Perovskite film thickness detection device and processing equipment thereof
By designing independent adjustable light source module and receiving module in the perovskite film thickness detection device, the uniformity problem of perovskite solar cell film thickness detection is solved, and online detection on logistics tracks is realized to meet multi-size requirements , improves detection efficiency and coverage area.
Patent Information
- Application Number
- CN202420124511.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-18
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-01-18
AI Technical Summary
The prior art is difficult to effectively detect the thickness uniformity of the large-area thin film layer of perovskite solar cells, and most thickness detection equipment is difficult to integrate into the logistics track for online inspection, which cannot meet the needs of multi-size customization.
A perovskite film thickness detection device is designed, including an independently adjustable light source module and a receiving module, which are located on both sides of the thickness direction of the film. The light source module emits light and receives light after passing through the film to judge the film thickness. And conduct online inspection on the logistics track.
It realizes flexible and accurate detection of the thickness of large-area perovskite films, adapts to a variety of detection environments and installation locations, improves detection efficiency and coverage area, and ensures thickness uniformity.
Smart Images
Figure CN222166016U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaics, in particular to a thickness detection device for a perovskite film and processing equipment thereof. Background Art
[0002] Perovskite solar cells are widely regarded as the next generation of photovoltaic technology due to their simple process, low manufacturing cost and high photoelectric conversion efficiency. In addition, compared with the current mainstream commercial silicon cells that need to assemble pieces of cells, perovskite solar cells have the advantage of being able to be directly prepared on a large scale. However, for perovskite solar cells with large-area characteristics, the lack of uniformity detection methods for the thickness of the perovskite film layer is an important shackle that currently restricts the industrial development of perovskite. Moreover, most of the current thickness detection equipment is difficult to integrate into the logistics track for online detection. The few compatible online equipment detection modules and light source modules are also integrated into one and can only detect samples and films of the same size. These instruments and equipment are very difficult and complicated to implement, and cannot meet the needs of multi-size customization. Utility Model Content
[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a perovskite film thickness detection device, which can not only better detect the thickness of the perovskite film layer of the perovskite solar cell with large-area characteristics, but also perform online detection on the logistics track.
[0004] According to the thickness detection device of the perovskite film of the embodiment of the utility model, a light-transmitting substrate having the perovskite film is transported along a first direction, and the thickness detection device comprises: a light source module and a receiving module, wherein the light source module and the receiving module are respectively located on both sides of the thickness direction of the perovskite film, the light source module has a first light ray emitted toward the perovskite film, the first light ray passes through the perovskite film to form a second light ray, the first light ray has a first light intensity, the second light ray has a second light intensity, the first light intensity is greater than the second light intensity, and the receiving module is used to receive the second light ray of the second light intensity to determine the thickness of the perovskite film, wherein the light source module and the receiving module are both independently adjustable, and are both spaced apart from the perovskite film, and in a second direction perpendicular to the first direction, the position of at least one of the emission area of the light source module and the receiving area of the receiving module is adjustable.
[0005] According to the thickness detection device of the perovskite film of the embodiment of the utility model, by making the light source module and the receiving module separately designed and respectively arranged on both sides of the thickness direction of the perovskite film, the light source module and the receiving module can be adapted to more detection environments and installation positions, with good flexibility and convenient maintenance. In addition, the position of at least one of the emission area of the light source module and the receiving area of the receiving module is adjustable, so that even if the width of the perovskite film changes, the thickness of the perovskite film can be better detected, and the thickness detection device of the utility model can better detect a larger area of the perovskite film, with a large coverage area, so as to better confirm whether the thickness of the perovskite film is uniform.
[0006] In addition, the perovskite film thickness detection device according to the utility model may also have the following additional technical features:
[0007] In some embodiments of the present invention, the receiving module includes a receiving unit for receiving the second light, and the receiving unit is provided in plurality, and the plurality of the receiving units are arranged along the width direction of the perovskite film, and the plurality of the receiving units are suitable for moving along the width direction of the perovskite film.
[0008] In some embodiments of the present invention, the receiving module also includes: a sliding component, the sliding component includes: a slide rail, the slide rail extends along the width direction of the perovskite film; a slider, the slider is slidably disposed on the slide rail, there are multiple sliders, and the multiple receiving units are installed on the multiple sliders in a one-to-one correspondence.
