Swing arm power structure
The swing arm power structure addresses the issue of wafer surface damage by maintaining the basket's vertical orientation during rotation, thereby preventing collisions and ensuring the wafer's integrity during cleaning processes.
Patent Information
- Application Number
- CN202420486584.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-13
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-03-13
AI Technical Summary
Existing technologies fail to prevent scratches or wear on wafers during cleaning processes due to the friction and collision between the wafers and the mobile device or container, leading to surface damage and affecting the quality and performance of the wafers.
A swing arm power structure with a rotating device, comprising a base plate, brackets, a control motor, rotating shaft, and a basket, which ensures the basket remains vertical during rotation, preventing collisions and maintaining the wafer's integrity.
The swing arm power structure effectively prevents collisions between the wafer and the container, ensuring the wafer's surface remains undamaged and maintains its quality and performance.
Smart Images
Figure CN222146168U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of mechanical arms, in particular to a swing arm power structure. Background Art
[0002] After the wafer is produced, it is necessary to remove particulate impurities and residual chemical reagents on the wafer surface and clean the wafer surface. During the cleaning, it needs to be immersed in chemical solution multiple times. However, during the transfer process of the wafer, collision or friction may occur between the wafer and the mobile device or container, resulting in scratches or wear on the wafer surface, affecting the quality and performance of the wafer. Therefore, a swing arm power structure is proposed to address the above problems. Utility Model Content
[0003] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a swing arm power structure, including a base plate, two brackets are arranged on the upper surface of the base plate, the two brackets are vertically arranged on the base plate, a control motor is arranged at the upper ends of the two brackets, a rotating device is arranged at the front end of the control motor, one end of the rotating device is connected to the control motor, and the other end is rotatably connected to the end of the rotating shaft, and a basket is arranged at the front end of the rotating shaft.
[0004] Furthermore, the rotating device includes a fixed plate, and gear 1 and gear 2 are arranged between the two fixed plates. Gear 1 and gear 2 are respectively arranged at two ends of the fixed plates, gear 1 is connected to the control motor bearing, gear 2 is connected to the rotating shaft bearing, and gear 1 and gear 2 are connected by a chain.
[0005] Furthermore, the motor shaft of the control motor is fixed to one end of the side surface of the fixing plate.
[0006] Furthermore, a moving groove is penetrated through the side of the fixed plate, a moving block is arranged in the moving groove, the moving block is connected to the rotating rod, the rotating rod is connected to the adjusting gear, and the adjusting gear and the chain are engaged with each other.
[0007] Furthermore, the diameter of the adjusting gear is smaller than the diameters of the gear one and the gear two, and the height of the upper surface of the moving groove is consistent with the height of the chain above.
[0008] Furthermore, a notch is provided at the front end of the rotating shaft, and the basket is sleeved at the front end of the rotating shaft and wrapped around the outside of the notch.
[0009] The utility model has the following beneficial effects:
[0010] In the utility model, the wafer is arranged in the basket, and the control motor rotates to make the fixed plate rotate along with the motor shaft of the control motor, and the gear also rotates along with the control motor, and the rotating shaft is rotated together through the chain to make the basket always in a vertical state, and the basket can fall into different medicine solutions on both sides of the bracket without colliding with the wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic diagram of the structure of the rotating device proposed by the utility model;
[0012] Figure 2 A three-dimensional diagram of a swing arm power structure proposed by the utility model;
[0013] Figure 3 This is a cross-sectional view of the rotating device proposed by the utility model.
[0014] Legend:
[0015] 1. Bottom plate; 2. Bracket; 3. Control motor; 4. Rotating device; 5. Rotating shaft; 6. Basket; 41. Fixed plate; 42. Gear 1; 43. Gear 2; 44. Chain; 45. Moving slot; 46. Moving block; 47. Rotating rod; 48. Adjusting gear; 51. Notch. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] Reference Figure 1-3 As shown, an embodiment of the utility model is provided: a swing arm power structure, including a base plate 1, two brackets 2 are arranged on the upper surface of the base plate 1, the two brackets 2 are vertically arranged on the base plate 1, the base plate 1 and the brackets 2 are used to support and fix the control motor 3 above, the control motor 3 is arranged on the upper ends of the two brackets 2, and a rotating device 4 is arranged at the front end of the control motor 3, one end of the rotating device 4 is connected to the control motor 3, and the other end is rotatably connected to the end of the rotating shaft 5, a basket 6 is arranged at the front end of the rotating shaft 5, the control motor 3 controls the rotating device 4 to rotate together, and at the same time drives the rotating shaft 5 and the basket 6 to rotate together, so that the basket 6 moves on both sides of the bracket 2.
