Connecting device
By designing a connection device including a spacing connection rod and a synchronization belt, the problem of low efficiency of existing adapter equipment is solved, efficient transmission of silicon wafers is achieved, and the requirements of silicon wafers of different sizes are adapted to stainless steel The connecting rod is corrosion-resistant and does not contaminate the surface of the silicon wafer.
Patent Information
- Application Number
- CN202421006529.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-10
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-05-10
AI Technical Summary
Most of the existing adapter equipment in the production of solar silicon wafers are robotic arms with gas paths, which have low adapter efficiency and affect production efficiency.
A connection device is designed, including a plurality of intervally arranged connecting rods, synchronization belts, adjustment components and bases, and the continuous transmission of silicon wafers is achieved through the synchronization rods and adapter components, reducing additional adapter actions and improving working efficiency.
It improves the working efficiency of silicon wafer transmission, reduces additional adaptation actions, adapts to the transmission needs of silicon wafers of different sizes, and the connection rods made of stainless steel are corrosion-resistant and will not cause pollution to the surface of the silicon wafer.
Smart Images

Figure CN222159032U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar silicon wafer production and manufacturing, in particular to a connection device. Background Art
[0002] In the production of solar silicon wafers, transmission equipment is often needed to transport silicon wafers, and a transplanting mechanism is needed to transfer silicon wafers between different transmission structures. However, most existing transfer equipment is a robotic arm with an air path, and its transfer efficiency is low, which affects production efficiency. Utility Model Content
[0003] In order to overcome the above shortcomings, the purpose of the present invention is to provide a connection device to solve the problem that most of the existing switching devices mentioned in the above background technology are robot arms with air circuits and their switching efficiency is low.
[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is a connection device, which is applied to a silicon wafer transmission line, wherein the silicon wafer transmission line includes a front transmission device and a rear transmission device, wherein the front transmission device and the rear transmission device are respectively arranged on both sides of the connection device along a first direction, and are used to transmit silicon wafers along the first direction. The connection device includes:
[0005] A plurality of connecting rods are arranged at intervals along the first direction. Each of the connecting rods extends along the second direction, has a synchronous wheel at one end and an adjustment plate at the other end, and the first direction is perpendicular to the second direction. The plurality of connecting rods can rotate synchronously for transmitting the silicon wafer.
[0006] The first synchronous belt is wound between the synchronous wheels of two adjacent connecting rods.
[0007] The adjustment assembly includes a synchronization rod and a transfer assembly. The synchronization rod is indirectly connected to one of the plurality of connection rods through the transfer assembly. The synchronization rod is synchronously driven by the rear transmission device.
[0008] A plurality of bases are arranged at intervals along the second direction and are used to support the adjustment plate and the adjustment assembly.
[0009] The connection device provided by the utility model assists in connecting two transmission devices arranged at intervals on the same silicon wafer transmission line in series, and a plurality of transmission rods extending along the second direction are provided in the front transmission device and the rear transmission device, and the transmission rods are driven by the transmission chain and cyclically rotate along the transmission direction, and a plurality of connection rods in the connection device are arranged in parallel with the transmission rods, are linked by a first synchronous belt, and are driven to rotate by the rear transmission device through the synchronous rods and the switching assembly, so as to form a bearing space for silicon wafer transmission, so that the silicon wafer can be transmitted in sequence through the two transmission devices along the transmission direction without performing additional switching actions, thereby improving the overall work efficiency.
[0010] In some embodiments, the synchronization rod is arranged below the connecting rod along the third direction, and third synchronization wheels are provided at both ends. The first direction, the second direction and the third direction are perpendicular to each other.
[0011] By adopting the above technical solution, the synchronization rod is linked with other devices through the third synchronization wheel.
[0012] In some embodiments, the adapter assembly includes an adapter rod, an adapter wheel and a bearing seat. The bearing seat is arranged on the same side as the third synchronous wheel. The adapter rod extends along the second direction, and both ends are rotatably connected to the bearing seat. The adapter wheel is arranged on the adapter rod and can rotate synchronously with the adapter rod.
