Film thickness detection device and processing equipment with same

Abstract

The utility model discloses a film thickness detection device and processing equipment having the same, the film thickness detection device comprises a light source module and a receiving module, the light source module and the receiving module are respectively located at two sides of the thickness direction of a film to be detected, the light source module has first light emitted towards the film to be detected, and the receiving module has second light emitted towards the film to be detected. The first light penetrates through the to-be-measured film to form second light, the first light has first light intensity, the second light has second light intensity, the first light intensity is larger than the second light intensity, the receiving module is used for receiving the second light with the second light intensity so as to judge the thickness of the to-be-measured film, and the thickness of the to-be-measured film is larger than the thickness of the to-be-measured film. The receiving module comprises a solar cell and a galvanometer electrically connected with the solar cell. According to the film thickness detection device provided by the utility model, the detection module has high detection precision, and the production cost is low.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a film thickness detection device and processing equipment having the same. Background Art

[0002] Perovskite solar cells are widely regarded as the next generation of photovoltaic technology due to their simple process, low manufacturing cost, and high photoelectric conversion efficiency. In addition, compared with the current mainstream commercial silicon cells that need to assemble cells piece by piece, perovskite solar cells have the advantage of being able to be directly prepared on a large scale. However, for perovskite solar cells with large-area characteristics, ensuring the uniformity of the perovskite film has an absolute impact on the overall component performance during the large-area preparation process. However, the current test of the uniformity of perovskite films either uses sampling detection or cannot be integrated on the production line. The cost of a small number of equipment that can simultaneously achieve large-area rapid detection is very high, so it is crucial to develop a film uniformity test with a suitable cost.

[0003] In addition, most of the current thickness detection equipment is difficult to integrate into the logistics track for online non-destructive testing. One of the reasons is that the online non-destructive testing process requires very high accuracy of the detection module. Traditional high-precision photoelectric detectors are often expensive. The cost of achieving fast and high-precision testing at the square meter level is as high as hundreds of thousands to millions. Therefore, the above reasons are important shackles restricting the industrialization development of perovskite. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a film thickness detection device, wherein the detection module of the film thickness detection device has high detection accuracy and low production cost.

[0005] According to an embodiment of the utility model, a film thickness detection device includes: a light source module and a receiving module, wherein the light source module and the receiving module are respectively located on both sides of the thickness direction of the film to be measured, the light source module has a first light ray emitted toward the film to be measured, the first light ray passes through the film to be measured to form a second light ray, the first light ray has a first light intensity, the second light ray has a second light intensity, the first light intensity is greater than the second light intensity, and the receiving module is used to receive the second light ray of the second light intensity to determine the thickness of the film to be measured, wherein the receiving module includes a solar cell and an ammeter electrically connected to the solar cell.

[0006] According to the film thickness detection device of the embodiment of the utility model, the cost of the receiving module can be reduced by making the receiving module include a solar cell and an ammeter. In addition, the solar cell can absorb light better, so it can better absorb the light of the second light intensity, thereby better improving the detection accuracy of the thickness of the film to be measured.

[0007] In addition, the film thickness detection device according to the utility model may also have the following additional technical features:

[0008] In some embodiments of the present invention, the solar cell is a crystalline silicon solar cell.

[0009] In some embodiments of the present invention, the light source module includes a plurality of light source units, and the plurality of light source units are spliced ​​end to end along the width direction of the film to be tested.

[0010] In some embodiments of the present invention, the solar cell comprises a plurality of receiving units, and the plurality of receiving units are spliced ​​end to end along the width direction of the film to be tested.

[0011] In some embodiments of the present invention, the ammeter is a multi-channel ammeter for acquiring the current of each of the receiving units.

[0012] In some embodiments of the present invention, the light source module is suitable for emitting linear light toward the film to be measured, and the optical path of the linear light is perpendicular to the film to be measured.

[0013] In some embodiments of the present invention, the film thickness detection device further comprises a conveying module, wherein the conveying module is suitable for conveying the light-transmitting substrate having the film to be detected.

[0014] In some embodiments of the present invention, the conveying module includes multiple rollers, the rotation axis of the rollers extends along the width direction of the film to be tested, and within the projection plane where the film to be tested is located, the emitting area of ​​the light source module and the receiving area of ​​the receiving module are both located between two adjacent rollers.

