Graphite boat clamping point, graphite boat sheet and graphite boat

Abstract

The embodiment of the utility model provides a graphite boat clamping point, a graphite boat sheet and a graphite boat. The graphite boat clamping point comprises a clamping point fixing base and a limiting supporting piece arranged on the side edge of the clamping point fixing base, a clamping point limiting groove is formed in the graphite boat clamping point, the groove wall of the clamping point limiting groove comprises a first side wall and a second side wall which are oppositely arranged, the first side wall is arranged on the clamping point fixing base, and the second side wall is arranged on the limiting supporting piece. The first side wall comprises a guide transition area, and the guide transition area gradually shrinks towards the inner side of the groove in the direction from the top end of the clamping point limiting groove to the bottom end of the clamping point limiting groove. According to the graphite boat clamping point, the problem of sheet falling can be solved, and the problem of graphite boat printing on the surface of the sheet to be coated can be effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a graphite boat clamping point, a graphite boat sheet and a graphite boat. Background Art

[0002] A graphite boat is a device that carries the sheet to be coated in the coating equipment. In the current production process of crystalline silicon solar cells, silicon wafers are usually placed in a graphite boat for the coating process. The graphite boat is usually also provided with a card point on the boat sheet, and the card point has a card point limit groove for fixing the sheet to be coated. In the actual preparation process, the sheet to be coated is prone to falling off when it is placed in the card point limit groove, and the sheet to be coated is also prone to graphite boat marks during the actual coating process. Both problems will lead to poor coating. However, in traditional technologies, it is often difficult to take both the chip falling problem and the graphite boat mark problem into account at the same time. Utility Model Content

[0003] Based on this, in order to simultaneously improve the film falling problem and the graphite boat printing problem, and thus improve the coating yield, it is necessary to provide a graphite boat clamping point.

[0004] According to some embodiments of the utility model, a graphite boat clamping point is provided, which includes a clamping point fixing seat and a limiting support member arranged on the side of the clamping point fixing seat, the graphite boat clamping point has a clamping point limiting groove, the groove wall of the clamping point limiting groove includes a first side wall and a second side wall arranged opposite to each other, the first side wall is arranged on the clamping point fixing seat, the second side wall is arranged on the limiting support member, the first side wall includes a guide transition zone, and the guide transition zone gradually shrinks toward the inner side of the groove from the top end of the clamping point limiting groove toward the bottom end of the groove.

[0005] In some embodiments of the present invention, the distance between the top end of the guide transition zone and the bottom end thereof in the width direction of the clamping point limiting groove is 0.1 mm to 0.5 mm.

[0006] In some embodiments of the present invention, the distance between the top end of the guide transition zone and the bottom end thereof in the depth direction of the card point limiting groove is 1.5 mm to 3 mm.

[0007] In some embodiments of the present invention, the bottom end of the guide transition zone is located at the bottom of the card point limiting groove.

[0008] In some embodiments of the present invention, the top end of the second side wall is lower than the top end of the guide transition zone.

[0009] In some embodiments of the present invention, the guide transition zone is in the shape of an inclined surface inclined relative to the width direction of the card point limiting groove.

[0010] In some embodiments of the utility model, the limiting support member includes a support column and a limiting cap, the support column is connected to the card point fixing seat, the limiting cap is connected to the side of the support column away from the card point fixing seat, the second side wall is arranged on the side surface of the limiting cap facing the card point fixing seat, and the card point limiting groove also has a groove bottom wall arranged on the surface of the support column.

[0011] In some embodiments of the present invention, the width of the groove bottom wall is 0.35 mm to 0.45 mm.

[0012] In some embodiments of the present invention, a distance between a top end of the second side wall and a bottom end of the second side wall in a depth direction of the clamping point limiting groove is 0.6 mm to 0.9 mm.

[0013] Furthermore, the utility model also provides a graphite boat sheet, which includes a boat sheet substrate and a graphite boat clamping point as described in any of the above embodiments, wherein a clamping point accommodating hole is provided in the boat sheet substrate, and the clamping point fixing seat of the graphite boat clamping point is provided in the clamping point accommodating hole.

[0014] In some embodiments of the present invention, the guide transition zone is arranged to protrude from the surface of the boat substrate.