[0013] By adopting the above technical solution, the bearing seat is arranged on the same side as the third synchronous wheel, and both are arranged below the two connecting rods. A rotatable transfer rod and transfer wheel are provided in the bearing seat to link with other synchronous wheels.
[0014] In some embodiments, the synchronous wheel, the third synchronous wheel and the transfer wheel all rotate around the second direction.
[0015] By adopting the above technical solution, the synchronous wheel, the third synchronous wheel and the transfer wheel have the same rotation direction, so they can be driven to rotate in sequence through multiple sets of synchronous belts.
[0016] In some embodiments, the adapter assembly further includes an extension end, a second synchronous belt and a third synchronous belt. The extension end is provided at both ends of the connecting rod along the second direction. The second synchronous belt is wound between the third synchronous wheel and the adapter rod. The third synchronous belt is wound between the adapter wheel and the extension end.
[0017] By adopting the above technical solution, the synchronization rod and the third synchronization wheel are driven to rotate by the rear transmission device, and the transfer rod and the transfer wheel are driven to rotate by the second synchronization belt. The transfer wheel drives the extension end and the first synchronization wheel to rotate, and finally the second synchronization wheel rotates accordingly, thereby achieving the effect of driving multiple connecting rods to rotate through the synchronization rod.
[0018] In some embodiments, each of the connecting rods includes a driving rod and a plurality of sub-connecting rods; the driving rod is provided with the synchronization wheel at one end and the adjustment plate at the other end; the adjustment plates are provided at both ends of each of the sub-connecting rods for connecting the adjacent driving rods and the plurality of sub-connecting rods through the adjustment plates.
[0019] In some embodiments, each base includes a first adjustment plate and a second adjustment plate. The first adjustment plate and the second adjustment plate are both arranged on the top of the base and connected with mortise and tenon joints along the first direction, so that the distance between the first adjustment plate and the second adjustment plate can be changed.
[0020] The above technical solution is adopted to fix the bearing connection rod by setting the adjustment plate. The adjacent adjustment plates are connected by mortise and tenon joints. By changing the spacing between the two, the distance between the adjacent connection rods can be changed. The specific distance value can be adjusted according to the production situation on site to adapt to the connection transmission of silicon wafers.
[0021] In some embodiments, the rotation speed V1 of each of the coupling rods is the same as the transmission speed V2 of the rear transmission device, and the transmission speed V2 of the rear transmission device is greater than or equal to the transmission speed V1 of the front transmission device.
[0022] In some embodiments, the shortest distance between the front transmission device and the connection device, and the shortest distance between the connection device and the rear transmission device, are both no greater than one quarter of the length of the silicon wafer along the first direction.
[0023] With the above technical solution, if the distance between the front transmission device, the rear transmission device and the connection device is too small, it will have an adverse effect on the transmission speed of the silicon wafer, so the shortest distance between the two transmission devices and the connection device is limited.
[0024] In some embodiments, the connecting rods are all made of stainless steel.
[0025] By adopting the above technical solution, the stainless steel material has good corrosion resistance and high temperature oxidation resistance, and the connecting rod made of stainless steel can keep the surface clean and will not pollute the surface of the silicon wafer when in contact with the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It is a structural schematic diagram of an embodiment of a connection device of the utility model;
[0027] Figure 2 for Figure 1 The enlarged view of point A in the middle;
[0028] In the figure:
[0029] 1-connecting device; 2-first connecting rod; 20-first synchronous wheel; 21-first driving rod; 22-first sub-connecting rod; 3-second connecting rod; 30-second synchronous wheel; 31-first synchronous belt; 32-second driving rod; 33-second sub-connecting rod; 4-adjusting assembly; 40-synchronous rod; 41-third synchronous wheel; 42-transfer assembly; 43-transfer rod; 44-transfer wheel; 45-bearing seat; 46-extended end; 47-second synchronous belt; 48-third synchronous belt; 5-base; 50-first adjustment plate; 51-second adjustment plate; 6-front transmission device; 7-rear transmission device; 8-transmission rod. DETAILED DESCRIPTION
[0030] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.
