Pipeline and pipeline system

Abstract

The utility model provides a pipeline. The pipeline comprises a tubular insulating base body; the conductive strip is arranged on the inner surface of the insulating base body and used for being in contact with the liquid, and the conductive strip is made of graphite. The utility model further provides a pipeline system which comprises a plurality of pipelines including the first pipeline, the second pipeline, the third pipeline and the fourth pipeline. The first pipeline is used for being connected with a liquid source, and the fourth pipeline is provided with a liquid outlet; the filtering device is arranged between the second pipeline and the third pipeline and is connected with the second pipeline and the third pipeline; the first grounding assembly is used for connecting the first pipeline and the second pipeline and grounding the first pipeline and the second pipeline; and the second grounding assembly is used for the third pipeline and the fourth pipeline and grounding the third pipeline and the fourth pipeline, so that static charge accumulation generated in the liquid transportation process is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a pipeline and a pipeline system. Background Art

[0002] In advanced semiconductor manufacturing processes, extremely strict control of metal contamination is required. For chemical solvents that can corrode or oxidize metals, metal should not be used in the transportation pipes, pumps and other parts that come into contact with them.

[0003] Polymer materials such as polytetrafluoroethylene (PTFE) and tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA) are resistant to strong acids and alkalis and have excellent corrosion and oxidation resistance. They are usually the preferred materials for contact with chemical solvents in advanced semiconductor processes and are widely used in transportation pipelines, pump bodies and other components that come into contact with various chemical solvents.

[0004] However, since these polymer materials have extremely strong insulation properties, the static electricity generated by the friction between high-purity solutions (with ultra-high resistance) and these materials cannot be conducted to the ground and will continue to accumulate, thus causing a variety of potential hazards related to electrostatic discharge (ESD). For example, when static electricity accumulates to an extremely high voltage, it may break through the polymer components of the transportation pipeline and pump body, causing chemical leakage; in addition, static electricity may ionize with the air to produce electric sparks, igniting flammable solvents in the pipeline or accidentally leaked, and may also detonate solvent vapor accumulated in a confined space for a long time, causing property damage and personal injury.

[0005] In addition, in advanced semiconductor processes, static electricity generated by the friction between the solution and the pipe wall and pump body during transportation may also cause the following hazards along with the transportation of the solution: 1) Breakdown and damage of highly sensitive sensors, affecting the accuracy of sensor readings and causing false alarms; 2) Static electricity is transmitted to the wafer surface along with the solution, causing damage to components on the wafer surface and causing product scrapping; in addition, the wafer surface with static electricity will easily absorb particles, causing a short circuit on the wafer surface, thereby causing product scrapping.

[0006] Therefore, a liquid transportation system is needed that can reduce static electricity accumulation during solvent transportation and avoid the hazards caused by static electricity release and static electricity transfer. Utility Model Content

[0007] The purpose of the present application is to provide a pipeline and a pipeline system for liquid transportation to reduce static electricity accumulation during solvent transportation and avoid the harm caused by static electricity release and static electricity transfer.

[0008] In a first aspect, an embodiment of the present application provides a pipeline for liquid transportation, comprising: a tubular insulating substrate; and a conductive strip, wherein the conductive strip is arranged on the inner surface of the insulating substrate for contacting the liquid, and the material of the conductive strip comprises graphite.

[0009] In some embodiments, the ratio of the thickness of the conductive strip to the thickness of the insulating substrate is 1:(9-19).

[0010] In some embodiments, there are multiple conductive strips, and the multiple conductive strips are evenly distributed along the inner surface of the insulating substrate.

[0011] In some embodiments, the pipeline further includes a metal mesh, the metal mesh cover is disposed on the outer surface of the insulating substrate, and the metal mesh is connected to a first grounding wire.

[0012] In some embodiments, the distance between the metal mesh and the outer surface of the insulating substrate is 0-1 mm.

[0013] In some embodiments, the metal mesh is a spiral metal wire wrapped around the substrate.