[0015] Furthermore, the utility model also provides a graphite boat, which includes a plurality of graphite boat sheets as described in any of the above embodiments.

[0016] Graphite boat marks usually come from the friction between the sheet and the graphite boat. In order to solve the problem of graphite boat marks in traditional technologies, it is usually necessary to design the card point limit groove to be narrower to limit the relative displacement between the sheet and the graphite boat. However, this has a limited effect on improving the graphite boat marks of the sheet, and will also cause new problems of sheet dropping due to the narrow groove width. Designing the width of the card point limit groove to be wider can improve the sheet dropping problem, but it also increases the friction between the silicon wafer and the graphite boat, leading to a more serious graphite boat mark problem. The two problems of graphite boat marks and sheet dropping constrain each other, limiting the further improvement of the coating yield.

[0017] In the graphite boat clamping point of the utility model, there is a clamping point limiting groove in the graphite boat clamping point, and the first side wall of the clamping point limiting groove is arranged on the clamping point fixing seat, and the first side wall includes a guide transition zone. In actual use, the sheet to be coated moves from the top end of the clamping point limiting groove to the bottom end of the groove and is placed on the limiting support. Since the guide transition zone gradually shrinks toward the inner side of the groove, it is equivalent to increasing the notch of the clamping point limiting groove, making it easier for the sheet to be coated to be placed in the clamping point limiting groove, which can improve the problem of sheet falling. At the same time, the gradually shrinking guide transition zone can also reduce the friction between the sheet to be coated and the first side wall, thereby effectively improving the problem of graphite boat printing on the surface of the sheet to be coated. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the front structure of the graphite boat card point;

[0019] Figure 2 for Figure 1 The side structural diagram of the graphite boat stuck point is shown;

[0020] Figure 3 Schematic diagram of the top view of the graphite boat;

[0021] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure of the graphite boat sheet along AA';

[0022] Figure 5 For Figure 4 The schematic diagram of the structure of placing the sheet to be coated on the graphite boat is shown.

[0023] The reference numerals and their meanings are as follows:

[0024] 100, graphite boat clamping point; 101, clamping point limiting groove; 110, clamping point fixing seat; 111, first side wall; 1110, guide transition zone; 120, support column; 121, groove bottom wall; 130, limiting cap; 131, second side wall; 200, boat substrate; 300, sheet to be coated. DETAILED DESCRIPTION

[0025] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively in combination with the embodiments and the effect diagrams. The embodiments provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0026] It should be noted that when an element is referred to as being "fixed" to another element, it may be directly fixed to the other element, or it may be fixed to the other element through an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element, or there may be an intermediate element between the two elements. In addition, in the description of the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integrated connection. For example, it may be a mechanical connection or an electrical connection. For example, it may be a direct connection, an indirect connection through an intermediate element, or the internal connection of the two elements. It should be understood that those skilled in the art can understand the specific meanings of the above terms according to the specific circumstances without causing ambiguity.

[0027] Unless otherwise specified, in the description of the present invention, terms indicating orientation or positional relationship, such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", and "outside", are based on the orientation or positional relationship shown in the drawings of the utility model. They are only for the convenience and simplification of the description of the content of the utility model and to help readers understand the description in conjunction with the drawings. They do not limit or imply a specific orientation that the device or element referred to must have, and therefore should not be understood as a limitation on the present invention.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the implementation of the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. "Multiple" herein includes a combination of two or more than two items.

[0029] The utility model provides a graphite boat clamping point, which comprises a clamping point fixing seat and a limiting support member arranged on the side of the clamping point fixing seat. The graphite boat clamping point is provided with a clamping point limiting groove, and the groove wall of the clamping point limiting groove comprises a first side wall and a second side wall which are arranged opposite to each other, the first side wall is arranged on the clamping point fixing seat, and the second side wall is arranged on the limiting support member. The first side wall comprises a guide transition zone, and from the top end of the clamping point limiting groove toward the bottom end of the groove, the guide transition zone gradually shrinks toward the inner side of the groove.