[0031] In order to facilitate the subsequent description, before describing the specific structure of the connection device, this application first combines Figure 1 A first direction (Y), a second direction (X), and a third direction (Z) are defined. The first direction is the width direction of the connecting device when it is normally placed, such as the Y direction; the second direction is the length direction of the connecting device when it is normally placed, such as the X direction; the third direction is the height direction of the connecting device when it is normally placed, such as the Z direction. In the present application, the first direction (Y), the second direction (X), and the third direction (Z) are perpendicular to each other. It can be understood that the perpendicularity in the present application is not absolute perpendicularity, and the approximate perpendicularity caused by processing errors and assembly errors (for example, the angle between the two structural features is 89.9°) is also within the range of perpendicularity in the present application.
[0032] refer to Figure 1 and Figure 2 , Figure 1 A schematic structural diagram of a connection device 1 provided in an embodiment of the utility model is shown; Figure 2 for Figure 1 Enlarged view of point A in the middle.
[0033] like Figure 1 and Figure 2 As shown in the figure, a connection device 1 provided by the present application is shown, which is applied to a silicon wafer transmission line. The silicon wafer transmission line includes a front transmission device and a rear transmission device. The front transmission device and the rear transmission device are respectively arranged on both sides of the connection device along a first direction, and are used to connect the silicon wafer along the first direction ( Figure 1 The silicon wafer is transferred (as shown in the Y direction).
[0034] The connection device 1 includes a plurality of connection rods, a first synchronous belt 31, an adjustment assembly 4 and a plurality of bases 5, wherein:
[0035] In order to facilitate the description of the connection rod structure and the connection relationship, in this embodiment and subsequent embodiments, the number of the plurality of connection rods is set to two, namely, a first connection rod 2 and a second connection rod 3, which are arranged at intervals along the first direction (i.e., the transmission direction), and each connection rod is arranged along the second direction (i.e., Figure 1 The first connecting rod 2 is provided with a first synchronous wheel 20 at one end and a first adjustment plate 50 at the other end. The first connecting rod 2 is provided with a first synchronous wheel 20 at one end and a first adjustment plate 50 at the other end; the second connecting rod 3 is provided with a second synchronous wheel 30 at one end and a second adjustment plate 51 at the other end. The first connecting rod 2 and the second connecting rod 3 can rotate synchronously for transmitting silicon wafers. The first synchronous belt 31 is wound between the first synchronous wheel 20 and the second synchronous wheel 30.
[0036] The adjustment assembly 4 includes a synchronization rod 40 and a transfer assembly 42. The synchronization rod 40 is indirectly connected to the first connection rod 2 through the transfer assembly 42. The synchronization rod 40 is synchronously driven by the rear transmission device 7, thereby driving the first connection rod 2 and the second connection rod 3 to rotate to transfer the silicon wafer, and the first direction is perpendicular to the second direction. A plurality of bases 5 are arranged at intervals along the second direction, and are used to carry the first adjustment plate 50, the second adjustment plate 51 and the adjustment assembly 4.
[0037] The connection device 1 provided by the utility model assists in connecting in series the front transmission device 6 and the rear transmission device 7 which are arranged at intervals on the same silicon wafer transmission line. The front transmission device 6 and the rear transmission device 7 are both provided with a plurality of transmission rods 8 extending along the second direction. The transmission rods 8 are driven by a transmission chain and cyclically rotate along the transmission direction. The first connection rod 2 and the second connection rod 3 in the connection device 1 are arranged in parallel with these transmission rods 8, are linked by a first synchronous belt 31, and are driven to rotate by the rear transmission device 7 through a synchronous rod 40 and a switching assembly 42, so as to form a bearing space for silicon wafer transmission, so that the silicon wafer can be transmitted in sequence along the transmission direction through the two transmission devices.