[0009] In some embodiments of the present invention, the receiving module further includes: a driving assembly, and the driving assembly is drivingly connected to the plurality of sliders.
[0010] In some embodiments of the present invention, the light source module includes a plurality of light source units, the plurality of light source units are arranged along the width direction of the perovskite film, and each of the light source units corresponds to at least one of the receiving units.
[0011] In some embodiments of the present invention, the light source module is formed by splicing a plurality of the light source units end to end along the width direction of the perovskite film.
[0012] In some embodiments of the present invention, the device for detecting the thickness of the perovskite film further includes a conveying module, and the conveying module is suitable for conveying the light-transmitting substrate having the perovskite film.
[0013] In some embodiments of the present invention, the conveying module includes multiple rollers, and the rotation axis of the rollers extends along the width direction of the perovskite film. In the projection plane where the perovskite film is located, the emitting area of the light source module and the receiving area of the receiving module are both located between two adjacent rollers.
[0014] The utility model also provides a processing device having the thickness detection device of the perovskite film of the above embodiment.
[0015] The processing equipment according to the embodiment of the utility model is a processing equipment for perovskite film, which includes a logistics track and a thickness detection device for the perovskite film. The logistics track is suitable for conveying a light-transmitting substrate with a perovskite film along a first direction.
[0016] Therefore, according to the processing equipment for perovskite film of the utility model, a thickness detection device can be set on the logistics track for processing the perovskite film to detect the thickness of the perovskite film, which can not only better detect the thickness of the perovskite film, but also improve the work efficiency of the thickness detection of the perovskite film.
[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:
[0019] Figure 1 The invention discloses a thickness detection device according to an embodiment of the invention.
[0020] Figure 2 The invention discloses a thickness detection device according to an embodiment of the invention.
[0021] Reference numerals:
[0022] Thickness detection device 100,
[0023] Light source module 1, light source unit 11,
[0024] Receiving module 2, receiving unit 21,
[0025] Perovskite film 3, multi-channel ammeter 4, processor 5. DETAILED DESCRIPTION
[0026] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0027] In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.
[0028] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0029] The utility model discloses a thickness detection device 100 of a perovskite film 3. Regarding the perovskite film 3, it is necessary to explain that the perovskite film 3 is a semiconductor material with a crystal structure of ABX3 (A is an organic cation or an inorganic cation, B is a transition metal ion, and X is a halogen ion). At present, most perovskite films 3 are used in the field of solar cells. Among them, the photoelectric conversion efficiency of perovskite solar cells can reach more than 20%, which is significantly better than traditional silicon solar cells.
[0030] In addition, perovskite solar cells are widely regarded as the next generation of photovoltaic technology due to their simple process, low manufacturing cost and high photoelectric conversion efficiency. Moreover, compared with the current mainstream commercial silicon cells that need to assemble pieces of cells, perovskite solar cells have the advantage of being able to be directly prepared on a large scale. However, for perovskite solar cells with large-area characteristics, the lack of uniformity detection methods for the thickness of the perovskite film layer is an important shackle that currently restricts the industrialization development of perovskites. Moreover, most of the current thickness detection equipment is difficult to integrate into the logistics track for online detection. A few compatible online equipment detection modules and light source modules 1 are also integrated and can only detect samples and films of the same size. These instruments and equipment are very difficult and complicated to implement, and cannot meet the needs of multi-size customization.
[0031] Based on this, the utility model proposes a thickness detection device 100 for a perovskite film 3, which can not only better detect the thickness of the perovskite film layer of a perovskite solar cell with large-area characteristics, but also perform online detection on a logistics track.
[0032] Reference below Figure 1 A device 100 for detecting the thickness of a perovskite film 3 according to an embodiment of the present invention is described.
[0033] Taking the example of transporting a light-transmitting substrate with a perovskite film 3 along a first direction, the first direction here may be the transport direction of a logistics track. The thickness detection device 100 of the perovskite film 3 according to the embodiment of the utility model can detect the thickness of the perovskite film 3 on the logistics track.