[0030] Graphite boat marks usually come from the friction between the sheet and the graphite boat. In order to solve the problem of graphite boat marks in traditional technologies, it is usually necessary to design the card point limit groove to be narrower to limit the relative displacement between the sheet and the graphite boat. However, this has a limited effect on improving the graphite boat marks of the sheet, and will also cause new problems of sheet dropping due to the narrow groove width. Designing the width of the card point limit groove to be wider can improve the sheet dropping problem, but it also increases the friction between the silicon wafer and the graphite boat, leading to a more serious graphite boat mark problem. The two problems of graphite boat marks and sheet dropping constrain each other, limiting the further improvement of the coating yield.

[0031] In the graphite boat clamping point of the utility model, there is a clamping point limiting groove in the graphite boat clamping point, and the first side wall of the clamping point limiting groove is arranged on the clamping point fixing seat, and the first side wall includes a guide transition zone. In actual use, the sheet to be coated moves from the top end of the clamping point limiting groove to the bottom end of the groove and is placed on the limiting support. Since the guide transition zone gradually shrinks toward the inner side of the groove, it is equivalent to increasing the notch of the clamping point limiting groove, making it easier for the sheet to be coated to be placed in the clamping point limiting groove, which can improve the problem of sheet falling. At the same time, the gradually shrinking guide transition zone can also reduce the friction between the sheet to be coated and the first side wall, thereby effectively improving the problem of graphite boat printing on the surface of the sheet to be coated.

[0032] In the traditional graphite boat clamping point, the groove wall of the clamping point limit groove located on the clamping point fixing seat is usually vertical, that is, parallel to the depth direction of the clamping point limit groove. This design will inevitably cause a large contact area between the sheet to be coated and the clamping point fixing seat, which leads to the mutual restraint between the two problems of graphite boat imprint and sheet drop. The utility model sets a guide transition on the first side wall that gradually shrinks toward the inner side of the groove, which can better solve the above contradictions and improve the problems of graphite boat imprint and sheet drop at the same time.

[0033] Figure 1 1 is a front structural diagram of a graphite boat clamping point 100. Figure 1 As shown, in this embodiment, the graphite boat card point 100 includes a card point fixing seat 110 and a limiting support member arranged on the side of the card point fixing seat 110, and the graphite boat card point 100 has a card point limiting groove 101, and the groove wall of the card point limiting groove 101 includes a first side wall 111 and a second side wall 131 that are relatively arranged, the first side wall 111 is arranged on the card point fixing seat 110, and the second side wall 131 is arranged on the limiting support member, and the first side wall 111 includes a guide transition zone 1110, and from the top end of the card point limiting groove 101 toward the bottom end of the groove, the guide transition zone 1110 gradually shrinks toward the inner side of the groove.

[0034] It can be understood that the card point limiting groove 101 is used for placing the sheet to be coated and for limiting the movement range of the sheet to be coated, so as to ensure that the sheet to be coated can be stably placed in the card point limiting groove 101. The card point limiting groove 101 has a first side wall 111 and a second side wall 131 arranged opposite to each other. When the sheet to be coated is stably placed in the card point limiting groove 101, the sheet to be coated is located between the first side wall 111 and the second side wall 131.

[0035] Further, refer to Figure 1 As shown, in some examples of this embodiment, the limiting support member includes a support column 120 and a limiting cap 130. The support column 120 is connected to the card point fixing seat 110, and the limiting cap 130 is connected to the side of the support column 120 away from the card point fixing seat 110. The second side wall 131 is arranged on the side surface of the limiting cap 130 facing the card point fixing seat 110, and the card point limiting groove 101 also has a groove bottom wall 121 arranged on the surface of the support column 120.

[0036] It can be understood that the limiting cap 130 and the card point fixing seat 110 are arranged at an interval, and the side surface of the card point fixing seat 110 facing the limiting cap 130 can be used as the first side wall 111, the side surface of the limiting cap 130 facing the card point fixing seat 110 can be used as the second side wall 131, and the surface of the support column 120 can be used as the groove bottom wall 121.

[0037] Figure 2 for Figure 1 The side view of the graphite boat clamping point 100 is shown. Figure 1 and Figure 2 As shown, in some examples of this embodiment, the card point limiting groove 101 can be an annular groove surrounding the support column 120. It can be understood that the bottom end of the annular groove is located on the support column 120, and the top end of the annular groove is the end away from the support column 120. By providing the annular card point limiting groove 101, it is convenient to place the sheet to be placed on the card point fixing seat 110 along multiple directions.