[0015] The utility model also provides a processing device for the perovskite film of the above embodiment.

[0016] The processing equipment according to the embodiment of the utility model is a processing equipment for perovskite thin film, and the processing equipment includes a logistics track and a film thickness detection device, and the logistics track is suitable for conveying a light-transmitting substrate with a perovskite thin film along a first direction.

[0017] Therefore, according to the processing equipment for perovskite film of the utility model, a thickness detection device can be set on the logistics track for processing the perovskite film to detect the thickness of the perovskite film, which can not only better detect the thickness of the perovskite film, but also improve the work efficiency of the thickness detection of the perovskite film.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 The invention discloses a film thickness detection device according to an embodiment of the invention.

[0021] Figure 2 The invention discloses a film thickness detection device according to an embodiment of the invention.

[0022] Reference numerals:

[0023] Film thickness detection device 100,

[0024] Light source module 1, light source unit 11,

[0025] Receiving module 2, receiving unit 21,

[0026] Perovskite film 3, multi-channel ammeter 4, processor 5. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0028] In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0029] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0030] Reference below Figure 1-Figure 2 A film thickness detection device 100 according to an embodiment of the present invention is described.

[0031] like Figure 2 As shown, according to the film thickness detection device 100 of the embodiment of the utility model, it includes a light source module 1 and a receiving module 2, the light source module 1 and the receiving module 2 are respectively located on both sides of the thickness direction of the film to be measured, the light source module 1 has a first light emitted toward the film to be measured, the first light passes through the film to be measured to form a second light, the first light has a first light intensity, the second light has a second light intensity, the first light intensity is greater than the second light intensity, the receiving module 2 is used to receive the second light of the second light intensity, the receiving module 2 can send the received light information to the processor 5, the processor 5 can be a computer, the computer can calculate the thickness of the film to be measured through a computer program, it should be noted here that the film to be measured can be a perovskite film 3, or it can be other semi-transparent and semi-reflective films, and it should be explained that for the semi-transparent and semi-reflective film, a part of the light toward the semi-transparent and semi-reflective film can pass through the semi-transparent and semi-reflective film, and a part of it can be reflected by the semi-transparent and semi-reflective film. In addition, it should be noted that the first light can be the light directly emitted by the light source module 1 toward the film to be measured, or it can be the light reflected after the light is emitted by the light source module 1, thus, the light emitted to the film to be measured after reflection is the first light.

[0032] Taking perovskite film 3 as an example, perovskite film 3 is a semiconductor material with a crystal structure of ABX3 (A is an organic cation or an inorganic cation, B is a transition metal ion, and X is a halogen ion). At present, most perovskite films 3 are used in the field of solar cells. Among them, the photoelectric conversion efficiency of perovskite solar cells can reach more than 20%, which is significantly better than traditional silicon solar cells.

[0033] In addition, perovskite solar cells are widely regarded as the next generation of photovoltaic technology due to their simple process, low manufacturing cost and high photoelectric conversion efficiency. Moreover, compared with the current mainstream commercial silicon cells that need to assemble cells piece by piece, perovskite solar cells have the advantage of being able to be directly prepared on a large scale. However, for perovskite solar cells with large-area characteristics, during the large-area preparation process, ensuring the uniformity of the perovskite film 3 has an absolute impact on the overall component performance. However, the current test of the uniformity of the perovskite film 3 is either conducted by sampling or cannot be integrated into the production line. The cost of a small amount of equipment that can simultaneously achieve large-area rapid detection is very high, so it is very important to develop a film uniformity test with a suitable cost.

[0034] In addition, most of the current thickness detection equipment is difficult to integrate into the logistics track for online non-destructive testing. One of the reasons is that the online non-destructive testing process requires very high accuracy of the detection module. Traditional high-precision photoelectric detectors are often expensive. The cost of achieving fast and high-precision testing at the square meter level is as high as hundreds of thousands to millions. Therefore, the above reasons are important shackles restricting the industrialization development of perovskite.

[0035] Based on this, the present application proposes a film thickness detection device 100, the detection module of which has high detection accuracy and low production cost.