[0034] Specifically, the thickness detection device 100 of the perovskite film 3 according to the embodiment of the utility model includes a light source module 1 and a receiving module 2, and the light source module 1 and the receiving module 2 are respectively located on both sides of the thickness direction of the perovskite film 3. The thickness direction here can refer to Figure 1 In the up and down directions in the figure, the light source module 1 has a first light emitted toward the perovskite film 3, the first light passes through the perovskite film 3 to form a second light, the first light has a first light intensity, the second light has a second light intensity, the first light intensity is greater than the second light intensity, and the receiving module 2 is used to receive the second light of the second light intensity to determine the thickness of the perovskite film 3. It should be noted that the first light can be directly emitted from the light source module 1 toward the perovskite film 3, or it can be emitted by the light source module 1 and then reflected, so that the light emitted to the perovskite film 3 after reflection is the first light.
[0035] That is to say, the perovskite film 3 has a certain light absorption. When light passes through the perovskite film 3, part of the light is absorbed, so the light intensity is reduced. According to the Lambert-Beer law, the light intensity absorbed by the perovskite film 3 is linearly related to the thickness of the perovskite film 3. Therefore, by comparing the first light intensity and the second light intensity, the light intensity absorbed by the perovskite film 3 can be obtained, and then the thickness of the perovskite film 3 can be obtained according to the Lambert-Beer law. After the receiving module 2 receives the second light intensity of the second light, this process can be sent to the processor 5, and the processor 5 can be a computer. Then, the thickness of the perovskite film 3 is obtained intelligently through a computer program, thereby realizing the detection of the thickness of the perovskite film 3 on the logistics track. Even, according to the continuously acquired detection data, a two-dimensional distribution diagram of the thickness of the perovskite film 3 can be constructed in the width direction of the perovskite film 3 and the transportation direction of the perovskite film 3, so as to more intuitively reflect the thickness of the perovskite film 3.
[0036] In addition, it should be further explained that the light source module 1 and the receiving module 2 are respectively located on both sides of the thickness direction of the perovskite film 3. The thickness direction here can refer to Figure 1 In the up and down directions shown in FIG, the light source module 1 and the receiving module 2 are independently adjustable and are spaced apart from the perovskite film 3. Figure 1 In the example shown, the light source module 1 is located above the perovskite film 3, and the receiving module 2 is located below the perovskite film 3. The light source module 1 and the receiving module 2 are independent of each other, and the light source module 1 and the receiving module 2 can be produced, manufactured, assembled and repaired separately without interfering with each other. Compared with the related art in which the light source module 1 and the receiving module 2 are manufactured as one body, the light source module 1 and the receiving module 2 designed independently of each other can adapt to more detection environments and installation positions, have good flexibility and are easy to maintain. Moreover, compared with the contact-type detection device for the thickness of the perovskite film 3 in the related art, the light source module 1 and the receiving module 2 of the present application are separated from the perovskite film 3, so as not to cause damage to the perovskite film 3.
[0037] Optionally, in a second direction perpendicular to the first direction, the position of at least one of the emission area of the light source module 1 and the receiving area of the receiving module 2 is adjustable. Figure 1 In a specific example shown in FIG. 1 , the first direction is the front-to-back direction, and the second direction is the left-to-right direction. Meanwhile, the second direction may also be the width direction of the perovskite film 3. In addition, it should be noted that: Figure 1 The perovskite film 3 is only a schematic diagram for the convenience of describing the present application and does not represent the actual perovskite film 3.
[0038] Furthermore, the light source module 1 is located above the perovskite film 3, and the receiving module 2 is located below the perovskite film 3. The light source module 1 can continuously emit light, and the light can be line light or surface light. What needs to be explained here about the line light and the surface light is that, in the projection plane perpendicular to the direction of the light path, the line light is a line segment on the projection plane, and the surface light is an area on the projection plane. By comparison, it can be seen that the line light has better focusing performance and can be better applied to the thickness detection device 100 of the present application.
[0039] In one example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 can continuously emit linear light, and after passing through the perovskite film 3, the receiving module 2 can continuously receive the transmitted linear light, and then continuously detect the thickness of the perovskite film 3 through which the linear light passes. In another example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 can continuously emit linear light, and after passing through the perovskite film 3, the receiving module 2 can be opened at a predetermined interval to receive the transmitted linear light, thereby detecting the thickness of the perovskite film 3 through which the linear light passes. In another example, the perovskite film 3 can be transported in a direction from back to front. During the transportation of the perovskite film 3, the light source module 1 and the receiving module 2 can be opened at the same time at a predetermined interval to receive the transmitted linear light, thereby detecting the thickness of the perovskite film 3 through which the linear light passes. Therefore, the thickness detection device 100 of the present application can detect the thickness of the perovskite film 3 according to actual needs, and the above examples are not intended to limit the present application.