[0014] The beneficial effects of the pipeline provided by the embodiment of the present application include but are not limited to the following:

[0015] The pipeline provided by the present application adds a conductive graphite conductive strip on the inner surface of the pipeline insulation substrate, and the resulting conductive strip can conduct the static charge generated by the friction between the liquid and the inner wall of the pipeline. By grounding the conductive strip, static electricity can be transferred from the pipeline, avoiding various hazards caused by the release of static charge in the pipeline.

[0016] In a second aspect, an embodiment of the present application provides a pipeline system for liquid transportation, comprising: a plurality of pipelines as described in the first aspect of the present application, the plurality of pipelines comprising a first pipeline, a second pipeline, a third pipeline and a fourth pipeline connected in sequence; the first pipeline is used to be connected to a liquid source, and the fourth pipeline is provided with a liquid outlet; a filtering device, arranged between the second pipeline and the third pipeline, connected to the second pipeline and the third pipeline; a first grounding component, used to connect the first pipeline and the second pipeline and to ground the first pipeline and the second pipeline; and a second grounding component, used for the third pipeline and the fourth pipeline and to ground the third pipeline and the fourth pipeline.

[0017] In some embodiments, the first grounding component or the second grounding component includes: a pair of connection caps, the pair of connection caps being used to connect to the port of the pipe; and a fixing member, being used to connect the pair of connection caps and ground the pair of connection caps.

[0018] In some embodiments, any one of the connection caps in the connection cap pair includes: an insulating outer shell, the insulating outer shell being provided with a connection port matching the port of the pipe; and a conductive inner shell, the conductive inner shell including a first part located inside the insulating outer shell and a second part located outside the insulating outer shell, the first part and the second part being integrally connected and hollow inside, the first part being used to contact the conductive strip, the second part being used for grounding, and the materials of the first part and the second part include graphite.

[0019] In some embodiments, an outer wall of the filter device is provided with an electrostatic shielding layer.

[0020] The beneficial effects of the pipeline system provided by the embodiment of the present application include but are not limited to the following:

[0021] The pipeline system provided in the present application uses the pipeline provided by the technical solution of the present application, and grounds the pipeline through a first grounding component and a second grounding component, thereby avoiding the accumulation of static electricity in the pipeline system and reducing the potential hazards caused by static electricity accumulation.

[0022] In addition, the pipeline system of the present application also provides an electrostatic shielding layer on the outer wall of the filter device, which can prevent frictional static electricity accumulation caused by operators replacing the filter device, thereby avoiding potential hazards caused by static electricity accumulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0024] in:

[0025] Figure 1 A schematic diagram of the structure of a pipeline according to some embodiments of the present application;

[0026] Figure 2 It is a structural schematic diagram of a pipeline system according to some embodiments of the present application;

[0027] Figure 3 is a schematic structural diagram of a first grounding component or a second grounding component according to some embodiments of the present application;

[0028] Figure 4 is a schematic diagram of the structure of a connecting cap according to some embodiments of the present application; and

[0029] Figure 5It is a schematic diagram of the structure of a fixing member according to some embodiments of the present application. DETAILED DESCRIPTION

[0030] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0031] The present application provides a pipeline for liquid transportation, comprising: a tubular insulating substrate; and a conductive strip, wherein the conductive strip is arranged on the inner surface of the insulating substrate for contacting the liquid, and the material of the conductive strip comprises graphite.

[0032] The pipeline provided by the present application adds a conductive graphite conductive strip on the inner surface of the pipeline insulation substrate, and the resulting conductive strip can conduct the static charge generated by the friction between the liquid and the inner wall of the pipeline. By grounding the conductive strip, static electricity can be transferred from the pipeline, avoiding various hazards caused by the release of static charge in the pipeline.

[0033] The pipeline provided in this application will be described in detail below with reference to the embodiments and drawings.

[0034] refer to Figure 1 An embodiment of the present application provides a pipeline 100 for liquid transportation, including: a tubular insulating substrate 101 and a conductive strip 102.