[0038] The connection device 1 is synchronously driven by the rear transmission device 7, and no additional motor is required. Under normal circumstances, only two connection rods are provided to minimize the length of the connection device 1 in the first direction, so that the silicon wafer can be quickly transferred from the front transmission device 6 to the rear transmission device 7 without the need for additional switching actions, thereby improving the overall work efficiency. If large-sized silicon wafers need to be adapted for transmission, multiple sets of connection rods can be installed to adapt to the transmission requirements of large-sized silicon wafers. In addition, the connection device 1 of the above structure requires a small installation space and can be adapted to be installed in the gap between two transmission devices.
[0039] In some embodiments, reference Figure 1 and Figure 2The synchronization rod 40 is arranged on the first connecting rod 2 along the third direction ( Figure 1 Below the upper surface (shown in the Z direction), third synchronous wheels 41 are provided at both ends, and the first direction, the second direction and the third direction are perpendicular to each other.
[0040] Exemplarily, the synchronization rod 40 is linked with other devices via the third synchronization wheel 41 .
[0041] In some embodiments, reference Figure 1 and Figure 2 The adapter assembly 42 includes an adapter rod 43, an adapter wheel 44 and a bearing seat 45. The bearing seat 45 is arranged on the same side as the third synchronous wheel 41. The adapter rod 43 extends along the second direction, and both ends are rotatably connected to the bearing seat 45. The adapter wheel 44 is arranged on the adapter rod 43 and can rotate synchronously with the adapter rod 43.
[0042] Exemplarily, the bearing seat 45 is arranged on the same side as the third synchronous wheel 41, and both are arranged below the two connecting rods. A rotatable transfer rod 43 and a transfer wheel 44 are provided in the bearing seat 45 to link with other synchronous wheels.
[0043] In some embodiments, reference Figure 1 and Figure 2 The first synchronous wheel 20, the second synchronous wheel 30, the third synchronous wheel 41 and the transfer wheel 44 all rotate around the second direction.
[0044] Exemplarily, the first synchronous wheel 20 , the second synchronous wheel 30 , the third synchronous wheel 41 and the transfer wheel 44 have the same rotation direction, so they can be driven to rotate in sequence by the synchronous belt.
[0045] In some embodiments, reference Figure 1 and Figure 2 The adapter assembly 42 further includes an extension end 46, a second synchronous belt 47 and a third synchronous belt 48. The extension end 46 is disposed at both ends of the first connecting rod 2 along the second direction. The second synchronous belt 47 is wound between the third synchronous wheel 41 and the adapter rod 43. The third synchronous belt 48 is wound between the adapter wheel 44 and the extension end 46.
[0046] Exemplarily, the extension end 46 serves as the driving end of the first synchronous wheel 20, and is linked to the transfer wheel 44 through the third synchronous belt 48. In this embodiment, the extension end 46 is only provided at the first connecting rod 2, but the present application does not limit this. It can also be provided at the second connecting rod 3, or provided at both the first connecting rod 2 and the second connecting rod 3, and then linked to the transfer wheel 44 through the third synchronous belt 48, so as to achieve the purpose of driving the first connecting rod 2 and the second connecting rod 3 to rotate through the transfer wheel 44. The synchronous rod 40 and the third synchronous wheel 41 are driven to rotate by the rear transmission device 7, and the transfer rod 43 and the transfer wheel 44 are driven to rotate through the second synchronous belt 47, and the transfer wheel 44 drives the extension end 46 and the first synchronous wheel 20 to rotate, and finally the second synchronous wheel 30 rotates accordingly, so as to achieve the effect of driving the first connecting rod 2 and the second connecting rod 3 to rotate through the synchronous rod 40.