[0040] Furthermore, when the width of the perovskite film 3 changes, the position of the emission area of the light source module 1 can be adjusted in the direction of the width of the perovskite film 3, the position of the receiving area of the receiving module 2 can be adjusted, and the positions of the emission area of the light source module 1 and the receiving area of the receiving module 2 can also be adjusted at the same time. Here, taking the adjustment of the position of the emission area of the light source module 1 as an example, in the direction of the width of the perovskite film 3, the light emission angle of the light source module 1 can be adjusted, and the size of the light source module 1 can be adjusted, so as to increase the emission range of the emission area of the light source module 1, thereby achieving the purpose of adjusting the position of the emission area of the light source module 1. The position of the light source module 1 can also be adjusted to achieve the purpose of adjusting the position of the emission area of the light source module 1. Therefore, even if the width of the perovskite film 3 changes, the thickness of the perovskite film 3 can be better detected, so that the thickness detection device 100 of the present application can not only detect the thickness of the perovskite film 3 on the logistics track, but also can detect the thickness of the perovskite film 3 after the width of the perovskite film 3 changes.
[0041] Therefore, according to the thickness detection device 100 of the perovskite film 3 of the embodiment of the utility model, by making the light source module 1 and the receiving module 2 designed separately and respectively arranged on both sides of the thickness direction of the perovskite film 3, the light source module 1 and the receiving module 2 can adapt to more detection environments and installation positions, with good flexibility and convenient maintenance. In addition, the position of at least one of the emission area of the light source module 1 and the receiving area of the receiving module 2 is adjustable, even if the width of the perovskite film 3 changes, the thickness of the perovskite film 3 can be well detected, and the thickness detection device 100 of the utility model can well detect a larger area of the perovskite film 3, with a large coverage area, so as to better confirm whether the thickness of the perovskite film 3 is uniform.
[0042] In some embodiments of the present invention, the receiving module 2 includes a receiving unit 21 for receiving the second light, and a plurality of receiving units 21 are provided, and the plurality of receiving units 21 are arranged along the second direction, and the plurality of receiving units 21 are all suitable for moving along the second direction. It should be noted here that the plurality in this application refers to two or more than two, and the plurality in the following text is also the same, and will not be repeated in the following text.
[0043] Reference Figure 1 In a specific example shown, four receiving units 21 are provided, and the four receiving units 21 are spaced apart in the left-right direction, so that light passing through the perovskite film 3 at four different positions in the width direction of the perovskite film 3 can be received. In this way, when the width of the perovskite film 3 changes, the positions of the four receiving units 21 can be adjusted, thereby realizing the detection of the thickness at the corresponding position of the perovskite film 3.
[0044] Here, it should be noted that the number of receiving units 21 may also be three, five, six, etc., and there is no limitation here.
[0045] Optionally, the movements of the multiple receiving units 21 in the second direction are independent of each other and do not interfere with each other. Therefore, the positions of the receiving units 21 can be adjusted according to actual needs to detect the thickness of the perovskite film 3 at different positions.
[0046] In some embodiments of the utility model, the receiving module 2 further includes: a sliding assembly, the sliding assembly includes a slide rail and a slider, the slide rail extends along the second width direction, the slider is slidably arranged on the slide rail, there are multiple sliders, and multiple receiving units 21 are installed on the multiple sliders in a one-to-one correspondence. Thus, through the cooperation of the slide rail and the slider, the receiving unit 21 can stably move along the second direction, and here, the movement of the slider can be manual, that is, for perovskite films 3 of different widths, it is only necessary to manually adjust the position of the slider, and then fix the position of the slider, so that the receiving unit 21 can stably receive light, which is simple to operate and has good stability.
[0047] Furthermore, the movement of the slider can also be automatic. Specifically, the receiving module 2 also includes a driving component, which is connected to the plurality of sliders in a transmission manner. In a specific example, the thickness detection device 100 can also include a detector, which can obtain the width information of the perovskite film 3. Then, the controller can control the driving component to drive the slider to move according to the width information, thereby intelligently adjusting the position of each receiving unit 21, which is simple, convenient, and can also save manpower.