[0035] In some embodiments, the liquid includes an organic solvent. In some embodiments, the liquid includes isopropyl alcohol (IPA). In semiconductor manufacturing processes, isopropyl alcohol is usually used to assist in wafer dehydration and drying. Isopropyl alcohol is volatile and can reduce the surface tension of water. It can accelerate the separation of water from the wafer to avoid residue while protecting the etching lines on the surface of advanced process wafers from damage by water surface tension. Isopropyl alcohol is used to assist drying in most wet etching or cleaning processes.

[0036] In some embodiments, the material of the insulating substrate includes at least one of polytetrafluoroethylene (PTFE) and tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA).

[0037] In some embodiments, the ratio of the wall thickness to the diameter of the insulating substrate 101 is 1:(6-16), so as to reduce the amount of material required for manufacturing the pipeline 100 while meeting the strength requirements of the pipeline 100.

[0038] In some embodiments, the conductive strip 102 is disposed on the inner surface of the insulating substrate 101 for contacting the liquid. The conductive strip 102 can conduct static charges generated by friction between the liquid and the insulating substrate 101 to prevent the static charges from accumulating in the pipe 100 .

[0039] In some embodiments, the conductive strip 102 is made of graphite. Graphite has good electrical conductivity and certain chemical inertness, and can meet the transportation requirements of most liquids.

[0040] In some embodiments, the ratio of the thickness of the conductive strip 102 to the thickness of the insulating substrate 101 is 1:(9-19). If the conductive strip 102 is too thick, it will affect the strength of the insulating substrate 101 and the safety of the pipe 100; if the conductive strip 102 is too thin, it will affect the conduction effect of static charge and fail to conduct the static charge to the outside of the pipe 100 immediately and efficiently. At the same time, when the pipe 100 needs to be bent and assembled, the conductive strip 102 is prone to short circuit, making its static grounding function ineffective.

[0041] In some embodiments, the conductive strip 102 can conduct the static charge of the pipeline 100 to the ground by contacting a grounded connector, thereby preventing the static charge from accumulating in the pipeline 100 and causing harm.

[0042] In some embodiments, the length of the conductive strip 102 is greater than or equal to the length of the insulating substrate 101 , so that the conductive strip 102 can contact a grounded connector.

[0043] In some embodiments, there are multiple conductive strips 102, and the multiple conductive strips 102 are evenly distributed along the inner surface of the insulating substrate 101. In some embodiments, the number of the conductive strips 102 is 3, 4, 5 or 6. In some embodiments, the number of the conductive strips 102 is 6.

[0044] In some embodiments, the conductive strip 102 is in the shape of a long strip parallel to the axis of the pipeline 100 .

[0045] In some embodiments, the resistivity of the conductive strip 102 is 3.3x10 6 ~3.1x10 8 ohms / m.

[0046] In some embodiments, the pipe 100 further includes a metal mesh 103 , and the metal mesh 103 is covered on the outer surface of the insulating substrate 101 .

[0047] In some embodiments, the distance between the metal mesh 103 and the outer surface of the insulating substrate 101 is 0-1 mm. The metal mesh and the insulating substrate 101 are closely matched to ensure that the outer surface of the insulating substrate 101 and the metal mesh 103 have an effective contact range of

[0048] In some embodiments, the metal mesh 103 is a spiral metal wire wrapped around the substrate, and the spiral pitch is 15-30 mm.

[0049] In some embodiments, the metal mesh 103 is connected to a first grounding wire 103a. The metal mesh 103 is grounded, so that the pipeline 100 can achieve internal and external voltage balance, and can also prevent static electricity in the external environment from breaking through the pipeline 100, further improving the safety of the pipeline 100.

[0050] In some embodiments, a first end of the first grounding wire 103 a is connected to the metal mesh 103 , and a second end of the first grounding wire 103 a is connected to the ground.

[0051] The beneficial effects of the pipeline provided by the embodiment of the present application include but are not limited to the following:

[0052] The pipeline provided by the present application adds a conductive graphite conductive strip on the inner surface of the pipeline insulation substrate, and the resulting conductive strip can conduct the static charge generated by the friction between the liquid and the inner wall of the pipeline. By grounding the conductive strip, static electricity can be transferred from the pipeline, avoiding various hazards caused by the release of static charge in the pipeline.