[0036] Specifically, the receiving module 2 includes a solar cell and an ammeter electrically connected to the solar cell. The solar cell is low in cost and can be easily manufactured to have a larger coverage area. Figure 2In a specific example shown, the film to be tested is transported from back to front, the light source module 1 is arranged above the film to be tested, and the receiving module 2 is arranged below the film to be tested, thereby, in the process of the film to be tested being transported from back to front, the light source module 1 can continuously emit light toward the film to be tested, and the receiving module 2 can continuously receive the light passing through the film to be tested, and the receiving module 2 is composed of solar cells, and solar cells can be easily manufactured in a larger area and have a low production cost. Therefore, in the left and right directions, the solar cells can better cover the bottom of the film to be tested, and even in the left and right directions, the width of the solar cells is greater than the width of the film to be tested, thereby, the light source module 1 and the receiving module 2 can fully cover the width of the film to be tested, and in the process of the film to be tested being transported from back to front, the overall thickness of the film to be tested can be detected.

[0037] In a specific example, the absorption band of the perovskite film 3 is mainly concentrated between 300nm and 800nm, and the absorption ratio of the perovskite film 3 to light in the range of 700-800nm ​​is approximately between 30% and 80%, so there is still a lot of light passing through; and the absorption band of the crystalline silicon solar cell is between 300-1200nm, which can better cover the absorption band of the perovskite film 3. According to the Lambert-Beer law, the absorbance of an object is linearly related to the thickness of the film, and the photocurrent generated by the crystalline silicon cell under non-strong irradiation conditions is also linearly related to the light intensity. Therefore, the thickness of the perovskite film 3 can be determined by detecting the light intensity passing through the perovskite film 3 sample through the crystalline silicon cell.

[0038] In addition, the response of crystalline silicon solar cells to the solar spectrum is in the microsecond range. Using the current of crystalline silicon cells to detect the thickness distribution of perovskite can complete a sampling point in a few microseconds to tens of microseconds, thereby achieving rapid detection of the film to be tested.

[0039] Furthermore, the crystalline silicon solar cell industry chain is now very complete. Compared with the high cost of high-precision and fast photodetectors, crystalline silicon solar cells only cost less than 200 yuan per square meter, which exponentially reduces equipment costs and costs.

[0040] Therefore, according to the film thickness detection device 100 of the embodiment of the utility model, the cost of the receiving module 2 can be reduced by making the receiving module 2 include a solar cell and an ammeter, and the solar cell can absorb light better, so it can better absorb the light of the second light intensity, thereby better improving the detection accuracy of the thickness of the film to be measured.

[0041] In some embodiments of the present invention, the solar cell is a crystalline silicon solar cell. The solar cell made of silicon crystal has high efficiency, good stability, good durability, wide illumination conditions, and is easy to manufacture. Specifically, the conversion efficiency of the crystalline silicon solar cell can reach more than 22%, which is one of the most efficient types of solar cells. The crystalline silicon solar cell has good stability and can still maintain a high efficiency under low light intensity. The life of the crystalline silicon solar cell is relatively long, which can reach more than 20-25 years. The crystalline silicon solar cell can be used indoors, outdoors, on sunny days, rainy days, and even on cloudy days. Compared with other solar cells, the manufacturing process of the crystalline silicon solar cell is simpler and the cost is relatively low. Therefore, the film thickness detection device 100 of the present invention can not only reduce the production cost, but also reduce the maintenance cost, and can also better improve the detection accuracy of the thickness of the film to be measured.

[0042] In some embodiments of the present invention, Figure 2 As shown, the light source module 1 includes a plurality of light source units 11, and the plurality of light source units 11 are spliced ​​end to end along the width direction of the film to be tested. In one example, when the width of the perovskite film 3 increases, the number of light source units 11 can be further increased, that is, new light source units 11 can be spliced ​​on the left and right sides of the original number of light source units 11, which is simple and convenient to operate. Furthermore, when one of the light source units 11 is damaged, the damaged light source unit 11 can be disassembled and replaced or repaired, which can reduce the maintenance cost, and at the same time will not affect the thickness detection efficiency of the perovskite film, thereby improving work efficiency.