[0048] In some embodiments of the present invention, the light source module 1 includes a plurality of light source units 11, the plurality of light source units 11 are arranged along the second direction, and each light source unit 11 corresponds to at least one receiving unit 21. That is, in one example, the light emitted by one light source unit 11 can be received by one receiving unit 21 after passing through the perovskite film 3, and in another example, the light emitted by one light source unit 11 can be received by two or more receiving units 21 after passing through the perovskite film 3.
[0049] In a specific example, light emitted by a light source unit 11 can be received by two receiving units 21 after passing through the perovskite film 3. Under specific working conditions, the two receiving units 21 can be turned on to receive light at the same time or separately, and there is no limitation here.
[0050] Furthermore, when the position of the light source unit 11 changes, the position of the receiving unit 21 will also change synchronously with the position of the light source unit 11, and vice versa.
[0051] Optionally, the light source unit 11 is suitable for emitting line light toward the perovskite film 3 , and the optical path of the line light is perpendicular to the perovskite film 3 , thereby better reducing the detection error of the thickness of the perovskite film 3 .
[0052] Optionally, the light source module 1 is formed by splicing a plurality of light source units 11 end to end along the second direction. In one example, when the width of the perovskite film 3 increases, the number of light source units 11 can be further increased, that is, new light source units 11 can be spliced on the left and right sides of the original number of light source units 11, which is simple and convenient to operate. Furthermore, when one of the light source units 11 is damaged, the damaged light source unit 11 can be disassembled and replaced or repaired, which can reduce the maintenance cost, and at the same time will not affect the thickness detection efficiency of the titanium film, thereby improving work efficiency.
[0053] Optionally, the thickness detection device 100 also includes a conveying module, which is suitable for conveying a light-transmitting substrate with a perovskite film 3. In one example, the conveying module may be a part of a logistics track. In another example, the conveying module may be placed between two adjacent sections of the logistics track. The light-transmitting substrate with the perovskite film 3 may be transported from one section of the track to the conveying module to complete the thickness detection of the perovskite film 3, and then transported to another section of the track. This will not only not affect the transportation of the light-transmitting substrate with the perovskite film 3 by the logistics track, but also allow the thickness detection device 100 to be set at any position on the logistics track.
[0054] Optionally, the conveying module includes multiple rollers, and the rotation axis of the rollers extends along the second direction. In the projection plane where the perovskite film 3 is located, the emitting area of the light source module 1 and the receiving area of the receiving module 2 are both located between two adjacent rollers. Thus, through the conveying of multiple rollers, not only the conveying of the transparent substrate with the perovskite film 3 can be guaranteed, but it is also beneficial to the arrangement of the light source module 1 and the receiving module 2, so that the thickness detection device 100 can better detect the thickness of the perovskite film 3.
[0055] The present utility model also provides a processing device having the thickness detection device 100 of the perovskite film 3 according to the above embodiment.
[0056] The processing equipment according to the embodiment of the utility model is a processing equipment for a perovskite film 3, and the processing equipment includes a logistics track and a thickness detection device 100 for the perovskite film 3, and the logistics track is suitable for conveying a light-transmitting substrate with a perovskite film 3 along a first direction.
[0057] Therefore, according to the processing equipment for the perovskite film 3 of the utility model, a thickness detection device 100 can be set on the logistics track for processing the perovskite film 3 to detect the thickness of the perovskite film 3, which can not only better detect the thickness of the perovskite film 3, but also improve the work efficiency of the thickness detection of the perovskite film 3.
[0058] Reference below Figure 2A device 100 for detecting the thickness of a perovskite film 3 according to an embodiment of the present invention is described.
[0059] like Figure 2 As shown, according to the embodiment of the utility model, the thickness detection device 100 of the perovskite film 3 includes a light source module 1 and a receiving module 2. The light source module 1 and the receiving module 2 are respectively located on both sides of the thickness direction of the perovskite film 3. The light source module 1 is used to emit a first light toward the perovskite film 3. The first light passes through the perovskite film 3 to form a second light. The first light has a first light intensity, and the second light has a second light intensity. The first light intensity is greater than the second light intensity. The receiving module 2 is used to receive the second light of the second light intensity to determine the thickness of the perovskite film 3. It should be noted here that the thickness detection device 100 can also detect other films, such as semi-transparent and semi-reflective films. What needs to be explained about the semi-transparent and semi-reflective films is that part of the light toward the semi-transparent and semi-reflective film can pass through the semi-transparent and semi-reflective film, and part of it can be reflected by the semi-transparent and semi-reflective film.