[0053] The present application also provides a pipeline system for liquid transportation, comprising: a plurality of pipelines of the technical solution of the present application, the plurality of pipelines comprising a first pipeline, a second pipeline, a third pipeline and a fourth pipeline connected in sequence; the first pipeline is used to be connected to a liquid source, and the fourth pipeline is provided with a liquid outlet; a filtering device is arranged between the second pipeline and the third pipeline, and is connected to the second pipeline and the third pipeline; a first grounding component is used to connect the first pipeline and the second pipeline and to ground the first pipeline and the second pipeline; and a second grounding component is used for the third pipeline and the fourth pipeline and to ground the third pipeline and the fourth pipeline.

[0054] The pipeline system provided in the present application uses the pipeline provided by the technical solution of the present application, and grounds the pipeline through a first grounding component and a second grounding component, thereby avoiding the accumulation of static electricity in the pipeline system and reducing the potential hazards caused by static electricity accumulation.

[0055] The pipeline system provided by the present application will be described in detail below with reference to the embodiments and drawings.

[0056] refer to Figure 2 The present application also provides a pipeline system for liquid transportation, including a plurality of pipelines 100 provided by the technical solution of the present application, a filter device 200, a first grounding component 300 and a second grounding component 300'.

[0057] In some embodiments, the plurality of pipelines include a first pipeline 100 ′, a second pipeline 100 ″, a third pipeline 100 ′″, and a fourth pipeline 100 ″″, which are connected in sequence.

[0058] In some embodiments, the first end of the first pipe 100 ′ is used to connect to the liquid source 10 , and the second end of the first pipe 100 ′ is used to communicate with the first end of the second pipe 100 ′.

[0059] In some embodiments, the first end of the second pipe 100 ″ is used to communicate with the first pipe 100 ′, and the first end of the second pipe 100 ″ is used to communicate with the filter device 200 to transport the liquid in the second pipe 100 ″ to the filter device 200 for filtration.

[0060] In some embodiments, the first end of the third pipe 100'' is used to communicate with the filter device 200, and the liquid filtered by the filter device 200 flows into the third pipe 100''.

[0061] In some embodiments, the first end of the fourth pipe 100"" is used to communicate with the third pipe 100"', and the second end of the fourth pipe 100"" is provided with a liquid outlet, and the liquid flows out of the fourth pipe 100"" from the liquid outlet and flows to the operating platform 30, for example, the wafer surface.

[0062] In some embodiments, the second end of the fourth pipe 100"" is connected to a nozzle 20.

[0063] In some embodiments, the filtering device 200 is disposed between the second pipe 100 ″ and the third pipe 100 ″′, and is connected to the second pipe 100 ″ and the third pipe 100 ″′.

[0064] In some embodiments, the filter device 200 includes a liquid inlet 201, and the liquid inlet 201 is used to connect to the second end of the second pipe 100". In some embodiments, the filter device 200 also includes a liquid outlet 202, and the liquid outlet 202 is used to connect to the first end of the third pipe 100'". The liquid to be filtered enters the filter device 200 through the liquid inlet 201, and after being filtered by the filter device 200, it flows into the third pipe 100'" through the liquid outlet 202.

[0065] In some embodiments, the filtering device 200 further includes a drainage pipe 203 for discharging waste liquid generated during filtration. The drainage pipe 203 is a pipe provided by the technical solution of the present application.

[0066] In some embodiments, the filtration device 200 is a nano-filter.

[0067] In some embodiments, the filter device 200 is detachably connected to the metal bracket 204 via a metal clamp 204a. In some embodiments, the metal clamp 204a is connected to the metal bracket 204 via a threaded connector, and the filter device 200 is located inside the annular support area surrounded by the metal clamp 204a and the metal bracket 204. While supporting the filter device 200, the metal bracket 204 can also conduct part of the friction static electricity generated by the operator when replacing the filter device 200.