[0043] In some embodiments of the utility model, the solar cell includes a plurality of receiving units 21, and the plurality of receiving units 21 are spliced ​​end to end along the width direction of the film to be tested. In one example, when the width of the perovskite film 3 increases, the number of receiving units 21 can be further increased, that is, new receiving units 21 can be spliced ​​on the left and right sides of the original number of receiving units 21, which is simple and convenient to operate. Furthermore, when one of the receiving units 21 is damaged, the damaged receiving unit 21 can be disassembled and replaced or repaired, which can reduce the maintenance cost, and at the same time will not affect the thickness detection efficiency of the titanium ore film, thereby improving work efficiency.

[0044] Optionally, the ammeter is a multi-channel ammeter 4, which is used to obtain the current of each receiving unit 21. The multi-channel ammeter 4 is an instrument that can measure multiple current channels at the same time. That is to say, the light passing through the film to be tested can be received by multiple receiving units 21, and each receiving unit 21 can be detected by the multi-channel ammeter 4 after absorbing the light and converting it into current. In this way, it can be understood that in the width direction of the film to be tested, the film to be tested can be divided into multiple sections by multiple receiving units 21, and by detecting the thickness of each section of the film to be tested, the detection accuracy of the thickness of the film to be tested can be improved.

[0045] In some embodiments of the present invention, the light source module 1 is suitable for emitting linear light toward the film to be measured, and the optical path of the linear light is perpendicular to the film to be measured, thereby preferably reducing the detection error of the thickness of the film to be measured.

[0046] Optionally, the film thickness detection device 100 also includes a conveying module, which is suitable for conveying a light-transmitting substrate having a film to be tested. In one example, the conveying module may be a part of a logistics track. In another example, the conveying module may be placed between two adjacent sections of the logistics track. The film to be tested may be a perovskite film 3. The light-transmitting substrate having the perovskite film 3 may be transported from one section of the track to the conveying module to complete the thickness detection of the perovskite film 3, and then transported to another section of the track. This will not only not affect the transportation of the light-transmitting substrate having the perovskite film 3 by the logistics track, but also allow the thickness detection device to be set at any position on the logistics track.

[0047] Optionally, the conveying module includes multiple rollers, and the rotation axis of the rollers extends along the second direction. In the projection plane where the perovskite film 3 is located, the emitting area of ​​the light source module 1 and the receiving area of ​​the receiving module 2 are both located between two adjacent rollers. Thus, through the conveying of multiple rollers, not only can the conveying of the transparent substrate with the perovskite film 3 be guaranteed, but it is also beneficial to the arrangement of the light source module 1 and the receiving module 2, so that the thickness detection device can better detect the thickness of the perovskite film 3.

[0048] Optionally, the position of at least one of the emission area of ​​the light source module 1 and the receiving area of ​​the receiving module 2 is adjustable. Figure 1 In a specific example shown in FIG. 1 , the first direction is the front-to-back direction, and the second direction is the left-to-right direction. At the same time, the second direction is also the width direction of the perovskite film 3. In addition, it should be noted that: Figure 1 The perovskite film 3 is only a schematic diagram for the convenience of describing the present application and does not represent the actual perovskite film 3.

[0049] Furthermore, the light source module 1 is located above the perovskite film 3, and the receiving module 2 is located below the perovskite film 3. The light source module 1 can continuously emit light, and the light can be line light or surface light. What needs to be explained here about the line light and the surface light is that, in the projection plane perpendicular to the direction of the light path, the line light is a line segment on the projection plane, and the surface light is an area on the projection plane. By comparison, it can be seen that the line light has better focusing performance and can be better applied to the film thickness detection device 100 of the present application.

[0050] In one example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 can continuously emit linear light, and after passing through the perovskite film 3, the receiving module 2 can continuously receive the transmitted linear light, and then continuously detect the thickness of the perovskite film 3 through which the linear light passes. In another example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 can continuously emit linear light, and after passing through the perovskite film 3, the receiving module 2 can be opened at a predetermined interval to receive the transmitted linear light, thereby detecting the thickness of the perovskite film 3 through which the linear light passes. In another example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 and the receiving module 2 can be opened at the same time at a predetermined interval to receive the transmitted linear light, thereby detecting the thickness of the perovskite film 3 through which the linear light passes. Therefore, the film thickness detection device 100 of the present application can detect the thickness of the perovskite film 3 according to actual needs, and the above examples are not intended to limit the present application.