[0060] For perovskite solar cells with large-area characteristics, ensuring the uniformity of the perovskite film 3 has an absolute impact on the overall component performance during the large-area preparation process. However, the current test of the uniformity of the perovskite film 3 is either done by sampling or cannot be integrated into the production line. The cost of a small number of equipment that can simultaneously achieve large-area rapid testing is very high, so it is very important to develop a film uniformity test with a suitable cost.
[0061] In addition, most of the current thickness detection equipment is difficult to integrate into logistics tracks for online non-destructive testing. One of the reasons is that the online non-destructive testing process requires very high accuracy of the detection module. Traditional high-precision photoelectric detectors are often expensive. The cost of achieving fast and high-precision testing at the square meter level is as high as hundreds of thousands to millions. Therefore, the above reasons are important shackles restricting the industrialization development of perovskite.
[0062] Based on this, the present application proposes a thickness detection device 100, the detection module of which has high detection accuracy and low production cost.
[0063] Specifically, the receiving module 2 includes a solar cell and an ammeter electrically connected to the solar cell. The solar cell is low in cost and can be easily manufactured to have a larger coverage area. Figure 2In a specific example shown, the perovskite film 3 is transported from back to front, the light source module 1 is arranged above the perovskite film 3, and the receiving module 2 is arranged below the perovskite film 3, thereby, in the process of the perovskite film 3 being transported from back to front, the light source module 1 can continuously emit light toward the perovskite film 3, and the receiving module 2 can continuously receive light passing through the perovskite film 3, and the receiving module 2 is composed of solar cells, and solar cells can be easily manufactured in a larger area and have a low production cost. Therefore, in the left and right directions, the solar cells can better cover the bottom of the perovskite film 3, and even in the left and right directions, the width of the solar cells is greater than the width of the perovskite film 3, thereby, the width of the perovskite film 3 can be fully covered by the light source module 1 and the receiving module 2, and in the process of the perovskite film 3 being transported from back to front, the overall thickness of the perovskite film 3 can be detected.
[0064] Therefore, according to the thickness detection device 100 of the embodiment of the utility model, the cost of the receiving module 2 can be reduced by making the receiving module 2 include a solar cell and an ammeter, and the solar cell can absorb light better, so the second light of the second light intensity can be better absorbed, thereby better improving the detection accuracy of the thickness of the perovskite film 3.
[0065] In some embodiments of the present invention, the solar cell is a crystalline silicon solar cell. The solar cell made of silicon crystal has high efficiency, good stability, good durability, wide illumination conditions, and is easy to manufacture. Specifically, the conversion efficiency of the crystalline silicon solar cell can reach more than 22%, which is one of the most efficient types of solar cells. The crystalline silicon solar cell has good stability and can still maintain a high efficiency under low light intensity. The life of the crystalline silicon solar cell is relatively long, which can reach more than 20-25 years. The crystalline silicon solar cell can be used under various illumination conditions such as indoors, outdoors, sunny days, rainy days, and even cloudy days. Compared with other solar cells, the manufacturing process of the crystalline silicon solar cell is simpler and the cost is relatively low. Therefore, the thickness detection device 100 of the present invention can not only reduce the production cost, but also reduce the maintenance cost, and can also better improve the detection accuracy of the thickness of the perovskite film 3.
[0066] In some embodiments of the present invention, Figure 2As shown, the light source module 1 includes a plurality of light source units 11, and the plurality of light source units 11 are spliced end to end along the width direction of the perovskite film 3. In one example, when the width of the perovskite film 3 increases, the number of light source units 11 can be further increased, that is, new light source units 11 can be spliced on the left and right sides of the original number of light source units 11, which is simple and convenient to operate. Furthermore, when one of the light source units 11 is damaged, the damaged light source unit 11 can be disassembled and replaced or repaired, which can reduce the maintenance cost, and at the same time will not affect the thickness detection efficiency of the perovskite film, thereby improving work efficiency.