[0038] Combination Figure 1 and Figure 2 As shown, in some examples of this embodiment, the graphite boat clamping point 100 may have a central axis, the graphite boat clamping point 100 is in a rotationally symmetrical structure around the central axis, and the clamping point limiting groove 101 is also in a rotationally symmetrical structure around the central axis. Further, the clamping point fixing seat 110, the support column 120 and the limiting cap 130 may all be in a rotationally symmetrical structure, and the central axes of the clamping point fixing seat 110, the support column 120 and the limiting cap 130 are located on the same straight line.

[0039] It can be understood that the card point limiting groove 101 has a width direction and a depth direction, and the width direction and the depth direction are perpendicular to each other. Figure 1 and Figure 2 As shown, the guide transition zone 1110 gradually shrinks toward the inner side of the groove, and accordingly, there is a spacing d1 between the top of the guide transition zone 1110 and the bottom of the guide transition zone 1110 in the width direction. In some examples of this embodiment, the spacing d1 between the top of the guide transition zone 1110 and its bottom in the width direction is 0.1mm~0.5mm. It can be understood that when the sheet to be coated is placed in the card point limit groove 101, it also has at least a spacing of 0.1mm~0.5mm between it and the top of the guide transition zone 1110, which is equivalent to providing a margin of 0.1mm~0.5mm for the loading and unloading of the sheet to be coated, which can significantly improve the problem of graphite boat printing and reduce the risk of sheet falling of the sheet to be coated.

[0040] Reference Figure 1 As shown, in some examples of this embodiment, the distance d1 between the top end and the bottom end of the guide transition zone 1110 in the width direction can be 0.1mm, 0.15mm, 0.2mm, 0.25mm, 0.3mm, 0.35mm, 0.4mm, 0.45mm, 0.5mm, or the distance d1 between the top end and the bottom end of the guide transition zone 1110 in the width direction can also be in the range between any two of the above distances.

[0041] Reference Figure 1 As shown, in some examples of this embodiment, there is a spacing h1 between the top of the guide transition zone 1110 and the bottom of the guide transition zone 1110 in the depth direction. The spacing h1 between the top of the guide transition zone 1110 and the bottom of the guide transition zone 1110 in the depth direction is 1.5 mm to 3 mm. It can be understood that by setting the spacing h1 between the top of the guide transition zone 1110 and the bottom of the guide transition zone 1110 in the depth direction to be 1.5 mm to 3 mm, the inclination angle of the guide transition zone 1110 relative to the depth direction can be smaller, thereby providing a better guiding effect for the sheet to be coated, and further reducing the risk of the sheet to be coated falling off.

[0042] Reference Figure 1 As shown, in some examples of this embodiment, the distance h1 between the top end and the bottom end of the guide transition zone 1110 in the depth direction can be 1.5mm, 1.6mm, 1.8mm, 2.0mm, 2.1mm, 2.2mm, 2.4mm, 2.6mm, 2.8mm, 3.0mm, or the distance h1 between the top end and the bottom end of the guide transition zone 1110 in the depth direction can also be in the range between any two of the above distances.

[0043] Reference Figure 1As shown, in some examples of this embodiment, the bottom end of the guide transition zone 1110 can be located at the bottom of the card point limiting groove 101, that is, the guide transition zone 1110 is directly connected to the bottom of the card point limiting groove 101. This can further reduce the contact surface between the sheet to be coated and the card point limiting groove 101. It can be understood that in other embodiments, the bottom end of the guide transition zone 1110 can also have an appropriate spacing from the bottom of the card point limiting groove 101.

[0044] Reference Figure 1 As shown, in some examples of this embodiment, the first side wall 111 may be composed only of the guide transition zone 1110, that is, the bottom end of the first side wall 111 is the bottom end of the guide transition zone 1110, and the top end of the first side wall 111 is the top end of the guide transition zone 1110.