[0047] In some embodiments, reference Figure 1 and Figure 2 The first connecting rod 2 includes a first driving rod 21 and a plurality of first sub-connecting rods 22. A first synchronous wheel 20 is provided at one end of the first driving rod 21, and a first adjustment plate 50 is provided at the other end. Both ends of each first sub-connecting rod 22 are provided with a first adjustment plate 50, which is used to connect the adjacent first driving rod 21 and the plurality of first sub-connecting rods 22 through the first adjustment plate 50.
[0048] The second engagement rod 3 is spaced apart from the first engagement rod 2 along the first direction, and includes a second drive rod 32 and a plurality of second sub-engagement rods 33. A second synchronous wheel 30 is provided at one end of the second drive rod 32, and a second adjustment plate 51 is provided at the other end. A second adjustment plate 51 is provided at both ends of each first sub-engagement rod 22, and is used to connect the adjacent second drive rod 32 and the plurality of second sub-engagement rods 33 through the first adjustment plate 50.
[0049] The first driving rod 21 and the second driving rod 32 are arranged on the connecting device along the second direction ( Figure 1 On the same side of the image (shown in the X direction), the first direction is perpendicular to the second direction.
[0050] Exemplarily, the purpose of setting a plurality of first sub-connections and a plurality of second sub-connections is to make the lengths of the first connection rod 2 and the second connection rod 3 the same as the transmission rod 8 in the front transmission device 6 and the rear transmission device 7. In addition, each first sub-connection rod 22 and the corresponding second sub-connection rod 33 form a group of transmission channels, thereby forming a plurality of groups of transmission channels, which match the number of transmission channels in the front transmission device 6 and the rear transmission device 7. Further, as Figure 1 As shown, in the present embodiment, only one of the first sub-connecting rod 22 and the second sub-connecting rod 33 is provided, forming two groups of transmission channels, and the number of transmission channels in the front transmission device 6 and the rear transmission device 7 is also two groups, which are adapted to each other, and silicon wafers are transmitted in each group of transmission channels.
[0051] In some embodiments, reference Figure 1 and Figure 2 The first adjustment plate 50 and the second adjustment plate 51 are both arranged on the top of the base 5 and are connected by mortise and tenon joints along the first direction, so as to change the first connecting rod 2 and the second connecting rod 3.
[0052] For example, a first adjustment plate 50 and a second adjustment plate 51 are provided on the top of each base 5, respectively fixedly carrying the first connection rod 2 and the second connection rod 3. The first adjustment plate 50 and the second adjustment plate 51 are connected by mortise and tenon joints, and the distance between the first connection rod 2 and the second connection rod 3 can be changed by changing the distance between the two. The specific distance value can be adjusted according to the production situation on site to adapt to the connection transmission of silicon wafers.
[0053] In some embodiments, the rotation speed V1 of the first connecting rod 2 and the second connecting rod 3 is the same as the transmission speed V2 of the rear transmission device 7, and the transmission speed V2 of the rear transmission device 7 is greater than or equal to the transmission speed V1 of the front transmission device 6.
[0054] Exemplarily, the connection device 1 is synchronously driven by the rear transmission device 7, so the rotation speed V1 of the first connection rod 2 and the second connection rod 3 is the same as the transmission speed V2 of the rear transmission device 7. The silicon wafer is transferred from the front transmission device 6 to the rear transmission device 7. If the transmission speed V2 of the rear transmission device 7 is lower than the transmission speed V1 of the front transmission device 6, it is very likely that the silicon wafers will collide and stack at the connection between the two. Therefore, it is necessary to set the transmission speed V2 of the rear transmission device 7 to be greater than or equal to the transmission speed V1 of the front transmission device 6.
[0055] In some embodiments, the shortest distance between the front transmission device 6 and the connection device 1 , and the shortest distance between the connection device 1 and the rear transmission device 7 , are both no greater than one quarter of the length of the silicon wafer along the first direction.