[0067] In some embodiments of the present invention, Figure 2 As shown, the solar cell includes a plurality of receiving units 21, and the plurality of receiving units 21 are spliced end to end along the width direction of the perovskite film 3. In one example, when the width of the perovskite film 3 increases, the number of receiving units 21 can be further increased, that is, new receiving units 21 can be spliced on the left and right sides of the original number of receiving units 21, which is simple and convenient to operate. Furthermore, when one of the receiving units 21 is damaged, the damaged receiving unit 21 can be disassembled and replaced or repaired, which can reduce the maintenance cost, and at the same time will not affect the thickness detection efficiency of the perovskite film, thereby improving the work efficiency.
[0068] Alternatively, if Figure 2 As shown, the ammeter is a multi-channel ammeter 4, which is used to obtain the current of each receiving unit 21. The multi-channel ammeter 4 is an instrument that can measure multiple current channels at the same time, that is, the light passing through the perovskite film 3 can be received by multiple receiving units 21, and each receiving unit 21 can be detected by the multi-channel ammeter 4 after absorbing the light and converting it into current. In this way, it can be understood that in the width direction of the perovskite film 3, the perovskite film 3 can be divided into multiple sections by multiple receiving units 21, and by detecting the thickness of each section of the perovskite film 3, the detection accuracy of the thickness of the perovskite film 3 can be improved.
[0069] Other structures and operations of the thickness detection device 100 and processing equipment of the perovskite film 3 according to the embodiment of the utility model are known to ordinary technicians in the field and will not be described in detail here.
[0070] In the description of this specification, the description with reference to the terms "some embodiments", "optionally", "further" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0071] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.
Claims
1. A device for detecting the thickness of a perovskite film, It is characterized in that The thickness detection device comprises: A light source module and a receiving module, wherein the light source module and the receiving module are respectively located on both sides of the thickness direction of the perovskite film, the light source module has a first light emitted toward the perovskite film, the first light passes through the perovskite film to form a second light, the first light has a first light intensity, the second light has a second light intensity, the first light intensity is greater than the second light intensity, and the receiving module is used to receive the second light of the second light intensity to determine the thickness of the perovskite film, wherein, The light source module and the receiving module are both independently adjustable and are spaced apart from the perovskite film. In the width direction of the perovskite film, a position of at least one of the emission area of the light source module and the receiving area of the receiving module is adjustable.
2. The device for detecting the thickness of a perovskite film according to claim 1, It is characterized in that The receiving module includes a receiving unit for receiving the second light, and a plurality of the receiving units are provided. The plurality of the receiving units are arranged along the width direction of the perovskite film, and the plurality of the receiving units are all suitable for moving along the width direction of the perovskite film.
3. The device for detecting the thickness of the perovskite film according to claim 2, It is characterized in that The receiving module further includes: a sliding component, the sliding component including: A slide rail extending along a width direction of the perovskite film; A slider is slidably arranged on the slide rail, there are multiple sliders, and multiple receiving units are installed on the multiple sliders in a one-to-one correspondence.
4. The device for detecting the thickness of a perovskite film according to claim 3, It is characterized in that The receiving module further comprises: a driving assembly, which is drivingly connected to the plurality of sliding blocks.
5. The device for detecting the thickness of a perovskite film according to claim 2, It is characterized in that The light source module includes a plurality of light source units, which are arranged along a width direction of the perovskite film, and each of the light source units corresponds to at least one of the receiving units.
6. The device for detecting the thickness of a perovskite film according to claim 5, It is characterized in that The light source module is formed by splicing a plurality of the light source units end to end along the width direction of the perovskite film.
7. The device for detecting the thickness of a perovskite film according to any one of claims 1 to 6, It is characterized in that It also includes a conveying module, which is suitable for conveying the light-transmitting substrate with the perovskite film.
8. The device for detecting the thickness of a perovskite film according to claim 7, It is characterized in that The conveying module includes a plurality of rollers, the rotation axes of the rollers extend along the width direction of the perovskite film, and within the projection plane where the perovskite film is located, the emission area of the light source module and the receiving area of the receiving module are both located between two adjacent rollers.
9. A processing device for perovskite thin film, It is characterized in that include: A logistics track and a thickness detection device for a perovskite film as described in any one of claims 1 to 8, wherein the logistics track is suitable for conveying a light-transmitting substrate having the perovskite film along a first direction.
10. A processing device for perovskite thin film, It is characterized in that include: A logistics track and a thickness detection device for a perovskite film as described in claim 7, wherein the logistics track is suitable for conveying a light-transmitting substrate having the perovskite film along a first direction, and the conveying module is placed between two adjacent sections of the logistics track.