[0018] Furthermore, the rotating device 4 includes a fixed plate 41, and the motor shaft of the control motor 3 is fixed to one end of the side of the fixed plate 41. When the control motor 3 rotates, it can drive the fixed plate 41 to rotate together. A gear 1 42 and a gear 2 43 are arranged between the two fixed plates 41. The gear 1 42 and the gear 2 43 are respectively arranged at both ends of the fixed plate 41. The gear 1 42 is connected to the bearing of the control motor 3, and the gear 2 43 is connected to the bearing of the rotating shaft 5. The gear 1 42 and the gear 2 43 are connected by a chain 44. When the control motor 3 rotates, the gear 1 42 rotates together with the control motor 3, and the gear 2 43 is also rotated together through the chain 44. The gear 2 43 drives the rotating shaft 5 and the basket 6 to rotate together, and the rotation direction of the rotating shaft 5 and the basket 6 is opposite to the rotation direction of the rotating plate, so that the basket 6 is always in a vertical state.
[0019] Furthermore, a moving groove 45 is penetrated through the side of the fixed plate 41, and a moving block 46 is set in the moving groove 45. The moving block 46 is connected to the rotating rod 47, and the rotating rod 47 is connected to the adjusting gear 48. The adjusting gear 48 matches the chain 44. The moving block 46 slides in the moving groove 45 to drive the rotating rod 47 and the adjusting gear 48 to move. When the chain 44 is loose, the moving block 46 is moved upward to make the adjusting gear 48 engage with the chain 44 to increase the stroke length of the chain 44, thereby keeping the chain 44 taut.
[0020] Furthermore, the diameter of the adjusting gear 48 is smaller than the diameters of gear one 42 and gear two 43, preventing the adjusting gear 48 with a larger diameter from always contacting the chain 44 and affecting the transmission of gear one 42 and gear two 43. The height of the upper surface of the moving groove 45 is consistent with the height of the upper chain 44, preventing the height of the moving groove 45 from being crossed. When the moving block 46 moves to the uppermost end, the adjusting gear 48 still does not engage with the chain 44, and the tightness of the chain 44 cannot be adjusted.
[0021] Furthermore, a notch 51 is provided at the front end of the rotating shaft 5, and the basket 6 is sleeved on the front end of the rotating shaft 5 and wrapped around the outside of the notch 51. The notch 51 fixes the basket 6 to the rotating shaft 5 to prevent the basket 6 from shifting during rotation, which would cause the wafer inside to move and collide with the inner wall of the basket 6.
[0022] Working principle: the wafer is placed in the basket 6. When the staff is in use, they start the control motor 3 to rotate the control motor 3, and the motor shaft of the control motor 3 drives the fixed plate 41 to rotate, and the fixed plate 41 also drives the shaft 5 and the basket 6 to rotate together, and at the same time, the gear 1 42 also rotates with the control motor 3, and the rotation of the gear 1 42 drives the chain 44 to rotate, and the rotation of the chain 44 causes the gear 2 43 to rotate, and the gear 2 43 causes the shaft 5 to rotate and the rotation direction is opposite to the rotation direction of the fixed plate 41, so that the basket 6 is always in a vertical state. When the chain 44 is loose, the sliding moving block 46 keeps the chain 44 in a taut state to prevent the chain 44 from slipping during movement due to being too long, so that the gear 2 43 does not rotate or rotates insufficiently, causing the basket 6 to tilt and causing the internal wafers to collide.
[0023] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A swing arm power structure, characterized in that: The invention comprises a bottom plate (1), two brackets (2) are arranged on the upper surface of the bottom plate (1), the two brackets (2) are arranged vertically on the bottom plate (1), a control motor (3) is arranged at the upper ends of the two brackets (2), a rotating device (4) is arranged at the front end of the control motor (3), one end of the rotating device (4) is connected to the control motor (3), and the other end is rotatably connected to the end of a rotating shaft (5), and a basket (6) is arranged at the front end of the rotating shaft (5).
2. A swing arm power structure according to claim 1, characterized in that: The rotating device (4) comprises a fixed plate (41), a gear 1 (42) and a gear 2 (43) are arranged between the two fixed plates (41), the gear 1 (42) and the gear 2 (43) are arranged at two ends of the fixed plate (41), the gear 1 (42) is connected to the bearing of the control motor (3), the gear 2 (43) is connected to the bearing of the rotating shaft (5), and the gear 1 (42) and the gear 2 (43) are connected by a chain (44).
3. A swing arm power structure according to claim 2, characterized in that: The motor shaft of the control motor (3) is fixed to one end of the side surface of the fixing plate (41).
4. A swing arm power structure according to claim 2, characterized in that: A moving groove (45) is penetrated through the side of the fixing plate (41), a moving block (46) is arranged in the moving groove (45), the moving block (46) is connected to a rotating rod (47), the rotating rod (47) is connected to an adjusting gear (48), and the adjusting gear (48) and the chain (44) are engaged with each other.
5. The swing arm power structure according to claim 4, characterized in that: The diameter of the adjusting gear (48) is smaller than the diameters of the gear one (42) and the gear two (43), and the height of the upper surface of the moving groove (45) is consistent with the height of the chain (44) above.
6. The swing arm power structure according to claim 1, characterized in that: A notch (51) is provided at the front end of the rotating shaft (5), and the basket (6) is sleeved on the front end of the rotating shaft (5) and wrapped around the outside of the notch (51).