[0045] Reference Figure 1 As shown, in some examples of this embodiment, the top of the second side wall 131 is lower than the top of the guide transition zone 1110. It can be understood that by setting the top of the second side wall 131 to be lower than the top of the guide transition zone 1110, the sheet to be coated first contacts the guide transition zone 1110 during the placement process, and slides into the card point limiting groove 101 under the guidance of the guide transition zone 1110, which can make it easier for the sheet to be coated to be aligned in the card point limiting groove 101, further reducing the risk of sheet falling.

[0046] Reference Figure 1 As shown, the width of the groove bottom wall 121 is d2. The width of the groove bottom wall 121 refers to the distance between the connection between the groove bottom wall 121 and the first side wall 111 and the connection between the groove bottom wall 121 and the second side wall 131. In some examples of this embodiment, the width d2 of the groove bottom wall 121 is 0.35mm~0.45mm. For example, the width d2 of the groove bottom wall 121 is 0.35mm, 0.36mm, 0.38mm, 0.4mm, 0.42mm, 0.44mm, 0.45mm, or the width d2 of the groove bottom wall 121 can be between any two of the above width ranges. It can be understood that when the sheet to be coated is placed in the card point limit groove 101, the sheet can directly contact the groove bottom wall 121, and the width of the groove bottom wall 121 is actually directly related to the movable range of the sheet. By setting the width of the groove bottom wall 121 to 0.35 mm to 0.45 mm, the movable range of the sheet is relatively small, so that the probability of friction between the sheet and the first side wall 111 and the second side wall 131 can be further reduced while maintaining the stability of the sheet.

[0047] Reference Figure 1As shown, the top end of the second side wall 131 and the bottom end of the second side wall 131 have a spacing h2 in the depth direction. In some examples of this embodiment, the spacing h2 between the top end of the second side wall 131 and the bottom end of the second side wall 131 in the depth direction is 0.6 mm to 0.9 mm. Controlling the spacing between the top end of the second side wall 131 and the bottom end of the second side wall 131 to be 0.6 mm to 0.9 mm can reduce the contact between the sheet to be coated and the second side wall 131 while ensuring the stable placement of the sheet to be coated, further improving the problem of graphite boat printing.

[0048] Reference Figure 1 As shown, in some examples of this embodiment, the guide transition area 1110 may be in the shape of an inclined surface that is inclined relative to the width direction of the clamping point limiting groove 101. The inclined surface-shaped guide transition area 1110 helps to ensure the smooth sliding of the sheet to be coated. It can be understood that in other embodiments, the guide transition area 1110 may also be in the shape of an outwardly convex curved surface or an inwardly concave curved surface.

[0049] Reference Figure 1 As shown, in some examples of this embodiment, the graphite boat clamping point 100 may include two limiting support members, which are respectively arranged on opposite sides of the clamping point fixing seat 110, and the clamping point fixing seat 110 and the two limiting support members located on both sides respectively form two clamping point limiting grooves 101. Further, the two support limiting members may be symmetrically arranged on both sides of the clamping point fixing seat 110.

[0050] In some examples of this embodiment, the card point fixing seat 110 may be columnar. The radial width of the card point fixing seat 110 may be 8.9 mm to 9.1 mm to match the commonly used graphite boat. Further, the radial width of the card point fixing seat 110 may be 9 mm to 9.05 mm. The radial width of the card point fixing seat 110 refers to the width of the card point fixing seat 110 in a direction perpendicular to the central axis thereof.

[0051] In some examples of this embodiment, the limiting cap 130 may also be columnar. The radial width of the limiting cap 130 may be 5 mm to 6 mm.

[0052] Furthermore, the utility model also provides a graphite boat sheet. Figure 3 This is a schematic diagram of a top view of a graphite boat. Figure 3 As shown, the graphite boat may include a boat substrate 200 and a graphite boat clamping point 100 as in the above embodiment. A clamping point receiving hole is provided in the boat substrate 200, and a clamping point fixing seat 110 of the graphite boat clamping point 100 is provided in the clamping point receiving hole. It can be understood that the clamping point limiting groove 101 should be located on the surface of the boat substrate 200 for placing the sheet to be coated.

[0053] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure of the graphite boat sheet along AA'. Figure 4 As shown, the card point fixing seat 110 is arranged in the card point accommodating hole, and the guide transition area 1110 of the first side wall 111 is entirely protruded from the surface of the boat substrate 200 so that the sheet to be coated can slide down along the guide transition area 1110 .

