening 210, the air outlet 422 is higher than the air inlet 421, which is beneficial to vaporize the impurities and water in the accommodating cavity 21 and filter them to the bottom of the tank body 420 through the first exhaust pipe 431, which is beneficial to protect the pump body 410.

[0073] In some embodiments, a check valve 440 is provided at the connection between the pump body 410 and the second exhaust pipe 432 to reduce the risk of atmospheric reflux into the tank body 420 after the pump body 410 is shut down.

[0074] In some embodiments, a metal bellows 450 is provided at the connection between the second exhaust pipe 432 and the air outlet 422, that is, the metal bellows 450 is connected between the second exhaust pipe 432 and the air outlet 422. On the one hand, the metal bellows 450 can serve as a buffer component to reduce vibration; on the other hand, it can compensate for the displacement caused by the pipeline.

[0075] In some embodiments, a condensate outlet 423 is provided at the bottom of the tank body 420, and the condensate outlet 423 is connected to a drain pipe 460, which is used to discharge condensed water. For example, after the water in the material 200 is vaporized, it enters the tank body 420 through the first exhaust pipe 431, contacts the inner wall of the tank body 420 to form condensed water, and the condensed water is discharged through the drain pipe 460, thereby reducing the risk of water entering the pump body 410 and damaging the pump body 410.

[0076] In some embodiments, the air outlet 230 , the air inlet 240 , the air inlet hole 421 , the air outlet 422 , and the condensate outlet 423 are all flanges.

[0077] In some embodiments, two first valve bodies 471 are spaced apart on the drain pipe 460, and the controller is electrically connected to the two first valve bodies 471 to control the opening and closing of the first valve bodies. During operation, the two valve bodies are opened and closed alternately, so that the condensed water can be continuously discharged without stopping the pump body 410.

[0078] By disposing the tank body 420 between the pump body 410 and the vacuum chamber 20, it is convenient to filter the substances extracted from the accommodating chamber 21, thereby reducing the risk of the substances extracted from the accommodating chamber 21 directly entering the pump body 410, thereby extending the service life of the pump body 410.

[0079] In some embodiments, the vacuum pump unit 40 also includes an air inlet pipe 480, a first end of the air inlet pipe 480 is connected to the interior of the accommodating chamber 21, and a second end of the air inlet pipe 480 is connected to the atmosphere. Specifically, an air inlet port 240 is provided on the accommodating chamber 21, a first end of the air inlet pipe 480 is connected to the air inlet port 240, and a second end of the air inlet pipe 480 is connected to the atmosphere, thereby balancing the air pressure in the accommodating chamber 21 after drying is completed to facilitate the removal of the material 200.

[0080] In some embodiments, an air filter 490 is disposed at the second end of the air inlet pipe 480 to filter the atmosphere, thereby reducing the risk of liquid or impurities in the atmosphere entering the accommodating chamber 21 and affecting the quality of the material 200 .

[0081] In some embodiments, the first air extraction pipe 431 and the air intake pipe 480 are respectively connected to a second valve body 472 and a third valve body 473. The controller is electrically connected to the second valve body 472 and the third valve body 473, respectively, so as to control the opening and closing of the second valve body 472 and the third valve body 473, and further control the opening and closing of the first air extraction pipe 431 and the air intake pipe 480.

[0082] It should be noted that the third valve body is connected between the air filter and the first end of the intake pipe.

[0083] In some embodiments, the first valve body 471 , the second valve body 472 and the third valve body 473 are all pneumatic ball valves.

[0084] In some embodiments, in order to reduce the risk that the third valve body 473 on the air inlet pipe 480 cannot remove the material 200 due to a malfunction, a bypass pipe is connected between the first end of the air inlet pipe 480 and the second end of the air inlet pipe, and a fourth valve body 474 is provided on the bypass pipe, wherein the fourth valve body 474 is a manual valve.

[0085] It can be understood that the bypass pipe is connected between the air filter and the first end of the intake pipe.

[0086] A drying device provided in an embodiment of the present application combines vacuum and microwave technologies. A microwave generator is arranged on the accommodating cavity to provide a powerful microwave drying source, and the air pressure inside the accommodating cavity is greatly reduced through a pump body. The boiling point of water will decrease after the air pressure drops, and the microwaves cause the water molecules to vibrate and then vaporize quickly, thereby greatly improving the drying efficiency of the material.

[0087] It should be noted that the preferred embodiments of the present application are given in the specification and drawings of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described in the specification. These embodiments are not used as additional limitations on the content of the present application. The purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. In addition, the above-mentioned technical features continue to be combined with each other to form various embodiments not listed above, which are all regarded as the scope of the description of the present application; further, for ordinary technicians in this field, they can be improved or transformed according to the above description, and all these improvements and transformations should belong to the scope of protection of the claims attached to the present application.

Claims

1. A drying device, It is characterized in that include: frame; A vacuum chamber, mounted on the frame, wherein the vacuum chamber comprises a containing cavity with an opening; A sealing carrier, the sealing carrier is movably connected to the frame, the sealing carrier is used to carry materials and move them into the accommodating cavity, and the sealing carrier is used to close the opening; A microwave generator is connected to the vacuum cavity, and is used to emit microwaves into the accommodating cavity; The vacuum pump unit is connected to the vacuum chamber, and the vacuum pump assembly is used to evacuate the interior of the accommodating chamber.

2. The drying device according to claim 1, It is characterized in that The frame comprises a main body and a support arm, and two ends of the support arm are respectively connected to the main body and the vacuum chamber; The opening is arranged on a side of the accommodating cavity facing the main body, and the sealing carrier can move between the main body and the vacuum chamber.

3. The drying device according to claim 2, It is characterized in that It also includes a driving mechanism, which is installed on the frame and connected to the sealing carrier. The driving mechanism can drive the sealing carrier to move between the main body and the vacuum chamber.

4. The drying device according to claim 1, It is characterized in that A microwave feed port is provided on a side of the vacuum cavity away from the opening, and the microwave generator is installed at the microwave feed port.

5. The drying device according to claim 1, It is characterized in that The sealing carrier comprises a sealing plate and a material carrier, wherein the material carrier is mounted on a side of the sealing plate facing the vacuum chamber, and the sealing plate is movably connected to the frame; The sealing plate is used to close the opening, and the material carrier is used to carry materials.

6. The drying device according to claim 1, It is characterized in that The vacuum pump unit comprises a pump body, a tank body and an exhaust pipe. The pump body and the tank body are respectively mounted on the frame. The tank body is communicated with the pump body and the accommodating chamber through the exhaust pipe.

7. The drying device according to claim 6, It is characterized in that The air extraction pipe comprises a first air extraction pipe and a second air extraction pipe, wherein the first air extraction pipe is connected between the accommodating chamber and the tank body, and the second air extraction pipe is connected between the tank body and the pump body; Wherein, a check valve is provided at the connection between the pump body and the second air extraction pipe, and / or a metal bellows is provided at the connection between the tank body and the second air extraction pipe.

8. The drying device according to claim 6, It is characterized in that The vacuum pump unit comprises an air inlet pipe, a first end of the air inlet pipe is communicated with the interior of the accommodating chamber, a second end of the air inlet pipe is communicated with the atmosphere, and an air filter is arranged at the second end of the air inlet pipe.

9. The drying device according to claim 6, It is characterized in that A condensate outlet is provided at the bottom of the tank body, and the condensate outlet is communicated with the outside through a drainage pipe.

10. The drying device according to any one of claims 1 to 9, It is characterized in that It also includes a controller, which is installed on the frame and is electrically connected to the microwave generator and the vacuum pump unit.