[0068] In some embodiments, the outer wall of the filter device 200 is provided with an electrostatic shielding layer 205, and the electrostatic shielding layer 205 is arranged around the peripheral wall of the filter device 200 to prevent the operator from generating frictional static electricity accumulation when replacing the filter device 200, thereby avoiding potential hazards caused by static electricity accumulation.

[0069] In some embodiments, the first grounding assembly 300 is used to connect the first pipe 100' and the second pipe 100" and ground the first pipe 100' and the second pipe 100"; and the second grounding assembly 300' is used to connect the third pipe 100"' and the fourth pipe 100"" and ground the third pipe 100"' and the fourth pipe 100"".

[0070] refer to Figure 3 In some embodiments, the first grounding component 300 or the second grounding component 300' includes: a connection cap pair 310, the connection cap pair 310 is used to connect to the port of the pipeline; and a fixing member 320, used to connect the connection cap pair 310 and ground the connection cap pair 310.

[0071] refer to Figure 4In some embodiments, any one of the connection cap pairs 310 includes: an insulating outer shell 311, the insulating outer shell 311 is provided with a connection port 311a matching the port of the pipe; and a conductive inner shell 312, the conductive inner shell 312 includes a first part 312a located inside the insulating outer shell 311 and a second part 312b located outside the insulating outer shell 311, the first part 312a and the second part 312b are integrally connected and hollow inside, the first part 312a is used to contact the conductive strip 102, the second part 312b is used for grounding, and the materials of the first part 312a and the second part 312b include graphite.

[0072] In some embodiments, the material of the insulating shell 311 includes at least one of polytetrafluoroethylene (PTFE) and tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA).

[0073] refer to Figure 5 In some embodiments, the fixing member 320 is connected to the second portion 312b of the conductive inner shell 312 of the connection cap pair 310. In some embodiments, the fixing member 320 includes a detachably connected semicircular ring pair 321, the semicircular ring pair 321 is adapted to the second portion 312b, and the second portions 312b of adjacent conductive inner shells 312 can be respectively inserted into the circular ring formed by the semicircular ring pair 321 and contact each other.

[0074] In some embodiments, the semicircular ring pair 321 is respectively provided with a threaded through hole penetrating the semicircular ring 321 , and the semicircular ring pair 321 is connected by a threaded fastener 322 adapted to the threaded through hole.

[0075] In some embodiments, the material of the fixing member 320 includes a conductive material. In some embodiments, the material of the fixing member 320 includes a metal. In some embodiments, the material of the fixing member 320 includes stainless steel.

[0076] In some embodiments, the fixing member 320 is connected to a second grounding wire 321a, a first end of the second grounding wire 321a is connected to any one of the semicircular rings 321, a second end of the second grounding wire 321a is grounded, and the static charge conducted by the conductive strip 102 is conducted from the semicircular ring 321 to the second grounding wire 321a, and then conducted from the second grounding wire 321a to the ground, thereby avoiding the accumulation of static charge in the pipeline.

[0077] In some embodiments, reference Figure 2The process of the pipeline system conveying isopropyl alcohol to the wafer cleaning equipment is as follows: the isopropyl alcohol is transferred from the chemical storage tank (Chemical Cabinet (CC) Tank), i.e., the liquid source 10, to the first pipeline 100' by a liquid pump under pressure, and then enters the filtering device 200 through the second pipeline 100" for nano-particle filtration. The filtered isopropyl alcohol is transferred to the multi-process chamber (Multi-Process Chamber) through the third pipeline 100"' and the fourth pipeline 100"", and is sprayed onto the surface of the wafer (i.e., the operating platform 30) through the nozzle 20. The static charge generated during the transportation of the isopropyl alcohol is transferred to the ground by the first grounding wire 103a and the second grounding wire 321a.