[0054] Figure 5 For Figure 4 The schematic diagram of the structure of placing the sheet 300 to be coated on the graphite boat shown. Figure 5 As shown, the sheet 300 to be coated is arranged in the card point limiting groove 101 and is located on the groove bottom wall 121 of the card point limiting groove 101. It can be understood that since the guide transition zone 1110 gradually shrinks toward the inner side of the groove, it is equivalent to increasing the slot of the card point limiting groove 101, making it easier for the sheet 300 to be coated to be placed in the card point limiting groove 101, which can improve the problem of sheet falling. At the same time, the gradually shrinking guide transition zone 1110 can also reduce the friction between the sheet 300 to be coated and the first side wall 111, thereby effectively improving the problem of graphite boat printing on the surface of the sheet 300 to be coated.

[0055] Furthermore, the utility model also provides a graphite boat. The graphite boat comprises a plurality of graphite boat sheets in the above-mentioned embodiment. Furthermore, the plurality of graphite boat sheets can be arranged in parallel and at intervals.

[0056] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A graphite boat stuck point, It is characterized in that The invention comprises a card point fixing seat (110) and a limiting support member arranged on the side of the card point fixing seat (110); the graphite boat card point (100) has a card point limiting groove (101); the groove wall of the card point limiting groove (101) comprises a first side wall (111) and a second side wall (131) arranged opposite to each other; the first side wall (111) is arranged on the card point fixing seat (110); the second side wall (131) is arranged on the limiting support member; the first side wall (111) comprises a guide transition zone (1110); and from the top end of the card point limiting groove (101) toward the bottom end of the groove, the guide transition zone (1110) gradually shrinks toward the inner side of the groove.

2. The graphite boat clamping point according to claim 1, It is characterized in that The distance between the top end of the guide transition zone (1110) and the bottom end thereof in the width direction of the clamping point limiting groove (101) is 0.1 mm to 0.5 mm; and / or, The distance between the top end of the guide transition zone (1110) and the bottom end thereof in the depth direction of the clamping point limiting groove (101) is 1.5 mm to 3 mm.

3. The graphite boat clamping point according to claim 1, It is characterized in that The bottom end of the guide transition zone (1110) is located at the bottom of the card point limiting groove (101); and / or, The top end of the second side wall (131) is lower than the top end of the guide transition zone (1110).

4. The graphite boat clamping point according to claim 2, It is characterized in that The guide transition area (1110) is in the shape of an inclined plane that is inclined relative to the width direction of the clamping point limiting groove (101).

5. The graphite boat clamping point according to any one of claims 1 to 4, It is characterized in that The position-limiting support member comprises a support column (120) and a position-limiting cap (130); the support column (120) is connected to the card point fixing seat (110); the position-limiting cap (130) is connected to a side of the support column (120) away from the card point fixing seat (110); the second side wall (131) is arranged on a side surface of the position-limiting cap (130) facing the card point fixing seat (110); and the card point position-limiting groove (101) further comprises a groove bottom wall (121) arranged on the surface of the support column (120).

6. The graphite boat clamping point according to claim 5, It is characterized in that The width of the groove bottom wall (121) is 0.35 mm to 0.45 mm.

7. The graphite boat clamping point according to any one of claims 1 to 4 and 6, It is characterized in that The distance between the top end of the second side wall (131) and the bottom end of the second side wall (131) in the depth direction of the clamping point limiting groove (101) is 0.6 mm to 0.9 mm.

8. A graphite boat sheet, It is characterized in that It comprises a boat sheet substrate (200) and a graphite boat clamping point (100) as claimed in any one of claims 1 to 7, wherein a clamping point accommodating hole is arranged in the boat sheet substrate (200), and the clamping point fixing seat (110) of the graphite boat clamping point (100) is arranged in the clamping point accommodating hole.

9. The graphite boat sheet according to claim 8, It is characterized in that The guide transition zone (1110) is arranged to protrude from the surface of the boat sheet base (200).

10. A graphite boat, It is characterized in that The method comprises a plurality of graphite boat sheets as claimed in claim 8 or 9.

Images