[0051] Furthermore, when the width of the perovskite film 3 changes, the position of the emission area of ​​the light source module 1 can be adjusted in the direction of the width of the perovskite film 3, the position of the receiving area of ​​the receiving module 2 can be adjusted, and the positions of the emission area of ​​the light source module 1 and the receiving area of ​​the receiving module 2 can also be adjusted at the same time. Here, taking the adjustment of the position of the emission area of ​​the light source module 1 as an example, in the direction of the width of the perovskite film 3, the light emission angle of the light source module 1 can be adjusted, and the size of the light source module 1 can be adjusted, so as to increase the emission range of the emission area of ​​the light source module 1, thereby achieving the purpose of adjusting the position of the emission area of ​​the light source module 1, and the position of the light source module 1 can also be adjusted, so as to achieve the purpose of adjusting the position of the emission area of ​​the light source module 1. Therefore, even if the width of the perovskite film 3 changes, the thickness of the perovskite film 3 can be better detected, so that the film thickness detection device 100 of the present application can not only detect the thickness of the perovskite film 3 on the logistics track, but also can detect the thickness of the perovskite film 3 better after the width of the perovskite film 3 changes.

[0052] Therefore, according to the film thickness detection device 100 for online detection of the perovskite film 3 of the embodiment of the utility model, by making the light source module 1 and the receiving module 2 designed separately and respectively arranged on both sides of the thickness direction of the perovskite film 3, the light source module 1 and the receiving module 2 can be adapted to more detection environments and installation positions, with good flexibility and convenient maintenance. In addition, the position of at least one of the emission area of ​​the light source module 1 and the receiving area of ​​the receiving module 2 is adjustable, so that even if the width of the perovskite film 3 changes, the thickness of the perovskite film 3 can be well detected, and the film thickness detection device 100 of the utility model can well detect a larger area of ​​the perovskite film 3, with a large coverage area, so as to better confirm whether the thickness of the perovskite film 3 is uniform.

[0053] In some embodiments of the present invention, the receiving module 2 includes a receiving unit 21 for receiving the second light, and a plurality of receiving units 21 are provided, and the plurality of receiving units 21 are arranged along the second direction, and the plurality of receiving units 21 are all suitable for moving along the second direction. It should be noted here that the plurality in this application refers to two or more than two, and the plurality in the following text is also the same, and will not be repeated in the following text.

[0054] Reference Figure 1 In a specific example shown, four receiving units 21 are provided, and the four receiving units 21 are spaced apart in the left-right direction, so that light passing through the perovskite film 3 at four different positions in the width direction of the perovskite film 3 can be received. In this way, when the width of the perovskite film 3 changes, the positions of the four receiving units 21 can be adjusted, thereby realizing the detection of the thickness at the corresponding position of the perovskite film 3.

[0055] Here, it should be noted that the number of receiving units 21 may also be three, five, six, etc., and there is no limitation here.

[0056] Optionally, the movements of the multiple receiving units 21 in the second direction are independent of each other and do not interfere with each other. Therefore, the positions of the receiving units 21 can be adjusted according to actual needs to detect the thickness of the perovskite film 3 at different positions.

[0057] In some embodiments of the utility model, the receiving module 2 further includes: a sliding assembly, the sliding assembly includes a slide rail and a slider, the slide rail extends along the second width direction, the slider is slidably arranged on the slide rail, there are multiple sliders, and multiple receiving units 21 are installed on the multiple sliders in a one-to-one correspondence. Thus, through the cooperation of the slide rail and the slider, the receiving unit 21 can stably move along the second direction, and here, the movement of the slider can be manual, that is, for perovskite films 3 of different widths, it is only necessary to manually adjust the position of the slider, and then fix the position of the slider, so that the receiving unit 21 can stably receive light, which is simple to operate and has good stability.

[0058] Furthermore, the movement of the slider can also be automatic. Specifically, the receiving module 2 also includes a driving component, which is connected to the plurality of sliders in a transmission manner. In a specific example, the film thickness detection device 100 can also include a detector, which can obtain the width information of the perovskite film 3. Then, the controller can control the driving component to drive the slider to move according to the width information, thereby intelligently adjusting the position of each receiving unit 21, which is simple, convenient, and can also save manpower.