[0078] In some embodiments, when the operator connects the pipeline 100 and the filter device 200, or replaces the filter device 200, the operator always maintains contact with the metal mesh 103 or the electrostatic shielding layer 205, so that the pipeline system can promptly conduct or dissipate the static charge between the operator and the pipeline 100 and the filter device 205, and prevent the static charge generated by the friction between the nitrile gloves worn by the operator and the pipeline 100 from accumulating to an extremely high electrostatic field strength.

[0079] The beneficial effects of the pipeline system provided by the embodiment of the present application include but are not limited to the following:

[0080] The pipeline system provided in the present application uses the pipeline provided by the technical solution of the present application, and grounds the pipeline through a first grounding component and a second grounding component, thereby avoiding the accumulation of static electricity in the pipeline system and reducing the potential hazards caused by static electricity accumulation.

[0081] The pipeline system of the present application also has an electrostatic shielding layer disposed on the outer wall of the filter device, which can prevent frictional static electricity accumulation caused by operators replacing the filter device, thereby avoiding potential hazards caused by static electricity accumulation.

[0082] Experimental data show that when an operator wearing conventional nitrile protective gloves touches and rubs a conventional PFA pipe three times, static electricity can accumulate to -2.8 to -9.7 kV / 2cm, and when static electricity accumulates more than 3 kV, sparks may be generated, which may ignite the residual flammable solvent when replacing the filter device, or even detonate the solvent vapor. However, when using the pipeline system provided by this application, using the pipeline 100 provided by this application, and adding the metal mesh 103 and the electrostatic shielding layer 205, the electrostatic field strength is reduced to -80 to +44 V / 2cm under the same friction action, which physically eliminates the sparks generated by friction caused by human operation and the various risks arising therefrom.

[0083] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0084] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0085] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0086] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0087] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0088] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0089] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0090] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A pipeline for liquid transportation, characterized in that: include: A tubular insulating substrate; as well as A conductive strip is disposed on the inner surface of the insulating substrate for contacting the liquid, and the conductive strip is made of graphite.

2. The pipeline according to claim 1, characterized in that The ratio of the thickness of the conductive strip to the thickness of the insulating substrate is 1:(9-19).

3. The pipeline according to claim 1, characterized in that There are multiple conductive strips, and the multiple conductive strips are evenly distributed along the inner surface of the insulating substrate.

4. The pipeline according to claim 1, characterized in that It also includes a metal mesh, and the metal mesh cover is arranged on the outer surface of the insulating substrate.

5. The pipeline according to claim 4, characterized in that The distance between the metal mesh and the outer surface of the insulating substrate is 0-1 mm.

6. The pipeline according to claim 5, characterized in that The metal mesh is a spiral metal wire wrapped around the substrate.

7. A pipeline system for liquid transportation, characterized in that: include: The plurality of pipelines according to any one of claims 1 to 6, wherein the plurality of pipelines comprises a first pipeline, a second pipeline, a third pipeline and a fourth pipeline connected in sequence; the first pipeline is used to be connected to a liquid source, and the fourth pipeline is provided with a liquid outlet; a filtering device, disposed between the second pipe and the third pipe, and connected to the second pipe and the third pipe; a first grounding assembly, used to connect the first pipe and the second pipe and to ground the first pipe and the second pipe; and The second grounding component is used for the third pipeline and the fourth pipeline and grounds the third pipeline and the fourth pipeline.

8. The piping system according to claim 7, characterized in that The first grounding component or the second grounding component comprises: a pair of connection caps, the pair of connection caps being used to connect to the ports of the pipeline; and The fixing member is used to connect the connection cap pair and ground the connection cap pair.

9. The piping system according to claim 8, characterized in that Any one of the connection caps in the connection cap pair comprises: an insulating housing, the insulating housing being provided with a connection port matching the port of the pipeline; and A conductive inner shell, the conductive inner shell comprises a first portion located inside the insulating outer shell and a second portion located outside the insulating outer shell, the first portion and the second portion are integrally connected and hollow inside, the first portion is used to contact the conductive strip, the second portion is used to be grounded, and the materials of the first portion and the second portion include graphite.

10. The piping system according to claim 7, characterized in that The outer wall of the filter device is provided with an electrostatic shielding layer.

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