[0056] Exemplarily, if the distance between the front transmission device 6 , the rear transmission device 7 and the connection device 1 is too small, it will have an adverse effect on the transmission speed of the silicon wafer, so the shortest distance between the two transmission devices and the connection device 1 is limited.
[0057] In some embodiments, the first connecting rod 2 and the second connecting rod 3 are both made of stainless steel.
[0058] Exemplarily, stainless steel has good corrosion resistance and high-temperature oxidation resistance, and the first connecting rod 2 and the second connecting rod 3 made of stainless steel can keep the surface clean and will not contaminate the surface of the silicon wafer when in contact with the silicon wafer.
[0059] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A connection device, applied to a silicon wafer transmission line, the silicon wafer transmission line comprising a front transmission device and a rear transmission device, the front transmission device and the rear transmission device are respectively arranged on both sides of the connection device along a first direction, and are used to transmit silicon wafers along the first direction, characterized in that: The connection device comprises: A plurality of connecting rods are arranged at intervals along the first direction; each of the connecting rods extends along the second direction, one end of which is provided with a synchronous wheel, and the other end of which is provided with an adjustment plate, and the first direction is perpendicular to the second direction; the plurality of connecting rods can rotate synchronously for transmitting the silicon wafer; A first synchronous belt, wound between the synchronous wheels of two adjacent connecting rods; An adjustment assembly, comprising a synchronization rod and a transfer assembly; the synchronization rod is indirectly connected to one of the plurality of engagement rods via the transfer assembly; the synchronization rod is synchronously driven by the rear transmission device; A plurality of bases are arranged at intervals along the second direction and are used to support the adjustment plate and the adjustment assembly.
2. The connection device according to claim 1, characterized in that: The synchronization rod is arranged below the connecting rod along the third direction, and third synchronization wheels are arranged at both ends. The first direction, the second direction and the third direction are perpendicular to each other.
3. The connection device according to claim 2, characterized in that: The transfer assembly includes a transfer rod, a transfer wheel and a bearing seat; the bearing seat is arranged on the same side as the third synchronous wheel; the transfer rod extends along the second direction, and both ends are rotatably connected to the bearing seat; the transfer wheel is arranged on the transfer rod and can rotate synchronously with the transfer rod.
4. The engagement device according to claim 3, characterized in that: The synchronous wheel, the third synchronous wheel and the transfer wheel all rotate around the second direction.
5. The engagement device according to claim 3, characterized in that: The adapter assembly also includes an extension end, a second synchronous belt and a third synchronous belt; the extension end is arranged at both ends of the connecting rod along the second direction; the second synchronous belt is wound between the third synchronous wheel and the adapter rod; the third synchronous belt is wound between the adapter wheel and the extension end.
6. The connection device according to claim 1, characterized in that: Each of the connecting rods includes a driving rod and a plurality of sub-connecting rods; one end of the driving rod is provided with the synchronizing wheel, and the other end is provided with the adjusting plate; both ends of each of the sub-connecting rods are provided with the adjusting plates, which are used to connect the adjacent driving rods and the plurality of sub-connecting rods through the adjusting plates.
7. The engagement device according to claim 6, characterized in that: The adjustment plates are all arranged on the top of the base; adjacent adjustment plates can be connected by mortise and tenon joints along the first direction to change the spacing between adjacent connection rods.
8. The connection device according to claim 1, characterized in that: The rotation speed V1 of each of the coupling rods is the same as the transmission speed V2 of the rear transmission device, and the transmission speed V2 of the rear transmission device is greater than or equal to the transmission speed V1 of the front transmission device.
9. The engagement device according to claim 1, characterized in that: The shortest distance between the front transmission device and the connection device, and the shortest distance between the connection device and the rear transmission device, are both no greater than one quarter of the length of the silicon wafer along the first direction.
10. The engagement device according to claim 1, characterized in that: The connecting rods are all made of stainless steel.