[0059] In some embodiments of the present invention, the light source module 1 includes a plurality of light source units 11, the plurality of light source units 11 are arranged along the second direction, and each light source unit 11 corresponds to at least one receiving unit 21. That is, in one example, the light emitted by one light source unit 11 can be received by one receiving unit 21 after passing through the perovskite film 3, and in another example, the light emitted by one light source unit 11 can be received by two or more receiving units 21 after passing through the perovskite film 3.

[0060] In a specific example, light emitted by a light source unit 11 can be received by two receiving units 21 after passing through the perovskite film 3. Under specific working conditions, the two receiving units 21 can be turned on to receive light at the same time or separately, and there is no limitation here.

[0061] Furthermore, when the position of the light source unit 11 changes, the position of the receiving unit 21 will also change synchronously with the position of the light source unit 11, and vice versa.

[0062] The utility model also provides a processing device having the perovskite film 3 of the above embodiment.

[0063] The processing equipment according to the embodiment of the utility model is a processing equipment for a perovskite film 3, and the processing equipment includes a logistics track and a film thickness detection device 100, and the logistics track is suitable for conveying a light-transmitting substrate with a perovskite film 3 along a first direction.

[0064] Therefore, according to the processing equipment for the perovskite film 3 of the utility model, a thickness detection device can be set on the logistics track for processing the perovskite film 3 to detect the thickness of the perovskite film 3, which can not only better detect the thickness of the perovskite film 3, but also improve the work efficiency of the thickness detection of the perovskite film 3.

[0065] Other structures and operations of the film thickness detection device and processing equipment according to the embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0066] In the description of this specification, the description with reference to the terms "some embodiments", "optionally", "further" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0067] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A film thickness detection device, It is characterized in that include: A light source module and a receiving module, wherein the light source module and the receiving module are respectively located on both sides of the thickness direction of the film to be tested, the light source module has a first light ray emitted toward the film to be tested, the first light ray passes through the film to be tested to form a second light ray, the first light ray has a first light intensity, the second light ray has a second light intensity, the first light intensity is greater than the second light intensity, and the receiving module is used to receive the second light ray of the second light intensity to determine the thickness of the film to be tested, wherein the receiving module includes a solar cell and an ammeter electrically connected to the solar cell.

2. The film thickness detection device according to claim 1, It is characterized in that The solar cell is a crystalline silicon solar cell.

3. The film thickness detection device according to claim 1, It is characterized in that The light source module includes a plurality of light source units, and the plurality of light source units are spliced ​​end to end along the width direction of the film to be tested.

4. The film thickness detection device according to claim 1, It is characterized in that The solar cell comprises a plurality of receiving units, and the plurality of receiving units are spliced ​​end to end along the width direction of the film to be tested.

5. The film thickness detection device according to claim 4, It is characterized in that The ammeter is a multi-channel ammeter, which is used to obtain the current of each receiving unit.

6. The film thickness detection device according to claim 1, It is characterized in that The light source module is suitable for emitting linear light toward the film to be measured, and a light path of the linear light is perpendicular to the film to be measured.

7. The film thickness detection device according to any one of claims 1 to 6, It is characterized in that The system also includes a conveying module, which is suitable for conveying the light-transmitting substrate having the film to be tested.

8. The film thickness detection device according to claim 7, It is characterized in that The conveying module includes a plurality of rollers, the rotation axes of the rollers extend along the width direction of the film to be tested, and within the projection plane where the film to be tested is located, the emission area of ​​the light source module and the receiving area of ​​the receiving module are both located between two adjacent rollers.

9. A processing device for perovskite thin film, It is characterized in that include: A logistics track and a film thickness detection device as described in any one of claims 1 to 8, wherein the logistics track is suitable for conveying a light-transmitting substrate having the film to be detected along a first direction.

10. A processing device for perovskite thin film, It is characterized in that include: A logistics track and a film thickness detection device as described in claim 7, wherein the logistics track is suitable for conveying the light-transmitting substrate having the film to be measured along a first direction, and the conveying module is placed between two adjacent sections of the logistics track.

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